CN216621060U - Automatic calibration device for linear displacement sensor - Google Patents

Automatic calibration device for linear displacement sensor Download PDF

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Publication number
CN216621060U
CN216621060U CN202121826359.6U CN202121826359U CN216621060U CN 216621060 U CN216621060 U CN 216621060U CN 202121826359 U CN202121826359 U CN 202121826359U CN 216621060 U CN216621060 U CN 216621060U
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linear
measuring
sensor
displacement sensor
clamp
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华明
华周南
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Wuxi Jingda Intelligent Technology Co ltd
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Wuxi Jingda Intelligent Technology Co ltd
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Abstract

The utility model provides a linear displacement sensor automatic calibration device, which comprises a base, treat the calibration line displacement sensor, grating chi and controller, set up the linear drive module on the base, measure linear rail and grating chi, the direction of motion of linear drive module is parallel with measurement linear rail and grating chi, be provided with the straight line slider that can linear motion on the linear drive module, be equipped with the crossbeam that stretches out to measuring linear rail on the straight line slider, be provided with the sensor anchor clamps that are used for installing the treatment calibration line displacement sensor on measuring linear rail, it is equipped with the sensor gauge head anchor clamps that are used for installing the movable gauge head of sensor to slide, be equipped with spherical convex surface in the lower part of sensor gauge head anchor clamps, can with the side point contact of crossbeam; a grating reading head of the grating ruler is fixedly connected with a sensor measuring head clamp; the controller receives the displacement signal and controls the linear driving module to work. The utility model has the advantages of high detection speed, accurate positioning, high repeatability of detection results and simple operation, and greatly improves the detection efficiency and accuracy.

Description

Automatic calibration device for linear displacement sensor
Technical Field
The utility model belongs to the field of sensor verification, and particularly relates to an automatic calibration device for a linear displacement sensor.
Background
As a very common geometric quantity industrial sensor, the linear displacement sensor has a wide variety and is widely applied to various industrial occasions.
At present, the domestic calibration and calibration of the linear displacement sensor have the following main means:
1. calibration was performed using a length measuring machine. Although the length measuring machine is a high-precision length measuring instrument, the length measuring machine is not a professional tool specially used for calibrating the linear displacement sensor, when the length measuring machine is used, a special clamp needs to be customized to clamp the detected sensor, in operation, a detection person needs to push a measuring head of the length measuring machine to move back and forth, data is manually recorded once when each calibration point comes, the length measuring machine needs to move back and forth three times according to a calibration method and an error calculation method of JJF 1305 and 2011 linear displacement sensor calibration specification, 66 data are recorded, and then each error index is calculated through a least square method. The whole process is time-consuming and labor-consuming, and the efficiency is low.
2. Calibration was performed using a gauge block. The gauge block is a basic length standard device, and has the advantages of strong universality and defects of too original operation method, great influence of the operation level of detection personnel on the measurement precision, and more trouble in calculation of a reading value which needs to be substituted into a gauge block correction value than a length measuring machine.
3. The calibration was performed using a laser interferometer. The laser interferometer has the advantages of long distance and high precision, but for calibrating the linear displacement sensor, a clamping moving platform specially used for customizing the sensor is still not needed, the laser interferometer is time-consuming and labor-consuming to install, the requirement on the use environment is high, the operation is not simple and convenient, and the manual data recording and calculation errors are not avoided as in the two methods during detection.
4. Some displacement sensor manufacturers use a mechanical sensor calibration frame, the principle of the calibration frame is that a mechanical lead screw is used for transmission, a digital display device modified by a capacitive grating measuring tool is used for displaying displacement, the calibration frame completely needs manual hand-operated hand wheels to enable a sensor measuring head to move forward and backward, and also needs manual data recording and error calculation, the calibration frame is rough in structure, low in precision and low in calibration efficiency, and the calibration frame cannot meet the time requirement of sensor manufacturers for industrial mass high-quality production of sensors.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide an automatic calibration device of a linear displacement sensor, which improves the automation degree of the calibration of the linear displacement sensor on the basis of improving the detection efficiency and the detection accuracy.
In order to achieve the purpose, the utility model adopts the technical scheme that: an automatic calibration device of a linear displacement sensor comprises a base, the linear displacement sensor to be calibrated, a grating ruler used as a displacement standard and a controller, a linear driving module, a measuring linear track and the grating ruler are fixedly arranged on the base, the motion direction of the linear driving module is parallel to the linear measuring track and the grating ruler, the linear driving module is provided with a linear sliding block capable of moving linearly, the linear sliding block is provided with a beam extending to the linear measuring track, the beam is perpendicular to the linear measuring track, a sensor clamp for mounting a displacement sensor of a line to be calibrated and a sensor measuring head clamp for mounting a movable measuring head of the sensor are fixedly arranged on the measuring linear track in a sliding way, the lower part of the sensor measuring head clamp is provided with a spherical convex surface, and the spherical convex surface can be in point contact with the side surface of the cross beam; a grating reading head of the grating ruler is fixedly connected with the sensor measuring head clamp; the controller is used for receiving the displacement signal and controlling the linear driving module to work.
The linear driving module comprises a stepping motor, a ball screw and a linear motion guide rail, the ball screw is rotatably installed on the linear motion guide rail, the stepping motor is connected with the ball screw, the linear sliding block is in threaded connection with the ball screw, and the linear sliding block is slidably arranged on the linear motion guide rail.
And the grating reading head, the linear sliding block and the sensor measuring head clamp are all movable between the stepping motor and the sensor clamp.
The sensor measuring head fixture comprises a fixture body and a measuring slide block, the measuring slide block is arranged on the measuring linear track in a sliding mode, and the fixture body is fixed to the upper portion of the measuring slide block.
The measuring slide block is provided with a sphere, and the spherical surface of the sphere is the spherical convex surface.
The grating reading head is fixedly connected with the clamp body.
And a plurality of fixing holes which are distributed at equal intervals and used for fixing the sensor clamp are arranged on the measuring linear track.
The utility model has the beneficial effects that: the utility model has the advantages of high speed, accurate positioning, high repeatability of detection results and simple operation for the calibration of the linear displacement sensor, and greatly improves the detection efficiency and the detection accuracy.
According to the utility model, the linear sliding block is in point contact with the spherical convex surface at the lower part of the sensor measuring head clamp through the cross beam, so that the sensor measuring head clamp for clamping the sensor measuring head can be pushed to move along with the linear sliding block, the influence of the non-linearity of the linear driving module on the linear motion of the sensor measuring head clamp can be eliminated, and the linearity of the linear track to be measured is ensured.
According to the utility model, through the transmission of the ball screw, the linear sliding block can move forward and backward according to a set distance, so that the accurate positioning of the measuring head of the sensor is realized, and the positioning accuracy can reach 0.1 micrometer.
The utility model uses the grating ruler system to provide a high-precision displacement display value for the sensor, the repeatability is less than or equal to 1 mu m, and the measurement requirement of the calibration line displacement sensor is completely met.
Drawings
FIG. 1 is a top view of a structure of the present invention;
the labels in the figure are: 1. the device comprises a base, 2, a grating ruler, 3, a measuring linear track, 4, a stepping motor, 5, a ball screw, 6, a linear sliding block, 7, a linear motion guide rail, 8, a sensor clamp, 9, a steel ball, 10, a grating reading head, 11, a measuring sliding block, 12 and a sensor measuring head clamp.
Detailed Description
The present invention will be described in further detail with reference to the following drawings and examples, but the utility model is not limited thereto.
Referring to the attached drawings, the automatic calibration device for the linear displacement sensor comprises a base 1 with a flat plate structure, a linear displacement sensor to be calibrated (not shown in the figure), a grating ruler 2 and a controller (not shown in the figure), wherein a linear motion guide rail 7, a measurement linear track 3 and the grating ruler 2 which are parallel to each other are fixedly arranged on the base 1.
The linear motion guide rail 7 on install ball screw 5, linear slide 6 and step motor 4, ball screw 5 rotates to set up on the installing support on linear motion guide rail 7, ball screw 5's left end and step motor 4 transmission are connected, linear slide 6 threaded connection is on ball screw 5, and linear slide 6's bottom slides and sets up on linear motion guide rail 7, step motor 4 with the controller links to each other, realizes linear slide 6 according to the removal of setting for the distance under the control of controller. The above structure forms a linear driving module. The step angle of the stepping motor is subdivided to reach 0.036 degrees, and the minimum displacement of the ball screw is less than 0.1 mu m.
The right end of the measuring linear track 3 is fixedly provided with a sensor clamp 8 for mounting a displacement sensor of a line to be calibrated, the measuring linear track 3 is provided with a measuring slide block 11 in a sliding manner, and the upper part of the measuring slide block 11 is fixedly connected with a sensor measuring head clamp 12 for mounting a movable measuring head (not shown in the figure) of a sensor.
In order to realize the pushing of the linear sliding block 6 to the measuring sliding block 11, a cross beam is arranged on one side, facing the measuring linear track 3, of the linear sliding block 6, the cross beam is suspended above the measuring linear track 3, a steel ball 9 is fixedly mounted on the side, opposite to the cross beam, of the measuring sliding block 11, in the sliding process of the linear sliding block 6, the cross beam and the steel ball 9 are in point contact, the linear movement of the measuring sliding block 11 and the sensor measuring head clamp 12 is pushed through the point contact, in addition, after the point contact is adopted, the influence of the non-linearity of the linear driving module on the linear movement of the sensor measuring head clamp 12 can be eliminated, and the linearity of the measuring linear track 3 is ensured.
Furthermore, a plurality of fixing holes are arranged on the measuring linear track 3 at intervals along the length direction of the measuring linear track and used for adjusting the fixing position of the sensor clamp 8.
The grating ruler 2 is a steel belt type grating ruler, and the resolution can reach 0.1 mu m. The grating reading head 10 matched with the grating ruler 2 is fixedly connected with the sensor measuring head clamp 12, and when the sensor measuring head clamp 12 moves along with the measuring slide block 11, the grating reading head 10 also moves along with the movement.
The controller is in signal connection with the grating reading head and the sensor movable measuring head. The core of the controller is an STM32 single chip microcomputer and has the following four functions.
1. The stepping motor is driven by the high-power subdivision driver of the stepping motor to drive the ball screw to rotate. The ball screw drives the grating ruler reading head to slide on the measuring linear track through the linear slide block and the measuring slide block.
2. The grating ruler reading head converts interference moire fringes generated in movement into four-way orthogonal square wave digital quantity signals, the signals are directly connected into an STM32 single chip microcomputer, and the signals are converted into displacement digital quantity through an encoder mode and a related algorithm of STM 32.
3. The STM32 singlechip collects the displacement volume that grating chi signal conversion in real time, according to displacement volume adjustment marching speed and displacement volume. Assuming that the current position is 0.0000 mm, the set step distance is 50.0 mm, the upper computer software of the computer sends an advance command, the single chip microcomputer program controls the stepping motor to rotate, under the conversion of the mechanical device, the movable probe of the sensor rapidly advances by about 49.9950 mm firstly, then decelerates for the first time, and then advances to 0.9990 mm, decelerates for the second time, gradually approaches to the position of 50.0000 mm by the step distance of 0.1 μm, when the movable probe of the sensor reaches the position of 50.0000 mm, the single chip microcomputer monitors the micro-change of the displacement in real time, continuously controls the fine adjustment of the stepping motor, finally stably positions at 50.0000 mm, and returns to the upper computer to complete the positioning state.
4. The STM32 singlechip displays the displacement measured by the grating ruler on a software interface in real time to realize digital display.
When the utility model is used for calibrating a displacement sensor, the controller controls the stepping motor to drive the movable measuring head of the sensor and the grating reading head to linearly move for a certain distance, a plurality of measuring points are arranged in a moving area, when the measuring points are reached, the movable measuring head of the sensor and the grating reading head transmit acquired information to the controller through the secondary instrument, the controller fits a linear equation according to a least square method, and calculates relevant parameters such as linearity, sensitivity, return stroke and the like. And finally, automatically judging the precision grade of the calibrated sensor according to the requirement of the calibration standard. The whole detection process is automatic, and manual intervention is not needed. The calibration process is based on the JJF 1305-.
The precision of the device can be calibrated and calibrated through a laser interferometer. The controller has a grating ruler software compensation function, can be used for periodically carrying out calibration and rechecking, and the precision of the grating ruler can be adjusted through software.
The above embodiments are only intended to illustrate the technical solution of the present invention and not to limit the same, and it should be understood by those of ordinary skill in the art that the specific embodiments of the present invention can be modified or substituted with equivalents with reference to the above embodiments, and any modifications or equivalents without departing from the spirit and scope of the present invention are within the scope of the claims to be appended.

Claims (7)

1. The utility model provides a linear displacement sensor automatic calibration device, includes the base, treats calibration linear displacement sensor, as displacement standard's grating chi and controller, its characterized in that: the linear driving module, the measuring linear track and the grating ruler are fixedly arranged on the base, the moving direction of the linear driving module is parallel to the measuring linear track and the grating ruler, the linear driving module is provided with a linear sliding block capable of linearly moving, the linear sliding block is provided with a cross beam extending towards the measuring linear track, the cross beam is perpendicular to the measuring linear track, the measuring linear track is fixedly provided with a sensor clamp for mounting a displacement sensor to be calibrated and a sensor measuring head clamp for mounting a movable measuring head of the sensor in a sliding manner, the lower part of the sensor measuring head clamp is provided with a spherical convex surface, and the spherical convex surface can be in point contact with the side surface of the cross beam; a grating reading head of the grating ruler is fixedly connected with the sensor measuring head clamp; the controller is used for receiving the displacement signal and controlling the linear driving module to work.
2. The automatic calibration device for the linear displacement sensor according to claim 1, wherein: the linear driving module comprises a stepping motor, a ball screw and a linear motion guide rail, the ball screw is rotatably installed on the linear motion guide rail, the stepping motor is connected with the ball screw, a linear sliding block is in threaded connection with the ball screw, and the linear sliding block is arranged on the linear motion guide rail in a sliding mode.
3. The automatic calibration device for the linear displacement sensor according to claim 2, wherein: and the grating reading head, the linear sliding block and the sensor measuring head clamp are all movable between the stepping motor and the sensor clamp.
4. The automatic calibration device for the linear displacement sensor according to claim 1, wherein: the sensor measuring head fixture comprises a fixture body and a measuring slide block, the measuring slide block is arranged on the measuring linear track in a sliding mode, and the fixture body is fixed to the upper portion of the measuring slide block.
5. The automatic calibration device for the linear displacement sensor according to claim 4, wherein: the measuring slide block is provided with a sphere, and the spherical surface of the sphere is the spherical convex surface.
6. The automatic calibration device for the linear displacement sensor according to claim 4, wherein: the grating reading head is fixedly connected with the clamp body.
7. The automatic calibration device for the linear displacement sensor according to claim 1, wherein: and a plurality of fixing holes which are distributed at equal intervals and used for fixing the sensor clamp are arranged on the measuring linear track.
CN202121826359.6U 2021-08-06 2021-08-06 Automatic calibration device for linear displacement sensor Active CN216621060U (en)

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CN202121826359.6U CN216621060U (en) 2021-08-06 2021-08-06 Automatic calibration device for linear displacement sensor

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Application Number Priority Date Filing Date Title
CN202121826359.6U CN216621060U (en) 2021-08-06 2021-08-06 Automatic calibration device for linear displacement sensor

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116046594A (en) * 2023-03-27 2023-05-02 福建省计量科学研究院(福建省眼镜质量检验站) Non-contact type material testing machine displacement rate calibration method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116046594A (en) * 2023-03-27 2023-05-02 福建省计量科学研究院(福建省眼镜质量检验站) Non-contact type material testing machine displacement rate calibration method

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