CN114777904B - Vibration measuring device and method based on filtering integrated optical chip - Google Patents
Vibration measuring device and method based on filtering integrated optical chip Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Abstract
The invention discloses a vibration measuring device and method based on a filtering integrated optical chip, and belongs to the technical field of photoelectric communication. The integrated optical chip comprises a first coupler, a filter, a beam splitter, a phase shifter, a beam combiner, a second coupler and a mixer. The wavelength of the laser is filtered through the filter, so that the spectrum width of the laser output by the laser is reduced, the screening of the specific wavelength of the input optical signal is realized, the common linewidth laser can be used for replacing the narrow linewidth laser, the narrow linewidth is compressed, and finally the technical effect of obviously reducing the cost of the vibration measuring system is achieved; through integrating the optical chip, couple multiple components and parts to the chip inside directly, reduced the volume of vibration measurement system, further reduced the cost of vibration measurement system simultaneously.
Description
Technical Field
The invention relates to the technical field of photoelectric communication, in particular to a vibration measuring device and method based on a filtering integrated optical chip.
Background
Along with the continuous development and iteration of industry and technology, vibration measurement is more important in the present scientific research and industrial production, wherein vibration measurement can be divided into two main types of contact type and non-contact type detection, compared with contact type detection, non-contact type detection has higher flexibility, is more convenient to operate, does not influence the original vibration state, and has more accurate measurement results, so that the vibration measurement sensor is an important direction for future development. At present, a mature non-contact vibration measurement technology mostly adopts a laser coherent Doppler measurement technology, and the vibration measurement technology can be divided into a heterodyne structure and a homodyne structure according to whether a stable frequency difference exists. Compared with a heterodyne vibration measurement system, the homodyne vibration measurement system has the advantages of relatively low cost, simple control circuit, and large-scale application potential, and can be integrated on a photon chip by utilizing a silicon optical technology.
The essence of the zero-difference laser vibration measurement is laser coherent detection, and according to correlation researches, the signal to noise ratio of a coherent measurement system is closely related to the line width of a laser, and the line width of the laser directly influences the coherence of the laser; the narrower the line width, the better the coherence; therefore, in order to ensure the high signal-to-noise ratio and the accuracy of vibration measurement of the system, the homodyne laser vibration measurement system adopts a narrow linewidth and high-coherence laser.
However, such lasers are very expensive, not only greatly increasing the cost of the whole system, but also limiting the application scenarios to be solved. When the existing laser Doppler vibration detection equipment measures a long distance or achieves high-precision measurement, a practical narrow linewidth laser is often required, the coherent distance of a system is improved, and phase noise is reduced. The cost of the narrow linewidth laser is relatively high compared with that of the common linewidth laser, so that the cost of the whole system is greatly increased, and the application scene of the laser is limited.
In order to solve the problem that a laser required by the current laser Doppler vibration measurement equipment needs to be a high-cost narrow linewidth laser, the invention provides a low-cost vibration measurement system and a vibration measurement method based on a common linewidth laser, and provides a vibration measurement device based on a filtering integrated optical chip, which comprises a laser, an integrated optical chip, a data processing module and a transmitting lens, wherein the integrated optical chip comprises a first coupler, a filter, a beam splitter, a phase shifter, a beam combiner, a second coupler and a mixer; simultaneously, a vibration measuring method based on a filtering integrated optical chip is provided; the wavelength of the laser is filtered through the filter, so that the spectrum width of the laser output by the laser is reduced, the screening of the specific wavelength of the input optical signal is realized, the common linewidth laser can be used for replacing the narrow linewidth laser, the narrow linewidth is compressed, and finally the technical effect of obviously reducing the cost of the vibration measuring system is achieved; through integrating the optical chip, couple multiple components and parts to the chip inside directly, reduced the volume of vibration measurement system, further reduced the cost of vibration measurement system simultaneously.
Disclosure of Invention
Aiming at the problems, a vibration measuring device based on a filtering integrated optical chip is provided, and comprises a laser, an integrated optical chip, a data processing module and a transmitting lens; the integrated optical chip comprises a first coupler, a filter, a beam splitter, a phase shifter, a beam combiner, a second coupler and a mixer. The wavelength of the laser is filtered through the filter, so that the spectrum width of the laser output by the laser is reduced, the screening of the specific wavelength of the input optical signal is realized, the common linewidth laser can be used for replacing the narrow linewidth laser, the narrow linewidth is compressed, and finally the technical effect of obviously reducing the cost of the vibration measuring system is achieved; through integrating the optical chip, couple multiple components and parts to the chip inside directly, reduced the volume of vibration measurement system, further reduced the cost of vibration measurement system simultaneously.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows.
The vibration measuring device based on the filtering integrated optical chip comprises a laser, an integrated optical chip, a data processing module and a transmitting lens, wherein the integrated optical chip comprises a first coupler, a filter, a beam splitter, a phase shifter, a beam combiner, a second coupler and a mixer; the wavelength of the laser is filtered through a filter, the spectrum width of the laser output by the laser is reduced, and the screening of the specific wavelength of the input optical signal is realized, so that the common linewidth laser replaces the narrow linewidth laser; the laser output by the laser sequentially enters the integrated optical chip and the emission lens and is focused on the surface of the vibration object, and the vibration signal beam reflected by the surface of the vibration object is received and processed by the integrated optical chip and then demodulated by the data processing module to obtain a vibration signal; the data processing module acquires the vibration displacement of the object through the following steps;
s1: assuming that the vibrating object surface distance detection system is d and the vibrating object displacement signal is s (t), the phase change amount caused by the vibrating object surface distance detection system is:
wherein lambda is 0 Is the center wavelength of the beam after passing through the micro-ring modulator.
The optical power output by the four ports in the mixer can be expressed as:
wherein,is a phase modulation signal of the phase modulator, and the modulation frequency is far greater than the vibration frequency.
S3: subtracting two signals of four ports in the mixer to obtain IQ two paths of signals respectively, dividing the subtracted IQ two paths of signals, performing arctangent operation, and demodulating phase information:
separated by filtering and wavelet decomposition meansAnd restoring the vibration displacement of the object to S (t) through the conversion formula in the step S1.
Preferably, the laser output by the laser is coupled into the chip through a first coupler, filtered by a filter, split by a beam splitter to form signal light and reference light, and the reference light is directly input into the mixer; the signal light is sequentially transmitted through the phase shifter, the beam combiner and the coupler II, light in the chip is coupled out of the chip through the coupler II, the light is focused on the surface of the vibrating object through the transmitting lens, the vibration signal light beam reflected by the surface of the vibrating object is coupled into the chip through the coupler II, the vibration signal light beam is input into the frequency mixer through the beam combiner, is mixed with the reference light and is output to the data processing module, and the data processing module demodulates the vibration signal to obtain the vibration signal.
Preferably, the filter adopts a micro-ring modulator or a Mach-Zehnder interferometer structure.
Preferably, the first coupler and the second coupler adopt a spot-size converter; the beam splitter and the beam combiner adopt a Y waveguide structure or a multimode interferometer structure.
Preferably, the mixer is a 90 degree optical mixer.
Preferably, the laser is connected with the first coupler through optical fiber or free space coupling; and all components of the laser, the integrated optical chip, the data processing module and the emission lens are connected through waveguides.
Preferably, the micro-ring modulator is a passive modulator, preferably an Add Drop (Add Drop) structure.
Preferably, the phase shifter is a silicon-based phase shifter based on electrical modulation.
Preferably, the Mach-Zehnder interferometer structure is formed by two multimode interferometers and a phase shifter.
By adopting the technical scheme, the invention has the following beneficial effects.
1. The invention filters the wavelength of the laser through the filter to reduce the spectrum width of the laser output by the laser, thereby realizing the screening of the specific wavelength of the input optical signal, and further using the common linewidth laser to replace the narrow linewidth laser, achieving the technical effect of compressing the narrow linewidth and finally obviously reducing the cost of the vibration measuring system.
2. According to the invention, various components are directly coupled into the chip through the integrated optical chip, so that the volume of the vibration measuring system is reduced, and the cost of the vibration measuring system is further reduced.
Drawings
The making and using of the preferred embodiments of the present invention are discussed in detail below. It should be appreciated that the present invention provides many applicable inventive concepts that can be embodied in a wide variety of specific contexts. The specific embodiments discussed are provided to illustrate the manner of making and using the invention and are not intended to limit the scope of the invention, as other figures can be made from these figures by one of ordinary skill in the art without undue burden.
Fig. 1 is a schematic diagram of the structure of the device.
Fig. 2 is a schematic diagram of the structure of an integrated optical chip.
Fig. 3 is a schematic diagram of the structure of a micro-ring modulator.
Fig. 4 is a schematic diagram of a series micro-ring modulator.
Fig. 5 is a schematic diagram of a mach-zehnder interferometer structure.
In the drawings, a 1-laser, a 2-integrated optical chip, a 3-emission lens, a 4-data processing module, a 21-coupler I, a 22-micro-ring modulator, a 23-beam splitter, a 24-phase shifter, a 25-beam combiner, a 26-coupler II, a 27-mixer and a 28-Mach-Zehnder interferometer structure are arranged.
Detailed Description
The making and using of the preferred embodiments of the present invention are discussed in detail below. It should be appreciated that the present invention provides many applicable inventive concepts that can be embodied in a wide variety of specific contexts. The specific embodiments discussed are merely illustrative of specific ways to make and use the invention, and do not limit the scope of the invention.
The relation between the spectral width (i.e. wavelength range) of the laser output optical signal and the corresponding frequency width is:
wherein Deltalambda is the spectral width of the laser output beam, deltaf is the corresponding frequency width, i.eLine width f 0 The center frequency, c, is the speed of light in vacuum.
The wavelength of the laser is filtered through the on-chip filter, and the delta lambda value is reduced, so that the screening of the specific wavelength of the input optical signal is realized, and the common linewidth laser replaces the narrow linewidth laser.
Example 1:
the vibration measuring device based on the filtering integrated optical chip as shown in fig. 1 comprises a laser 1, an integrated optical chip 2, a data processing module 4 and an emission lens 3; as shown in fig. 2, the integrated optical chip includes a first coupler 21, a micro-ring modulator 22, a beam splitter 23, a phase shifter 24, a beam combiner 25, a second coupler 26, and a mixer 27; the wavelength of the laser 1 is filtered through the micro-ring modulator 22, the spectrum width of the laser 1 output laser is reduced, and the screening of the specific wavelength of the input optical signal is realized, so that the common linewidth laser 1 replaces the narrow linewidth laser 1; the laser output by the laser 1 sequentially enters the integrated optical chip 2 and the emission lens 3 and is focused on the surface of a vibration object, and vibration signal beams reflected by the surface of the vibration object are received and processed by the integrated optical chip 2 and then demodulated by the data processing module 4 to obtain vibration signals.
The laser output by the laser 1 is coupled into a chip through a first coupler 21, filtered by a micro-ring modulator 22, split by a beam splitter 23 to form signal light and reference light, and the reference light is directly input into a mixer 27; after the signal light sequentially passes through the phase shifter 24, the beam combiner 25 and the coupler II 26, the light in the chip is coupled out of the chip through the coupler II 26, and is focused on the surface of the vibrating object through the transmitting lens 3, the vibration signal light beam reflected by the surface of the vibrating object is coupled into the chip through the coupler II 26, and is input into the mixer 27 through the beam combiner 25, mixed with the reference light and output to the data processing module 4, and the data processing module 4 demodulates the vibration signal to obtain a vibration signal.
The first coupler 21 and the second coupler 26 adopt a spot-size converter; the beam splitter 23 and the beam combiner 25 adopt a Y waveguide structure or a multimode interferometer structure; the mixer 27 adopts a 90-degree optical mixer 27; the laser 1 is connected with the first coupler 21 and is connected through optical fiber connection or free space coupling; all other parts of the vibration measuring system are connected by adopting waveguides; as shown in fig. 3, the micro-ring modulator 22 is a passive modulator, and adopts an Add Drop (Add Drop) structure.
In addition, the micro-ring modulator 22 in some embodiments employs a series configuration as shown in FIG. 4.
The resonant conditions of the micro-ring modulator 22 are: 2 pi Rn eff Mλ, where m=1, 2,3 … …;
wherein the radius of the micro-ring resonant cavity is R, and the equivalent refractive index is n eff Lambda is the input wavelength of the laser, the input end is connected with the coupler 1 through a waveguide, and the download end (Drop) of the micro-ring is connected with the beam splitter through a waveguide.
The resonant frequency of the micro-ring modulator 22 can be obtained from the above:
wherein m=1, 2,3 … …;
only after meeting the center frequency, the micro-ring resonant cavity can realize resonance, so that light with the corresponding center frequency is output at the downloading end, and light which does not meet the resonance condition is output through the through end, and finally, the micro-ring modulator 22 filters the output laser wavelength of the laser 1, so that the screening of the specific wavelength of an input optical signal is achieved, and the limitation of the application scene of the narrow linewidth laser 1 is overcome.
Example 2:
the vibration measuring device based on the filtering integrated optical chip as shown in fig. 1 comprises a laser 1, an integrated optical chip 2, a data processing module 4 and an emission lens 3; as shown in fig. 2, the integrated optical chip 2 includes a first coupler 21, a mach-zehnder interferometer structure 28, a beam splitter 23, a phase shifter 24, a beam combiner 25, a second coupler 26, and a mixer 27; the wavelength of the laser 1 is filtered through the Mach-Zehnder interferometer structure 28, the spectrum width of the laser 1 output laser is reduced, and the screening of the specific wavelength of the input optical signal is realized, so that the common linewidth laser 1 is realized to replace the narrow linewidth laser 1; the laser output by the laser 1 sequentially enters the integrated optical chip 2 and the emission lens 3 and is focused on the surface of a vibration object, and vibration signal beams reflected by the surface of the vibration object are received and processed by the integrated optical chip 4 and then demodulated by the data processing module 4 to obtain vibration signals.
The laser output by the laser 1 is coupled into a chip through a first coupler 21, filtered by a Mach-Zehnder interferometer structure 28, and split by a beam splitter 23 to form signal light and reference light, wherein the reference light is directly input into a mixer 27; after the signal light sequentially passes through the phase shifter 24, the beam combiner 25 and the coupler II 26, the light in the chip is coupled out of the chip through the coupler II 26, and is focused on the surface of the vibrating object through the transmitting lens 3, the vibration signal light beam reflected by the surface of the vibrating object is coupled into the chip through the coupler II 26, and is input into the mixer 27 through the beam combiner 25, mixed with the reference light and output to the data processing module 4, and the data processing module 4 demodulates the vibration signal to obtain a vibration signal.
The first coupler 21 and the second coupler 26 adopt a spot-size converter; the beam splitter 23 and the beam combiner 25 adopt a Y waveguide structure or a multimode interferometer structure; the mixer 27 adopts a 90-degree optical mixer 27; the laser 1 is connected with the first coupler 21 and is connected through optical fiber connection or free space coupling; all other parts of the vibration measuring system are connected by adopting waveguides; the phase shifter 24 is a silicon-based phase shifter based on electrical modulation.
The mach-zehnder interferometer structure 28 is shown in fig. 5, and is composed of two multimode interferometers and a phase shifter, wherein the two mach-zehnder interferometer structures are connected through a waveguide; only one phase shift needs to be added to the structure of the mach-zehnder interferometer, i.e., only one electrode structure needs to be added to one arm in fig. 5.
The optical signal is used as an electromagnetic wave, the transmission of the electromagnetic wave meets Maxwell's equation, and the transverse Helmholtz equation can be obtained by solving the Maxwell's equation:
where β is the propagation constant, a series of characteristic solutions ψ can be derived with the waveguide structure determined m (x) And beta m The method comprises the steps of carrying out a first treatment on the surface of the At the same time, the method comprises the steps of,wherein the equivalent refractive index of the grating is n eff According to the Bragg condition, only the center wavelength of the signal light is required to be output through the grating, so that the filtering of the output laser wavelength of the laser 1 is realized, the screening of the specific wavelength of the input optical signal is realized, and the limitation of the application scene of the narrow linewidth laser 1 is overcome.
Example 3:
a vibration measuring method based on a filtering integrated optical chip is characterized by comprising the following steps:
s1: assuming that the vibrating object surface distance detection system is d and the vibrating object displacement signal is s (t), the phase change amount caused by the vibrating object surface distance detection system is:
wherein lambda is 0 Is the center wavelength of the beam after passing through the micro-ring modulator 22.
The optical power output from the four ports of the mixer 27 can be expressed as:
wherein,is a phase modulation signal of the phase modulator, and the modulation frequency is far greater than the vibration frequency.
S3: subtracting two signals of four ports in the mixer to obtain IQ two paths of signals respectively, dividing the subtracted IQ two paths of signals, performing arctangent operation, and demodulating phase information:
separated by filtering and wavelet decomposition meansAnd restoring the vibration displacement of the object to S (t) through the conversion formula in the step S1.
By using the vibration measuring method based on the vibration measuring device based on the filtering integrated optical chip, vibration signals of the surface of the object to be measured can be obtained simply through the laser 1, the integrated optical chip 2, the transmitting lens 3 and the data processing module 4.
Although the specification has been described in detail, it should be understood that various changes, substitutions and alterations can be made hereto without departing from the spirit and scope of the invention as defined by the appended claims. Furthermore, the particular embodiments described are not intended to limit the scope of the invention, as one of ordinary skill in the art will readily appreciate from the disclosure that processes, machines, manufacture, compositions of matter, means, methods, or steps, presently existing or later to be developed, may perform substantially the same function or achieve substantially the same result as the embodiments of the present invention. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps.
Claims (8)
1. Vibration measuring device based on filtering integrated optical chip, its characterized in that: the integrated optical chip comprises a first coupler, a filter, a beam splitter, a phase shifter, a beam combiner, a second coupler and a mixer; the wavelength of the laser is filtered through a filter, the spectrum width of the laser output by the laser is reduced, and the screening of the specific wavelength of the input optical signal is realized, so that the common linewidth laser replaces the narrow linewidth laser; the laser output by the laser sequentially enters the integrated optical chip and the emission lens and is focused on the surface of the vibration object, and the vibration signal beam reflected by the surface of the vibration object is received and processed by the integrated optical chip and then demodulated by the data processing module to obtain a vibration signal; the data processing module acquires the vibration displacement of the object through the following steps;
s1: assuming that the vibrating object surface distance detection system is d and the vibrating object displacement signal is s (t), the phase change amount caused by the vibrating object surface distance detection system is:
wherein lambda is 0 The center wavelength of the light beam after passing through the micro-ring modulator;
the optical power output by the four ports in the mixer can be expressed as:
wherein,the phase modulation signal is a phase modulation signal of the phase modulator, and the modulation frequency is far greater than the vibration frequency;
s3: subtracting two signals of four ports in the mixer to obtain IQ two paths of signals respectively, dividing the subtracted IQ two paths of signals, performing arctangent operation, and demodulating phase information:
separated by filtering and wavelet decomposition meansAnd then the conversion formula in the step S1 is used for restoringThe vibration displacement of the object is s (t); the laser output by the laser is coupled into a chip through a first coupler, filtered by a filter, split by a beam splitter to form signal light and reference light, and the reference light is directly input into a mixer; the signal light is sequentially transmitted through the phase shifter, the beam combiner and the coupler II, light in the chip is coupled out of the chip through the coupler II, the light is focused on the surface of the vibrating object through the transmitting lens, the vibration signal light beam reflected by the surface of the vibrating object is coupled into the chip through the coupler II, the vibration signal light beam is input into the frequency mixer through the beam combiner, is mixed with the reference light and is output to the data processing module, and the data processing module demodulates the vibration signal to obtain the vibration signal.
2. The vibration measuring device based on the filtering integrated optical chip as claimed in claim 1, wherein: the filter adopts a micro-ring modulator or a Mach-Zehnder interferometer structure.
3. The vibration measuring device based on the filtering integrated optical chip as claimed in claim 1, wherein: the first coupler and the second coupler adopt a spot-size converter; the beam splitter and the beam combiner adopt a Y waveguide structure or a multimode interferometer structure.
4. The vibration measuring device based on the filtering integrated optical chip as claimed in claim 1, wherein: the mixer employs a 90 degree optical mixer.
5. The vibration measuring device based on the filtering integrated optical chip as claimed in claim 1, wherein: the laser is coupled and connected with the coupler I through optical fibers or free space; and all components of the laser, the integrated optical chip, the data processing module and the emission lens are connected through waveguides.
6. The vibration measuring device based on the filtering integrated optical chip as claimed in claim 2, wherein: the micro-ring modulator is a passive modulator and adopts an up-down voice channel (Add Drop) structure.
7. The vibration measuring device based on the filtering integrated optical chip as claimed in claim 1, wherein: the phase shifter is a silicon-based phase shifter based on electrical modulation.
8. The vibration measuring device based on the filtering integrated optical chip as claimed in claim 2, wherein: the Mach-Zehnder interferometer structure is composed of two multimode interferometers and a phase shifter.
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