CN114649211A - Surface coating process of lead frame - Google Patents

Surface coating process of lead frame Download PDF

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Publication number
CN114649211A
CN114649211A CN202011500584.0A CN202011500584A CN114649211A CN 114649211 A CN114649211 A CN 114649211A CN 202011500584 A CN202011500584 A CN 202011500584A CN 114649211 A CN114649211 A CN 114649211A
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China
Prior art keywords
lead frame
workpiece
coating process
surface coating
electroplating
Prior art date
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Pending
Application number
CN202011500584.0A
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Chinese (zh)
Inventor
何志刚
王敏燕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui Dongke Semiconductor Co ltd
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Anhui Dongke Semiconductor Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anhui Dongke Semiconductor Co ltd filed Critical Anhui Dongke Semiconductor Co ltd
Priority to CN202011500584.0A priority Critical patent/CN114649211A/en
Publication of CN114649211A publication Critical patent/CN114649211A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4821Flat leads, e.g. lead frames with or without insulating supports
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4821Flat leads, e.g. lead frames with or without insulating supports
    • H01L21/4835Cleaning, e.g. removing of solder

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

The invention relates to the technical field of coating, and particularly discloses a surface coating process of a lead frame, which comprises the following steps: s1, preprocessing; s2, ion cleaning; s3, electroplating; and S4, preparing a protective layer. The surface coating process of the lead frame provided by the invention can improve the activity of the surface of a workpiece by utilizing ion cleaning, can enhance the subsequent coating effect, can improve the bonding strength of a coating and the workpiece, is matched with electroplating treatment to improve the stability of a formed film, is not easy to fall off, further enhances the corrosion resistance, prolongs the service life of the lead frame, and can play a role in protecting the coating by being matched with a protective layer.

Description

Surface coating process of lead frame
Technical Field
The invention relates to the technical field of film coating, in particular to a surface film coating process of a lead frame.
Background
The lead frame is used as a chip carrier of an integrated circuit, is a key structural member for realizing the electrical connection between a leading-out end of an internal circuit of a chip and an external lead by means of bonding materials (gold wires, aluminum wires and copper wires) to form an electrical circuit, plays a role of a bridge connected with an external lead, needs to be used in most semiconductor integrated blocks and is an important basic material in the electronic information industry.
In order to guarantee the service life and the use effect of electronic products, the quality of a lead frame needs to be guaranteed, so that the surface of the lead frame needs to be subjected to film coating treatment, the strength of the material is improved, the toughness is improved, and the service life of the lead frame is guaranteed.
Disclosure of Invention
The invention mainly aims to provide a surface coating process of a lead frame, which can effectively solve the problems in the prior art.
A surface coating process of a lead frame comprises the following steps:
s1, preprocessing;
s2, ion cleaning;
s3, electroplating treatment;
and S4, preparing a protective layer.
The preprocessing in step S1 includes:
1) polishing the formed lead frame to remove burrs on the surface;
2) putting the polished lead frame workpiece into pretreatment liquid, carrying out ultrasonic treatment for 4-6 min, and removing floating dust and grease;
wherein: the pretreatment solution is prepared from polyepoxy succinic acid sodium, sodium gluconate and fatty alcohol-polyoxyethylene ether sodium sulfate according to the weight ratio of 1: 1-2.5: 3-5.
In the step S2, the ion cleaning enables a large amount of active particles such as ions, excited molecules, radicals and the like in the plasma to act on the surface of the solid sample, which not only can remove pollutants and impurities on the surface, but also enables the plasma to act on the surface of the solid, so as to break the original chemical bonds on the surface of the solid, and the radicals in the plasma and the bonds form a network cross-linking structure, thereby improving the surface activity of the material.
The specific operation mode of the electroplating treatment in the step S3 is as follows: putting the lead frame workpiece subjected to ion cleaning into an electrolyte, using the lead frame workpiece as a positive electrode, using a stainless steel plate as a negative electrode, performing electroplating treatment for 8-10 min, and forming a uniform, compact and well-combined metal or alloy deposition layer on the surface of the workpiece by electrolysis, wherein the deposition thickness is 2-5 microns.
In the step S3, the voltage is 320-380V, the current is 15-25A, and the frequency is 400-600 Hz in the electroplating process.
The specific operation mode of preparing the protective layer in the step S4 is as follows: after washing and drying the electroplated lead frame workpiece, uniformly coating the poly (trifluoropropylmethylsiloxane) on the surface of the workpiece, carrying out curing reaction for 2-3 h at room temperature, and carrying out heat treatment for 1-2 h at 100-120 ℃ to obtain a surface protection layer, wherein the thickness of the protection layer is 1-3 mu m.
The surface coating process of the lead frame provided by the invention can improve the activity of the surface of a workpiece by utilizing ion cleaning, can enhance the subsequent coating effect, can improve the bonding strength of a coating and the workpiece, improves the stability of film formation, is not easy to fall off, further enhances the corrosion resistance, prolongs the service life of the lead frame, and can play a role in protecting the coating by matching with a protective layer.
Drawings
Fig. 1 is a process flow diagram of a surface coating process of a lead frame according to the present invention.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
As shown in fig. 1, a surface coating process for a lead frame specifically comprises the following steps:
s1, preprocessing;
s2, ion cleaning;
s3, electroplating;
and S4, preparing a protective layer.
The preprocessing in step S1 includes:
1) polishing the formed lead frame to remove burrs on the surface;
2) putting the polished lead frame workpiece into pretreatment liquid, carrying out ultrasonic treatment for 4-6 min, and removing floating dust and grease;
wherein: the pretreatment solution is prepared from polyepoxy succinic acid sodium, sodium gluconate and fatty alcohol-polyoxyethylene ether sodium sulfate according to the weight ratio of 1: 1-2.5: 3-5.
The polishing process can be carried out by adopting fixed polishing equipment or a handheld polishing machine.
In the step S2, the ion cleaning enables a large amount of active particles such as ions, excited molecules, radicals and the like in the plasma to act on the surface of the solid sample, which not only can remove pollutants and impurities on the surface, but also enables the plasma to act on the surface of the solid, so as to break the original chemical bonds on the surface of the solid, and the radicals in the plasma and the bonds form a network cross-linking structure, thereby improving the surface activity of the material.
The specific operation mode of the electroplating treatment in the step S3 is as follows: putting the lead frame workpiece subjected to ion cleaning into an electrolyte, using the lead frame workpiece as a positive electrode, using a stainless steel plate as a negative electrode, performing electroplating treatment for 8-10 min, and forming a uniform, compact and well-combined metal or alloy deposition layer on the surface of the workpiece by electrolysis, wherein the deposition thickness is 2-5 microns.
In the step S3, the voltage is 320-380V, the current is 15-25A, and the frequency is 400-600 Hz.
The specific operation mode for preparing the protective layer in the step S4 is as follows: after washing and drying the electroplated lead frame workpiece, uniformly coating the poly (trifluoropropylmethylsiloxane) on the surface of the workpiece, carrying out curing reaction for 2-3 h at room temperature, and carrying out heat treatment for 1-2 h at 100-120 ℃ to obtain a surface protection layer, wherein the thickness of the protection layer is 1-3 mu m.
The surface coating process of the lead frame, provided by the invention, has the advantages that the surface of the workpiece is pretreated firstly, the subsequent coating effect and the coating quality can be ensured, the activity of the surface of the workpiece can be improved by matching with ion cleaning, the subsequent coating effect can be enhanced, the bonding strength of the coating and the workpiece can be improved, the film forming stability is improved, the film is not easy to fall off, the corrosion resistance is further enhanced, the service life of the lead frame is prolonged, in addition, the coating can be protected by matching with a protective layer, meanwhile, the production cost is greatly reduced, the process flow is simplified, the processing efficiency is improved, the labor intensity of workers is reduced, the prepared protective film has stable performance, and is hard in texture and stable in chemical performance and cannot be denatured under high-temperature environment and ultraviolet irradiation.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (6)

1. A surface coating process of a lead frame is characterized in that: the specific process comprises the following steps:
s1, preprocessing;
s2, ion cleaning;
s3, electroplating;
and S4, preparing a protective layer.
2. The surface coating process of the lead frame according to claim 1, wherein: the preprocessing in step S1 includes:
1) polishing the formed lead frame to remove burrs on the surface;
2) putting the polished lead frame workpiece into pretreatment liquid, carrying out ultrasonic treatment for 4-6 min, and removing floating dust and grease;
wherein: the pretreatment solution is prepared from sodium polyepoxysuccinate, sodium gluconate and fatty alcohol-polyoxyethylene ether sodium sulfate according to the weight ratio of 1: 1-2.5: 3-5.
3. The surface coating process of the lead frame according to claim 1, wherein: in the step S2, the ion cleaning enables a large amount of active particles such as ions, excited molecules, radicals and the like in the plasma to act on the surface of the solid sample, which not only can remove pollutants and impurities on the surface, but also enables the plasma to act on the surface of the solid, so as to break the original chemical bonds on the surface of the solid, and the radicals in the plasma and the bonds form a network cross-linking structure, thereby improving the surface activity of the material.
4. The surface coating process of the lead frame according to claim 1, wherein: the specific operation mode of the electroplating treatment in the step S3 is as follows: putting the lead frame workpiece subjected to ion cleaning into an electrolyte, using the lead frame workpiece as a positive electrode, using a stainless steel plate as a negative electrode, performing electroplating treatment for 8-10 min, and forming a uniform, compact and well-combined metal or alloy deposition layer on the surface of the workpiece by electrolysis, wherein the deposition thickness is 2-5 microns.
5. The surface coating process of the lead frame according to claim 1, wherein: in the step S3, the voltage is 320-380V, the current is 15-25A, and the frequency is 400-600 Hz in the electroplating process.
6. The surface coating process of the lead frame according to claim 1, wherein:
the specific operation mode for preparing the protective layer in the step S4 is as follows: after washing and drying the electroplated lead frame workpiece, uniformly coating the poly (trifluoropropylmethylsiloxane) on the surface of the workpiece, carrying out curing reaction for 2-3 h at room temperature, and carrying out heat treatment for 1-2 h at 100-120 ℃ to obtain a surface protection layer, wherein the thickness of the protection layer is 1-3 mu m.
CN202011500584.0A 2020-12-17 2020-12-17 Surface coating process of lead frame Pending CN114649211A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011500584.0A CN114649211A (en) 2020-12-17 2020-12-17 Surface coating process of lead frame

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011500584.0A CN114649211A (en) 2020-12-17 2020-12-17 Surface coating process of lead frame

Publications (1)

Publication Number Publication Date
CN114649211A true CN114649211A (en) 2022-06-21

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011500584.0A Pending CN114649211A (en) 2020-12-17 2020-12-17 Surface coating process of lead frame

Country Status (1)

Country Link
CN (1) CN114649211A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115976465A (en) * 2022-12-27 2023-04-18 天津美泰真空技术有限公司 Surface coating process of chip carrier

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115976465A (en) * 2022-12-27 2023-04-18 天津美泰真空技术有限公司 Surface coating process of chip carrier

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