WO2023221388A1 - Water-cooled jacket and single crystal furnace - Google Patents

Abstract

A water-cooled jacket and a single crystal furnace. The water-cooled jacket comprises an inner cylinder and an outer cylinder which are sleeved, and a water-cooled pipeline which is located between the inner cylinder and the outer cylinder, wherein the inner cylinder is of an inverted conical structure.

Description

Water cooling jacket and single crystal furnace

Cross-references to related applications

This application claims priority to Chinese Patent Application No. 202210544307.2 filed in China on May 18, 2022, the entire content of which is incorporated herein by reference.

Technical field

This application relates to the technical field of manufacturing single crystal silicon products, and in particular to a water cooling jacket and a single crystal furnace.

Background technique

With the continuous improvement of advanced semiconductor processes, the quality requirements for semiconductor wafers are getting higher and higher. As for the quality of wafers, the crystal pulling process has a great impact on the core quality of the wafers, such as oxygen content, micro-defects in the body (Bulk Micro Defects (BMD), stacking faults, crystal originated particles (COPs), flow pattern defects (Flow Pattern Defects (FPD)), infrared scattering defects (laser scattering tomography defects (LSTDs)) and other qualities are closely related to the crystal pulling process There is a close relationship.

The thermal history experienced during the growth process of the crystal rod greatly affects the overall quality of the crystal rod, and the thermal history is mainly affected by the longitudinal and axial temperature gradient of the crystal rod. The structural components of the crystal pulling furnace have a great influence on the temperature gradient. Large, a very important component of this is the water-cooling jacket, which greatly changes the longitudinal and transverse temperature gradients of the crystal rod, increases the cooling rate of the crystal rod, and thereby affects the drawing rate of the crystal rod.

In the related art, the water-cooling jacket is cylindrical, which greatly limits its axial and longitudinal temperature adjustment of the crystal ingot. The crystal defects of the crystal ingot cannot be well controlled. For example, the limited adjustment ability causes the heat in the center of the crystal ingot to not be very high. Not properly conducted, resulting in excessive accumulation of internal stress, which in turn leads to misalignment, which greatly affects the quality of the ingot. Especially for epitaxial products, stacking faults will cause uneven deposition during the epitaxial deposition process, and even cause Causes deposition failure.

Contents of the invention

In order to solve the above technical problems, this application provides a water cooling jacket to solve the problem of limited temperature adjustment in the axial and longitudinal directions of the crystal rod.

In order to achieve the above object, the technical solution adopted in the embodiment of the present application is: a water-cooling jacket, including an inner cylinder and an outer cylinder, and a water-cooling pipe located between the inner cylinder and the outer cylinder. The barrel has an inverted conical structure.

Optionally, along the axial direction of the inner cylinder, a toothed corrugated structure is provided on the inner wall of the inner cylinder.

Optionally, the thickness of the toothed corrugated structure in the radial direction of the inner cylinder gradually increases from the top of the inner cylinder to the bottom of the inner cylinder.

Optionally, the inner side wall of the inner barrel is provided with a heat-absorbing coating.

Optionally, the thickness of the heat-absorbing coating in the radial direction of the inner cylinder gradually increases from the top of the inner cylinder to the bottom of the inner cylinder.

Optionally, the heat-absorbing coating is made of ceramic.

Optionally, the thickness of the heat-absorbing coating is 200±50 microns.

Optionally, the outer side wall of the inner cylinder and/or the inner side wall of the outer cylinder are provided with a heat-insulating coating.

Optionally, the thickness of the heat-insulating coating in the radial direction of the inner cylinder gradually increases from the top of the inner cylinder to the bottom of the inner cylinder.

Optionally, the heat-insulating coating is made of zirconia ceramics.

Optionally, the thickness of the thermal insulation coating is 100±25 microns.

Optionally, along the axial direction of the inner cylinder, the water-cooling pipes are spirally distributed around the outer wall of the inner cylinder.

Optionally, the diameter of the water cooling pipe gradually increases in a direction from the top of the inner cylinder to the bottom of the inner cylinder.

An embodiment of the present application also provides a single crystal furnace, including the above-mentioned water cooling jacket.

The beneficial effects of this application are: the inner cylinder adopts an inverted conical structure, which can form a longitudinal asymmetric water cooling effect, thereby achieving longitudinal and axial gradient temperature gradient changes, greatly improving the axial and radial heat dissipation of the crystal rod, and reducing Internal heat accumulation changes the thermal history of the crystal ingot, reduces the occurrence of misalignment and other crystal defects, and improves the quality of the crystal ingot.

Description of the drawings

Figure 1 shows a schematic structural diagram of the water cooling jacket in the embodiment of the present application;

Figure 2 shows a schematic structural diagram of the inner cylinder in the embodiment of the present application;

Figure 3 shows a schematic structural diagram of the outer cylinder in the embodiment of the present application;

Figure 4 shows a schematic structural diagram of the adjusting sleeve in the embodiment of the present application;

Figure 5 shows a schematic structural diagram of the lifting rod in the embodiment of the present application;

Figure 6 shows the second structural schematic diagram of the lifting rod in the embodiment of the present application;

FIG. 7 shows a schematic structural diagram of the connection part in the embodiment of the present application.

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions of the embodiments of the present application will be clearly and completely described below in conjunction with the drawings of the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, but not all of the embodiments. Based on the described embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art fall within the scope of protection of the present application.

In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description. It does not indicate or imply that the device or element referred to must have a specific orientation or a specific orientation. construction and operation, and therefore should not be construed as limitations on this application. Furthermore, the terms “first”, “second” and “third” are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Referring to Figures 1-3, this embodiment provides a water-cooling jacket, which includes an inner cylinder 2 and an outer cylinder 1, and a water-cooling pipe 3 located between the inner cylinder 2 and the outer cylinder 1. The inner cylinder 2 has an inverted conical structure.

Compared with a single straight-cylinder structure, this embodiment adopts a double-layer structure of an inner cylinder and an outer cylinder. The outer cylinder adopts a straight-cylinder structure. The outer cylinder plays a role in blocking heat. The inner cylinder The barrel adopts an inverted conical structure, which can form a longitudinal gradient water cooling effect, because the temperature in the longitudinal direction of the crystal rod (that is, the axial direction of the crystal rod) changes in a gradient (the lower end is hot and the upper end is cold, the end close to the silicon melt is the lower end, and the end far away from the silicon One end of the melt is the upper end). The heat of the crystal rod is mainly transmitted to the surrounding low-temperature objects by radiation. The intensity of radiation heat transfer is inversely proportional to the cube of the distance. That is, the closer the distance, the stronger the radiation heat transfer. Correspondingly The better the water cooling effect, the inner cylinder is inverted cone shape, along the longitudinal direction, the distance between the inner wall of the inner cylinder and the crystal rod in the radial direction of the crystal rod changes in a gradient, which can achieve the effect of gradient water cooling. , that is, the longitudinal asymmetric effect, thereby achieving longitudinal and axial gradient temperature gradient changes, greatly improving the axial and radial heat dissipation of the crystal rod, reducing internal heat accumulation, changing the thermal history of the crystal rod, and reducing misalignment and other crystals The generation of defects improves the quality of the ingot. According to the needs of the drawing process, the inclination angle of the inner wall of the inner cylinder can be adjusted to greatly adjust the longitudinal and radial temperature gradients of the crystal rod, control the reaction rate of defects in the crystal rod, and adjust the defect distribution.

For example, the inner diameter of the top of the inner cylinder is 450 mm, and the inner diameter of the bottom of the inner cylinder is 390 mm, but this is not a limitation.

The top of the inner cylinder is provided with a second flange 22, the top of the outer cylinder is provided with a first flange 11, and the first flange 11 is provided with a stepped groove 13 on one side close to the inner cylinder. , the second flange 22 overlaps in the stepped groove 13 .

The first surface of the second flange 22 away from the bottom of the inner cylinder and the second surface of the first flange 11 away from the bottom of the inner cylinder are located on the same plane.

The bottom of the inner cylinder has a first through hole, and the bottom of the outer cylinder has a second through hole 12. The orthogonal projection of the center of the first through hole on the bottom of the outer cylinder 1 is the same as the second through hole. The center points of the through holes 12 coincide with each other.

Exemplarily, an annular protrusion 14 protrudes from the edge of the second through hole 12 toward the top of the outer cylinder 1 . The annular protrusion 14 functions as a retaining wall for blocking the inner cylinder 2 . Limit the position.

For example, along the axial direction of the inner cylinder 2 , a toothed corrugated structure 21 is provided on the inner wall of the inner cylinder 2 .

The arrangement of the toothed corrugated structure 21 can increase the surface area of the inner wall of the inner cylinder, that is, increase the heat absorption area of the water cooling jacket. Compared with a smooth surface, such a surface has a better heat absorption effect and has a good cooling effect of the crystal ingot. .

The toothed corrugated structure 21 includes a plurality of annular teeth extending along the circumferential direction of the inner cylinder 2. The plurality of annular teeth are arranged along the axial direction of the inner cylinder 2. The cross-sectional shape of a single annular tooth can be Triangle, trapezoid, arc, etc.

For example, in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 , the thickness of the toothed corrugated structure 21 in the radial direction of the inner cylinder 2 gradually increases.

Exemplarily, the inner side wall of the inner cylinder 2 is provided with a heat-absorbing coating.

The heat-absorbing coating is disposed on the side of the toothed corrugated structure 21 away from the outer cylinder 1 , and the shape of the heat-absorbing coating matches the shape of the toothed corrugated structure 21 , that is, the heat-absorbing coating The connection surface between the coating and the inner cylinder 2 and the inner surface opposite to the connection surface are both toothed corrugated structures 21 .

The heat-absorbing coating has a heat-absorbing effect, and the bonding strength between the heat-absorbing coating and the inner cylinder 2 is high, which can effectively alleviate the interface between the heat-absorbing coating and the inner cylinder 2. The thermal stress of the connecting surface) and the thermodynamic properties are stable. The inner cylinder 2 can take away the heat transmitted by the crystal rod in real time, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.

For example, the thickness of the heat-absorbing coating in the radial direction of the inner cylinder 2 gradually increases from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 .

Illustratively, the heat-absorbing coating is made of ceramic, but is not limited thereto.

Exemplarily, the thickness of the heat-absorbing coating is 200±50 microns.

Exemplarily, the outer side wall of the inner cylinder 2 and/or the inner side wall of the outer cylinder 1 is provided with a heat-insulating coating.

The heat-insulating coating has the function of reflecting and shielding heat, preventing external heat from being transmitted from the outer cylinder 1 to the inside of the water-cooling jacket (ie, the inside of the inner cylinder 2), and maintaining a constant temperature inside the water-cooling jacket.

Exemplarily, the outer wall of the inner cylinder 2 is provided with a heat-insulating coating. The heat-insulating coating is formed on the inner cylinder in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 . 2The thickness in the radial direction gradually increases.

For example, the heat-insulating coating is made of high-temperature-resistant and heat-insulating zirconia ceramics.

For example, the thickness of the thermal insulation coating is 100±25 microns, but is not limited thereto.

For example, along the axial direction of the inner cylinder 2 , the water-cooling pipes 3 are spirally distributed around the outer wall of the inner cylinder 2 .

The water-cooling pipe 3 can be provided on the outer side wall of the inner cylinder 2 or on the inner side wall of the outer cylinder 1 .

The specific structural form of the water-cooling pipe 3 is not limited to this. For example, the water-cooling pipe 3 can be in a serpentine shape and is distributed on the outer wall of the inner cylinder 2. The water-cooling pipe 3 can be in a serpentine shape, including along all directions. The inner cylinder 2 has a plurality of axially extending linear pipes and a bent pipe arranged between two adjacent linear pipes.

For example, the diameter of the water-cooling pipe 3 gradually increases in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 .

Using the above solution, the water cooling effect of the water cooling pipe 3 changes in a gradient along the axial direction of the inner cylinder 2, which is conducive to the adjustment of the gradient temperature in the radial and axial directions.

For example, the diameter of the water-cooling pipe is 5-10 mm, but is not limited to this.

For example, the circumferential spacing of the water-cooling pipes in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 is 48 mm.

Referring to Figures 1 and 4, exemplarily, the bottom of the water-cooling jacket body is provided with an adjustment sleeve 6 that communicates with the inside of the water-cooling jacket body. The adjustment sleeve 6 includes a first portion connected to the water-cooling jacket body. end, and a second end opposite to the first end. From the first end to the second end, the cross-sectional area of the adjustment sleeve 6 in the radial direction of the water-cooling jacket body gradually decreases. Small.

Through the arrangement of the adjusting sleeve 6, the heat below the water-cooling jacket body is blocked from being transmitted to the internal space of the water-cooling jacket, effectively blocking the bottom-up dissipation of heat. And the cross-sectional area of the adjusting sleeve 6 gradually decreases in the radial direction of the water-cooling jacket body. When the inert gas flow blows through the adjusting sleeve from above the crystal pulling furnace, the flow rate becomes larger, ensuring that It ensures full contact between the inert gas flow and the crystal rod, improves the cooling rate of the crystal rod, well adjusts the longitudinal and radial temperature gradient of the crystal rod, controls the reaction rate of defects in the crystal rod, adjusts the defect distribution, and draws different types of crystal rods. of crystal rod.

For example, the inner surface of the adjustment sleeve 6 is a curved surface.

For example, the shape of the cross section of the adjustment sleeve 6 in the axial direction of the water cooling jacket body is a parabolic shape.

Illustratively, in the axial direction of the water-cooling jacket body, the adjustment sleeve 6 includes a first part close to the water-cooling jacket body and a second part adjacent to the first part, and the second part The outer surface is concave to form a recess 61.

The water-cooling jacket is located above the crucible, and the concave portion 61 is provided to directionally reflect the heat below to the graphite component or silicon melt liquid surface below the water-cooling jacket, thereby maintaining the stability of the temperature field below.

Exemplarily, the inner surface of the adjustment sleeve 6 is provided with a heat absorption layer.

The heat-absorbing layer has a heat-absorbing effect, and the bonding strength between the heat-absorbing layer and the adjusting sleeve 6 is high, which can effectively alleviate the heat-absorbing layer interface (the connection surface between the heat-absorbing layer and the adjusting sleeve 6 ) thermal stress and stable thermodynamic properties. The adjusting sleeve 6 can take away the heat transmitted by the crystal rod in real time, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.

Exemplarily, the heat-absorbing layer includes a first layer close to the adjustment sleeve 6 and a second layer far away from the adjustment sleeve. The first layer is made of graphite and the inner wall of the adjustment sleeve 6 A transition layer formed by a chemical reaction.

The adjusting sleeve is made of carbon fiber composite material, the first layer is a -C+SiC composite transition coating (thickness is 80±10 microns), and the second layer is a -SiC coating (the thickness is 50±10 microns) 5 microns). Such a coating structure (the combination of the above-mentioned heat absorption layer and the adjustment sleeve) has the characteristics of high bonding strength and high density. It can protect the substrate very well and extend its service life. For example, the thickness of the heat absorption layer is 130±15 microns.

Exemplarily, the outer surface of the adjustment sleeve 6 is provided with a heat insulation layer.

The heat insulation layer has the function of reflecting and shielding heat, preventing external heat from being transmitted from the adjusting sleeve 6 to the inside of the water-cooling jacket, and maintaining a constant temperature inside the water-cooling jacket.

For example, the heat insulation layer includes a third layer close to the adjustment sleeve 6 and a fourth layer far away from the adjustment sleeve. The third layer is made of graphite and is in contact with the outer wall of the adjustment sleeve. A transition layer formed by a chemical reaction.

The adjusting sleeve is made of carbon fiber composite material, the third layer is a C+SiC composite transition coating (thickness is 80±10 microns), and the fourth layer is a SiC coating (the thickness is 50±10 microns). 5 microns). Such a coating structure (the combination of the above-mentioned heat insulation layer and the adjustment sleeve) has the characteristics of high bonding strength and high density. It can protect the substrate very well and extend its service life.

For example, the thickness of the thermal insulation layer is 160±15 microns.

Exemplarily, the water-cooling jacket body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2. The bottom of the outer cylinder 1 includes a first area for carrying the inner cylinder and a first area connected to the inner cylinder. The first area is adjacent to the second area. The first area is located close to the side wall of the outer cylinder 1. A flange (third flange 62) is provided on the top of the adjustment sleeve 6. The flange Connected to the second zone.

Referring to Figures 1, 5-7, exemplarily, the water-cooling jacket device in this embodiment further includes a lifting structure for controlling the lifting and lowering of the water-cooling jacket body;

The water-cooling jacket body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2;

The lifting structure includes two lifting parts 4 arranged oppositely on both sides of the water-cooling jacket body. Each lifting part 4 includes a driving part and a transmission part. The transmission part is connected to the outer cylinder 1 through a connecting structure. The connection allows the two lifting parts 4 to move asynchronously to drive the water-cooling jacket body to tilt at a preset angle.

Through the arrangement of the lifting structure, the lifting of the water-cooling jacket body is controlled, and the two lifting parts 4 are driven independently, so that the two lifting parts 4 can move asynchronously, so that the water-cooling jacket body can move in the preset position. Tilt within the angle range to form an asymmetric water cooling effect.

Large gradient changes can accelerate the transfer of heat from the crystal ingot to the water-cooling jacket, improve heat transfer efficiency, and speed up the axial and radial heat dissipation of the crystal ingot. And according to the needs of the drawing process, the longitudinal and radial temperature gradients of the crystal rod can be adjusted to a large extent, the reaction rate of defects in the crystal rod can be controlled, and the defect distribution can be adjusted. It has a good cooling rate and can draw different defect types. Crystal rods (such as stacking fault-free crystal rods, BMD crystal rods).

Crystal ingots with different process parameter requirements need to be matched with different water cooling effects. The asynchronously moving water cooling jacket device can be adjusted accordingly to obtain appropriate cooling effects according to needs.

The purpose of the asynchronous movement is to create a radial asymmetry effect and improve the water cooling effect. The role of the lifting mechanism: when drawing the epitaxial crystal rod, a large drawing speed is required, and the water cooling jacket moves toward the liquid surface to increase the cooling effect. This will increase the drawing speed; when drawing defect-free polished crystal ingots, the water-cooling jacket can be moved upward to inhibit the formation of COP; when drawing BMD crystal ingots, it will promote the nucleation and growth of BMD, and the water-cooling jacket can Through movement adjustment, BMD nucleates at a low temperature of 650℃-700℃. At the same time, for high temperature areas, through asynchronous movement adjustment, the ingot range is expanded within the temperature range of 750℃-1100℃. This is used to promote the high-temperature nucleation of BMD.

It should be noted that under the action of the lifting structure, the cooperation of the two opposite lifting parts 4 can make the water cooling jacket body tilt and rise, that is, the two lifting parts 4 move asynchronously to tilt preset After adjusting the angle, the two lifting parts 4 are controlled to move synchronously to control the water-cooling jacket body to perform lifting movement in an inclined state.

It should be noted that the number of the lifting parts 4 included in the lifting structure is not limited. Two lifting parts 4 are provided on opposite sides of the water-cooling jacket body. The two opposite lifting parts 4 are One group, the lifting structure may include multiple groups of the lifting parts 4, each group of the lifting parts 4 can realize the inclination of the water cooling jacket body in one direction, so that multiple groups of the lifting parts 4 can be provided according to actual needs. The lifting part 4 can flexibly control the tilt direction of the water cooling jacket body, so that the water cooling effect can be better controlled.

It should be noted that the cooperation of two opposite lifting parts 4 can make the water-cooling jacket body tilt up and down. The tilt angle can be set according to actual needs, for example, it can be 0-17 degrees, but this is not the case. is limited.

By way of example, the transmission components include:

The lifting rod 41 extends along the axial direction of the outer cylinder 1, and a rack 411 structure is provided on the outer surface of the lifting rod 41;

The transmission gear 42 is transmission connected to the lifting rod 41 by meshing with the rack 411 structure.

In this embodiment, the transmission gear 42 and the lifting rod 41 are matched. The transmission gear 42 rotates, and under the driving action of the lifting rod 41, the water cooling jacket body is raised and lowered.

For example, the driving member of each lifting part 4 may be a driving motor.

Illustratively, the outer surface of one of the lifting rods 41 has a first area located away from the other lifting rod 41. The first area is concave to form a connecting surface, and the connecting surface is provided with the Rack 411 structure.

The connecting surface is a plane parallel to the axial direction of the outer cylinder 1 , and the rack 411 structure is provided on the connecting surface, which facilitates the cooperation between the rack 411 structure and the transmission gear 42 .

Exemplarily, the rack 411 structure includes a plurality of parallel racks 411 protruding from the connection surface, and the plurality of racks 411 are arranged side by side along the axial direction of the outer cylinder 1. A tooth gap is formed between two adjacent racks 411 .

The extension direction of the rack 411 is perpendicular to the axial direction of the outer cylinder 1 , the axial direction of the transmission gear 42 is parallel to the extension direction of the rack 411 , and the teeth of the transmission gear 42 correspond to in the tooth slot, so that the transmission gear 42 rotates, driving the lifting rod 41 to perform lifting movement, thereby driving the water cooling jacket body to perform lifting movement.

For example, the rack 411 is a threaded rack, and the threaded rack has the characteristics of high precision and large load.

For example, a limiting platform 43 is provided at one end of the lifting rod 41 away from the outer cylinder 1 .

The setting of the limiting platform 43 prevents the transmission gear 42 from being separated from the lifting rod 41. The limiting platform 43 can be a circular structure, and the limiting platform 43 is located on the diameter of the lifting rod 41. The area in the direction is larger than the cross-sectional area of the end surface of the lifting rod 41 .

The limiting platform 43 may be an integral structure with the lifting rod 41, may be connected through welding or other processes, or may be formed simultaneously when the connection surface is formed, and the first area may be located on the In the middle of the lifting rod 41, a groove is formed in the first area, and the bottom surface of the groove is the connecting surface, so that in the axial direction of the lifting rod 41, the groove is farther away from the The first side wall of one end of the outer cylinder 1 forms the limiting platform 43 , and the second side wall of the groove opposite to the first side wall forms a limit for limiting the movement stroke of the transmission gear 42 . retaining wall.

For example, in the axial direction of the outer cylinder 1 , the length of the first region is less than the length of the lifting rod 41 , and the first region is located away from the lifting rod 41 and away from the outer cylinder 1 one end.

For example, in the axial direction of the outer cylinder 1 , the length of the first region is greater than half of the length of the lifting rod 41 .

Illustratively, the connecting part 5 includes a snap ring 51 that is sleeved on the outside of the outer cylinder 1 . Two protrusions 52 are formed on opposite sides of the snap ring 51 , and each of the protrusions 52 There is a connection through hole 521 for connecting with the corresponding lifting rod 41.

Exemplarily, a connecting ring 44 is provided at one end of the lifting rod 41 close to the outer tube 1. The connecting ring 44 is threadedly connected to the lifting rod 41. The lifting rod 41 and the protrusion 52 are connected by a thread. The gap is loosely matched, which facilitates the tilting of the water-cooling jacket when the two lifting rods 41 move asynchronously.

For example, a first flange 11 is provided on the top of the outer cylinder 1 , and the snap ring 51 is provided on a side of the first flange 11 close to the bottom of the outer cylinder 1 .

The snap ring 51 can be bonded to the first flange 11 through an adhesive layer to enhance the connection strength between the connecting portion 5 and the outer cylinder 1 .

An embodiment of the present application also provides a single crystal furnace, including the above-mentioned water cooling jacket.

It can be understood that the above embodiments are only exemplary embodiments adopted to illustrate the principles of the present application, but the present application is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present application, and these modifications and improvements are also regarded as the protection scope of the present application.

Claims (14)

1. A water-cooling jacket includes an inner cylinder and an outer cylinder, and a water-cooling pipe located between the inner cylinder and the outer cylinder. The inner cylinder has an inverted conical structure.
2. The water cooling jacket according to claim 1, wherein a toothed corrugated structure is provided on the inner wall of the inner cylinder along the axial direction of the inner cylinder.
3. The water cooling jacket according to claim 2, wherein the thickness of the toothed corrugated structure in the radial direction of the inner cylinder gradually increases from the top end of the inner cylinder to the bottom of the inner cylinder. big.
4. The water cooling jacket according to claim 1, wherein the inner side wall of the inner cylinder is provided with a heat-absorbing coating.
5. The water cooling jacket according to claim 4, wherein the thickness of the heat-absorbing coating in the radial direction of the inner cylinder gradually increases from the top end of the inner cylinder to the bottom of the inner cylinder. big.
6. The water-cooling jacket according to claim 5, wherein the heat-absorbing coating is made of ceramic.
7. The water-cooling jacket according to claim 5, wherein the thickness of the heat-absorbing coating is 200±50 microns.
8. The water cooling jacket according to claim 1, wherein the outer side wall of the inner cylinder and/or the inner side wall of the outer cylinder are provided with a heat-insulating coating.
9. The water cooling jacket according to claim 8, wherein the thickness of the thermal insulation coating is 100±25 microns.
10. The water-cooling jacket according to claim 8, wherein the thickness of the heat-insulating coating in the radial direction of the inner cylinder gradually increases from the top end of the inner cylinder to the bottom of the inner cylinder. big.
11. The water-cooling jacket according to claim 8, wherein the heat-insulating coating is made of zirconia ceramics.
12. The water-cooling jacket according to claim 1, wherein the water-cooling pipes are spirally distributed around the outer wall of the inner cylinder along the axial direction of the inner cylinder.
13. The water cooling jacket according to claim 12, wherein the diameter of the water cooling pipe gradually increases in a direction from the top of the inner cylinder to the bottom of the inner cylinder.
14. A single crystal furnace including the water-cooling jacket according to any one of claims 1-13.

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