CN114759333B - Microwave transmission device and microwave plasma equipment - Google Patents
Microwave transmission device and microwave plasma equipment Download PDFInfo
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- CN114759333B CN114759333B CN202210668837.8A CN202210668837A CN114759333B CN 114759333 B CN114759333 B CN 114759333B CN 202210668837 A CN202210668837 A CN 202210668837A CN 114759333 B CN114759333 B CN 114759333B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P3/00—Waveguides; Transmission lines of the waveguide type
- H01P3/12—Hollow waveguides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/30—Auxiliary devices for compensation of, or protection against, temperature or moisture effects ; for improving power handling capability
Abstract
The invention provides a microwave transmission device and microwave plasma equipment, and belongs to the field of microwave transmission. The microwave transmission device comprises a waveguide, a cooling assembly and a pin shaft, wherein the waveguide is of a rectangular tube structure, and a waveguide through hole is formed in the waveguide. The cooling assembly comprises a cooling cavity, one end of the cooling cavity is hermetically connected with the tube wall of the waveguide and covers the waveguide through hole, and a cover plate is arranged at the other end of the cooling cavity. The pin shaft is slidably arranged in the waveguide through hole and can be fixed relative to the waveguide through hole; the pin shaft is in sealing fit with the inner wall of the waveguide through hole; a water flow channel is arranged on the pin shaft and comprises a water inlet and a water outlet. The water inlet and the water outlet are both positioned in the inner cavity of the cooling cavity. The design enables the cooling water to take away heat on the surface of the pin shaft and heat inside the pin shaft in the flowing process, so that the whole pin shaft is cooled. The temperature of the pin shaft is effectively reduced, so that the transmission stability of the microwave transmission device is higher.
Description
Technical Field
The invention relates to the field of microwave transmission, in particular to a microwave transmission device and microwave plasma equipment.
Background
The microwave plasma equipment comprises a microwave source, a microwave transmission device and a reaction cavity, wherein the microwave source is connected with the reaction cavity through the microwave transmission device and transmits microwaves into the reaction cavity. The core component of the microwave transmission device is a waveguide, and in order to adjust the waveguide impedance, a through hole is generally formed in the wall of the waveguide, and a pin is inserted into the through hole. By adjusting the depth of the pin shaft in the waveguide, the waveguide impedance can be adjusted. And because the calorific value of the pin shaft is relatively large, when the temperature of the pin shaft is too high, the stability of waveguide transmission is influenced.
Disclosure of Invention
It is an object of the present invention to provide a microwave transmission device which can effectively alleviate the above problems.
Another object of the present invention is to provide a microwave plasma apparatus, which employs the above microwave transmission device.
The invention is realized by the following steps:
a microwave transmission device, comprising:
the waveguide is of a rectangular tube structure, and a waveguide through hole is formed in the waveguide;
the cooling assembly comprises a cooling cavity, one end of the cooling cavity is hermetically connected with the pipe wall of the waveguide and covers the waveguide through hole, and the other end of the cooling cavity is provided with a cover plate; two water pipe connectors are arranged on the cooling cavity;
the pin shaft is slidably arranged in the waveguide through hole and can be fixed relative to the waveguide through hole; the pin shaft is in sealing fit with the inner wall of the waveguide through hole; a water flow channel is arranged on the pin shaft and comprises a water inlet and a water outlet;
the water inlet and the water outlet are both positioned in the inner cavity of the cooling cavity.
Furthermore, the cooling assembly also comprises a partition plate which is arranged in the cooling cavity and partitions an inner cavity of the cooling cavity to form a water inlet cavity and a water outlet cavity which are independent of each other; the two water pipe interfaces are respectively arranged on the outer walls of the water inlet cavity and the water outlet cavity;
the partition plate is provided with a partition plate through hole, and the pin shaft is slidably arranged in the partition plate through hole; the water inlet is positioned in the water inlet cavity, and the water outlet is positioned in the water outlet cavity;
the water outlet is provided with a spiral flow guide pipe.
Furthermore, a cover plate through hole is formed in the cover plate, and the pin shaft is slidably arranged in the cover plate through hole;
the microwave transmission device comprises a lifting assembly, the lifting assembly comprises a lifting part and a first spring, and the lifting part is mounted on the cooling cavity and connected with the pin shaft to enable the pin shaft to move in a direction far away from the waveguide;
one end of the first spring is connected with the cooling cavity, and the other end of the first spring is connected with the pin shaft and used for enabling the pin shaft to move towards the direction close to the waveguide.
Further, a valve is arranged at one of the water pipe interfaces, and comprises a valve rod; the microwave transmission device also comprises an automatic control assembly, wherein the automatic control assembly comprises a connecting rod and a moving rod;
one end of the movable rod is fixedly connected with the pin shaft, one end of the connecting rod is hinged with the movable rod, and the other end of the connecting rod is hinged with the valve rod;
when the pin shaft moves towards the direction far away from the waveguide, the automatic control assembly can drive the valve rod to rotate, so that the opening degree of the valve is reduced;
when the pin shaft moves towards the direction close to the waveguide, the automatic control assembly can drive the valve rod to rotate, so that the opening degree of the valve is increased.
Further, the movable rod is a flexible rod capable of bending and deforming, and the swing angle of the valve rod is 90 degrees.
Furthermore, the lifting part comprises a mounting plate, a pull rope, a rotating shaft and a locking structure, the mounting plate is fixedly connected with the cooling cavity, the rotating shaft is rotatably connected with the mounting plate, one end of the pull rope is wound on the rotating shaft, and the other end of the pull rope is connected with the pin shaft;
the locking structure is used for locking the rotating shaft.
Furthermore, the locking structure comprises a locking hook and a locking disc, and the locking disc is sleeved and connected on the rotating shaft; one end of the lock hook is connected with the mounting plate, and the other end of the lock hook is detachably connected with the locking disc;
a second spring is further sleeved on the rotating shaft, one end of the second spring is abutted against the mounting plate, and the other end of the second spring is connected with the rotating shaft; the second spring is used for enabling the locking disk to abut against the locking hook.
Further, a plurality of conical holes are formed in the locking disc, and uniformly surround the center of the locking disc; the end of the lock hook is provided with a conical tip which can be matched with the corresponding conical hole.
Further, the air conditioner is characterized in that,
the pin shaft is provided with a limiting piece, and the limiting piece is used for limiting two limiting positions of the pin shaft; when the limiting piece is abutted against the waveguide, the length of the pin shaft extending into the waveguide is 1/2 the height of the waveguide inner cavity; when the limiting part is abutted to the cooling cavity, the length of the pin shaft extending into the waveguide is 0.
A microwave plasma device comprises a microwave source and the microwave transmission device, wherein the microwave source is connected with the waveguide.
The invention has the beneficial effects that:
when the microwave transmission device and the microwave plasma equipment which are obtained through the design are used, the two water pipe interfaces are respectively connected with the water inlet pipe and the water outlet pipe. After cooling water enters the cooling cavity through the water inlet pipe, the cooling water can flow in the cooling cavity and can flow in the water flow channel; and finally flows out through a water outlet pipe. The design enables the cooling water to take away heat on the surface of the pin shaft and heat inside the pin shaft in the flowing process, so that the whole pin shaft is cooled. The temperature of the pin shaft is effectively reduced, so that the transmission stability of the microwave transmission device is higher.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a microwave transmission device provided in an embodiment of the present invention;
fig. 2 is a cross-sectional view a-a of fig. 1, provided in accordance with an embodiment of the present invention.
FIG. 3 is a left side view of the locking disk of FIG. 1 provided by an embodiment of the present invention;
icon: 100-a microwave transmission device; 110-a waveguide; 120-a cooling assembly; 121-a cooling cavity; 1211-water inlet chamber; 1212-water outlet chamber; 122-a separator; 123-cover plate; 130-a pin shaft; 131-a limiting member; 132-a water flow channel; 141-a lifting section; 1411-a mounting plate; 1412-pulling a rope; 1413-a rotating shaft; 1414-a shackle; 1415-locking disk; 1416-a tapered bore; 1417-a second spring; 142-a first spring; 150-water inlet pipe; 160-a valve stem; 170-water outlet pipe; 180-an automatic control assembly; 182-a connecting rod; 184-a travel bar; 190-a flow guide pipe.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described in detail and completely with reference to the accompanying drawings.
In the description of the present invention, it is to be understood that the terms indicating an orientation or positional relationship are based on the orientation or positional relationship shown in the drawings only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
Unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and encompass, for example, being fixedly connected, releasably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
It is to be understood that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like are used in a generic and descriptive sense only and not for purposes of limitation, the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like are used in the generic and descriptive sense only and not for purposes of limitation, as the term is used in the generic and descriptive sense, and not for purposes of limitation, unless otherwise specified or implied, and the specific reference to a device or element is intended to be a reference to a particular element, structure, or component. Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
Example (b):
referring to fig. 1, the present embodiment provides a microwave transmission device 100, which includes a waveguide 110, a cooling element 120 and a pin 130, wherein a waveguide through hole is formed on a wide side surface of the waveguide 110, and the pin 130 is slidably disposed in the waveguide through hole; the cooling assembly 120 is covered on the pin 130 and connected to the waveguide 110 for cooling the pin 130.
Specifically, the waveguide 110 has a rectangular tube structure, and a waveguide through hole is formed in one wide side surface thereof. The cooling cavity 121 is arranged perpendicular to the waveguide 110 and hermetically connected to the waveguide 110 through an end portion; the other end of the cooling cavity 121 is provided with a cover plate 123. Two water pipe connectors are arranged on the cooling cavity 121, one is used for connecting the water inlet pipe 150, and the other is used for connecting the water outlet pipe 170. The cooling water enters the inner cavity of the cooling cavity 121 through the water inlet pipe 150 and then flows out through the water outlet pipe 170.
The pin 130 is slidably disposed in the waveguide through hole, and when the pin 130 slides to a predetermined position, it can be fixed with respect to the waveguide through hole. And, be provided with the sealing washer between the outer wall of round pin axle 130 and the inner wall of waveguide through-hole to realize sealed cooperation.
The pin shaft 130 is provided with a water flow channel 132, and a water inlet and a water outlet of the water flow channel 132 are respectively located on two sides of the pin shaft 130, so that cooling water can sufficiently flow around the pin shaft 130, and the pin shaft 130 can be effectively cooled. And, the water flow channel 132 extends to one end of the pin 130 near the waveguide 110; the above-described design facilitates the cooling water to effectively cool the end of the pin shaft 130 that is most susceptible to heat generation. Of course, in other embodiments, the water inlet and the water outlet of the water flow channel 132 may be located on the same side of the pin 130.
After cooling water enters the inner cavity of the cooling cavity 121, a part of the water flows around the pin 130 to cool the surface of the pin 130; another portion of the water flows along the water flow channel 132 to cool the inside of the pin 130.
Further, the cooling module 120 further includes a partition plate 122, the partition plate 122 is disposed in the cooling cavity 121 and partitions the inner cavity of the cooling cavity 121 into an inlet 1211 and an outlet 1212 that are independent from each other; the inlet 1211 is located above the outlet 1212 (referring to the drawings). The two water pipe connectors on the cooling cavity 121 are respectively arranged on the outer walls of the water inlet cavity 1211 and the water outlet cavity 1212. The partition plate 122 is further provided with a through hole of the partition plate 122, and the pin 130 is slidably arranged in the through hole of the partition plate 122; the pin 130 is in sealing engagement with the through hole of the partition 122. Also, the water inlet of the water flow channel 132 is located in the water inlet chamber 1211 and the water outlet is located in the water outlet chamber 1212. Of course, in other embodiments, the inlet 1211 may be positioned below the outlet 1212.
Referring to fig. 1 and 2, since the temperature inside the pin 130 is more difficult to dissipate, the temperature inside the pin is more likely to be too high. By providing the partition plate 122, more cooling water can flow through the water flow passage 132, and the temperature inside the pin shaft 130 can be more efficiently lowered. In addition, a spiral guide pipe 190 is arranged at the water outlet of the water flow channel 132, which can make the water from the water flow channel 132 form a vortex in the water outlet cavity 1212; thereby accelerating the flow of cooling water at different positions in the water outlet cavity 1212 and further improving the cooling effect.
To facilitate adjustment of the depth H1 of the pin 130 in the waveguide 110, the waveguide 110 transport apparatus is provided with a lift assembly. The lifting assembly includes a lifting portion 141 and a first spring 142, wherein the lifting portion 141 is used for lifting the pin 130 to move upward, and the first spring 142 is used for pulling the pin 130 to move downward. The cover plate 123 is provided with a cover plate through hole, and the upper end of the pin shaft 130 is exposed out of the cover plate through hole and can freely slide in the cover plate through hole; the pin shaft 130 is hermetically connected with the inner wall of the through hole of the cover plate; the upper end of the pin 130 is connected to the elevating portion 141.
Specifically, the lifting portion 141 includes a mounting plate 1411, a pull cord 1412, a rotating shaft 1413, and a locking structure. The mounting plate 1411 is fixedly connected to the side wall of the cooling cavity 121 and extends along the length direction of the cooling cavity 121; and the rotary shaft 1413 is rotatably disposed in a mounting hole of the mounting plate 1411. One end of the pulling rope 1412 is wound on the rotating shaft 1413, and the other end is connected with the end of the pin 130. When the rotating shaft 1413 rotates, the pin 130 can be lifted. The locking structure is used for locking the rotating shaft 1413 to prevent the rotating shaft from rotating under the tension of the pulling rope 1412.
Referring to fig. 1 and fig. 3, the locking structure includes a locking hook 1414 and a locking disk 1415, wherein the locking disk 1415 is sleeved on and fixedly connected to the rotating shaft 1413; latch hooks 1414 are coupled to mounting plate 1411 at one end and are adapted to removably couple to locking tray 1415 at the other end. The locking disk 1415 is provided with a plurality of tapered holes 1416, the tapered holes 1416 being uniformly arranged around the center of the locking disk 1415. Correspondingly, the end of the locking hook 1414 is provided with a tapered tip, which when inserted into one of the tapered holes 1416, the locking disc 1415 is locked. In order to connect the lock plate 1415 and the lock hook 1414 securely, a second spring 1417 is sleeved on the rotating shaft 1413, one end of the second spring 1417 abuts against the mounting plate 1411, and the other end abuts against the end of the lock plate 1415. The second spring 1417 causes the locking disk 1415 to have a tendency to move closer towards the locking hook 1414, thereby providing a secure connection between the locking hook 1414 and the locking disk 1415. When the locking needs to be released, the rotating shaft 1413 is pushed along the axis of the rotating shaft, so that the locking disc 1415 moves away from the locking hook 1414.
Further, in order to facilitate the control of the water inflow of the cooling water, a valve is arranged at the position of the water inlet pipe 150; the valve is provided with a valve rod 160, and the water inflow can be adjusted by rotating the valve rod 160. The swing amplitude of the valve rod 160 is 90 degrees, and when the valve rod 160 is parallel to the water inlet pipe 150, the water quantity is the maximum; the minimum amount of water is 0 in the vertical direction.
In addition, the deeper the pin 130 is located at the depth H1 of the waveguide 110, the larger the heating value is, and the larger the required cooling water inflow is; conversely, the smaller. In order to facilitate the control of the water inflow according to the heat generation amount of the pin 130, the microwave transmission device 100 is further provided with an automatic control assembly 180.
The robot assembly 180 includes a link 182 and a moving bar 184, wherein the moving bar 184 is disposed perpendicular to the pin 130 and has one end fixed to the pin 130. One end of the link 182 is hinged to the moving rod 184, and the other end is hinged to the valve stem 160; such that travel bar 184, link 182, and valve stem 160 comprise a linkage. When the pin 130 and the moving rod 184 move synchronously, it can rotate the valve rod 160 via the connecting rod 182. When the pin 130 moves downward (with reference to the drawings), the heat generation amount thereof increases; meanwhile, the pin 130 drives the opening degree of the valve rod 160 to be increased through the automatic control assembly 180, and the flow rate of the cooling water is increased. When the pin 130 moves upward, the automatic control assembly 180 drives the valve rod 160 to decrease the opening degree and the flow rate of the cooling water.
After the automatic control assembly 180 is arranged, the water inflow of the cooling water can be adjusted according to the actual heat productivity of the pin shaft 130, and the waste caused by continuous large flow can be avoided.
Further, since the swing angle of the valve rod 160 is 90 °, if the moving rod 184 and the connecting rod are rigid rods, it is inevitable to limit the up-and-down movement range of the moving rod 184 and the pin 130. Thus, the travel bar 184 is a flexible bar that can be flexibly deformed. At this point, when the valve stem 160 is opened to the maximum and the pin 130 continues to move downward, the travel bar 184 may be properly deformed completely, thereby avoiding restricting the pin 130 from continuing to move downward. In other embodiments, the connecting rod may also be of an elastically stretchable structure.
In order to ensure the normal operation of the waveguide, the maximum length H1 of the pin shaft extending into the waveguide is less than 1/2 of the height of the waveguide cavity; and the minimum length is 0. In view of this, two limiting members 131 are disposed on the pin 130, and the limiting members 131 are located in the water outlet cavity 1212 of the cooling cavity and are used for limiting two limit positions of the pin 130. When the limiting piece at the lower part is abutted against the waveguide, the length H1 of the pin shaft extending into the waveguide is 1/2 of the height H2 of the inner cavity of the waveguide; when the limiting part on the upper part is abutted to the partition plate of the cooling cavity, the length of the pin shaft extending into the waveguide is 0, namely the end part of the pin shaft is flush with the inner wall of the waveguide.
Of course, in other embodiments, the position and specific structure of the position-limiting element may be changed; for example, a stop may be provided in the inlet 1211. Alternatively, two limiting members may be provided, wherein one limiting member is disposed at the outer end of the pin 130 and outside the cooling cavity 121; the other one is located inside the cooling chamber 121. It should be noted that in other embodiments, the cooling assembly 120 may not be provided with the partition 122. The lifting assembly may also adopt other structures capable of driving the pin 130 to lift, for example, a rack-and-pinion structure, in which the rack is connected to the pin 130 and the rack is driven to move when the gear rotates. Alternatively, the pin 130 may be directly moved manually without providing a lifting assembly.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A microwave transmission device, comprising:
the waveguide is of a rectangular tube structure, and a waveguide through hole is formed in the waveguide;
the cooling assembly comprises a cooling cavity, one end of the cooling cavity is hermetically connected with the pipe wall of the waveguide and covers the waveguide through hole, and the other end of the cooling cavity is provided with a cover plate; two water pipe connectors are arranged on the cooling cavity;
the pin shaft is slidably arranged in the waveguide through hole and can be fixed relative to the waveguide through hole; the pin shaft is in sealing fit with the inner wall of the waveguide through hole; a water flow channel is arranged on the pin shaft and comprises a water inlet and a water outlet;
the water inlet and the water outlet are both positioned in the inner cavity of the cooling cavity;
the cooling assembly also comprises a partition plate, and the partition plate is arranged in the cooling cavity and partitions an inner cavity of the cooling cavity to form a water inlet cavity and a water outlet cavity which are independent of each other; the two water pipe interfaces are respectively arranged on the outer walls of the water inlet cavity and the water outlet cavity;
the partition plate is provided with a partition plate through hole, and the pin shaft is slidably arranged in the partition plate through hole; the water inlet is positioned in the water inlet cavity, and the water outlet is positioned in the water outlet cavity;
and the lifting assembly is arranged on the cooling cavity, is connected with the pin shaft and is used for enabling the pin shaft to slide along the waveguide through hole.
2. A microwave transmission arrangement as claimed in claim 1, characterised in that: the water outlet is provided with a spiral flow guide pipe.
3. Microwave transmission unit according to claim 1 or 2, characterized in that:
the cover plate is provided with a cover plate through hole, and the pin shaft is slidably arranged in the cover plate through hole;
the lifting assembly comprises a lifting part and a first spring, and the lifting part is mounted on the cooling cavity, is connected with the pin shaft and is used for enabling the pin shaft to move towards the direction far away from the waveguide;
one end of the first spring is connected with the cooling cavity, and the other end of the first spring is connected with the pin shaft and used for enabling the pin shaft to move towards the direction close to the waveguide.
4. A microwave transmission arrangement as claimed in claim 3, wherein:
a valve is arranged at one water pipe interface and comprises a valve rod; the microwave transmission device also comprises an automatic control assembly, wherein the automatic control assembly comprises a connecting rod and a moving rod;
one end of the movable rod is fixedly connected with the pin shaft, one end of the connecting rod is hinged with the movable rod, and the other end of the connecting rod is hinged with the valve rod;
when the pin shaft moves towards the direction far away from the waveguide, the automatic control assembly can drive the valve rod to rotate, so that the opening degree of the valve is reduced;
when the pin shaft moves towards the direction close to the waveguide, the automatic control assembly can drive the valve rod to rotate, so that the opening degree of the valve is increased.
5. A microwave transmission arrangement according to claim 4, wherein:
the movable rod is a flexible rod capable of being bent and deformed, and the swing angle of the valve rod is 90 degrees.
6. A microwave transmission arrangement as claimed in claim 3, wherein:
the lifting part comprises a mounting plate, a pull rope, a rotating shaft and a locking structure, the mounting plate is fixedly connected with the cooling cavity, the rotating shaft is rotatably connected with the mounting plate, one end of the pull rope is wound on the rotating shaft, and the other end of the pull rope is connected with the pin shaft;
the locking structure is used for locking the rotating shaft.
7. A microwave transmission arrangement according to claim 6, wherein:
the locking structure comprises a locking hook and a locking disc, and the locking disc is sleeved and fixedly connected to the rotating shaft; one end of the lock hook is connected with the mounting plate, and the other end of the lock hook is detachably connected with the locking disc;
a second spring is further sleeved on the rotating shaft, one end of the second spring is abutted against the mounting plate, and the other end of the second spring is connected with the rotating shaft; the second spring is used for enabling the locking disk to abut against the locking hook.
8. A microwave transmission arrangement according to claim 7, wherein:
the locking disc is provided with a plurality of conical holes which are uniformly surrounded at the center of the locking disc; the end of the lock hook is provided with a conical tip which can be matched with the corresponding conical hole.
9. A microwave transmission arrangement as claimed in claim 1, characterised in that:
the pin shaft is provided with a limiting piece, and the limiting piece is used for limiting two limiting positions of the pin shaft;
when the limiting piece is abutted against the waveguide, the length of the pin shaft extending into the waveguide is 1/2 the height of the waveguide inner cavity;
when the limiting part is abutted to the cooling cavity, the length of the pin shaft extending into the waveguide is 0.
10. A microwave plasma apparatus comprising a microwave source and a microwave delivery device according to any one of claims 1 to 9, the microwave source being connected to the waveguide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210668837.8A CN114759333B (en) | 2022-06-14 | 2022-06-14 | Microwave transmission device and microwave plasma equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202210668837.8A CN114759333B (en) | 2022-06-14 | 2022-06-14 | Microwave transmission device and microwave plasma equipment |
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| CN114759333A CN114759333A (en) | 2022-07-15 |
| CN114759333B true CN114759333B (en) | 2022-09-02 |
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| GB640848A (en) * | 1948-01-08 | 1950-07-26 | Rca Corp | Improvements in the stabilizing, or measuring, of the frequency of microwave oscillations |
| KR820000148B1 (en) * | 1980-08-29 | 1982-02-20 | 삼평전기주식회사 | Water cavity of micro-wave heating device |
| JP3268237B2 (en) * | 1997-07-29 | 2002-03-25 | 住友重機械工業株式会社 | Electron gun using photocathode |
| US6534140B2 (en) * | 1999-03-01 | 2003-03-18 | Cem Limited, L.L.C. | Pressure vessel with composite sleeve |
| US20020007912A1 (en) * | 1999-04-12 | 2002-01-24 | Mohammad Kamarehi | Coolant for plasma generator |
| CN100500934C (en) * | 2007-04-10 | 2009-06-17 | 武汉工程大学 | Method and device for plating diamond like film on inner-outer wall of quartz round tube |
| CN101853768B (en) * | 2010-04-09 | 2012-07-04 | 长飞光纤光缆有限公司 | Cylindrical plasma resonant cavity |
| CN106304602B (en) * | 2016-09-26 | 2018-07-20 | 吉林大学 | A kind of microwave coupling plasma resonant |
| CN108878243B (en) * | 2017-05-11 | 2020-08-21 | 北京北方华创微电子装备有限公司 | Surface wave plasma processing apparatus |
| CN108468086B (en) * | 2018-04-24 | 2020-12-15 | Fd3M公司 | Microwave plasma chemical vapor deposition device and application thereof |
| CA3132540A1 (en) * | 2019-04-05 | 2020-10-08 | Jocelyn Doucet | Internally cooled impedance tuner for microwave pyrolysis systems |
| CN110306170A (en) * | 2019-06-28 | 2019-10-08 | 郑州磨料磨具磨削研究所有限公司 | A kind of waveguide assemblies and microwave plasma CVD device |
| US11646478B2 (en) * | 2020-12-08 | 2023-05-09 | Sichuan University | Meta-surface water load |
| CN214099836U (en) * | 2020-12-31 | 2021-08-31 | 成都纽曼和瑞微波技术有限公司 | Inner conductor assembly, microwave mode converter and vapor deposition system |
| CN113913780A (en) * | 2021-09-30 | 2022-01-11 | 新优势产业集团有限公司 | Plasma CVD apparatus |
| CN117279181A (en) * | 2022-01-04 | 2023-12-22 | 成都沃特塞恩电子技术有限公司 | Microwave plasma control system |
| CN114457323B (en) * | 2022-04-12 | 2022-08-02 | 成都纽曼和瑞微波技术有限公司 | Reaction chamber device and microwave plasma vapor deposition system |
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