CN114858811A - Solar cell detection system and detection method based on laser penetration principle - Google Patents
Solar cell detection system and detection method based on laser penetration principle Download PDFInfo
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- CN114858811A CN114858811A CN202210763302.9A CN202210763302A CN114858811A CN 114858811 A CN114858811 A CN 114858811A CN 202210763302 A CN202210763302 A CN 202210763302A CN 114858811 A CN114858811 A CN 114858811A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Abstract
The invention discloses a detection system and a detection method of a solar cell based on a laser penetration principle, and belongs to the technical field of solar cell detection. The detection system comprises: the laser unit is used for emitting infrared laser with preset wavelength; the linear laser lens is used for expanding infrared laser with preset wavelength along a preset direction to form linear laser; the light homogenizing device is positioned at the downstream of the linear laser lens and is used for homogenizing the linear laser to form homogenized laser; the camera is positioned at the downstream of the light uniformizing device, a battery piece to be tested is placed between the light uniformizing device and the camera, and the motion direction of the battery piece to be tested is vertical to the preset direction; and the image analysis unit is connected with the camera and used for judging the quality of the battery piece to be detected according to the image. The detection system and the detection method are simple to erect and low in cost, and can effectively detect various defects of the silicon solar cell and improve the detection precision.
Description
Technical Field
The invention relates to the technical field of solar cell detection, in particular to a solar cell detection system and method based on a laser penetration principle.
Background
With the demand for sustainable development, the photovoltaic field is more and more emphasized, and the product quality of the solar cell is more important in the photovoltaic field. In order to ensure the quality of the battery piece, the defect of the battery piece needs to be detected. Since the solar cell is thin and fragile, defects such as hidden cracks, edge breakage, corner breakage and the like may be generated in each step of reproduction, and if the defects are caused by the problems of the production process, online real-time detection of the defects of the cell is particularly important.
For the existing detection, the problems of poor uniformity, complex erection, high manufacturing cost and the like easily occur, and the problems of misjudgment and judgment omission are easily caused due to uneven gray scale of the acquired picture, so that the detection precision is reduced, and the production flow of the battery piece is influenced.
Disclosure of Invention
The invention provides a detection system and a detection method of a solar cell aiming at the problems in the related art, so as to overcome the technical problems in the prior related art.
Therefore, the invention adopts the following specific technical scheme:
according to an aspect of the present invention, there is provided a solar cell detection system, including:
the laser unit is used for emitting infrared laser with preset wavelength;
the linear laser lens is connected with the laser unit through an optical fiber and used for expanding the infrared laser with the preset wavelength along a preset direction to form linear laser;
the light homogenizing device is positioned at the downstream of the linear laser lens and is used for homogenizing the linear laser to form homogenized laser;
the camera is positioned at the downstream of the light homogenizing device, a battery piece to be tested is placed between the light homogenizing device and the camera, the motion direction of the battery piece to be tested is vertical to the preset direction, and the camera is used for shooting an image by utilizing the homogenizing laser penetrating through the battery piece to be tested;
and the image analysis unit is connected with the camera and used for judging the quality of the battery piece to be detected according to the image.
Further, the laser unit comprises a driving circuit and a laser, wherein the driving circuit is used for providing a constant current source to drive the laser to emit the infrared laser with the preset wavelength.
Further, the detection system further comprises:
and the heat dissipation device is used for dissipating heat of the driving circuit and the laser.
Further, the light uniformizing device comprises an optical film for forming the uniformizing laser.
Further, the light homogenizing device further comprises a window sheet for protecting the optical film.
Further, the image analysis unit is used for judging that the battery piece to be tested is normal when the gray scale of the image is uniform, and judging that the battery piece has defects when the gray scale of the image is not uniform.
Further, the image analysis unit is used for judging that the battery piece to be detected is normal when the edge of the image is flat, and judging that the battery piece has defects when the edge of the image is not flat.
According to another aspect of the present invention, there is provided a method for detecting a solar cell, which is used in any one of the above detection systems, and includes:
emitting infrared laser with preset wavelength through the laser unit;
the infrared laser with the preset wavelength is unfolded along a preset direction through the linear laser lens to form linear laser;
homogenizing the linear laser by the light homogenizing device to form homogenized laser;
shooting an image by using the homogenized laser penetrating through the cell to be tested through a camera;
and judging the quality of the battery piece to be detected according to the image through the image analysis unit.
Further, the step of judging the quality of the battery piece to be tested according to the image by the image analysis unit comprises the following steps:
the image analysis unit judges that the battery piece to be detected is normal when the gray scale of the image is uniform, and judges that the battery piece has defects when the gray scale of the image is not uniform.
Further, the step of judging the quality of the battery piece to be tested according to the image by the image analysis unit further comprises:
the image analysis unit judges that the battery piece to be detected is normal when the edge of the image is flat, and judges that the battery piece has defects when the edge of the image is not flat.
According to an embodiment of the invention, a detection system of a penetration solar cell based on laser is provided, which has the advantages of simple erection, low cost, uniform gray scale of the obtained image, and high contrast between the defect part and the normal part, and can improve the detection precision.
Furthermore, the detection system has strong adaptability and can be erected at any process stage of solar cell production.
According to one embodiment of the invention, the camera is a high-precision line scanning industrial camera, so that the production efficiency and the detection precision can be effectively improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a detection system for solar cells according to an embodiment of the invention;
fig. 2 is a flowchart of a method for detecting a solar cell according to an embodiment of the invention.
In the figure:
1. a drive circuit; 2. a laser; 3. an optical fiber; 4. a linear laser lens; 5. a homogenizing device; 6. a battery piece to be tested; 7. a camera.
Detailed Description
For further explanation of the various embodiments, the drawings which form a part of the disclosure and which are incorporated in and constitute a part of this specification, illustrate embodiments and, together with the description, serve to explain the principles of operation of the embodiments, and to enable others of ordinary skill in the art to understand the various embodiments and advantages of the invention, and, by reference to these figures, reference is made to the accompanying drawings, which are not to scale and wherein like reference numerals generally refer to like elements.
Fig. 1 is a schematic structural diagram of a detection system for solar cells according to an embodiment of the invention. As shown in fig. 1, in one embodiment, the detection system comprises a laser unit, an in-line laser lens 4, a light evening device 5, a camera 7 and an image analysis unit. The laser unit is used for emitting infrared laser with a preset wavelength, and generally, the laser unit includes a driving circuit 1 and a laser 2, and a constant current source is provided through the driving circuit 1 to excite the laser 2 to emit infrared laser with the preset wavelength. The infrared laser with the preset wavelength can be 1000-1400nm, such as 1000nm, 1200nm or 1400 nm. The in-line laser lens 4 is connected with the laser unit through the optical fiber 3, the in-line laser lens 4 is used for expanding infrared laser with a preset wavelength along a preset direction to form linear in-line laser, and the in-line laser lens 4 can be provided with a cylindrical mirror, such as a Powell prism, and can expand a solid line beam. The dodging device 5 is located downstream of the in-line laser lens 4 and is used for homogenizing the in-line laser to form homogenized laser, and in order to effectively achieve homogenization of the in-line laser, the center of the dodging device 5 needs to be aligned with the focusing point of the in-line laser lens 4. The camera 7 is located at the downstream of the light homogenizing device 5, the cell 6 to be measured is placed between the light homogenizing device 5 and the camera 7, the moving direction of the cell 6 to be measured is perpendicular to the preset direction, and the camera 7 is used for shooting an image by utilizing homogenized laser penetrating through the cell 6 to be measured. Through the movement of the cell 6 to be tested along a straight line, the camera 7 can shoot the whole image of the cell 6 to be tested. The image analysis unit is connected with the camera 7 and used for judging the quality of the battery piece 6 to be measured according to the image. For example, the image analysis unit is used for judging that the battery piece 6 to be tested is normal when the gray scale of the image is uniform, and judging that the battery piece has defects when the gray scale of the image is not uniform. The image analysis unit is also used for judging that the battery piece 6 to be tested is normal when the edge of the image is flat and judging that the battery piece has defects when the edge of the image is uneven.
The embodiment provides a detection system of a penetration type solar cell based on laser, which has the advantages of simple erection, low cost, uniform gray scale of the obtained image, high contrast between the defect part and the normal part, and capability of improving the detection precision.
Furthermore, the detection system has strong adaptability and can be erected at any process stage of solar cell production.
Furthermore, the laser carries the defect information of the solar cell when penetrating the solar cell, so that the problems of edge breakage, chromatic aberration, corner breakage, line marks, crystal detachment and hidden cracks can be effectively detected.
In one embodiment, the camera 7 is a high-precision line-scan industrial camera, which can effectively improve the production efficiency and the detection precision.
In one embodiment, the detection system further comprises a heat dissipation device for dissipating heat from the driving circuit 1 and the laser 2.
The present embodiment provides a heat dissipating device capable of dissipating heat of the drive circuit 1 and the laser 2 at the same time, which is capable of dissipating heat efficiently.
In one embodiment, the light unifying means 5 comprises an optical film for forming the homogenized laser light. Further, the light unifying means 5 further comprises a window sheet for protecting the optical film.
Fig. 2 is a flowchart of a method for detecting a solar cell according to an embodiment of the invention. The invention also provides a detection method of a solar cell, which is used for the detection system in any one of the above embodiments or the combination of the embodiments, as shown in fig. 2, the detection method includes:
emitting infrared laser with preset wavelength through a laser unit;
step S10, the infrared laser with the preset wavelength is expanded along the preset direction through the in-line laser lens 4 to form an in-line laser.
In step S20, the in-line laser is homogenized by the light homogenizing device 5 to form homogenized laser.
In step S30, an image is taken by the camera 7 using the homogenized laser light passing through the cell 6 to be tested.
In step S40, the image analysis unit determines the quality of the battery piece 6 to be tested according to the image.
Step S40 includes the image analysis unit determining that the battery piece 6 to be tested is normal when the image has uniform gray scale and determining that the battery piece has a defect when the image has non-uniform gray scale.
When the laser penetrates through the solar cell, the laser carries the defect information of the cell, and the problems of edge breakage, chromatic aberration, corner failure, line mark, crystal separation and hidden crack can be effectively detected.
The step S40 further includes the image analysis unit determining that the battery piece 6 to be tested is normal when the edge of the image is flat, and determining that the battery piece has a defect when the edge of the image is not flat.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A detection system of solar cell based on laser penetration principle is characterized by comprising:
the laser unit is used for emitting infrared laser with preset wavelength;
the linear laser lens is connected with the laser unit through an optical fiber and used for expanding the infrared laser with the preset wavelength along a preset direction to form linear laser;
the light homogenizing device is positioned at the downstream of the linear laser lens and is used for homogenizing the linear laser to form homogenized laser;
the camera is positioned at the downstream of the light homogenizing device, a battery piece to be tested is placed between the light homogenizing device and the camera, the motion direction of the battery piece to be tested is vertical to the preset direction, and the camera is used for shooting an image by utilizing the homogenizing laser penetrating through the battery piece to be tested;
and the image analysis unit is connected with the camera and used for judging the quality of the battery piece to be detected according to the image.
2. The detection system of claim 1,
the laser unit comprises a driving circuit and a laser, wherein the driving circuit is used for providing a constant current source to drive the laser to emit the infrared laser with the preset wavelength.
3. The detection system of claim 2, further comprising:
and the heat dissipation device is used for dissipating heat of the driving circuit and the laser.
4. The detection system of claim 3,
the light homogenizing device comprises an optical film for forming the homogenizing laser.
5. The detection system of claim 4,
the light homogenizing device further comprises a window sheet for protecting the optical film.
6. Detection system according to any one of claims 1 to 5,
the image analysis unit is used for judging that the battery piece to be detected is normal when the gray scale of the image is uniform, and judging that the battery piece has defects when the gray scale of the image is non-uniform.
7. Detection system according to any one of claims 1 to 5,
the image analysis unit is used for judging that the battery piece to be detected is normal when the edge of the image is flat, and judging that the battery piece has defects when the edge of the image is not flat.
8. A detection method of solar cell based on laser penetration principle, which is used in the detection system of any one of claims 1-7, and is characterized by comprising the following steps:
emitting infrared laser with preset wavelength through the laser unit;
the infrared laser with the preset wavelength is unfolded along a preset direction through the linear laser lens to form linear laser;
homogenizing the linear laser by the light homogenizing device to form homogenized laser;
shooting an image by using the homogenized laser penetrating through the cell to be tested through a camera;
and judging the quality of the battery piece to be detected according to the image through the image analysis unit.
9. The detection method according to claim 8, wherein the step of determining the quality of the battery piece to be detected according to the image by the image analysis unit comprises:
the image analysis unit judges that the battery piece to be detected is normal when the gray scale of the image is uniform, and judges that the battery piece has defects when the gray scale of the image is not uniform.
10. The detection method according to claim 8 or 9, wherein the step of determining the quality of the battery piece to be detected according to the image by the image analysis unit further comprises:
the image analysis unit judges that the battery piece to be detected is normal when the edge of the image is flat, and judges that the battery piece has defects when the edge of the image is uneven.
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Publication number | Priority date | Publication date | Assignee | Title |
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WO2024054542A1 (en) * | 2022-09-09 | 2024-03-14 | The University Of North Carolina At Chapel Hill | Methods, devices and systems for nonlinear optical determination of electron mobilities in solar cells |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070146691A1 (en) * | 2005-12-23 | 2007-06-28 | Xerox Corporation | Specular surface flaw detection |
WO2010058680A1 (en) * | 2008-11-21 | 2010-05-27 | タカノ株式会社 | Silicon wafer defect inspection device |
CN101988904A (en) * | 2010-10-15 | 2011-03-23 | 中国电子科技集团公司第十八研究所 | Solar cell defect detection method |
CN101995663A (en) * | 2009-08-19 | 2011-03-30 | 劳伦斯·利弗莫尔国家安全有限责任公司 | Comprise even device of diffraction laser beam of photosensitive material and preparation method thereof |
CN105021627A (en) * | 2015-07-20 | 2015-11-04 | 中国科学院长春光学精密机械与物理研究所 | High-sensitivity fast on-line detection method of optical thin film and element surface laser-induced damage |
EP3076164A1 (en) * | 2015-04-03 | 2016-10-05 | AGC Glass Europe | Method for inspecting flat glass |
CN208568598U (en) * | 2018-08-13 | 2019-03-01 | 西安交通大学 | A kind of even photochemical up-conversion fluorescence test paper excitation apparatus |
CN109561248A (en) * | 2019-01-22 | 2019-04-02 | 杭州琦星机器人科技有限公司 | A kind of infant industry camera vision laser lighting imaging device |
CN114112314A (en) * | 2021-12-21 | 2022-03-01 | 天津大学 | Detection performance test method for multifunctional photoelectric detection system |
CN114527131A (en) * | 2021-12-30 | 2022-05-24 | 镇江苏仪德科技有限公司 | Online detection device and detection method for internal and external defects of raw material silicon wafer |
-
2022
- 2022-07-01 CN CN202210763302.9A patent/CN114858811A/en active Pending
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070146691A1 (en) * | 2005-12-23 | 2007-06-28 | Xerox Corporation | Specular surface flaw detection |
WO2010058680A1 (en) * | 2008-11-21 | 2010-05-27 | タカノ株式会社 | Silicon wafer defect inspection device |
CN101995663A (en) * | 2009-08-19 | 2011-03-30 | 劳伦斯·利弗莫尔国家安全有限责任公司 | Comprise even device of diffraction laser beam of photosensitive material and preparation method thereof |
CN101988904A (en) * | 2010-10-15 | 2011-03-23 | 中国电子科技集团公司第十八研究所 | Solar cell defect detection method |
EP3076164A1 (en) * | 2015-04-03 | 2016-10-05 | AGC Glass Europe | Method for inspecting flat glass |
CN105021627A (en) * | 2015-07-20 | 2015-11-04 | 中国科学院长春光学精密机械与物理研究所 | High-sensitivity fast on-line detection method of optical thin film and element surface laser-induced damage |
CN208568598U (en) * | 2018-08-13 | 2019-03-01 | 西安交通大学 | A kind of even photochemical up-conversion fluorescence test paper excitation apparatus |
CN109561248A (en) * | 2019-01-22 | 2019-04-02 | 杭州琦星机器人科技有限公司 | A kind of infant industry camera vision laser lighting imaging device |
CN114112314A (en) * | 2021-12-21 | 2022-03-01 | 天津大学 | Detection performance test method for multifunctional photoelectric detection system |
CN114527131A (en) * | 2021-12-30 | 2022-05-24 | 镇江苏仪德科技有限公司 | Online detection device and detection method for internal and external defects of raw material silicon wafer |
Non-Patent Citations (2)
Title |
---|
邓开发 等: "《激光技术与应用》", 31 January 2002, 国防科技大学出版社 * |
雷仕湛 等: "《激光智能制造技术》", 30 June 2018, 复旦大学出版社 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024054542A1 (en) * | 2022-09-09 | 2024-03-14 | The University Of North Carolina At Chapel Hill | Methods, devices and systems for nonlinear optical determination of electron mobilities in solar cells |
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