CN114868335A - 压电振动元件、压电振子以及电子装置 - Google Patents

压电振动元件、压电振子以及电子装置 Download PDF

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Publication number
CN114868335A
CN114868335A CN202080087935.1A CN202080087935A CN114868335A CN 114868335 A CN114868335 A CN 114868335A CN 202080087935 A CN202080087935 A CN 202080087935A CN 114868335 A CN114868335 A CN 114868335A
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CN
China
Prior art keywords
piezoelectric
electrode
hole
quartz
vibration element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080087935.1A
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English (en)
Chinese (zh)
Inventor
大井友贵
岩下则夫
佐佐木迅人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN114868335A publication Critical patent/CN114868335A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202080087935.1A 2019-12-27 2020-07-21 压电振动元件、压电振子以及电子装置 Pending CN114868335A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-238993 2019-12-27
JP2019238993 2019-12-27
PCT/JP2020/028241 WO2021131121A1 (ja) 2019-12-27 2020-07-21 圧電振動素子、圧電振動子及び電子装置

Publications (1)

Publication Number Publication Date
CN114868335A true CN114868335A (zh) 2022-08-05

Family

ID=76572999

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080087935.1A Pending CN114868335A (zh) 2019-12-27 2020-07-21 压电振动元件、压电振子以及电子装置

Country Status (4)

Country Link
US (1) US12457903B2 (https=)
JP (1) JP7465454B2 (https=)
CN (1) CN114868335A (https=)
WO (1) WO2021131121A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI898551B (zh) * 2024-04-19 2025-09-21 台灣晶技股份有限公司 石英振盪器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120303573A (zh) * 2022-12-09 2025-07-11 株式会社村田制作所 谐振型磁传感器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130043959A1 (en) * 2011-08-19 2013-02-21 Seiko Epson Corporation Resonating element, resonator, electronic device, electronic apparatus, and mobile object
WO2016111037A1 (ja) * 2015-01-09 2016-07-14 株式会社村田製作所 水晶振動子及び水晶振動デバイス
JP2017060054A (ja) * 2015-09-17 2017-03-23 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
CN109804560A (zh) * 2016-10-11 2019-05-24 株式会社村田制作所 压电振子及其制造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8125788B2 (en) 2006-03-29 2012-02-28 Kyocera Corporation Circuit module and radio communications equipment, and method for manufacturing circuit module
JP2009188483A (ja) 2008-02-04 2009-08-20 Epson Toyocom Corp 圧電デバイス及び表面実装型圧電発振器
JP2012186639A (ja) * 2011-03-04 2012-09-27 Seiko Epson Corp 圧電振動片、圧電振動子、電子デバイス
JP2013258452A (ja) * 2012-06-11 2013-12-26 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器、移動体、および振動素子の製造方法
JP2014007693A (ja) * 2012-06-27 2014-01-16 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器、及び移動体
JP2015019127A (ja) * 2013-07-09 2015-01-29 日本電波工業株式会社 水晶振動片及び水晶デバイス
JP2017099025A (ja) * 2017-02-15 2017-06-01 セイコーエプソン株式会社 振動片、振動素子、振動子、電子デバイス、電子機器、移動体及び振動片の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130043959A1 (en) * 2011-08-19 2013-02-21 Seiko Epson Corporation Resonating element, resonator, electronic device, electronic apparatus, and mobile object
WO2016111037A1 (ja) * 2015-01-09 2016-07-14 株式会社村田製作所 水晶振動子及び水晶振動デバイス
JP2017060054A (ja) * 2015-09-17 2017-03-23 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
CN109804560A (zh) * 2016-10-11 2019-05-24 株式会社村田制作所 压电振子及其制造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI898551B (zh) * 2024-04-19 2025-09-21 台灣晶技股份有限公司 石英振盪器

Also Published As

Publication number Publication date
JPWO2021131121A1 (https=) 2021-07-01
WO2021131121A1 (ja) 2021-07-01
US12457903B2 (en) 2025-10-28
JP7465454B2 (ja) 2024-04-11
US20220278268A1 (en) 2022-09-01

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