CN110017923A - A kind of flexible sensor and preparation method thereof - Google Patents
A kind of flexible sensor and preparation method thereof Download PDFInfo
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- CN110017923A CN110017923A CN201910395010.2A CN201910395010A CN110017923A CN 110017923 A CN110017923 A CN 110017923A CN 201910395010 A CN201910395010 A CN 201910395010A CN 110017923 A CN110017923 A CN 110017923A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
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- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The present invention provides a kind of flexible sensor and preparation method thereof.The flexible sensor includes flexible substrates, electrode, liquid metal film and flexible package layer；Liquid metal film is located in flexible substrates, is made of the liquid metal particle of surface oxidation；Flexible package layer is located at liquid metal film surface；Electrode is located in flexible substrates, for monitoring the interregional electric signal of liquid metal film；Under external force, the resistance between electrode is low resistance by high resistance variation, then judges the external force for nocuity external force.The flexible sensor can perceive external injury active force, which can be expanded electronic skin function in electronic skin.
Description
Technical field
The present invention relates to flexible electronic technical fields more particularly to a kind of flexible sensor and preparation method thereof
Background technique
With the development of the industries such as robot, intelligent artificial limb, electronics of the people to the anthropoid skin with highly flexible
The demand of skin is higher and higher.It is developed a series of flexible sensing elements for electronic skin at present, such as pressure, temperature
The induction element of the signals such as degree, stretching, the integrated level of electronic skin are just gradually being improved with function complexity.
People imitate human skin always and design electronic skin.The outer signals that human skin is received are divided into
Two major classes, the fanout free region signal to skin texture non-invasi and the nocuity signal to haveing damage property of skin texture.Largely
The sensor of detection fanout free region signal is distributed in skin corium, and is largely monitored the sensor of nocuity signal and be distributed in epidermis
Layer, to protect internal sensing system, to make whole system steady operation.
Currently, the sensor for detecting fanout free region signal is quickly grown, and it is used to perceive the sensing of nocuity signal
Device is seldom implemented.Therefore it provides can perceive the sensor that skin sustains an injury can further expand electronic skin function.
Summary of the invention
Status in view of the above technology, the present invention is intended to provide a kind of flexible sensing that can perceive external injury active force
The sensor integration can be expanded electronic skin function by device in electronic skin.
In order to achieve the above technical purposes, technical solution provided by the invention are as follows: a kind of flexible sensor, including flexible base
Bottom, electrode, liquid metal film and flexible package layer；
Liquid metal film is located in flexible substrates, is made of the liquid metal particle of surface oxidation；
Flexible package layer is located at liquid metal film surface；
Electrode is located in flexible substrates, for monitoring the interregional electric signal of liquid metal film；
Under external force, the resistance between electrode is low resistance by high resistance variation, then judges the external force for nocuity
External force.
The flexible substrates have flexibility, and the deformation such as can bend, stretch, reversing.Also, the flexible substrates are not
Infiltrate liquid metal, that is, contact angle of the liquid metal on the flexible substrates surface is larger, and liquid metal particle is in the flexible substrates
Surface is in island, that is, the expansion that can not tile forms coating.
The flexible base material is unlimited, including dimethyl silicone polymer (PDMS), PU, PI, PET, PVC etc..
The liquid metal includes but is not limited to gallium (Ga), gallium (Ga)-indium (In) alloy, gallium (Ga)-indium (In)-tin
(Sn) gallium, gallium-indium alloy, the gallium-indium-tin alloy of one or more doping of alloy and transition metal, solid-state nonmetalloid
Deng.
The electrode has good electric conductivity.The electrode material is unlimited, including liquid metal and solid metallic etc..
Preferably, the liquid metal particle of surface oxidation is connected with each other in the liquid metal film.
Preferably, the electrode is flexible electrode, the deformation such as can bend, stretch, reverse, equal under deformation condition
For excellence conductor.
In order to improve the detectivity to nocuity external force, the electrode uses array distribution, to improve distribution of electrodes
Density monitors the electric conductivity in each region of liquid metal film to improve electrode.The electrod-array material is unlimited, including liquid
State metal, silver nanowires, copper nano-wire, graphene, carbon nanotube etc..
The flexible package layer has flexibility, and the deformation such as can bend, stretch, reversing.The flexible package layer
Material is unlimited, including dimethyl silicone polymer (PDMS), PU, PI, PET, PVC etc..Preferably, the flexible package layer material
Using the flexible material with modified selfreparing, such as modified selfreparing PDMS, modified selfreparing PI etc..
The external force form is unlimited, can be mechanical force, pressure, gravity etc..
The present invention also provides a kind of methods for preparing above-mentioned flexible sensor, include the following steps:
(1) electrode is prepared on flexible substrates surface；
(2) flexible substrates are placed in cavity, physical gas phase deposition technology is used after vacuumizing, it is heavy on flexible substrates surface
Hydrops state metallic particles, then admits air into cavity, and liquid metal particle is oxidized；
In the step (2), liquid metal particle is deposited on flexible substrates surface, is in island growth, obtains discrete liquid
State metallic particles, oxidated solution state surface of metal particles form nanoscale film, make between liquid metal particle in insulation state；
In the step (2), the physical vaporous deposition is unlimited, including resistance heat evaporation coating techniques, electron beam
Evaporation coating techniques, magnetron sputtering technology etc..
(3) the liquid metal film surface made from step (2) prepares flexible package layer.
Preferably, carrying out following steps (2-1) after the step (2), then step (3) are carried out:
(2-1) repeats step (2) at least 1 time；
In the step (2-1), liquid metal is regrowed in the liquid metal particle film surface that step (2) obtain
Liquid metal particle after aoxidizing obtained in step before can be attached by grain film, obtain the liquid gold of multilayer stacking
Belong to film, to improve the connectivity of the liquid metal particle after each oxidation, to be conducive under external force due to liquid gold
Metal surface oxide film breakdown and with electrode formed be conductively connected.
By the parameter of physical vapour deposition (PVD) in regulating step (2) and step (2-1), the electricity between electrode is adjusted
Resistance.
It is unlimited in the method that flexible substrates surface prepares electrode in the step (1), including printing, coating, deposition etc..
In the step (3), the method for preparing flexible package layer is unlimited, including printing, coating, deposition etc..
Flexible sensor provided by the invention utilizes liquid metal particle the characteristics of flexible substrates surface is in island growth,
The liquid metal film being made of the liquid metal particle of discrete surface oxidation is obtained, the liquid metal is thin by electrode measurement
Resistance between film certain area, in the initial state, the resistance between electrode are in high-impedance state, when applying external force, in the external force
Lower flexible package layer damage is acted on, the surface film oxide of liquid metal particle is ruptured by external force, liquid metal particle and electricity
When pole connects to form conductive path, the resistance variations between electrode are low resistance state, that is, can be sentenced according to the variation of resistance state between electrode
The nocuity of disconnected external force: when the resistance between the flexible sensor under external force electrode is low by high resistance state variation
When resistance states, then judge that the external force for nocuity external force, when resistance keeps high resistance state, then judges the external force for non-wound
Evil property external force.Compared with prior art, the invention has the following beneficial effects:
(1) flexible sensor of the invention can perceive external injury external force, by the sensor integration in electronics
Electronic skin function can be expanded in skin.
(2) it is adjusted by the preparation process of liquid metal film, can be obtained before and after the external force that resistance is between electrode
The state resistance value that insulate and metal resistance value, therefore resistance variations amplitude is big before and after external force, on-off ratio with higher, Neng Gouti
High detection sensitivity.
(3) when the resistance between electrode be low resistance state when, electrode both ends apply voltage, when electric current be more than certain threshold value,
Electromigration occurs for liquid metal particle, disconnects the conductive path, and the resistance between electrode can be restored to high-impedance state.This
In the case of, when flexible package layer material selects the material with self-repair function, that is, the flexible envelope being damaged under external force
" wound " for filling layer has self-healing, which has the repair ability of function and structure, can be used multiple times.
(4) flexible sensor of the invention can be combined with common touch sensor, and the latter monitors pressure size, in skin
Early warning is carried out before damaged, the former is responsible for positioning after injury, monitor.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the flexible sensor in the embodiment of the present invention 1.
Fig. 2 is the schematic diagram of step (1) during preparing flexible sensor in the embodiment of the present invention 1.
Fig. 3 is the schematic diagram of step (2) during preparing flexible sensor in the embodiment of the present invention 1.
Fig. 4 is the schematic diagram of step (3) during preparing flexible sensor in the embodiment of the present invention 1.
Fig. 5 is sample structure schematic diagram made from step (3) during preparing flexible sensor in the embodiment of the present invention 1.
Fig. 6 is the schematic diagram of step (4) during preparing flexible sensor in the embodiment of the present invention 1.
Fig. 7 is the schematic diagram of step (5) during preparing flexible sensor in the embodiment of the present invention 1.
Fig. 8 is sample structure schematic diagram made from step (5) during preparing flexible sensor in the embodiment of the present invention 1.
Fig. 9 is the structural schematic diagram for the flexible sensor that external force is applied in the embodiment of the present invention 1.
Figure 10 is the structural schematic diagram of the flexible sensor in the embodiment of the present invention 2.
Figure 11 is the resistance variations of the flexible sensor before and after the nocuity external force in the embodiment of the present invention 1, and
Resistance variations after nocuity external force in the case where applying current condition.
Specific embodiment
Below with reference to embodiment, present invention is further described in detail with attached drawing, it should be pointed out that reality as described below
It applies example to be intended to convenient for the understanding of the present invention, and does not play any restriction effect to it.
Appended drawing reference therein are as follows: flexible substrates 1, evaporation boat 2, intake valve 3, vacuum pump solenoid valve 4, liquid metal droplet
5, cavity 6, liquid metal steam 7, liquid metal particle 8, liquid metal particle 9, electrode 10, encapsulated layer 11, knife 12, liquid gold
Belong to film 13.
Embodiment 1:
In the present embodiment, flexible sensor structure is as shown in Figure 1, include flexible substrates 1, electrode 10, liquid metal film
13 and encapsulated layer 11.
Liquid metal film 13 is located in flexible substrates 1, is made of the liquid metal particle of surface oxidation.
Encapsulated layer 11 is located at liquid metal film surface.
Electrode is located in flexible substrates, for monitoring the interregional electric signal of liquid metal film.
Flexible substrates 1 use selfreparing PU material.Encapsulated layer 11 uses selfreparing PU material.
Electrode is the strip liquid metal/copper electrode of liquid metal and Micron-Sized Copper Powders Coated being compounded to form, wherein liquid gold
Category is gallium-indium-tin alloy, each element weight percentage are as follows: Ga67.5%, In 22.5%, Sn 10%.
The flexible sensor the preparation method is as follows:
(1) as shown in Fig. 2, two rows of bar shaped liquid metal/copper electrodes 10 are made using mould printing in flexible substrates 1.
(2) as shown in figure 3, by step (1), treated that flexible substrates are placed in the cavity 6 of thermal evaporation apparatus, in cavity 6
Evaporation boat 2 is also set up, 3ml liquid metal droplet 5 is weighed and is placed in evaporation boat 2, liquid metal is gallium indium tin in the present embodiment
Alloy opens vacuum pump solenoid valve 4 and is evacuated to air pressure less than 3 × 10 to cavity4Pa。
(3) as shown in figure 4, opening evaporation power supply, the evaporation of liquid metal droplet 5 in evaporation boat 2 forms steam 7, soft
Property 1 surface of substrate deposit one layer of film being made of liquid metal particle 8, liquid metal particle 1 surface of flexible substrates be in from
Island growth is dissipated, control evaporation time is 5 minutes, and liquid metal particle diameter can reach 10 microns；Then, stop evaporation, close
Vacuum pump solenoid valve 4 is closed, intake valve 3 is opened, release air enters in cavity, so that liquid metal surface is formed one layer of about 3nm thick
Oxide layer, obtain sample structure as shown in Figure 5.
(4) as shown in fig. 6, the sample that step (3) obtains is placed again into cavity 6, the liquid gold in evaporation boat 2 is supplemented
Belong to drop 5 and reach 3ml, opens vacuum pump solenoid valve 4 and air pressure is evacuated to less than 3 × 10 to cavity4Pa。
(5) as shown in fig. 7, opening evaporation power supply, the evaporation of liquid metal droplet 5 in evaporation boat 2 forms steam 7, soft
Property substrate 1 film surface depositing liquid metallic particles 9, control evaporation time be 2 minutes, the diameter of liquid metal particle 9 can
Reach 4 microns；Then, stopping evaporation, close vacuum pump solenoid valve 4, open intake valve 3, release air enters in cavity,
So that 9 surface of liquid metal particle is formed the oxide layer of one layer of about 3nm thickness, obtains sample structure as shown in Figure 8.
(6) paint-on technique is used, the liquid metal film table for the sample that layer material is obtained coated in step (5) will be encapsulated
Then face solidifies, obtain encapsulated layer 11, obtains sample structure as shown in Figure 1.
When encapsulated layer of the external force in sample obtained above, it can determine whether that this is outer according to the resistance variations between electrode
Whether power is nocuity external force.For example, as shown in Figure 1, since the liquid metal particle surface in liquid metal film 13 is oxygen
Change film, liquid metal film 13 is in insulation state, and the resistance between electrode both ends is in high-impedance state.As shown in figure 9, on encapsulated layer 11
Apply external force with knife 12, under the external force, if flexible package layer 11 damages, and the liquid gold of liquid metal particle film
Metal particles surface film oxide is ruptured by external force, electricity when liquid metal particle and electrode form conductive path, between electrode
Resistive turns to low resistance state, as shown in figure 11；If resistance when liquid metal particle and the not formed conductive path of electrode, between electrode
Keep high-impedance state.That is, can determine whether the external force is nocuity according to the variation of resistance state between electrode before and after applying external force with knife
External force: when it is low resistance state that the resistance under the external force between electrode is by high resistance state variation, then judge that this is outer
Power is nocuity external force；When resistance keeps high resistance state, then judge the external force for non-nocuity external force.
In addition, when the resistance variations under the external force between electrode are low resistance state electricity can be applied at electrode both ends
Pressure, control electric current increase, and as shown in figure 11, when electric current reaches 31mA, resistance is restored to high-impedance state, that is, liquid metal particle hair
Raw electromigration, disconnects the conductive path, and the resistance between electrode is restored to high-impedance state.Also, due to flexible package layer material
Expect that PU has self-repair function, after placing 12 hours at room temperature, the flexible package layer that is damaged under the external force
" wound " normal healing, therefore the flexible sensor have function and structure repair ability, can be used multiple times.
Flexible sensor in the present embodiment, which is integrated in electronic skin, can expand electronic skin function, can perceive, is fixed
Position, monitoring external injury external force.
Embodiment 2:
In the present embodiment, flexible sensor structure and the flexible sensor in embodiment 1 are essentially identical, except that being
The detectivity to nocuity external force is improved, lateral external force can not only be detected, and longitudinal external force can be detected,
Flexible sensor in the present embodiment consists of two parts, and first part's structure and the flexible sensor structure in embodiment 1 are complete
Exactly the same, second part structure is that the flexible sensor structure in embodiment 1 rotates clockwise 90 ° and obtains, by first part with
Second part stacking, obtains flexible sensor.
Technical solution of the present invention is described in detail in embodiment described above, it should be understood that the above is only
For specific embodiments of the present invention, it is not intended to restrict the invention, all any modifications made in spirit of the invention,
Supplement or similar fashion substitution etc., should all be included in the protection scope of the present invention.
Claims (15)
1. a kind of flexible sensor, it is characterized in that: including flexible substrates, electrode, liquid metal film and flexible package layer；
Liquid metal film is located in flexible substrates, is made of the liquid metal particle of surface oxidation；
Flexible package layer is located at liquid metal film surface；
Electrode is located in flexible substrates, for monitoring the electric signal between liquid metal film certain area；
Under external force, the resistance between electrode is low resistance by high resistance variation, then judges the external force for nocuity external force.
2. flexible sensor as described in claim 1, it is characterized in that: flexible base material include PDMS, PU, PI, PET,
PVC。
3. flexible sensor as described in claim 1, it is characterized in that: the liquid metal includes gallium (Ga), gallium (Ga)-indium
(In) one or more of doping of alloy, gallium (Ga)-indium (In)-tin (Sn) alloy and transition metal, solid-state nonmetalloid
Gallium, gallium-indium alloy, gallium-indium-tin alloy.
4. flexible sensor as described in claim 1, it is characterized in that: in the liquid metal film, the liquid of surface oxidation
State metallic particles is connected with each other.
5. flexible sensor as described in claim 1, it is characterized in that: the electrode is flexible electrode.
6. flexible sensor as described in claim 1, it is characterized in that: the electrode is in array distribution.
7. flexible sensor as described in claim 1, it is characterized in that: the flexible package layer material include PDMS, PU,
One or more of PI, PET, PVC.
8. flexible sensor as described in claim 1 it is characterized in that: the flexible package layer material uses there is modification to review one's lessons by oneself
Multiple flexible material；
Preferably, the flexible base material uses the flexible material with modified selfreparing.
9. flexible sensor as described in claim 1, it is characterized in that: when the resistance between electrode is low resistance, in electrode two
End applies voltage, and when electric current is more than certain threshold value, the resistance between electrode restores high-impedance state.
10. the preparation method of the flexible sensor as described in any claim in claim 1 to 9, it is characterized in that: including such as
Lower step:
(1) electrode is prepared on flexible substrates surface；
(2) flexible substrates are placed in cavity, physical gas phase deposition technology is used after vacuumizing, deposit liquid on flexible substrates surface
State metallic particles, then admits air into cavity, and liquid metal particle is oxidized；
(3) the liquid metal film surface made from step (2) prepares flexible package layer.
11. the preparation method of flexible sensor as claimed in claim 10, it is characterized in that: in the step (2), physical vapor
Sedimentation include one of resistance heat evaporation coating techniques, electron beam evaporation deposition technology, magnetron sputtering technology or
It is several.
12. the preparation method of flexible sensor as claimed in claim 10, it is characterized in that: being carried out such as after the step (2)
Lower step (2-1) then carries out step (3):
(2-1) repeats step (2) at least 1 time.
13. the preparation method of flexible sensor as claimed in claim 12, it is characterized in that: by regulating step (2) and walking
Suddenly in (2-1) physical vapour deposition (PVD) parameter, be adjusted electrode between resistance.
14. the preparation method of flexible sensor as claimed in claim 10, it is characterized in that: in the step (1), in flexible base
The method that bottom surface prepares electrode includes printing, coating, deposition.
15. the preparation method of flexible sensor as claimed in claim 10, it is characterized in that: preparation is flexible in the step (3)
The method of encapsulated layer includes printing, coating, deposition.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910395010.2A CN110017923A (en) | 2019-05-13 | 2019-05-13 | A kind of flexible sensor and preparation method thereof |
| PCT/CN2019/114306 WO2020228253A1 (en) | 2019-05-13 | 2019-10-30 | Flexible sensor and preparation method therefor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910395010.2A CN110017923A (en) | 2019-05-13 | 2019-05-13 | A kind of flexible sensor and preparation method thereof |
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| WO (1) | WO2020228253A1 (en) |
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| CN110017923A (en) * | 2019-05-13 | 2019-07-16 | 中国科学院宁波材料技术与工程研究所 | A kind of flexible sensor and preparation method thereof |
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| WO2020228253A1 (en) * | 2019-05-13 | 2020-11-19 | 中国科学院宁波材料技术与工程研究所 | Flexible sensor and preparation method therefor |
| WO2021017841A1 (en) * | 2019-07-18 | 2021-02-04 | 宁波韧和科技有限公司 | Capacitive elastic strain sensor, and preparation method and use therefor |
| CN110501086A (en) * | 2019-08-01 | 2019-11-26 | 电子科技大学 | A kind of flexibility temperature sensor and preparation method thereof |
| CN110501086B (en) * | 2019-08-01 | 2020-09-25 | 电子科技大学 | Flexible temperature sensor and preparation method thereof |
| WO2021072968A1 (en) * | 2019-10-15 | 2021-04-22 | 中国科学院宁波材料技术与工程研究所 | Method for preparing liquid metal thin film |
| CN112662999A (en) * | 2019-10-15 | 2021-04-16 | 中国科学院宁波材料技术与工程研究所 | Preparation method of liquid metal film |
| CN110823423A (en) * | 2019-11-22 | 2020-02-21 | 中国科学院理化技术研究所 | Liquid metal flexible pressure sensor and preparation method thereof |
| CN111035400A (en) * | 2019-12-25 | 2020-04-21 | 苏州大学附属儿童医院 | Flexible sensor for detecting skin expansion tension and use method thereof |
| CN111289165A (en) * | 2020-03-10 | 2020-06-16 | 中国第一汽车股份有限公司 | Device and method for measuring excitation force of cam shaft to cam bearing cover |
| CN111504522A (en) * | 2020-06-05 | 2020-08-07 | 吉林师范大学 | Capacitive flexible stretching sensor based on S-shaped micro-channel liquid metal composite dielectric layer |
| CN112195441A (en) * | 2020-09-28 | 2021-01-08 | 中国科学院宁波材料技术与工程研究所 | Method for preparing flexible electronic/quantum circuit by liquid metal |
| CN112539850A (en) * | 2020-12-04 | 2021-03-23 | 中国电力科学研究院有限公司 | Flexible double-parameter sensor for parallel measurement of temperature and strain and measurement method |
| CN113768496A (en) * | 2021-09-09 | 2021-12-10 | 清华大学 | Device for monitoring motion state of biological body surface or bionic body inner surface |
| CN114438663A (en) * | 2021-12-17 | 2022-05-06 | 宁波诺丁汉新材料研究院有限公司 | Breathable liquid metal-based elastic conductor composite film, preparation method and application |
| CN114895071A (en) * | 2022-04-27 | 2022-08-12 | 东南大学 | Self-powered flexible acceleration sensor and preparation method thereof |
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