CN203292633U - Electrolytic machining device of ultrathin workpieces - Google Patents
Electrolytic machining device of ultrathin workpieces Download PDFInfo
- Publication number
- CN203292633U CN203292633U CN2013202758679U CN201320275867U CN203292633U CN 203292633 U CN203292633 U CN 203292633U CN 2013202758679 U CN2013202758679 U CN 2013202758679U CN 201320275867 U CN201320275867 U CN 201320275867U CN 203292633 U CN203292633 U CN 203292633U
- Authority
- CN
- China
- Prior art keywords
- axis
- electrode
- processing
- piezoelectric ceramics
- ultrathin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Images
Abstract
The utility model relates to an electrolytic machining device of ultrathin workpieces, and belongs to the field of precise micro-electrochemistry machining. The electrolytic machining device mainly comprises two sets of three-dimensional tender-moving control panels. A first loading platform (7) is installed on the first set of three-dimensional tender-moving control panel, and a second loading platform (6) is installed on the second set of three-dimensional tender-moving control panel. The first loading platform (7) is used for clamping a nanometer electrode (12) in the process of machining, and the second loading platform (6) is used for installing a metal circular ring (14) in the process of machining. By means of the electrolytic machining device, the straightness, the flatness and the parallelism of the ultrathin workpices can be guaranteed, and the problems such as deformation caused by clamping are avoided.
Description
Technical field
The utility model relates to a kind of electrolytic machining device of ultrathin workpieces, belongs to precise fine electrochemistry manufacture field.
Background technology
Development along with science and technology and modern industry, the microminiaturization of functional structure has become the development trend of the various fields such as Aero-Space, biomedical engineering and precision instrument, physical dimension also reduces to micron accordingly, or even Nano grade, machine components are just towards the future development of " little ", " thin ", " gently ".The microminiature member of being on active service, require its surface without burr, polishing, otherwise frictional force to each other will cause serious obstruction to mechanism kinematic, and this makes the accuracy of manufacture of thin workpiece particularly important.Research and the microminiature member manufacturing technology that development cost is low and crudy is good have become one of current study hotspot.
Work in-process often runs into slim workpiece, and the workpiece (sheet material) that we are not more than thickness 2.0mm usually is called thin plate, and thickness is called ultrathin workpieces less than the workpiece of 1.0mm., for thin workpiece and ultrathin workpieces,, because rigidity deficiency, the flexibility of workpiece self are had a surplus, adopt conventional clamping can not reach machining accuracy, and because clamping force causes the workpiece strain, cause the generation form error.Traditional machining, there will be more burr and leave residual stress as punch press processing processing edge; Grinding is had relatively high expectations to the technology such as linearity, flatness and the depth of parallelism that guarantee thin workpiece, processing has certain difficulty, and because workpiece is very thin, the absorption heat is large, distortion is large, and normal warpage, clot, very easily be cut heat and burn out, occur sticking with paste trace, make workpiece become extremely crisp and lose the due performance of its material.Therefore, ultrathin workpieces is processed into for a difficult point.
At present,, for tradition processing occurs in thin workpiece processing problem, usually adopt special processing technology to process thin workpiece in industrial production.The employing Electric Discharge Wire-cutting Technology such as Liang Jianzhao of Guangzhou institute of South China Science ﹠ Engineering University are carried out working research to the thin workpiece of multi-disc.Wire-cut Electrical Discharge Machining be with mobile fine wire (normally molybdenum filament or copper wire, diameter 0.08 ~ 0.25mm), as electrode, adds pulse voltage between workpiece and wire electrode, and soaks the working solution medium between them; Pulse voltage punctures the working solution between them, and to produce discharge channel, instantaneous temperature is up to more than 10000 ℃, and high temperature is with even vaporization of workpiece fusing, thereby realization is to the ablation processing of workpiece.Digital control wire-electrode cutting can guarantee to coordinate and machining accuracy by the adjusting play compensation rate, and wire electrode and discharging gap are very little simultaneously, and joint-cutting is 0.2mm approximately, can process various complex-shaped thin workpiece, as micro hole, narrow slit, narrow groove, different in nature workpiece etc.But this method still comes with some shortcomings, machining accuracy and assembly precision as large in export license, workpiece are difficult to guarantee, and can make surface of the work that the metallographic structure metamorphic layer is arranged, in the situation that fast wire winding, wire electrode has lost the damping action of the cooling fluid that should produce while processing thick workpiece, add again the impact of spark discharge, thereby wire electrode is easy to produce shake.In addition, the speed of the thin workpiece of cutting is fast, and converter feed is also very fast, and the speed of stepper motor has certain technical scope, and speed can produce step-out and lose the step phenomenon when too fast, and these all can affect the machining accuracy of workpiece.
Electrolyzed Processing has that processing is not subjected to the restriction of the strength of materials and hardness, tool-electrode is lossless, surperficial, the production efficiency advantages of higher good without residual stress and recast layer, crudy of processing work.The trial of at present ultrathin workpieces being carried out Electrolyzed Processing mainly contains Voltage in High Frequency Group Pulse Electrochemical processing (HGPECM), the Wu Gaoyang of Beijing Institute of Technology etc. is studied formation, reversing the current and the pulse power modulating frequency of the high frequency group pulse signal of telecommunication, moulding and the cathode design of HGPECM, can significantly improve the smooth characteristic of interpolar electrolyte and reduce electrode passivation obtaining good processing effect by evidence the method.
The utility model content
The purpose of this utility model is for the problems referred to above, has proposed a kind of linearity, flatness and depth of parallelism that can guarantee ultrathin workpieces, avoids producing because of clamping the electrolytic machining device of the problems such as deformation.
A kind of electrochemical machining method of ultrathin workpieces is characterized in that comprising the following steps: step 1. is separately fixed at nano-electrode and metal ring on the objective table of two of left and right, and ultrathin workpieces is suspended in metal ring by wire; Draw electrolyte and inject metal ring with dropper, forming the electrolyte liquid film of thin layer, ultrathin workpieces is immersed in the electrolyte liquid film; Step 2. nano-electrode clamping is connected with the negative pole of power supply on the first objective table, metal ring is arranged on the second objective table and is connected with the positive pole of power supply, control the tool setting campaigns of nano-electrodes by the two three-dimensional fine motion consoles of cover, gather current signal in the tool setting process by oscillograph simultaneously; Step 3. utilizes metal that the principle that Anodic dissolves occurs in electrolyte, and nano-electrode, as tool cathode, carries out the nanometer Electrolyzed Processing by X, Y, the motion of Z three-axis numerical control of nano-electrode to the ultrathin workpieces in the electrolyte liquid film.
The electrochemical machining method of above-mentioned ultrathin workpieces is characterized in that: above-mentioned nano-electrode is carbon nanotube electrode or metal nano line electrode, carbon nanotube electrode diameter 50-300nm, electrode active length 10-30 μ m, electrode resistance 30-150k Ω;
Above-mentioned electrolyte liquid film is the H of 0.1mol/L
2SO
4Solution;
Above-mentioned power supply is nanosecond pulse power supply, adds voltage 3-10V in man-hour, cycle 50ns, pulsewidth 5ns;
Above-mentioned nanometer Electrolyzed Processing test metal ring diameter used is 3-10mm, uses diameter to form as iron wire or the nickel wire bending of 200-1000 μ m;
The thickness of above-mentioned ultrathin workpieces is 10-100 μ m.
Realize the device of the electrochemical machining method of above-mentioned ultrathin workpieces, it is characterized in that: this device mainly comprises the two three-dimensional fine motion consoles of cover, the three-dimensional fine motion console of first set is comprised of the first X-axis, the first Y-axis, the first Z axis and the first piezoelectric ceramics of being installed on the first Z axis, and the second three-dimensional fine motion console of cover is comprised of the second X-axis, the second Y-axis, the second Z axis and the second piezoelectric ceramics of being installed on the second Z axis; This device also comprises the first objective table of being installed on the first piezoelectric ceramics, is installed on the second objective table on the second piezoelectric ceramics, and vision-aided system;
Clamping nano-electrode when above-mentioned the first objective table is used for processing;
Above-mentioned the second objective table is used for adding metal ring is installed man-hour;
In the above-mentioned two three-dimensional fine motion consoles of cover, the displacement resolution of the first X-axis, the first Y-axis, the first Z axis and the second X-axis, the second Y-axis, the second Z axis is 100-200nm/step, and the displacement resolution of the first piezoelectric ceramics and the second piezoelectric ceramics is 5-20nm/step.
The beneficial effects of the utility model are:
1, the utility model proposes a kind of electrochemical machining method of ultrathin workpieces.The method is suspended on ultrathin workpieces in the electrolyte liquid film, thereby while having avoided clamping, the rigidity deficiency due to workpiece self produces deformation, causes the problem that produces form error; The Electrolyzed Processing tool cathode contacts with ultrathin workpieces is unstressed, and electrolyte is in time cooling to the heat that produces in process, has effectively guaranteed the crudy of ultrathin workpieces.
2, utilize Electrolyzed Processing to process ultrathin workpieces, have tool-electrode lossless, be not subjected to that the restriction of workpiece material intensity and hardness, processing work surface are good without residual stress and recast layer, crudy, the production efficiency advantages of higher.And utilize nanosecond pulse power supply to process, can significantly improve the smooth characteristic of interpolar electrolyte and reduce electrode passivation and obtain good processing effect.
3, utilize metal that the principle that Anodic dissolves occurs in electrolyte, nano-electrode is carried out the nanometer Electrolyzed Processing as tool cathode to the ultrathin workpieces that is suspended in the electrolyte liquid film,, by suitable machined parameters (machining voltage, concentration of electrolyte, pulse period, pulsewidth etc.) being set, controlling accurate processing conditions, can realize the nanometer Electrolyzed Processing of ultrathin workpieces.
4, the nanometer pilot system based on the micro objective visual field has nano level motion control precision, realize nano level processing feeding, guarantee the requirement of machining accuracy, and can observe tool setting and process under the high power visual field, realized the Real Time Monitoring to process of the test.
The utility model is suspended on ultrathin workpieces in the electrolyte liquid film, utilize the nanoscale electrode as ultrathin workpieces being carried out the tool cathode of Electrolyzed Processing, and by suitable machined parameters setting and accurate processing conditions, control, can realize nano level Electrolyzed Processing, for the micro-electrochemical machining manufacture fields such as special-shaped structural part processing, the processing of extra small hole, group's hole processing, line cutting processing carry out nano level processing experiment research, open up brand-new direction.
Description of drawings
Fig. 1 is the system diagram of ultrathin workpieces electrochemical machining method;
Fig. 2 is the device schematic diagram of ultrathin workpieces electrochemical machining method;
Its label title is respectively: 1. the second X-axis; 2. the second Y-axis; 3. the second Z axis; 4. motion control card; 5. the second piezoelectric ceramics; 6. the second objective table; 7. the first objective table; 8. the first piezoelectric ceramics; 9. the first Z axis; 10. the first Y-axis; 11. the first X-axis; 12. nano-electrode; 13. microscopical object lens; 14. metal ring; 15. Unidirectional transparent protective glass; 16. industrial computer; 17. data collecting card; 18. oscillograph; 19. power supply; 20. platform base; 21. electrolyte liquid film; 22. ultrathin workpieces; 23. wire
The specific embodiment:
Realize the system of ultrathin workpieces Electrolyzed Processing in Fig. 1, mainly by kinetic control system, current signal monitoring system and vision-aided system etc., formed.Power supply 19 can be the nanosecond pulse power supply of output 0～50V continuous voltage, kinetic control system is comprised of the two three-dimensional fine motion consoles of cover and motion control card, the three-dimensional fine motion console of first set comprises the first X-axis 11, the first Y-axis 10, the first Z axis 9 and is installed on the first piezoelectric ceramics 8 on the first Z axis, the second three-dimensional fine motion console of cover comprises the second X-axis 1, the second Y-axis 2, the second Z axis 3 and is installed on the second piezoelectric ceramics 5 on the second Z axis, and motion control card 4 is controlled the movement locus of X/Y/Z.In the two three-dimensional fine motion consoles of cover, the displacement resolution of X-axis, Y-axis, Z axis are 100nm/step, and the displacement resolution of piezoelectric ceramics is 10nm/step, control minim gaps between needle points and CNT by controlling the two three-dimensional fine motion consoles of cover in test.The current signal monitoring system is comprised of oscillograph 18 and data collecting card 17, is used for the short-circuit signal that the monitoring test nano-electrode contacts with ultrathin workpieces, and gathers the current signal in process.Vision-aided system, can select microscopical object lens 13 to amplify the visual field of different multiples, and utilize digital camera head with the image data transmission in object lens to industrial computer, process of the test is carried out real-time monitored and IMAQ.
Because all there are difference in nano-electrode and ordinary electrode aspect the appearance and size of the material property of electrode and electrode, this certainly will cause micro force different of two kinds of electrodes electrode and sample room when work, and the difference of electric field locality.The nanometer electrochemical Machining Technology is to utilize metal that the principle that electrolytic anode dissolves occurs in electrolyte, adopt nano-electrode, move in conjunction with multi-axis numerical control, carrying out the nanoscale of metal material removes, can process two-dimensional complex shape and three-dimensional structure,, for the Electrolyzed Processing of labyrinth and the three-dimensional die cavity of high-aspect-ratio, can minute multilayer carry out the electrolysis milling.Two-dimensional silhouette processing can be divided into groove processing, pocket machining etc.; Three-D profile processing can be divided into Free-Form Surface Machining and three-dimensional pocket machining.In processing, the both positive and negative polarity of nanosecond pulse power supply connects respectively workpiece and tool-electrode, and nanometer electrolysis layered milling process can be divided into two stages: electrode is along vertical surface of the work to the lower feeding process segment; After electrode is fed into the milling layer thickness of appointment, along workpiece place planar obit simulation, carry out the slabbing stage.After slabbing is complete, then feeding straight down, so constantly carry out by layer Milling Process, until completion of processing.
The device of ultrathin workpieces electrochemical machining method in Fig. 2, on the first objective table 7, be connected nano-electrode 12 clampings with the negative pole of power supply 19; Metal ring 14 is fixed on the second objective table 6, with the positive pole of power supply 19, is connected.Ultrathin workpieces 22 is suspended in metal ring by wire 23; Draw electrolyte and inject metal ring with dropper, forming the electrolyte liquid film 21 of thin layer.
In nanometer Electrolyzed Processing test, control at first respectively the first X-axis 11, the first Y-axis 10, the first Z axis 9 and the second X-axis 1, the second Y-axis 2, the second Z axis 3 transfers to suitable position with nano-electrode and metal ring; Then regulate the first X-axis 11 and the first piezoelectric ceramics 8 and control the tool setting campaign of nano-electrode 12, the current signal that gathers in the tool setting process by oscillograph 18 simultaneously; Then utilize metal that the principle that Anodic dissolves occurs in electrolyte, by X, Y, the motion of Z three-axis numerical control of nano-electrode, the ultrathin workpieces in liquid film is carried out the nanometer Electrolyzed Processing, until stop after processing required part.
Claims (1)
1. the electrolytic machining device of a ultrathin workpieces is characterized in that:
This device mainly comprises the two three-dimensional fine motion consoles of cover, the three-dimensional fine motion console of first set is comprised of the first X-axis (11), the first Y-axis (10), the first Z axis (9) and the first piezoelectric ceramics (8) of being installed on the first Z axis (9), and second overlaps three-dimensional fine motion console is comprised of the second X-axis (1), the second Y-axis (2), the second Z axis (3) and the second piezoelectric ceramics (5) of being installed on the second Z axis (3); This device also comprises the first objective table (7) of being installed on the first piezoelectric ceramics (8), is installed on the second objective table (6) on the second piezoelectric ceramics (5), and vision-aided system;
Clamping nano-electrode (12) when above-mentioned the first objective table (7) is used for processing;
Above-mentioned the second objective table (6) is used for adding metal ring (14) is installed man-hour;
In the above-mentioned two three-dimensional fine motion consoles of cover, the displacement resolution of the first X-axis (11), the first Y-axis (10), the first Z axis (9) and the second X-axis (1), the second Y-axis (2), the second Z axis (3) is 100-200nm/step, and the displacement resolution of the first piezoelectric ceramics (8) and the second piezoelectric ceramics (5) is 5-20nm/step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202758679U CN203292633U (en) | 2013-05-20 | 2013-05-20 | Electrolytic machining device of ultrathin workpieces |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202758679U CN203292633U (en) | 2013-05-20 | 2013-05-20 | Electrolytic machining device of ultrathin workpieces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203292633U true CN203292633U (en) | 2013-11-20 |
Family
ID=49568672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013202758679U Withdrawn - After Issue CN203292633U (en) | 2013-05-20 | 2013-05-20 | Electrolytic machining device of ultrathin workpieces |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203292633U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103252543A (en) * | 2013-05-20 | 2013-08-21 | 南京航空航天大学 | Method and device for electrochemical machining of ultra-thin workpiece |
| CN113146389A (en) * | 2021-05-11 | 2021-07-23 | 燕山大学 | Automatic grinding device and method for end face of micro electrode |
-
2013
- 2013-05-20 CN CN2013202758679U patent/CN203292633U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103252543A (en) * | 2013-05-20 | 2013-08-21 | 南京航空航天大学 | Method and device for electrochemical machining of ultra-thin workpiece |
| CN113146389A (en) * | 2021-05-11 | 2021-07-23 | 燕山大学 | Automatic grinding device and method for end face of micro electrode |
| CN113146389B (en) * | 2021-05-11 | 2022-07-29 | 燕山大学 | Automatic grinding device and method for end faces of micro electrodes |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103252543B (en) | Method and device for electrochemical machining of ultra-thin workpiece | |
| CN100411793C (en) | Micro-scale line electrode electrolysis machining method and micro-vibration line electrode system | |
| CN101085483A (en) | Combinational processing method for micro-array axle hole | |
| CN101665238B (en) | Method and system of micro three-dimensional structure by micro-nano electric discharge machining | |
| CN103302368B (en) | Three-electrode high-frequency ultrashort pulse micro electrochemical machining power supply and electrochemical machining method thereof | |
| CN103056463B (en) | Manufacturing method for carbon nano tube tool electrode for micro electrochemical machining and multi-functional working tanks | |
| CN102226280A (en) | Automatic electro-spark deposition system | |
| CN103111696A (en) | Metal surface micro texture group electrode direct writing micro electrolysis processing method and dedicated device | |
| CN201848649U (en) | Double-turntable, five-shaft linkage and three-dimensional optical laser numerical control cutting machine | |
| CN102950344B (en) | Method for improving discharge of products of wire electrochemical micro-machining by nano magnetic particles | |
| Huang et al. | Electrochemical micromachining of complex shapes on nickel and nickel-based superalloys | |
| CN103521864A (en) | On-line preparation method of line electrode of minuteness group lines | |
| CN203292633U (en) | Electrolytic machining device of ultrathin workpieces | |
| CN101653847A (en) | Method and system for machining micro-nano hole by electron discharge | |
| CN105081486A (en) | Method and device for machining surface texture through wedge-shaped surface tool cathode suspension electrolysis | |
| CN208162800U (en) | Nanosecond pulse electrochemical micro process device | |
| CN103909300A (en) | Electrophoresis and supersonic vibration assisted micro-milling and machining device | |
| CN100418685C (en) | Electric spark forming processing machine tool for processing non-conductive hard material and its processing method | |
| CN105108250B (en) | The method that flexibility prepares fine group's line electrode online | |
| CN104907654A (en) | Electrolytic method for carrying out surface texturing by use of microporous plastic plate | |
| CN204843180U (en) | Wire -electrode cutting machine | |
| CN104625261A (en) | Electrochemical machining device and method | |
| Lin et al. | Electrochemical machining technology and its latest applications | |
| CN1817534A (en) | Cutting and machining method for non-conductive hard materials by electric spark wire | |
| CN205057226U (en) | Little hole machining of array crowd electrode is coaxial towards liquid device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent for invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Meng Lingchao Inventor after: Zeng Yongbin Inventor after: Qu Ningsong Inventor before: Meng Lingchao Inventor before: Zeng Yongbin Inventor before: Qu Ningsong Inventor before: Zhu Di |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: MENG LINGCHAO CENG YONGBIN QU NINGSONG ZHU DI TO: MENG LINGCHAO CENG YONGBIN QU NINGSONG |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20131120 Effective date of abandoning: 20150520 |
|
| RGAV | Abandon patent right to avoid regrant |