CN114838650A - Displacement sensor calibration device and method based on rotary table - Google Patents
Displacement sensor calibration device and method based on rotary table Download PDFInfo
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Abstract
The invention discloses a displacement sensor calibration device and method based on a rotary table, wherein the calibration device comprises a rotary table; a spherical detection block; the displacement sensor probe is used for detecting the distance between the probe and the surface of the spherical detection block to obtain a displacement signal; the displacement sensor conditioning circuit is used for converting the displacement signal into a voltage signal and transmitting the voltage signal to the data acquisition card; the angle encoder is used for measuring the angle of the rotary table to output a pulse signal and transmitting the pulse signal to the data acquisition card; the data acquisition card is used for sending the voltage signal and the pulse signal to the industrial personal computer; and the industrial personal computer converts the pulse signal into an angle signal and fits the voltage signal and the angle signal. The calibration method comprises adjusting the relative position of the displacement sensor probe and the spherical detection block to an initial position, sequentially moving to n angular positions from the initial position to obtain n voltage signals u i Sum angle signal Δ θ i Further, the displacement data Δ d is calculated i Fitting the voltage signal u i And displacement data Δ d i Sensitivity and zero bias are obtained. By using the angular movement function of the rotary tableThe displacement sensor is accurately calibrated.
Description
Technical Field
The invention belongs to the technical field of sensor calibration test, and particularly relates to a displacement sensor calibration device and method based on a rotary table.
Background
The displacement sensor is mainly used for measuring displacement, vibration signals and the like in various forms, and a capacitance type displacement sensor, an eddy current type displacement sensor and the like are commonly used in engineering. Before the displacement sensor is used, a standard measuring instrument is used for calibrating the sensitivity coefficient of the displacement sensor, so that the corresponding relation between the input quantity and the output quantity is determined. However, in the use process of the displacement sensor, along with the change of the working environment and the aging of the used electronic components, the sensitivity coefficient also changes, and if the calibration is not timely carried out, a measurement error is generated, and the final measurement precision is affected.
Most of the existing calibration devices for displacement sensors use a linear motion mode to generate a known displacement as an input quantity, then collect an output quantity of the displacement sensor, the output quantity of the displacement sensor is usually a voltage value, and the output quantity and a standard input quantity are used to determine a sensitivity coefficient and other performance index parameters of the displacement sensor. In practical engineering, some working occasions do not have a testing device for linear motion, and the displacement sensor cannot be calibrated. However, there are work applications with angular motion test devices, such as precision turrets. Therefore, a set of displacement sensor calibration device based on the rotary table can be designed, and the accurate calibration of the displacement sensor can be realized by utilizing the high-precision angle position movement of the rotary table.
Disclosure of Invention
The invention provides a novel displacement sensor calibration device and a method for solving the technical problems in the prior art, and the precise calibration of the displacement sensor is realized by utilizing the angular position motion function of the rotary table with high precision and high resolution.
The technical scheme adopted by the invention for solving the technical problems in the prior art is as follows:
a displacement sensor calibration device based on a rotary table comprises the rotary table and has an angular position movement function;
the spherical detection block is arranged on the surface of the rotary table;
the displacement sensor probe is detachably connected to the displacement sensor fixed support, and is used for detecting the distance from the displacement sensor probe to the surface of the spherical detection block to obtain a displacement signal;
the displacement sensor conditioning circuit is connected with the displacement sensor probe, amplifies a displacement signal detected by the displacement sensor probe, converts the displacement signal into a voltage signal and transmits the voltage signal to the data acquisition card;
the angle encoder is arranged on the rotary table, outputs a pulse signal along with the rotation of the rotary table and transmits the pulse signal to the data acquisition card;
the data acquisition card receives the voltage signal and the pulse signal and sends the voltage signal and the pulse signal to the industrial personal computer;
and the industrial personal computer is connected with the data acquisition card, converts the pulse signal into an angle signal and fits the voltage signal and the angle signal.
The rotary table is a precise rotary table with an angular position movement function, and can realize angular movement with higher resolution.
The projection of the outer edge of the table top of the rotary table along the axial direction of the rotary table passes through the sphere center of the spherical detection block.
The material of the spherical detection block, usually a metal material, is selected according to the characteristics of the calibrated displacement sensor.
The displacement sensor probe is connected to the displacement sensor conditioning circuit through a cable. The displacement sensor conditioning circuit is connected to the data acquisition card through a cable. The angle encoder is connected to the data acquisition card through a cable. The data acquisition card is connected to the industrial personal computer through the PCI slot.
The rotary table is provided with a driving piece for driving the rotary table to rotate. The drive member may be a motor or the like. The driving piece is connected to the industrial personal computer, and the turntable can be controlled to rotate through the industrial personal computer.
And running test software in the industrial personal computer, wherein the test software is developed based on a LabVIEW virtual instrument platform.
And a displacement sensor fixing support is arranged on the foundation of the rotary table and used for detachably fixing the displacement sensor probe on the foundation of the rotary table.
The whole body of the displacement sensor fixing support is of an L-shaped rod-shaped structure, the tail end of a horizontal rod is provided with a clamping structure, a displacement sensor probe can penetrate through a displacement sensor fixing support hole and is clamped tightly by a bolt, the horizontal rod of the displacement sensor fixing support is connected with a vertical rod by the bolt and can move up and down relative to the vertical rod, the height of the displacement sensor probe is adjusted, and the displacement sensor fixing support can move horizontally.
Through above-mentioned technical scheme, spherical detection piece is spherical towards one side of displacement sensor probe, and the setting of spherical detection piece has reduced the spherical detection piece greatly and has radially moved the error that causes along the revolving stage mesa. The rotation of the table top of the rotary table can be conveniently converted into the displacement of the spherical detection block in the linear direction induced by the displacement sensor probe, and the distance from the surface of the spherical detection block to the spherical center of the spherical detection block is constant;
setting an initial position: the axis of the displacement sensor probe is aligned with the spherical center of the spherical detection block, and the axis of the displacement sensor probe is tangent to the outer edge of the rotary table; the rotating angle of the table surface of the rotary table is theta, and the distance between the sphere center of the spherical detection block and the axis of the table surface of the rotary table is R o Then, the displacement Δ d in the linear direction sensed by the displacement sensor probe is R o sinθ。
A displacement sensor calibration device and method based on a rotary table comprise the following steps:
(1) and adjusting the relative position of the displacement sensor probe and the spherical detection block to ensure that the axis of the displacement sensor probe is aligned with the spherical center of the spherical detection block and is tangent with the outer edge of the rotary table. Observing the output voltage of the displacement sensor conditioning circuit in an interface of test software, and adjusting the gap between the displacement sensor probe and the spherical detection block according to the value of the output voltage so that the value of the output voltage is at the minimum value (usually 0V) of the voltage output range of the displacement sensor probe, which is the initial position.
(2) Selecting n test points according to the measuring range of the calibrated displacement sensor, and measuring the n test points according to the radius R of the table top of the rotary table 0 Calculating the angular position of the turntable, operating the turntable to move the turntable to n angular positions from the initial position in sequence, and automatically acquiring an output voltage signal u of the displacement sensor conditioning circuit by the test software i And the pulse signal of the angle encoder, and then converting the pulse signal into an angle signal delta theta i Further, the displacement data Δ d is calculated i 。
(3) The test software collects the voltage signal u for n times i And displacement data Δ d i Performing linear fitting, and calculating to obtain sensitivity k and zero offset as follows:
wherein u is i Is a voltage; r 0 Is the radius of the turntable (1); and deltad is the displacement in the linear direction sensed by the displacement sensor probe.
Said Δ d ═ R 0 sin(Δθ i ) Wherein, Δ θ i The rotation angle of the turntable (1) from the initial position to the detection position.
In summary, the present application at least includes the following beneficial technical effects:
the device and the method for calibrating the displacement sensor are provided based on the angular motion function of a precise rotary table, and the precise angular position information is fed back by utilizing a high-precision pulse signal of an angle encoder, so that the precision calibration of the displacement sensor is realized.
By using the device and the method, the calibration process adopts electric drive, automatically acquires data, calculates the sensitivity coefficient and the zero offset, and has small introduced error, convenient operation and higher calibration efficiency.
Drawings
FIG. 1 is a schematic structural diagram of a displacement sensor calibration apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram illustrating the testing principle of the testing device of the present invention;
FIG. 3 is a view showing the structure of a test apparatus according to the present invention;
FIG. 4 is a graph of measured data and a fitted curve of the present invention, wherein the abscissa is the voltage value output by the displacement sensor conditioning circuit, the ordinate represents the displacement calculated from the angular encoder output pulse and the turntable radius, "-" represents the original data point, and "-" represents the fitted linear function curve.
Description of the reference numerals: 1. a turntable; 2. a spherical detection block; 3. a displacement sensor probe; 4. a displacement sensor fixing support; 5. a displacement sensor conditioning circuit; 6. an angle encoder; 7. a data acquisition card; 8. an industrial personal computer;
Detailed Description
The present application will now be described in further detail with reference to the following figures and specific examples:
the embodiment of the application discloses a displacement sensor calibration device and method based on a rotary table.
Referring to fig. 1 to 3, the turntable-based displacement sensor calibration device comprises a turntable 1, a spherical detection block 2, a displacement sensor probe 3, a displacement sensor fixing support 4, a displacement sensor conditioning circuit 5, an angle encoder 6, a data acquisition card 7 and an industrial personal computer 8.
The turntable 1 is a precision turntable with angular position movement function, and can realize angular movement with higher resolution. The spherical detection block 2 is fixedly connected with the table top of the rotary table 1, so that the outer edge of the table top is ensured to pass through the spherical center of the spherical detection block 2, namely the distance from the circle center of the table top to the spherical center of the spherical detection block 2 is the radius R 0 . The material of the spherical detection block 2, usually a metal material, is selected according to the characteristics of the calibrated displacement sensor.
The displacement sensor probe 3 is detachably connected to the displacement sensor fixing support 4. The displacement sensor fixing support 4 comprises a vertical rod 42 and a horizontal rod 41 connected to the vertical rod 42, the horizontal rod 41 is fixedly connected with the vertical rod 42 through a screw, and the horizontal rod 41 can be vertically adjusted relative to the vertical rod 42 so as to adjust the height of the displacement sensor probe 3. Specifically, a plurality of connecting holes can be opened on the vertical rod 42, a threaded hole is opened at the end of the horizontal rod 41, and the screw rod passes through different connecting holes to be in threaded connection with the horizontal rod at the position of the threaded hole, so that the horizontal rod 41 can be adjusted in the vertical direction. Or, the horizontal bar 41 is connected with the vertical sliding of the vertical bar 42, the vertical rotation of the vertical bar 42 is connected with the lead screw, the lead screw passes through the horizontal bar 41 and is connected with the horizontal bar 41 through threads, and through rotating the lead screw, the lead screw drives the horizontal bar 41 to vertically move up and down, thereby realizing the adjustment of the horizontal bar 41 in the vertical direction.
The displacement sensor fixing support 4 is integrally placed on the foundation of the turntable 1 and can horizontally move in parallel with the radial direction of the turntable 1. Specifically, the bottom of the vertical rod 42 is connected with a placing seat which can be stably placed on the foundation of the turntable 1.
The tail end of the horizontal rod is provided with a clamping structure for fixing the displacement sensor probe 3. The clamping structure comprises a hole formed in the horizontal rod 41 and a bolt in threaded connection with the horizontal rod 41, the end of the bolt can be inserted into the hole in the horizontal rod 41, the displacement sensor probe 3 can penetrate through the hole in the horizontal rod 41 and can be rotated until the bolt is tightly abutted against the displacement sensor probe 3, and the displacement sensor probe 3 is clamped tightly through the bolt.
Once the spherical detection block 2 is fixed, no readjustment is required. When the relative position of the displacement sensor probe 3 and the spherical detection block 2 is adjusted, the height of the displacement sensor probe can be adjusted by adjusting the relationship between the horizontal rod 41 and the vertical rod 42 of the displacement sensor fixed support 4. The whole displacement sensor fixing support 4 can move horizontally, so that the axis of the displacement sensor probe 3 can be adjusted to be aligned with the spherical center of the spherical detection block 2. The bolt at the tail end of the horizontal rod 41 of the displacement sensor fixing support 4 is loosened, the gap between the displacement sensor probe 3 and the spherical detection block can be manually adjusted, and the bolt is screwed down after the gap adjustment is finished.
The displacement sensor probe 3 is connected to the displacement sensor conditioning circuit 5 through a cable, the displacement sensor conditioning circuit 5 is connected to the data acquisition card 7 through a cable, and the displacement sensor conditioning circuit 5 amplifies a displacement signal detected by the displacement sensor probe 3, converts the amplified displacement signal into a voltage signal and transmits the voltage signal to the data acquisition card 7. The angle encoder 6 is an angle measuring device of the rotary table 1, and in the rotating process of the rotary table 1, the angle encoder 6 outputs a pulse signal and transmits the pulse signal to the data acquisition card 7.
The data acquisition card 7 is connected to the industrial personal computer 8 through a PCI slot, and sends the received voltage signal and the pulse signal to the industrial personal computer 8. And test software runs in the industrial personal computer 8, the test software is developed based on a LabVIEW virtual instrument platform, the test software of the industrial personal computer 8 converts the pulse signal into an angle signal, and then displacement data is calculated and fitted to the voltage signal and the displacement data.
The embodiment also discloses a displacement sensor calibration method based on the rotary table, which comprises the following steps:
(1) the relative position of the displacement sensor probe 3 and the spherical detection block 2 is adjusted to ensure that the axis of the displacement sensor probe 3 is aligned with the spherical center of the spherical detection block 2 and the axis of the displacement sensor probe 3 is tangent with the outer edge of the rotary table 1. The output voltage of the displacement sensor conditioning circuit 5 is observed in the interface of the test software, and the gap between the displacement sensor probe 3 and the spherical detection block 2 is adjusted according to the value of the output voltage, so that the value of the output voltage is at the minimum value (usually 0V) of the voltage output range of the displacement sensor probe 3, which is the initial position.
(2) Selecting n test points according to the measuring range of the calibrated displacement sensor, and selecting and measuring n test points according to the table radius R of the rotary table 1 0 Calculating the angular position of the turntable 1, operating the turntable 1 to move from the initial position to n angular positions in turnOutput voltage signal u of displacement sensor conditioning circuit 5 is automatically acquired by simultaneous test software i And the pulse signal of the angle encoder 6, and then the pulse signal is converted into an angle signal delta theta i Further, the displacement data Δ d is calculated i 。
(3) The test software collects the voltage signal u for n times i And displacement data Δ d i Performing linear fitting, and calculating to obtain sensitivity k and zero offset as follows:
wherein u is i Is a voltage; r 0 Is the radius of the turntable; and deltad is the displacement in the linear direction sensed by the displacement sensor probe.
The number of lines of the angle encoder used in the embodiment of the invention is 32768, 512 times of subdivision is carried out, and the number of pulses of a whole circle is 16777216.
Radius R of the turntable 0 Is 650 mm.
Selecting 10 position points and the rotating angle (delta theta) i The unit: degree) of [0.0023,0.0174,0.0346,0.0516,0.0691,0.0879,0.1030,0.1204,0.1372,0.1720]The collected voltage values (unit: V) [0.1277,0.9865,1.9609,2.9267,3.9181,4.98123,5.84124,6.8277,7.7717,9.7520]。
Calculating the displacement as Δ d ═ R 0 sin(Δθ i ) (unit: mm) and a linear fit is performed to the displacement and voltage values, the result is shown in fig. 4, and finally the result is obtained by a linear fit:
the expression of the straight line is y-0.2001 x +1.848 × 10 -4
k＝0.2001
b＝1.848×10 -4
Although the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and those skilled in the art can make many modifications without departing from the spirit and scope of the present invention as defined in the appended claims.
Claims (10)
1. The utility model provides a displacement sensor calibration device based on revolving stage (1), its characterized in that: comprises a rotary table (1) with angular position movement function;
the spherical detection block (2) is arranged on the surface of the rotary table (1);
the displacement sensor fixing support (4) is connected to the foundation of the rotary table (1);
the displacement sensor probe (3) is detachably connected to the displacement sensor fixing support (4) and is used for detecting the distance from the displacement sensor probe (3) to the surface of the spherical detection block (2) to obtain a displacement signal;
the displacement sensor conditioning circuit (5) is connected with the displacement sensor probe (3) and is used for converting a displacement signal detected by the displacement sensor probe (3) into a voltage signal and transmitting the voltage signal to the data acquisition card (7);
the angle encoder (6) is arranged on the rotary table (1), and along with the rotation of the rotary table (1), the angle encoder (6) outputs a pulse signal and transmits the pulse signal to the data acquisition card (7);
the data acquisition card (7) receives the voltage signal and the pulse signal and sends the voltage signal and the pulse signal to the industrial personal computer (8);
and the industrial personal computer (8) is connected with the data acquisition card (7) and is used for converting the pulse signal into an angle signal, further calculating displacement data and fitting the voltage signal and the displacement data.
2. A turntable (1) based displacement sensor calibration device according to claim 1, characterized in that: the projection of the outer edge of the table top of the rotary table (1) along the axial direction of the rotary table (1) passes through the spherical center of the spherical detection block (2).
3. The turntable-based displacement sensor calibration device according to claim 1, wherein: the spherical detection block (2) is provided with a positioning surface, the positioning surface is tightly attached to the outer edge of the table top of the rotary table, and the spherical detection block (2) is integrally connected to the table top of the rotary table (1) through a bolt.
4. The turntable-based displacement sensor calibration device according to claim 1, wherein: the displacement sensor fixing support (4) is used for detachably fixing and clamping the displacement sensor probe (3).
5. The turntable-based displacement sensor calibration device according to claim 1, wherein: the whole displacement sensor fixing support (4) can horizontally move in parallel to the radial direction of the rotary table (1).
6. The turntable-based displacement sensor calibration device according to claim 1, wherein: the displacement sensor fixing support (4) comprises a vertical rod and a horizontal rod connected to the vertical rod, and the horizontal rod can be vertically adjusted relative to the vertical rod.
7. The turntable-based displacement sensor calibration device according to claim 6, wherein: the tail end of the horizontal rod is provided with a clamping structure for fixing a displacement sensor probe (3).
8. A displacement sensor calibration method based on a rotary table is characterized in that: the turntable-based displacement sensor calibration apparatus according to any one of claims 1 to 7, comprising the steps of,
(1) adjusting the relative position of the displacement sensor probe (3) and the spherical detection block (2), so that the axis of the displacement sensor probe (3) is aligned with the spherical center of the spherical detection block (2), and the axis of the displacement sensor probe (3) is tangent to the outer edge of the rotary table (1), so that the output voltage value is the minimum value of the voltage output range of the displacement sensor probe (3), which is the initial position;
(2) according to quiltN test points are selected according to the measuring range of the calibration displacement sensor and the table radius R of the rotary table (1) 0 Calculating the angular position of the rotary table (1), operating the rotary table (1) to move to n angular positions from the initial position in sequence, and simultaneously automatically acquiring an output voltage signal u of the displacement sensor conditioning circuit (5) by the industrial personal computer (8) i And a pulse signal of the angle encoder (6), and converting the pulse signal into an angle signal delta theta i Further, the displacement data Δ d is calculated i ；
(3) The industrial personal computer collects the voltage signal u for n times i And displacement data Δ d i And performing linear fitting, and calculating to obtain sensitivity k and zero offset b.
9. The turntable-based displacement sensor calibration method according to claim 8, wherein: the sensitivity k and zero bias are:
wherein u is i Is a voltage; r 0 Is the radius of the turntable (1); and deltad is the displacement in the linear direction sensed by the displacement sensor probe.
10. The turntable-based displacement sensor calibration method according to claim 9, wherein: said Δ d ═ R 0 sin(Δθ i ) Wherein, Δ θ i The rotation angle of the turntable (1) from the initial position to the detection position.
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