CN114739272A - Position measuring mechanism of linear motion system and measuring method thereof - Google Patents

Position measuring mechanism of linear motion system and measuring method thereof Download PDF

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Publication number
CN114739272A
CN114739272A CN202110019639.4A CN202110019639A CN114739272A CN 114739272 A CN114739272 A CN 114739272A CN 202110019639 A CN202110019639 A CN 202110019639A CN 114739272 A CN114739272 A CN 114739272A
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sensing
magnet array
sensing portion
magneto
period
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泰普金·米哈伊尔
托尔斯泰克·奥列格
沃尔科夫·谢尔盖
泰金·根纳迪
巴尔科维·亚历山大
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Hiwin Mikrosystem Corp
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Hiwin Mikrosystem Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes

Abstract

The invention provides a position measuring mechanism of a linear motion system and a measuring method thereof, which mainly arranges two sensors on two sides of a stator respectively, not only enables a motion part to move bidirectionally, but also can calculate the measuring range of the sensors by information measured by the sensors on the premise of not increasing the number of the sensors. In addition, the present invention further combines the measuring sections measured by the two sensors to replace the conventional operation method of combining sine and cosine signals, and can ensure the accuracy of position feedback.

Description

Position measuring mechanism of linear motion system and measuring method thereof
Technical Field
The present invention relates to a position measuring technique, and more particularly, to a position measuring mechanism and a position measuring method for a linear motion system.
Background
A discontinuous stator Permanent Magnet Linear Motor (DSPM-LSM) mainly comprises a plurality of fixed stators, coils with different phases and one or more carriers with Magnet arrays, wherein the position feedback of each carrier along a moving path is used for controlling and correcting the motion of each carrier. This is also disclosed in the documents EP3015933A1, US8497643B2, US8796959B2, EP 2182627B 1, US 20190190366A 1 and "Novel purpose vertical reduction method for a moving-magnet synchronous motor with a segmented stator", "coding formation Verification by the shaping the Shape of the Edge at the area of the array of a static dispensing array PM-LSM".
The measurement system may employ hall sensors without requiring high accuracy measurements, which may reduce complexity and cost of the position feedback measurement system. The magnet array of the DSPM-LSM can be used as a measuring scale, and since the distance that each hall sensor can measure is less than the length of one magnet array, in order to provide position feedback information in the whole moving range of the carrier, the hall sensors must be arranged along the moving direction of the carrier, and the measuring ranges of the adjacent sensors overlap each other.
US8497643 discloses a linear scale for obtaining a distance from a reference point, which mainly uses a magnetic Flux density variation generated by a Magnet and operates with sine and cosine signals sensed by a sensor, but the method reduces accuracy due to End-Effects (End-Effects) of magnetic Flux (Magnet Flux). To improve the accuracy, the moving position or the deflection direction of the first and the last magnet in the magnet array is further disclosed in US8497643 and US6713902B 2.
The offset value between adjacent sensors measured previously is used in conjunction with the positional relationship of each sensor in US8796959B2, and is calculated by a single processing unit. In this way, the sensors, the servo driver and the processing unit need to be arranged in a special digital network, but the Long Time Repeatability (Long Time Repeatability) of the system is reduced due to temperature deformation and offset variation.
US20130229134a1 discloses a method for correcting the accuracy of a measuring scale by using position feedback in combination with the offset of adjacent modules, wherein the discretely arranged linear motor system is composed of a plurality of modules, each module comprises a single sensor, a stator and a driving unit, and a plurality of control units are used to control the modules and transmit position information. Accordingly, the method using only a single sensor results in only a single direction of motion of the carrier, i.e. when the carrier is moving in the opposite direction, the modules will take the carrier position too late, so that the force of the DSPM-LSM is significantly reduced.
US20130037384a1 discloses an enhanced multi-position detection system for electromagnetic transmission, which mainly comprises a plurality of magnetic field sensors arranged at a fixed distance on a running rail for detecting the position of a transmission element on the running rail, wherein the sensors are connected to a single processing unit, and the number of sensors and the functions thereof are increased in order to cooperate with the position feedback detected by the sensors, but the possibility of system modularization is reduced. Since, in industrial applications, the modularity of the DSPM-LSM can improve the maintainability and replaceability of each component in the system, it is obvious that the well-known technology is still not perfect.
Disclosure of Invention
Therefore, the primary objective of the present invention is to provide a position measuring mechanism of a linear motion system and a measuring method thereof, wherein two sensors are respectively disposed on two sides of a stator, so that the moving portion can perform bidirectional movement, and the measuring range of the sensors can be calculated based on the information measured by the sensors without increasing the number of sensors.
Another objective of the present invention is to provide a position measuring mechanism and a position measuring method thereof for a linear motion system, which combines the measuring sections measured by two sensors, instead of the conventional operation method combining sine and cosine signals, and can ensure the accuracy of position feedback.
To achieve the above object, the present invention provides a position measuring mechanism, comprising: a base portion; a moving part which can move relative to the base; at least one magnet array arranged in the moving part; a first sensing part and a second sensing part which are respectively arranged on the base part at intervals and are used for sensing the magnetic field of the magnet array; a third sensing part which is provided with a signal unit arranged on the motion part and a sensitive element which is used for sensing the signal unit and is arranged on the base part; a processing part for receiving the sensing signals of the first sensing part and the second sensing part, respectively, calculating a sub-period corresponding to the magnet array, and calculating in cooperation with the sensing data of the sensing element to obtain a motion path of the motion part, and feeding back to a driver to adjust the motion pattern of the motion part.
Preferably, the magnet array has a plurality of magnets, the minimum distance between two magnets of the same magnetism is the magnetic period of the magnet array, and the length of the magnet array is an integer multiple of the magnetic period of the magnet array.
Preferably, the number of the magnet arrays is two, the magnet arrays are arranged adjacent to each other on the moving part, and the pitch between the two adjacent magnet arrays is at least two magnetic cycles.
Preferably, the magnet array further includes a plurality of measuring modules, each of the measuring modules includes the first sensing portion, the second sensing portion and the third sensing portion, and a distance between two adjacent measuring modules is equal to a length of the magnet array. In order to simplify the current commutation law of the stator current, the distance between two adjacent measuring modules is equal to the length of the magnet array.
Preferably, the first sensing portion and the second sensing portion respectively include eight magneto-sensitive elements, and the magneto-sensitive elements are sequentially arranged from left to right at a distance of one fourth of the magnetic period of the magnet array, and the first magneto-sensitive element is connected in parallel with the fifth magneto-sensitive element, the second magneto-sensitive element is connected in parallel with the sixth magneto-sensitive element, the third magneto-sensitive element is connected in parallel with the seventh magneto-sensitive element, and the fourth magneto-sensitive element is connected in parallel with the eighth magneto-sensitive element.
Preferably, the driver is configured to control the current of a stator disposed on the base and is connected to a motion controller by a field bus, so that the information detected by the sensing units is processed by a single device, thereby reducing difficulty in identifying the position of the object along the motion path.
Another objective of the present invention is to provide a position measuring method, which combines signals respectively sensed by the first sensing portion and the second sensing portion in a measuring range by a combining point.
In order to estimate the exact position of the measurement range, the invention uses the sub-period information and signal amplitude sensed by the first sensing portion and the second sensing portion for confirmation.
Preferably, the measuring range is divided into a first measuring section of the first sensing portion and a second measuring section of the second sensing portion by the joint point, and the first measuring section and the second measuring section are respectively disposed along the motion direction of the moving portion and adjacent to each other.
When the moving part moves and displaces from right to left, the starting point of the measuring range is defined as: the amplitude of the signal sensed by the first sensing portion is less than a predetermined high threshold, and the sub-period position of the signal sensed by the first sensing portion is equal to 180 °; the end of the measurement range is defined as: the amplitude of the signal sensed by the second sensing portion is higher than a predetermined low threshold, and the sub-period position of the signal sensed by the second sensing portion is equal to 180 °;
when the motion part moves and displaces from left to right, the starting point of the measurement range is defined as follows: the amplitude of the signal sensed by the first sensing portion is greater than the low threshold, and the sub-period position of the signal sensed by the first sensing portion is equal to 180 °; the end of the measurement range is defined as: the amplitude of the signal sensed by the second sensing portion is smaller than the low threshold, and the sub-period position of the signal sensed by the second sensing portion is equal to 180 °.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, a brief description will be given below of the drawings required for the embodiments or the technical solutions in the prior art, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a preferred embodiment of the present invention.
FIG. 2 is a schematic view of another embodiment of the present invention, showing that the number of the measuring modules is two.
Fig. 3 is a schematic diagram of eight magnetic sensitive elements respectively included in the first sensing portion and the second sensing portion according to a preferred embodiment of the invention.
FIG. 4 is a diagram illustrating signals sensed by the first sensing portion according to a preferred embodiment of the invention.
Fig. 5A is a bottom view of a preferred embodiment of the present invention.
FIG. 5B is a side view of a preferred embodiment of the present invention.
FIG. 6 is a schematic diagram of signal processing according to a preferred embodiment of the present invention, wherein the carrier is moved from left to right to a current position.
FIG. 7 is a schematic view of a measuring mechanism according to an embodiment of the present invention, showing the relationship between the length, the pitch and the position of each element.
Wherein, (10) the measuring mechanism of the linear motion system, (111) (112) the spacer, (20) the base, (21) the stator, (217) the first measuring range, (227) the second measuring range, (241) the start point, (242) the end point, (248) the high threshold, (249) the low threshold, (30) the moving part, (31) the carrier, (32) the magnet array, (321) the magnet, (40) the measuring module, (401) the overlapping area, (402a) (402b) the low accuracy period, (403) the measuring range, (41) the first sensing part, (411) the sine, (412) (421) the amplitude, (413) the cosine, (414) (422) the sub-period, (42) the second sensing part, (H1) (H8) the magnetic sensor, (43) the third sensing part, (431) the signal unit, (432) the sensor, (433) the binding point, (434) the zero point, (435) the signal, (44) a processing section, (50) a driver, (60) a motion controller, (61) a line-field bus, (τ) a magnetic period, (α) a sub-period (not shown in the figure), (α 10) a sub-period threshold, (a1) (a2) amplitude, (α 1) (α 2) a sub-period, (L1) a measurement scale length, (L2) a sensing section length, (L21) a stator length, (L11) (L40) (L211) (L25) a spacing distance, (L1010) a minimum spacing, (L13) a spacing length, (L431) a signal cell length, (P1) a lower position, (Ls) (Lf) an offset distance (not shown in the figure).
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
A preferred embodiment of the present invention will now be described with reference to the accompanying drawings.
In a preferred embodiment of the present invention, a measuring mechanism (10) of a linear motion system is exemplified by a discontinuous stator permanent magnet linear motor (DSPM-LSM), and the measuring mechanism (10) includes a base (20), a moving part (30) and a measuring module (40).
As shown in fig. 1, the base (20) is a base (20) (not shown) with a predetermined length, and at least one stator (21) is disposed on the base (20) and extends along the long axis direction of the base (20).
The moving part (30) has a carrier (31) located at one side of the base (20) and spaced apart from the stator (21) at one side, a one-dimensional magnet array (32) sequentially disposed on the carrier (31) by a plurality of magnets (321), and the moving part (30) can be displaced along the long axis direction of the base (20) by the interaction of the magnetic field between the stator (21) as the primary side and the magnet array (32), but the technical contents of using the stator (21) as the primary side and the moving part (30) as the secondary side are known to those skilled in the art and are not described herein.
The measuring module (40) has a first sensing portion (41), a second sensing portion (42), a third sensing portion (43) and a processing portion (44), wherein:
the first sensing portion (41) and the second sensing portion (42) are disposed on the base (20) and respectively located at two ends of the stator (21) corresponding to the long axis direction of the base (20), so that the stator (21) is located between the first sensing portion (41) and the second sensing portion (42), as shown in fig. 3, the first sensing portion (41) and the second sensing portion (42) respectively include eight magnetic sensors (H1-H8) for sensing the magnetic field variation of the magnet array (32);
the third sensing part (43) comprises a signal unit (431) arranged on the carrier (31) and used for generating a specific physical signal, and a sensing element (432) fixedly arranged on the base part (20) and used for sensing the signal generated by the signal unit (431);
the processing part (44) receives the sensing data of the first sensing part (41), the second sensing part (42) and the sensing element (432), and feeds back the data to a driver (50) after calculating to obtain the position information of the motion part (30), and then the driver (50) controls the power supply of the stator (21).
Furthermore, when the moving stroke of the moving part (30) exceeds the range that a single stator can act as a primary side, the base (20) can have a plurality of stators, as shown in fig. 2, two stators are taken as an example, two stators (21) are coaxially fixed on the base (20) in the long axis direction, and the number of the measuring modules (40) is synchronously increased to two with the number of the stators, but the increased measuring modules do not include the increase of signal units, that is, the number of the signal units is the same as the number of the carriers (31), and is still single. In this case, two adjacent measurement modules (40) are spaced apart from each other by a distance equal to the length of the magnet array.
Another embodiment of the present invention, as shown in fig. 2, is different from the preferred embodiment in that the number of the measuring modules (40) is two, and the two measuring modules (40) are arranged along the moving direction of the carrier (31) and provide position feedback along the moving path, and the two measuring modules (40) can be connected to each other and further connected to a motion controller (60) via field bus (fieldbus,61) for handling the control of the movement of one or more carriers.
As shown in fig. 3, the eight magneto-sensitive elements (Hall sensors, H1-H8) included in the first sensing portion (41) or the second sensing portion (42) are arranged in sequence from left to right, and each of the magneto-sensitive elements (H1-H8) is shifted (shifted on τ/4 along the measuring axis) by τ/4, as shown in fig. 7, τ is the period of the magnet array (32), i.e., the distance between the magnets (321) with the same magnetism, and the lengths of the first sensing portion (41) and the second sensing portion (42) are two periods (τ). And the first magnetic sensing element (H1), the fifth magnetic sensing element (H5), the second magnetic sensing element (H2), the sixth magnetic sensing element (H6), the third magnetic sensing element (H3), the seventh magnetic sensing element (H7), the fourth magnetic sensing element (H4) and the eighth magnetic sensing element (H8) are respectively connected in parallel to form four groups, so as to optimize average feedback errors and improve the accuracy and the sensitivity of position feedback, signals output by the magnetic sensing elements (H1-H8) connected in parallel into four groups are respectively sine and difference signals of Cos +, Sin +, Cos and Sin-, like UCos + (cosine), USin + (alpha), UCos- ═ Ucos (alpha), USin- ═ Usin- (alpha), USin-USIN- (Usin (alpha), wherein alpha is calculated by the processing part (44) according to the formula of alpha + (5-) usosin (USjn +) -387-) period period) position (angle).
As shown in fig. 5A, the first sensing portion (41) is located on the left side of the stator (21) and the second sensing portion (42) is located on the right side of the stator (21) from the relative position in the X-axis direction, and in the Y-axis direction, the first sensing portion (41) and the second sensing portion (42) may be located on one side of the magnet array (32) (not shown) along the Y-axis direction, in addition to being located at the center of the magnet with respect to the magnet array (32) as shown in fig. 5A. The third sensing portion (43) corresponds to one side of the magnet array (32).
As shown in fig. 4, during the movement of the carrier (31) from left to right to the current position (P1), the sine (411) amplitude (412) and cosine (413) signals of the signals sensed by the first sensing portion (41) change, wherein the change of the amplitude (412) occurs when the magnet array (32) does not cover all of the magneto-sensitive elements (H1-H8), i.e. the carrier (31) moves into and out of the measurement range of the first sensing portion (41), the amplitude (412) is reduced, so that the sub-periods (α 1, 414) are significantly interfered with in the first and last periods, wherein the amplitude (a1,412) is estimated as follows:
Figure BDA0002888035690000071
wherein, A is amplitude, Cos +, Sin +, Cos-, Sin-are sine and cosine differential signals respectively.
Similarly, the sine amplitude and cosine signal in the sensing signal outputted from the second sensing portion (42) are the same as those of the first sensing portion (41).
As shown in fig. 7, in the space pattern between the first sensing portion (41) and the second sensing portion (42) of the stator (21), the length (L21) of the stator (21) is smaller than the spacing distance (L40) between the first sensing portion (41) and the second sensing portion (42). The separation distance (L40) is an integer multiple of the magnetic period (τ), and at least four magnetic periods (τ) are required to provide the sensing overlap region (401) of the first sensing portion (41) and the second sensing portion (42) as shown in fig. 6, and to exclude less accurate periodic (402a,402b) signals when combining the signals of the two sensing portions. The length (L1) of the measurement scale is an integer multiple of the magnetic period (τ) and is determined by equation 1 below:
l1 ═ L40+ (4+ n) τ where n is a natural number containing 0 (formula 1).
In this example, the length of the magnet array (32) is equal to the length of the measurement scale (L1).
As shown in FIG. 6, the third sensing portion (43) is located in the overlapping region (401) for providing a unique and unique joint point (433) as the signal joint point of the first sensing portion (41) and the second sensing portion (42), in order to ensure the correctness of the joint point (433), it is required that the length (L431) of the signal unit (431) is less than two magnetic periods (τ) as shown in FIG. 7, and the position of the signal unit (431) and the sub-period (435) of the first sensing portion (41) are determined at 180 degrees, and in order to avoid the influence of the low-accuracy periods (402a,402b), the position of the third sensing portion (43) is limited, for example, when the lengths of the magnetosensitive elements (H1-H8) are two magnetic periods (τ), the signal unit (431) can be located in the overlapping region (401) of the first sensing portion (41) and the second sensing portion (42) On the lap period.
As shown in fig. 6, the third sensing portion (43) is configured to generate a unique and unique zero point (434) in the overlapping area (401), the position of the zero point (434) is defined by the sub-period (414) of the signal unit (431) and the first sensing portion (41), wherein the sub-period (414) of the first sensing portion is equal to a threshold (α 10), for example, the threshold (α 10) shown in fig. 6 is zero, and therefore, the length (L431) of the signal unit should satisfy formula 2:
(pi- α 10) (. tau./2. pi.) < L431< 2. tau. [ (pi. - α 10) (. tau./2. pi.) (equation 2).
As shown in fig. 7, the displacement distance (Ls) (not shown) of the sensing element (432) is less than one magnetic period (τ). The position is determined by the following formula, and the interval length (L13) relative to the interval length (L13) of the first sub-period (414) of the first sensing part is:
Figure BDA0002888035690000081
the offset distance (Lf) (not shown) of the signaling unit (431) is less than half of its length (L431), and the distance (L211) from the first magnetic period (τ) of the magnet array (32) is determined by the following equation 4:
Figure BDA0002888035690000082
for example, in fig. 6, the offset distance (Ls) of the sensing element (432) is 1/4 magnetic periods (τ), and the offset distance (Lf) of the signal cell (431) approaches zero.
In addition, the present invention can further calculate the measurement range (403) of the measurement module (40) according to the motion profile of the motion portion (30), wherein in fig. 6, when the carrier (31) moves from left to right, the start point (241) and the end point (242) of the measurement range (403) of the measurement module (40) are defined according to the following formula 5, wherein Alowth is a low threshold (249), such as Alowth is 25% of the rated amplitude, Ahighth is a high threshold (248), such as Ahighth is 75% of the rated amplitude. Therefore, the processing unit (44) calculates the amplitude (a1,412) and the sub-period (α 1, 414) of the first sensing unit (41) and the amplitude (a2,421) and the sub-period (α 2,422) of the second sensing unit (42), i.e., the amplitude (a1,412) of the first sensing unit (41) is greater than the low threshold (249), the position of the sub-period (α 1, 414) of the first sensing unit (41) is equal to 180 °, the amplitude (a2,421) of the second sensing unit (42) is lower than the high threshold (248), and the position of the sub-period (α 2,422) of the second sensing unit (42) is 180 °.
Figure BDA0002888035690000091
When the carrier (31) moves from right to left, the start point (241) and the end point (242) of the measurement range (403) of the measurement module (40) are defined according to the following formula 6, that is, the amplitude (a1,412) of the first sensing portion (41) is smaller than the high threshold (248), the sub-period (α 1, 414) position of the first sensing portion (41) is equal to 180 °, the amplitude (a2,421) of the second sensing portion (42) is higher than the low threshold (249), and the sub-period (α 2,422) position of the second sensing portion (42) is 180 °.
Figure BDA0002888035690000092
Furthermore, when the carrier (31) enters the measuring range (403), the processing unit (44) feeds back the calculated position information of the moving part (30) to the driver (50), and controls the stator (21) to perform current commutation by using the driver (50). In this embodiment, as shown in fig. 7, the distance (L25) between the first sensing portion (41) and the stator (21) is adjusted so that the magnetosensitive elements (H1-H8) of the first sensing portion (41) are in the same phase with the coil of the stator (21), thereby simplifying the power supply control method of the stator (21).
The measuring range (403) is further divided into a first measuring range (217) and a second measuring range (227) by taking the joint point (433) as a reference, wherein when the carrier (31) is positioned at the left side of the joint point (433), the carrier falls into the first measuring range (217), and the position of the moving part (30) is calculated and fed back by utilizing the sub-period (414) of the first sensing part (41); when the carrier (31) is located at the right side of the combination point (433), the carrier falls into the second measurement range (227), and the sub-period (422) of the second sensing portion (42) is used to calculate the position of the moving portion (30) and perform feedback.
In fig. 7, in order to make two adjacent measuring modules (40) have an overlapping area, the first sensing portions (41) of each measuring module (40) are spaced apart from each other by a distance (L11) equal to the length (L1) of the magnet array (32).
In addition, as shown in fig. 7, in order to take two magnet arrays (32) as an example, the two magnet arrays (32) are coaxially fixed on the carrier (31) in the long axis direction, and to ensure the correctness of the calculated start point (241) and end point (242), the minimum distance (L1010) between two adjacent magnet arrays (32) is equal to the length (L2) of the first sensing portion (41) and is equal to two magnetic periods (τ). In this case, at least one spacer (111,112) is disposed between two adjacent magnet arrays (32), the minimum spacing (L1010) being provided by its own length.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A position measuring mechanism of a linear motion system, comprising:
a base portion;
a moving part which can move relative to the base;
at least one magnet array arranged in the moving part;
a first sensing part and a second sensing part which are respectively arranged on the base part at intervals and are used for sensing the magnetic field of the magnet array;
a third sensing part which is provided with a signal unit arranged on the motion part and a sensitive element which is used for sensing the signal unit and is arranged on the base part;
and the processing part is used for respectively receiving the sensing signals of the first sensing part and the second sensing part, respectively calculating a sub-period corresponding to the magnet array, and calculating by matching with the sensing data of the sensing element to obtain a motion path of the motion part, and then feeding the motion path back to a driver to adjust the motion pattern of the motion part.
2. The position measuring mechanism of claim 1, wherein the magnet array has a plurality of magnets, and the minimum distance between two magnets of the same magnetic polarity is a magnetic period of the magnet array, and the length of the magnet array is an integer multiple of the magnetic period of the magnet array.
3. The position measuring mechanism of claim 2, wherein the number of the magnet arrays is two, and the two adjacent magnet arrays are disposed adjacent to each other on the moving portion, and the distance between the two adjacent magnet arrays is at least two magnetic periods.
4. The position measuring mechanism of claim 1, further comprising a plurality of measuring modules respectively including the first sensor, the second sensor and the third sensor, wherein a distance between two adjacent measuring modules is equal to a length of the magnet array.
5. The position measuring mechanism of claim 1, wherein the first and second sensing portions comprise eight magneto-sensitive elements, and the magneto-sensitive elements are arranged in sequence from left to right at a distance of one quarter of the magnetic period of the magnet array, respectively, and the first magneto-sensitive element is connected in parallel with the fifth magneto-sensitive element, the second magneto-sensitive element is connected in parallel with the sixth magneto-sensitive element, the third magneto-sensitive element is connected in parallel with the seventh magneto-sensitive element, and the fourth magneto-sensitive element is connected in parallel with the eighth magneto-sensitive element.
6. The position measuring mechanism of claim 2, wherein the driver is current controlled to a stator mounted on the base and connected to a motion controller using a field bus.
7. The position measuring mechanism of claim 6, wherein the first sensing portion is located on a left side of the stator and the second sensing portion is located on a right side of the stator;
the spacing distance between the first sensing part and the second sensing part is an integer multiple of the magnetic period of the magnet array;
the length of the magnet array is greater than the spacing distance between the first sensing part and the second sensing part, and the magnet array is at least four magnetic periods of the magnet array;
the third sensing part provides a combination point as a reference to combine the signals of the first sensing part and the second sensing part.
8. A position measuring method of a linear motion system, which combines the signals respectively sensed by the first sensing portion and the second sensing portion of any one of claims 1 to 7 in a measuring range by a combination point.
9. The method of claim 8, wherein the measurement range is defined by the joint point as a first measurement section of the first sensor and a second measurement section of the second sensor, the first measurement section and the second measurement section are respectively disposed along the motion direction of the motion portion and are adjacent to each other.
10. The method of claim 9, wherein:
when the moving part moves and displaces from right to left, the starting point of the measuring range is defined as: the amplitude of the signal sensed by the first sensing portion is less than a predetermined high threshold, and the sub-period position of the signal sensed by the first sensing portion is equal to 180 °; the end of the measurement range is defined as: the amplitude of the signal sensed by the second sensing portion is higher than a predetermined low threshold, and the sub-period position of the signal sensed by the second sensing portion is equal to 180 °;
when the moving part moves and displaces from left to right, the starting point of the measuring range is defined as: the amplitude of the signal sensed by the first sensing portion is greater than the low threshold, and the sub-period position of the signal sensed by the first sensing portion is equal to 180 °; the end of the measurement range is defined as: the amplitude of the signal sensed by the second sensing portion is smaller than the low threshold, and the sub-period position of the signal sensed by the second sensing portion is equal to 180 °.
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