CN114695165A - 5G chip processing calibration system and calibration device thereof - Google Patents
5G chip processing calibration system and calibration device thereof Download PDFInfo
- Publication number
- CN114695165A CN114695165A CN202011631952.5A CN202011631952A CN114695165A CN 114695165 A CN114695165 A CN 114695165A CN 202011631952 A CN202011631952 A CN 202011631952A CN 114695165 A CN114695165 A CN 114695165A
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- chip
- bearing seat
- chip processing
- servo module
- adjustment unit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a 5G chip processing calibration system and a calibration device thereof. The left servo module and the right servo module drive the bearing seat to move left and right, the placing plate is rotatably installed at the upper end of the bearing seat, an annular rack is fixedly arranged on the lower end face of the placing plate, a servo motor is fixedly arranged at the upper end of the bearing seat, and the output end of the servo motor is meshed with the annular rack through a transmission gear. The invention relates to the technical field of 5G chip processing. The chip position is detected through the detection camera, the front servo module, the rear servo module, the left servo module, the right servo module and the servo motor are controlled to drive the chip to perform plane displacement and angle rotation, the chip position is adjusted to an appointed position, and the production precision is improved.
Description
Technical Field
The invention relates to the technical field of 5G chip processing, in particular to a 5G chip processing calibration system and a calibration device thereof.
Background
The 5G chip is a chip capable of being connected with 5G high-speed data service, when the chip is produced and processed, the chip needs to be calibrated again from one process to another process, poor processing precision is prevented, and an existing calibration mechanism or system is complex in structure and high in cost. In view of the above drawbacks, it is necessary to design a 5G chip processing calibration system and a calibration device thereof.
Disclosure of Invention
The invention aims to provide a 5G chip processing calibration system and a calibration device thereof, so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the 5G chip processing calibration system comprises a visual detection unit, a terminal unit, a front position adjusting unit, a rear position adjusting unit, a left position adjusting unit, a right position adjusting unit and a rotation angle adjusting unit, wherein the visual detection unit is used for photographing and sampling the chip, transmitting data to the terminal unit, judging the front position, the rear position, the left position and the right position of the chip by the terminal, judging whether an angle deviation exists or not, and transmitting data to be adjusted to the front position adjusting unit, the rear position adjusting unit, the left position adjusting unit, the right position adjusting unit and the rotation angle adjusting unit respectively to adjust the position of the chip.
5G chip processing calibration device, including placing the dish, it is equipped with the detection camera to place a set upper end, it is equipped with the conveying board base to place a set lower extreme, servo module around conveying board base upper end is fixed to be equipped with, servo module upper end activity is equipped with about around, servo module drives about, servo module is the front and back displacement motion about servo module drives, it is equipped with the bearing frame to control servo module upper end activity, control servo module and drive the bearing frame and do about displacement motion, it rotates to install in the bearing frame upper end to place a set, it is fixed to be equipped with annular rack to place a set lower terminal surface, the fixed servo motor that is equipped with in bearing frame upper end, the servo motor output passes through drive gear and annular rack mesh mutually.
Preferably, the placing disc is circular, and the center of the lower end of the placing disc is rotatably connected with the upper end of the bearing seat through a rotating shaft.
Preferably, the rotating shaft is arranged at the center point of the annular rack.
Preferably, still include the conveyer belt, the conveying plate base is fixed mounting on the conveyer belt.
Compared with the prior art, the 5G chip processing calibration system and the calibration device thereof detect the position of the chip through the detection camera, and adjust the position of the chip to a specified position by controlling the front servo module, the rear servo module, the left servo module, the right servo module and the servo motor to drive the chip to perform plane displacement and angle rotation, so that the production precision is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention without limiting the invention in which:
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of the angle adjusting mechanism of the present invention.
In the drawings:
1. detecting a camera; 2. placing a tray; 3. an annular rack; 4. a rotating shaft; 5. a transfer plate base; 6. a front and rear servo module; 7. a left and right servo module; 8. a bearing seat; 9. a transmission gear; 10. a servo motor.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: the 5G chip processing calibration system comprises a visual detection unit, a terminal unit, a front position adjusting unit, a rear position adjusting unit, a left position adjusting unit, a right position adjusting unit and a rotation angle adjusting unit, wherein the visual detection unit is used for photographing and sampling the chip, transmitting data to the terminal unit, judging the front position, the rear position, the left position and the right position of the chip by the terminal, judging whether an angle deviation exists or not, and transmitting data to be adjusted to the front position adjusting unit, the rear position adjusting unit, the left position adjusting unit, the right position adjusting unit and the rotation angle adjusting unit respectively to adjust the position of the chip.
5G chip processing calibration device, including placing the disc 2, place the disc 2 upper end and have detecting camera 1, place the disc 2 and take the form of the circular, place the disc 2 lower end center and bearing 8 upper end and connect through the pivot 4 to rotate, place the disc 2 lower end and have conveying plate base 5, the apparatus also includes the conveyer belt, conveying plate base 5 is fixedly mounted on conveyer belt, conveying plate base 5 upper end is fixedly equipped with front and back servo module 6, front and back servo module 6 upper end activity have left and right servo module 7, front and back servo module 6 drive left and right servo module 7 do the front and back displacement movement, left and right servo module 7 upper end activity have bearing 8, left and right servo module 7 drive bearing 8 do the left and right displacement movement, place the disc 2 and rotate and mount on bearing 8 upper ends, place disc 2 lower end face and fixedly have annular rack 3, the pivot 4 locates in the central point of the annular rack 3, the upper end of the bearing seat 8 is fixedly provided with a servo motor 10, and the output end of the servo motor 10 is meshed with the annular rack 3 through a transmission gear 9.
The specific working principle of the present invention will be explained in detail below: place and be equipped with the 5G chip on the dish 2 (carry by last process), the conveyer belt drives the chip and arranges in under the detection camera 1, detection camera 1 detects the chip position, judge whether there is the deviation, if there is not the deviation, the conveyer belt brings the chip into next process, if there is the deviation, servo module 6 drives the plane position of placing 2 upper ends chips of dish with about servo module 7 through front and back servo module, it rotates to drive gear 9 through servo motor 10, drive gear 9 meshes with annular rack 3, will place a dish 2 and rotate, drive the chip and carry out rotation adjustment, when adjusting to the assigned position, the conveyer belt brings the chip into next process.
In summary, the 5G chip processing calibration system and the calibration device thereof of the invention detect the position of the chip through the detection camera 1, and adjust the position of the chip to a specified position by controlling the front and rear servo modules 6, the left and right servo modules 7 and the servo motor 10 to drive the chip to perform plane displacement and angle rotation, thereby improving the production accuracy.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1.5G chip processing calibration system, its characterized in that: including visual detection unit, terminal unit, front and back position adjustment unit, control position adjustment unit, rotation angle adjustment unit, visual detection unit takes a picture the sample analysis to the chip, gives terminal unit with data transmission, and the terminal judges around the chip, controls the position to and whether have angular deviation, will need the data of adjusting to transmit respectively around position adjustment unit, control position adjustment unit, rotation angle adjustment unit and carry out position control to the chip.
2.5G chip processing calibration device, including placing dish (2), its characterized in that: the upper end of the placing disc (2) is provided with a detection camera (1), the lower end of the placing disc (2) is provided with a conveying plate base (5), a front and a rear servo modules (6) are fixedly arranged at the upper end of the transmission plate base (5), a left and a right servo modules (7) are movably arranged at the upper end of the front and the rear servo modules (6), the front and rear servo modules (6) drive the left and right servo modules (7) to move back and forth, the upper end of the left and right servo modules (7) is movably provided with a bearing seat (8), the left and right servo modules (7) drive the bearing seat (8) to move left and right, the placing disc (2) is rotatably arranged at the upper end of the bearing seat (8), an annular rack (3) is fixedly arranged on the lower end face of the placing disc (2), the upper end of the bearing seat (8) is fixedly provided with a servo motor (10), and the output end of the servo motor (10) is meshed with the annular rack (3) through a transmission gear (9).
3. The 5G chip processing calibration device of claim 2, wherein: the placing disc (2) is circular, and the center of the lower end of the placing disc (2) is rotatably connected with the upper end of the bearing seat (8) through a rotating shaft (4).
4. The 5G chip processing calibration device of claim 3, wherein: the rotating shaft (4) is arranged at the central point of the annular rack (3).
5. The 5G chip processing calibration device of claim 2, wherein: the conveying plate is characterized by further comprising a conveying belt, and the conveying plate base (5) is fixedly installed on the conveying belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011631952.5A CN114695165A (en) | 2020-12-31 | 2020-12-31 | 5G chip processing calibration system and calibration device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011631952.5A CN114695165A (en) | 2020-12-31 | 2020-12-31 | 5G chip processing calibration system and calibration device thereof |
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| Publication Number | Publication Date |
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| CN114695165A true CN114695165A (en) | 2022-07-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011631952.5A Pending CN114695165A (en) | 2020-12-31 | 2020-12-31 | 5G chip processing calibration system and calibration device thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116417389A (en) * | 2023-06-08 | 2023-07-11 | 上海果纳半导体技术有限公司 | Wafer box conveying device and method |
-
2020
- 2020-12-31 CN CN202011631952.5A patent/CN114695165A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116417389A (en) * | 2023-06-08 | 2023-07-11 | 上海果纳半导体技术有限公司 | Wafer box conveying device and method |
| CN116417389B (en) * | 2023-06-08 | 2023-08-15 | 上海果纳半导体技术有限公司 | Wafer box conveying device and method |
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