CN114623683A - Sintering equipment - Google Patents

Sintering equipment Download PDF

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Publication number
CN114623683A
CN114623683A CN202011446655.3A CN202011446655A CN114623683A CN 114623683 A CN114623683 A CN 114623683A CN 202011446655 A CN202011446655 A CN 202011446655A CN 114623683 A CN114623683 A CN 114623683A
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CN
China
Prior art keywords
filter
sintering
cooling
gas
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011446655.3A
Other languages
Chinese (zh)
Inventor
李会祥
王传波
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Illinois Tool Works Inc
Original Assignee
Illinois Tool Works Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illinois Tool Works Inc filed Critical Illinois Tool Works Inc
Priority to CN202011446655.3A priority Critical patent/CN114623683A/en
Priority to TW110142677A priority patent/TW202225624A/en
Priority to PCT/US2021/061089 priority patent/WO2022125325A2/en
Publication of CN114623683A publication Critical patent/CN114623683A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F27B9/028—Multi-chamber type furnaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/12—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity with special arrangements for preheating or cooling the charge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/3005—Details, accessories, or equipment peculiar to furnaces of these types arrangements for circulating gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/12—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity with special arrangements for preheating or cooling the charge
    • F27B2009/124—Cooling
    • F27B2009/126—Cooling involving the circulation of cooling gases, e.g. air
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Abstract

The application provides a sintering apparatus comprising: a sintering section having a sintering space, the sintering section configured to sinter photovoltaic devices conveyed through the sintering space; a cooling section having a cooling space, the cooling section being disposed downstream of the sintering section in a transport direction of the photovoltaic devices, the cooling section being configured to cool the photovoltaic devices transported through the cooling space; a filtration system including a filtration device having a filtration device housing and a filter element disposed in the filtration device housing, the filtration device housing having a gas inlet and a gas outlet both in communication with a cooling space of the cooling section, the filtration device configured to filter gas in the cooling space. The filter system in the sintering equipment in the application can reduce dust particles in the sintering equipment.

Description

Sintering equipment
Technical Field
The application relates to a sintering device, in particular to a sintering device for manufacturing a solar cell photovoltaic device.
Background
In the production of photovoltaic devices such as crystalline silicon solar cell silicon wafers, sintering equipment is required to be used for sintering the photovoltaic devices. The sintering equipment at least comprises a sintering section and a cooling section. The photovoltaic device is conveyed by the conveyor belt to sequentially pass through the sintering section and the cooling section, and then is conveyed by the conveyor belt to leave the sintering equipment. The photovoltaic device is sintered at high temperature in the sintering section to achieve certain performance, then the photovoltaic device enters the cooling section to be cooled, and the cooling section can reduce the temperature of the photovoltaic device to a certain range.
Disclosure of Invention
The present application provides a sintering apparatus having a filtration system, the sintering apparatus comprising: a sintering section having a sintering space, the sintering section configured to sinter photovoltaic devices conveyed through the sintering space; a cooling section having a cooling space, the cooling section being disposed downstream of the sintering section in a conveyance direction of the photovoltaic device, the cooling section being configured to cool the photovoltaic device conveyed through the cooling space; a filter system including a filter device having a filter device housing and a filter element disposed in the filter device housing, the filter device housing having a gas inlet and a gas outlet both in communication with the cooling space of the cooling section, the filter device configured to filter gas in the cooling space.
The sintering equipment comprises a cooling section and a cooling section, wherein the cooling section comprises a heat exchange device which is arranged below a cooled photovoltaic device in the cooling space; the filtering system comprises an air pipe, the outlet end of the air pipe is connected with the gas inlet of the filtering device, the inlet end of the air pipe is located in the cooling space and below the photovoltaic device, and the air pipe is configured to send air cooled by the heat exchange device into the filtering device.
The sintering apparatus as described above, further comprising an aerodynamic device comprising at least one first fan, the filtration system being connected to the aerodynamic device, the aerodynamic device being arranged at the inlet end of the air duct to direct the gas flow towards the gas inlet of the filtration device.
The sintering equipment as described above, the sintering equipment further comprises an air box, the air box is provided with an air box inlet and an air box outlet, the air box inlet is connected with the heat exchanging device, the air box outlet is communicated with the air pipe, the air power device is arranged on the air box, and the air power device is configured to guide airflow to flow from the air box inlet to the air box outlet after passing through the heat exchanging device.
According to the sintering equipment, the heat exchange device comprises a heat exchange tube, a cooling medium circulates in the heat exchange tube, an airflow channel is arranged in the heat exchange device, and the air box is arranged below the heat exchange device.
The sintering apparatus as described above, the filter device further comprising at least one second fan disposed in the filter device housing, the second fan configured to provide power to direct a flow of gas entering from the gas inlet of the filter device housing through the filter element to be filtered.
The sintering apparatus as described above, the filter device casing having a top wall, a bottom wall, a front wall, a rear wall, a left wall and a right wall, the gas inlet and the gas outlet both being provided on the bottom wall of the filter device casing, the filter device casing having therein a filter space and a gas flow output passage, the gas inlet communicating with a bottom of the filter space, the gas flow output passage communicating a top of the filter space with the gas outlet, the filter being provided in the filter space.
The sintering equipment is characterized in that a transverse partition plate and a vertical partition plate are arranged in the filtering device, the vertical partition plate extends upwards from the position, between the gas inlet and the gas outlet, of the bottom wall of the filtering device shell and is spaced from the top wall of the filtering device shell, one side of the transverse partition plate is connected with the vertical partition plate, the other side of the transverse partition plate is connected with the left wall of the filtering device shell, and the transverse partition plate and the vertical partition plate are both connected with the front wall and the rear wall of the filtering device shell, so that the transverse partition plate and the vertical partition plate divide the internal space of the filtering device shell into a filtering space and a gas flow output channel;
the transverse partition plate is provided with at least one fan mounting hole, and the airflow output channel is communicated with the filtering space through the fan mounting hole.
The sintering apparatus as described above, the filter element comprising a first stage filter element disposed upstream in the gas flow direction, the first stage filter element configured to filter dust particles greater than 5 microns in the gas, and a second stage filter element configured to filter dust particles greater than 0.5 microns in the gas.
The sintering device as described above, wherein the at least one second fan is mounted in the at least one fan mounting hole, and the at least one fan mounting hole is arranged at the position, close to the left wall of the filter device shell, of the transverse partition plate;
the airflow output channel comprises a transverse channel between the top wall of the filtering device shell and the transverse partition plate and a vertical channel between the vertical partition plate and the right wall;
the filter device comprises a first guide plate and a second guide plate, the first guide plate and the second guide plate respectively extend from the top of the filter device shell towards the left wall and the right wall in an inclined mode, the first guide plate is located above the fan mounting hole, the second guide plate is located above the vertical channel, the first guide plate is configured to guide airflow flowing out of the second fan to the transverse channel, and the second guide plate is configured to guide airflow in the transverse channel to the vertical channel.
The sintering apparatus as described above, the filter device further comprising a buffer plate extending upward from a bottom wall of the filter device and inclined toward the gas inlet to at least partially block the gas entering from the gas inlet.
In the sintering apparatus, the top of the cooling section is provided with a filter connecting port, and the shape of the filter connecting port is matched with the shape of the bottom wall of the filter casing, so that the filter covers the filter connecting port when the filter is connected to the cooling section.
This application has increased filter equipment in sintering equipment's cooling zone, can filter the dust granule in the cooling zone, reduces the interference of dust granule to photovoltaic device in the cooling zone.
In the sintering equipment of the application, the filter device filters part of air in the cooling section and then returns the filtered air to the cooling section again to form a relatively closed system, and most of air circulates in the cooling section and the filter device, so that outside particles are prevented from entering the cooling section.
In the sintering equipment of this application, the air after being cooled leads to filter equipment through the fan, gets back to the cooling zone again in, has strengthened the inside air cycle of cooling zone for air evenly distributed in the cooling zone has strengthened the cooling effect to photovoltaic device.
In the sintering apparatus of the present application, the filter device is generally cubic in shape, and the gas flow path and the filter member are provided inside the housing of the filter device, so that the filter device is an integral component that is easily connected to the cooling stage device.
Drawings
FIG. 1 is a schematic diagram of a sintering apparatus 100 in the present application;
FIG. 2A is a perspective view of the cooling section and filter system 105 of the sintering apparatus 100 of FIG. 1;
FIG. 2B is a perspective view of the filtration system 105 of FIG. 2A shown separated from the cooling section;
FIG. 3A is a cross-sectional view of the cooling section and filtration system of FIG. 2A taken along line A-A;
FIG. 3B is a perspective view of the cooling section and filter system 105 of the sintering apparatus 100 of FIG. 2A with the cooling section housing 201 and internal support structure removed;
FIG. 4A is a perspective view of one deflector unit 336 and corresponding lower cooler unit 338 of FIG. 3B;
FIG. 4B is an exploded view of the deflector unit 336 and corresponding lower cooler unit 338;
FIG. 5A is a perspective view of the filter apparatus of FIG. 2A;
FIG. 5B is an exploded view of the filter assembly of FIG. 5A;
fig. 5C is a cross-sectional view of the filter assembly of fig. 5A taken along line B-B.
Detailed Description
Various embodiments of the present invention will now be described with reference to the accompanying drawings, which form a part hereof. It should be understood that although directional terms such as "front," "rear," "upper," "lower," "left," "right," and the like may be used herein to describe various example structural portions and elements of the application, these terms are used herein for convenience of description only and are to be determined based on the example orientations shown in the drawings. Because the embodiments disclosed herein can be arranged in a variety of orientations, these directional terms are used for purposes of illustration only and are not to be construed as limiting. Wherever possible, the same or similar reference numbers used in this application refer to the same or like parts.
Fig. 1 is a schematic view of a sintering apparatus 100 in the present application, showing a basic configuration of the sintering apparatus. As shown in fig. 1, the sintering apparatus 100 includes a sintering section 101, a cooling section 102, and a filtering system 105. The photovoltaic device to be processed is conveyed by the conveyor belt, and passes through the sintering section 101 and the cooling section 102 in sequence along the direction indicated by the arrow 108 to complete the sintering process. The sintering section 101 has a sintering space in which the photovoltaic device is heated to a temperature in a range, for example, 700-900 ℃, so that the photovoltaic device is subjected to a high-temperature sintering process. The photovoltaic device after the sintering process enters the cooling section 102, and the cooling section 102 can cool the photovoltaic device to a certain range, for example, less than 60 ℃. The cooled photovoltaic device is conveyed away from the sintering equipment by a conveyor belt. The sintering apparatus 100 further comprises a front section 111 and a rear section 112, the front section 111 being arranged upstream of the sintering section 101, the rear section 112 being arranged downstream of the cooling section 102, the front section 111 and the rear section 112 being adapted to accommodate power and other means of a conveyor belt. The sintering apparatus 100 has a length direction L, a height direction H, and a width direction W (see fig. 2A).
Fig. 2A is a perspective view of the cooling stage and the filtering system 105 of the sintering apparatus 100 of fig. 1, and fig. 2B is a perspective view of the filtering system 105 of fig. 2A separated from the cooling stage, showing the positional relationship of the cooling stage and the filtering system.
As shown in fig. 2A and 2B, the cooling stage 102 has a cooling stage casing 201, and the cooling stage casing 201 encloses a cooling space 207. The cooling stage casing 201 is a substantially box body having an opening at a lower portion, and the cooling stage casing 201 includes a front plate 231, a rear plate 232, an upper plate 233, a left plate 234, and a right plate 235. The left side of the cooling section shell 201 is connected with the sintering section 101, the right side is connected with the rear section 112, the lower part of the cooling section 102 is provided with a support (not shown in the figure) and a plurality of supporting legs 260 connected to the support, the supporting legs 260 have a certain height, so that a certain distance is reserved between the lower opening and the ground, and the lower opening can be communicated with the outside. The height of the support feet 260 is small, so that the distance between the lower opening and the ground is small, through which only a small amount of gas in the cooling space 207 can exchange with the ambient air. Openings 261 and 262 are provided in the left and right plates 234 and 235 of the cooling section housing 201 to allow the conveyor belt and the photovoltaic devices transported by the conveyor belt to pass through. The opening 262 is located at the upper portion of the cooling zone 102 in the height direction and above the rear zone 112, and the conveyor belt and the photovoltaic devices being conveyed are located at the upper portion of the cooling zone 102. The upper plate 233 of the cooling stage casing 201 is provided with a filter connection port 208, and the filter connection port 208 is substantially rectangular.
The filtering system 105 includes a filtering device 205 and a flow guide device 215, and the flow guide device 215 is used for guiding the gas in the cooling section 102 into the filtering device 205 for filtering. The filter device 205 is substantially cubic and the bottom of the filter device 205 is connected to the upper plate 233 of the cooling stage 102. The bottom of the filter device 205 is shaped to match the filter device connection port 208, and when the filter system 105 is installed in place on the cooling section 102, the filter device 205 covers the cooling device connection port 208 such that a seal is formed between the filter device 205 and the cooling section 102. A flow guiding device 215 is located in the cooling space 207 to guide the gas in the lower part of the cooling space 207 to the filter device 205.
Fig. 3A is a cross-sectional view of the cooling section and filter system of fig. 2A taken along line a-a, and fig. 3B is a perspective view of the cooling section and filter system 105 of the sintering apparatus 100 of fig. 2A with the cooling section housing 201 and internal support structure hidden, showing the relationship of the filter system 105 with the components internal to the cooling section 102. As shown in fig. 3A and 3B, an upper cooling device 311 and a lower cooling device 312 are disposed in the cooling space 207, and the upper cooling device 311 and the lower cooling device 312 are spaced apart from each other to form a conveying passage 315 for accommodating a conveyor belt (not shown). The upper cooling device 311 and the lower cooling device 312 are used to reduce the temperature within the cooling section 102 to cool down the photovoltaic devices conveyed by the conveyor belt. The upper cooling device 311 includes a plurality of fans 360, and the plurality of fans 360 are carried by the upper fan support 319 and are uniformly arranged along the length direction and the width direction of the sintering apparatus 100 to provide a uniform airflow downward. The lower cooling device 312 includes a heat exchanging device 323 and a plurality of fans 370, and the plurality of fans 370 are connected to a lower portion of the heat exchanging device 323 through a lower fan support 273. The fan 370 directs the air downward. The heat exchanging device 323 includes a plurality of fin tube heat exchangers 339, and the plurality of fin tube heat exchangers 339 are arranged side by side along the width and length directions of the sintering apparatus 100. Each fin and tube heat exchanger 339 includes a heat exchange tube and a fin connected to the heat exchange tube, and a fluid can pass through the fin and tube heat exchanger 339 from top to bottom. In the cooling section 102, fans 360 and 370 are located on the upper and lower sides of the conveyor belt, respectively, and uniformly direct air flow from top to bottom, and the air flow near the photovoltaic devices on the conveyor belt flows from top to bottom. The downward flow of the air stream adjacent the conveyor prevents the lighter weight photovoltaic devices on the conveyor from moving under the influence of the side-stream and upward-stream air streams. In the present application, the fan 370 is a cooling component of the lower cooling device 312, the fan 370 provides airflow to enhance the convection of the air inside the cooling section to improve the heat exchange effect of the finned tube heat exchanger 339, and at the same time, the fan 370 also provides an aerodynamic device for the filtering system 105 to guide the airflow into the filtering system 105 for filtering. That is, the filter system 105 powers the flow of gas within it by the fan 370 of the lower cooling device 312.
The inlet end of flow guide 215 of filter system 105 is connected to the bottom of lower cooling device 312 and the outlet end is connected to filter device 205. The guiding device 215 guides the airflow after heat exchange by the finned tube heat exchanger 339 to the filtering device 205. The lower cooling unit 312 includes a plurality of lower cooling unit 338, and each cooling unit 338 is similar or identical in structure. The deflector 215 includes a plurality of deflector units 336, and each deflector unit 336 is similar or identical in structure. Each lower cooling device unit 338 is connected to a respective deflector unit 336.
Fig. 4A is a perspective view of one deflector unit 336 and a corresponding lower cooler unit 338 in fig. 3B, fig. 4B is an exploded view of the deflector unit 336 and the corresponding lower cooler unit 338, and fig. 4A and 4B illustrate the structures of the deflector unit 336 and the corresponding lower cooler unit 338. Fig. 4A and 4B illustrate the structure of a deflector unit 336 and a corresponding lower cooler unit 338. as shown in fig. 4A and 4B, the lower cooler unit 338 includes a finned tube heat exchanger 339 and a windbox 407. The finned tube heat exchanger includes a heat exchange tube 408 and a plurality of fins 418 arranged side by side. The heat exchange tube 408 includes curved, multi-section heat exchange tube segments connected end-to-end to form a heat exchange tube channel. And cooling medium flows through the channels of the heat exchange tubes to exchange heat with the environment. The fins 418 are connected to the outer side wall of the heat exchange pipe 408 and extend in the height direction of the sintering apparatus to increase the heat exchange area. The extending direction of the fins is approximately vertical to the extending direction of the heat exchange tube sections. With spacing between adjacent fins and also spacing between adjacent heat exchange tube segments, gas flow channels 419 are formed between adjacent fins to allow gas to pass therethrough. The bellows 407 has a bottom 431 and a side 432 extending upward from the periphery of the bottom 431. The top end 435 of the side portion 432 encloses an upper opening forming the bellows inlet 411. The bottom 431 is provided with a plurality of blower mounting holes that form the blower outlet 412. The blower 370 is connected to the bottom 431 and is aligned with the blower outlet 412 to direct the flow of air in the blower 407 out of the blower outlet 412. The top end 435 of the side portion 432 is connected to the bottom of the finned tube heat exchanger 339 so that the air flow through the fins can enter the air box inlet 411. The flow guide unit 336 comprises a wind pipe 461 and a flow guide hood 462, the wind pipe 461 having a wind pipe inlet 471 and a wind pipe outlet 472, the flow guide hood 462 comprising a flow guide hood inlet 473 and a flow guide hood outlet 474. The flow-hood outlet 474 is connected to the windpipe inlet 471 and the flow-hood inlet 473 is connected to the bottom of the windbox 407, so that the flow-hood inlet 473 communicates with the windbox outlet 412. In one embodiment of the present application, the fan 370 is housed within a draft shield 462. In other embodiments, the fan 370 may also be housed within the blower 407. The shape and length of the air duct in each deflector unit 336 are set according to the position of the lower cooler unit 338 connected thereto. In the present application, a plurality of bellows 407 form a lower blower support 273. The shape of the wind box 407 and the draft hood 462 is designed so that most of the air flow after heat exchange by the finned tube heat exchanger 339 can be collected to the filter device 105 and flow through the filter device 105 into the upper portion of the cooling section 102 to further reduce the temperature of the air near the conveyor belt.
Fig. 5A is a perspective view of the filter device of fig. 2A, fig. 5B is an exploded view of the filter device of fig. 5A, and fig. 5C is a cross-sectional view of the filter device of fig. 5A taken along line B-B. As shown in fig. 5A, 5B, and 5C, the filter device includes a housing 510, a filter 508, and a fan 509, and the filter 508 and the fan 509 are accommodated in the housing 510. The housing 510 is generally box-shaped in the form of a cube and includes an upper housing 544 and a lower housing 545 to facilitate mounting of the components inside the filter apparatus. The housing 510 includes a top wall 534, a bottom wall 533, a front wall 535, a rear wall 536, a left wall 531, and a right wall 532. The bottom wall 533 is provided with a plurality of gas inlets 501 and a plurality of gas outlets 502, wherein each gas inlet 501 is connected to a corresponding duct outlet 472. The gas outlet communicates with the cooling space 207. The filter 205 is provided with a transverse partition 541 and a vertical partition 542, the vertical partition 542 extends upwards from a bottom wall 533 of the filter housing 510 and is spaced from a top wall 534 of the filter housing 510, one side of the transverse partition 541 is connected with the vertical partition 542, the other side is connected with a left wall 531 of the filter housing 510, the transverse partition 541 and the vertical partition 542 are both connected with a front wall 535 and a rear wall 536 of the filter housing 510, and thus the transverse partition 541 and the vertical partition 542 divide the inner space of the filter housing 510 into a filtering space 518 and an air flow output channel 519. The gas inlet 501 and the gas outlet 502 are respectively positioned at two sides of the vertical partition plate 542, the gas inlet 501 is positioned at the bottom of the filtering space 518 and is communicated with the filtering space 518, and the gas outlet 502 is communicated with the gas flow output channel 519. The filter 508 is disposed in the filter space 518, the filter 508 extends in the width direction W and the length direction L of the sintering apparatus, and the four side edges thereof are connected to the left wall 531, the rear wall 536, the vertical partition 542 and the front wall 535, respectively, so that the air flow entering the filter space 518 from the air inlet 501 will pass through the filter 508 and then flow out from the fan mounting hole 565.
The transverse partition 541 has a plurality of fan mounting holes 565 therein, the fan mounting holes 565 being disposed in a direction from the front wall 535 toward the rear wall 536 and adjacent the left wall 531. Fan mounting holes 565 are located at the top of filter space 518. The fan mounting hole 565 forms an air outlet of the filtering space 518. The airflow outlet channel 519 communicates with the filter space 518 through a fan mounting hole 565. The fan 509 is mounted on the transverse partition 541 in alignment with the fan mounting holes 565. The fan 509 guides the airflow entering the filter space 518 to be filtered by the filter 508 and then to flow out of the fan mounting hole 565 and into the airflow output passage 519.
The filter element 508 includes a first stage filter element 546 and a second stage filter element 547, the first stage filter element 546 being closer to the gas inlet 501 than the second stage filter element 547, that is, the first stage filter element 546 is disposed upstream in the gas flow direction, which in turn passes through the first stage filter element 546 and the second stage filter element 547. Wherein the first stage filter 546 is configured to filter dust particles greater than 5 microns in a gas and the second stage filter 547 is configured to filter dust particles greater than 0.5 microns in a gas.
Airflow outlet 519 includes a transverse channel 525 between top wall 534 of filter housing 510 and transverse partition 541, and a vertical channel 524 between vertical partition 542 and right wall 532. The fan mounting holes 565 communicate with the lateral channels 525, the air outlet 502 is located at the bottom of the vertical channel 524, and the air flow in the air flow output channel 519 flows from the lateral channels 525 to the vertical channel 524.
The filter device 205 includes a first baffle 521 and a second baffle 522, the first baffle 521 and the second baffle 522 extend obliquely from the top of the filter device housing 510 toward the left wall 531 and the right wall 532, respectively, and the first baffle 521 and the second baffle 522 form an angle of about 45 ° with the top wall 534, respectively. The first baffle 521 is positioned above the fan mounting hole 565. The air flow flowing out of the fan mounting hole 565 flows in a vertical direction (i.e., a direction parallel to the left wall 531 of the case) and reaches the first guide plate 521, and due to the angular disposition of the first flow guide plate, the air flow changes its direction at the first guide plate 521 and flows in the extending direction of the lateral passage 525. Wherein the first baffle 521 and the fan mounting hole 565 are both adjacent to the left wall 531 such that the space between the left wall 531 and the top wall 534 and the first baffle 521 is small and a majority of the airflow does not stay there but flows out of the lateral passage 525 as quickly as possible. The second baffle 522 is positioned above the vertical channels 524 and the gas flow in the lateral channels 525 changes direction at the second baffle 522 and flows along the extension of the right wall 532 to the gas outlet 502. The first and second deflectors 521, 522 are angled and positioned to facilitate the flow of air from the filter space 518 to the air outlet 502 to reduce energy loss due to the irregular flow of air within the housing 510.
The filter arrangement 205 further comprises a baffle 583, the baffle 583 extending upwardly from a side of the gas inlet 501 of the bottom wall 533 of the filter arrangement and being inclined towards the gas inlet 501 to at least partially block gas entering from the gas inlet 501. The buffer plate 583 changes the flow direction of the gas entering from the gas inlet 501 and reduces the flow rate of the gas to avoid damage to the filter 508 caused by too high a flow rate. In one embodiment of the present application, the buffer plate 583 comprises two blocks extending obliquely from the middle of the bottom wall 533 toward the left wall 531 and the right wall 532, respectively, to partially block the two rows of gas inlets 501, respectively. In other embodiments, the location and orientation of the buffer plate 583 may be determined according to the location and number of the gas inlets 501.
Referring to fig. 3A and 5C, in the cooling section 102, a fan 360 provides a downward air flow through the conveyor belt into the lower cooling device 312. In the lower cooling unit 312, the air flow is heat exchanged by passing through the finned tube heat exchanger 339, lowered in temperature and enters the windbox 407. A fan 370 mounted on the wind box 407 directs a flow of air out of the wind box outlet 412 through a flow directing hood 462 into a wind tube 461. The fan 370 is powered to enable airflow into the deflector 205 through the air conduit 461. The airflow enters the flow guiding device 205 from the gas inlet 501 of the flow guiding device 205, and the velocity of the airflow is reduced after the airflow is buffered by the buffer plate 583, and the airflow flows to the filter 508. Most of the dust particles in the air flow filtered by the filter 508 remain in the filter 508, and clean air flows out of the fan mounting hole 565. The fan 509 powers the airflow in the filter arrangement so that the airflow can pass smoothly through the filter elements 508. The filtered air re-enters the cooling section 102 from the air outlet 502 through the air flow output passage 519. During the operation of the sintering equipment, the filtering system 105 operates simultaneously, the airflow circulates between the cooling device 205 and the cooling space 207, the dust particles are intercepted by the filtering element 508, and the amount of the dust particles in the cooling space 207 is maintained at a low level, so that the processing quality of the photovoltaic device can be improved.
After the sintering equipment in the application is operated for a period of time, certain dust particles are generated in the equipment, for example, one of the sources of the dust particles is generated by the friction of a conveyor belt. The dust particles may have some impact on the processing of the photovoltaic device. The air flow inside the sintering section 101 is small and these dust particles can be deposited by gravity at the bottom of the sintering section 101 with less disturbance to the photovoltaic device. Whereas in the cooling section 102 there is arranged a cooling device comprising a fan, under the influence of which air flows inside the cooling section 102, dust particles are relatively less prone to deposit, but are dispersed throughout the cooling space 207 of the cooling section 102. This may have an effect on the photovoltaic device. Therefore, the filter device is added in the cooling section 102 of the sintering equipment, so that dust particles in the cooling section 102 can be filtered, and the interference of the dust particles on photovoltaic devices in the cooling section 102 is reduced. The filter elements 508 of the present application may be cleaned and replaced periodically to maintain good filtration.
In the present application, the filter device 205 filters a portion of the air in the cooling section 102 and returns the filtered air back to the cooling section 102, forming a relatively closed system without directly communicating the outlet of the filter device 205 with the environment. If the outlet 502 of the filter device 205 is in direct communication with the environment, it is possible to allow particles or impurities in the environment to pass through the filter device 205 into the interior of the sintering apparatus. In the present application, most of the air circulates through the cooling section 102 and the filtering system 105, and outside particles are prevented from entering the inside of the cooling section 102.
In a conventional cooling section of a sintering apparatus, a heat exchanger is disposed below a photovoltaic device, and in order to prevent the photovoltaic device from being moved by upward or lateral air flow, the air flow in the cooling section is generally disposed to flow in an upward and downward direction. The air cooled by the heat exchanger is deposited in a large amount in the lower portion of the cooling section while the photovoltaic devices are located in the upper portion of the cooling section, and the air cooled by the heat exchanger cannot effectively cool the photovoltaic devices. In the present application, the cooled air is introduced into the filtering system 105 through the fan and then returned to the cooling section 102, so that the air circulation inside the cooling section 102 is enhanced, the air in the cooling section 102 is uniformly distributed, and the cooling effect on the photovoltaic device is enhanced.
In the present application, the filter assembly 205 is generally cubic in shape, and the air flow outlet 519 and filter 508 are disposed within the housing 510 of the filter assembly 205, such that the filter assembly 205 is a unitary component that is easily assembled with the cooling section 102. The gas inlet 501 and the gas outlet 502 of the filter device 205 are both disposed at the bottom of the filter device 205, and the direction of the gas flow is guided by the flow guiding plates 521 and 522 inside the filter device 205, so that the gas flow easily flows from the gas inlet 501 to the gas outlet 502.
While only certain features of the application have been illustrated and described herein, many modifications and changes will occur to those skilled in the art. It is, therefore, to be understood that the appended claims are intended to cover all such modifications and changes as fall within the true spirit of the application.

Claims (12)

1. A sintering apparatus characterized by comprising:
a sintering section (101), the sintering section (101) having a sintering space, the sintering section (101) being configured to sinter photovoltaic devices transported through the sintering space;
a cooling section (102), the cooling section (102) having a cooling space (207), the cooling section (102) being arranged downstream of the sintering section (101) in a transport direction of the photovoltaic devices, the cooling section (102) being configured to cool the photovoltaic devices transported through the cooling space (207);
a filter system (105), the filter system (105) comprising a filter device (205), the filter device (205) having a filter device housing (510) and a filter element (508) disposed in the filter device housing (510), the filter device housing (510) having a gas inlet (501) and a gas outlet (502), the gas inlet (501) and the gas outlet (502) both communicating with the cooling space (207) of the cooling section (102), the filter device (105) being configured to filter gas in the cooling space (207).
2. The sintering apparatus of claim 1, wherein:
the cooling section (102) comprises a heat exchanging device (323), the heat exchanging device (323) being arranged below the cooled photovoltaic devices in the cooling space (207);
the filtering system (105) comprises an air duct (361), an outlet end of the air duct (361) is connected with a gas inlet (501) of the filtering device (205), an inlet end of the air duct (361) is located in the cooling space (207) and below the photovoltaic device, and the air duct (361) is configured to send air cooled by the heat exchanging device (323) into the filtering device (205).
3. The sintering apparatus of claim 2, wherein:
the sintering apparatus further comprises an aerodynamic device comprising at least one first fan (370), the filtration system (105) being connected to the aerodynamic device, the aerodynamic device being arranged at the inlet end of the air duct (361) to direct the gas flow towards the gas inlet (501) of the filtration device (205).
4. The sintering apparatus of claim 3, wherein:
the sintering apparatus further comprises a windbox (407), the windbox (407) having a windbox inlet (411) and a windbox outlet (412), the windbox inlet (411) being connected to the heat exchanging device (323), the windbox outlet (412) being in communication with the windpipe (361), the aerodynamic device being arranged on the windbox (407), the aerodynamic device being configured to direct an airflow from the windbox inlet (411) to the windbox outlet (412) after passing through the heat exchanging device.
5. The sintering apparatus of claim 4, wherein:
the heat exchange device (323) comprises a heat exchange tube (408), a cooling medium flows through the heat exchange tube (408), an air flow channel (419) is arranged in the heat exchange device (323), and the air box (407) is arranged below the heat exchange device (323).
6. The sintering apparatus of claim 1, wherein:
the filter device (205) further comprises at least one second fan (509) disposed in the filter device housing (510), the second fan (509) configured to provide motive force to direct a flow of gas entering from the gas inlet (501) of the filter device housing (510) through the filter element (508) to be filtered.
7. The sintering apparatus of claim 6, wherein:
the filter housing (510) has a top wall (534), a bottom wall (533), a front wall (535), a rear wall (536), a left wall (531) and a right wall (532), the gas inlet (501) and the gas outlet (502) are both disposed on the bottom wall (533) of the filter housing (510), the filter housing (510) has a filtering space (517) therein and a gas flow output channel (519), the gas inlet (501) communicates with a bottom of the filtering space (517), the gas flow output channel (519) communicates a top of the filtering space (517) with the gas outlet (502), and the filter element (508) is disposed in the filtering space (517).
8. The sintering apparatus of claim 7, wherein:
a transverse clapboard (541) and a vertical clapboard (542) are arranged in the filtering device (205), the vertical partition (542) extending upwardly from a bottom wall (533) of the filter housing (510) at a location between the gas inlet (501) and the gas outlet (502), and is spaced from the top wall (534) of the filter housing (510), one side of the transverse partition (541) is connected with the vertical partition (542), and the other side is connected with a left wall (531) of the filtering device shell (510), the transverse partition (541) and the vertical partition (542) are each connected to a front wall (535) and a rear wall (536) of the filter housing (510), whereby the transverse partition (541) and the vertical partition (542) divide the interior space of the filter device housing (510) into a filter space (518) and a gas flow outlet channel (519);
wherein the transverse partition (541) is provided with at least one fan mounting hole (565), and the airflow output channel (519) is communicated with the filtering space (518) through the fan mounting hole (565).
9. The sintering apparatus of claim 7, wherein:
the filter element (508) includes a first stage filter element (546) and a second stage filter element (547), the first stage filter element (546) disposed upstream in the gas flow direction, the first stage filter element (546) configured to filter dust particles greater than 5 microns in the gas, the second stage filter element (547) configured to filter dust particles greater than 0.5 microns in the gas.
10. The sintering apparatus of claim 8, wherein:
the at least one second fan (509) is mounted in the at least one fan mounting hole (565), the at least one fan mounting hole (565) being disposed at the transverse partition (541) proximate to a left wall (531) of the filter housing (510);
the airflow outlet channel (519) comprises a transverse channel (525) between a top wall (534) of the filter housing (510) and the transverse partition (541), and a vertical channel (524) between the vertical partition (542) and the right wall (532);
the filter device comprises a first guide plate (521) and a second guide plate (522), the first guide plate (521) and the second guide plate (522) respectively extend from the top of the filter device shell (510) towards the left wall (531) and the right wall (532) in an inclined mode, the first guide plate (521) is located above the fan mounting hole (565), the second guide plate (522) is located above the vertical channel (524), the first guide plate (521) is configured to guide air flowing out of the second fan (509) to the transverse channel (525), and the second guide plate (522) is configured to guide air flowing in the transverse channel (525) to the vertical channel (524).
11. The sintering apparatus of claim 1, wherein:
the filter arrangement (205) further comprises a baffle plate (583), the baffle plate (583) extending upwardly from a bottom wall (533) of the filter arrangement and being inclined towards the gas inlet (501) to at least partially block gas entering from the gas inlet (501).
12. The sintering apparatus of claim 1, wherein:
the top of the cooling section (102) is provided with a filtering device connecting port (208), and the shape of the filtering device connecting port (208) is matched with the shape of the bottom wall (533) of the filtering device shell (510), so that the filtering device (205) covers the filtering device connecting port (208) when the filtering device (205) is connected to the cooling section (102).
CN202011446655.3A 2020-12-11 2020-12-11 Sintering equipment Pending CN114623683A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202011446655.3A CN114623683A (en) 2020-12-11 2020-12-11 Sintering equipment
TW110142677A TW202225624A (en) 2020-12-11 2021-11-17 Sintering equipment
PCT/US2021/061089 WO2022125325A2 (en) 2020-12-11 2021-11-30 Sintering equipment

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