CN114871938B - Wing type self-suspension grinding disc - Google Patents
Wing type self-suspension grinding disc Download PDFInfo
- Publication number
- CN114871938B CN114871938B CN202210501981.2A CN202210501981A CN114871938B CN 114871938 B CN114871938 B CN 114871938B CN 202210501981 A CN202210501981 A CN 202210501981A CN 114871938 B CN114871938 B CN 114871938B
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- Prior art keywords
- wing
- disc
- shaped
- workpiece
- fan blade
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/003—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor whereby the workpieces are mounted on a holder and are immersed in the abrasive material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
The wing-shaped self-suspension grinding disc comprises a disc-shaped main body, wherein a plurality of wing-shaped fan blades are uniformly distributed on the outer edge of the disc-shaped main body along the circumferential direction, and the two sides of each wing-shaped fan blade along the circumferential direction are respectively a front edge and a rear edge; the connecting line between the front edge and the rear edge of the airfoil fan blade is a chord, and the chord is inclined upwards from the rear edge to the front edge; the included angle between the rear edge of the wing-shaped fan blade and the horizontal plane is gradually reduced from the direction close to the circle center of the disc-shaped main body to the direction far away from the circle center of the disc-shaped main body; the lower surface of the wing-shaped self-suspension grinding disc is used for connecting a workpiece, the wing-shaped self-suspension grinding disc performs rotary motion in polishing solution to generate liquid dynamic pressure and upper and lower surface pressure difference to drive the workpiece to float, and the workpiece is in contact with polishing solution grinding materials. The device is simple and has lower cost; the surface roughness and the flatness of the workpiece can be improved; the bottom of the grinding disc is stable, and stable abrasive particle flow can be generated in high-speed rotation, so that damage to a workpiece caused by unstable flow rate of polishing solution is reduced; simple operation condition and wide development prospect.
Description
Technical Field
The invention relates to the technical field of suspension base disc polishing devices, in particular to an airfoil-shaped self-suspension grinding disc.
Background
The grinding is carried out by injecting abrasive materials of different specifications into a rigid grinding tool (such as soft metal like cast iron, tin, aluminum, etc. or hard wood, plastic, etc.), and removing trace material on the processed surface by cutting with abrasive particles under a certain pressure through relative sliding between the grinding tool and the workpiece.
The active-driven suspension base disc polishing device proposed by the Chinese patent application number (201210140631.4) has the following two problems that a plane grinding disc is in a wedge-shaped area with a convergent gap, hydraulic pressure is generated to suspend a polishing tool disc, and therefore the surface of a workpiece and abrasive particles are kept in a non-contact state, which is proved by practice:
(1) The grinding disc obtains hydraulic pressure in the circumferential motion through the bottom surface wedge, when the grinding disc rotates at a high speed, fluctuation of water flow speed and force acting on a workpiece can be generated due to the fact that the bottom surface is uneven, and the action force of abrasive particles on the surface of the workpiece can be influenced due to uneven change of the water flow force, so that the polishing quality is influenced.
(2) In ultra-precision machining, an ultra-smooth surface with few machined deteriorated layers is required to be obtained, and the linear velocity of the grinding disc is higher as the grinding disc is farther away from the center of a circle in the circular motion, so that the friction force is higher at the position of the workpiece farther away from the center of the circle, and the surface quality of the workpiece is influenced due to uneven distribution of the friction force.
Disclosure of Invention
In order to solve the problems of low surface quality and uneven stress of workpieces caused by alternating impact in the existing grinding disc, the invention provides the airfoil-shaped self-suspension grinding disc which can automatically suspend in high-speed rotation and can obtain higher surface quality.
The technical scheme adopted by the invention is as follows: the wing-shaped self-suspension grinding disc comprises a disc-shaped main body, wherein a plurality of wing-shaped fan blades are uniformly distributed on the outer edge of the disc-shaped main body along the circumferential direction, and the two sides of each wing-shaped fan blade along the circumferential direction are respectively a front edge and a rear edge; the connecting line between the front edge and the rear edge of the wing-shaped fan blade is a wing chord, the wing chord is inclined upwards from the rear edge to the front edge, and the included angle between the rear edge of the wing-shaped fan blade and the horizontal plane is gradually reduced from the direction close to the center of the circular disc-shaped main body to the direction far away from the center of the circular disc-shaped main body; the wing section is used for connecting the work piece from the lower surface of floated grinding pan, and the wing section carries out rotary motion in the polishing solution from floated grinding pan and produces liquid dynamic pressure and upper and lower surface pressure difference and drive the work piece and float, and the work piece contacts with the polishing solution abrasive material.
Furthermore, a diversion trench is arranged between two adjacent wing-shaped fan blades, so that the polishing solution can flow and be supplemented conveniently.
Further, the lower surface of the wing-shaped fan blade is provided with a patch area used for being pasted with a workpiece.
When the device is used, a workpiece to be processed is stuck to the sticking area 1 on the lower surface of the wing-shaped self-suspension grinding disc by paraffin, the grinding disc stuck with the workpiece is arranged in a processing device to rotate at a high speed in polishing liquid, the upper surface of a wing-shaped fan blade flows faster than the lower surface, so that the pressure applied to the upper surface (the direction is downward) is lower than the pressure applied to the lower surface (the direction is upward), and the lifting force generated by the fan blade is hydraulically driven to enable the grinding disc to float by a height H, so that the aim of soft contact between the workpiece and polishing liquid grinding materials is fulfilled.
The invention has the following theoretical basis and technical conception:
when a nano-mechanics characterization sample is prepared, less damage (less deterioration layer) and good surface quality are required, and the formation of less-damage and ultra-smooth surface depends on the contact state of abrasive particles and the surface of a workpiece. When the wing-type self-suspension grinding disc is used for grinding, the grinding disc rotates around the axis of the grinding disc, a workpiece is adhered to the bottom surface of the self-suspension grinding disc, the processed surface of the workpiece faces downwards, and the workpiece is pressed on the surface of the grinding disc by liquid pressure and rotates around the rotating shaft. The suspension base disc in the actively driven suspension base disc polishing device proposed by the patent application number (201210140631.4) is provided with wedge-shaped grooves on the circumference, and the hydrodynamic phenomenon and the powder action are applied: when the disc with a plurality of inclined planes (wedge-shaped grooves) arranged along the circumferential direction rotates in a liquid (polishing solution) environment, the base disc floats by a height H due to the liquid dynamic pressure generated by the wedge-shaped grooves, so that particles in the polishing solution do not have strong vertical force but become soft collision of the polishing particles in the horizontal direction when the polishing workpiece is polished, and further the damage of the workpiece is reduced. However, since the wedge-shaped groove is a simple plane, liquid fluctuation exists in the process of high-speed rotation, alternating impact exists between a workpiece and abrasive particles, and the linear velocity is larger at the position away from the center of a circle, so that the stress of the workpiece is uneven, and the quality of a processed surface is influenced.
The invention has the following beneficial effects:
(1) The device is simple and the cost is low;
(2) The surface roughness and the flatness of the workpiece can be improved;
(3) The bottom of the grinding disc is stable, and stable abrasive particle flow can be generated in high-speed rotation to reduce damage to a workpiece caused by unstable flow rate of polishing solution;
(4) Simple operation condition and wide development prospect.
Drawings
FIG. 1 is a top view of the present invention.
Fig. 2 is a bottom view of the present invention.
Fig. 3 is a front oblique view of the present invention.
Fig. 4 is a rear oblique view of the present invention.
FIG. 5 is a front view of a single airfoil fan blade and two airfoil profiles of the present invention.
Description of reference numerals: 1. the patch area 2, the lower surface of the airfoil fan blade 3 and the diversion trench.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the orientations or positional relationships indicated as the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., appear based on the orientations or positional relationships shown in the drawings only for the convenience of describing the present invention and simplifying the description, but not for indicating or implying that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" as appearing herein are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected" and "connected" should be construed broadly and may be, for example, fixedly connected, detachably connected or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to the attached drawings, the airfoil-shaped self-suspension grinding disc comprises a disc-shaped main body, wherein a plurality of airfoil-shaped fan blades are arranged on the disc-shaped main body along the circumferential direction, and the two sides of each airfoil-shaped fan blade along the circumferential direction are respectively a front edge and a rear edge; the connecting line between the front edge and the rear edge of each wing-shaped fan blade is a wing chord, the wing chord inclines upwards from the rear edge to the front edge, and a flow guide groove 3 is arranged between every two adjacent wing-shaped fan blades, so that the polishing liquid can flow and be supplemented conveniently. The lower surface 2 of the airfoil fan blade is provided with a patch area 1 for adhering to a workpiece.
Making a concentric circle section from the direction close to the circle center of the disc-shaped main body to the direction far away from the circle center of the disc-shaped main body, wherein the included angle between the tail part of the airfoil-shaped fan blade and the horizontal plane is gradually reduced; as shown in fig. 5, the airfoil fan blades of the grinding disc are concentrically sectioned, the included angle between the tail of the airfoil fan blade in the section close to the center of circle and the horizontal plane is α 1, the included angle between the tail of the airfoil fan blade in the section far from the center of circle and the horizontal plane is α 2, and α 2 is less than α 1. The lower surface of the wing-shaped self-suspension grinding disc is used for connecting a workpiece, the wing-shaped self-suspension grinding disc performs rotary motion in polishing solution to generate liquid dynamic pressure and upper and lower surface pressure difference to drive the workpiece to float, and the workpiece is in contact with polishing solution grinding materials.
When the polishing device is used, a workpiece to be processed is adhered to a paster area 1 (workpieces such as silicon wafers, sapphire sheets and the like can be made by paraffin) of the airfoil-shaped self-suspension type grinding disc shown in the figure, the airfoil-shaped self-suspension type grinding disc is driven to rotate by the suspension base disc polishing device which is disclosed in Chinese patent 201210140631.4 and can be actively driven, and the airfoil-shaped self-suspension type grinding disc and the workpiece are floated by a height H according to a dynamic pressure floating principle and a wing-shaped fan blade principle, so that the purpose of contacting the workpiece with software of polishing liquid abrasives is achieved.
The invention has the following theoretical basis and technical conception:
when a nano-mechanics characterization sample is prepared, less damage (less deterioration layer) and good surface quality are required, and the formation of less-damage and ultra-smooth surface depends on the contact state of abrasive particles and the surface of a workpiece. When the wing-type self-suspension grinding disc is used for grinding, the grinding disc rotates around the axis of the grinding disc, a workpiece is adhered to the bottom surface of the self-suspension grinding disc, the machined surface of the workpiece faces downwards, the workpiece is pressed on the surface of the grinding disc by liquid pressure, and the workpiece rotates around the rotating shaft. The suspension base disc in the actively driven suspension base disc polishing device proposed by the patent application number (201210140631.4) is provided with wedge-shaped grooves on the circumference, and the hydrodynamic phenomenon and the powder action are applied: when the disk provided with a plurality of inclined planes (wedge-shaped grooves) along the circumferential direction rotates in a liquid (polishing solution) environment, the base disk floats by a height H due to the liquid dynamic pressure generated by the wedge-shaped grooves, so that when particles in the polishing solution polish a workpiece, strong vertical force is not generated, the particles are changed into soft collision of the polishing particles in the horizontal direction, and further the damage to the workpiece is reduced. However, since the wedge-shaped groove is a simple plane, liquid fluctuation exists in the process of high-speed rotation, alternating impact exists between the workpiece and abrasive particles, the linear velocity is larger at the position away from the circle center, the stress of the workpiece is uneven, and the quality of the processed surface is influenced.
The embodiments described in this specification are merely illustrative of implementations of the inventive concept and the scope of the present invention should not be considered limited to the specific forms set forth in the embodiments but rather by the equivalents thereof as may occur to those skilled in the art upon consideration of the present inventive concept.
Claims (3)
1. Wing section is from floated abrasive disc, its characterized in that: the fan blade structure comprises a disc-shaped main body, wherein a plurality of wing-shaped fan blades are uniformly distributed on the outer edge of the disc-shaped main body along the circumferential direction, and the two sides of each wing-shaped fan blade along the circumferential direction are respectively a front edge and a rear edge; the connecting line between the front edge and the rear edge of the airfoil fan blade is a chord, and the chord is inclined upwards from the rear edge to the front edge; the included angle between the rear edge of the wing-shaped fan blade and the horizontal plane is gradually reduced from the direction close to the circle center of the disc-shaped main body to the direction far away from the circle center of the disc-shaped main body; the wing section is used for connecting the work piece from the lower surface of floated grinding pan, and the wing section carries out rotary motion in the polishing solution from floated grinding pan and produces liquid dynamic pressure and upper and lower surface pressure difference and drive the work piece and float, and the work piece contacts with the polishing solution abrasive material.
2. The airfoil self-levitating abrasive disk of claim 1, wherein: a diversion trench is arranged between two adjacent wing-shaped fan blades, so that the polishing solution can flow and be supplemented conveniently.
3. The airfoil self-suspending grinding disk as set forth in claim 1, wherein: the lower surface of the wing-shaped fan blade is provided with a patch area used for being pasted with a workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210501981.2A CN114871938B (en) | 2022-05-09 | 2022-05-09 | Wing type self-suspension grinding disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210501981.2A CN114871938B (en) | 2022-05-09 | 2022-05-09 | Wing type self-suspension grinding disc |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114871938A CN114871938A (en) | 2022-08-09 |
| CN114871938B true CN114871938B (en) | 2023-03-28 |
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ID=82674472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210501981.2A Active CN114871938B (en) | 2022-05-09 | 2022-05-09 | Wing type self-suspension grinding disc |
Country Status (1)
| Country | Link |
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| CN (1) | CN114871938B (en) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1620281A1 (en) * | 1989-02-02 | 1991-01-15 | А.В. Чемерский и В.Н. Чешев | Flap buffing wheel |
| BR9611910B1 (en) * | 1995-12-08 | 2008-11-18 | backing plates for emery discs. | |
| RU2271920C1 (en) * | 2004-09-22 | 2006-03-20 | Государственное образовательное учреждение высшего профессионального образования "Орловский государственный технический университет" (ОрелГТУ) | Apparatus for feeding cutting fluid |
| CN101708592A (en) * | 2009-11-05 | 2010-05-19 | 浙江工业大学 | Base disc used for suspension polishing |
| CN102699809A (en) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | Suspension base disc polishing device capable of being actively driven |
| US9302369B2 (en) * | 2014-01-20 | 2016-04-05 | Pratt & Whitney Canada Corp. | Grinding wheel and method |
| CN105538045B (en) * | 2015-12-09 | 2018-06-26 | 浙江工业大学 | Pressure suspension polishing method and device of surging based on adaptive and fixed processing gap |
| CN207087593U (en) * | 2017-03-03 | 2018-03-13 | 朱胜利 | A kind of silicon chip surface abrasion frame and surface abrasion device |
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2022
- 2022-05-09 CN CN202210501981.2A patent/CN114871938B/en active Active
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| CN114871938A (en) | 2022-08-09 |
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