CN111735610B - Method and device for measuring refractive index of optical waveguide group - Google Patents

Method and device for measuring refractive index of optical waveguide group Download PDF

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CN111735610B
CN111735610B CN202010533296.9A CN202010533296A CN111735610B CN 111735610 B CN111735610 B CN 111735610B CN 202010533296 A CN202010533296 A CN 202010533296A CN 111735610 B CN111735610 B CN 111735610B
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optical waveguide
refractive index
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CN111735610A (en
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顾晓文
王琛全
钱广
牛斌
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CETC 55 Research Institute
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Abstract

The invention discloses a method and a device for measuring the refractive index of an optical waveguide group, wherein the method comprises the following steps: outputting the optical carrier to an optical single-side band modulator, and loading a radio-frequency signal output by a first port of the vector network analyzer to the modulator to modulate the optical carrier; the modulated optical signal is coupled into the first optical waveguide, coupled and output into the photoelectric detector through the optical waveguide chip, the detected signal is input into a second port of the vector network analyzer, and the loop is utilized to carry out straight-through calibration of the vector network analyzer; coupling the modulated optical signal to a second optical waveguide with different length, coupling and outputting the optical signal to a photoelectric detector through an optical waveguide chip after the optical waveguide is transmitted, inputting the detected signal to a second port of a vector network analyzer, and testing from the vector network analyzer to obtain a response S at the moment21(ii) a The group refractive index of the optical waveguide is calculated. The invention can simultaneously satisfy the group refractive index measurement of the end face coupling waveguide and the vertical grating coupling waveguide, and has simple and accurate calculation.

Description

Method and device for measuring refractive index of optical waveguide group
Technical Field
The invention belongs to the technical field of integrated photonic device measurement, and particularly relates to a method and a device for measuring the refractive index of an optical waveguide group.
Background
In an integrated photonic device, an optical waveguide is the most basic structure for constructing a photonic integrated device and a chip, and is a basic construction unit for further constructing other passive, active photonic and optoelectronic devices, such as an optical delay line, a beam splitter/combiner, an arrayed waveguide grating, a mach-zehnder interferometer, a micro-ring resonator, a modulator, an optical switch, and the like. The basic function of the optical waveguide is to realize low-loss and low-distortion transmission of light waves, and the refractive index of the waveguide is one of the most important indexes, which determines the key geometric dimension of the integrated photonic device.
The effective and group refractive indices are of major concern in optical waveguide devices. The effective refractive index, also called the effective refractive index of the waveguide mode, mainly determines the mode of light wave transmission in the optical waveguide and the required geometrical structure. The group refractive index is defined as the ratio of the optical speed in vacuum to the group speed in the medium, so that the group speed of the optical wave in the optical waveguide is represented, and the group speed corresponds to the group delay and is one of the most important parameters for designing and preparing the optical delay line.
The traditional group refractive index measuring method mainly comprises an optical pulse delay measuring method, a Mach-Zehnder interference spectral response measuring method and a micro-ring resonance spectrum measuring method, and the three methods have respective advantages and disadvantages. The optical pulse method needs a pulse light source and a delay measuring instrument, the precision of the optical pulse method is limited by the length of a light waveguide, the central wavelength of an optical pulse and the repetition frequency, and the precision is limited; the Mach-Zehnder interference method needs to prepare a Mach-Zehnder interference structure and has extremely high requirements on the measurement precision of spectral response; the micro-ring resonance method requires the preparation of an all-pass type micro-ring resonator, and also requires high-precision spectral measurement.
Disclosure of Invention
The invention aims to provide a method and a device for measuring the refractive index of an optical waveguide group, which solve the problems of low precision and poor universality of the traditional method for measuring the refractive index of the optical waveguide group.
The technical solution for realizing the purpose of the invention is as follows: a method for measuring the refractive index of an optical waveguide group comprises the following steps:
1) the continuous wave laser outputs an optical carrier signal to the optical single-side band modulator, and a radio frequency signal output by a first port of the vector network analyzer is loaded to the optical single-side band modulator to modulate an optical wave;
2) the modulated optical signal is coupled into a first optical waveguide, the optical waveguide is coupled and output into a photoelectric detector through an optical waveguide chip after being transmitted, the detected signal is input into a second port of the vector network analyzer, and the loop is utilized to carry out straight-through calibration of the vector network analyzer;
3) testing a second optical waveguide after calibration, wherein the length of the second optical waveguide is different from that of the first optical waveguide; modulating the modulated optical signalCoupling the optical waveguide into a second optical waveguide, coupling and outputting the optical waveguide into a photoelectric detector through an optical waveguide chip after the optical waveguide is transmitted, inputting a detected signal into a second port of the vector network analyzer, and testing the vector network analyzer to obtain a response S at the moment 21Including an amplitude response and a phase response;
4) calculating the slope of the phase response curve, namely, the phase shift of unit frequency is recorded as alpha, and the relational formula of the refractive index of the optical waveguide group and the phase shift is utilized
Figure BDA0002536185770000021
And calculating the group refractive index of the optical waveguide, wherein L is the length difference of the two optical waveguides, and c is the speed of light in vacuum.
The invention also provides a device for measuring the refractive index of the optical waveguide group, which comprises a continuous wave laser, an optical single-side band modulator, an optical waveguide chip, a photoelectric detector and a vector network analyzer, wherein the optical waveguide chip comprises two optical waveguides with different lengths;
after being modulated by the optical single-side band modulator, an optical signal is coupled with the coupling input port through the coupling input optical fiber, is transmitted through the optical waveguide and then is output to the coupling output optical fiber through the coupling output port, and is connected into the photoelectric detector to carry out photoelectric conversion, and the detected signal is input into two ports of the vector network analyzer to obtain the response of the optical waveguide.
Compared with the prior art, the invention has the following beneficial effects: (1) calibration and measurement of the response S of a second optical waveguide by means of optical waveguide feed-through21And calculating the group refractive index of the optical waveguide by its phase response, due to S 21The measuring method is simple, the phase response curve is a straight line in the sweep frequency range of the vector network analyzer, the accuracy of the obtained slope value is extremely high, and therefore the refractive index measuring precision of the optical waveguide group obtained through calculation is high; (2) the invention is suitable for first-order dispersion optical waveguides, and common optical waveguides including silicon-on-insulator waveguides, silicon nitride optical waveguides, lithium niobate optical waveguides and the like are suitable for first-order dispersion models; (3) the invention can simultaneously satisfy the group refractive index measurement of the end face coupling waveguide and the vertical grating coupling waveguide, and has simple and convenient calculationAnd is accurate.
Drawings
FIG. 1 is a schematic view of an apparatus for measuring refractive index of an optical waveguide group.
In the figure: 1 is a continuous wave laser, 2 is an optical fiber, 3 is an optical single-sideband modulator, 4 is an optical waveguide chip, 5 is a coupling-in optical fiber, 6 is a coupling-out optical fiber, 7 is a coupling-in port, 8 is a coupling-out port, 9 is a first optical waveguide, 10 is a second optical waveguide, 11 is a photodetector, 12 is a vector network analyzer, 13 is a high-frequency cable of a first port of the vector network analyzer, 14 is a high-frequency cable of a second port of the vector network analyzer, 15 is a first port of the vector network analyzer, and 16 is a second port of the vector network analyzer.
Detailed Description
A method for measuring the refractive index of an optical waveguide group comprises the following steps:
1) outputting a light carrier signal to the light single-side band modulator by the continuous wave laser, and loading a radio frequency signal output by a first port of the vector network analyzer to the light single-side band modulator to modulate a light wave;
2) the modulated optical signal is coupled into a first optical waveguide, after the optical waveguide is transmitted, the modulated optical signal is coupled and output into a photoelectric detector through an optical waveguide chip, the detected signal is input into a second port of the vector network analyzer, and the loop is utilized to carry out straight-through calibration of the vector network analyzer;
3) the second optical waveguide is tested after calibration, namely, the modulated optical signal is coupled into the second optical waveguide with different lengths, the modulated optical signal is coupled and output into the photoelectric detector through the optical waveguide chip after the optical waveguide is transmitted, the detected signal is input into a second port of the vector network analyzer, and the response S at the moment is tested and obtained from the vector network analyzer21Including an amplitude response and a phase response;
4) calculating the slope of the phase response curve, namely, the phase shift of unit frequency is recorded as alpha, and the relational formula of the refractive index of the optical waveguide group and the phase shift is utilized
Figure BDA0002536185770000031
Calculating the group folding of the optical waveguide And the refractive index, wherein L is the length difference of the two optical waveguides, and c is the speed of light in vacuum.
In the step 2) or 3), the modulated optical signal is coupled with the coupling input port 7 of the optical waveguide chip through the coupling input optical fiber 5, and the optical wave is transmitted through the optical waveguide, is output to the coupling output optical fiber 6 through the coupling output port 8 of the optical waveguide chip, and is then input to the photoelectric detector 11 for photoelectric conversion.
The optical waveguide chip is connected with the coupling optical fiber in a horizontal end face coupling or vertical grating coupling mode.
In the step 4), the derivation process of the method for measuring the refractive index of the optical waveguide group is as follows:
group refractive index n of optical waveguide in first order dispersion modelgCan be expressed as:
Figure BDA0002536185770000032
in the formula neffIs the effective refractive index, λ is the wavelength of light, λ0The refractive index is related to the wavelength of light for the wavelength corresponding to the desired group refractive index.
Light waves propagating in the waveguide, their phases
Figure BDA0002536185770000034
Can be expressed as:
Figure BDA0002536185770000033
in the method, after through calibration, L in the above formula is the length difference L of the two optical waveguides L ═ L2-L1。
The phase derivation for the above equation can be found:
Figure BDA0002536185770000041
in addition, the following steps:
Figure BDA0002536185770000042
then:
Figure BDA0002536185770000043
further simplification can be achieved:
Figure BDA0002536185770000044
where c is the speed of light in vacuum.
And the slope of the phase response curve is marked as alpha, then
Figure BDA0002536185770000045
Thus, the group index can be expressed as:
Figure BDA0002536185770000046
For ease of calculation, α in the formula is in rad/Hz.
As shown in fig. 1, the present invention further provides a measuring apparatus used in the method for measuring the refractive index of the optical waveguide group, which includes a continuous wave laser 1, an optical single-sideband modulator 3, an optical waveguide chip 4, a photodetector 11 and a vector network analyzer 12; the optical waveguide chip 4 comprises two optical waveguides with the lengths of 1000 microns and 2000 microns respectively, namely a first optical waveguide 9 and a second optical waveguide 10;
after being modulated by an optical single-sideband modulator, optical signals are coupled by a coupling input optical fiber 5 and a coupling input port 7, the optical signals are transmitted by an optical waveguide and then output to a coupling output optical fiber 6 by a coupling output port 8, and then enter an photoelectric detector 11 for photoelectric conversion, and the detected signals are input to two ports 16 of a vector network analyzer to obtain the response of the optical waveguide.
The optical waveguides 9 and 10 are connected with the coupling input optical fiber 5 and the coupling output optical fiber 6 at the coupling input port 7 and the coupling output port 8 in a horizontal end face or vertical grating coupling mode.
The working mode of the measuring device is as follows: the continuous wave laser 1 outputs an optical carrier signal to the optical single-sideband modulator 3, and a radio-frequency signal output by a first port 15 of the vector network analyzer is loaded to the optical single-sideband modulator 3 to modulate optical waves; the modulated optical signal is coupled into a first optical waveguide 9, after the optical waveguide is transmitted, the modulated optical signal is coupled and output into a photoelectric detector 11 through an optical waveguide chip 4, the detected signal is input into a second port 16 of the vector network analyzer, and the loop is utilized to carry out straight-through calibration of the vector network analyzer; testing the second optical waveguide 10 after calibration, coupling the modulated optical signal into the second optical waveguide 10, coupling and outputting the optical signal into the photoelectric detector 11 through the optical waveguide chip 4 after optical waveguide transmission, inputting the detected signal into a second port 16 of the vector network analyzer, and testing from the vector network analyzer to obtain a response S at the moment 21Including an amplitude response and a phase response.
The optical vector network analyzer based optical waveguide group refractive index measuring method provided by the invention has high measuring precision and is suitable for measuring various optical waveguide devices.
The technical solution of the present invention is further explained with reference to the drawings and the embodiments.
Example 1
A method for measuring the refractive index of an optical waveguide group used for a horizontal end face coupling optical waveguide is disclosed, as shown in figure 1, a measuring device of the method comprises a continuous wave laser 1, an optical single-sideband modulator 3, an optical waveguide chip 4, a photoelectric detector 11 and a vector network analyzer 12; after being modulated by the optical single-sideband modulator, optical signals are coupled by the coupling input optical fiber 5 and the coupling input port 7, the optical signals are output to the coupling output optical fiber 6 by the coupling output port 8 after being transmitted by the optical waveguide, and are subjected to photoelectric conversion by the photoelectric detector 11, and the detected signals are input to the two ports 16 of the vector network analyzer to obtain the response of the optical waveguide.
The optical waveguide chip 4 comprises two optical waveguides with the lengths of 1000 micrometers and 2000 micrometers respectively.
The optical waveguides 9, 10 are connected with the coupling optical fibers 5, 6 at the coupling input port 7 and the coupling output port 8 in a horizontal end face coupling mode.
The measuring method comprises the following steps:
1) outputting a light carrier signal to a light single-side band modulator by the continuous wave laser, and loading a radio frequency signal output by a first port of the vector network analyzer to the modulator to modulate a light wave;
2) the modulated optical signal is coupled to a first optical waveguide with the length of 1000 microns through an optical fiber end face, the relative position of the optical fiber and the waveguide end face is adjusted to obtain maximum-efficiency optical coupling, after the optical waveguide is transmitted, the waveguide output end is coupled with the optical fiber and input into a photoelectric detector for photoelectric conversion, the detected signal is input into a second port of a vector network analyzer, and the loop is utilized to carry out straight-through calibration of the vector network analyzer;
3) testing a second optical waveguide with the length of 2000 microns after calibration, namely coupling the modulated optical signal into the second optical waveguide, and testing from a vector network analyzer to obtain the S at the moment21Including an amplitude response and a phase response;
4) calculating the slope of the phase response curve, namely, the phase shift amount of unit frequency is recorded as alpha, and the relational formula of the refractive index of the optical waveguide group and the phase shift amount is utilized
Figure BDA0002536185770000061
The group refractive index of the optical waveguide is calculated.
Wherein, L is 2000-.
The principle of the calculation formula of the method for measuring the refractive index of the optical waveguide group in the embodiment is described in detail as follows:
group refractive index n of optical waveguide in first order dispersion modelgCan be expressed as:
Figure BDA0002536185770000062
in the formula neffIs provided withEffective refractive index, λ being the wavelength of the light, λ0The refractive index is related to the wavelength of light for the wavelength corresponding to the desired group refractive index.
Light waves propagating in the waveguide, their phases
Figure BDA0002536185770000066
Can be expressed as:
Figure BDA0002536185770000063
in the method, after through calibration, L in the above formula is the length difference L of the two optical waveguides L ═ L2-L1。
The derivation of the phase of the above equation can be found:
Figure BDA0002536185770000064
in addition, the following steps:
Figure BDA0002536185770000065
then:
Figure BDA0002536185770000071
further simplification can be achieved:
Figure BDA0002536185770000072
where c is the speed of light in vacuum.
And the slope of the phase response curve is marked as alpha, then
Figure BDA0002536185770000073
Thus, the group index can be expressed as:
Figure BDA0002536185770000074
for ease of calculation, α in the formula is in rad/Hz.
Example 2
A measuring method of refractive index of optical waveguide group for grating vertical coupling optical waveguide is disclosed, as shown in FIG. 1, the measuring device comprises a continuous wave laser 1, an optical single-sideband modulator 3, an optical waveguide chip 4, a photoelectric detector 11 and a vector network analyzer 12;
the continuous wave laser 1 is connected with an optical single-side band modulator 3 through an optical fiber 2, the optical single-side band modulator 3 is connected with a coupling input optical fiber 5, an output optical fiber 6 is connected with a photoelectric detector 11, and the photoelectric detector 11 is connected with a second port 16 of the vector network analyzer through a high-frequency cable 14 of the second port of the vector network analyzer. The port one 15 of the vector network analyzer is connected with the optical single sideband modulator 3 through the high frequency cable 13 of the port one of the vector network analyzer.
After being modulated by the optical single-sideband modulator, optical signals are coupled by the first coupling optical fiber 5 and the coupling input port 7, the optical signals are transmitted by the optical waveguide and then output to the second coupling optical fiber 6 by the coupling output port 8, and then enter the photoelectric detector 11 for photoelectric conversion, and the detected signals are input to the two ports 16 of the vector network analyzer to obtain the response of the optical waveguide.
The optical waveguide chip 4 comprises two optical waveguides with the lengths of 1000 micrometers and 2000 micrometers respectively.
The optical waveguides 9, 10 are connected to the coupling fibers 5, 6 at the coupling input port 7 and the coupling output port 8 by means of grating vertical coupling.
The measuring method comprises the following steps:
1) outputting a light carrier signal to a light single-side band modulator by the continuous wave laser, and loading a radio frequency signal output by a first port of the vector network analyzer to the modulator to modulate a light wave;
2) the modulated optical signal is vertically coupled into a first optical waveguide with the length of 1000 microns through a grating, the relative position of the optical fiber and the grating is adjusted to obtain maximum-efficiency optical coupling, after the optical waveguide is transmitted, the grating at the output end of the waveguide is coupled with the optical fiber and is input into a photoelectric detector for photoelectric conversion, the detected signal is input into a second port of a vector network analyzer, and the loop is utilized for straight-through calibration of the vector network analyzer;
3) Testing a second optical waveguide with the length of 2000 microns after calibration, namely coupling the modulated optical signal into the second optical waveguide, and testing from a vector network analyzer to obtain the S at the moment21Including an amplitude response and a phase response;
4) calculating the slope of the phase response curve, namely, the phase shift amount of unit frequency is recorded as alpha, and the relational formula of the refractive index of the optical waveguide group and the phase shift amount is utilized
Figure BDA0002536185770000081
The group refractive index of the optical waveguide is calculated.
Wherein L is 2000-1000 microns.
The calculation formula principle of the embodiment 2 is the same as that of the embodiment 1, except that the optical signal is coupled through the vertical coupling grating at the two ends of the optical waveguide.

Claims (2)

1. A method for measuring the refractive index of an optical waveguide group is characterized by comprising the following steps:
1) the continuous wave laser outputs an optical carrier signal to the optical single-side band modulator, and a radio frequency signal output by a first port of the vector network analyzer is loaded to the optical single-side band modulator to modulate an optical wave;
2) the modulated optical signal is coupled into a first optical waveguide, the optical waveguide is coupled and output into a photoelectric detector through an optical waveguide chip after being transmitted, the detected signal is input into a second port of the vector network analyzer, and the loop is utilized to carry out straight-through calibration of the vector network analyzer;
3) Testing a second optical waveguide after calibration, wherein the length of the second optical waveguide is different from that of the first optical waveguide; the modulated optical signal is coupled into a second optical waveguide, and is coupled and output into a photoelectric detector through an optical waveguide chip after being transmitted by the optical waveguide,inputting the detected signal into a second port of the vector network analyzer, and testing the signal from the vector network analyzer to obtain a response S at the moment21Including an amplitude response and a phase response;
4) calculating the slope of the phase response curve, namely the phase shift amount of unit frequency as alpha, and utilizing the refractive index n of the optical waveguide groupgFormula of relation with the phase shift amount
Figure FDA0003546346090000011
Calculating the group refractive index n of the optical waveguidegWherein L is the length difference of the two optical waveguides, and c is the speed of light in vacuum; the group refractive index calculation method of the optical waveguide is as follows:
group refractive index n of optical waveguide in first-order dispersion modelgExpressed as:
Figure FDA0003546346090000012
in the formula neffIs the effective refractive index, λ is the wavelength of light in vacuum, λ0The wavelength corresponding to the desired group refractive index, the refractive index being related to the wavelength of the light;
light waves propagating in the waveguide, their phases
Figure FDA0003546346090000013
Expressed as:
Figure FDA0003546346090000014
after through calibration, L in the above formula is the length difference L of the two optical waveguides2-L1；
The derivation of the phase with respect to wavelength λ of the above equation can be found:
Figure FDA0003546346090000021
In addition, the following steps:
Figure FDA0003546346090000022
f is the frequency of the optical wave;
derivation of the above equation f with respect to λ can be obtained:
Figure FDA0003546346090000023
then there are:
Figure FDA0003546346090000024
further simplification can be achieved:
Figure FDA0003546346090000025
and the slope of the phase response curve is marked as alpha, then
Figure FDA0003546346090000026
Therefore, the refractive index of the optical waveguide group is expressed as:
Figure FDA0003546346090000027
2. the method for measuring the refractive index of the optical waveguide group according to claim 1, wherein in step 2) or 3), the modulated optical signal is coupled with the coupling input port of the optical waveguide chip through the coupling input optical fiber, and the optical wave is transmitted through the optical waveguide, then is output to the coupling output optical fiber through the coupling output port of the optical waveguide chip, and is then connected to the photoelectric detector for photoelectric conversion.
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