CN114754707B

CN114754707B - Flatness detection method and level detection table for infrared detection chip

Info

Publication number: CN114754707B
Application number: CN202210404454.XA
Authority: CN
Inventors: 高慧莹; 左宁; 裴兵全
Original assignee: Beijing Semiconductor Equipment Institute
Current assignee: Beijing Semiconductor Equipment Institute
Priority date: 2022-04-18
Filing date: 2022-04-18
Publication date: 2024-01-30
Anticipated expiration: 2042-04-18
Also published as: CN114754707A

Abstract

The application provides a flatness detection method and a horizontal detection table of an infrared detection chip, wherein the method comprises the following steps: controlling the detection probe to move to a first shooting position of the infrared sensor chip; controlling the detection probe to move along the vertical direction from the first detection position, and controlling the detection probe to shoot a first detection position image every time a preset distance value is moved; obtaining a first height value corresponding to a first detection position according to a plurality of first detection position images shot by the detection probe; controlling the detection probe to move to a second shooting position of the infrared sensor chip; controlling the detection probe to move from the second position along the vertical direction, and controlling the detection probe to shoot a second detection position image every time the detection probe moves by a preset distance value; obtaining a second height value corresponding to a second detection position according to a plurality of second detection position images shot by the detection probe; and determining the flatness according to the first height value and the second height value. The effect of rapidly and accurately detecting the flatness is achieved.

Description

Flatness detection method and level detection table for infrared detection chip

Technical Field

The application relates to the technical field of chip detection, in particular to a flatness detection method and a level detection table of an infrared detection chip.

Background

The infrared detection chip adopts a precise splicing method, a plurality of infrared sensor chips are combined into one infrared detection chip for infrared detection, and a transparent protective film is covered on the surface of the infrared detection chip to protect the infrared sensor chips on the surface of the infrared detection chip. In the actual splicing process, the infrared sensor needs to be adhered to the infrared detection chip through glue, in the process of gluing fixation, the adhesion unevenness of the infrared sensor chip is easily caused due to the difference of the gluing position and the using amount, the image of infrared detection is further influenced, and the phenomena of image distortion detection or tearing and the like occur.

Because the surface of the infrared detection chip is covered with the glass protection cover, the flatness of each infrared sensor chip cannot be measured by using the existing laser ranging mode. At present, the flatness detection of the infrared sensor chip is detected manually, and only the infrared sensor chip can be subjected to spot check, so that the detection speed is low and the accuracy is low.

Disclosure of Invention

In view of the foregoing, an object of the present application is to provide a flatness detection method and a level detection table for an infrared detection chip, which can shoot images of a first detection position and a second detection position through a detection probe, calculate a shooting height value of an image with the largest contrast value of the detection probe at the first detection position and the second detection position through contrast values of a plurality of first detection position images and second detection position images, and further judge whether the infrared sensor chip is flat or not through two height values. The problem that the detection speed is low and the accuracy is low only through manual detection of the infrared sensor chip in the prior art is solved, and the effect of detecting the flatness of the infrared sensor rapidly and accurately is achieved.

In a first aspect, an embodiment of the present application provides a flatness detection method of an infrared detection chip, where the infrared detection chip includes a plurality of infrared sensor chips, and the following flatness detection steps are performed for each of the infrared sensor chips: controlling a detection probe to move to a first shooting position of the infrared sensor chip, wherein the first shooting position is positioned right above the first detection position of the infrared sensor chip; controlling the detection probe to move along the vertical direction from a first detection position, and controlling the detection probe to shoot a first detection position image every time a preset distance value is moved; obtaining a first height value corresponding to the first detection position according to a plurality of first detection position images shot by the detection probe, wherein the first height value is the height of the detection probe when a first target image is shot, and the first target image is a first detection position image with the maximum gray contrast value in the plurality of first detection position images; controlling the detection probe to move to a second shooting position of the infrared sensor chip, wherein the second shooting position is positioned right above a second detection position of the infrared sensor chip, and the distance value between the second detection position and the first detection position is larger than a preset detection position distance threshold; controlling the detection probe to move along the vertical direction from the second position, and controlling the detection probe to shoot a second detection position image every time a preset distance value is moved; obtaining a second height value corresponding to the second detection position according to a plurality of second detection position images shot by the detection probe, wherein the second height value is the height of the detection probe when a second target image is shot, and the second target image is a second detection position image with the maximum gray contrast value in the plurality of second detection position images; and determining the flatness of the infrared sensor chip according to the first height value and the second height value.

Optionally, the infrared detection chip further includes a mounting base and a protective glass, the upper surface of the mounting base is a mounting surface, the lower surface of the mounting base is a placing surface, the protective glass is mounted above the plurality of infrared sensors, the protective glass and the mounting surface form a cavity, the plurality of infrared sensor chips are located in the cavity and are adhered to the mounting surface, and the placing surface is in contact with the target placing table.

Optionally, the step of obtaining a first height value corresponding to the first detection position according to a plurality of first detection position images shot by the detection probe includes: for each first position detection image, obtaining a first position detection gray level image corresponding to the first position detection image according to the first position detection image; for each first position detection image, acquiring gray values of a plurality of pixel points of a gray value extraction row in the first position detection gray image; for each first position detection image, calculating a gray contrast value of the first position detection image according to the gray values of the plurality of pixel points; calculating a maximum gray-scale contrast value of the plurality of first position detection images from the gray-scale contrast values of the plurality of first position detection images according to the gray-scale contrast values of the plurality of first position detection images; and determining a first height of the detection probe when the first position detection image is shot according to the first position detection image corresponding to the maximum gray contrast value.

Optionally, for each first position detection image, the step of calculating the gray contrast value of each first position detection image according to the gray values of the plurality of pixel points includes: detecting an image for each first position, and acquiring the highest gray value and the lowest gray value in gray values of the plurality of pixel points; calculating a difference value of the highest gray value and the lowest gray value of the first position detection image for each first position detection image; for each first position detection image, the difference value is determined as a gray contrast value of the first position detection image.

Optionally, the step of determining the flatness of the infrared sensor chip according to the first height value and the second height value includes: calculating a height difference between the first height value and the second height value; judging whether the absolute value of the height difference value is larger than a preset height difference value threshold value or not; if the absolute value of the height difference value is larger than the height difference value threshold value, determining that the infrared sensor chip is uneven; and if the absolute value of the height difference value is not greater than the height difference threshold value, determining that the infrared sensor chip is flat.

Optionally, the infrared detection chip is placed on a horizontal detection stage, and the horizontal detection stage comprises: the infrared detection device comprises a bearing table, a horizontal adjusting mechanism, a height control table and a height adjusting rod, wherein the bearing table is used for placing the infrared detection chip, the horizontal adjusting mechanism comprises a first horizontal adjusting piece, a second horizontal adjusting piece and a third horizontal adjusting piece, the upper part of the first horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the first horizontal adjusting piece is connected with the upper surface of the height control table; the upper part of the second horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the second horizontal adjusting piece is connected with the upper surface of the height control table; the upper part of the third horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the third horizontal adjusting piece is connected with the upper surface of the height control table; the height adjusting rod is connected with the height control console, and the height control console is driven to move in the vertical direction through the movement of the height adjusting rod so as to adjust the height of the height control console; wherein, before the flatness detection step is performed for each infrared sensor chip, the method further comprises: leveling the horizontal inspection station, wherein the horizontal inspection station is leveled by: controlling the detection probe to move to a third shooting position of the horizontal detection table, wherein the third shooting position is positioned right above the third detection position of the horizontal detection table, and the connection point between the upper part of the first horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the third detection position on the upper surface of the bearing table; controlling the detection probe to shoot a third detection position image; obtaining a gray contrast value of the third detection position image according to the third detection position image; determining a first movement value of the third detection position according to the gray contrast value; controlling the action of the height adjusting rod according to the first moving value so that the gray contrast value of the image of the third detection position shot by the detection probe is larger than a preset gray contrast threshold; controlling the detection probe to move to a fourth shooting position of the horizontal detection table, wherein the fourth shooting position is positioned right above the fourth detection position of the horizontal detection table, and a connection point of the upper part of the second horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the fourth detection position on the upper surface of the bearing table, wherein the distance between the fourth detection position and the third detection position on the horizontal detection table is larger than a preset horizontal detection distance threshold value; controlling the detection probe to shoot a fourth detection position image; obtaining a gray contrast value of the fourth detection position image according to the fourth detection position image; determining a second movement value of the fourth detection position according to the gray contrast value; controlling a second horizontal adjusting piece to act according to the second movement value so that the gray contrast value of the fourth detection position image shot by the detection probe is larger than the gray contrast threshold; controlling the detection probe to move to a fifth shooting position of the horizontal detection table, wherein the fifth shooting position is positioned right above the fifth detection position of the horizontal detection table, and a connection point of the upper part of the third horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the fifth detection position on the upper surface of the bearing table, wherein the distance between the fifth detection position and the third detection position on the horizontal detection table is larger than a preset horizontal detection threshold value, and the distance between the fifth detection position and the fourth detection position on the horizontal detection table is larger than a preset horizontal detection threshold value; controlling the detection probe to shoot a fifth detection position image; obtaining a gray contrast value of the fifth detection position image according to the fifth detection position image; determining a third movement value of the fifth detection position according to the gray contrast value; and controlling the third horizontal adjusting piece to act according to the third movement value so that the gray contrast value of the fifth detection position image shot by the detection probe is larger than the gray contrast threshold.

Optionally, the level detection platform is installed in a level detection area, the level detection area is a closed space when the flatness detection is performed on the infrared detection assembly, the level detection area is provided with a cooling hole, the cooling hole is connected with the refrigerator through a pipeline, the level detection area comprises a temperature detection device for detecting the temperature of the level detection area, wherein before the flatness detection is performed on each infrared sensor chip, the method further comprises: determining a detection mode aiming at the infrared detection assembly, wherein the detection mode comprises a low-temperature detection mode and a normal-temperature detection mode; judging whether the detection mode is a low-temperature detection mode or not; if the detection mode is a low-temperature detection mode, controlling the refrigerator to work so as to cool the horizontal detection area; judging whether the temperature of the temperature detection device reaches a low-temperature preset value or not; and if the temperature reaches a low-temperature preset value, controlling the refrigerator to stop working.

Optionally, the horizontal detection area is further provided with an air pumping hole, the air pumping hole is connected with the vacuum pump through a pipeline, the horizontal detection area further comprises an air pressure detector for detecting air pressure of the horizontal detection area, wherein after the step of controlling the refrigerator to stop cooling operation, the method further comprises: controlling the vacuum pump to work so as to reduce the air pressure of the horizontal detection area; judging whether the air pressure detected by the air pressure detector reaches a low-temperature air pressure preset value; and if the air pressure detected by the air pressure detector reaches a low-temperature air pressure preset value, controlling the vacuum pump to stop working.

Optionally, if the detection mode is not the low temperature detection mode, controlling the vacuum pump to work so as to reduce the air pressure of the horizontal detection area; judging whether the air pressure detected by the air pressure detector reaches a normal-temperature air pressure preset value; and if the air pressure detected by the air pressure detector reaches a normal-temperature air pressure preset value, controlling the vacuum pump to stop working.

In a second aspect, embodiments of the present application further provide a level detection stand, the level detection stand comprising: the infrared detection device comprises a bearing table, a horizontal adjusting mechanism, a height control table and a height adjusting rod, wherein the bearing table is used for placing an infrared detection chip, the horizontal adjusting mechanism comprises a first horizontal adjusting piece, a second horizontal adjusting piece and a third horizontal adjusting piece, the upper part of the first horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the first horizontal adjusting piece is connected with the upper surface of the height control table; the upper part of the second horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the second horizontal adjusting piece is connected with the upper surface of the height control table; the upper part of the third horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the third horizontal adjusting piece is connected with the upper surface of the height control table; the height adjusting rod is connected with the height control console, and the height control console is driven to move in the vertical direction through the movement of the height adjusting rod so as to adjust the height of the height control console.

Optionally, the horizontal detection stage further comprises: the device comprises a first guide column, a second guide column, a third guide column and a position fixing piece, wherein the position fixing piece comprises a height adjusting rod mounting hole and three guide column mounting holes, the upper end of the first guide column is connected to a first guide column connecting point on the lower surface of the height control console, and the lower end of the first guide column is fixed to a first target fixing point; a second guide post connection point at which an upper end of the second guide post is connected to a lower surface of the height control console, the lower end of the second guide post being fixed to a second target fixed point; a third steering column connection point at which an upper end of the third steering column is connected to a lower surface of the height control console, the lower end of the third steering column being fixed to a third target fixed point; the height adjusting rod penetrates through the height adjusting rod mounting hole of the position fixing piece, and the first guide column, the second guide column and the third guide column penetrate through the three guide column mounting holes respectively.

Optionally, the height adjusting rod comprises a height adjusting motor and a screw rod, the height adjusting table further comprises a screw hole, an internal thread matched with the screw rod is arranged in the screw hole, one end of the screw rod passes through the height adjusting rod mounting hole and is connected with the height adjusting motor, the other end of the screw rod passes through the screw hole, the height adjusting motor rotates to drive the screw rod to rotate so as to control the height adjusting table to move in the vertical direction, the first guide column comprises a first guide cylinder and a first sliding rod, a guide rail is arranged in the first guide cylinder, and the first sliding rod is driven by the action of the height adjusting table to move along the guide rail in the vertical direction; the second guide column comprises a second guide cylinder and a second sliding rod, a guide rail is arranged in the second guide cylinder, and the second sliding rod is driven to move along the guide rail in the vertical direction by the action of the height adjusting table; the third guide column comprises a third guide cylinder and a third sliding rod, a linear transmission shaft is arranged in the third guide cylinder, and the action of the height adjusting table drives the third sliding rod to move along the linear transmission shaft.

Optionally, the horizontal detection stage further comprises: the first connecting piece comprises a first connecting piece fixed end and a first connecting piece sliding connection end, the second connecting piece comprises a second connecting piece fixed end and a second connecting piece sliding connection end, the third connecting piece comprises a third connecting piece fixed end and a third connecting piece sliding connection end, the first horizontal adjusting piece comprises a first connecting seat, a first control motor, a first connecting rod and a first telescopic rod, one end of the first telescopic rod is provided with a mounting hole, the mounting hole is in sliding connection with the first connecting piece sliding connection end, the first connecting piece fixed end is fixed on the lower surface of a horizontal detection table corresponding to a third detection position, the other end of the first telescopic rod is connected with the control end of the first control motor, the other end of the first control motor is connected with one end of the first connecting rod, the other end of the first connecting rod is rotatably connected with a connecting part of the first connecting seat, the bottom of the first connecting seat is connected with the height control table, and the first telescopic rod passes through the first control motor to detect the lifting position; the second horizontal adjusting piece comprises a second connecting seat, a second control motor, a second connecting rod and a second telescopic rod, wherein one end of the second telescopic rod is provided with a mounting hole, the mounting hole is in sliding connection with the sliding connection end of the second connecting piece, the fixed end of the second connecting piece is fixed on the lower surface of a horizontal detection table corresponding to a fourth detection position, the other end of the second telescopic rod is connected with the control end of the second control motor, the other end of the second control motor is connected with one end of the second connecting rod, the other end of the second connecting rod is rotatably connected with the connecting part of the second connecting seat, the bottom of the second connecting seat is connected with the height control table, and the second control motor controls the lifting of the fourth detection position by controlling the expansion and the contraction of the second telescopic rod; the third horizontal adjusting piece comprises a third connecting seat, a third control motor, a third connecting rod and a third telescopic rod, wherein one end of the third telescopic rod is provided with a mounting hole, the mounting hole is in sliding connection with the sliding connection end of the third connecting piece, the fixed end of the third connecting piece is fixed on the lower surface of the horizontal detection table corresponding to a fifth detection position, the other end of the third telescopic rod is connected with the control end of the third control motor, the other end of the third control motor is connected with one end of the third connecting rod, the other end of the third connecting rod is rotatably connected with the connecting part of the third connecting seat, the bottom of the third connecting seat is connected with the height control table, and the third control motor is used for controlling the lifting of the fifth detection position through controlling the expansion and contraction of the third telescopic rod.

In a third aspect, embodiments of the present application further provide an electronic device, including: the system comprises a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, the processor and the memory are communicated through the bus when the electronic device runs, and the machine-readable instructions are executed by the processor to execute the steps of the flatness detection method of the infrared detection chip.

In a fourth aspect, embodiments of the present application further provide a computer readable storage medium having a computer program stored thereon, the computer program when executed by a processor performing the steps of the method for detecting flatness of an infrared detection chip as described above.

According to the flatness detection method and the flatness detection table for the infrared detection chip, the detection probe can shoot images of the first detection position and the second detection position, the shooting height value of the image with the largest contrast value of the detection probe at the first detection position and the second detection position is calculated through the contrast values of the images of the first detection position and the images of the second detection position, and whether the infrared sensor chip is flat or not is judged through the two height values. The problem that the detection speed is low and the accuracy is low only through manual detection of the infrared sensor chip in the prior art is solved, and the effect of detecting the flatness of the infrared sensor rapidly and accurately is achieved.

In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered limiting the scope, and that other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a flowchart of a flatness detection method of an infrared detection chip provided in an embodiment of the present application;

fig. 2 is a flowchart of another flatness detection method of an infrared detection chip according to an embodiment of the present application;

fig. 3 is a schematic structural diagram of a horizontal detecting table according to an embodiment of the present disclosure;

fig. 4 is a schematic diagram of an infrared sensor chip according to an embodiment of the present application.

Detailed Description

For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. Based on the embodiments of the present application, every other embodiment that a person skilled in the art would obtain without making any inventive effort is within the scope of protection of the present application.

First, application scenarios applicable to the present application will be described. The method and the device can be applied to chip detection.

According to the research, as the glass protection cover is covered on the surface of the infrared detection chip, the flatness measurement of each infrared sensor chip in the infrared detection chip cannot be performed in the existing laser ranging mode. The flatness of each infrared detection chip can be detected only through a manual measurement mode, and the detection efficiency is low and the accuracy is low.

Based on this, the embodiment of the application provides a flatness detection method of an infrared detection chip, so as to achieve the purpose of automatically detecting the flatness of each infrared sensor chip in the infrared detection chip, improve the detection progress and improve the detection efficiency.

Referring to fig. 1, fig. 1 is a flowchart of a flatness detection method of an infrared detection chip according to an embodiment of the present application.

As shown in fig. 1, in the flatness detection method of the infrared detection chip provided by the embodiment of the application, the infrared detection chip includes a plurality of infrared sensor chips, wherein the infrared detection chip further includes a mounting base and a protective glass, the upper surface of the mounting base is a mounting surface, the lower surface of the mounting base is a placement surface, the protective glass is mounted above the plurality of infrared sensors, the protective glass and the mounting surface form a cavity, the plurality of infrared sensor chips are adhered to the mounting surface, the plurality of infrared sensor chips are located in the cavity, and the placement surface is contacted with a horizontal detection table.

Specifically, the level detection station includes: the infrared detection device comprises a bearing table, a horizontal adjusting mechanism, a height control table and a height adjusting rod, wherein the bearing table is used for placing the infrared detection chip, the horizontal adjusting mechanism comprises a first horizontal adjusting piece, a second horizontal adjusting piece and a third horizontal adjusting piece, the upper portion of the first horizontal adjusting piece is connected with the lower surface of the bearing table, the lower portion of the first horizontal adjusting piece is connected with the height control table, and a connection point of the upper portion of the first horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to a third detection position on the upper surface of the bearing table; the upper part of the second horizontal adjusting piece is connected with the lower surface of the bearing table, the lower part of the second horizontal adjusting piece is connected with the height control table, and the connection point of the upper part of the second horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to a fourth detection position on the upper surface of the bearing table; the upper part of the third horizontal adjusting piece is connected with the lower surface of the bearing table, the lower part of the third horizontal adjusting piece is connected with the height control table, and the connection point of the upper part of the third horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to a fifth detection position on the upper surface of the bearing table; the height adjusting rod is connected with the height control console, and the height of the height control console is controlled through the action of the height adjusting rod.

The following flatness detection steps are performed for each infrared sensor chip:

s101, controlling the detection probe to move to a first shooting position of the infrared sensor chip.

Wherein the first photographing position is located right above a first detection position of the infrared sensor chip.

It should be noted that, the detection probe is fixed on the sliding guide rail, the sliding guide rail is installed above the infrared detection chip, the sliding guide rail forms a high-precision motion mechanism, and the high-precision motion mechanism can drive the detection probe to translate and move up and down in the detection space.

The detection probe can be an image sensor, an exemplary detection probe can use a CCD (charge coupled device ) probe with a depth of field of 8 micrometers of a microscope system, the CCD probe is fixedly arranged on a sliding guide rail, and the position of the CCD probe is driven to move through the movement of the sliding guide rail.

Specifically, the infrared detection chip is placed on the horizontal detection table, the position of the horizontal detection table is fixed, the placement position of the infrared detection chip on the horizontal detection table is also fixed, and the detection probe can move to the position right above a preset first detection position of the infrared sensor to detect the position to be detected of the infrared sensor.

Illustratively, as shown in fig. 4, each of the infrared sensor chips 401 is provided with a fixed first detection position 404 and a second detection position 403 which are relatively fixed to the infrared sensor chip 401, for example, the first detection position 402 may be provided 10 micrometers from the left adjacent side, 15 micrometers from the upper adjacent side, 15 micrometers from the lower adjacent side of the infrared sensor chip 401, and the second detection position 402 may be provided 10 micrometers from the right adjacent side, 15 micrometers from the upper adjacent side, 15 micrometers from the lower adjacent side of the infrared sensor chip 401.

Therefore, two detection positions can be limited, the distance between the two detection positions is ensured to meet the requirement of flatness detection distance, and flatness difference between the two detection positions of the infrared sensor chip can not be detected due to the fact that the two detection positions are too close.

The server may control the guide rail to move the detection probe to a position right above the fixed first detection position, or may perform position detection on the infrared sensor chip to determine the first detection position.

Thus, the sliding guide rail can move the detection probe to the position right above the infrared detection chip.

S102, controlling the detection probe to move along the vertical direction, and controlling the detection probe to shoot a first detection position image every time a preset distance value is moved.

In the step, the server drives the detection probe fixed on the sliding guide rail to move up and down by controlling the sliding guide rail to move up and down.

Specifically, in the process that the detection probe moves up and down in the vertical direction of the sliding guide rail, each time a preset distance value is moved, a first detection position image of one infrared sensor chip is shot, and therefore the detection probe can obtain a plurality of images of the first detection positions.

The preset distance value should be smaller than the depth of field of the detection probe, so that the detection probe can accurately determine the first detection position. For example, the preset distance value may be 4 microns.

Alternatively, the detection probe may be controlled to move from the first detection height to the second detection height in the vertical direction, and one first detection position image may be captured every 4 micrometers of movement of the detection probe, where, since the placement position and the height of the infrared detection chip are fixed, the position of the infrared sensor chip may be predicted, that is, a position interval in which the detection probe may capture the first detection position image with the maximum gray-scale contrast may be predicted, and by controlling the detection probe to capture the first detection position in the above-mentioned position interval, the first detection position image with the maximum gray-scale contrast may be determined with the minimum number of first detection position images obtained.

S103, obtaining a first height value corresponding to the first detection position according to a plurality of first detection position images shot by the detection probe.

The first height value is the height of the detection probe when the first target image is shot, and the first target image is a first detection position image with the largest gray contrast value in the plurality of first detection position images.

Specifically, the step of obtaining a first height value corresponding to the first detection position according to a plurality of first detection position images shot by the detection probe includes: for each first position detection image, obtaining a first position detection gray level image corresponding to the first position detection image according to the first position detection image; for each first position detection image, acquiring a plurality of gray values of a plurality of pixel points of a gray value extraction row in the first position detection gray image; calculating a gray contrast value of each first position detection image according to the gray values for each first position detection image; calculating a maximum contrast value of a plurality of first detection position images from the plurality of contrast values of the plurality of first detection position images according to the gray contrast values of the plurality of first position detection images; and determining a first height of the detection probe when the first detection position image is shot according to the first detection position image corresponding to the maximum contrast value.

Wherein for each first position detection image, the step of calculating the contrast value of each first position detection image from the plurality of gray values comprises: detecting an image for each first position, and acquiring the highest gray value and the lowest gray value in the plurality of pixel points; calculating a difference value of the highest gray value and the lowest gray value of each first position detection image for each first position detection image; for each first position detection image, the difference value is determined as a contrast value of the first position detection image.

Thus, a first height at which the detection probe captures a first target image can be determined.

And S104, controlling the detection probe to move to a second shooting position of the infrared sensor chip.

The second shooting position is located right above a second detection position of the infrared sensor chip, and a distance value between the second detection position and the first detection position is larger than a preset detection position distance threshold.

S105, controlling the detection probe to move from the second position along the vertical direction, and controlling the detection probe to shoot a second detection position image every time a preset distance value is moved.

S106, obtaining a second height value corresponding to the second detection position according to a plurality of second detection position images shot by the detection probe.

The second height value is the height of the detection probe when a second target image is shot, and the second target image is a second detection position image with the largest gray contrast value in a plurality of second detection position images.

The descriptions of S104 to S106 may refer to the descriptions of S101 to S103, and the same technical effects can be achieved, which will not be described in detail.

And S107, determining the flatness of the infrared sensor chip according to the first height value and the second height value.

Specifically, the step of determining the flatness of the infrared sensor chip according to the first height value and the second height value includes: calculating a height difference between the first height value and the second height value; judging whether the absolute value of the height difference value is larger than a preset height difference value threshold value or not; if the absolute value of the height difference value is larger than the height difference value threshold value, determining that the infrared sensor chip is uneven; and if the absolute value of the height difference value is not greater than the height difference threshold value, determining that the infrared sensor chip is flat.

Thus, whether the infrared sensor chip meets the flatness requirement can be judged.

It should be noted that, before the following flatness detection steps are performed for each infrared sensor chip, the flatness detection method of the infrared sensor chip further includes: the horizontal detection table is controlled to achieve the condition of detecting the flatness of the infrared detection chip by the following modes: controlling the detection probe to move to a third shooting position of the horizontal detection table, wherein the third shooting position is positioned right above the third detection position of the horizontal detection table; controlling the detection probe to shoot a third detection position image; obtaining a gray contrast value of the third detection position image according to the third detection position image; determining a first movement value of the third detection position according to the gray contrast value; controlling the action of the height adjusting rod according to the first moving value so that the gray contrast value of the image of the third detection position shot by the detection probe is larger than a preset gray contrast threshold; controlling the detection probe to move to a fourth shooting position of the horizontal detection table, wherein the fourth shooting position is positioned right above the fourth detection position of the horizontal detection table; controlling the detection probe to shoot a fourth detection position image; obtaining a gray contrast value of the fourth detection position image according to the fourth detection position image; determining a second movement value of the fourth detection position according to the gray contrast value; controlling a second horizontal adjusting piece to act according to the second movement value so that the gray contrast value of the fourth detection position image shot by the detection probe is larger than the gray contrast threshold; controlling the detection probe to move to a fifth shooting position of the horizontal detection table, wherein the fifth shooting position is positioned right above the fifth detection position of the horizontal detection table; controlling the detection probe to shoot a fifth detection position image; obtaining a gray contrast value of the fifth detection position image according to the fifth detection position image; determining a third movement value of the fifth detection position according to the gray contrast value; and controlling the third horizontal adjusting piece to act according to the third movement value so that the gray contrast value of the fifth detection position image shot by the detection probe is larger than the gray contrast threshold.

According to the flatness detection method for the infrared detection chip, the detection probe can shoot images of the first detection position and the second detection position, the shooting height value of the image with the largest contrast value of the detection probe at the first detection position and the second detection position is calculated through the contrast values of the images of the first detection position and the images of the second detection position, and whether the infrared sensor chip is flat or not is judged through the two height values. The problem that the detection speed is low and the accuracy is low only through manual detection of the infrared sensor chip in the prior art is solved, and the effect of detecting the flatness of the infrared sensor rapidly and accurately is achieved.

Referring to fig. 2, fig. 2 is a flowchart of another flatness detection method for an infrared detection chip according to an embodiment of the present application.

It should be noted that, the level detection platform is installed in the level detection region, the level detection region is right when infrared detection subassembly carries out the roughness and detects for airtight space, the level detection region is provided with the cooling hole, the cooling hole passes through the pipeline and is connected with the refrigerator, the level detection region includes temperature-detecting device for detect the temperature of level detection region.

The horizontal detection area is further provided with an air suction hole, the air suction hole is connected with the vacuum pump through a pipeline, and the horizontal detection area further comprises an air pressure detector for detecting air pressure of the horizontal detection area.

As shown in fig. 2, before performing the following flatness detection steps for each infrared sensor chip, the flatness detection method for an infrared sensor chip provided in the embodiment of the present application includes:

s201, determining a detection mode of the infrared detection assembly.

Wherein the detection mode includes a low temperature detection mode and a normal temperature detection mode.

S202, judging whether the detection mode is a low-temperature detection mode.

If the detection mode is a low temperature detection mode, step S203 is executed to control the refrigerator to operate so as to cool the horizontal detection area.

Illustratively, the refrigerator may be cooled down to the level detection area by increasing the refrigerator's power supply.

Step S204 is performed after step S203, and it is determined whether the detected temperature of the temperature detecting device reaches a low temperature preset value.

The temperature detection device may be a temperature detection diode, and detects the voltage value of the temperature detection diode through a digital voltmeter, and when detecting that the voltage value of the temperature detection diode exceeds 1.033 volts, the temperature value in the horizontal detection area is determined to reach 94 kelvin.

If the detected temperature reaches the low temperature preset value, step S205 is executed to control the refrigerator to stop working.

After step S205, step S206 is performed to control the vacuum pump to operate so as to reduce the air pressure of the level detection area.

The vacuum pump may be a molecular pump, for example.

After step S206, step S207 is performed to determine whether the air pressure detected by the air pressure detector reaches a low-temperature air pressure preset value.

The low temperature barometric pressure preset value may be (e-4) Pa, for example.

If the air pressure detected by the air pressure detector reaches the low-temperature air pressure preset value, step S208 is executed to control the vacuum pump to stop working.

If the detection mode is not the low temperature detection mode, step S209 is executed to control the vacuum pump to operate so as to reduce the air pressure in the horizontal detection area.

After step S209, step S210 is performed to determine whether the air pressure detected by the air pressure detector reaches a normal temperature air pressure preset value.

For example, the normal temperature air pressure preset value may be (e-3) Pa.

If the air pressure detected by the air pressure detector reaches the low-temperature air pressure preset value, step S211 is executed to control the vacuum pump to stop working.

Therefore, the flatness of the infrared detection chip in vacuum and in low-temperature and normal-temperature environments can be obtained through controlling the air pressure value and the temperature value in the horizontal detection area.

Referring to fig. 3, fig. 3 is a schematic structural diagram of a horizontal detecting table according to an embodiment of the present application. As shown in fig. 3, the level detection stage includes: the infrared detection chip comprises a bearing table 31, a horizontal adjusting mechanism, a height control table 34 and a height adjusting rod 351, wherein the bearing table 31 is used for placing the infrared detection chip.

The leveling mechanism includes a first leveling member 33, a second leveling member, and a third leveling member.

The upper part of the first horizontal adjusting member 33 is connected with the lower surface of the bearing table 31, the lower part of the first horizontal adjusting member 33 is connected with the height control table 34, and the upper part of the first horizontal adjusting member 33 is connected with a first connecting point of the lower surface of the bearing table 31, wherein the first connecting point is a connecting point corresponding to a third detection position on the upper surface of the bearing table;

The upper part of the second horizontal adjusting piece is connected with the lower surface of the bearing table, the lower part of the second horizontal adjusting piece is connected with the height control table, the upper part of the second horizontal adjusting piece is connected with a second connecting point of the lower surface of the bearing table, and the second connecting point is a connecting point corresponding to a fourth detection position on the upper surface of the bearing table; the upper part of the third horizontal adjusting piece is connected with the lower surface of the bearing table, the lower part of the third horizontal adjusting piece is connected with the height control table, and a third connecting point of the upper part of the third horizontal adjusting piece and the lower surface of the bearing table is a connecting point corresponding to a fifth detection position on the upper surface of the bearing table; the height adjusting rod is connected with the height control console, and the height of the height control console is controlled through the action of the height adjusting rod.

As shown in fig. 3, the horizontal inspection station further includes: the first guide post 36, the second guide post, the third guide post, and the position fixing member 37 includes a height adjustment lever mounting hole (not shown) and three guide post mounting holes (not shown).

Wherein an upper end of the first guide post 36 is connected to a first guide post connection point of a lower surface of the height control console, and a lower portion of the first guide post is connected to a bottom of the horizontal detection area.

The upper end of the second guide post is connected to a second guide post connecting point of the lower surface of the height control console, and the lower part of the second guide post is connected to the bottom of the horizontal detection area.

The upper end of the third guide post is connected to a third guide post connection point of the lower surface of the height control console, and the lower part of the third guide post is connected to the bottom of the horizontal detection area.

The height adjusting rod 351 passes through the height adjusting rod mounting holes of the position fixing member 37, and the first, second and third guide posts pass through the three guide post mounting holes, respectively.

As shown in fig. 3, the height adjusting rod 351 includes a height adjusting motor 352 and a screw, the height adjusting table 34 further includes a screw hole 38, an internal thread matching with the screw is provided in the screw hole 38, the screw is connected with the height adjusting motor 352 and passes through the screw hole 38, and the height adjusting motor 352 rotates to drive the screw to rotate to control the movement of the height adjusting table 34.

The first guide column comprises a first guide cylinder 362 and a first sliding rod 361, a linear transmission shaft (not shown in the figure) is installed in the first guide cylinder 362, and the first sliding rod 361 is driven to move along the linear transmission shaft by the action of the height adjusting table 34.

The second guide column comprises a second guide cylinder and a second sliding rod, a linear transmission shaft is arranged in the second guide cylinder, and the second sliding rod is driven to move along the linear transmission shaft by the action of the height adjusting table;

the third guide column comprises a third guide cylinder and a third sliding rod, a linear transmission shaft is arranged in the third guide cylinder, and the movement of the height adjusting table drives the third sliding rod to move along the linear transmission shaft.

As shown in fig. 3, the horizontal inspection station further includes: the first horizontal adjusting member 33 includes a first connection seat 333, a first control motor 332, a first connection rod 334, and a first telescopic rod 331.

Wherein, the first connector 32 includes a first connector fixed end and a first connector sliding connection end, the second connector includes a second connector fixed end and a second connector sliding connection end, and the third connector includes a third connector fixed end and a third connector sliding connection end.

Wherein, the one end of first telescopic link 331 is provided with the mounting hole, above-mentioned mounting hole and first connecting piece sliding connection end sliding connection, and first connecting piece fixed end is fixed at the lower surface of plummer 31 that corresponds with the third detection position, and the other end of first telescopic link 331 is connected with the control end of first control motor 332, the other end of first control motor is connected with the one end of head rod 334, and the other end of head rod 334 is rotatable with the connecting portion of first connecting seat 333 and is connected, and the bottom of first connecting seat 333 is connected with altitude control platform 34, and first control motor 332 is through the flexible of control first telescopic link 331, and the control third detection position goes up and down.

The second horizontal adjusting piece comprises a second connecting seat, a second control motor, a second connecting rod and a second telescopic rod, wherein one end of the second telescopic rod is provided with a mounting hole, the mounting hole is in sliding connection with a sliding connection end of the second connecting piece, the fixed end of the second connecting piece is fixed on the lower surface of a bearing table corresponding to a fourth detection position, the other end of the second telescopic rod is connected with the control end of the second control motor, the other end of the second control motor is connected with one end of the second connecting rod, the other end of the second connecting rod is rotatably connected with the connecting part of the second connecting seat, the bottom of the second connecting seat is connected with a height control table, and the second control motor is used for controlling the lifting of the fourth detection position through controlling the telescopic rod.

The third horizontal adjusting piece comprises a third connecting seat, a third control motor, a third connecting rod and a third telescopic rod, wherein one end of the third telescopic rod is provided with a mounting hole, the mounting hole is in sliding connection with a sliding connection end of the third connecting piece, the fixed end of the third connecting piece is fixed on the lower surface of a bearing table corresponding to a fifth detection position, the other end of the third telescopic rod is connected with the control end of the third control motor, the other end of the third control motor is connected with one end of the third connecting rod, the other end of the third connecting rod is rotatably connected with the connecting part of the third connecting seat, the bottom of the third connecting seat is connected with a height control table, and the third control motor is used for controlling the lifting of the fifth detection position through controlling the expansion and contraction of the third telescopic rod.

The embodiment of the present application further provides a computer readable storage medium, where a computer program is stored on the computer readable storage medium, and when the computer program is executed by a processor, the steps of the method for detecting the flatness of the infrared detection chip in the method embodiments shown in fig. 1 and fig. 2 may be executed, and a specific implementation manner may refer to the method embodiments and will not be described herein.

It will be clear to those skilled in the art that, for convenience and brevity of description, specific working procedures of the above-described systems, apparatuses and units may refer to corresponding procedures in the foregoing method embodiments, and are not repeated herein.

In the several embodiments provided in this application, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of the units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.

The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

In addition, each functional unit in each embodiment of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit.

The functions, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a non-volatile computer readable storage medium executable by a processor. Based on such understanding, the technical solution of the present application may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution, in the form of a software product stored in a storage medium, including several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods described in the embodiments of the present application. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (Random Access Memory, RAM), a magnetic disk, or an optical disk, or other various media capable of storing program codes.

Finally, it should be noted that: the foregoing examples are merely specific embodiments of the present application, and are not intended to limit the scope of the present application, but the present application is not limited thereto, and those skilled in the art will appreciate that while the foregoing examples are described in detail, the present application is not limited thereto. Any person skilled in the art may modify or easily conceive of the technical solution described in the foregoing embodiments, or make equivalent substitutions for some of the technical features within the technical scope of the disclosure of the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application, and are intended to be included in the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. The flatness detection method of the infrared detection chip is characterized in that the infrared detection chip comprises a plurality of infrared sensor chips, and the following flatness detection steps are executed for each infrared sensor chip:

controlling a detection probe to move to a first shooting position of the infrared sensor chip, wherein the first shooting position is positioned right above the first detection position of the infrared sensor chip;

Controlling the detection probe to move along the vertical direction from a first detection position, and controlling the detection probe to shoot a first detection position image every time a preset distance value is moved;

obtaining a first height value corresponding to the first detection position according to a plurality of first detection position images shot by the detection probe, wherein the first height value is the height of the detection probe when a first target image is shot, and the first target image is a first detection position image with the maximum gray contrast value in the plurality of first detection position images;

controlling the detection probe to move to a second shooting position of the infrared sensor chip, wherein the second shooting position is positioned right above a second detection position of the infrared sensor chip, and the distance value between the second detection position and the first detection position is larger than a preset detection position distance threshold;

controlling the detection probe to move along the vertical direction from the second position, and controlling the detection probe to shoot a second detection position image every time a preset distance value is moved;

obtaining a second height value corresponding to the second detection position according to a plurality of second detection position images shot by the detection probe, wherein the second height value is the height of the detection probe when a second target image is shot, and the second target image is a second detection position image with the maximum gray contrast value in the plurality of second detection position images;

Determining the flatness of the infrared sensor chip according to the first height value and the second height value;

wherein, infrared detection chip is placed on the horizontal detection platform, the horizontal detection platform includes: the bearing platform is used for placing the infrared detection chip, the horizontal adjusting mechanism comprises a first horizontal adjusting piece, a second horizontal adjusting piece and a third horizontal adjusting piece,

the upper part of the first horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the first horizontal adjusting piece is connected with the upper surface of the height control table;

the upper part of the second horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the second horizontal adjusting piece is connected with the upper surface of the height control table;

the upper part of the third horizontal adjusting piece is connected with the lower surface of the bearing table, and the lower part of the third horizontal adjusting piece is connected with the upper surface of the height control table;

the height adjusting rod is connected with the height control console, and the height control console is driven to move in the vertical direction through the movement of the height adjusting rod so as to adjust the height of the height control console;

Wherein, before the flatness detection step is performed for each infrared sensor chip, the method further comprises: leveling the horizontal detection table,

wherein the leveling of the level detection station is performed by:

controlling the detection probe to move to a third shooting position of the horizontal detection table, wherein the third shooting position is positioned right above the third detection position of the horizontal detection table, and the connection point between the upper part of the first horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the third detection position on the upper surface of the bearing table;

controlling the detection probe to shoot a third detection position image;

obtaining a gray contrast value of the third detection position image according to the third detection position image;

determining a first movement value of the third detection position according to the gray contrast value;

controlling the action of the height adjusting rod according to the first moving value so that the gray contrast value of the image of the third detection position shot by the detection probe is larger than a preset gray contrast threshold;

controlling the detection probe to move to a fourth shooting position of the horizontal detection table, wherein the fourth shooting position is positioned right above the fourth detection position of the horizontal detection table, and a connection point of the upper part of the second horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the fourth detection position on the upper surface of the bearing table, wherein the distance between the fourth detection position and the third detection position on the horizontal detection table is larger than a preset horizontal detection distance threshold value;

Controlling the detection probe to shoot a fourth detection position image;

obtaining a gray contrast value of the fourth detection position image according to the fourth detection position image;

determining a second movement value of the fourth detection position according to the gray contrast value;

controlling a second horizontal adjusting piece to act according to the second movement value so that the gray contrast value of the fourth detection position image shot by the detection probe is larger than the gray contrast threshold;

controlling the detection probe to move to a fifth shooting position of the horizontal detection table, wherein the fifth shooting position is positioned right above the fifth detection position of the horizontal detection table, and a connection point of the upper part of the third horizontal adjusting piece and the lower surface of the bearing table is a connection point corresponding to the fifth detection position on the upper surface of the bearing table, wherein the distance between the fifth detection position and the third detection position on the horizontal detection table is larger than a preset horizontal detection threshold value, and the distance between the fifth detection position and the fourth detection position on the horizontal detection table is larger than a preset horizontal detection threshold value;

controlling the detection probe to shoot a fifth detection position image;

obtaining a gray contrast value of the fifth detection position image according to the fifth detection position image;

Determining a third movement value of the fifth detection position according to the gray contrast value;

and controlling the third horizontal adjusting piece to act according to the third movement value so that the gray contrast value of the fifth detection position image shot by the detection probe is larger than the gray contrast threshold.

2. The method of claim 1, wherein the infrared detection chip further comprises a mounting base and a cover glass, an upper surface of the mounting base is a mounting surface, a lower surface of the mounting base is a placement surface,

the protective glass is arranged above the plurality of infrared sensors, the protective glass and the mounting surface form a cavity, the plurality of infrared sensor chips are positioned in the cavity and adhered on the mounting surface, and the placing surface is contacted with the target placing table.

3. The method of claim 1, wherein the step of obtaining a first height value corresponding to the first detection position from a plurality of first detection position images captured by the detection probe comprises:

for each first position detection image, obtaining a first position detection gray level image corresponding to the first position detection image according to the first position detection image;

For each first position detection image, acquiring gray values of a plurality of pixel points of a gray value extraction row in the first position detection gray image;

for each first position detection image, calculating a gray contrast value of the first position detection image according to the gray values of the plurality of pixel points;

calculating a maximum gray-scale contrast value of the plurality of first position detection images from the gray-scale contrast values of the plurality of first position detection images according to the gray-scale contrast values of the plurality of first position detection images;

and determining a first height of the detection probe when the first position detection image is shot according to the first position detection image corresponding to the maximum gray contrast value.

4. A method according to claim 3, wherein for each first position detection image, the step of calculating a gray contrast value for each first position detection image from the gray values of the plurality of pixel points comprises:

detecting an image for each first position, and acquiring the highest gray value and the lowest gray value in gray values of the plurality of pixel points;

calculating a difference value of the highest gray value and the lowest gray value of the first position detection image for each first position detection image;

For each first position detection image, the difference value is determined as a gray contrast value of the first position detection image.

5. The method of claim 1, wherein determining the flatness of the infrared sensor chip based on the first and second height values comprises:

calculating a height difference between the first height value and the second height value;

judging whether the absolute value of the height difference value is larger than a preset height difference value threshold value or not;

if the absolute value of the height difference value is larger than the height difference value threshold value, determining that the infrared sensor chip is uneven;

and if the absolute value of the height difference value is not greater than the height difference threshold value, determining that the infrared sensor chip is flat.

6. The method according to claim 1, wherein the horizontal detection stage is installed in a horizontal detection area which is a closed space when flatness detection is performed on the infrared detection assembly, the horizontal detection area is provided with a cooling hole, the cooling hole is connected with a refrigerator through a pipeline, the horizontal detection area comprises a temperature detection device for detecting the temperature of the horizontal detection area,

Wherein, before performing flatness detection for each infrared sensor chip, the method further comprises:

determining a detection mode aiming at the infrared detection assembly, wherein the detection mode comprises a low-temperature detection mode and a normal-temperature detection mode;

judging whether the detection mode is a low-temperature detection mode or not;

if the detection mode is a low-temperature detection mode, controlling the refrigerator to work so as to cool the horizontal detection area;

judging whether the temperature of the temperature detection device reaches a low-temperature preset value or not;

and if the temperature reaches a low-temperature preset value, controlling the refrigerator to stop working.

7. The method of claim 6, wherein the horizontal detection area is further provided with a suction hole connected to a vacuum pump through a pipe, the horizontal detection area further comprises a barometric pressure detector for detecting a barometric pressure of the horizontal detection area,

wherein, after the step of controlling the refrigerator to stop the cooling operation, the method further comprises:

controlling the vacuum pump to work so as to reduce the air pressure of the horizontal detection area;

judging whether the air pressure detected by the air pressure detector reaches a low-temperature air pressure preset value;

and if the air pressure detected by the air pressure detector reaches a low-temperature air pressure preset value, controlling the vacuum pump to stop working.

8. The method of claim 7, wherein the method further comprises:

if the detection mode is not the low-temperature detection mode, controlling the vacuum pump to work so as to reduce the air pressure of the horizontal detection area;

judging whether the air pressure detected by the air pressure detector reaches a normal-temperature air pressure preset value;

and if the air pressure detected by the air pressure detector reaches a normal-temperature air pressure preset value, controlling the vacuum pump to stop working.

9. The method of claim 1, wherein the level detection stage further comprises: the first guide column, the second guide column, the third guide column and the position fixing piece, wherein the position fixing piece comprises a height adjusting rod mounting hole and three guide column mounting holes,

a first steering column connection point at which an upper end of the first steering column is connected to a lower surface of the height control console, the lower end of the first steering column being fixed to a first target fixed point;

a second guide post connection point at which an upper end of the second guide post is connected to a lower surface of the height control console, the lower end of the second guide post being fixed to a second target fixed point;

a third steering column connection point at which an upper end of the third steering column is connected to a lower surface of the height control console, the lower end of the third steering column being fixed to a third target fixed point;

The height adjusting rod penetrates through the height adjusting rod mounting hole of the position fixing piece, and the first guide column, the second guide column and the third guide column penetrate through the three guide column mounting holes respectively.

10. The method according to claim 9, wherein the height adjusting rod comprises a height adjusting motor and a screw rod, the height control console further comprises a screw hole, an internal thread matched with the screw rod is arranged in the screw hole, one end of the screw rod passes through the height adjusting rod mounting hole to be connected with the height adjusting motor, the other end of the screw rod passes through the screw hole, and the rotation of the height adjusting motor drives the screw rod to rotate so as to control the height control console to move in the vertical direction;

the first guide column comprises a first guide cylinder and a first sliding rod, a guide rail is arranged in the first guide cylinder, and the action of the height control console drives the first sliding rod to move along the guide rail in the vertical direction;

the second guide column comprises a second guide cylinder and a second sliding rod, a guide rail is arranged in the second guide cylinder, and the action of the height control console drives the second sliding rod to move along the guide rail in the vertical direction;

The third guide column comprises a third guide cylinder and a third sliding rod, a linear transmission shaft is arranged in the third guide cylinder, and the action of the height control console drives the third sliding rod to move along the linear transmission shaft.

11. The method of claim 10, wherein the level detection stage further comprises: the first connecting piece comprises a first connecting piece fixed end and a first connecting piece sliding connection end, the second connecting piece comprises a second connecting piece fixed end and a second connecting piece sliding connection end, the third connecting piece comprises a third connecting piece fixed end and a third connecting piece sliding connection end,

the first horizontal adjusting piece comprises a first connecting seat, a first control motor, a first connecting rod and a first telescopic rod, wherein one end of the first telescopic rod is provided with a mounting hole, the mounting hole is in sliding connection with the sliding connection end of the first connecting piece, the fixed end of the first connecting piece is fixed on the lower surface of a bearing table corresponding to a third detection position, the other end of the first telescopic rod is connected with the control end of the first control motor, the other end of the first control motor is connected with one end of the first connecting rod, the other end of the first connecting rod is rotatably connected with the connecting part of the first connecting seat, the bottom of the first connecting seat is connected with the height control table, and the first control motor controls the lifting of the third detection position by controlling the expansion and the contraction of the first telescopic rod;

The second horizontal adjusting piece comprises a second connecting seat, a second control motor, a second connecting rod and a second telescopic rod, wherein one end of the second telescopic rod is provided with a mounting hole, the mounting hole is in sliding connection with the sliding connecting end of the second connecting piece, the fixed end of the second connecting piece is fixed on the lower surface of the bearing table corresponding to a fourth detection position, the other end of the second telescopic rod is connected with the control end of the second control motor, the other end of the second control motor is connected with one end of the second connecting rod, the other end of the second connecting rod is rotatably connected with the connecting part of the second connecting seat, the bottom of the second connecting seat is connected with the height control table, and the second control motor controls the lifting of the fourth detection position by controlling the expansion of the second telescopic rod;

the third horizontal adjusting piece comprises a third connecting seat, a third control motor, a third connecting rod and a third telescopic rod, wherein one end of the third telescopic rod is provided with a mounting hole, the mounting hole is in sliding connection with the sliding connection end of the third connecting piece, the fixed end of the third connecting piece is fixed on the lower surface of the bearing table corresponding to a fifth detection position, the other end of the third telescopic rod is connected with the control end of the third control motor, the other end of the third control motor is connected with one end of the third connecting rod, the other end of the third connecting rod is rotatably connected with the connecting part of the third connecting seat, the bottom of the third connecting seat is connected with the height control table, and the third control motor is used for controlling the lifting of the fifth detection position by controlling the expansion of the third telescopic rod.