CN114810821A - 3D printing air hydrostatic bearing structure and machining process thereof - Google Patents
3D printing air hydrostatic bearing structure and machining process thereof Download PDFInfo
- Publication number
- CN114810821A CN114810821A CN202110080786.2A CN202110080786A CN114810821A CN 114810821 A CN114810821 A CN 114810821A CN 202110080786 A CN202110080786 A CN 202110080786A CN 114810821 A CN114810821 A CN 114810821A
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- Prior art keywords
- air
- hole
- bearing
- throttle hole
- quick connector
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/003—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2220/00—Shaping
- F16C2220/20—Shaping by sintering pulverised material, e.g. powder metallurgy
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2220/00—Shaping
- F16C2220/60—Shaping by removing material, e.g. machining
- F16C2220/62—Shaping by removing material, e.g. machining by turning, boring, drilling
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2220/00—Shaping
- F16C2220/60—Shaping by removing material, e.g. machining
- F16C2220/70—Shaping by removing material, e.g. machining by grinding
Abstract
The invention provides a 3D printing aerostatic bearing structure which comprises a quick connector, an air inlet, an air inner flow channel, an air throttle hole, a bearing contact surface and a shell. The gas inner flow channel is a hollow rectangular air channel and is connected with the quick connector through the gas inlet. The air throttle hole is of an internal through hole structure, the upper part of the air throttle hole is connected with an air passage of the air internal flow passage, the lower part of the air throttle hole is connected with the contact surface of the bearing, and the internal through hole of the air throttle hole can be directly communicated with external air; the number of the air-saving holes is 20. Compared with a double-cross air passage, a micro air nozzle and a screw plug structure of a traditional aerostatic bearing, the air inner flow passage of the invention is a hollow rectangular air passage and 20 air-saving holes, and has the advantages of good uniformity, high air pressure consistency and high non-contact precision by adopting the rectangular air passage and a large number of air-saving holes; meanwhile, the 3D printing technology is adopted, so that the gas sealing performance is good, the energy consumption is low, and the processing is simple.
Description
Technical Field
The invention relates to a 3D printing aerostatic bearing, in particular to a 3D printing aerostatic bearing structure and a processing technology thereof.
Background
The aerostatic bearing or aerostatic guideway is also called as aerostatic bearing or aerostatic guideway, is a high-precision bearing (guideway) which is based on gas dynamic and static pressure effect and realizes no friction and no vibration, has the characteristics of quiet and no friction, long service life (non-contact and no abrasion), high motion precision, cleanness and no pollution and the like, and has very wide function in semiconductor processing and precision measuring instruments.
The conventional aerostatic bearings on the market at present mainly comprise a small-hole throttling type, a capillary throttling type, a porous type and the like, wherein the small-hole throttling type is the most common and widely used type. The traditional small-hole throttling type aerostatic bearing is generally formed by drilling a travel plane air passage 1 ' on each side surface through a long drill bit by using a whole piece of aluminum alloy or steel as shown in figure 1, then drilling a vertical air passage through the front surface, finally plugging (or bonding by using glue) a micro air nozzle 3 ' processed by copper, sealing redundant air ports processed by the plane air passage by using a plug screw 2 ', and forming a qualified product after the sealing test is qualified.
The existing processing technique has high requirements on processing equipment, for example, an air hydrostatic bearing required by a large-scale precision instrument (an air floating cushion of a photoetching machine) can only be combined by adopting a split small air floating bearing due to the processing depth problem of a drill bit so as to meet the final use requirement, the whole metal is difficult to ensure the whole consistency or high rigidity of the system, the time and labor are wasted, and the effect can not be ensured frequently. The conventional aerostatic bearing thus has: high processing requirement, complex processing, incapability of being suitable for oversized parts, low yield and the like.
Disclosure of Invention
The invention aims to provide a 3D printing air hydrostatic bearing structure which is good in sealing performance, high in rigidity, simple in processing steps and high in yield and a processing technology thereof.
In order to achieve the purpose, the technical scheme of the invention is as follows:
the invention relates to a 3D printing aerostatic bearing structure which comprises a quick connector, an air inlet, an air inner flow channel, a throttle hole, a bearing contact surface and a shell.
The quick connector is connected with the air inlet.
The gas inner flow channel is a hollow rectangular air channel and is connected with the quick connector through the gas inlet.
The bearing contact surface is located at the bottom of the housing.
The air throttle hole is of an internal through hole structure, the upper part of the air throttle hole is connected with an air passage of the air internal flow passage, the lower part of the air throttle hole is connected with the contact surface of the bearing, and the internal through hole of the air throttle hole can be directly communicated with external air; the number of the throttling holes is 20; preferably, the aperture of the internal through hole of the air-saving hole is 0.2 mm.
The working principle of the invention is as follows: external high-pressure gas enters the gas inner flow channel through the quick connector and the gas inlet, the gas in the gas inner flow channel is sprayed out through the gas-saving hole to enter a gap between the contact surface of the bearing and the plane, a layer of lubricating gas film with certain bearing and rigidity is formed in the gap, and the aerostatic bearing is floated under the lubricating and supporting action of the gas film.
The invention relates to a processing technology of a 3D printing aerostatic bearing structure, which comprises the following steps:
(1) 3D modeling software (3D design software such as solidworks, ug and PROE) is utilized to model, and an aerostatic bearing model with an air inner runner and an air-saving hole is directly designed;
(2) directly printing an air hydrostatic bearing blank by using a metal 3D printer (FDM hot melt extrusion technology/laser sintering SLS technology/laser melting SLM technology);
(3) placing the blank body of the air hydrostatic bearing into an ultrasonic cleaning machine, washing out filling and supporting materials in a flow channel through oscillation and water flow, directly printing an air-saving hole with the size of more than 0.3mm by laser melting and laser powder sintering, needing the air-saving hole with the size of less than 0.3mm, and placing the blank body on a CNC (computer numerical control) machine to drill the air-saving hole by using a micro drill (in this case, the air-saving hole is not printed when the blank body of the air hydrostatic bearing is printed);
(4) drying the surface, wherein the aluminum alloy can be subjected to hard anodic oxidation to obtain a hard oxide layer, and the steel and other materials can be subjected to nickel plating or other methods to obtain an anti-rust layer;
(5) putting the contact surface of the bearing on a precision grinding machine for grinding to obtain a flat working surface;
(6) correcting and tapping the air inlet;
(7) and (5) installing a quick connector for the air inlet to finish the finished product.
After the scheme is adopted, the gas inner flow passage is a hollow rectangular air passage, and the 20 air-saving holes have the advantages of good uniformity, high air pressure consistency and high non-contact precision by adopting the rectangular air passage and a large number of air-saving holes compared with a double-cross air passage, a micro air nozzle and a screw plug structure of the traditional aerostatic bearing; meanwhile, the 3D printing technology is adopted, so that the gas sealing performance is good, the energy consumption is low, and the processing is simple.
Drawings
FIG. 1 is a schematic structural view of a prior art aerostatic bearing;
FIG. 2 is a schematic structural view of the present invention;
FIG. 3 is a schematic structural view of a front view of the present invention;
fig. 4 is a perspective view of the present invention.
Detailed Description
Air static pressure bearing structure
As shown in fig. 2 and 3, the invention relates to a 3D printing aerostatic bearing structure, which comprises a quick coupling 1, an air inlet 2, an air internal flow channel 3, a throttle hole 4, a bearing contact surface 5 and a housing 6.
The quick coupling 1 is connected with an air inlet 2.
The gas inner flow channel 3 is a hollow rectangular gas channel and is connected with the quick connector 1 through the gas inlet 2.
The bearing contact surface 5 is located at the bottom of the housing 6.
The air throttle hole 4 is of an internal through hole structure, the upper part of the air throttle hole is connected with an air passage of the air internal flow channel 3, the lower part of the air throttle hole is connected with the bearing contact surface 5, and the internal through hole of the air throttle hole 4 can be directly communicated with external air; the number of the air-saving holes 4 is 20; preferably, the aperture of the internal through hole of the air-saving hole 4 is 0.2 mm.
The working principle of the invention is as follows: external high-pressure gas enters the gas inner flow channel 3 through the quick connector 1 and the gas inlet 2, the gas in the gas inner flow channel 3 is sprayed out through the throttling hole 4 to enter a gap between the bearing contact surface 5 and the plane, a layer of lubricating gas film with certain bearing and rigidity is formed in the gap, and the aerostatic bearing is floated under the lubricating and supporting action of the gas film.
Second, processing technique
The invention relates to a processing technology of a 3D printing aerostatic bearing structure, which comprises the following steps:
(1) 3D modeling software (3D design software such as solidworks, ug and PROE) is utilized to model, and an aerostatic bearing model with an air inner runner 3 and an air-saving hole 4 is directly designed;
(2) directly printing an air hydrostatic bearing blank by using a metal 3D printer (FDM hot melt extrusion technology/laser sintering SLS technology/laser melting SLM technology);
(3) placing the aerostatic bearing blank into an ultrasonic cleaning machine, cleaning out the filling support material in the flow channel through oscillation and water flow, and directly printing out a throttle hole 4 with the thickness of more than 0.3mm through laser melting and laser powder sintering; the air-saving hole 4 with the diameter less than 0.3mm is needed, the blank body can be placed on a CNC (computer numerical control) machine to drill the air-saving hole 4 by a micro drill (in this case, the air-saving hole 4 is not printed when the blank body of the aerostatic bearing is printed);
(4) drying the surface, wherein the aluminum alloy can be subjected to hard anodic oxidation to obtain a hard oxide layer, and the steel and other materials can be subjected to nickel plating or other methods to obtain an anti-rust layer;
(5) putting the bearing contact surface 5 on a precision grinding machine for grinding to obtain a flat working surface;
(6) correcting and tapping the air inlet 2;
(7) and (5) installing a quick connector 1 for an air inlet to finish a finished product.
It should be noted that the structure and the drawings of the present invention mainly describe the principle of the present invention, and the details of the mechanical mechanism and the manufacturing process can be clearly known by those skilled in the art on the premise of understanding the principle of the present invention; in addition, in the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "fixed," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The above description is only a preferred embodiment of the present invention, and the present invention is not limited to the above embodiment, and other types of aerostatic bearing products can be obtained by the same processing technology as the present invention, and all the protection scope of the present invention is included. (including but not limited to planar aerostatic bearings, linear aerostatic bearings, rotary aerostatic bearings, etc.)
Claims (4)
1. The utility model provides a 3D prints aerostatic bearing structure which characterized in that: the gas inlet quick connector comprises a quick connector, a gas inlet, a gas inner flow passage, a throttle hole, a bearing contact surface and a shell; the quick connector is connected with the air inlet; the bearing contact surface is located at the bottom of the housing.
2. The 3D printed aerostatic bearing structure of claim 1, wherein: the gas inner flow channel is a hollow rectangular air channel and is connected with the quick connector through the gas inlet.
3. The 3D printed aerostatic bearing structure of claim 1, wherein: the air throttle hole is of an internal through hole structure, the upper part of the air throttle hole is connected with an air passage of the air internal flow passage, the lower part of the air throttle hole is connected with the contact surface of the bearing, and the internal through hole of the air throttle hole can be directly communicated with external air; the number of the air-saving holes is 20.
4. A process of manufacturing a 3D printed aerostatic bearing structure according to claim 1, characterized in that: the method comprises the following steps: (1) 3D modeling software (3D design software such as solidworks, ug and PROE) is utilized to model, and an aerostatic bearing model with an air inner runner and an air-saving hole is directly designed; (2) directly printing an air hydrostatic bearing blank by using a metal 3D printer (FDM hot melt extrusion technology/laser sintering SLS technology/laser melting SLM technology); (3) placing the blank body of the air hydrostatic bearing into an ultrasonic cleaning machine, washing out filling and supporting materials in a flow channel through oscillation and water flow, directly printing an air-saving hole with the size of more than 0.3mm by laser melting and laser powder sintering, needing the air-saving hole with the size of less than 0.3mm, and placing the blank body on a CNC (computer numerical control) machine to drill the air-saving hole by using a micro drill (in this case, the air-saving hole is not printed when the blank body of the air hydrostatic bearing is printed); (4) drying the surface, wherein the aluminum alloy can be subjected to hard anodic oxidation to obtain a hard oxide layer, and the steel and other materials can be subjected to nickel plating or other methods to obtain an anti-rust layer; (5) putting the contact surface of the bearing on a precision grinding machine for grinding to obtain a flat working surface; (6) correcting and tapping the air inlet; (7) and (5) installing a quick connector for the air inlet to finish the finished product.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110080786.2A CN114810821A (en) | 2021-01-21 | 2021-01-21 | 3D printing air hydrostatic bearing structure and machining process thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110080786.2A CN114810821A (en) | 2021-01-21 | 2021-01-21 | 3D printing air hydrostatic bearing structure and machining process thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114810821A true CN114810821A (en) | 2022-07-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110080786.2A Pending CN114810821A (en) | 2021-01-21 | 2021-01-21 | 3D printing air hydrostatic bearing structure and machining process thereof |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104912934A (en) * | 2015-05-30 | 2015-09-16 | 洛阳传顺机械设备有限公司 | Air floatation guide rail applicable to super-precise detection or ultrahigh-precision processing equipment |
| JP2019190591A (en) * | 2018-04-26 | 2019-10-31 | 学校法人東京理科大学 | Porous static pressure air bearing and its process of manufacture |
| CN110421171A (en) * | 2019-05-09 | 2019-11-08 | 上海大学 | The 3D printing preparation method of Porous gas suspension bearing metal watt |
| CN110722267A (en) * | 2019-10-14 | 2020-01-24 | 湖南大学 | Novel manufacturing method of porous micropore composite throttling air bearing based on laser processing |
| CN110939655A (en) * | 2019-12-06 | 2020-03-31 | 天津航天机电设备研究所 | V-shaped throttling type heavy-load static pressure air bearing |
-
2021
- 2021-01-21 CN CN202110080786.2A patent/CN114810821A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104912934A (en) * | 2015-05-30 | 2015-09-16 | 洛阳传顺机械设备有限公司 | Air floatation guide rail applicable to super-precise detection or ultrahigh-precision processing equipment |
| JP2019190591A (en) * | 2018-04-26 | 2019-10-31 | 学校法人東京理科大学 | Porous static pressure air bearing and its process of manufacture |
| CN110421171A (en) * | 2019-05-09 | 2019-11-08 | 上海大学 | The 3D printing preparation method of Porous gas suspension bearing metal watt |
| CN110722267A (en) * | 2019-10-14 | 2020-01-24 | 湖南大学 | Novel manufacturing method of porous micropore composite throttling air bearing based on laser processing |
| CN110939655A (en) * | 2019-12-06 | 2020-03-31 | 天津航天机电设备研究所 | V-shaped throttling type heavy-load static pressure air bearing |
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