CN114636506A - Dual-redundancy differential pressure sensor - Google Patents
Dual-redundancy differential pressure sensor Download PDFInfo
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- CN114636506A CN114636506A CN202210282628.XA CN202210282628A CN114636506A CN 114636506 A CN114636506 A CN 114636506A CN 202210282628 A CN202210282628 A CN 202210282628A CN 114636506 A CN114636506 A CN 114636506A
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- 238000007789 sealing Methods 0.000 claims description 10
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- 238000003466 welding Methods 0.000 claims description 7
- 230000009977 dual effect Effects 0.000 claims 1
- 230000008901 benefit Effects 0.000 abstract description 7
- 238000009434 installation Methods 0.000 abstract description 7
- 238000012360 testing method Methods 0.000 abstract description 6
- 238000013461 design Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/06—Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
Abstract
The invention discloses a dual-redundancy differential pressure sensor, which comprises an outer shell; the high-pressure-end pressure-sensing device comprises an installation connector, wherein a high-pressure-end pressure-sensing cavity and a low-pressure-end pressure-sensing cavity are arranged at one end of the installation connector facing the outer shell, and a high-pressure-end pressure-guiding flow channel and a low-pressure-end pressure-guiding flow channel which are respectively communicated with the high-pressure-sensing cavity and the low-pressure-sensing cavity to the outside are arranged at the other end of the installation connector; two absolute pressure sensitive cores; a main control circuit board; and an electrical connector. The dual-redundancy differential pressure sensor realizes differential pressure signal test by using the two absolute pressure sensitive cores, so that two paths of independent and same output signals are obtained, and the dual-redundancy differential pressure sensor has high reliability; and the volume of the absolute pressure sensitive core body is smaller than that of the differential pressure sensitive core body, and only two pressure guide flow passages are needed to be arranged at the mounting joint, so that the sensor has the advantages of compact structure, small volume and light weight, and the sensor and the mounting joint thereof can realize miniaturization design.
Description
Technical Field
The invention relates to the technical field of differential pressure sensors, in particular to a dual-redundancy differential pressure sensor.
Background
A sensor is a device or apparatus that can sense physical signals and can convert the physical signals into usable and outputtable electrical signals according to a certain rule. The sensor is widely applied to various industrial automatic control environments, relates to the fields of water conservancy, hydropower, aerospace and the like, and has high requirement on quality control of the sensor because the working environment of the sensor is often in a high-temperature and high-pressure environment.
The differential pressure sensor is one of the sensors, the differential pressure refers to the difference between any two pressures, the differential pressure sensor is divided into a single-redundancy differential pressure sensor and a double-redundancy differential pressure sensor, the existing single-redundancy differential pressure sensor has no redundancy design, and the reliability is low; the existing dual-redundancy differential pressure sensor usually adopts two differential pressure sensitive cores, firstly, the size of the differential pressure sensitive core is generally large, so that the dual-redundancy differential pressure sensor has large volume and cannot be miniaturized; secondly, the dual-redundancy differential pressure sensor adopting the two differential pressure sensitive cores must be provided with three pressure guiding runners, so that the installation joint of the dual-redundancy differential pressure sensor must have a space for arranging the three pressure guiding runners, and the dual-redundancy differential pressure sensor further has large volume and cannot be miniaturized.
In view of the above, the present inventors have made extensive studies and research on various defects and inconveniences caused by the incomplete structural design of the differential pressure sensor.
Disclosure of Invention
The invention aims to provide a dual-redundancy differential pressure sensor with high reliability and small volume.
In order to achieve the above purpose, the solution of the invention is:
a dual-redundancy differential pressure sensor comprises an outer shell; the mounting joint is fixed at one end of the outer shell in a sealing mode, a high-pressure end pressure sensing cavity and a low-pressure end pressure sensing cavity are formed in one end, facing the outer shell, of the mounting joint, and a high-pressure end pressure guiding flow channel and a low-pressure end pressure guiding flow channel which are used for communicating the high-pressure end pressure sensing cavity and the low-pressure end pressure sensing cavity to the outside respectively are formed in the other end of the mounting joint; the two absolute pressure sensitive cores are respectively and hermetically arranged at ports of the high-pressure end pressure sensing cavity and the low-pressure end pressure sensing cavity facing the inside of the shell, a terminal pin group of a Wheatstone bridge is arranged on the absolute pressure sensitive cores, and the terminal pin group comprises a positive half-bridge pin group and a negative half-bridge pin group; the main control circuit board, the cooperation of main control circuit board is equipped with two ways independent signal output module in the shell on the main control circuit board: the first signal output module is communicated with a positive half-bridge needle group at a high-voltage end and a positive half-bridge needle group at a low-voltage end, and the second signal output module is communicated with a negative half-bridge needle group at the high-voltage end and a negative half-bridge needle group at the low-voltage end; and the electric connector is fixed at the other end of the outer shell in a sealing way and is communicated with the main control circuit board.
The mounting joint and the outer shell as well as the outer shell and the electric connector are fixed through laser welding; and the two absolute pressure sensitive cores are also respectively fixed on the ports of the high-pressure end pressure sensing cavity and the low-pressure end pressure sensing cavity by laser welding.
The absolute pressure sensitive core body is connected and conducted with the main control circuit board and the electric connector through signal lines.
The main control circuit board is locked at one end, facing the outer shell, of the mounting joint through screws.
The outside of erection joint is between high pressure end pressure introduction runner opening and low pressure end pressure introduction runner opening, and one side that the low pressure end pressure introduction runner opening is close to the shell body all is equipped with the seal groove, the seal groove fit has the sealing washer.
The main control circuit board is provided with two independent signal conditioning modules for temperature compensation and debugging of voltage signals, and the two independent signal output modules are respectively connected to the two independent signal conditioning modules.
The absolute pressure sensitive core body adopts an SOI MEMS pressure sensor chip as a sensitive element.
After the scheme is adopted, the two absolute pressure sensitive cores are adopted to respectively measure the pressure of the high-pressure end pressure sensing cavity and the low-pressure end pressure sensing cavity, and the two independent signal output modules are recombined and conducted through the Wheatstone electrified bridging line needle group, so that two independent and same differential pressure signals can be output, and the sensor disclosed by the invention becomes a dual-redundancy differential pressure sensor and has the advantage of high reliability; in addition, the volume of the absolute pressure sensitive core body is smaller than that of the differential pressure sensitive core body, and only two pressure leading runners (a high-pressure end pressure leading runner and a low-pressure end pressure leading runner) are needed to be arranged on the mounting connector, so that the sensor has the advantages of compact structure, small volume and light weight, and the sensor and the mounting connector thereof can realize miniaturization design.
In addition, the dual-redundancy differential pressure sensor realizes differential pressure signal testing by using the two absolute pressure sensitive cores, and can realize low differential pressure signal testing while the high-pressure end and the low-pressure end of the dual-redundancy differential pressure sensor have high overload capacity by selecting the measuring range of the absolute pressure sensitive cores, so that the overload capacity of the sensor is improved.
Drawings
FIG. 1 is a cross-sectional view of a preferred embodiment of the present invention;
FIG. 2 is a schematic diagram of a Wheatstone bridge in an absolute pressure sensitive core according to a preferred embodiment of the present invention;
fig. 3 is a schematic diagram illustrating the connection of two absolute pressure sensitive cores, a main control circuit board and an electrical connector according to a preferred embodiment of the present invention.
Detailed Description
In order to further explain the technical solution of the present invention, the present invention is explained in detail by the following specific examples.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus are not to be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
As shown in fig. 1, a preferred embodiment of a dual-redundancy differential pressure sensor of the present invention comprises an outer casing 1; the mounting connector 2 is hermetically fixed at one end of the outer shell 1, one end of the mounting connector 2 facing the outer shell 1 is provided with a high-pressure end pressure sensing cavity 21 and a low-pressure end pressure sensing cavity 22, and the other end of the mounting connector 2 is provided with a high-pressure end pressure guiding flow channel 23 and a low-pressure end pressure guiding flow channel 24 which respectively communicate the high-pressure end pressure sensing cavity 21 and the low-pressure end pressure sensing cavity 22 to the outside; the two absolute pressure sensitive cores 3 are respectively and hermetically arranged at the ports of the high-pressure end pressure sensing cavity 21 and the low-pressure end pressure sensing cavity 22 facing the inside of the outer shell 1, a terminal pin group 31 of a Wheatstone bridge is arranged on the absolute pressure sensitive cores 3, and the terminal pin group 31 comprises a positive half-bridge pin group 31a and a negative half-bridge pin group 31 b; main control circuit board 4, main control circuit board 4 cooperation is equipped with two way independent signal output modules 41 on the main control circuit board 4 in the shell 1: the first signal output module 41a and the second signal output module 41b are connected, the first signal output module 41a is connected with the positive half-bridge pin group 31a at the high-voltage end and the positive half-bridge pin group 31a at the low-voltage end, and the second signal output module 41b is connected with the negative half-bridge pin group 31b at the high-voltage end and the negative half-bridge pin group 31b at the low-voltage end; and the electric connector 5 is hermetically fixed at the other end of the outer shell 1 and is communicated with the main control circuit board 4.
The positive half-bridge pin group 31a at the high-voltage end is the positive half-bridge pin group 31a in the wheatstone bridge connection pin group 31 mounted on the absolute pressure sensitive core body 3 in the high-voltage end pressure sensing cavity 21; the negative half-bridge needle group 31b at the high-voltage end is the negative half-bridge needle group 31b in the Wheatstone energized bridge wire needle group 31 arranged on the absolute pressure sensitive core body 3 in the high-voltage end pressure sensing cavity 21; the positive half-bridge pin group 31a at the low-voltage end is the positive half-bridge pin group 31a in the Wheatstone bridge wiring pin group 31 arranged on the absolute pressure sensitive core body 3 in the low-voltage end pressure sensing cavity 22; the negative half-bridge needle group 31b on the low-voltage end is the negative half-bridge needle group 31b in the wheatstone energized bridge line needle group 31 mounted on the absolute pressure sensitive core body 3 in the low-voltage end pressure sensing cavity 22.
As shown in fig. 2, a schematic view of a wheatstone bridge in an absolute pressure sensitive core 3 is shown; as shown in fig. 3, a schematic connection diagram of two absolute pressure sensitive cores 3, a main control circuit board 4 and an electrical connector 5 is shown. Specifically, a positive half-bridge pin group 31a is formed by a first power supply positive electrode, a first power supply negative electrode and an output positive electrode in a wheatstone bridge in the absolute pressure sensitive core body 3; the second power supply positive electrode, the second power supply negative electrode and the output negative electrode form a negative half-bridge needle group 31 b. Wherein, the first power supply anode and the second power supply anode can be conducted and combined.
When the pressure sensor is used, the first signal output module 41a in the dual-redundancy differential pressure sensor obtains the pressure value of the high-pressure-end pressure sensing cavity 21 through the positive half-bridge needle group 31a at the high-pressure end, obtains the pressure value of the low-pressure-end pressure sensing cavity 22 through the positive half-bridge needle group 31a at the low-pressure end, and outputs the difference value of the two pressure values as a differential pressure signal of the first redundancy; the second signal output module 41b obtains the pressure value of the high-pressure end pressure sensing cavity 21 through the negative half-bridge needle group 31b at the high-pressure end, obtains the pressure value of the low-pressure end pressure sensing cavity 22 through the negative half-bridge needle group 31b at the low-pressure end, and outputs the difference value of the two pressure values as a differential pressure signal of a second redundancy; therefore, the invention can output two paths of independent and same differential pressure signals.
The key point of the invention is that the invention adopts two absolute pressure sensitive cores 3 to respectively measure the pressure of the high-pressure end pressure sensing cavity 21 and the low-pressure end pressure sensing cavity 22, and the two absolute pressure sensitive cores are recombined and conducted with the two independent signal output modules 41 through the Wheatstone bridge wiring pin group 31, so that two independent and same differential pressure signals can be output, and the sensor of the invention becomes a dual-redundancy differential pressure sensor and has the advantage of high reliability; in addition, the volume of the absolute pressure sensitive core body 3 is smaller than that of the differential pressure sensitive core body, and only two pressure leading runners (a high-pressure end pressure leading runner 23 and a low-pressure end pressure leading runner 24) need to be arranged on the mounting connector 2, so that the sensor has the advantages of compact structure, small volume and light weight, and the sensor and the mounting connector 2 thereof can realize miniaturization design.
In addition, the dual-redundancy differential pressure sensor realizes differential pressure signal test by using the two absolute pressure sensitive cores 3, and can realize low differential pressure signal test by selecting the measurement range of the absolute pressure sensitive cores 3, and simultaneously, the high-pressure end and the low-pressure end of the dual-redundancy differential pressure sensor have high overload capacity, thereby improving the overload capacity of the sensor.
The mounting joint 2 and the outer shell 1, and the outer shell 1 and the electric connector 5 are fixed through laser welding; wherein, two absolute pressure sensitive cores 3 are also fixed on the ports of the high pressure end pressure sensing cavity 21 and the low pressure end pressure sensing cavity 22 respectively by laser welding. The laser welding installation mode has firm in connection, stable, dustproof and waterproof advantage.
The absolute pressure sensitive core body 3 and the main control circuit board 4, and the main control circuit board 4 and the electric connector 5 are connected and conducted through a signal line 6.
The main control circuit board 4 is locked at one end of the mounting connector 2 facing the outer shell 1 by screws. The main control circuit board 4 is not arranged on the inner wall of the outer shell 1, so that the main control circuit board 4 and the signal wires 6 are not obstructed by the small inner space of the outer shell 1 when being arranged, and the novel multifunctional electric connector has the advantage of convenience in installation.
The outside of the mounting joint 2 is provided with a sealing groove 25 between the opening of the high-pressure end pressure-leading flow passage 23 and the opening of the low-pressure end pressure-leading flow passage 24, and one side of the opening of the low-pressure end pressure-leading flow passage 24, which is close to the outer shell 1, and the sealing ring is matched in the sealing groove 25. During the use, the sensor passes through two seal grooves 25 and sealing washer on the erection joint 2, and the sealed installation is on waiting to detect the equipment to guarantee the leakproofness between sensor and the equipment of waiting to detect, and the leakproofness between high pressure end pressure introduction runner 23 opening and the low pressure end pressure introduction runner 24 opening.
The main control circuit board 4 is provided with two independent signal conditioning modules 42 for performing temperature compensation and debugging on the voltage signal, and the two independent signal output modules 41 are respectively connected to the two independent signal conditioning modules 42.
The temperature of the sensor in the use environment is constantly changed, and the temperature drift caused by the temperature change also seriously influences the pressure signal, so that the measurement accuracy and the consistency of the pressure signal are reduced. The two independent signal conditioning modules 42 on the main control circuit board 4 of the invention respectively carry out temperature compensation and debugging on the two redundant pressure signals, thereby enabling the precision of the output signals to meet the requirements, therefore, the differential pressure signal test is realized by adopting the two absolute pressure sensitive cores 3, two paths of independent and same output signals are obtained, and simultaneously, the measurement precision and the consistency are high under the action of the signal conditioning modules 42. The signal conditioning module 42 is commonly used in the art, and the detailed composition and operation principle thereof are not described herein again.
The absolute pressure sensitive core 3 adopts an SOI MEMS pressure sensor chip as a sensitive element. The absolute pressure sensitive core body 3 adopts an SOI MEMS pressure sensor chip as a sensitive element for sensing pressure, so that the manufactured sensor is an SOI MEMS pressure sensor which is designed according to the theory of piezoresistive effect of a semiconductor, namely, a semiconductor process is adopted, four piezoresistors are manufactured at a certain position of a certain crystal direction of monocrystalline silicon, and a half-open loop type Wheatstone bridge is formed. The positive half-bridge increases in output as the pressure increases, and the negative half-bridge decreases in output as the pressure increases.
The foregoing description of specific exemplary embodiments of the invention has been presented for the purposes of illustration and description and is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain certain principles of the invention and its practical application to enable one skilled in the art to make and use various exemplary embodiments of the invention and various alternatives and modifications as may be appropriate to those skilled in the art without departing from the scope of the invention.
Claims (7)
1. A dual-redundancy differential pressure sensor, characterized in that: the dual-redundancy differential pressure sensor comprises an outer shell;
the mounting joint is fixed at one end of the outer shell in a sealing mode, a high-pressure end pressure sensing cavity and a low-pressure end pressure sensing cavity are formed in one end, facing the outer shell, of the mounting joint, and a high-pressure end pressure guiding flow channel and a low-pressure end pressure guiding flow channel which are used for communicating the high-pressure end pressure sensing cavity and the low-pressure end pressure sensing cavity to the outside respectively are formed in the other end of the mounting joint;
the two absolute pressure sensitive cores are respectively and hermetically arranged at ports of the high-pressure end pressure sensing cavity and the low-pressure end pressure sensing cavity facing the inside of the shell, a terminal pin group of a Wheatstone bridge is arranged on the absolute pressure sensitive cores, and the terminal pin group comprises a positive half-bridge pin group and a negative half-bridge pin group;
the main control circuit board, the cooperation of main control circuit board is equipped with two ways independent signal output module in the shell on the main control circuit board: the first signal output module is communicated with a positive half-bridge needle group at a high-voltage end and a positive half-bridge needle group at a low-voltage end, and the second signal output module is communicated with a negative half-bridge needle group at the high-voltage end and a negative half-bridge needle group at the low-voltage end;
and the electric connector is fixed at the other end of the outer shell in a sealing way and is communicated with the main control circuit board.
2. A dual-redundancy differential pressure sensor, as recited in claim 1, wherein: the mounting joint and the outer shell as well as the outer shell and the electric connector are fixed through laser welding; and the two absolute pressure sensitive cores are also respectively fixed on the ports of the high-pressure end pressure sensing cavity and the low-pressure end pressure sensing cavity by laser welding.
3. A dual-redundancy differential pressure sensor, as recited in claim 1, wherein: the absolute pressure sensitive core body is connected and conducted with the main control circuit board and the electric connector through signal lines.
4. A dual redundancy differential pressure sensor, as claimed in claim 1, wherein: the main control circuit board is locked at one end, facing the outer shell, of the mounting joint through screws.
5. A dual-redundancy differential pressure sensor, as recited in claim 1, wherein: the outside of erection joint is between high pressure end pressure introduction runner opening and low pressure end pressure introduction runner opening, and one side that the low pressure end pressure introduction runner opening is close to the shell body all is equipped with the seal groove, the seal groove fit has the sealing washer.
6. A dual-redundancy differential pressure sensor, as recited in claim 1, wherein: the main control circuit board is provided with two independent signal conditioning modules for temperature compensation and debugging of voltage signals, and the two independent signal output modules are respectively connected to the two independent signal conditioning modules.
7. A dual-redundancy differential pressure sensor, as recited in claim 1, wherein: the absolute pressure sensitive core body adopts an SOI MEMS pressure sensor chip as a sensitive element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210282628.XA CN114636506A (en) | 2022-03-22 | 2022-03-22 | Dual-redundancy differential pressure sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210282628.XA CN114636506A (en) | 2022-03-22 | 2022-03-22 | Dual-redundancy differential pressure sensor |
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| CN114636506A true CN114636506A (en) | 2022-06-17 |
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Application publication date: 20220617 |