CN114736029A - Microwave focusing method ceramic welding device and method - Google Patents
Microwave focusing method ceramic welding device and method Download PDFInfo
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Abstract
The invention discloses a device and a method for welding ceramics by a microwave focusing method, and relates to the technical field of microwave ceramic welding. The invention comprises a single-mode resonant cavity, a cover plate and an adjustable piston structure; a microwave power input port is arranged at one side part of the single-mode resonant cavity, and a concave metal reflecting surface capable of reflecting microwaves and focusing the microwaves on one point is arranged on the side surface opposite to the direction of the microwave power input port; and the other two opposite sides of the single-mode resonant cavity are symmetrically provided with a pressurizing mechanism capable of pressurizing the ceramic to be subjected to microwave welding in the single-mode resonant cavity, and the side part of the single-mode resonant cavity is provided with a vacuumizing port. The invention has simple structure, easy control, more uniform electric field and temperature distribution and stable operation, can improve the problem of stress caused by nonuniform microwave field distribution, adopts the focusing reflection surface with the ellipsoidal curved surface to perform reflection focusing on microwave beams, overcomes the defects of high requirement on microwave source power, high manufacturing cost and the like of the traditional non-focusing device, improves the welding size of materials, and increases the types of welding materials.
Description
Technical Field
The invention belongs to the technical field of microwave ceramic welding, and particularly relates to a microwave focusing method ceramic welding device and a microwave focusing method ceramic welding method.
Background
The welding of ceramics at high temperature by using microwaves is a new technology which develops rapidly in the present year, and the welding technology has extremely high use value and wide development prospect; the ceramic material has good heat resistance and corrosion resistance, so that the ceramic material is gradually used as a structural material to replace a metal material in a high-temperature environment, the welding technology is also widely applied to the industrial scientific and technological fields, such as aerospace, electronic information, chemical industry, ocean drilling and the like, and the microwave ceramic welding technology plays an increasingly important role in various fields due to the excellent characteristics of the welding technology.
Microwave welding is to heat ceramic by using the dielectric loss of microwave in the material to generate polarization and loss, and welding is completed under certain pressure. Because the temperature rise speed is high, crystal grains in the ceramic cannot be excessively enlarged, and the distribution of grain boundary phase elements is more uniform, the welding parts can be uniformly connected, thereby ensuring the excellent performance of the material.
The link of uniform heating in the ceramic welding process is used as an important and key, and is an important premise for ensuring uniform sintering of large-size ceramic parts and ceramic parts with complex shapes, the good heating uniformity is the guarantee of welding strength, and the phenomenon of non-uniform heating exists in the microwave heating sintering process, and when the phenomenon is serious, great residual stress can be generated, so that cracking of the ceramic parts is caused. The main reasons can be divided into the following categories: (1) the microwave field is not uniformly distributed, and the approximately uniform area is extremely small, so that certain stress exists in the microwave field to influence the welding strength; (2) heating phenomena specific to microwaves, such as hot spots, thermal runaway, selective heating; (3) problems of the welding material, such as low thermal conductivity, overlarge size, large thermal expansion coefficient, complex structure and the like; (4) the problem of welding size of welding materials is that the uniform area of a microwave field of a microwave welding cavity is not large at present; the welding strength needs to be improved, and the selection of the solder, the node loss and the matching property with the substrate material need to be improved; the problem of welding size of welding materials is that the uniform area of a microwave field of a microwave welding cavity is not large at present; the welding strength needs to be improved, the matching performance of a selection area of welding flux, node loss and a substrate material needs to be improved, the types of welding materials need to be abundant, and the welding materials adopted at present are generally structural ceramics and have single use. Therefore, in order to solve the above problems, it is important to provide a ceramic welding apparatus and method by microwave focusing.
Disclosure of Invention
The invention provides a device and a method for welding ceramics by a microwave focusing method, which solve the problems.
In order to solve the technical problems, the invention is realized by the following technical scheme:
the invention relates to a microwave focusing method ceramic welding device, which comprises a box-shaped single-mode resonant cavity with an opening at the top, and a cover plate which is movably arranged at the upper part of the single-mode resonant cavity and can realize air sealing;
one side part of the single-mode resonant cavity is provided with a microwave power input port, and the other opposite side part of the single-mode resonant cavity is provided with an adjustable piston structure connected with a metal moving block in the single-mode resonant cavity; the metal moving block finely adjusts and moves in the single-mode resonant cavity through an adjustable piston structure, the side face opposite to the direction of the microwave power input port is a concave metal reflecting surface capable of reflecting microwaves and focusing the microwaves on one point, and an air sealing structure is arranged between the adjustable piston structure and the single-mode resonant cavity;
the other two opposite sides of the single-mode resonant cavity are symmetrically provided with pressurizing mechanisms capable of pressurizing ceramics to be subjected to microwave welding in the single-mode resonant cavity, each pressurizing mechanism extends into the single-mode resonant cavity by adopting a pressurizing rod, a contact capable of abutting against and pressurizing the ceramics to be subjected to microwave welding is arranged at the end part of each pressurizing mechanism, the position of the ceramics to be subjected to microwave welding after pressurized clamping is positioned in the range of a focus point after microwave reflection, and an air-tight sealing structure is arranged between each pressurizing mechanism and the single-mode resonant cavity;
and a vacuumizing port is formed in the side part of the single-mode resonant cavity.
Furthermore, a microwave focusing ceramic welding chamber is formed among the metal reflecting surface, the single-mode resonant cavity side wall opposite to the metal reflecting surface and the two side walls, and the pressurizing mechanisms are symmetrically arranged on the two side walls of the microwave focusing ceramic welding chamber, and are arranged on the two side walls.
Furthermore, wave absorbing material layers are attached to two side walls of the microwave focusing ceramic welding chamber.
Furthermore, the pressurizing mechanism comprises a second flange sleeve which is sleeved with a center hole of a first flange sleeve arranged on two side walls of the microwave focusing ceramic welding chamber and is in airtight fit with the center hole of the first flange sleeve, and a third flange sleeve which is in flange connection with the second flange sleeve and has a coaxial structure, and a pressurizing adjusting rod which is in airtight fit with a center shaft hole of the second flange sleeve and the center shaft hole of the third flange sleeve is arranged at the rear end of the pressurizing rod.
The outer peripheral side of the third flange sleeve is provided with a thread for rotation adjustment, and the thread is used for adjusting and controlling the air tightness of the central holes of the second flange sleeve and the first flange sleeve; and a pressurizing device is arranged at the end part of the pressurizing adjusting rod.
Furthermore, the adjustable piston structure comprises a first mounting plate with an opening hole corresponding to the opening hole formed in the side wall of the single-mode resonant cavity and fixedly mounted, a sliding cavity mounted on the side part of the first mounting plate and internally provided with a sliding hole, a piston rod mounted in the sliding cavity and hermetically and slidably matched with the sliding hole, and a nut mounted at the outer end part of the piston rod; the inner end part of the piston rod is fixedly connected with the connecting blind hole at the rear part of the metal moving block.
Furthermore, a vertical buckle is installed on the cover plate, and a buckle seat which is matched with the vertical buckle to enable the cover plate and the single-mode resonant cavity to realize air sealing is installed on the side portion of the single-mode resonant cavity.
Furthermore, the microwave power input port is provided with a second mounting plate of an open hole type for the microwave input device to carry out airtight connection.
A ceramic welding method by a microwave focusing method comprises the following steps:
s01, opening a cover plate of the single-mode resonant cavity, placing a ceramic material to be subjected to microwave welding in a microwave focusing ceramic welding cavity, adjusting the position of the ceramic material to be subjected to microwave welding, and then closing the cover plate to ensure that the interior of the single-mode resonant cavity is hermetically sealed;
s02, the ceramic material to be subjected to microwave welding in the single-mode resonant cavity is pressurized by a pressurizing mechanism and vacuumized to enable the ceramic material to be subjected to microwave welding to be tightly attached together;
s03, introducing microwave energy into the single-mode resonant cavity by using a microwave power supply as a microwave input device, adjusting the position of the metal reflecting surface by using an adjustable piston structure, so that the microwave energy is gathered on the welding block, and starting to perform microwave welding;
and S04, after welding, opening the cover plate after natural cooling, taking out the microwave welding ceramic material, and completing welding.
Compared with the prior art, the invention has the following beneficial effects:
1. the ceramic welding device adopting the microwave focusing method adopts the rectangular resonant cavity, has simple structure, easy control, uniform electric field and temperature distribution and stable operation, and can solve the problem of stress caused by nonuniform microwave field distribution;
2. according to the temperature rise characteristic of the ceramic under the action of a microwave focusing mode, the input power is adjusted through a power compensation system, and thermal runaway is inhibited, so that the radial temperature gradient from the center to the surface of the material, caused by the size of the material, is reduced;
3. during welding, the thickness of the middle layer and the grain size of a welding material are reduced, so that the strength of the joint can be improved;
4. in the welding process, the distribution of a microwave field is improved by utilizing a microwave focusing mode, and the thermal uniformity of a welding area is improved, so that the welding size of materials is improved, the types of welding materials are increased, and the application of a microwave welding technology in the industrial field is wider;
5. the welding device adopts the focusing reflection surface with the ellipsoidal curved surface to perform reflection focusing on the microwave beam, and overcomes the defects of high requirement on microwave source power, high manufacturing cost and the like of the traditional non-focusing device, so that compared with the prior art, the welding device has outstanding substantive characteristics and remarkable progress, the special focusing characteristic reduces the requirement of the device on the microwave source power, and the welding strength of the ceramic welding device and the production yield of products are realized.
Of course, it is not necessary for any product in which the invention is practiced to achieve all of the above-described advantages at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a microwave focusing ceramic welding device according to the present invention;
FIG. 2 is a schematic diagram of the structure at view A in FIG. 1;
FIG. 3 is an exploded view of a microwave focusing ceramic welding apparatus according to the present invention;
FIG. 4 is a schematic view of the structure at view B in FIG. 3;
FIG. 5 is a schematic diagram of the structure inside the single-mode resonator of FIG. 1;
FIG. 6 is a top view of the structure of FIG. 5;
FIG. 7 is a cross-sectional view taken along line C-C of FIG. 6;
FIG. 8 is a cross-sectional view of the pressurizing mechanism of FIG. 3;
FIG. 9 is a cross-sectional side view of the adjustable piston structure of FIG. 3;
in the drawings, the components represented by the respective reference numerals are listed below:
1-a single mode resonant cavity, 101-a vacuum-pumping port, 102-a buckle seat, 103-a wave-absorbing material layer, 104-a first flange sleeve, 1041-a central hole, 105-a microwave power input port, 1051-a second fixing hole, 1052-a second mounting plate, 106-an opening hole, 1061-a first fixing hole, 2-a cover plate, 3-a metal moving block, 301-a metal reflecting surface, 302-a connecting blind hole, 4-a vertical buckle, 5-an adjustable piston structure, 501-a sliding cavity, 502-a piston rod, 503-a first mounting plate, 504-a nut, 6-a pressurizing mechanism, 601-a pressurizing adjusting rod, 602-a contact, 603-a pressurizing rod, 604-a second flange sleeve and 605-a third flange sleeve.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "upper", "inner", "side", "nested", "center", and the like are used for the purpose of indicating an orientation or positional relationship, merely for convenience in describing the present invention and for simplicity of description, and are not intended to indicate or imply that the referenced components or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
Referring to fig. 1-9, a ceramic welding apparatus using microwave focusing method according to the present invention is shown; the gas-tight single-mode resonant cavity comprises a box-shaped single-mode resonant cavity 1 with an opening at the top and a cover plate 2 which is movably arranged at the upper part of the single-mode resonant cavity 1 and can realize gas-tight sealing, wherein the single-mode resonant cavity 1 is of a rectangular structure;
a microwave power input port 105 is arranged at one side part of the single-mode resonant cavity 1, and an adjustable piston structure 5 connected with a metal moving block 3 in the single-mode resonant cavity 1 is arranged at the other opposite side part; the metal moving block 3 is finely adjusted and moved in the single-mode resonant cavity 1 through the adjustable piston structure 5, the side surface opposite to the direction of the microwave power input port 105 is a concave metal reflecting surface 301 capable of reflecting microwaves and focusing the microwaves on one point, and an air-tight structure is arranged between the adjustable piston structure 5 and the single-mode resonant cavity 1;
the other two opposite sides of the single-mode resonant cavity 1 are symmetrically provided with pressurizing mechanisms 6 capable of pressurizing ceramics to be subjected to microwave welding in the single-mode resonant cavity 1, the pressurizing mechanisms 6 extend into the single-mode resonant cavity 1 by adopting pressurizing rods 603, and the end parts of the pressurizing mechanisms are provided with contacts 602 capable of abutting and pressurizing the ceramics to be subjected to microwave welding, so that the positions of the ceramics to be subjected to microwave welding after pressurized clamping are positioned in the range of a focus point after microwave reflection, and an air-tight sealing structure is arranged between the pressurizing mechanisms 6 and the single-mode resonant cavity 1;
the side of the single-mode cavity 1 is provided with a vacuum pumping port 101.
Wherein, a microwave focusing ceramic welding chamber is formed among the metal reflecting surface 301, the side wall of the single-mode resonant cavity 1 opposite to the metal reflecting surface 301 and the side walls at two sides, and the pressurizing mechanisms 6 are symmetrically arranged on the two side walls of the microwave focusing ceramic welding chamber; the microwave focusing ceramic welding chamber is a reflector area, provides optical feedback capacity to form continuous oscillation of excited radiation, continuously strengthens a light beam, limits the direction and frequency of the light beam, and enables an output light beam to have excellent directivity and monochromaticity.
Wherein, wave-absorbing material layers 103 are attached to two side walls of the microwave focusing ceramic welding chamber; in the specific embodiment, the wave-absorbing material layer 103 is a PY-100 type darkroom wave-absorbing material, specifically a foam plastic.
The pressurizing mechanism 6 comprises a second flange sleeve 604 which is sleeved with and hermetically matched with a central hole 1041 of a first flange sleeve 104 arranged on two side walls of the microwave focusing ceramic welding chamber, and a third flange sleeve 605 which is in flange connection with the second flange sleeve 604 and has a coaxial structure, and a pressurizing adjusting rod 601 which is hermetically matched with central shaft holes of the second flange sleeve 604 and the third flange sleeve 605 is arranged at the rear end of the pressurizing rod 603.
The outer periphery of the third flange sleeve 605 is provided with a screw thread for rotation adjustment, which is used for adjusting and controlling the air tightness between the second flange sleeve 604 and the central hole of the first flange sleeve 104; the end of the pressure adjusting rod 601 is provided with a pressure device which is a hydraulic cylinder, an air cylinder or an electric cylinder.
The adjustable piston structure 5 comprises a first mounting plate 503 with an open hole corresponding to the open hole 106 formed on the side wall of the single-mode resonant cavity 1 and fixedly mounted, a sliding cavity 501 mounted on the side of the first mounting plate 503 and provided with a sliding hole therein, a piston rod 502 mounted in the sliding cavity 501 and hermetically and slidably matched with the sliding hole, and a nut 504 mounted at the outer end of the piston rod 502; the inner end of the piston rod 502 is fixedly connected with the connecting blind hole 302 at the rear part of the metal moving block 3; the surface of the first mounting plate 503 is provided with a first fixing hole 1061 corresponding to a positioning hole of the opening hole 106 on the side of the single-mode resonant cavity 1, and the first fixing hole 1061 is hermetically and fixedly connected with the screw; the adjustable piston structure 5 changes the focus of the metal reflecting surface 301 by reciprocating motion, and the microwave is intensively controlled at one point, so that the welding strength and the welding precision are improved.
The cover plate 2 is provided with a vertical buckle 4, and the side part of the single-mode resonant cavity 1 is provided with a buckle seat 102 which is matched with the vertical buckle 4 to enable the cover plate 2 and the single-mode resonant cavity 1 to realize air sealing; the single-mode resonant cavity is used for fixing the cavity of the single-mode resonant cavity 1, so that the cavity is kept sealed.
Wherein, the microwave power input port 105 is provided with a second mounting plate 1052 of an open hole type for the microwave input device to carry out airtight connection; the surface of the second mounting plate 1052 is provided with a second fixing hole 1051 corresponding to the position of the microwave power input port 105 on the side part of the single-mode resonant cavity 1, and the second fixing hole 1051 is fixedly connected with the side part of the single-mode resonant cavity in a gas-tight manner through a screw; the second mounting plate 1052 is fixedly connected with the port of the microwave input device; the microwave power input port 105 is used for supplying microwave power, particularly a microwave power supply, to the microwave input device for welding.
A ceramic welding method by a microwave focusing method comprises the following steps:
s01, opening the cover plate 2 of the single-mode resonant cavity 1, placing the ceramic material to be subjected to microwave welding in a microwave focusing ceramic welding cavity, adjusting the position of the ceramic material to be subjected to microwave welding, and then closing the cover plate 2 to ensure that the interior of the single-mode resonant cavity 1 is hermetically sealed;
s02, the ceramic material to be subjected to microwave welding in the single-mode resonant cavity 1 is pressurized by the pressurizing mechanism 6 and vacuumized to enable the ceramic material to be subjected to microwave welding to be tightly attached together;
s03, introducing microwave energy into the single-mode resonant cavity 1 by using a microwave power supply as a microwave input device, adjusting the position of the metal reflecting surface 301 through the adjustable piston structure 5 to focus the microwave energy on a welding block, and starting microwave welding;
and S04, after welding, opening the cover plate 2 after natural cooling, taking out the microwave welding ceramic material, and completing welding.
The microwave welding is to use the dielectric loss of the material to generate heat, and the whole device of the technical proposal only has the welding area at high temperature and the rest part at normal temperature and cold state, so the whole device has simple and compact structure and low use cost. The whole inner part is heated simultaneously during welding, the internal stress is low, the fracture is not easy to generate, the ceramic and the aluminum alloy can be uniformly and firmly combined together, the appearance of the ceramic is not changed, and meanwhile, preheating and post-treatment are not needed. The microwave welding can heat rapidly and control the temperature accurately, so that air bubbles or crystal grains are not easy to generate at the welding position to grow, and the distribution of crystal boundary elements is more uniform.
The device is realized by the technical measures that: a microwave focusing welding device in a vacuum environment is characterized in that a focusing reflecting surface is arranged at one end inside a vacuum cavity, a microwave receiving end is arranged at the other end of the vacuum cavity, and the focusing reflecting surface is an ellipsoid concave surface. Microwave signals generated by the microwave source are transmitted to the focusing reflection surface through the receiving port, the focusing reflection surface focuses the microwave signals to form a local strong electromagnetic field in a vacuum environment, microwaves scattered without being focused in vacuum can be absorbed by the wave-absorbing material attached to the inner wall of the vacuum cavity, and the metal reflection surface is selected as the focusing reflection surface. The position of the metal reflecting surface is changed through movement, the reflecting surface is controlled to do reciprocating motion, a proper position is found to be static, and the standing wave position of the microwave and the heat uniformity of the microwave welding are guaranteed under the condition that the size of the microwave welding is not changed.
Microwave welding is to heat ceramic by using the dielectric loss of microwave in materials to generate polarization and loss, and to complete welding under certain pressure, and according to whether an intermediate medium needs to be added between the materials, the microwave welding is divided into two types: direct welding and indirect welding.
The main body of high-temp. welding ceramic adopts rectangular resonant cavity, the working frequency of microwave source is 2.45GHz, power is continuously adjustable from 0-3000W, the surface temperature of material is measured by means of optical fibre infrared radiation thermometer, welding temp. is represented by regulating power of microwave source, and the pressure required for welding is applied by means of pressure device. The dielectric properties epsilonr and tg delta of the ceramic during the ceramic welding process can change sharply with the rise of temperature to cause the resonant frequency and the coupling degree of the cavity to shift. Accordingly, the position of the shorting piston and the size of the coupling aperture need to be adjusted accordingly to compensate for this drift to maintain critical coupling conditions and continuity of resonance to achieve the desired weld temperature for the weld. According to the perturbation theory, the relationship between the moving distance L of the short circuit piston and the size of the coupling hole, the frequency drift and the material performance is represented by the following formula:
l ═ V- [ f0/(f 0-f 1) ] a (ε r-f) V0} and
W＝(2a/π)arctg{[fI/(afu)][(6πα∈rtgδ)/V]1/8}3/8；
in the formula, a is the size of the wide side of the cavity, alpha is a constant, fI and fu are respectively the resonant frequency before and after frequency shift, V0 is the volume of the material, V is the volume of the cavity, and epsilon r and tg delta are respectively the relative dielectric constant and loss tangent of the material, and the design of the short-circuit piston and the coupling tuning is the key for obtaining the cavity with excellent welding performance.
The impedance matching of the resonant cavity and an external circuit is realized through the coupling hole, and for a material with dielectric loss changing along with temperature, the shift of the coupling degree often has a decisive influence on the absorption efficiency, so that a diaphragm with a fixed aperture is adopted. By adopting the choke structure, the impedance at the high-current position of the coupling window is reduced as much as possible, the heating phenomenon in the coupling window is effectively inhibited during welding, and the Q value of the cavity is improved in multiples.
The essence of microwave heating is that microwaves are converted into thermal energy, and the degree of electromagnetic interaction of a material and the ability of a material to absorb microwaves can be described by a complex dielectric constant epsilon: e, — j e;
in the formula: epsilon, -dielectric constant, epsilon, -dielectric loss tangent, e o-dielectric constant in vacuum, epsilon r-relative dielectric constant, Tg delta-dielectric loss tangent;
in microwave heating, the microwave energy Ps absorbed per unit volume of material can be expressed as:
Ps＝2πfεoεrtgδ·E2；
in the formula: f-microwave frequency; e-electric field strength inside the material;
the microwave energy is attenuated as the microwaves propagate through the material, and the power penetration depth of the microwaves, D1/D2, is defined as the microwave power, the distance from the surface of the material to the surface value 1/2, and can be calculated by the following equation:
D1/2＝(3λ_0)/〖8.686πtgδ(ε_r/ε_0)〗^(1/2)；
in the formula: λ 0 — wavelength of microwave in free space; when a material absorbs microwave energy, its rate of temperature rise can be determined by the following equation:
ΔT/Δt＝ε_(rtgδ·f·E^2)/(ρ·C_p)
in the formula: Δ T-temperature increase; c _ p-specific heat of material; ρ is the material density;
the dielectric loss factor epsilon _ rtg delta of the ceramic material at room temperature is extremely small, but rapidly increases along with the temperature rise, which is called temperature flying rise phenomenon, the value of the epsilon _ rtg delta at room temperature is very small, but the value of the flying rise phenomenon rapidly increases, generally, the thermal conductivity of the ceramic is smaller than that of metal, the temperature of a ceramic welding part can be ensured to be the highest by utilizing the fact that the temperature flying rise phenomenon and the thermal conductivity are low, the temperature is rapidly reduced from the welding part to a non-connection end, and the ceramic can be effectively and firmly connected together through the temperature distribution.
Has the beneficial effects that:
1. the ceramic welding device adopting the microwave focusing method adopts the rectangular resonant cavity, has simple structure, easy control, uniform electric field and temperature distribution and stable operation, and can solve the problem of stress caused by nonuniform microwave field distribution;
2. according to the temperature rise characteristic of the ceramic under the action of a microwave focusing mode, the input power is adjusted through a power compensation system, and thermal runaway is inhibited, so that the radial temperature gradient from the center to the surface of the material, caused by the size of the material, is reduced;
3. during welding, the thickness of the middle layer and the grain size of a welding material are reduced, so that the strength of the joint can be improved;
4. in the welding process, the distribution of a microwave field is improved by utilizing a microwave focusing mode, and the thermal uniformity of a welding area is improved, so that the welding size of materials is improved, the types of welding materials are increased, and the application of a microwave welding technology in the industrial field is wider;
5. the welding device adopts the focusing reflection surface with the ellipsoidal curved surface to perform reflection focusing on the microwave beam, and overcomes the defects of high requirement on microwave source power, high manufacturing cost and the like of the traditional non-focusing device, so that compared with the prior art, the welding device has outstanding substantive characteristics and remarkable progress, the special focusing characteristic reduces the requirement of the device on the microwave source power, and the welding strength of the ceramic welding device and the production yield of products are realized.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (9)
1. The utility model provides a microwave focusing method ceramic bonding device, includes that the top is open-ended box-like single mode cavity (1), movable mounting in single mode cavity (1) upper portion and can realize apron (2) that are airtight, its characterized in that:
a microwave power input port (105) is arranged at one side part of the single-mode resonant cavity (1), and an adjustable piston structure (5) connected with a metal moving block (3) in the single-mode resonant cavity (1) is arranged at the other opposite side part; the metal moving block (3) is subjected to fine tuning movement in the single-mode resonant cavity (1) through an adjustable piston structure (5), the side surface opposite to the direction of the microwave power input port (105) is a concave metal reflecting surface (301) capable of reflecting microwaves and focusing the microwaves on one point, and an air-tight structure is arranged between the adjustable piston structure (5) and the single-mode resonant cavity (1);
the other two opposite sides of the single-mode resonant cavity (1) are symmetrically provided with pressurizing mechanisms (6) capable of pressurizing ceramic to be subjected to microwave welding in the single-mode resonant cavity (1), the pressurizing mechanisms (6) extend into the single-mode resonant cavity (1) by adopting pressurizing rods (603), the end parts of the pressurizing mechanisms are provided with contacts (602) capable of abutting against the ceramic to be subjected to microwave welding and pressurizing, the position of the ceramic to be subjected to microwave welding after pressurized clamping is located in the range of a microwave reflection rear focusing point, and a gas-tight sealing structure is arranged between the pressurizing mechanisms (6) and the single-mode resonant cavity (1);
and a vacuumizing port (101) is formed in the side part of the single-mode resonant cavity (1).
2. The ceramic welding device by the microwave focusing method according to claim 1, characterized in that the metal reflecting surface (301), the side wall of the mono-mode cavity (1) opposite to the metal reflecting surface (301) and two side walls form a microwave focusing ceramic welding chamber therebetween, and the pressurizing mechanisms (6) are symmetrically arranged on the two side walls of the microwave focusing ceramic welding chamber.
3. The ceramic welding device by the microwave focusing method according to claim 2, characterized in that wave-absorbing material layers (103) are attached to two side walls of the microwave focusing ceramic welding chamber.
4. The microwave focusing ceramic welding device according to claim 2, wherein the pressurizing mechanism (6) comprises a second flange sleeve (604) which is sleeved and hermetically matched with a central hole (1041) of a first flange sleeve (104) arranged on two side walls of the microwave focusing ceramic welding chamber, and a third flange sleeve (605) which is in flange connection with the second flange sleeve (604) and has a coaxial structure, and a pressurizing adjusting rod (601) which is hermetically matched with central shaft holes of the second flange sleeve (604) and the third flange sleeve (605) is arranged at the rear end of the pressurizing rod (603).
5. A ceramic welding device by microwave focusing method according to claim 4, characterized in that the outer periphery of the third flange sleeve (605) is provided with a screw thread for rotation adjustment for adjusting and controlling the air tightness of the second flange sleeve (604) and the central hole of the first flange sleeve (104); and a pressurizing device is arranged at the end part of the pressurizing adjusting rod (601).
6. The ceramic welding device by the microwave focusing method according to claim 1, wherein the adjustable piston structure (5) comprises a first mounting plate (503) with an open hole corresponding to the open hole (106) formed on the side wall of the single-mode resonant cavity (1) and fixedly mounted, a sliding cavity (501) mounted on the side of the first mounting plate (503) and provided with a sliding hole therein, a piston rod (502) mounted in the sliding cavity (501) and hermetically and slidably matched with the sliding hole, and a nut (504) mounted at the outer end of the piston rod (502); the inner end of the piston rod (502) is fixedly connected with a connecting blind hole (302) at the rear part of the metal moving block (3).
7. The ceramic welding device by the microwave focusing method according to claim 1, characterized in that the cover plate (2) is provided with a vertical buckle (4), and the side part of the mono-mode cavity (1) is provided with a buckle seat (102) which is matched with the vertical buckle (4) to enable the cover plate (2) to realize air-tight sealing with the mono-mode cavity (1).
8. A microwave focusing ceramic welding apparatus according to claim 1, characterized in that the microwave power input port (105) is positioned with a second mounting plate (1052) of open hole type for hermetic connection of the microwave input device.
9. A method for welding ceramics by microwave focusing method, which is carried out by using a device for welding ceramics by microwave focusing method according to any one of claims 1 to 8, comprising the steps of:
s01, opening a cover plate (2) of the single-mode resonant cavity (1), placing a ceramic material to be subjected to microwave welding in a microwave focusing ceramic welding cavity, adjusting the position of the ceramic material to be subjected to microwave welding, and then closing the cover plate (2) to ensure that the interior of the single-mode resonant cavity (1) is hermetically sealed;
s02, the ceramic material to be subjected to microwave welding in the single-mode resonant cavity (1) is pressurized by the pressurizing mechanism (6) and vacuumized to enable the ceramic material to be subjected to microwave welding to be tightly attached together;
s03, introducing microwave energy into the single-mode resonant cavity (1) by using a microwave power supply as a microwave input device, adjusting the position of the metal reflecting surface (301) through the adjustable piston structure (5), so that the microwave energy is gathered on the welding block, and starting to perform microwave welding;
and S04, after welding, opening the cover plate (2) after natural cooling, taking out the microwave welding ceramic material, and completing welding.
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| CN105170981A (en) * | 2015-10-12 | 2015-12-23 | 福州大学 | Microwave hot-pressing sintering and brazing device and using method thereof |
| CN110006077A (en) * | 2019-05-05 | 2019-07-12 | 上海海洋大学 | The method for improving micro-wave oven heating uniformity by lasting adjusting reflection line position |
| CN217265477U (en) * | 2022-04-09 | 2022-08-23 | 上海财盈半导体股份有限公司 | Microwave focusing method ceramic welding device |
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Patent Citations (7)
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| JPH08217558A (en) * | 1995-02-15 | 1996-08-27 | Mitsubishi Heavy Ind Ltd | Ceramic bonding device |
| CN102869182A (en) * | 2012-09-12 | 2013-01-09 | 清华大学 | Large-volume microwave plasma generating device based on coupling window radiation |
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