CN114695162A - 基板清洗系统及基板清洗方法 - Google Patents
基板清洗系统及基板清洗方法 Download PDFInfo
- Publication number
- CN114695162A CN114695162A CN202011599507.5A CN202011599507A CN114695162A CN 114695162 A CN114695162 A CN 114695162A CN 202011599507 A CN202011599507 A CN 202011599507A CN 114695162 A CN114695162 A CN 114695162A
- Authority
- CN
- China
- Prior art keywords
- substrate
- nozzle
- cleaning system
- substrate cleaning
- support chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 82
- 238000004140 cleaning Methods 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims description 20
- 239000007788 liquid Substances 0.000 claims abstract description 34
- 239000007921 spray Substances 0.000 claims abstract description 16
- 238000005507 spraying Methods 0.000 claims abstract description 14
- 239000012530 fluid Substances 0.000 claims description 21
- 230000003068 static effect Effects 0.000 claims description 13
- 238000011010 flushing procedure Methods 0.000 claims description 12
- 238000007599 discharging Methods 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 description 8
- 230000005611 electricity Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- LLPOLZWFYMWNKH-CMKMFDCUSA-N hydrocodone Chemical compound C([C@H]1[C@H](N(CC[C@@]112)C)C3)CC(=O)[C@@H]1OC1=C2C3=CC=C1OC LLPOLZWFYMWNKH-CMKMFDCUSA-N 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011599507.5A CN114695162A (zh) | 2020-12-29 | 2020-12-29 | 基板清洗系统及基板清洗方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011599507.5A CN114695162A (zh) | 2020-12-29 | 2020-12-29 | 基板清洗系统及基板清洗方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN114695162A true CN114695162A (zh) | 2022-07-01 |
Family
ID=82132948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202011599507.5A Pending CN114695162A (zh) | 2020-12-29 | 2020-12-29 | 基板清洗系统及基板清洗方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN114695162A (zh) |
-
2020
- 2020-12-29 CN CN202011599507.5A patent/CN114695162A/zh active Pending
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20240307 Address after: 518000, Building D, 101, Zhongke Valley Industrial Park, Zhonghuan Avenue, Shanxia Community, Pinghu Street, Longgang District, Shenzhen City, Guangdong Province Applicant after: Shenzhen Pengxin Microintegrated Circuit Manufacturing Co.,Ltd. Country or region after: China Address before: No. 16, Chuangxin Avenue, Ningxi street, Zengcheng District, Guangzhou, Guangdong 511300 Applicant before: Guangzhou integrated circuit technology Research Institute Co.,Ltd. Country or region before: China |