CN114754707A

CN114754707A - Flatness detection method and horizontal detection table for infrared detection chip

Info

Publication number: CN114754707A
Application number: CN202210404454.XA
Authority: CN
Inventors: 高慧莹; 左宁; 裴兵全
Original assignee: Beijing Semiconductor Equipment Institute
Current assignee: Beijing Semiconductor Equipment Institute
Priority date: 2022-04-18
Filing date: 2022-04-18
Publication date: 2022-07-15
Anticipated expiration: 2042-04-18
Also published as: CN114754707B

Abstract

The application provides a flatness detection method and a horizontal detection table of an infrared detection chip, wherein the method comprises the following steps: controlling a detection probe to move to a first shooting position of the infrared sensor chip; controlling the detection probe to move from a first detection position along the vertical direction, and controlling the detection probe to shoot a first detection position image every time the detection probe moves by a preset distance value; obtaining a first height value corresponding to a first detection position according to a plurality of first detection position images shot by a detection probe; controlling the detection probe to move to a second shooting position of the infrared sensor chip; controlling the detection probe to move from a second position along the vertical direction, and controlling the detection probe to shoot a second detection position image every time the detection probe moves by a preset distance value; obtaining a second height value corresponding to a second detection position according to a plurality of second detection position images shot by the detection probe; and determining the flatness according to the first height value and the second height value. The effect of rapidly and accurately detecting the flatness is achieved.

Description

Flatness detection method and horizontal detection table for infrared detection chip

Technical Field

The application relates to the technical field of chip detection, in particular to a flatness detection method and a level detection table of an infrared detection chip.

Background

The infrared detection chip adopts a precise splicing method, a plurality of infrared sensor chips are combined into one infrared detection chip for infrared detection, and a transparent protective film is covered on the surface of the infrared detection chip so as to protect the infrared sensor chip on the surface of the infrared detection chip. In the actual splicing process, the infrared sensor is required to be adhered to the infrared detection chip through glue, and during the gluing process, due to the difference of the gluing position and the gluing amount, the infrared sensor chip is easily adhered to uneven surfaces, so that the infrared detection image is affected, and the phenomena of image distortion or tearing and the like occur.

Because the surface of the infrared detection chip is covered with the glass protective cover, the flatness of each infrared sensor chip cannot be measured by using the conventional laser ranging mode. At present, flatness detection of an infrared sensor chip is manually detected, only an infrared detection chip can be subjected to spot inspection, and the detection speed and the accuracy are low.

Disclosure of Invention

In view of this, an object of the present application is to provide a flatness detecting method and a level detecting table for an infrared detection chip, which can shoot images of a first detection position and a second detection position through a detection probe, calculate a shooting height value of an image with a maximum contrast value of the detection probe at the first detection position and the second detection position through contrast values of a plurality of images of the first detection position and the second detection position, and further determine whether the infrared sensor chip is flat or not through the two height values. The problem of exist among the prior art can only carry out the detection slow, the accuracy is low that detect to infrared sensor chip through the manual work is solved, reach the effect that detects infrared sensor's roughness fast, accurately.

In a first aspect, an embodiment of the present application provides a flatness detection method for an infrared detection chip, where the infrared detection chip includes a plurality of infrared sensor chips, and the following flatness detection steps are performed for each infrared sensor chip: controlling a detection probe to move to a first shooting position of the infrared sensor chip, wherein the first shooting position is positioned right above a first detection position of the infrared sensor chip; controlling the detection probe to move from a first detection position along the vertical direction, and controlling the detection probe to shoot a first detection position image every time the detection probe moves by a preset distance value; obtaining a first height value corresponding to a first detection position according to a plurality of first detection position images shot by the detection probe, wherein the first height value is the height of the detection probe when a first target image is shot, and the first target image is a first detection position image with the maximum gray contrast value in the plurality of first detection position images; controlling the detection probe to move to a second shooting position of the infrared sensor chip, wherein the second shooting position is positioned right above a second detection position of the infrared sensor chip, and the distance value between the second detection position and the first detection position is larger than a preset detection position distance threshold value; controlling the detection probe to move from a second position along the vertical direction, and controlling the detection probe to shoot a second detection position image every time the detection probe moves by a preset distance value; obtaining a second height value corresponding to a second detection position according to a plurality of second detection position images shot by the detection probe, wherein the second height value is the height of the detection probe when a second target image is shot, and the second target image is a second detection position image with the maximum gray contrast value in the plurality of second detection position images; and determining the flatness of the infrared sensor chip according to the first height value and the second height value.

Optionally, the infrared detection chip further includes a mounting base and a cover glass, the upper surface of the mounting base is a mounting surface, the lower surface of the mounting base is a placing surface, the cover glass is installed above the plurality of infrared sensors, the cover glass and the mounting surface form a cavity, the plurality of infrared sensor chips are located in the cavity and are adhered to the mounting surface, and the placing surface is in contact with the target placing table.

Optionally, the step of obtaining a first height value corresponding to the first detection position according to a plurality of first detection position images captured by the detection probe includes: for each first position detection image, obtaining a first position detection gray level image corresponding to the first position detection image according to the first position detection image; aiming at each first position detection image, acquiring gray values of a plurality of pixel points of a gray value extraction line in the first position detection gray image; aiming at each first position detection image, calculating a gray contrast value of the first position detection image according to the gray values of the plurality of pixel points; calculating a maximum gray contrast value of the plurality of first position detection images among the gray contrast values of the plurality of first position detection images according to the gray contrast values of the plurality of first position detection images; and determining a first height of the detection probe when the first position detection image is shot according to the first position detection image corresponding to the maximum gray contrast value.

Optionally, the step of calculating, for each first position detection image, a gray contrast value of each first position detection image according to the gray values of the plurality of pixel points includes: acquiring the highest gray value and the lowest gray value in the gray values of the plurality of pixel points aiming at each first position detection image; calculating a difference value between the highest gray value and the lowest gray value of the first position detection image for each first position detection image; and determining the difference value as the gray scale contrast value of each first position detection image.

Optionally, the step of determining the flatness of the infrared sensor chip according to the first height value and the second height value includes: calculating a height difference value of the first height value and the second height value; judging whether the absolute value of the height difference is larger than a preset height difference threshold value or not; if the absolute value of the height difference is larger than the height difference threshold, determining that the infrared sensor chip is not flat; and if the absolute value of the height difference is not larger than the height difference threshold, determining that the infrared sensor chip is flat.

Optionally, the infrared detection chip is placed on a horizontal detection table, and the horizontal detection table includes: the infrared detection device comprises a bearing table, a horizontal adjusting mechanism, a height control table and a height adjusting rod, wherein the bearing table is used for placing the infrared detection chip, the horizontal adjusting mechanism comprises a first horizontal adjusting piece, a second horizontal adjusting piece and a third horizontal adjusting piece, the upper part of the first horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the first horizontal adjusting piece is connected with the upper surface of the height control table; the upper part of the second horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the second horizontal adjusting piece is connected with the upper surface of the height control table; the upper part of the third horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the third horizontal adjusting piece is connected with the upper surface of the height control table; the height adjusting rod is connected with the height control platform, and the height control platform is driven to move in the vertical direction through the movement of the height adjusting rod so as to adjust the height of the height control platform; wherein, before the flatness detecting step is performed for each infrared sensor chip, the method further comprises: and leveling the level detection platform, wherein the level detection platform is leveled in the following way: controlling the detection probe to move to a third shooting position of the horizontal detection table, wherein the third shooting position is positioned right above the third detection position of the horizontal detection table, and a connection point of the upper part of the first horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the third detection position on the upper surface of the bearing table; controlling the detection probe to shoot a third detection position image; obtaining a gray scale contrast value of the third detection position image according to the third detection position image; determining a first movement value of the third detection position according to the gray contrast value; controlling a height adjusting rod to act according to the first moving value so that the gray contrast value of a third detection position image shot by the detection probe is larger than a preset gray contrast threshold value; controlling the detection probe to move to a fourth shooting position of the horizontal detection table, wherein the fourth shooting position is located right above the fourth detection position of the horizontal detection table, and a connection point of the upper part of the second horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the fourth detection position on the upper surface of the bearing table, wherein the distance between the fourth detection position and the third detection position on the horizontal detection table is greater than a preset horizontal detection distance threshold; controlling the detection probe to shoot a fourth detection position image; obtaining a gray scale contrast value of the fourth detection position image according to the fourth detection position image; determining a second movement value of the fourth detection position according to the gray contrast value; controlling a second horizontal adjusting piece to act according to the second moving value, so that the gray contrast value of a fourth detection position image shot by the detection probe is larger than the gray contrast threshold value; controlling the detection probe to move to a fifth shooting position of the horizontal detection table, wherein the fifth shooting position is positioned right above a fifth detection position of the horizontal detection table, and a connection point of the upper part of the third horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the fifth detection position on the upper surface of the bearing table, wherein the distance between the fifth detection position and the third detection position on the horizontal detection table is greater than a preset horizontal detection threshold value, and the distance between the fifth detection position and the fourth detection position on the horizontal detection table is greater than a preset horizontal detection threshold value; controlling the detection probe to shoot a fifth detection position image; obtaining a gray scale contrast value of the fifth detection position image according to the fifth detection position image; determining a third movement value of the fifth detection position according to the gray contrast value; and controlling a third horizontal adjusting piece to act according to the third moving value, so that the gray contrast value of a fifth detection position image shot by the detection probe is larger than the gray contrast threshold value.

Optionally, the horizontal detection table is installed in a horizontal detection area, the horizontal detection area is a closed space when the infrared detection assembly is subjected to flatness detection, the horizontal detection area is provided with a cooling hole, the cooling hole is connected with the refrigerator through a pipeline, the horizontal detection area includes a temperature detection device for detecting the temperature of the horizontal detection area, wherein before performing flatness detection on each infrared sensor chip, the method further includes: determining a detection mode for the infrared detection assembly, wherein the detection mode comprises a low-temperature detection mode and a normal-temperature detection mode; judging whether the detection mode is a low-temperature detection mode or not; if the detection mode is a low-temperature detection mode, controlling the refrigerator to work so as to cool the horizontal detection area; judging whether the temperature of the temperature detection device reaches a low-temperature preset value or not; and if the temperature reaches the low-temperature preset value, controlling the refrigerating machine to stop working.

Optionally, the horizontal detection area is further provided with an air exhaust hole, the air exhaust hole is connected with a vacuum pump through a pipeline, the horizontal detection area further includes an air pressure detector for detecting air pressure in the horizontal detection area, wherein after the step of controlling the refrigerator to stop cooling, the method further includes: controlling a vacuum pump to work so as to reduce the air pressure of the horizontal detection area; judging whether the air pressure detected by the air pressure detector reaches a low-temperature air pressure preset value or not; and if the air pressure detected by the air pressure detector reaches the low-temperature air pressure preset value, controlling the vacuum pump to stop working.

Optionally, if the detection mode is not the low-temperature detection mode, controlling a vacuum pump to work so as to reduce the air pressure of the horizontal detection area; judging whether the air pressure detected by the air pressure detector reaches a normal-temperature air pressure preset value or not; and if the air pressure detected by the air pressure detector reaches the preset value of the normal-temperature air pressure, controlling the vacuum pump to stop working.

In a second aspect, an embodiment of the present application further provides a level detection platform, where the level detection platform includes: the infrared detection device comprises a bearing table, a horizontal adjusting mechanism, a height control table and a height adjusting rod, wherein the bearing table is used for placing an infrared detection chip, the horizontal adjusting mechanism comprises a first horizontal adjusting piece, a second horizontal adjusting piece and a third horizontal adjusting piece, the upper part of the first horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the first horizontal adjusting piece is connected with the upper surface of the height control table; the upper part of the second horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the second horizontal adjusting piece is connected with the upper surface of the height control table; the upper part of the third horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the third horizontal adjusting piece is connected with the upper surface of the height control table; the height adjusting rod is connected with the height control platform, and the height control platform is driven to move in the vertical direction through the movement of the height adjusting rod so as to adjust the height of the height control platform.

Optionally, the level detection station further comprises: the height control platform comprises a first guide column, a second guide column, a third guide column and a position fixing piece, wherein the position fixing piece comprises a height adjusting rod mounting hole and three guide column mounting holes, the upper end of the first guide column is connected to a first guide column connecting point on the lower surface of the height control platform, and the lower end of the first guide column is fixed to a first target fixing point; the upper end of the second guide post is connected to a second guide post connecting point on the lower surface of the height control platform, and the lower end of the second guide post is fixed to a second target fixing point; the upper end of the third guide post is connected to a third guide post connecting point on the lower surface of the height control platform, and the lower end of the third guide post is fixed to a third target fixing point; the height adjusting rod penetrates through the height adjusting rod mounting hole of the position fixing piece, and the first guide post, the second guide post and the third guide post respectively penetrate through the three guide post mounting holes.

Optionally, the height adjusting rod comprises a height adjusting motor and a screw rod, the height adjusting platform further comprises a screw hole, an internal thread matched with the screw rod is arranged in the screw hole, one end of the screw rod penetrates through the height adjusting rod mounting hole to be connected with the height adjusting motor, the other end of the screw rod penetrates through the screw hole, the height adjusting motor rotates to drive the screw rod to rotate to control the height adjusting platform to move in the vertical direction, the first guide column comprises a first guide cylinder and a first sliding rod, a guide rail is mounted in the first guide cylinder, and the first sliding rod is driven by the height adjusting platform to move in the vertical direction along the guide rail; the second guide column comprises a second guide cylinder and a second sliding rod, a guide rail is installed in the second guide cylinder, and the second sliding rod is driven by the action of the height adjusting platform to move in the vertical direction along the guide rail; the third guide post comprises a third guide cylinder and a third sliding rod, a linear transmission shaft is installed in the third guide cylinder, and the third sliding rod is driven to move along the linear transmission shaft by the action of the height adjusting platform.

Optionally, the level detection station further comprises: the first horizontal adjusting part comprises a first connecting seat, a first control motor, a first connecting rod and a first telescopic rod, one end of the first telescopic rod is provided with a mounting hole which is in sliding connection with the sliding connecting end of the first connecting part, the fixed end of the first connecting part is fixed on the lower surface of the horizontal detection table corresponding to the third detection position, the other end of the first telescopic rod is connected with the control end of the first control motor, and the other end of the first control motor is connected with one end of the first connecting rod, the other end of the first connecting rod is rotatably connected with a connecting part of the first connecting seat, the bottom of the first connecting seat is connected with the height control platform, and the first control motor controls the third detection position to lift by controlling the extension and retraction of the first telescopic rod; the second horizontal adjusting piece comprises a second connecting seat, a second control motor, a second connecting rod and a second telescopic rod, one end of the second telescopic rod is provided with a mounting hole, the mounting hole is connected with the sliding connection end of the second connecting piece in a sliding manner, the fixed end of the second connecting piece is fixed on the lower surface of the horizontal detection table corresponding to a fourth detection position, the other end of the second telescopic rod is connected with the control end of the second control motor, the other end of the second control motor is connected with one end of the second connecting rod, the other end of the second connecting rod is rotatably connected with the connecting part of the second connecting seat, the bottom of the second connecting seat is connected with the height control table, and the second control motor controls the fourth detection position to ascend and descend by controlling the expansion and contraction of the second telescopic rod; the third horizontal adjusting part comprises a third connecting seat, a third control motor, a third connecting rod and a third telescopic rod, wherein one end of the third telescopic rod is provided with a mounting hole, the mounting hole is connected with the sliding connection end of the third connecting part, the fixed end of the third connecting part is fixed on the lower surface of a horizontal detection platform corresponding to the fifth detection position, the other end of the third telescopic rod is connected with the control end of the third control motor, the other end of the third control motor is connected with one end of the third connecting rod, the other end of the third connecting rod is rotatably connected with the connecting part of the third connecting seat, the bottom of the third connecting seat is connected with the height control platform, and the third control motor controls the fifth detection position to ascend and descend by controlling the expansion of the third telescopic rod.

In a third aspect, an embodiment of the present application further provides an electronic device, including: the device comprises a processor, a memory and a bus, wherein the memory stores machine readable instructions executable by the processor, the processor and the memory are communicated through the bus when the electronic device runs, and the machine readable instructions are executed by the processor to execute the steps of the flatness detection method of the infrared detection chip.

In a fourth aspect, the present application further provides a computer-readable storage medium, where a computer program is stored on the computer-readable storage medium, and when the computer program is executed by a processor, the method for detecting the flatness of the infrared detection chip as described above is performed.

The flatness detection method and the level detection platform for the infrared detection chip provided by the embodiment of the application can shoot images of a first detection position and a second detection position through the detection probe, and can calculate the shooting height value of the image with the maximum contrast value of the detection probe at the first detection position and the second detection position through the contrast values of a plurality of images of the first detection position and the second detection position, and further judge whether the infrared sensor chip is flat or not through the two height values. The problem of exist among the prior art can only carry out the detection slow, the accuracy is low that detect to infrared sensor chip through the manual work is solved, reach the effect that detects infrared sensor's roughness fast, accurately.

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.

Fig. 1 is a flowchart of a flatness detection method for an infrared detection chip according to an embodiment of the present disclosure;

fig. 2 is a flowchart of another method for detecting the flatness of an infrared detection chip according to an embodiment of the present disclosure;

fig. 3 is a schematic structural diagram of a level detection platform according to an embodiment of the present disclosure;

fig. 4 is a schematic diagram of an infrared sensor chip according to an embodiment of the present disclosure.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as presented in the figures, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. Every other embodiment that can be obtained by a person skilled in the art without making creative efforts based on the embodiments of the present application falls within the protection scope of the present application.

First, an application scenario to which the present application is applicable will be described. The method and the device can be applied to chip detection.

Research shows that the glass protective cover covers the surface of the infrared detection chip, so that flatness measurement cannot be carried out on each infrared sensor chip in the infrared detection chip by adopting the conventional laser ranging mode. The flatness of each infrared detection chip can be detected only in a manual measurement mode, and the detection efficiency is low and the accuracy is low.

Based on this, the embodiment of the application provides a flatness detection method of an infrared detection chip to reach the purpose of automatically detecting the flatness of each infrared sensor chip in the infrared detection chip, promote the detection progress and improve the detection efficiency.

Referring to fig. 1, fig. 1 is a flowchart illustrating a method for detecting a flatness of an infrared detection chip according to an embodiment of the present disclosure.

As shown in fig. 1, in the flatness detection method of an infrared detection chip provided by the embodiment of the present application, the infrared detection chip includes a plurality of infrared sensor chips, wherein the infrared detection chip further includes a mounting base and a protective glass, the upper surface of the mounting base is a mounting surface, the lower surface of the mounting base is a placement surface, the protective glass is installed above the plurality of infrared sensors, the protective glass forms a cavity with the mounting surface, the plurality of infrared sensor chips are adhered to the mounting surface, the plurality of infrared sensor chips are located in the cavity, and the placement surface contacts with a horizontal detection table.

Specifically, the level detection platform includes: the infrared detection device comprises a bearing table, a horizontal adjusting mechanism, a height control table and a height adjusting rod, wherein the bearing table is used for placing the infrared detection chip, the horizontal adjusting mechanism comprises a first horizontal adjusting piece, a second horizontal adjusting piece and a third horizontal adjusting piece, the upper part of the first horizontal adjusting piece is connected with the lower surface of the bearing table, the lower part of the first horizontal adjusting piece is connected with the height control table, and a connecting point of the upper part of the first horizontal adjusting piece and the lower surface of the bearing table is a connecting point corresponding to a third detection position on the upper surface of the bearing table; the upper part of the second horizontal adjusting piece is connected with the lower surface of the bearing table, the lower part of the second horizontal adjusting piece is connected with the height control table, and a connection point of the upper part of the second horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to a fourth detection position on the upper surface of the bearing table; the upper part of the third horizontal adjusting piece is connected with the lower surface of the bearing table, the lower part of the third horizontal adjusting piece is connected with the height control table, and a connection point of the upper part of the third horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to a fifth detection position on the upper surface of the bearing table; the height adjusting rod is connected with the height control platform, and the height of the height control platform is controlled through the action of the height adjusting rod.

The following flatness detection steps are performed for each infrared sensor chip:

s101, controlling the detection probe to move to a first shooting position of the infrared sensor chip.

The first shooting position is located right above the first detection position of the infrared sensor chip.

It should be noted that the detection probe is fixed on a sliding guide rail, the sliding guide rail is installed above the infrared detection chip, the sliding guide rail forms a high-precision movement mechanism, and the high-precision movement mechanism can drive the detection probe to move horizontally and vertically in the detection space.

The detection probe may be an image sensor, an exemplary detection probe may use a Charge Coupled Device (CCD) probe with a microscope system and a depth of field of 8 microns, the CCD probe is fixedly mounted on the sliding guide rail, and the position of the CCD probe is driven to move by the movement of the sliding guide rail.

Specifically, the infrared detection chip is placed on the horizontal detection platform, the position of the horizontal detection platform is fixed, the placement position of the infrared detection chip on the horizontal detection platform is also fixed, and the detection probe can be moved to the position right above the first detection position of the preset infrared sensor to detect the position to be detected of the infrared sensor.

Illustratively, as shown in fig. 4, each infrared sensor chip 401 is provided with a fixed first detection position 404 and a fixed second detection position 403, which are fixed relative to the infrared sensor chip 401, for example, the first detection position 402 may be provided at a distance of 10 micrometers, 15 micrometers, and 15 micrometers from the left adjacent side, the upper adjacent side, and the lower adjacent side of the infrared sensor chip 401, and the second detection position 402 may be provided at a distance of 10 micrometers, 15 micrometers, and 15 micrometers from the right adjacent side, the upper adjacent side, and the lower adjacent side of the infrared sensor chip 401.

Therefore, two detection positions can be limited, the distance between the two detection positions is ensured to meet the requirement of the flatness detection distance, and the flatness difference of the two detection positions of the infrared sensor chip, which cannot be detected due to the fact that the two detection positions are too close, is avoided.

For example, the server may control the guide rail to move the detection probe to a position directly above the fixed first detection position, and may also perform position detection on the infrared sensor chip to determine the first detection position.

Therefore, the sliding guide rail can move the detection probe to be right above the infrared detection chip.

S102, controlling the detection probe to move along the vertical direction, and controlling the detection probe to shoot a first detection position image every time the detection probe moves by a preset distance value.

In the step, the server drives the detection probe fixed on the sliding guide rail to move up and down by controlling the sliding guide rail to move up and down.

Specifically, in the process that the detection probe moves up and down in the vertical direction of the sliding guide rail, a first detection position image of one infrared sensor chip is shot every time the detection probe moves by a preset distance value, so that the detection probe can obtain images of a plurality of first detection positions.

For example, the preset distance value should be smaller than the depth of field of the detection probe, so that the detection probe can accurately determine the first detection position. For example, the preset distance value may be 4 micrometers.

Alternatively, the detection probe may be controlled to move from the first detection height to the second detection height in the vertical direction, and the detection probe may take one first detection position image every 4 micrometers of movement, wherein since the placement position and the height of the infrared detection chip are fixed, the position of the infrared sensor chip may be predicted, and also a position interval in which the detection probe may take the first detection position image of the maximum gray scale contrast may be predicted, and by controlling the detection probe to take the first detection position within the position interval, the first detection position image of the maximum gray scale contrast may be determined with a minimum number of first detection position images obtained.

S103, obtaining a first height value corresponding to the first detection position according to a plurality of first detection position images shot by the detection probe.

The first height value is the height of the detection probe when a first target image is shot, and the first target image is a first detection position image with the maximum gray scale contrast value in the multiple first detection position images.

Specifically, the step of obtaining a first height value corresponding to the first detection position according to a plurality of first detection position images captured by the detection probe includes: for each first position detection image, obtaining a first position detection gray level image corresponding to the first position detection image according to the first position detection image; aiming at each first position detection image, acquiring a plurality of gray values of a plurality of pixel points of a gray value extraction line in the first position detection gray image; calculating a gray scale contrast value of each first position detection image according to the plurality of gray scale values aiming at each first position detection image; calculating a maximum contrast value of the plurality of first detection position images among the plurality of contrast values of the plurality of first detection position images according to the gray scale contrast values of the plurality of first position detection images; and determining a first height of the detection probe when the first detection position image is shot according to the first detection position image corresponding to the maximum contrast value.

Wherein the step of calculating a contrast value of each first position detection image according to the plurality of gray values for each first position detection image comprises: aiming at each first position detection image, acquiring the highest gray value and the lowest gray value in the plurality of pixel points; calculating a difference value between the highest gray value and the lowest gray value of each first position detection image for each first position detection image; for each first position detection image, the difference value is determined as the contrast value of the first position detection image.

In this way, a first height at which the detection probe captures an image of the first target can be determined.

And S104, controlling the detection probe to move to a second shooting position of the infrared sensor chip.

The second shooting position is located right above a second detection position of the infrared sensor chip, and the distance value between the second detection position and the first detection position is larger than a preset detection position distance threshold value.

And S105, controlling the detection probe to move from a second position along the vertical direction, and controlling the detection probe to shoot a second detection position image every time the detection probe moves by a preset distance value.

And S106, obtaining a second height value corresponding to the second detection position according to the plurality of second detection position images shot by the detection probe.

The second height value is the height of the detection probe when a second target image is shot, and the second target image is a second detection position image with the maximum gray contrast value in the plurality of second detection position images.

The descriptions of S104 to S106 may refer to the descriptions of S101 to S103, and the same technical effects can be achieved, which are not described in detail.

And S107, determining the flatness of the infrared sensor chip according to the first height value and the second height value.

Specifically, the step of determining the flatness of the infrared sensor chip according to the first height value and the second height value includes: calculating a height difference value of the first height value and the second height value; judging whether the absolute value of the height difference is larger than a preset height difference threshold value or not; if the absolute value of the height difference is larger than the height difference threshold, determining that the infrared sensor chip is not flat; and if the absolute value of the height difference is not larger than the height difference threshold, determining that the infrared sensor chip is flat.

Therefore, whether the infrared sensor chip meets the flatness requirement or not can be judged.

It should be noted that, before the following flatness detection steps are performed for each infrared sensor chip, the flatness detection method for the infrared detection chip further includes: the method comprises the following steps of controlling a horizontal detection table to achieve the condition of detecting the flatness of an infrared detection chip in the following mode: controlling the detection probe to move to a third shooting position of the horizontal detection table, wherein the third shooting position is positioned right above the third detection position of the horizontal detection table; controlling the detection probe to shoot a third detection position image; obtaining a gray scale contrast value of the third detection position image according to the third detection position image; determining a first movement value of the third detection position according to the gray contrast value; controlling the height adjusting rod to act according to the first moving value so that the gray contrast value of a third detection position image shot by the detection probe is larger than a preset gray contrast threshold value; controlling the detection probe to move to a fourth shooting position of the horizontal detection table, wherein the fourth shooting position is positioned right above the fourth detection position of the horizontal detection table; controlling the detection probe to shoot a fourth detection position image; obtaining a gray scale contrast value of the fourth detection position image according to the fourth detection position image; determining a second movement value of the fourth detection position according to the gray contrast value; controlling a second horizontal adjusting piece to act according to the second moving value, so that the gray contrast value of a fourth detection position image shot by the detection probe is larger than the gray contrast threshold value; controlling the detection probe to move to a fifth shooting position of the horizontal detection table, wherein the fifth shooting position is positioned right above the fifth detection position of the horizontal detection table; controlling the detection probe to shoot a fifth detection position image; obtaining a gray scale contrast value of the fifth detection position image according to the fifth detection position image; determining a third movement value of the fifth detection position according to the gray contrast value; and controlling a third horizontal adjusting piece to act according to the third moving value, so that the gray contrast value of a fifth detection position image shot by the detection probe is larger than the gray contrast threshold value.

According to the flatness detection method of the infrared detection chip, images of the first detection position and the second detection position can be shot through the detection probe, the shooting height value of the image with the largest contrast value of the detection probe at the first detection position and the second detection position is calculated through the contrast values of the images of the first detection position and the second detection position, and whether the infrared sensor chip is flat or not is judged through the two height values. The problem of exist among the prior art can only carry out the detection slow, the accuracy is low that detect to infrared sensor chip through the manual work is solved, reach the effect that detects infrared sensor's roughness fast, accurately.

Referring to fig. 2, fig. 2 is a flowchart of another method for detecting a flatness of an infrared detection chip according to an embodiment of the present disclosure.

It should be noted that the horizontal detection table is installed in the horizontal detection area, the horizontal detection area is a closed space when the infrared detection assembly is subjected to flatness detection, the horizontal detection area is provided with a cooling hole, the cooling hole is connected with the refrigerator through a pipeline, and the horizontal detection area comprises a temperature detection device for detecting the temperature of the horizontal detection area.

The horizontal detection area is further provided with an air exhaust hole, the air exhaust hole is connected with a vacuum pump through a pipeline, and the horizontal detection area further comprises an air pressure detector for detecting the air pressure of the horizontal detection area.

As shown in fig. 2, before the following flatness detection steps are performed for each infrared sensor chip, the method for detecting the flatness of the infrared detection chip provided by the embodiment of the present application includes:

s201, determining the detection mode of the infrared detection assembly.

The detection mode comprises a low-temperature detection mode and a normal-temperature detection mode.

S202, judging whether the detection mode is a low-temperature detection mode.

If the detection mode is the low temperature detection mode, step S203 is executed to control the refrigerator to operate so as to cool the horizontal detection area.

For example, the refrigerator may be used to lower the temperature of the level detection area by increasing the power of the power supply of the refrigerator.

And step S204 is executed after step S203, and whether the detected temperature of the temperature detection device reaches a low-temperature preset value is judged.

For example, the temperature detection device may be a temperature measuring diode, and the voltage value of the temperature measuring diode is detected by a digital voltmeter, and when the voltage value of the temperature measuring diode is detected to exceed 1.033 volts, it is determined that the temperature value in the horizontal detection area reaches 94 kelvin.

And if the detected temperature reaches the low-temperature preset value, executing the step S205 and controlling the refrigerator to stop working.

After step S205, step S206 is performed to control the vacuum pump to operate to reduce the air pressure in the level detection area.

Illustratively, the vacuum pump may be a molecular pump.

After step S206, step S207 is executed to determine whether the air pressure detected by the air pressure detector reaches the low-temperature air pressure preset value.

Illustratively, the low temperature gas pressure preset value may be (e-4) Pa.

And if the air pressure detected by the air pressure detector reaches the low-temperature air pressure preset value, executing the step S208 and controlling the vacuum pump to stop working.

If the detection mode is not the low temperature detection mode, step S209 is executed to control the vacuum pump to work to reduce the air pressure in the horizontal detection area.

After step S209, step S210 is executed to determine whether the air pressure detected by the air pressure detector reaches the normal temperature air pressure preset value.

Illustratively, the preset value of the atmospheric pressure may be (e-3) Pa.

If the air pressure detected by the air pressure detector reaches the low-temperature air pressure preset value, step S211 is executed to control the vacuum pump to stop working.

Therefore, the flatness of the infrared detection chip in vacuum, low-temperature and normal-temperature environments can be obtained by controlling the air pressure value and the temperature value in the horizontal detection area.

Referring to fig. 3, fig. 3 is a schematic structural diagram of a horizontal inspection table according to an embodiment of the present disclosure. As shown in fig. 3, the level detection station includes: the device comprises a bearing table 31, a horizontal adjusting mechanism, a height control table 34 and a height adjusting rod 351, wherein the bearing table 31 is used for placing the infrared detection chip.

The horizontal adjustment mechanism includes a first horizontal adjustment member 33, a second horizontal adjustment member, and a third horizontal adjustment member.

The upper part of the first horizontal adjusting piece 33 is connected with the lower surface of the bearing table 31, the lower part of the first horizontal adjusting piece 33 is connected with the height control table 34, and the upper part of the first horizontal adjusting piece 33 is connected with a first connecting point on the lower surface of the bearing table 31, wherein the first connecting point is a connecting point corresponding to a third detection position on the upper surface of the bearing table;

the upper part of the second horizontal adjusting piece is connected with the lower surface of the bearing table, the lower part of the second horizontal adjusting piece is connected with the height control table, the upper part of the second horizontal adjusting piece is connected with a second connection point of the lower surface of the bearing table, and the second connection point is a connection point corresponding to a fourth detection position on the upper surface of the bearing table; the upper part of the third horizontal adjusting piece is connected with the lower surface of the bearing table, the lower part of the third horizontal adjusting piece is connected with the height control table, the upper part of the third horizontal adjusting piece is connected with a third connecting point of the lower surface of the bearing table, and the third connecting point is a connecting point corresponding to a fifth detection position on the upper surface of the bearing table; the height adjusting rod is connected with the height control platform, and the height of the height control platform is controlled through the action of the height adjusting rod.

As shown in fig. 3, the level detecting station further includes: a first guide post 36, a second guide post, a third guide post and a position fixing member 37, wherein the position fixing member 37 comprises a height adjusting rod mounting hole (not shown) and three guide post mounting holes (not shown).

Wherein the upper end of the first guide post 36 is connected to a first guide post connection point of the lower surface of the height control stage, and the lower portion of the first guide post is connected to the bottom of the horizontal detection area.

The upper end of the second guide post is connected to a second guide post connection point on the lower surface of the height control platform, and the lower portion of the second guide post is connected to the bottom of the horizontal detection area.

The upper end of the third guide post is connected to a third guide post connection point on the lower surface of the height control platform, and the lower portion of the third guide post is connected to the bottom of the horizontal detection area.

The height adjustment lever 351 passes through the height adjustment lever mounting hole of the position fixing member 37, and the first guide post, the second guide post and the third guide post pass through the three guide post mounting holes, respectively.

As shown in fig. 3, the height adjustment rod 351 includes a height adjustment motor 352 and a screw, the height adjustment stage 34 further includes a screw hole 38, an internal thread matching with the screw is disposed in the screw hole 38, the screw is connected to the height adjustment motor 352 and passes through the screw hole 38, and the height adjustment motor 352 rotates to drive the screw to rotate to control the movement of the height adjustment stage 34.

The first guiding column includes a first guiding cylinder 362 and a first sliding rod 361, a linear transmission shaft (not shown in the figure) is installed in the first guiding cylinder 362, and the first sliding rod 361 is driven by the action of the height adjusting platform 34 to move along the linear transmission shaft.

The second guide column comprises a second guide cylinder and a second sliding rod, a linear transmission shaft is installed in the second guide cylinder, and the second sliding rod is driven to move along the linear transmission shaft by the action of the height adjusting platform;

the third guide post comprises a third guide cylinder and a third sliding rod, a linear transmission shaft is installed in the third guide cylinder, and the third sliding rod is driven to move along the linear transmission shaft by the action of the height adjusting platform.

As shown in fig. 3, the level detection station further includes: the first horizontal adjusting member 33 includes a first connecting seat 333, a first control motor 332, a first connecting rod 334 and a first telescopic rod 331.

Wherein the first connector 32 includes a first connector fixed end and a first connector sliding connection end, the second connector includes a second connector fixed end and a second connector sliding connection end, and the third connector includes a third connector fixed end and a third connector sliding connection end.

Wherein, the one end of first telescopic link 331 is provided with the mounting hole, above-mentioned mounting hole and first connecting piece sliding connection end sliding connection, and the lower surface at plummer 31 that corresponds with the third detection position is fixed to the first connecting piece stiff end, and the other end of first telescopic link 331 is connected with first control motor 332's control end, first control motor's the other end is connected with the one end of head rod 334, the other end of head rod 334 and the connecting portion rotatable coupling of first connecting seat 333, and the bottom of first connecting seat 333 is connected with height control platform 34, and first control motor 332 controls the third detection position through the flexible of control first telescopic link 331 and goes up and down.

The second horizontal adjusting piece comprises a second connecting seat, a second control motor, a second connecting rod and a second telescopic rod, one end of the second telescopic rod is provided with a mounting hole, the mounting hole is connected with the sliding connection end of the second connecting piece in a sliding manner, the fixed end of the second connecting piece is fixed on the lower surface of a bearing platform corresponding to the fourth detection position, the other end of the second telescopic rod is connected with the control end of the second control motor, the other end of the second control motor is connected with one end of the second connecting rod, the other end of the second connecting rod is connected with the connecting part of the second connecting seat in a rotatable manner, the bottom of the second connecting seat is connected with a height control platform, the second control motor is telescopic by controlling the second telescopic rod, and the fourth detection position is controlled to lift.

The third horizontal adjusting piece comprises a third connecting seat, a third control motor, a third connecting rod and a third telescopic rod, one end of the third telescopic rod is provided with a mounting hole, the mounting hole is connected with the sliding connection end of the third connecting piece in a sliding mode, the fixed end of the third connecting piece is fixed to the lower surface of the bearing table corresponding to the fifth detection position, the other end of the third telescopic rod is connected with the control end of the third control motor, the other end of the third control motor is connected with one end of the third connecting rod, the other end of the third connecting rod is connected with the connecting portion of the third connecting seat in a rotatable mode, the bottom of the third connecting seat is connected with the height control table, the third control motor controls the third telescopic rod to stretch and retract, and the fifth detection position is controlled to lift.

An embodiment of the present application further provides a computer-readable storage medium, where a computer program is stored on the computer-readable storage medium, and when the computer program is executed by a processor, the steps of the flatness detection method for an infrared detection chip in the method embodiments shown in fig. 1 and fig. 2 may be executed.

It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.

In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other ways. The above-described apparatus embodiments are merely illustrative, and for example, the division of the units into only one type of logical function may be implemented in other ways, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not implemented. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.

The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.

In addition, functional units in the embodiments of the present application may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit.

The functions, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a non-volatile computer-readable storage medium executable by a processor. Based on such understanding, the technical solution of the present application or portions thereof that substantially contribute to the prior art may be embodied in the form of a software product stored in a storage medium and including instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present application. And the aforementioned storage medium includes: various media capable of storing program codes, such as a usb disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk, or an optical disk.

Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present application, and are used to illustrate the technical solutions of the present application, but not to limit the technical solutions, and the scope of the present application is not limited to the above-mentioned embodiments, although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope disclosed in the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present application and are intended to be covered by the appended claims. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. The flatness detection method of the infrared detection chip is characterized in that the infrared detection chip comprises a plurality of infrared sensor chips, and the following flatness detection steps are executed for each infrared sensor chip:

controlling a detection probe to move to a first shooting position of the infrared sensor chip, wherein the first shooting position is positioned right above a first detection position of the infrared sensor chip;

controlling the detection probe to move from a first detection position along the vertical direction, and controlling the detection probe to shoot a first detection position image every time the detection probe moves by a preset distance value;

obtaining a first height value corresponding to a first detection position according to a plurality of first detection position images shot by the detection probe, wherein the first height value is the height of the detection probe when a first target image is shot, and the first target image is a first detection position image with the maximum gray contrast value in the plurality of first detection position images;

controlling the detection probe to move to a second shooting position of the infrared sensor chip, wherein the second shooting position is positioned right above a second detection position of the infrared sensor chip, and the distance value between the second detection position and the first detection position is larger than a preset detection position distance threshold value;

controlling the detection probe to move from a second position along the vertical direction, and controlling the detection probe to shoot a second detection position image every time the detection probe moves by a preset distance value;

obtaining a second height value corresponding to a second detection position according to a plurality of second detection position images shot by the detection probe, wherein the second height value is the height of the detection probe when a second target image is shot, and the second target image is a second detection position image with the maximum gray contrast value in the plurality of second detection position images;

and determining the flatness of the infrared sensor chip according to the first height value and the second height value.

2. The method according to claim 1, wherein the infrared detection chip further comprises a mounting base and a cover glass, wherein the upper surface of the mounting base is a mounting surface, the lower surface of the mounting base is a placing surface,

the protective glass is arranged above the infrared sensors, a cavity is formed between the protective glass and the mounting surface, the infrared sensor chips are located in the cavity and are adhered to the mounting surface, and the mounting surface is in contact with the target mounting table.

3. The method of claim 1, wherein the step of obtaining a first height value corresponding to the first detection position from a plurality of first detection position images captured by the detection probe comprises:

for each first position detection image, obtaining a first position detection gray level image corresponding to the first position detection image according to the first position detection image;

aiming at each first position detection image, acquiring gray values of a plurality of pixel points of a gray value extraction line in the first position detection gray image;

aiming at each first position detection image, calculating a gray contrast value of the first position detection image according to the gray values of the plurality of pixel points;

calculating a maximum gray contrast value of the plurality of first position detection images among the gray contrast values of the plurality of first position detection images according to the gray contrast values of the plurality of first position detection images;

and determining a first height of the detection probe when the first position detection image is shot according to the first position detection image corresponding to the maximum gray contrast value.

4. The method of claim 3, wherein the step of calculating the gray scale contrast value of each first position detection image according to the gray scale values of the plurality of pixel points comprises, for each first position detection image:

aiming at each first position detection image, acquiring the highest gray value and the lowest gray value in the gray values of the plurality of pixel points;

calculating a difference value between the highest gray value and the lowest gray value of the first position detection image for each first position detection image;

and determining the difference value as the gray scale contrast value of each first position detection image.

5. The method of claim 1, wherein determining the flatness of the infrared sensor chip based on the first and second height values comprises:

calculating a height difference value of the first height value and the second height value;

judging whether the absolute value of the height difference is larger than a preset height difference threshold value or not;

if the absolute value of the height difference is larger than the height difference threshold, determining that the infrared sensor chip is not flat;

and if the absolute value of the height difference is not larger than the height difference threshold, determining that the infrared sensor chip is flat.

6. The method of claim 1, wherein the infrared detection chip is placed on a level detection stage, the level detection stage comprising: the device comprises a bearing platform, a horizontal adjusting mechanism, a height control platform and a height adjusting rod, wherein the bearing platform is used for placing the infrared detection chip, the horizontal adjusting mechanism comprises a first horizontal adjusting piece, a second horizontal adjusting piece and a third horizontal adjusting piece,

the upper part of the first horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the first horizontal adjusting piece is connected with the upper surface of the height control table;

the upper part of the second horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the second horizontal adjusting piece is connected with the upper surface of the height control table;

the upper part of the third horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the third horizontal adjusting piece is connected with the upper surface of the height control table;

the height adjusting rod is connected with the height control platform, and the height control platform is driven to move in the vertical direction through the movement of the height adjusting rod so as to adjust the height of the height control platform;

wherein, before the flatness detecting step is performed for each infrared sensor chip, the method further comprises: leveling the level detection table,

wherein, level to the level detection platform through following mode:

controlling the detection probe to move to a third shooting position of the horizontal detection table, wherein the third shooting position is positioned right above the third detection position of the horizontal detection table, and a connection point of the upper part of the first horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the third detection position on the upper surface of the bearing table;

controlling the detection probe to shoot a third detection position image;

obtaining a gray scale contrast value of the third detection position image according to the third detection position image;

determining a first movement value of the third detection position according to the gray contrast value;

controlling the height adjusting rod to act according to the first moving value so that the gray contrast value of a third detection position image shot by the detection probe is larger than a preset gray contrast threshold value;

the detection probe is controlled to move to a fourth shooting position of the horizontal detection table, the fourth shooting position is located right above the fourth detection position of the horizontal detection table, a connection point of the upper portion of the second horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the fourth detection position on the upper surface of the bearing table, and the distance between the fourth detection position and the third detection position on the horizontal detection table is larger than a preset horizontal detection distance threshold value;

controlling the detection probe to shoot a fourth detection position image;

obtaining a gray scale contrast value of the fourth detection position image according to the fourth detection position image;

determining a second movement value of the fourth detection position according to the gray contrast value;

controlling a second horizontal adjusting piece to act according to the second moving value, so that the gray contrast value of a fourth detection position image shot by the detection probe is larger than the gray contrast threshold value;

controlling the detection probe to move to a fifth shooting position of the horizontal detection table, wherein the fifth shooting position is positioned right above a fifth detection position of the horizontal detection table, and a connection point of the upper part of the third horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the fifth detection position on the upper surface of the bearing table, wherein the distance between the fifth detection position and the third detection position on the horizontal detection table is greater than a preset horizontal detection threshold value, and the distance between the fifth detection position and the fourth detection position on the horizontal detection table is greater than a preset horizontal detection threshold value;

controlling the detection probe to shoot a fifth detection position image;

obtaining a gray scale contrast value of the fifth detection position image according to the fifth detection position image;

determining a third movement value of the fifth detection position according to the gray contrast value;

and controlling a third horizontal adjusting piece to act according to the third moving value, so that the gray contrast value of a fifth detection position image shot by the detection probe is larger than the gray contrast threshold value.

7. The method according to claim 6, wherein the level detection station is installed in a level detection area, the level detection area is a closed space when the infrared detection assembly is subjected to flatness detection, the level detection area is provided with a cooling hole, the cooling hole is connected with the refrigerator through a pipeline, the level detection area comprises a temperature detection device for detecting the temperature of the level detection area,

wherein, before performing flatness detection for each infrared sensor chip, the method further comprises:

determining a detection mode for the infrared detection assembly, wherein the detection mode comprises a low-temperature detection mode and a normal-temperature detection mode;

judging whether the detection mode is a low-temperature detection mode or not;

if the detection mode is a low-temperature detection mode, controlling the refrigerator to work so as to cool the horizontal detection area;

judging whether the temperature of the temperature detection device reaches a low-temperature preset value or not;

and if the temperature reaches the low-temperature preset value, controlling the refrigerating machine to stop working.

8. The method according to claim 7, wherein the horizontal detection area is further provided with an air suction hole connected to a vacuum pump through a pipe, the horizontal detection area further comprises an air pressure detector for detecting air pressure of the horizontal detection area,

wherein after the step of controlling the refrigerator to stop the cooling operation, the method further comprises:

controlling a vacuum pump to work so as to reduce the air pressure of the horizontal detection area;

judging whether the air pressure detected by the air pressure detector reaches a low-temperature air pressure preset value or not;

and if the air pressure detected by the air pressure detector reaches the low-temperature air pressure preset value, controlling the vacuum pump to stop working.

9. The method of claim 8, further comprising:

if the detection mode is not the low-temperature detection mode, controlling the vacuum pump to work so as to reduce the air pressure of the horizontal detection area;

judging whether the air pressure detected by the air pressure detector reaches a normal-temperature air pressure preset value or not;

and if the air pressure detected by the air pressure detector reaches the preset value of the normal-temperature air pressure, controlling the vacuum pump to stop working.

10. A level detection station, comprising: a bearing platform, a horizontal adjusting mechanism, a height control platform and a height adjusting rod,

wherein the bearing table is used for placing an infrared detection chip, the horizontal adjusting mechanism comprises a first horizontal adjusting piece, a second horizontal adjusting piece and a third horizontal adjusting piece,

the height adjusting rod is connected with the height control platform, and the height control platform is driven to move in the vertical direction through the movement of the height adjusting rod so as to adjust the height of the height control platform.

11. The level detection station of claim 10, further comprising: a first guide post, a second guide post, a third guide post and a position fixing piece, wherein the position fixing piece comprises a height adjusting rod mounting hole and three guide post mounting holes,

the upper end of the first guide post is connected to a first guide post connection point on the lower surface of the height control platform, and the lower end of the first guide post is fixed to a first target fixing point;

the upper end of the second guide post is connected to a second guide post connecting point on the lower surface of the height control platform, and the lower end of the second guide post is fixed to a second target fixing point;

the upper end of the third guide post is connected to a third guide post connecting point on the lower surface of the height control platform, and the lower end of the third guide post is fixed to a third target fixing point;

the height adjusting rod penetrates through a height adjusting rod mounting hole of the position fixing piece, and the first guide column, the second guide column and the third guide column penetrate through three guide column mounting holes respectively.

12. The level detection table according to claim 11, wherein the height adjustment rod comprises a height adjustment motor and a screw rod, the height adjustment table further comprises a screw hole, an internal thread matched with the screw rod is arranged in the screw hole, one end of the screw rod penetrates through the height adjustment rod mounting hole to be connected with the height adjustment motor, the other end of the screw rod penetrates through the screw hole, and the height adjustment motor rotates to drive the screw rod to rotate to control the height adjustment table to move in the vertical direction;

the first guide column comprises a first guide cylinder and a first sliding rod, a guide rail is installed in the first guide cylinder, and the first sliding rod is driven by the action of the height adjusting platform to move in the vertical direction along the guide rail;

the second guide column comprises a second guide cylinder and a second sliding rod, a guide rail is installed in the second guide cylinder, and the second sliding rod is driven by the action of the height adjusting platform to move in the vertical direction along the guide rail;

13. The level detection station of claim 10, further comprising: the first connecting piece comprises a first connecting piece fixing end and a first connecting piece sliding connecting end, the second connecting piece comprises a second connecting piece fixing end and a second connecting piece sliding connecting end, the third connecting piece comprises a third connecting piece fixing end and a third connecting piece sliding connecting end,

the first horizontal adjusting piece comprises a first connecting seat, a first control motor, a first connecting rod and a first telescopic rod, a mounting hole is formed in one end of the first telescopic rod, the mounting hole is connected with the sliding connecting end of the first connecting piece in a sliding mode, the fixed end of the first connecting piece is fixed to the lower surface of the bearing table corresponding to a third detection position, the other end of the first telescopic rod is connected with the control end of the first control motor, the other end of the first control motor is connected with one end of the first connecting rod, the other end of the first connecting rod is rotatably connected with the connecting portion of the first connecting seat, the bottom of the first connecting seat is connected with the height control table, and the first control motor controls the third detection position to ascend and descend by controlling the expansion and contraction of the first telescopic rod;

the second horizontal adjusting piece comprises a second connecting seat, a second control motor, a second connecting rod and a second telescopic rod, one end of the second telescopic rod is provided with a mounting hole, the mounting hole is connected with the sliding connection end of the second connecting piece in a sliding manner, the fixed end of the second connecting piece is fixed on the lower surface of the bearing table corresponding to a fourth detection position, the other end of the second telescopic rod is connected with the control end of the second control motor, the other end of the second control motor is connected with one end of the second connecting rod, the other end of the second connecting rod is rotatably connected with the connecting part of the second connecting seat, the bottom of the second connecting seat is connected with the height control table, and the second control motor controls the fourth detection position to ascend and descend by controlling the expansion and contraction of the second telescopic rod;

third horizontal adjustment spare includes the third connecting seat, third control motor, third connecting rod and third telescopic link, the one end of third telescopic link is provided with the mounting hole, the mounting hole with third connecting piece sliding connection end sliding connection, the lower surface at the plummer that corresponds with fifth detection position is fixed to third connecting piece stiff end, the other end of third telescopic link is connected with the control end of third control motor, the other end of third control motor is connected with the one end of third connecting rod, the other end of third connecting rod and the connecting portion rotatable coupling of third connecting seat, the bottom of third connecting seat with the height control platform is connected, and third control motor is through the flexible of control third telescopic link, control the fifth detection position goes up and down.