CN217641733U - Waveguide assembly and microwave equipment - Google Patents

Waveguide assembly and microwave equipment Download PDF

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Publication number
CN217641733U
CN217641733U CN202221486511.5U CN202221486511U CN217641733U CN 217641733 U CN217641733 U CN 217641733U CN 202221486511 U CN202221486511 U CN 202221486511U CN 217641733 U CN217641733 U CN 217641733U
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Prior art keywords
waveguide
pin shaft
cavity
cooling cavity
hole
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CN202221486511.5U
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Chinese (zh)
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陈森林
李俊宏
李东亚
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Chengdu Neoman Hueray Microwave Technology Co ltd
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Chengdu Neoman Hueray Microwave Technology Co ltd
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Abstract

The utility model provides a waveguide assembly and microwave plasma equipment belongs to the microwave transmission field. The waveguide assembly comprises a waveguide, a pin shaft and a cooling cavity, and a waveguide through hole is formed in the waveguide; the pin shaft is slidably arranged in the waveguide through hole; the pin shaft is in sealing fit with the inner wall of the waveguide through hole; a water flow channel is arranged on the pin shaft and comprises a water inlet and a water outlet. The cooling cavity is arranged outside the waveguide; one end of the cooling cavity is hermetically connected with the pipe wall of the waveguide and is covered on the pin shaft, and the other end of the cooling cavity is provided with a cover plate. At least one water pipe connector is arranged on the cooling cavity. The design enables the cooling liquid to take away heat on the surface of the pin shaft and heat inside the pin shaft in the flowing process, so that the whole pin shaft is cooled. Because the temperature of round pin axle can effectively be reduced to above-mentioned design, consequently, the transmission stability of above-mentioned waveguide assembly is higher, and the overall stability of above-mentioned microwave equipment is also higher.

Description

Waveguide assembly and microwave equipment
Technical Field
The utility model relates to a microwave transmission field particularly, relates to a waveguide assembly and microwave equipment.
Background
The microwave equipment generally comprises a microwave source, a waveguide component and a reaction cavity, wherein the microwave source is connected with the reaction cavity through the waveguide component and transmits microwaves into the reaction cavity; the artificial diamond is cultivated through the discharge reaction in the reaction cavity. In order to adjust the impedance of waveguide transmission, a through hole is generally formed in a tube wall of the waveguide, and a pin is inserted into the through hole. By adjusting the depth of the pin in the waveguide, the impedance of the waveguide can be adjusted. The pin shaft has larger heat productivity, and the stability of waveguide transmission is influenced when the temperature of the pin shaft is too high; and is not convenient for manual operation.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a waveguide assembly and microwave equipment, it can effectively alleviate above-mentioned problem.
The utility model discloses a realize like this:
a waveguide assembly, comprising:
the waveguide is provided with a waveguide through hole;
the pin shaft is slidably arranged in the waveguide through hole; the pin shaft is in sealing fit with the inner wall of the waveguide through hole; a water flow channel is arranged on the pin shaft and comprises a water inlet and a water outlet;
a cooling cavity disposed outside the waveguide; one end of the cooling cavity is hermetically connected with the pipe wall of the waveguide and covers the pin shaft, and the other end of the cooling cavity is provided with a cover plate;
at least one water pipe connector is arranged on the cooling cavity.
Further, the cooling device also comprises a partition plate, wherein the partition plate is arranged in the cooling cavity; the inner cavity of the cooling cavity is partitioned by the partition plate to form a water inlet cavity and a water outlet cavity which are independent of each other; the cooling cavity is provided with two water pipe interfaces which are respectively arranged on the outer walls of the water inlet cavity and the water outlet cavity;
the partition plate is provided with a partition plate through hole, and the pin shaft is slidably arranged in the partition plate through hole; the water inlet is positioned in the water inlet cavity, and the water outlet is positioned in the water outlet cavity.
Further, the two water pipe interfaces are respectively communicated with the water inlet cavity and the water outlet cavity; the water inlet is positioned in the water inlet cavity, and the water outlet is positioned in the water outlet cavity.
Furthermore, a cover plate through hole is formed in the cover plate, the pin shaft is in sealing fit with the cover plate through hole, and the outer end of the pin shaft extends out of the cooling cavity;
the cooling cavity is provided with a water pipe interface which is communicated with the inner cavity of the cooling cavity; one of the water inlet and the water outlet is positioned at the outer end of the pin shaft, and the other one of the water inlet and the water outlet is positioned on the circumferential surface of the pin shaft and in the cooling cavity.
Furthermore, a locking screw is arranged on the side wall of the cooling cavity, and the end part of the locking screw is abutted against the pin shaft.
Furthermore, the cover plate is provided with a cover plate through hole, and the pin shaft is in sliding fit with the cover plate through hole.
The cooling device further comprises a connecting piece and a mounting plate, wherein the mounting plate is connected with the cooling cavity through the connecting piece;
the mounting panel with apron parallel interval sets up, be provided with the threaded rod on the mounting panel, the tip of threaded rod with round pin axle rotatable coupling.
Furthermore, the pin shaft is provided with a limiting piece, and the limiting piece is used for limiting a first limiting position and a second limiting position of the pin shaft;
when the pin shaft is positioned at the first limit position, the length of the pin shaft extending into the waveguide is 1/2 of the height of the waveguide inner cavity; and when the pin shaft is positioned at the second limit position, the length of the pin shaft extending into the waveguide is 0.
A microwave device comprises a microwave source and the waveguide assembly, wherein the microwave source is connected with the waveguide assembly.
The utility model provides a technical scheme's beneficial effect is:
the utility model discloses a waveguide subassembly and microwave equipment that above-mentioned design obtained, during the use, with the water pipe connection and the inlet tube connection of cooling chamber. After the cooling liquid enters the cooling cavity through the water inlet pipe, the cooling liquid can flow in the cooling cavity and can flow in the water flow channel of the pin shaft; finally flows out through another water pipe connector or a water flow channel. The design enables the cooling liquid to take away heat on the surface of the pin shaft and heat inside the pin shaft in the flowing process, so that the whole pin shaft is cooled. Because the temperature of round pin axle can effectively be reduced to above-mentioned design, consequently, the transmission stability of above-mentioned waveguide assembly is higher, and the overall stability of above-mentioned microwave equipment is also higher.
Drawings
Fig. 1 is a schematic cross-sectional structure diagram of a waveguide assembly provided in embodiment 1 of the present invention;
fig. 2 is a schematic cross-sectional structure diagram of a waveguide assembly provided in embodiment 2 of the present invention;
fig. 3 is a schematic cross-sectional structure diagram of a waveguide assembly according to a modified embodiment of embodiment 2 of the present invention.
Icon: 100-a waveguide assembly; 110-a waveguide; 121-a cooling chamber; 1211-water inlet chamber; 1212-water outlet chamber; 1213-water pipe connection; 122-a separator; 123-cover plate; 130-a pin shaft; 132-a water flow channel; 141-a connector; 142-a mounting plate; 143-threaded rod; 150-locking screws; 160-a stop.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention will be combined to clearly and completely describe the technical solutions of the embodiments of the present invention.
Unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and encompass, for example, being fixedly connected, releasably connected, or integral to one another; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements.
Example 1:
the present embodiment provides a waveguide assembly 100 for the transmission of microwaves. The waveguide assembly 100 includes a waveguide 110, a pin 130, and a cooling cavity 121; wherein, the wide side surface of the waveguide 110 is provided with a waveguide through hole, and the pin 130 can be inserted into the waveguide through hole in a sliding way; the cooling cavity 121 is disposed outside the waveguide 110 and covers the pin 130. Through letting in the coolant liquid for among the cooling chamber 121, can cool down round pin axle 130.
Specifically, the pin 130 is cylindrical and is in sealing engagement with the inner wall of the waveguide through hole via a sealing ring. The cooling cavity 121 is a rectangular tubular structure, one end of which is hermetically connected to the wall of the waveguide 110, and the other end of which is provided with a cover plate 123. The cover 123 is provided with a through hole of the cover 123, and the pin 130 is slidably disposed in the through hole of the cover 123. The cover plate 123, the cooling cavity 121, the pin 130 and the outer wall of the waveguide 110 enclose a relatively closed inner cavity. In other embodiments, the cooling cavity 121 may also be a cylindrical structure.
The pin 130 is provided with a water channel 132, a water inlet of which is arranged on the side wall of the pin 130, and a water outlet of which is arranged on the end surface of the outer end of the pin 130. The side wall of the cooling cavity 121 is provided with a water pipe port 1213, and after the water pipe port 1213 is connected with a cooling liquid pipe, the cooling liquid enters the inner cavity of the cooling cavity 121 through the water pipe port 1213, the cooling liquid firstly cools the surface of the pin 130, then enters the water flow channel 132 through the water inlet of the water flow channel 132, cools the inside of the pin 130, and finally flows into the water outlet pipe through the water outlet of the cooling channel. The design enables the outer surface and the inner surface of the pin shaft 130 to be cooled, so that the pin shaft 130 can be effectively cooled integrally, and the working stability of the waveguide assembly 100 can be ensured.
In order to fix the pin 130 at a predetermined position, it is prevented from moving under the vibration; a threaded hole is formed in the side wall of the cooling cavity 121, a locking screw 150 is arranged in the threaded hole, and the inner end of the locking screw 150 abuts against the side wall of the pin shaft 130. When the pin 130 needs to be moved, the locking screw 150 is loosened. In other embodiments, the locking screw 150 may not be provided, and the pin 130 may be fixed by using the friction between the pin 130 and the inner wall of the through hole of the cover plate 123 or the waveguide through hole.
Example 2:
the present embodiment provides another waveguide assembly 100, which is different from embodiment 1 mainly in that a partition plate 122 is disposed in the cooling cavity 121, a water inlet and a water outlet of the water flow channel 132 of the pin 130 are disposed in the cooling cavity 121, and two water pipe joints 1213 are disposed on the side wall of the cooling cavity 121.
Specifically, the partition plate 122 is a rectangular plate which is disposed in parallel with the cover plate 123 at a distance, and is located approximately at the middle of the cooling cavity 121. A partition through hole is formed in the middle of the partition 122, and the pin 130 passes through the partition 122 through hole. The partition 122 separates the inner cavity of the cooling cavity 121 into two relatively independent cavities, one is referred to as an inlet cavity 1211 and the other is referred to as an outlet cavity 1212 for convenience of description. The side wall of the cooling cavity 121 is provided with two water pipe interfaces 1213, and the two water pipe interfaces 1213 are respectively arranged on the outer walls of the water inlet 1211 and the water outlet 1212; the two water pipe joints 1213 are connected to a water inlet pipe and a water outlet pipe, respectively.
The water inlet and the water outlet of the water flow channel 132 of the pin 130 are respectively located in the water inlet 1211 and the water outlet 1212, and after the cooling liquid enters the water inlet 1211 through the water pipe connection 1213, the cooling liquid cools the outer surface of the pin 130 on the one hand, enters the water flow channel 132 on the other hand, enters the water outlet 1212 through the water outlet of the water flow channel 132, and finally flows out through the water outlet. In this embodiment, the water inlet pipe and the water outlet pipe are both connected to the cooling cavity 121, and the connection stability is good.
Further, the pin 130 is further provided with a limiting member 160, and the limiting member 160 is used for limiting a first limit position and a second limit position of the pin 130, where the two limit positions correspond to a lower limit position and an upper limit position in the drawing. When the pin 130 moves towards the direction close to the waveguide 110, the limiting member 160 can abut against the outer wall of the waveguide 110, and at this time, the length H1 of the pin 130 extending into the waveguide 110 is 1/2 of the height H2 of the inner cavity of the waveguide 110; when the pin 130 moves in the opposite direction, the limiting member 160 can abut against the partition 122, and the inner end of the pin 130 is flush with the inner surface of the waveguide 110.
If the pin 130 extends into the waveguide 110 by a length H1 that exceeds 1/2 of the height H2 of the cavity of the waveguide 110, it may cause the waveguide 110 to malfunction, and if the inner end of the pin 130 is lower than the inner surface of the waveguide 110, the inner surface of the waveguide 110 may form a recess, which may also affect the proper operation of the waveguide 110. Therefore, the positioning of the position-limiting member 160 can provide a guarantee for the waveguide 110 to operate normally.
In order to fix the pin 130 at a predetermined position and facilitate the driving of the pin 130 to move, the waveguide assembly 100 is further provided with a connector 141 and a mounting plate 142, and the mounting plate 142 is connected to the cooling chamber 121 through the connector 141. The mounting plate 142 and the cover plate 123 are arranged in parallel at intervals, a threaded rod 143 is arranged on the mounting plate 142, and the end of the threaded rod 143 is rotatably connected with the outer end of the pin 130. When the threaded rod 143 is rotated, it can move the pin 130 along its axial direction.
In other embodiments, the mounting plate 142 and the threaded rod 143 may not be provided, and as shown in fig. 3, a locking screw 150 may be directly provided on a sidewall of the cooling cavity 121 to lock the pin 130.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (8)

1. A waveguide assembly, comprising:
the waveguide is provided with a waveguide through hole;
the pin shaft is slidably arranged in the waveguide through hole; the pin shaft is in sealing fit with the inner wall of the waveguide through hole; a water flow channel is arranged on the pin shaft and comprises a water inlet and a water outlet;
a cooling cavity disposed outside the waveguide; one end of the cooling cavity is hermetically connected with the pipe wall of the waveguide and is covered on the pin shaft, and the other end of the cooling cavity is provided with a cover plate;
at least one water pipe connector is arranged on the cooling cavity.
2. The waveguide assembly of claim 1, wherein:
the cooling device also comprises a partition plate which is arranged in the cooling cavity; the inner cavity of the cooling cavity is partitioned by the partition plate to form a water inlet cavity and a water outlet cavity which are independent of each other; the cooling cavity is provided with two water pipe interfaces which are respectively communicated with the water inlet cavity and the water outlet cavity;
the partition plate is provided with a partition plate through hole, and the pin shaft is slidably arranged in the partition plate through hole; the water inlet is positioned in the water inlet cavity, and the water outlet is positioned in the water outlet cavity.
3. The waveguide assembly of claim 1, wherein:
a cover plate through hole is formed in the cover plate, the pin shaft is in sealing fit with the cover plate through hole, and the outer end of the pin shaft extends out of the cooling cavity;
the cooling cavity is provided with a water pipe interface which is communicated with the inner cavity of the cooling cavity; one of the water inlet and the water outlet is positioned at the outer end of the pin shaft, and the other one of the water inlet and the water outlet is positioned on the circumferential surface of the pin shaft and in the cooling cavity.
4. A waveguide assembly according to any one of claims 1 to 3, wherein:
and a locking screw is arranged on the side wall of the cooling cavity, and the end part of the locking screw is abutted to the pin shaft.
5. A waveguide assembly according to any one of claims 1 to 3, wherein:
the cover plate is provided with a cover plate through hole, and the pin shaft is in sliding fit with the cover plate through hole.
6. The waveguide assembly of claim 5, wherein:
the cooling device also comprises a connecting piece and a mounting plate, wherein the mounting plate is connected with the cooling cavity through the connecting piece;
the mounting panel with apron parallel interval sets up, be provided with the threaded rod on the mounting panel, the tip of threaded rod with round pin axle rotatable coupling.
7. The waveguide assembly of claim 1, wherein:
the pin shaft is provided with a limiting piece, and the limiting piece is used for limiting a first limiting position and a second limiting position of the pin shaft;
when the pin shaft is positioned at the first limit position, the length of the pin shaft extending into the waveguide is 1/2 of the height of the waveguide inner cavity; and when the pin shaft is positioned at the second limit position, the length of the pin shaft extending into the waveguide is 0.
8. Microwave device comprising a microwave source and a waveguide assembly according to any of claims 1-7, said microwave source being connected to said waveguide assembly.
CN202221486511.5U 2022-06-14 2022-06-14 Waveguide assembly and microwave equipment Active CN217641733U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221486511.5U CN217641733U (en) 2022-06-14 2022-06-14 Waveguide assembly and microwave equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221486511.5U CN217641733U (en) 2022-06-14 2022-06-14 Waveguide assembly and microwave equipment

Publications (1)

Publication Number Publication Date
CN217641733U true CN217641733U (en) 2022-10-21

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221486511.5U Active CN217641733U (en) 2022-06-14 2022-06-14 Waveguide assembly and microwave equipment

Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116487855A (en) * 2023-06-20 2023-07-25 成都沃特塞恩电子技术有限公司 Adjustable curved waveguide and microwave system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116487855A (en) * 2023-06-20 2023-07-25 成都沃特塞恩电子技术有限公司 Adjustable curved waveguide and microwave system
CN116487855B (en) * 2023-06-20 2023-09-26 成都沃特塞恩电子技术有限公司 Adjustable curved waveguide and microwave system

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