TWI827250B - Water cooling jacket device and single crystal furnace - Google Patents

Abstract

The invention belongs to a water-cooling jacket device and a single crystal furnace. The water-cooling jacket device includes a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body; the water-cooling jacket body includes an inner cylinder and an outer cylinder located outside the inner cylinder; the lifting structure includes a relative Two lifting parts are provided on both sides of the water-cooling jacket body. Each lifting part includes a driving part and a transmission part. The transmission part is connected to the outer cylinder through a connecting structure, so that the two lifting parts can move asynchronously to drive the water-cooling jacket body to tilt. Default angle.

Description

Water cooling jacket device and single crystal furnace

The invention belongs to the technical field of manufacturing single crystal silicon products, and in particular relates to a water cooling jacket device and a single crystal furnace.

With the continuous improvement of advanced semiconductor processes, the quality requirements for semiconductor wafers are getting higher and higher. As for the quality of the wafers, the crystal pulling step has a great impact on the core quality of the wafers, such as oxygen content, volume micro-defects (Bulk Micro Defects (BMD), stacking faults, Crystal Originated Particles (COPs), Flow Pattern Defects (FPD), Laser Scattering Tomography Defects (LSTDs) and other qualities are closely related to crystal pulling. The steps are closely related.

The thermal history experienced during the growth process of the crystal rod greatly affects the overall quality of the crystal rod, and the thermal history is mainly affected by the longitudinal and axial temperature gradient of the crystal rod. The structural components of the crystal pulling furnace have a great influence on the temperature gradient. Large, a very important component of this is the water-cooling jacket, which greatly changes the longitudinal and transverse temperature gradients of the crystal rod, increases the cooling rate of the crystal rod, and thereby affects the drawing rate of the crystal rod.

In order to solve the above technical problems, the present invention provides a water cooling jacket device and a single crystal furnace to solve the problem of limited temperature adjustment in the axial and longitudinal directions of the crystal ingot.

In order to achieve the above object, the technical solution adopted in the embodiment of the present invention is: a water-cooling jacket device, including a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body; The water cooling jacket body includes an inner cylinder and an outer cylinder located outside the inner cylinder; The lifting structure includes two lifting parts disposed oppositely on both sides of the water-cooling jacket body. Each lifting part includes a driving part and a transmission part. The transmission part is connected to the outer cylinder through a connecting structure, so that the two lifting parts It can move asynchronously to drive the water-cooling jacket body to tilt at a preset angle.

Optionally, the transmission component includes: A lifting rod extends along the axial direction of the outer cylinder, and a rack structure is provided on the outer surface of the lifting rod; A transmission gear, which is in transmission connection with the lifting rod by meshing with the rack structure.

Optionally, the outer surface of one of the two lifting rods has a first area disposed away from the other lifting rod, and the first area is concave to form a connecting surface, and the tooth is disposed on the connecting surface. bar structure.

Optionally, the rack structure includes a plurality of parallel racks protruding from the connecting surface, and a plurality of the racks are arranged side by side along the axial direction of the outer cylinder, and between two adjacent racks Alveoli are formed between them.

Optionally, a limiting platform is provided at one end of the lifting rod away from the outer cylinder.

Optionally, in the axial direction of the outer cylinder, the length of the first region is less than the length of the lifting rod, and the first region is located at an end of the lifting rod away from the outer cylinder.

Optionally, the length of the first region is greater than half the length of the lifting rod in the axial direction of the outer cylinder.

Optionally, the connection part includes a snap ring that is sleeved on the outside of the outer cylinder. Two protrusions are formed on opposite sides of the snap ring, and each protrusion is provided with a corresponding lifting rod. Connection vias for connections.

Optionally, a first flange is provided on the top of the outer cylinder, and the snap ring is disposed on a side of the first flange close to the bottom of the outer cylinder.

An embodiment of the present invention also provides a single crystal furnace, including the above water-cooling jacket device.

The beneficial effects of the present invention are: through the setting of the lifting structure, the lifting of the water-cooling jacket body is controlled, and the two lifting parts are independently driven, so that the two lifting parts can move asynchronously, so that the water-cooling jacket body can Tilt within the preset angle range to form an asymmetric water cooling effect, thereby achieving radial and axial gradient temperature gradient changes, greatly improving the axial and radial heat dissipation of the crystal ingot, reducing internal heat accumulation, and changing the crystal ingot Thermal history can reduce the occurrence of misalignment and other crystal defects and improve the quality of ingots.

In order to help the review committee understand the technical features, content and advantages of the present invention and the effects it can achieve, the present invention is described in detail below in the form of embodiments with the accompanying drawings and attachments, and the drawings used therein are , its purpose is only for illustration and auxiliary description, and may not represent the actual proportions and precise configurations after implementation of the present invention. Therefore, the proportions and configuration relationships of the attached drawings should not be interpreted or limited to the actual implementation of the present invention. The scope shall be stated first.

In the description of the embodiments of the present invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical" The orientations or positional relationships indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description. , rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be construed as a limitation of the present invention.

In addition, the terms “first” and “second” are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Thus, features defined as “first” and “second” may explicitly or implicitly include one or more of the described features. In the description of the embodiments of the present invention, "plurality" means two or more than two, unless otherwise explicitly and specifically limited.

In the embodiments of the present invention, unless otherwise expressly stipulated and limited, the terms "installation", "connection", "connection", "fixing" and other terms should be understood in a broad sense. For example, it can be a fixed connection or a removable connection. Disassembly and connection, or integration; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two elements or an interaction between two elements. For those with ordinary knowledge in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

Referring to Figures 1 to 4, this embodiment provides a water-cooling jacket device, including a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body; The water cooling jacket body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2; The lifting structure includes two lifting parts 4 arranged oppositely on both sides of the water-cooling jacket body. Each lifting part 4 includes a driving part and a transmission part. The transmission part is connected to the outer cylinder 1 through a connecting structure, so that the two lifting parts 4 The lifting part 4 can move asynchronously to drive the water cooling jacket body to tilt at a preset angle.

Through the setting of the lifting structure, the lifting of the water-cooling jacket body is controlled, and the two lifting parts 4 are driven independently, so that the two lifting parts 4 can move asynchronously, so that the water-cooling jacket body can move within a preset angle range The inner tilt forms an asymmetric water cooling effect. The large gradient change can accelerate the heat transfer of the crystal ingot to the water cooling jacket, improve the heat transfer efficiency, and accelerate the axial and radial heat dissipation of the crystal ingot. And according to the needs of the crystal pulling step, the longitudinal and radial temperature gradients of the crystal rod can be adjusted to a large extent, the reaction rate of defects in the crystal rod can be controlled, and the defect distribution can be adjusted. It has a good cooling rate and can pull different defects. Types of crystal rods (such as fault-free crystal rods, BMD crystal rods).

Crystal ingots with different step parameter requirements need to match different water cooling effects. The asynchronously moving water cooling jacket device can be adjusted accordingly to obtain appropriate cooling effects according to needs.

The purpose of asynchronous movement is to create a radial asymmetry effect and improve the water cooling effect. The role of the lifting mechanism: when drawing epitaxial crystal ingots, a large drawing speed is required, and the water cooling jacket moves toward the liquid surface to increase the cooling effect. This can be used to increase the pulling speed; when drawing defect-free polished crystal ingots, the water-cooling jacket can be moved upward to inhibit the formation of COP; when drawing BMD crystal ingots, it will promote the nucleation and growth of BMD and can be passed through the water-cooling jacket. Through movement adjustment, BMD nucleates at a low temperature of 650℃-700℃. At the same time, for high temperature areas, through asynchronous movement adjustment, the ingot range is expanded within the temperature range of 750℃-1100℃. This is used to promote the high-temperature nucleation of BMD.

It should be noted that under the action of the lifting structure, the cooperation of the two opposite lifting parts 4 can make the water-cooling jacket body tilt and lift, that is, after the two lifting parts 4 are tilted at a preset angle through asynchronous movement, Then, the two lifting parts 4 are controlled to move synchronously to control the water cooling jacket body to perform lifting movement in an inclined state.

It should be noted that the number of the lifting parts 4 included in the lifting structure is not limited. Two lifting parts 4 are provided on opposite sides of the water cooling jacket body, and the two opposite lifting parts 4 form a group. The lifting structure may include multiple groups of the lifting parts 4. Each group of the lifting parts 4 can tilt the water-cooling jacket body in one direction, so that multiple groups of the lifting parts 4 can be provided according to actual needs, thereby flexibly controlling the water-cooling jacket body. The tilt direction of the water cooling jacket body can better control the water cooling effect.

It should be noted that the cooperation of the two opposite lifting parts 4 can make the water-cooling jacket body tilt and lift. The tilt angle can be set according to actual needs, for example, it can be 0-17 degrees, but it is not limited to this.

By way of example, the transmission parts include: The lifting rod 41 extends along the axial direction of the outer cylinder 1, and a rack 411 structure is provided on the outer surface of the lifting rod 41; The transmission gear 42 is transmission connected to the lifting rod 41 by meshing with the rack 411 structure.

In this embodiment, the transmission gear 42 and the lifting rod 41 are matched. The transmission gear 42 rotates, and under the driving action of the lifting rod 41, the water cooling jacket body is raised and lowered.

For example, the driving member of each lifting part 4 may be a driving motor.

For example, the outer surface of one lifting rod 41 has a first area located away from the other lifting rod 41. The first area is concave to form a connecting surface, and the rack 411 structure is disposed on the connecting surface.

The connecting surface is a plane parallel to the axial direction of the outer cylinder 1. The rack 411 structure is provided on the connecting surface, which facilitates the cooperation between the rack 411 structure and the transmission gear 42.

Exemplarily, the rack 411 structure includes a plurality of parallel racks 411 protruding from the connection surface. The plurality of racks 411 are arranged side by side along the axial direction of the outer cylinder 1. Two adjacent racks 411 are arranged side by side. A tooth gap is formed between the racks 411 .

The extension direction of the rack 411 is perpendicular to the axial direction of the outer cylinder 1, the axial direction of the transmission gear 42 is parallel to the extension direction of the rack 411, and the teeth of the transmission gear 42 correspond to the tooth groove, Thereby, the transmission gear 42 rotates, driving the lifting rod 41 to perform lifting movement, thereby driving the water cooling jacket body to perform lifting movement.

For example, the rack 411 is a threaded rack, and the threaded rack has the characteristics of high precision and large load.

Exemplarily, a limiting platform 43 is provided at one end of the lifting rod 41 away from the outer cylinder 1 .

The setting of the limiting platform 43 prevents the transmission gear 42 from being separated from the lifting rod 41. The limiting platform 43 can be a circular structure, and the area of the limiting platform 43 in the radial direction of the lifting rod 41 is larger than The cross-sectional area of the end surface of the lift rod 41.

The limiting platform 43 can be an integral structure with the lifting rod 41 , can be connected through welding and other steps, or can be formed simultaneously when the connection surface is formed. The first area can be located in the middle of the lifting rod 41 , a groove is formed in the first area, and the bottom surface of the groove is the connecting surface, so that in the axial direction of the lifting rod 41, the first side wall of the end of the groove away from the outer cylinder 1 forms the The limiting platform 43 and the second side wall of the groove that is opposite to the first side wall form a limiting retaining wall for limiting the movement stroke of the transmission gear 42 .

For example, in the axial direction of the outer cylinder 1 , the length of the first region is less than the length of the lifting rod 41 , and the first region is located at an end of the lifting rod 41 away from the outer cylinder 1 .

For example, in the axial direction of the outer cylinder 1 , the length of the first region is greater than half of the length of the lifting rod 41 .

Exemplarily, the connection part 5 includes a snap ring 51 that is sleeved on the outside of the outer cylinder 1. Two protrusions 52 are formed on opposite sides of the snap ring 51, and each protrusion 52 is provided with a The connecting through hole 521 is connected to the corresponding lifting rod 41 .

Exemplarily, the lifting rod 41 is provided with a connecting ring 44 at one end close to the outer cylinder 1. The connecting ring 44 is threadedly connected to the lifting rod 41. The lifting rod 41 and the protrusion 52 are loosely matched with a gap, which facilitates When the two lifting rods 41 move asynchronously, the water cooling jacket is tilted.

For example, the top of the outer cylinder 1 is provided with a first flange 11 , and the snap ring 51 is provided on a side of the first flange 11 close to the bottom of the outer cylinder 1 .

The snap ring 51 can be bonded to the first flange 11 through an adhesive layer to enhance the connection strength between the connecting portion 5 and the outer cylinder 1 .

Referring to Figures 1, 5 and 6, as an example, the inner cylinder 2 has an inverted conical structure.

Compared with a single straight cylinder structure, this embodiment adopts a double-layer structure of an inner cylinder and an outer cylinder. The outer cylinder adopts a straight cylinder structure. The outer cylinder plays a role in blocking heat. The inner cylinder adopts an inverted cylinder. The tapered structure can form a longitudinal gradient water cooling effect, because the temperature in the longitudinal direction of the crystal rod (that is, the axial direction of the crystal rod) changes in a gradient (the lower end is hot and the upper end is cold, the end close to the silicon melt is the lower end, and the end far away from the silicon melt is One end is the upper end), the heat of the crystal rod is mainly transmitted to the surrounding low-temperature objects by radiation. The intensity of radiation heat transfer is inversely proportional to the cube of the distance, that is, the closer the distance, the stronger the radiation heat transfer, and the corresponding water cooling effect The better, the inner cylinder has an inverted conical shape, and along the longitudinal direction, the distance between the inner wall of the inner cylinder and the crystal rod in the radial direction of the crystal rod changes in a gradient, which can achieve the effect of gradient water cooling, that is, longitudinal asymmetry. The effect is to achieve radial and axial gradient temperature gradient changes, greatly improve the axial and radial heat dissipation of the crystal rod, reduce internal heat accumulation, change the thermal history of the crystal rod, and reduce the occurrence of misalignment and other crystal defects. Improve the quality of crystal ingots. According to the needs of the crystal pulling step, the inclination angle of the inner wall of the inner cylinder can be adjusted to greatly adjust the longitudinal (ie axial) and radial temperature gradient of the crystal rod, control the reaction rate of defects in the crystal rod, and adjust Defect distribution.

In this embodiment, the two lifting parts 4 are driven independently, so that the two lifting parts 4 can move asynchronously, so that the water cooling jacket body can tilt within a preset angle range to form asymmetry in the radial direction. The inner cylinder adopts the longitudinal (i.e. axial) asymmetry effect formed by the inverted cone structure, so that the two work together to achieve double asymmetry in the radial and axial directions of the crystal rod, thereby improving the axial and radial dimensions of the crystal rod. Directional heat dissipation efficiency.

For example, the inner diameter of the top of the inner cylinder is 450 mm, and the inner diameter of the bottom of the inner cylinder is 390 mm, but this is not a limitation.

The top of the inner cylinder is provided with a second flange 22. The top of the outer cylinder is provided with a first flange 11. The first flange 11 is provided with a step-shaped groove 13 on one side close to the inner cylinder. The second flange 22 is provided on the top of the inner cylinder. The flange 22 overlaps in the stepped groove 13 .

The first surface of the second flange 22 away from the bottom of the inner cylinder and the second surface of the first flange 11 away from the bottom of the inner cylinder are located on the same plane.

The bottom of the inner cylinder has a first through hole, and the bottom of the outer cylinder has a second through hole 12. The orthogonal projection of the center of the first through hole on the bottom of the outer cylinder 1 is equal to the center of the second through hole 12. coincide.

For example, an annular protrusion 14 protrudes from the edge of the second through hole 12 toward the top of the outer cylinder 1 . The annular protrusion 14 functions as a retaining wall for limiting the position of the inner cylinder 2 .

For example, along the axial direction of the inner cylinder 2, a toothed corrugated structure 21 is provided on the inner wall of the inner cylinder 2.

The arrangement of the toothed corrugated structure 21 can increase the surface area of the inner wall of the inner cylinder, that is, increase the heat absorption area of the water cooling jacket. Compared with a smooth surface, such a surface has a better heat absorption effect and has a good cooling effect of the ingot.

The toothed corrugated structure 21 includes a plurality of ring-shaped teeth extending along the circumferential direction of the inner cylinder 2. The plurality of ring-shaped teeth are arranged along the axial direction of the inner cylinder 2. The cross-sectional shape of a single ring-shaped tooth can be triangular, trapezoidal, or Arc etc.

For example, in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 , the thickness of the toothed corrugated structure 21 in the radial direction of the inner cylinder 2 gradually increases.

For example, the inner side wall of the inner cylinder 2 is provided with a heat-absorbing coating.

The heat-absorbing coating is disposed on the side of the toothed corrugated structure 21 away from the outer cylinder 1 . The shape of the heat-absorbing coating is consistent with the shape of the toothed corrugated structure 21 , that is, the connection between the heat-absorbing coating and the inner cylinder 2 Both the surface and the inner surface opposite to the connecting surface are toothed corrugated structures 21 .

The heat-absorbing coating has a heat-absorbing effect. The bonding strength between the heat-absorbing coating and the inner cylinder 2 is high, which can effectively alleviate the thermal stress at the interface of the heat-absorbing coating (the connection surface between the heat-absorbing coating and the inner cylinder 2), and has stable thermodynamic properties. , the inner cylinder 2 can take away the heat transmitted by the crystal rod very well and instantly, greatly improving the cooling rate of the crystal rod, increasing the pulling speed, and increasing the crystal pulling efficiency.

Exemplarily, the outer wall of the inner cylinder 2 is provided with a heat-insulating coating, and the heat-absorbing coating is in the radial direction of the inner cylinder 2 from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 The thickness gradually increases.

Illustratively, the heat-absorbing coating is made of ceramic, but is not limited to this.

For example, the thickness of the heat-absorbing coating is 200±50 microns.

For example, the outer side wall of the inner cylinder 2 and/or the inner side wall of the outer cylinder 1 is provided with a heat-insulating coating.

The heat-insulating coating has the function of reflecting and shielding heat, preventing external heat from being transmitted from the outer cylinder 1 to the inside of the water-cooling jacket (ie, the inside of the inner cylinder 2), and maintaining a constant temperature inside the water-cooling jacket.

For example, the thickness of the heat-insulating coating in the radial direction of the inner cylinder 2 gradually increases from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 .

For example, the heat-insulating coating is made of high-temperature-resistant and heat-insulating zirconia ceramics.

For example, the thickness of the thermal insulation coating is 100±25 microns, but is not limited to this.

For example, along the axial direction of the inner cylinder 2 , the water-cooling pipes 3 are spirally distributed around the outer wall of the inner cylinder 2 .

The water-cooling pipe 3 can be provided on the outer side wall of the inner cylinder 2 or on the inner side wall of the outer cylinder 1 .

The specific structural form of the water-cooling pipe 3 is not limited to this. For example, the water-cooling pipe 3 can be in a serpentine shape and is distributed on the outer wall of the inner cylinder 2. The water-cooling pipe 3 is in a serpentine shape, including along the inner cylinder 2. A plurality of axially extending linear pipes and a bent pipe arranged between two adjacent linear pipes.

For example, the diameter of the water-cooling pipe 3 gradually increases in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 .

Using the above solution, the water cooling effect of the water cooling pipe 3 changes in a gradient along the axial direction of the inner cylinder 2, which is conducive to the adjustment of the gradient temperature in the radial direction and the axial direction.

For example, the diameter of the water-cooling pipe is 5mm-10mm, but it is not limited to this.

For example, the circumferential spacing of the water-cooling pipes in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2 is 48 mm.

Referring to Figures 1 and 7, for example, the bottom of the water-cooling jacket body is provided with an adjustment sleeve 6 that communicates with the inside of the water-cooling jacket body. The adjustment sleeve 6 includes a first end connected to the water-cooling jacket body, and At the second end opposite to the first end, from the first end to the second end, the cross-sectional area of the adjusting sleeve 6 in the radial direction of the water-cooling jacket body gradually decreases.

Through the arrangement of the adjusting sleeve 6, the heat below the water-cooling jacket body is blocked from being transmitted to the internal space of the water-cooling jacket, effectively blocking the bottom-up dissipation of heat. And the cross-sectional area of the adjusting sleeve 6 gradually decreases in the radial direction of the water-cooling jacket body. When the inert gas flow blows through the adjusting sleeve from above the crystal pulling furnace, the flow rate becomes larger, ensuring that the inert gas The full contact between the flow and the crystal rod increases the cooling rate of the crystal rod, well adjusts the longitudinal and radial temperature gradients of the crystal rod, controls the reaction rate of defects in the crystal rod, adjusts the defect distribution, and draws different types of crystal rods .

For example, the inner surface of the adjustment sleeve 6 is a curved surface.

For example, the cross-section shape of the adjustment sleeve 6 in the axial direction of the water-cooling jacket body is a parabolic shape.

For example, in the axial direction of the water-cooling jacket body, the adjustment sleeve 6 includes a first part close to the water-cooling jacket body and a second part adjacent to the first part, and the outer surface of the second part is concave. The recess 61 is formed.

The water-cooling jacket is located above the crucible, and the concave portion 61 is provided to directionally reflect the heat below to the graphite component or the silicon melt liquid surface below the water-cooling jacket, thereby maintaining the stability of the temperature field below.

For example, the inner surface of the adjustment sleeve 6 is provided with a heat absorption layer.

The heat-absorbing layer has a heat-absorbing effect. The bonding strength between the heat-absorbing layer and the adjusting sleeve 6 is high, which can effectively alleviate the thermal stress at the interface of the heat-absorbing layer (the connection surface between the heat-absorbing layer and the adjusting sleeve 6). The thermodynamic properties are stable. The adjusting sleeve 6 can effectively and immediately take away the heat transmitted by the crystal rod, greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.

For example, the heat-absorbing layer includes a first layer close to the adjustment sleeve 6 and a second layer far away from the adjustment sleeve. The first layer is formed by a chemical reaction between graphite material and the inner wall of the adjustment sleeve 6 . Transition layer.

The adjusting sleeve is made of carbon fiber composite material, the first layer is _C+SiC composite transition coating (thickness is 80±10 microns), and the second layer is _SiC coating (thickness is 50±5 microns) . Such a coating structure (the above-mentioned combination of the heat-absorbing layer and the adjusting sleeve) has the characteristics of high bonding strength and high density. It can protect the substrate very well and extend its service life.

For example, the thickness of the heat absorption layer is 130±15 microns.

For example, the outer surface of the adjustment sleeve 6 is provided with a heat insulation layer.

The heat insulation layer has the function of reflecting and shielding heat, preventing external heat from being transmitted from the adjusting sleeve 6 to the inside of the water-cooling jacket, and maintaining a constant temperature inside the water-cooling jacket.

For example, the heat insulation layer includes a third layer close to the adjustment sleeve 6 and a fourth layer far away from the adjustment sleeve. The third layer is a transition formed by a chemical reaction between the graphite material and the outer wall of the adjustment sleeve. layer.

The adjustment sleeve is made of carbon fiber composite material, the third layer is _C+SiC composite transition coating (thickness is 80±10 microns), and the fourth layer is _SiC coating (thickness is 50±5 microns) . Such a coating structure (the above-mentioned combination of the heat insulation layer and the adjustment sleeve) has the characteristics of high bonding strength and high density. It can protect the substrate very well and extend its service life.

For example, the thickness of the thermal insulation layer is 160±15 microns.

Exemplarily, the water-cooling jacket body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2. The bottom of the outer cylinder 1 includes a first area for carrying the inner cylinder and is adjacent to the first area. The second area is located close to the side wall of the outer cylinder 1. A flange (third flange 62) is provided on the top of the adjusting sleeve 6, and the flange is connected to the second area.

An embodiment of the present invention also provides a single crystal furnace, which includes a furnace body, a crucible located in the furnace body, and the water-cooling jacket body is fixed above the crucible due to the lifting function of the lifting structure.

The above are only preferred embodiments of the present invention and are not intended to limit the implementation scope of the present invention. If the present invention is modified or equivalently substituted without departing from the spirit and scope of the present invention, the protection shall be covered by the patent scope of the present invention. within the range.

1:Outer barrel 2: Inner cylinder 3:Water cooling pipe 4:Lifting part 5:Connection part 6:Adjustment sleeve 11:First flange 12:Second through hole 13: Step-shaped groove 14: Annular bulge 21:Toothed corrugated structure 22:Second flange 41:Lifting rod 42:Transmission gear 43:Limiting table 44:Connecting ring 411:Rack 51: snap ring 52:bulge 521:Through hole 61: concave part 62:Third flange

Figure 1 shows a schematic structural diagram of the water cooling jacket device in the embodiment of the present invention; Figure 2 shows a schematic structural diagram of the lifting rod in the embodiment of the present invention; Figure 3 shows the second structural schematic diagram of the lifting rod in the embodiment of the present invention; Figure 4 shows a schematic structural diagram of the connection part in the embodiment of the present invention; Figure 5 shows a schematic structural diagram of the inner cylinder in an embodiment of the present invention; Figure 6 shows a schematic structural diagram of the outer cylinder in the embodiment of the present invention; Figure 7 shows a schematic structural diagram of the adjusting sleeve in the embodiment of the present invention.

1:Outer barrel

2: Inner cylinder

3:Water cooling pipe

4:Lifting part

5:Connection part

6:Adjustment sleeve

11:First flange

22:Second flange

Claims (10)

A water-cooling jacket device, including a water-cooling jacket body and a lifting structure for controlling the lifting and lowering of the water-cooling jacket body; The water cooling jacket body includes an inner cylinder and an outer cylinder located outside the inner cylinder; The lifting structure includes two lifting parts arranged oppositely on both sides of the water-cooling jacket body. Each lifting part includes a driving part and a transmission part. The transmission part is connected to the outer cylinder through a connecting structure, so that the two lifting parts It can move asynchronously to drive the water-cooling jacket body to tilt at a preset angle. The water-cooling jacket device of claim 1, wherein the transmission member includes: A lifting rod extends along the axial direction of the outer cylinder, and a rack structure is provided on the outer surface of the lifting rod; A transmission gear, which is in transmission connection with the lifting rod by meshing with the rack structure. The water cooling jacket device according to claim 2, wherein the outer surface of one of the two lifting rods has a first area disposed away from the other lifting rod, and the first area is concave to form a connecting surface. , the rack structure is provided on the connection surface. The water cooling jacket device according to claim 3, wherein the rack structure includes a plurality of parallel racks protruding from the connecting surface, and a plurality of the racks are arranged side by side along the axial direction of the outer cylinder. , a cogging is formed between two adjacent racks. The water-cooling jacket device of claim 2, wherein a limiting platform is provided at one end of the lifting rod away from the outer cylinder. The water-cooling jacket device of claim 3, wherein in the axial direction of the outer cylinder, the length of the first region is less than the length of the lifting rod, and the first region is located away from the lifting rod and away from the outer cylinder. One end. The water-cooling jacket device of claim 6, wherein the length of the first region is greater than half of the length of the lifting rod in the axial direction of the outer cylinder. The water-cooling jacket device according to claim 2, further comprising a connecting portion, the connecting portion includes a snap ring sleeved on the outside of the outer cylinder, and two protrusions are formed on opposite sides of the snap ring, each of which is The protrusion is provided with a connection through hole for connecting with the corresponding lifting rod. The water cooling jacket device according to claim 8, wherein a first flange is provided on the top of the outer cylinder, and the snap ring is disposed on a side of the first flange close to the bottom of the outer cylinder. A single crystal furnace including the water-cooling jacket device described in any one of claims 1 to 9.