CN114892268A

CN114892268A - Water-cooling jacket device and single crystal furnace

Info

Publication number: CN114892268A
Application number: CN202210544309.1A
Authority: CN
Inventors: 杨文武
Original assignee: Xian Eswin Material Technology Co Ltd
Current assignee: Xian Eswin Material Technology Co Ltd
Priority date: 2022-05-18
Filing date: 2022-05-18
Publication date: 2022-08-12
Also published as: TWI827250B; WO2023221366A1; TW202300727A

Abstract

The invention relates to a water cooling jacket device, which comprises a water cooling jacket body and a lifting structure for controlling the lifting of the water cooling jacket body; the water cooling jacket body comprises an inner cylinder and an outer cylinder positioned outside the inner cylinder; the lifting structure comprises two lifting parts which are arranged on two sides of the water cooling jacket body relatively, each lifting part comprises a driving part and a transmission part, and the transmission parts are connected with the outer barrel through a connecting structure, so that the two lifting parts can perform asynchronous motion to drive the water cooling jacket body to incline to preset an angle. Through elevation structure's setting, the lift of control water-cooling jacket body, and two lift portions adopt independent drive's mode, but so that two lift portions asynchronous motion, but make the water-cooling jacket body slope at predetermined angle within range, thereby form asymmetric water-cooling effect, but reach vertical and axial gradient temperature gradient change with this, improve the axial of crystal bar and radial heat dissipation greatly, reduce inside heat accumulation, change the heat history of crystal bar, reduce the production of staggered arrangement and other crystal defects, improve the crystal bar quality.

Description

Water-cooling jacket device and single crystal furnace

Technical Field

The invention relates to the technical field of monocrystalline silicon product manufacturing, in particular to a water cooling jacket device and a monocrystalline furnace.

Background

With the increasing advanced semiconductor manufacturing processes, the quality of semiconductor wafers is required to be higher and higher, and the crystal pulling process has a great influence on the quality of the wafer core, such as the oxygen content, bmd (bulk Micro defects), stacking faults, cops (crystal ordered semiconductors), fpd (pattern defects), lstds (laser patterning defects), and the like, which are closely related to the crystal pulling process.

The heat history experienced in the crystal bar growing process greatly influences the overall quality of the crystal bar, the heat history is mainly influenced by the longitudinal and axial temperature gradients of the crystal bar, structural components of a crystal pulling furnace greatly influence the temperature gradient, and one important component is a water cooling sleeve which greatly changes the longitudinal and transverse temperature gradients of the crystal bar, improves the cooling rate of the crystal bar and further influences the pulling rate of the crystal bar. The water cooling sleeve in the related technology is cylindrical, so that the axial and longitudinal temperature adjustment of the crystal bar is greatly limited, the crystal defects of the crystal bar cannot be well controlled, if the adjustment capability is limited, the central heat of the crystal bar cannot be well conducted out, excessive internal stress accumulation is caused, and then dislocation is caused, the quality of the crystal bar is greatly influenced, particularly, the dislocation of an epitaxial product in an epitaxial deposition process can cause uneven deposition, and even deposition failure can be caused.

Disclosure of Invention

In order to solve the technical problem, the invention provides a water-cooling jacket device and a single crystal furnace, which solve the problem that the temperature regulation of the crystal bar in the axial direction and the longitudinal direction is limited.

In order to achieve the purpose, the embodiment of the invention adopts the technical scheme that: a water cooling jacket device comprises a water cooling jacket body and a lifting structure used for controlling the water cooling jacket body to lift;

the water cooling jacket body comprises an inner cylinder and an outer cylinder positioned outside the inner cylinder;

the lifting structure comprises two lifting parts which are arranged on two sides of the water cooling jacket body relatively, each lifting part comprises a driving part and a transmission part, and the transmission parts are connected with the outer barrel through a connecting structure, so that the two lifting parts can move asynchronously to drive the water cooling jacket body to incline for presetting an angle.

Optionally, the transmission comprises:

the lifting rod extends along the axial direction of the outer barrel, and a rack structure is arranged on the outer surface of the lifting rod;

and the transmission gear is meshed with the rack structure to be in transmission connection with the lifting rod.

Optionally, the outer surface of one of the two lifting rods has a first region far away from the other lifting rod, the first region is recessed to form a connecting surface, and the connecting surface is provided with the rack structure.

Optionally, the rack structure includes a plurality of racks protruding from the connecting surface and arranged in parallel, the plurality of racks are arranged side by side along the axial direction of the outer cylinder, and a tooth space is formed between two adjacent racks.

Optionally, one end of the lifting rod, which is far away from the outer cylinder, is provided with a limiting table.

Optionally, in the axial direction of the outer cylinder, the length of the first area is smaller than that of the lifting rod, and the first area is located at one end, far away from the outer cylinder, of the lifting rod.

Optionally, in the axial direction of the outer cylinder, the length of the first area is greater than half of the length of the lifting rod.

Optionally, the connecting portion is located including the cover the urceolus outside snap ring, the protruding two sides relative of snap ring establish and form two archs, every be provided with on the arch be used for with corresponding the connect the via hole that the lifter is connected.

Optionally, a first flange is arranged at the top of the outer cylinder, and the snap ring is arranged on one side of the first flange close to the bottom of the outer cylinder.

The embodiment of the invention also provides a single crystal furnace, which comprises the water-cooling jacket device.

The invention has the beneficial effects that: through elevation structure's setting, control the lift of water-cooling jacket body, and two lift portions adopt independent drive's mode, so that two but the asynchronous motion of lift portion for the water-cooling jacket body can be in predetermineeing the angle within range slope, thereby form asymmetric water-cooling effect, reach radial and axial gradient temperature gradient change with this, improve the axial of crystal bar and radial heat dissipation greatly, reduce inside heat accumulation, change the heat history of crystal bar, reduce the production of staggered arrangement and other crystal defects, improve the crystal bar quality.

Drawings

FIG. 1 is a schematic structural diagram of a water-cooling jacket apparatus according to an embodiment of the present invention;

FIG. 2 is a first schematic view of a lifter according to an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of a second embodiment of a lifter of the present invention;

FIG. 4 is a schematic structural view of a connecting portion in an embodiment of the present invention;

FIG. 5 shows a schematic structural view of an inner barrel in an embodiment of the invention;

FIG. 6 is a schematic structural view of the outer cylinder in the embodiment of the present invention;

fig. 7 shows a schematic structural view of an adjustment sleeve in an embodiment of the invention.

1, an outer cylinder; 11 a first flange; 12 a second via hole; 13 a stepped recess; 14 an annular projection; 2, an inner cylinder; 21, a toothed corrugated structure; 22 a second flange; 3, water cooling of the pipeline; 4 a lifting part; 41 lifting rods; 42 drive gears; 43 a limit table; 411 rack gear; 5 a connecting part; 51 a snap ring; 52, a bulge; 521 connecting through holes; 6 adjusting the sleeve; 61 a recess; 62 third flange.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Referring to fig. 1 to 4, in the present embodiment, a water jacket device is provided, which includes a water jacket body and a lifting structure for controlling the lifting of the water jacket body;

the water cooling jacket body comprises an inner cylinder 2 and an outer cylinder 1 positioned outside the inner cylinder 2;

the lifting structure comprises two lifting parts 4 which are arranged on two sides of the water cooling jacket body relatively, each lifting part 4 comprises a driving part and a transmission part, the transmission part is connected with the outer barrel 1 through a connecting structure, so that the two lifting parts 4 can move asynchronously to drive the water cooling jacket body to incline to preset an angle.

Through elevation structure's setting, control the lift of water-cooling jacket body, and two lift portions 4 adopt independent drive's mode, so that two lift portion 4 can asynchronous motion for thereby the water-cooling jacket body can form asymmetric water-cooling effect at the slope of predetermineeing the angle within range, and the crystal bar heat can be accelerated to the water-cooling jacket transmission to big gradient change, improves heat transfer efficiency for the axial of crystal bar and radial heat dissipation. And the longitudinal temperature gradient and the radial temperature gradient of the crystal bar can be adjusted to a great extent according to the requirements of the pulling process, the reaction rate of defects in the crystal bar is controlled, the defect distribution is adjusted, the cooling rate is good, and the crystal bar with different defect types (such as a fault-free crystal bar and a BMD crystal bar) can be pulled.

The crystal bars with different technological parameter requirements need to be matched with different water cooling effects, and the water cooling sleeve device which moves asynchronously can be correspondingly adjusted according to requirements to obtain a proper cooling effect.

The purpose of asynchronous movement is to cause radial asymmetric effect, improve the water-cooling effect, elevating system's effect: when the epitaxial crystal bar is drawn, the epitaxial crystal bar needs to be drawn at a high drawing speed, and the cooling effect is increased by moving the water cooling jacket to the liquid level, so that the drawing speed is increased; when a defect-free polished crystal bar is drawn, the water cooling jacket can be moved upwards to inhibit the formation of COP; when a BMD crystal bar is drawn, the nucleation and growth of the BMD can be promoted, the movement adjustment of a water cooling sleeve can be used, the BMD can be nucleated at the low temperature of 650-700 ℃, and meanwhile, the asynchronous movement adjustment is used for expanding the crystal bar interval in the temperature range of 750-1100 ℃ in a high-temperature area. Thereby promoting high temperature nucleation of BMD.

It should be noted that under the effect of the lifting structure, the two oppositely-arranged lifting portions 4 are matched to enable the water cooling jacket body to be lifted in an inclined manner, namely, after the two lifting portions 4 are inclined by a preset angle through asynchronous movement, the two lifting portions 4 are controlled to move synchronously to control the water cooling jacket body to be lifted in an inclined manner.

It should be noted that, the lifting structure includes the quantity of lift portion 4 does not limit, the relative both sides of water-cooling jacket body set up two lift portion 4, and two lift portions 4 that set up relatively are a set of, lifting structure can include the multiunit lift portion 4, each group lift portion 4 can realize the slope of water-cooling jacket body in an orientation to can set up the multiunit according to actual need lift portion 4, thereby nimble control the incline direction of water-cooling jacket body, thereby control water-cooling effect that can be better.

The two lifting portions 4 arranged opposite to each other cooperate to lift and tilt the water jacket body, and the tilting angle may be set according to actual needs, for example, may be 0 to 17 degrees, but is not limited thereto.

Illustratively, the transmission comprises:

the lifting rod 41 extends along the axial direction of the outer cylinder 1, and a rack 411 structure is arranged on the outer surface of the lifting rod 41;

and the transmission gear 42 is in transmission connection with the lifting rod 41 by being structurally meshed with the rack 411.

In this embodiment, a manner that the transmission gear 42 is matched with the lifting rod 41 is adopted, the transmission gear 42 rotates, and the lifting of the water cooling jacket body is realized under the transmission effect of the lifting rod 41.

For example, the driving member of each of the lifting portions 4 may be a driving motor.

Illustratively, the outer surface of one of the lifting rods 41 has a first region disposed away from the other lifting rod 41, the first region is recessed to form a connecting surface, and the rack 411 structure is disposed on the connecting surface.

The connecting surface is a plane parallel to the axial direction of the outer barrel 1, and the rack 411 structure is arranged on the connecting surface, so that the rack 411 structure is matched with the transmission gear 42.

Illustratively, the rack 411 structure includes a plurality of racks 411 protruding from the connecting surface and arranged in parallel, the plurality of racks 411 are arranged side by side along the axial direction of the outer barrel 1, and a tooth slot is formed between two adjacent racks 411.

The extending direction of the rack 411 is perpendicular to the axial direction of the outer cylinder 1, the axial direction of the transmission gear 42 is parallel to the extending direction of the rack 411, and the teeth of the transmission gear 42 correspond to the tooth grooves, so that the transmission gear 42 rotates to drive the lifting rod 41 to perform lifting motion, and the water cooling jacket body is driven to perform lifting motion.

Illustratively, the rack 411 is a threaded rack, which has the characteristics of high precision and large load.

Illustratively, one end of the lifting rod 41, which is far away from the outer cylinder 1, is provided with a limit table 43.

The limiting table 43 is arranged to prevent the transmission gear 42 from being separated from the lifting rod 41, the limiting table 43 may be a circular structure, and the area of the limiting table 43 in the radial direction of the lifting rod 41 is larger than the cross-sectional area of the end surface of the lifting rod 41.

The limit stop 43 may be integrated with the lifting rod 41, may be connected through welding or other processes, or may be formed synchronously when the connection surface is formed, the first region may be located in the middle of the lifting rod 41, the first region is recessed to form a groove, the bottom surface of the groove is the connection surface, so that in the axial direction of the lifting rod 41, a first sidewall of the groove far away from one end of the outer cylinder 1 forms the limit stop 43, and a second sidewall of the groove opposite to the first sidewall forms a limit retaining wall for limiting the movement stroke of the transmission gear 42.

Illustratively, in the axial direction of the outer cylinder 1, the length of the first area is smaller than the length of the lifting rod 41, and the first area is located at one end of the lifting rod 41 far away from the outer cylinder 1.

Illustratively, the length of the first region is greater than half of the length of the lift lever 41 in the axial direction of the outer cylinder 1.

Illustratively, the connecting portion 5 includes a snap ring 51 sleeved outside the outer cylinder 1, two opposite sides of the snap ring 51 are convexly provided to form two protrusions 52, and each protrusion 52 is provided with a connecting through hole 521 for connecting with the corresponding lifting rod 41.

Illustratively, one end of the lifting rod 41 close to the outer cylinder 1 is provided with a connecting ring 44, the connecting ring 44 is in threaded connection with the lifting rod 41, and the lifting rod 41 and the protrusion 52 are loosely fitted with a gap, so that the inclination of the water cooling jacket is realized when the two lifting rods 41 move asynchronously.

Illustratively, the top of the outer cylinder 1 is provided with a first flange 11, and the snap ring 51 is arranged on one side of the first flange 11 close to the bottom of the outer cylinder 1.

The snap ring 51 may be bonded to the first flange 11 by an adhesive layer to enhance the coupling strength between the coupling part 5 and the outer tube 1.

Referring to fig. 1, 5 and 6, the inner barrel 2 is illustratively of an inverted cone-shaped configuration.

Compare in single straight tube structure, adopt the bilayer structure of the inner tube and the urceolus of cover setting in this embodiment, the urceolus adopts straight tube structure, the urceolus plays and hinders thermal-insulated effect, the inner tube adopts the back taper structure, can form the water-cooled effect of longitudinal gradient, because of the vertical (the axial direction of crystal bar promptly) temperature of crystal bar is gradient change (the cold end is gone up to the lower extreme heat, is close to the one end of silicon melt and is the lower extreme, and the one end of keeping away from silicon melt is the upper end), the heat of crystal bar mainly transmits the object that the ambient temperature is low with the mode of radiation, the intensity of radiation heat transfer is the inverse ratio with the cubic of distance, the more closely radiation heat transfer is stronger promptly, corresponding water-cooling effect is better, the inner tube is the back taper, along longitudinal direction, the inner wall of inner tube is in with the crystal bar the ascending distance of radial direction of crystal bar is gradient change, can realize gradient water-cooling ground effect, the longitudinal asymmetric effect is achieved, so that the gradient temperature gradient change in the radial direction and the axial direction is achieved, the axial and radial heat dissipation of the crystal bar is greatly improved, the internal heat accumulation is reduced, the heat history of the crystal bar is changed, the dislocation and other crystal defects are reduced, and the quality of the crystal bar is improved. The inclination angle of the inner wall of the inner cylinder can be adjusted according to the requirements of the pulling process, the longitudinal (namely axial) and radial temperature gradients of the crystal bar can be adjusted to a great extent, the reaction rate of defects in the crystal bar is controlled, and the defect distribution is adjusted.

In this embodiment, two lift portions 4 adopt independent drive's mode, so that two lift portion 4 can asynchronous motion for thereby the water cooling jacket body can form the ascending asymmetric water-cooling effect of radial direction at the angle within range slope of predetermineeing, the inner tube adopts the vertical (axial) asymmetric effect that the back taper structure formed, thereby both want the cooperation to reach the radial and axial pair of asymmetry of crystal bar, and then improve crystal bar axial and radial radiating efficiency.

Illustratively, the inner diameter of the top of the inner cylinder is 450mm, and the inner diameter of the bottom of the inner cylinder is 390mm, but not limited thereto.

The top of the inner cylinder is provided with a second flange 22, the top of the outer cylinder is provided with a first flange 11, one side of the first flange 11, which is close to the inner cylinder, is provided with a step-shaped groove 13, and the second flange 22 is lapped in the step-shaped groove 13.

The first face of the second flange 22 remote from the base of the inner barrel lies in the same plane as the second face of the first flange 11 remote from the base of the inner barrel.

The bottom of the inner cylinder is provided with a first through hole, the bottom of the outer cylinder is provided with a second through hole 12, and the orthographic projection of the circle center of the first through hole on the bottom of the outer cylinder 1 is superposed with the circle center of the second through hole 12.

Illustratively, the edge of the second through hole 12 is convexly provided with an annular protrusion 14 towards the top of the outer cylinder 1, and the annular protrusion 14 functions as a retaining wall for limiting the inner cylinder 2.

Illustratively, in the axial direction of the inner cylinder 2, a tooth-shaped corrugated structure 21 is arranged on the inner side wall of the inner cylinder 2.

The arrangement of the toothed corrugated structure 21 can increase the surface area of the inner wall of the inner cylinder, namely, the heat absorption area of the water cooling jacket is increased, compared with a smooth surface, the surface has a better heat absorption effect, and the crystal bar cooling effect is good.

The toothed corrugated structure 21 includes a plurality of annular teeth extending along the circumferential direction of the inner cylinder 2, the plurality of annular teeth are formed by being arranged along the axial direction of the inner cylinder 2, and the cross-sectional shape of a single annular tooth can be a triangle, a trapezoid, an arc, or the like.

Illustratively, the thickness of the toothed corrugation 21 in the radial direction of the inner cylinder 2 gradually increases from the top end of the inner cylinder 2 to the bottom of the inner cylinder 2.

Illustratively, the inner side wall of the inner cylinder 2 is provided with a heat absorbing coating.

The heat absorption coating is arranged on one side of the toothed corrugated structure 21 far away from the outer cylinder 1, and the shape of the heat absorption coating conforms to the shape of the toothed corrugated structure 21, that is, the connection surface of the heat absorption coating and the inner cylinder 2 and the inner surface opposite to the connection surface are both toothed corrugated structures 21.

The heat absorption coating has a heat absorption effect, the bonding strength of the heat absorption coating and the inner cylinder 2 is high, the thermal stress of a heat absorption coating interface (the heat absorption coating and the connecting surface of the inner cylinder 2) can be effectively relieved, the thermodynamic performance is stable, the heat transmitted by a crystal bar can be well taken away by the inner cylinder 2 in real time, the cooling rate of the crystal bar is greatly improved, the pulling speed is improved, and the crystal pulling efficiency is increased.

Illustratively, the outer sidewall of the inner tube 2 is provided with a thermal barrier coating, and the thickness of the heat-absorbing coating in the radial direction of the inner tube 2 gradually increases from the top end of the inner tube 2 to the bottom of the inner tube 2.

Illustratively, the heat absorbing coating is made of ceramic, but not limited thereto.

Illustratively, the thickness of the heat absorbing coating is 200 ± 50 microns.

Illustratively, the outer sidewall of the inner cylinder 2 and/or the inner sidewall of the outer cylinder 1 is provided with a thermal barrier coating.

The heat insulation coating has the functions of reflecting and shielding heat, prevents external heat from being transmitted from the outer cylinder 1 to the interior of the water cooling jacket (namely the interior of the inner cylinder 2), and maintains the temperature in the water cooling jacket to be constant.

Illustratively, the thickness of the thermal barrier coating in the radial direction of the inner cylinder 2 gradually increases in the direction from the top end of the inner cylinder 2 to the bottom of the inner cylinder 2.

Illustratively, the thermal barrier coating is made of high temperature resistant thermal barrier zirconia ceramics.

Illustratively, the thickness of the thermal barrier coating is 100 ± 25 microns, but not limited thereto.

Illustratively, the water cooling pipes 3 are spirally distributed around the outer side wall of the inner barrel 2 along the axial direction of the inner barrel 2.

The water-cooling pipe 3 may be disposed on an outer sidewall of the inner cylinder 2, or may be disposed on an inner sidewall of the outer cylinder 1.

The specific structural form of the water-cooling pipeline 3 is not limited thereto, for example, the water-cooling pipeline 3 may be in a serpentine shape and distributed on the outer side wall of the inner cylinder 2, and the water-cooling pipeline 3 is in a serpentine shape and includes a plurality of linear pipelines 3 extending along the axial direction of the inner cylinder 2 and a bent pipeline 3 disposed between two adjacent linear pipelines 3.

Illustratively, the diameter of the water-cooling pipeline 3 gradually increases from the top end of the inner barrel 2 to the bottom of the inner barrel 2.

Adopt above-mentioned scheme, water-cooling pipeline 3's water-cooling effect is along the axial direction of inner tube 2 is gradient change, is favorable to radial to and axial gradient temperature's regulation.

Illustratively, the diameter of the water-cooling pipeline is 5-10mm, but not limited thereto.

Illustratively, the surrounding distance of the water cooling pipelines is 48mm in the direction from the top end of the inner barrel 2 to the bottom of the inner barrel 2.

Referring to fig. 1 and 7, for example, an adjusting sleeve 6 is arranged at the bottom of the water cooling jacket body and is communicated with the interior of the water cooling jacket body, the adjusting sleeve 6 comprises a first end connected with the water cooling jacket body and a second end opposite to the first end, and the area of the cross section of the adjusting sleeve 6 in the radial direction of the water cooling jacket body is gradually reduced from the first end to the second end.

Through the setting of adjusting sleeve 6, block the heat transmission to water-cooling jacket inner space below the water-cooling jacket body, effectively block losing and losing from bottom to top of heat. And the area of the section of the adjusting sleeve 6 in the radial direction of the water cooling jacket body is gradually reduced, when inert gas flow blows from the upper part of the crystal pulling furnace and flows through the adjusting sleeve, the flow rate is increased, the inert gas flow is ensured to be fully contacted with the crystal bar, the cooling rate of the crystal bar is improved, the longitudinal and radial temperature gradients of the crystal bar are well adjusted, the reaction rate of defects in the crystal bar is controlled, the defect distribution is adjusted, and different types of crystal bars are pulled.

Illustratively, the inner surface of the adjustment sleeve 6 is curved.

Illustratively, the shape of the cross section of the adjustment sleeve 6 in the axial direction of the water jacket body is a parabolic shape.

Illustratively, in the axial direction of the water jacket body, the adjustment sleeve 6 comprises a first portion adjacent to the water jacket body and a second portion adjacent to the first portion, the outer surface of which is concave to form a recess 61.

The water cooling jacket is positioned above the crucible, and the concave part 61 can directionally reflect the heat below to the graphite component below the water cooling jacket or the liquid level of the silicon melt, so as to maintain the stability of the temperature field below.

Illustratively, the inner surface of the adjustment sleeve 6 is provided with a heat absorbing layer.

The heat absorbing layer has a heat absorbing effect, the bonding strength of the heat absorbing layer and the adjusting sleeve 6 is high, the thermal stress of a heat absorbing layer interface (the connecting surface of the heat absorbing layer and the adjusting sleeve 6) can be effectively relieved, the thermodynamic performance is stable, the adjusting sleeve 6 can well take away the heat transmitted by the crystal bar in real time, the cooling rate of the crystal bar is greatly improved, the pulling speed is improved, and the crystal pulling efficiency is increased.

Illustratively, the heat absorbing layer comprises a first layer close to the adjusting sleeve 6 and a second layer far away from the adjusting sleeve, and the first layer is a transition layer formed by chemical reaction of graphite material and the inner wall of the adjusting sleeve 6.

The material of adjusting sleeve is carbon fiber composite, first layer is the compound transition coating of _ C + SiC (thickness is 80 +/-10 microns), the second layer is the coating of _ SiC (thickness is 50 +/-5 microns). The coating structure (the combination mode of the heat absorption layer and the adjusting sleeve) has the characteristics of high combination strength, high density and the like. The substrate can be well protected, and the service life of the substrate is prolonged.

Illustratively, the heat sink layer has a thickness of 130 ± 15 microns.

Illustratively, the outer surface of the adjustment sleeve 6 is provided with a thermal insulation layer.

The heat insulation layer has the functions of reflecting and shielding heat, prevents external heat from being transmitted from the adjusting sleeve 6 to the inside of the water cooling jacket, and maintains the constant temperature inside the water cooling jacket.

Illustratively, the thermal insulation layer comprises a third layer close to the adjusting sleeve 6 and a fourth layer far away from the adjusting sleeve, and the third layer is a transition layer formed by chemical reaction between graphite and the outer wall of the adjusting sleeve.

The material of adjusting sleeve is carbon fiber composite, the third layer is the compound transition coating of _ C + SiC (thickness is 80 +/-10 microns), the fourth layer is the coating of _ SiC (thickness is 50 +/-5 microns). The coating structure (the combination mode of the heat insulation layer and the adjusting sleeve) has the characteristics of high combination strength, high density and the like. The substrate can be well protected, and the service life of the substrate is prolonged.

Illustratively, the thickness of the thermal barrier layer is 160 ± 15 microns.

Illustratively, the water cooling jacket body comprises an inner cylinder 2 and an outer cylinder 1 positioned outside the inner cylinder 2, the bottom of the outer cylinder 1 comprises a first area for bearing the inner cylinder and a second area adjacent to the first area, the first area is arranged close to the side wall of the outer cylinder 1, and the top of the adjusting sleeve 6 is provided with a flange (third flange 62) connected with the second area.

The embodiment of the invention also provides the single crystal furnace, which comprises a furnace body and a crucible positioned in the furnace body, wherein the water cooling jacket body is fixed above the crucible under the lifting action of the lifting structure.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims

1. A water cooling jacket device is characterized by comprising a water cooling jacket body and a lifting structure for controlling the water cooling jacket body to lift;

2. The water jacket apparatus according to claim 1, wherein the transmission member includes:

3. The water jacket device according to claim 2, wherein an outer surface of one of the two lifting rods has a first region disposed away from the other lifting rod, the first region being recessed to form a connection surface on which the rack structure is disposed.

4. The water-cooling jacket device as claimed in claim 3, wherein the rack structure comprises a plurality of parallel racks protruding from the connecting surface, the plurality of racks are arranged side by side along the axial direction of the outer cylinder, and a tooth space is formed between two adjacent racks.

5. The water jacket device according to claim 2, wherein one end of the lifting rod, which is far away from the outer cylinder, is provided with a limit table.

6. The water jacket device according to claim 2, wherein a length of the first region in an axial direction of the outer tub is smaller than a length of the lifter bar, and the first region is located at an end of the lifter bar remote from the outer tub.

7. The water jacket device according to claim 2, wherein a length of the first region in an axial direction of the outer tub is greater than a half of a length of the lift rod.

8. The water cooling jacket device according to claim 1, wherein the connecting portion comprises a snap ring sleeved outside the outer cylinder, two opposite sides of the snap ring are convexly provided with two protrusions, and each protrusion is provided with a connecting through hole for connecting with the corresponding lifting rod.

9. The water-cooled jacket apparatus as claimed in claim 8, wherein a first flange is provided on the top of said outer tub, and said snap ring is provided on a side of said first flange adjacent to the bottom of said outer tub.

10. A single crystal furnace comprising the water-cooled jacket apparatus according to any one of claims 1 to 9.