CN114633414A - Method and mold for preparing silica gel product - Google Patents
Method and mold for preparing silica gel product Download PDFInfo
- Publication number
- CN114633414A CN114633414A CN202210213107.9A CN202210213107A CN114633414A CN 114633414 A CN114633414 A CN 114633414A CN 202210213107 A CN202210213107 A CN 202210213107A CN 114633414 A CN114633414 A CN 114633414A
- Authority
- CN
- China
- Prior art keywords
- mold
- silica gel
- preparing
- parylene
- parylene film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 85
- 239000000741 silica gel Substances 0.000 title claims abstract description 85
- 229910002027 silica gel Inorganic materials 0.000 title claims abstract description 85
- 238000000034 method Methods 0.000 title claims abstract description 35
- 229920000052 poly(p-xylylene) Polymers 0.000 claims abstract description 69
- 238000007740 vapor deposition Methods 0.000 claims abstract description 13
- 238000000151 deposition Methods 0.000 claims description 34
- 230000008021 deposition Effects 0.000 claims description 28
- URLKBWYHVLBVBO-UHFFFAOYSA-N p-dimethylbenzene Natural products CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000010935 stainless steel Substances 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 5
- 229920002379 silicone rubber Polymers 0.000 claims description 5
- 239000004945 silicone rubber Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 abstract description 4
- 229920001296 polysiloxane Polymers 0.000 description 23
- 239000000499 gel Substances 0.000 description 12
- 238000001746 injection moulding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 238000002309 gasification Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 230000001054 cortical effect Effects 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 230000002207 retinal effect Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 210000000278 spinal cord Anatomy 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C37/0025—Applying surface layers, e.g. coatings, decorative layers, printed layers, to articles during shaping, e.g. in-mould printing
- B29C37/0028—In-mould coating, e.g. by introducing the coating material into the mould after forming the article
- B29C37/0032—In-mould coating, e.g. by introducing the coating material into the mould after forming the article the coating being applied upon the mould surface before introducing the moulding compound, e.g. applying a gelcoat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C37/0025—Applying surface layers, e.g. coatings, decorative layers, printed layers, to articles during shaping, e.g. in-mould printing
- B29C37/0028—In-mould coating, e.g. by introducing the coating material into the mould after forming the article
- B29C2037/0039—In-mould coating, e.g. by introducing the coating material into the mould after forming the article the coating being applied in powder or particle form
Abstract
The invention relates to a method for preparing a silica gel product and a mould for preparing the silica gel product. The method for preparing the silica gel product comprises the following steps: and carrying out vapor deposition on a mold to form a parylene film on at least the surface of a cavity of the mold, wherein the silica gel product is suitable for being prepared by adopting the mold with the parylene film. The silica gel product prepared by the method has complete shape, does not adhere to the mould particles and has good biocompatibility.
Description
Technical Field
The invention relates to the technical field of preparation of silica gel products, in particular to a method and a die for preparing a silica gel product.
Background
Silica gel is widely used in medical devices due to its good plasticity and biocompatibility. In the related art, the silica gel product is generally manufactured by an injection molding process using a stainless steel mold. However, since the silica gel and the stainless steel are easy to be bonded and adhered to each other, the silica gel product is easily damaged during demolding, so that the silica gel product after demolding is difficult to be prepared into a desired shape, thereby affecting the normal use of the silica gel product, which is particularly obvious for miniaturized silica gel products. In addition, when the silica gel product is demolded, metal particles can adhere to the silica gel product and be polluted, so that the biocompatibility of the silica gel product can be influenced.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, one objective of the present invention is to provide a method for preparing a silica gel article, which has a complete morphology, does not adhere to mold particles and thus has good biocompatibility.
Another object of the present invention is to provide a mold for preparing a silicone product.
A method for making a silica gel article according to an embodiment of the first aspect of the invention comprises the steps of: and carrying out vapor deposition on a mold to form a parylene film on at least the surface of a cavity of the mold, wherein the silica gel product is suitable for being prepared by adopting the mold with the parylene film.
According to the method for preparing the silica gel product, the mold is subjected to vapor deposition to form the parylene film on at least the surface of the cavity of the mold, the silica gel product is suitable for being prepared by the mold with the parylene film, and the prepared silica gel product is complete in shape and good in biocompatibility.
According to some embodiments of the invention, vapor depositing the mold specifically comprises: heating powdered parylene in vacuum to obtain parylene vapor; pyrolyzing the parylene vapor to yield a free radical para-xylene; and introducing the single-radical paraxylene into a deposition chamber to form a parylene film on at least the surface of the cavity of the mold.
According to some embodiments of the invention, prior to passing the free radical para-xylene into the deposition chamber, the method for preparing a silica gel article further comprises: clamping the die by a clamp and then placing the die into the deposition chamber in a suspending manner; or placing the mold on a base plate within the deposition chamber.
According to some embodiments of the invention, after the parylene film is formed on at least a cavity surface of the mold, the method for preparing a silicone gel article further comprises: and coating a silica gel release agent on the surface of the parylene film.
According to some embodiments of the invention, the method for preparing a silica gel article further comprises, prior to vapor depositing the mold: cleaning the mould to remove dirt on the surface of the mould; and drying the cleaned mould.
According to some embodiments of the invention, the mold is a stainless steel mold or an aluminum alloy mold.
According to some embodiments of the invention, the mold comprises a male mold and a female mold.
According to some embodiments of the invention, the silicone article is a silicone mold.
According to some embodiments of the invention, the silica gel article is vapor deposited to form a parylene film on at least a portion of a surface of the silica gel article.
A mold for making a silicone article according to an embodiment of the second aspect of the invention comprises: a mold body having a cavity; the parylene film is arranged on the surface of the cavity.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic flow diagram of a method for making a silica gel article according to an embodiment of the present invention;
FIG. 2 is a schematic flow chart showing the details of the vapor deposition step to the mold of a method for preparing a silica gel article according to an embodiment of the present invention;
FIG. 3 is a schematic flow diagram of a process for preparing a silica gel article according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a deposition chamber according to an embodiment of the invention, in which a mold is shown.
Reference numerals:
the method 100; a deposition chamber 200; a mold 10; a base plate 11; a support frame 12.
Detailed Description
Embodiments of the present invention will be described in detail below, the embodiments described with reference to the drawings being illustrative, and the embodiments of the present invention will be described in detail below.
A method for preparing a silica gel article according to an embodiment of the present invention is described below with reference to fig. 1-4.
As shown in fig. 1 and 4, a method 100 for preparing a silica gel article according to an embodiment of the first aspect of the invention comprises the steps of:
the mold 10 is subjected to vapor deposition to form a parylene film on at least the cavity surface of the mold 10, and the silicone gel article is suitably prepared using the mold 10 having the parylene film.
Here, it should be noted that "forming a parylene film on at least a cavity surface of the mold 10" may be understood as: the parylene film may be formed only on the cavity surface of the mold 10 such as a female mold; alternatively, in addition to forming the parylene film on the cavity surface of the mold 10 such as a female mold, the parylene film may also be formed on the surface of the mold 10 such as a male mold. But is not limited thereto.
Thus, according to the method 100 for preparing a silica gel product of the embodiment of the present invention, by performing vapor deposition on the mold 10 to form a parylene film on at least a cavity surface of the mold 10, and preparing a silica gel product using the mold 10 having the parylene film, in the process of preparing a silica gel product, the silica gel can contact the parylene film, and since the parylene film and the silica gel are not easily adhered to each other, the silica gel product is not damaged during demolding, so that the prepared silica gel product has a complete shape and a precision meeting the use requirement. In addition, the silica gel product can not adhere to particles of the mold, and the biocompatibility of the silica gel product is good.
Moreover, the adoption of the vapor deposition mode can ensure that the parylene film is uniformly formed on the surface of the cavity, and the formed parylene film has no air gap and uniform thickness, thereby further promoting the silica gel product to meet the required form specification.
The silica gel product prepared by the method 100 for preparing a silica gel product according to the embodiment of the present invention is particularly suitable for miniaturized silica gel products (e.g., millimeter-sized silica gel products, etc.), and the silica gel product can be widely and better applied to implantable medical devices (e.g., cochlear implants, implantable retinal electrical stimulators, cortical stimulators, spinal cord stimulators, deep brain stimulators, etc.) and electronic devices such as wearable devices as components.
According to some embodiments of the present invention, in conjunction with fig. 2 and 4, vapor deposition of mold 10 may specifically include:
s11, heating the powdered parylene in vacuum to obtain parylene vapor;
s12, pyrolyzing the parylene vapor to obtain a single-radical paraxylene;
s13, introducing the mono-radical para-xylene into the deposition chamber 200 to form a parylene film on at least a cavity surface of the mold 10.
Wherein the vapor deposition may be chemical vapor deposition. But is not limited thereto. In particular, the vapor deposition process described above may be carried out in an apparatus that includes a vaporization system and a deposition system. The gasification system may include a heating chamber and a furnace chamber, and the deposition system includes a deposition chamber 200. Powdered parylene is placed in a heating chamber, a vacuum atmosphere is formed in the heating chamber, and the powdered parylene is heated in the vacuum heating chamber to sublimate into parylene vapor. Then, parylene vapor is supplied into the furnace chamber, and the parylene vapor undergoes a pyrolysis reaction at a predetermined temperature and is pyrolyzed into a monomer, i.e., mono-radical p-xylene. Then, the free-radical paraxylene is fed into the deposition chamber 200, and the monomer is cooled in the deposition chamber 200 to be deposited as a parylene film on at least the cavity surface of the mold 10.
Therefore, by adopting the vapor deposition step, the parylene film can be effectively ensured to be uniformly deposited on the surface of the cavity of the mold 10, so that the overall shape of the silica gel product prepared by the mold 10 can be more complete, and the biocompatibility is better.
In some alternative examples, the thickness of the parylene film deposited on at least the cavity surface of the mold 10 may be in the order of micrometers. The parylene film is very thin so that the dimensional accuracy of the silicone product made using the mold 10 is not compromised.
In some embodiments of the present invention, the method 100 for preparing a silica gel article may further comprise, prior to passing the free radical para-xylene into the deposition chamber 200:
the mold 10 is held back suspended into the deposition chamber 200 using a clamp (not shown).
In the above steps, an operator may clamp the mold 10 using a clamp, for example, a dedicated clamp, and then place the clamp and the mold 10 together in the deposition chamber 200. The mold 10 is in a suspended state within the deposition chamber 200. The mold 10 is then vapor deposited.
Of course, the present invention is not limited thereto, and in other embodiments of the present invention, the method 100 for preparing a silica gel article may further comprise, before passing the free radical paraxylene into the deposition chamber 200:
the mold 10 is placed on the base plate 11 within the deposition chamber 200.
In the above step, the operator may naturally place the mold 10 on the base plate 11 within the deposition chamber 200 and then perform vapor deposition on the mold 10. Further, as shown in fig. 4, a support frame 12 may be installed on the bottom plate 11 of the deposition chamber 200, and an operator may place the mold 10 on the support frame 12 with the cavity of the mold 10 facing upward so as to form a parylene film on at least the cavity surface of the mold 10.
According to some embodiments of the present invention, after forming the parylene film on at least the cavity surface of the mold 10, the method 100 for preparing the silicone gel article further comprises:
and coating a silica gel release agent on the surface of the parylene film.
Thus, by applying the silicone release agent to the surface of the parylene film of the mold 10, smooth release of the silicone product can be further promoted.
Alternatively, the silicone release agent may be silicone oil or a derivative thereof or the like.
According to some alternative embodiments of the present invention, prior to vapor depositing the mold 10, the method 100 for preparing a silica gel article further comprises:
cleaning the mold 10 to remove the dirt on the surface of the mold 10;
the cleaned mold 10 is dried.
Therefore, the cleaning and drying steps of the mold 10 can make at least the cavity surface of the mold 10 cleaner, which is more beneficial to the deposition of parylene, so that the deposited parylene film does not generate air gaps, have impurities and the like, and the preparation efficiency of the silica gel product can be improved. It is understood that the mold 10 may be cleaned with a cleaning tool (e.g., a brush) and/or a cleaning agent, and the mold 10 may be dried by wiping or the like.
Alternatively, the mold 10 may be a metal mold or a nonmetal mold. When the mold 10 is a metal mold, the mold 10 may be a stainless steel mold or an aluminum alloy mold. Stainless steel molds and aluminum alloy molds have smooth surfaces and are not prone to carry residual particles, which is advantageous for depositing parylene films. Moreover, the hardness of the stainless steel mold and the aluminum alloy mold is large, and the mold 10 is not easily deformed.
It can be understood that the specific material of the mold 10 can be specifically selected according to actual requirements, as long as the material of the mold 10 can provide a mechanical shape, meet processing requirements, and can withstand the curing temperature of the silica gel.
Further, the mold 10 includes a male mold and a female mold. That is, the male and female molds are sub-molds of the mold 10, wherein the female mold may form the above-described cavity of the mold 10 and the male mold may form a core of the mold 10. The male die and the female die are assembled to form the die 10 for injection molding of the silica gel product, the assembled die 10 can mold the silica gel product with a complex structure, and due to the fact that at least the surface of the cavity is deposited with the parylene film, even if the shape of the silica gel product is complex, smooth demolding of the silica gel product can be guaranteed. Optionally, the male die can be an upper die, and the female die can be a lower die; or the male die can be a lower die, and the female die can be an upper die.
Alternatively, in the case where the mold 10 includes a male mold and a female mold, only the female mold may be placed in the deposition chamber such that at least the cavity surface of the female mold is deposited with the parylene film. Further, it is also possible to place a male mold in the deposition chamber with its core surface also deposited with a parylene film.
According to some embodiments of the invention, the silicone product is a silicone mold. The silicone gel product prepared by the method 100 described above is a silicone gel mold, which can be used in combination with other molds as a mold 10 for manufacturing other products, such as a final silicone gel product. Alternatively, the other mold may be a metal mold, which may not require chemical vapor deposition of parylene.
Further, the above silicone gel article, for example, the silicone gel mold, is subjected to vapor deposition to form a parylene film on at least a part of the surface of the above silicone gel article. It should be noted that "a parylene film is formed on at least a part of the surface of the silicone gel article" means that the parylene film may be deposited on only a part of the surface of the silicone gel article, or may be deposited on the entire surface of the silicone gel article. With such an arrangement, when the silica gel product deposited with the parylene film is used as a silica gel mold, the final silica gel product can be prepared by combining with other molds, so that the final silica gel product is easy to demould, and has high surface cleanliness and complete shape.
According to some embodiments of the present invention, the silicone rubber article may be prepared by an injection molding process. As shown in fig. 3, the process of preparing the silicone rubber product by using the injection molding process may include the following steps:
s21, injecting liquid silica gel into the injection port of the mould 10 to fill the cavity of the mould 10 with the liquid silica gel;
s22, curing the silicone, for example, placing the mold 10 as a whole into an oven for heat curing; and
and S23, releasing the solidified silica gel from the mold 10 to obtain the silica gel product.
The mold 10 for manufacturing a silicone rubber article according to an embodiment of the second aspect of the present invention may include a mold body and a parylene film. The mould body is provided with a cavity, and the parylene film is arranged on the surface of the cavity.
According to the mold 10 for preparing the silica gel product, the parylene film is arranged on the surface of the cavity of the mold body, so that the silica gel product can be conveniently released, and the prepared silica gel product can be easily separated from the mold 10, is complete in shape and does not adhere to metal particles.
Further, a portion of the mold body other than the cavity surface may also be provided with a parylene film. For example, the core surface of the mold 10 has a parylene film to further facilitate demolding of the silicone rubber article.
The mold 10 can be prepared by the method 100 for preparing a silica gel product according to the first embodiment.
Other configurations and operations of gasification systems and deposition systems according to embodiments of the invention are known to those of ordinary skill in the art and will not be described in detail herein.
In the description of the present invention, it is to be understood that the terms "thickness", "bottom", "inner", "upper", "lower", and the like, indicate orientations or positional relationships based on those shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description herein, references to the description of "some embodiments" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A method for preparing a silica gel article, comprising the steps of:
and carrying out vapor deposition on a mold to form a parylene film on at least the surface of a cavity of the mold, wherein the silica gel product is suitable for being prepared by adopting the mold with the parylene film.
2. The method of claim 1, wherein vapor depositing the mold specifically comprises:
heating powdered parylene in vacuum to obtain parylene vapor;
pyrolyzing the parylene vapor to yield a free radical para-xylene;
and introducing the single-radical paraxylene into a deposition chamber to form a parylene film on at least the surface of the cavity of the mold.
3. The method of claim 2, wherein prior to passing the free radical para-xylene into the deposition chamber, further comprising:
clamping the die by a clamp and then placing the die into the deposition chamber in a suspending manner; or
Placing the mold on a floor within the deposition chamber.
4. The method for producing a silica gel article according to any one of claims 1 to 3, further comprising, after forming the parylene film on at least a cavity surface of the mold:
and coating a silica gel release agent on the surface of the parylene film.
5. The method for preparing a silica gel article according to any one of claims 1-3, further comprising, prior to vapor depositing the mold:
cleaning the mould to remove dirt on the surface of the mould;
and drying the cleaned mould.
6. The method for preparing a silica gel article according to any one of claims 1-3, wherein the mold is a stainless steel mold or an aluminum alloy mold.
7. The method for preparing a silica gel article according to any one of claims 1-3 wherein the mold comprises a male mold and a female mold.
8. The method for preparing a silica gel article according to any one of claims 1 to 3, wherein the silica gel article is a silica gel mold.
9. The method of claim 8, wherein the silica gel article is vapor deposited to form a parylene film on at least a portion of a surface of the silica gel article.
10. A mold for preparing a silicone rubber article, comprising:
a mold body having a cavity;
the parylene film is arranged on the surface of the cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210213107.9A CN114633414A (en) | 2022-03-04 | 2022-03-04 | Method and mold for preparing silica gel product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210213107.9A CN114633414A (en) | 2022-03-04 | 2022-03-04 | Method and mold for preparing silica gel product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114633414A true CN114633414A (en) | 2022-06-17 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210213107.9A Pending CN114633414A (en) | 2022-03-04 | 2022-03-04 | Method and mold for preparing silica gel product |
Country Status (1)
| Country | Link |
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| CN (1) | CN114633414A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6068801A (en) * | 1996-12-19 | 2000-05-30 | Telefonaktiebolaget Lm Ericsson | Method for making elastic bumps from a wafer mold having grooves |
| US20130216599A1 (en) * | 2011-07-08 | 2013-08-22 | Specialty Coating Systems, Inc. | Antimicrobial parylene coatings and methods of depositing same |
| JP2018053341A (en) * | 2016-09-30 | 2018-04-05 | 大日本印刷株式会社 | Polyparaxylylene vapor deposition method and vapor deposition body |
| CN109228073A (en) * | 2018-09-13 | 2019-01-18 | 东莞星海丰电子有限公司 | The forming method and molding equipment of silica gel product |
| CN113102196A (en) * | 2021-03-16 | 2021-07-13 | 立讯电子科技（昆山）有限公司 | Chemical vapor deposition device, parylene film and forming method |
-
2022
- 2022-03-04 CN CN202210213107.9A patent/CN114633414A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6068801A (en) * | 1996-12-19 | 2000-05-30 | Telefonaktiebolaget Lm Ericsson | Method for making elastic bumps from a wafer mold having grooves |
| US20130216599A1 (en) * | 2011-07-08 | 2013-08-22 | Specialty Coating Systems, Inc. | Antimicrobial parylene coatings and methods of depositing same |
| JP2018053341A (en) * | 2016-09-30 | 2018-04-05 | 大日本印刷株式会社 | Polyparaxylylene vapor deposition method and vapor deposition body |
| CN109228073A (en) * | 2018-09-13 | 2019-01-18 | 东莞星海丰电子有限公司 | The forming method and molding equipment of silica gel product |
| CN113102196A (en) * | 2021-03-16 | 2021-07-13 | 立讯电子科技（昆山）有限公司 | Chemical vapor deposition device, parylene film and forming method |
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