CN114871938A - Wing type self-suspension grinding disc - Google Patents
Wing type self-suspension grinding disc Download PDFInfo
- Publication number
- CN114871938A CN114871938A CN202210501981.2A CN202210501981A CN114871938A CN 114871938 A CN114871938 A CN 114871938A CN 202210501981 A CN202210501981 A CN 202210501981A CN 114871938 A CN114871938 A CN 114871938A
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- CN
- China
- Prior art keywords
- wing
- shaped
- disc
- workpiece
- fan blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/003—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor whereby the workpieces are mounted on a holder and are immersed in the abrasive material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The wing-shaped self-suspension grinding disc comprises a disc-shaped main body, wherein a plurality of wing-shaped fan blades are uniformly distributed on the outer edge of the disc-shaped main body along the circumferential direction, and the two sides of each wing-shaped fan blade along the circumferential direction are respectively a front edge and a rear edge; the connecting line between the leading edge and the trailing edge of the airfoil fan blade is a chord, and the chord is inclined upwards from the trailing edge to the leading edge; the included angle between the rear edge of the wing-shaped fan blade and the horizontal plane is gradually reduced from the direction close to the circle center of the disc-shaped main body to the direction far away from the circle center of the disc-shaped main body; the lower surface of the wing-shaped self-suspension grinding disc is used for connecting a workpiece, the wing-shaped self-suspension grinding disc performs rotary motion in polishing solution to generate liquid dynamic pressure and upper and lower surface pressure difference to drive the workpiece to float, and the workpiece is in contact with polishing solution grinding materials. The device is simple and has lower cost; the surface roughness and the flatness of the workpiece can be improved; the bottom of the grinding disc is stable, and stable abrasive particle flow can be generated in high-speed rotation, so that damage to a workpiece caused by unstable flow rate of polishing solution is reduced; simple operation condition and wide development prospect.
Description
Technical Field
The invention relates to the technical field of suspension base disc polishing devices, in particular to an airfoil-shaped self-suspension grinding disc.
Background
The grinding is to inject different abrasive materials into a rigid grinding tool (such as soft metal like cast iron, tin, aluminum, etc. or hard wood, plastic, etc.), and remove trace materials on the processed surface by the cutting of abrasive particles through the relative sliding of the grinding tool and the workpiece under a certain pressure.
The active-driven suspended-base polishing device proposed by chinese patent application No. (201210140631.4) has a plane abrasive disk suspended by a polishing tool disk through a wedge-shaped region of a convergent gap to generate hydrodynamic pressure, so as to keep the workpiece surface and abrasive particles in a non-contact state, but the device has two problems as proved by practice:
(1) the grinding disc obtains hydraulic pressure in the circumferential motion through the bottom surface wedge, when the grinding disc rotates at a high speed, fluctuation of water flow speed and force acting on a workpiece can be generated due to the fact that the bottom surface is uneven, and the action force of abrasive particles on the surface of the workpiece can be influenced due to uneven change of the water flow force, so that the polishing quality is influenced.
(2) In ultra-precision machining, an ultra-smooth surface with few machined deteriorated layers is required to be obtained, and the linear velocity of the grinding disc is higher as the grinding disc is farther away from the center of a circle in the circular motion, so that the friction force is higher at the position of the workpiece farther away from the center of the circle, and the surface quality of the workpiece is influenced due to uneven distribution of the friction force.
Disclosure of Invention
In order to solve the problems of low surface quality and uneven stress of workpieces caused by alternating impact in the existing grinding disc, the invention provides the airfoil-shaped self-suspension grinding disc which can automatically suspend in high-speed rotation and can obtain higher surface quality.
The technical scheme adopted by the invention is as follows: the wing-shaped self-suspension grinding disc comprises a disc-shaped main body, wherein a plurality of wing-shaped fan blades are uniformly distributed on the outer edge of the disc-shaped main body along the circumferential direction, and the two sides of each wing-shaped fan blade along the circumferential direction are respectively a front edge and a rear edge; the connecting line between the front edge and the rear edge of the wing-shaped fan blade is a wing chord, the wing chord is inclined upwards from the rear edge to the front edge, and the included angle between the rear edge of the wing-shaped fan blade and the horizontal plane is gradually reduced from the direction close to the center of the circular disc-shaped main body to the direction far away from the center of the circular disc-shaped main body; the lower surface of the wing-shaped self-suspension grinding disc is used for connecting a workpiece, the wing-shaped self-suspension grinding disc performs rotary motion in polishing solution to generate liquid dynamic pressure and upper and lower surface pressure difference to drive the workpiece to float, and the workpiece is in contact with polishing solution grinding materials.
Furthermore, a diversion trench is arranged between two adjacent wing-shaped fan blades, so that the polishing solution can flow and be supplemented conveniently.
Further, the lower surface of the wing-shaped fan blade is provided with a patch area used for being pasted with a workpiece.
When the device is used, a workpiece to be processed is stuck to the sticking area 1 on the lower surface of the wing-shaped self-suspension grinding disc by paraffin, the grinding disc stuck with the workpiece is arranged in a processing device to rotate at a high speed in polishing liquid, the upper surface of a wing-shaped fan blade flows faster than the lower surface, so that the pressure applied to the upper surface (the direction is downward) is lower than the pressure applied to the lower surface (the direction is upward), and the grinding disc floats by a height H due to hydrodynamic lift force generated by the fan blade, so that the aim of soft contact between the workpiece and polishing liquid grinding materials is fulfilled.
The invention has the following theoretical basis and technical conception:
when a nano-mechanics characterization sample is prepared, less damage (less deterioration layer) and good surface quality are required, and the formation of less damage and ultra-smooth surface depends on the contact state of abrasive particles and the surface of a workpiece. When the wing-type self-suspension grinding disc is used for grinding, the grinding disc rotates around the axis of the grinding disc, a workpiece is adhered to the bottom surface of the self-suspension grinding disc, the processed surface of the workpiece faces downwards, and the workpiece is pressed on the surface of the grinding disc by liquid pressure and rotates around the rotating shaft. The suspension base disc in the actively driven suspension base disc polishing device proposed in patent application No. (201210140631.4) is provided with wedge-shaped grooves on the circumference, using hydrodynamic phenomena and powder action: when the disc with a plurality of inclined planes (wedge-shaped grooves) arranged along the circumferential direction rotates in a liquid (polishing solution) environment, the base disc floats by a height H due to the liquid dynamic pressure generated by the wedge-shaped grooves, so that particles in the polishing solution do not have strong vertical force but become soft collision of the polishing particles in the horizontal direction when the polishing workpiece is polished, and further the damage of the workpiece is reduced. However, since the wedge-shaped groove is a simple plane, liquid fluctuation exists in the process of high-speed rotation, so that alternating impact exists between the workpiece and abrasive particles, the linear velocity is larger at the position far away from the circle center, the stress of the workpiece is uneven, and the quality of the processed surface is influenced, the bottom of the wing-shaped self-suspension grinding disc is a curved surface with smaller fluctuation, the liquid impact fluctuation generated in the process of high-speed rotation of the grinding disc is smaller, the included angle between the wing-shaped curve and the horizontal plane is smaller at the position far away from the circle center, the generated hydraulic pressure is smaller, and the problem that more materials are removed at the position far away from the circle center due to the larger friction force when the wing-shaped curve is far away from the circle center during the circular motion of the grinding disc is better balanced, so that the grinding disc replaces the original actively-driven suspension base disc polishing device, and the water flow fluctuation caused by the wedge-shaped groove when the hydraulic pressure is generated can be effectively reduced, and the workpieces are stressed unevenly due to different linear speeds, so that the characterization sample (the plane test piece) has less damage and high surface quality.
The invention has the beneficial effects that:
(1) the device is simple and the cost is low;
(2) the surface roughness and the flatness of the workpiece can be improved;
(3) the bottom of the grinding disc is stable, and stable abrasive particle flow can be generated in high-speed rotation, so that damage to a workpiece caused by unstable flow rate of polishing solution is reduced;
(4) simple operation condition and wide development prospect.
Drawings
FIG. 1 is a top view of the present invention.
Fig. 2 is a bottom view of the present invention.
Fig. 3 is a front oblique view of the present invention.
Fig. 4 is a rear oblique view of the present invention.
FIG. 5 is a front view of a single airfoil fan blade and two airfoil profiles of the present invention.
Description of reference numerals: 1. the patch area 2, the lower surface of the airfoil fan blade 3 and the diversion trench.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the orientations or positional relationships indicated as the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., appear based on the orientations or positional relationships shown in the drawings only for the convenience of describing the present invention and simplifying the description, but not for indicating or implying that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" as appearing herein are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" should be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to the attached drawings, the airfoil-shaped self-suspension grinding disc comprises a disc-shaped main body, wherein a plurality of airfoil-shaped fan blades are arranged on the disc-shaped main body along the circumferential direction, and the two sides of each airfoil-shaped fan blade along the circumferential direction are respectively a front edge and a rear edge; the connecting line between the front edge and the rear edge of each wing-shaped fan blade is a wing chord, the wing chord inclines upwards from the rear edge to the front edge, and a flow guide groove 3 is arranged between every two adjacent wing-shaped fan blades, so that the polishing liquid can flow and be supplemented conveniently. The lower surface 2 of the airfoil fan blade is provided with a patch area 1 for adhering to a workpiece.
Making a concentric circle section from the direction close to the circle center of the disc-shaped main body to the direction far away from the circle center of the disc-shaped main body, wherein the included angle between the tail part of the airfoil-shaped fan blade and the horizontal plane is gradually reduced; as shown in fig. 5, the airfoil fan blades of the grinding disc are concentrically sectioned, the included angle between the tail of the airfoil fan blade in the section close to the center of circle and the horizontal plane is α 1, the included angle between the tail of the airfoil fan blade in the section far from the center of circle and the horizontal plane is α 2, and α 2 is less than α 1. The lower surface of the wing-shaped self-suspension grinding disc is used for connecting a workpiece, the wing-shaped self-suspension grinding disc performs rotary motion in polishing solution to generate liquid dynamic pressure and upper and lower surface pressure difference to drive the workpiece to float, and the workpiece is in contact with polishing solution grinding materials.
When the polishing device is used, a workpiece to be processed is adhered to a sticking area 1 (workpieces such as silicon wafers, sapphire sheets and the like can be made by paraffin) of the wing-type self-suspension grinding disc shown in the figure, the wing-type self-suspension grinding disc is driven to rotate by the suspension base disc polishing device which can be actively driven and is disclosed in Chinese patent 201210140631.4, and the wing-type self-suspension grinding disc and the workpiece are floated by a height H according to a dynamic pressure floating principle and a wing-type fan blade principle, so that the purpose of contacting the workpiece with software of polishing liquid grinding materials is achieved.
The invention has the following theoretical basis and technical conception:
when a nano-mechanics characterization sample is prepared, less damage (less deterioration layer) and good surface quality are required, and the formation of less damage and ultra-smooth surface depends on the contact state of abrasive particles and the surface of a workpiece. When the wing-type self-suspension grinding disc is used for grinding, the grinding disc rotates around the axis of the grinding disc, a workpiece is adhered to the bottom surface of the self-suspension grinding disc, the processed surface of the workpiece faces downwards, and the workpiece is pressed on the surface of the grinding disc by liquid pressure and rotates around the rotating shaft. The suspension base disc in the actively driven suspension base disc polishing device proposed in patent application No. (201210140631.4) is provided with wedge-shaped grooves on the circumference, using hydrodynamic phenomena and powder action: when the disc with a plurality of inclined planes (wedge-shaped grooves) arranged along the circumferential direction rotates in a liquid (polishing solution) environment, the base disc floats by a height H due to the liquid dynamic pressure generated by the wedge-shaped grooves, so that particles in the polishing solution do not have strong vertical force but become soft collision of the polishing particles in the horizontal direction when the polishing workpiece is polished, and further the damage of the workpiece is reduced. However, since the wedge-shaped groove is a simple plane, liquid fluctuation exists in the process of high-speed rotation, so that alternating impact exists between a workpiece and abrasive particles, the linear velocity is larger at the position far away from the circle center, the stress of the workpiece is uneven, the quality of the processed surface is influenced, the bottom of the wing-shaped self-suspension grinding disc is a curved surface with smaller fluctuation, the liquid impact fluctuation generated in the process of high-speed rotation of the grinding disc is smaller, the included angle between the wing-shaped curve and the horizontal plane is smaller at the position far away from the circle center, the generated hydraulic pressure is smaller, the problem that when the grinding disc moves circumferentially, more material is removed on the surface of the workpiece far away from the circle center due to the larger friction force is solved better, the grinding disc replaces the original actively-driven suspension base disc polishing device, and the water flow fluctuation caused by the wedge-shaped groove when hydraulic pressure is generated can be effectively reduced, and the workpieces are stressed unevenly due to different linear speeds, so that the characterization sample (the plane test piece) has less damage and high surface quality.
The embodiments described in this specification are merely illustrative of implementations of the inventive concept and the scope of the present invention should not be considered limited to the specific forms set forth in the embodiments but rather by the equivalents thereof as may occur to those skilled in the art upon consideration of the present inventive concept.
Claims (3)
1. Wing section is from floated abrasive disc, its characterized in that: the fan blade structure comprises a disc-shaped main body, wherein a plurality of wing-shaped fan blades are uniformly distributed on the outer edge of the disc-shaped main body along the circumferential direction, and the two sides of each wing-shaped fan blade along the circumferential direction are respectively a front edge and a rear edge; the connecting line between the leading edge and the trailing edge of the airfoil fan blade is a chord, and the chord is inclined upwards from the trailing edge to the leading edge; the included angle between the rear edge of the wing-shaped fan blade and the horizontal plane is gradually reduced from the direction close to the circle center of the disc-shaped main body to the direction far away from the circle center of the disc-shaped main body; the lower surface of the wing-shaped self-suspension grinding disc is used for connecting a workpiece, the wing-shaped self-suspension grinding disc performs rotary motion in polishing solution to generate liquid dynamic pressure and upper and lower surface pressure difference to drive the workpiece to float, and the workpiece is in contact with polishing solution grinding materials.
2. The airfoil self-levitating abrasive disk of claim 1, wherein: a diversion trench is arranged between two adjacent wing-shaped fan blades, so that the polishing solution can flow and be supplemented conveniently.
3. The airfoil self-levitating abrasive disk of claim 1, wherein: the lower surface of the wing-shaped fan blade is provided with a patch area used for being pasted with a workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210501981.2A CN114871938B (en) | 2022-05-09 | 2022-05-09 | Wing type self-suspension grinding disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210501981.2A CN114871938B (en) | 2022-05-09 | 2022-05-09 | Wing type self-suspension grinding disc |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114871938A true CN114871938A (en) | 2022-08-09 |
| CN114871938B CN114871938B (en) | 2023-03-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210501981.2A Active CN114871938B (en) | 2022-05-09 | 2022-05-09 | Wing type self-suspension grinding disc |
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| CN (1) | CN114871938B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1620281A1 (en) * | 1989-02-02 | 1991-01-15 | А.В. Чемерский и В.Н. Чешев | Flap buffing wheel |
| TW518268B (en) * | 1995-12-08 | 2003-01-21 | Sainy Gobain Abrasives Inc | Improvements to sanding disks |
| RU2271920C1 (en) * | 2004-09-22 | 2006-03-20 | Государственное образовательное учреждение высшего профессионального образования "Орловский государственный технический университет" (ОрелГТУ) | Apparatus for feeding cutting fluid |
| CN101708592A (en) * | 2009-11-05 | 2010-05-19 | 浙江工业大学 | Base disc used for suspension polishing |
| CN102699809A (en) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | Suspension base disc polishing device capable of being actively driven |
| US20150202742A1 (en) * | 2014-01-20 | 2015-07-23 | Pratt & Whitney Canada Corp. | Grinding wheel and method |
| CN105538045A (en) * | 2015-12-09 | 2016-05-04 | 浙江工业大学 | Hydraulic and dynamic suspension polishing method and device based on self-adaption and fixed processing gap |
| CN207087593U (en) * | 2017-03-03 | 2018-03-13 | 朱胜利 | A kind of silicon chip surface abrasion frame and surface abrasion device |
-
2022
- 2022-05-09 CN CN202210501981.2A patent/CN114871938B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1620281A1 (en) * | 1989-02-02 | 1991-01-15 | А.В. Чемерский и В.Н. Чешев | Flap buffing wheel |
| TW518268B (en) * | 1995-12-08 | 2003-01-21 | Sainy Gobain Abrasives Inc | Improvements to sanding disks |
| RU2271920C1 (en) * | 2004-09-22 | 2006-03-20 | Государственное образовательное учреждение высшего профессионального образования "Орловский государственный технический университет" (ОрелГТУ) | Apparatus for feeding cutting fluid |
| CN101708592A (en) * | 2009-11-05 | 2010-05-19 | 浙江工业大学 | Base disc used for suspension polishing |
| CN102699809A (en) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | Suspension base disc polishing device capable of being actively driven |
| US20150202742A1 (en) * | 2014-01-20 | 2015-07-23 | Pratt & Whitney Canada Corp. | Grinding wheel and method |
| CN105538045A (en) * | 2015-12-09 | 2016-05-04 | 浙江工业大学 | Hydraulic and dynamic suspension polishing method and device based on self-adaption and fixed processing gap |
| CN207087593U (en) * | 2017-03-03 | 2018-03-13 | 朱胜利 | A kind of silicon chip surface abrasion frame and surface abrasion device |
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| Publication number | Publication date |
|---|---|
| CN114871938B (en) | 2023-03-28 |
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