CN114619204B - Method for forming arched surface of metal-based ceramic composite material substrate - Google Patents
Method for forming arched surface of metal-based ceramic composite material substrate Download PDFInfo
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- CN114619204B CN114619204B CN202210188379.8A CN202210188379A CN114619204B CN 114619204 B CN114619204 B CN 114619204B CN 202210188379 A CN202210188379 A CN 202210188379A CN 114619204 B CN114619204 B CN 114619204B
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 227
- 239000002184 metal Substances 0.000 title claims abstract description 227
- 239000000919 ceramic Substances 0.000 title claims abstract description 83
- 239000000758 substrate Substances 0.000 title claims abstract description 83
- 239000002131 composite material Substances 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 37
- 239000011888 foil Substances 0.000 claims abstract description 129
- 238000004512 die casting Methods 0.000 claims abstract description 36
- 238000003801 milling Methods 0.000 claims abstract description 24
- 239000000843 powder Substances 0.000 claims abstract description 23
- 238000003754 machining Methods 0.000 claims abstract description 9
- 238000010438 heat treatment Methods 0.000 claims abstract description 8
- 230000017525 heat dissipation Effects 0.000 claims description 40
- 238000005192 partition Methods 0.000 claims description 26
- 239000011159 matrix material Substances 0.000 claims description 16
- 238000001816 cooling Methods 0.000 claims description 15
- 238000003825 pressing Methods 0.000 claims description 13
- 238000005520 cutting process Methods 0.000 claims description 12
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 238000001125 extrusion Methods 0.000 claims description 6
- 238000007639 printing Methods 0.000 claims description 6
- 238000005507 spraying Methods 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000011195 cermet Substances 0.000 claims 9
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
- 239000000047 product Substances 0.000 description 11
- 239000012466 permeate Substances 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000011156 metal matrix composite Substances 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
- H01L21/4878—Mechanical treatment, e.g. deforming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
A method for forming the arched surface of the metal-base ceramic composite material substrate includes such steps as machining the surface of one flat metal foil to become a concave arched surface by a rotary milling cutter, loading the metal foil and another flat metal foil to the internal surfaces of a precise mould with the concave surface of the metal foil facing inward, pouring ceramic material in the cavity between two metal foils, vibrating, compacting powder, and preheating the precise mould with ceramic powder and metal foil to a predefined temp. And after preheating, putting the precision forming die into a die-casting die for die-casting. And after the die casting is finished, demolding and taking out the near-formed base plate blank plate formed by die casting. And (3) after the blank plate is subjected to heat treatment, clamping the blank plate on a numerical control lathe, and carrying out numerical control turning processing on an arched curved surface on the outer surface of the metal foil surface milled into the concave surface according to the design requirement of a product, so that one side surface of the metal-based ceramic composite material substrate is coated with a uniform metal layer and has the arched curved surface.
Description
Technical Field
The invention relates to the technical field of metal matrix ceramic composite material radiating substrate processing technology, in particular to a method for forming an arched surface of a metal matrix ceramic composite material substrate.
Background
The metal-based ceramic composite material is a metal-based heat management composite material formed by compounding metal and ceramic, has the excellent performances of high heat conductivity, thermal expansion coefficient matched with a chip, light weight, high rigidity and the like, and is an ideal high-power integrated circuit module packaging material at present.
The multi-chip assembly and the high-current power module are core components of aerospace, national defense construction, civil traffic, power transmission and transformation systems and the like, and at present, metal-based ceramic composite materials are mostly selected as heat dissipation substrate materials. The heat dissipation substrate made of the metal-based ceramic composite material needs to be connected with a tooth-shaped heat dissipation device and the like so as to exert a heat dissipation effect, but because the metal-based ceramic composite material substrate and the tooth-shaped heat dissipation device and the like are made of different materials and have different thermal expansion coefficients, after the chip heats, the metal-based ceramic composite material substrate and the tooth-shaped heat dissipation device are heated to form gradient uneven temperature distribution along with heat conduction, and different thermal expansion deformations are generated, so that a gap is easily generated between the connection surface of the substrate and the tooth-shaped heat dissipation device, and the heat transfer is influenced. In order to avoid the gap between the substrate and the tooth-shaped heat sink, when the metal matrix composite heat dissipation substrate is designed, the bottom surface of the substrate (i.e. the connection surface with the tooth-shaped heat sink) often takes an arch-shaped curved surface shape. When the toothed radiator is firmly connected with the arched surface of the base plate by using a bolt, the toothed radiator can generate certain pre-deformation. When heated, both materials gradually deform. Because the metal matrix ceramic composite material substrate and the tooth-shaped radiator have the predeformation amount, the tooth-shaped radiator gradually releases the predeformation amount in the deformation process, and the metal matrix ceramic composite material substrate is continuously and tightly attached to the metal matrix ceramic composite material substrate, so that the metal matrix ceramic composite material substrate can be always tightly attached to the surface of the tooth-shaped radiator component, and the phenomenon of separation is avoided.
Disclosure of Invention
The applicant provides a method for forming an arched surface of a metal-based ceramic composite substrate, aiming at the defects in the prior art, so that one side of a flat metal foil (aluminum, copper, silver and the like) is processed into a concave arched curved surface by adopting a forming milling cutter disc, then the metal foil is firmly combined with the metal-based ceramic composite material by a high-pressure die casting method, and then the metal foil layer is subjected to numerical control turning processing, so that one side surface of the metal-based ceramic composite substrate is coated with a uniform metal layer and has the arched curved surface which meets the design requirements. .
The technical scheme adopted by the invention is as follows:
a method for forming an arched surface of a metal matrix ceramic composite substrate comprises the following operation steps:
the method comprises the following operation steps:
the first step is as follows: determining the size of the metal foil covered on the side surface of the heat dissipation substrate according to the technical requirements of the metal-based ceramic composite material heat dissipation substrate, and cutting two metal foils, one thick metal foil and one thin metal foil;
the second step is that: adsorbing the thick metal foil on the upper surface of a vacuum chuck, pressing the thick metal foil with a pressing plate, and fixing the vacuum chuck on the upper surface of the milling machine table board;
the third step: a forming milling cutter disc is arranged on the rotating main shaft, a plurality of forming blades with staggered teeth are inlaid in the forming milling cutter disc, and cutting edges of the forming blades are formed by sharpening according to the requirements of arched curved surfaces of the metal matrix ceramic composite material radiating substrates;
the fourth step: the forming cutter head rotates and feeds along the axial direction of the rotating main shaft, and the forming blade scrapes a concave surface with the same camber as the convex surface of the heat dissipation substrate on the thick metal foil to obtain an arched metal foil with a concave surface;
the fifth step: pasting one side of the plane of the arched metal foil facing to the first partition plate, and pasting the thin metal foil on the second partition plate facing to the first partition plate;
and a sixth step: assembling a plurality of first partition plates and second partition plates which are adhered with arched metal foils and thin metal foils into a set of die-casting precision forming die;
the seventh step: filling ceramic powder into a precision forming die;
eighth step: placing the precision forming die filled with the ceramic powder on a vibrating table, and vibrating and compacting;
the ninth step: placing the precision forming die into a preheating furnace to be preheated to 450-610 ℃;
the tenth step: preheating a die holder and a pressure head of the die-casting die to more than 120 ℃, and spraying a release agent on the contact surface of molten metal;
the eleventh step: placing the preheated precision forming die into a die-casting die, pouring molten metal liquid, infiltrating the molten metal liquid into gaps of the ceramic powder under the extrusion of a press head of a press, maintaining the pressure for 5-20 minutes, removing the pressure, cooling, and cooling to below 200 ℃;
the twelfth step: ejecting a metal ingot in the die-casting die, demolding, taking out the precision forming die, and taking out a near-forming blank plate of the metal-based ceramic heat-radiating substrate, wherein the metal-based ceramic composite material core part is firmly bonded with the arched metal foil and the thin metal foil;
the thirteenth step: after the heat treatment and the shape characteristic machining are finished, clamping a near-forming blank plate of the metal-based ceramic heat dissipation substrate on a numerical control lathe, wherein during clamping, the surface of the arched metal foil faces outwards and is a machined surface, and performing end face turning on the machined surface according to the design requirement of a product to obtain the metal-based ceramic heat dissipation substrate which meets the design requirement of the product, is coated with a uniform metal layer on one side surface and has an arched curved surface meeting the design requirement;
the fourteenth step is that: and carrying out related surface coating treatment and insulating layer printing process on the heat dissipation substrate.
The further technical scheme is as follows:
the thickness of the thick metal foil is 0.2-2mm.
The thickness of the thick metal foil is 1mm.
The thin metal foil has a thickness of 0.2-1mm.
The thin metal foil has a thickness of 0.5mm.
In the ninth step, the temperature was designated as 500 ℃.
In the tenth step, the temperature is preheated to 150 ℃.
In the tenth step, the temperature is preheated to 200 ℃.
In the tenth step, the dwell time was 15 minutes.
The temperature after cooling was 150 ℃.
The invention has the following beneficial effects:
the process method is efficient and simple, the metal-based ceramic composite material of the core part is firmly combined with the metal foil thin layer through a high-pressure die casting method, so that the requirement of coating the metal layer on the surface of the substrate is met, and meanwhile, the machining requirement of the arched curved surface of the metal-based ceramic composite material radiating substrate is met through methods such as forming and milling cutter disc machining.
The invention relates to a method for forming and processing an arched curved surface on the outer surface of a metal-based ceramic composite material substrate, which is characterized in that one side surface of the metal-based ceramic composite material substrate is coated with a uniform metal layer according to the design requirement and is processed with the arched curved surface.
The invention adopts a rotary forming milling cutter head to process one side surface of a flat metal foil (aluminum, silicon aluminum, copper, silver and the like) into a concave arched curved surface, and the metal foil and another flat metal foil are arranged in two opposite inner side surfaces of a precision forming die, the concave surface of the processed metal foil faces to the inner side, then ceramic (silicon carbide, diamond and the like) powder is filled into a cavity between the two metal foils, the powder is vibrated and compacted, and then the precision forming die filled with the ceramic powder and the metal foil is arranged in a preheating furnace to be preheated to a specified temperature. And after preheating, putting the precision forming die into a die-casting die for die-casting. And after the die casting is finished, demolding and taking out the near-formed base plate blank plate formed by die casting. And (3) after the blank plate is subjected to heat treatment, clamping the blank plate on a numerical control lathe, and carrying out numerical control turning processing on an arched curved surface on the outer surface of the metal foil surface milled into the concave surface according to the design requirement of a product, so that one side surface of the metal-based ceramic composite material substrate is coated with a uniform metal layer and has the arched curved surface.
Drawings
FIG. 1 is a schematic view of the structure of the vacuum chuck for sucking thick metal foil according to the present invention.
FIG. 2 is a schematic view of the structure of the arched metal foil of the present invention.
Fig. 3 is a cross-sectional view of an arched metal foil of the present invention.
FIG. 4 is a schematic view of a thin metal foil according to the present invention.
FIG. 5 illustrates the application of the arched metal foil and the thin metal foil of the present invention.
FIG. 6 is a schematic structural diagram of a precision forming mold according to the present invention.
FIG. 7 is a schematic structural diagram of the metal infiltration die casting of the present invention.
FIG. 8 is a schematic view of the present invention for facing an arched metal foil.
Fig. 9 is a schematic structural view of a heat dissipation substrate according to the present invention.
Fig. 10 is a side view of the heat-dissipating substrate of the present invention.
Wherein: 1. a thick metal foil; 2. a thin metal foil; 3. a vacuum chuck; 5. pressing a plate; 6. a milling machine table surface; 7. rotating the main shaft; 8. forming a milling cutter disc; 9. forming a blade; 10. an arched metal foil; 11. a first separator; 12. a second separator; 13. a precision forming die; 15. a die-casting die; 16. a die holder; 17. a pressure head; 20. a heat dissipation substrate.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1-10, the method comprises the following steps:
the first step is as follows: determining the size of a metal foil covered on the side surface of a radiating substrate according to the technical requirements of the metal-based ceramic composite radiating substrate, and cutting two metal foils, namely a thick metal foil 1 and a thin metal foil 2;
the second step: adsorbing the thick metal foil 1 on the upper surface of a vacuum chuck 3, pressing the thick metal foil with a pressing plate 5, and fixing the vacuum chuck 3 on the upper surface of a milling machine worktable 6;
the third step: a forming milling cutter disc 8 is arranged on the rotating main shaft 7, a plurality of forming blades 9 with staggered teeth are inlaid in the forming milling cutter disc 8, and cutting edges of the forming blades 9 are formed by sharpening according to the requirements of arched curved surfaces of the metal matrix ceramic composite material radiating base plates;
the fourth step: the forming cutter head 8 rotates and feeds along the axial direction of the rotating main shaft 7, and the forming blade 9 scrapes a concave surface with the same camber as the convex surface of the radiating substrate on the thick metal foil 1 to obtain an arched metal foil 10 with a concave surface;
the fifth step: pasting one side of the plane of the arched metal foil 10 facing to the first partition board 11, and pasting the thin metal foil 2 on the opposite second partition board 12;
and a sixth step: assembling a plurality of first partition boards 11 and second partition boards 12 which are adhered with arched metal foils 10 and thin metal foils 2 into a set of die-casting precision forming die 13;
the seventh step: filling ceramic powder 14 into a precision forming die 13;
eighth step: placing the precision forming die 13 filled with the ceramic powder 14 on a vibration table, and vibrating and compacting;
the ninth step: placing the precision forming die 13 into a preheating furnace to preheat to 450-610 ℃;
the tenth step: preheating a die holder 16 and a pressure head 17 of a die-casting die 15 to more than 120 ℃, and spraying a release agent on a contact surface of molten metal;
the eleventh step: placing the preheated precision forming die 13 into a die-casting die 15, pouring molten metal 18, under the extrusion of a press head 17, enabling the molten metal to permeate into gaps of the ceramic powder, keeping the pressure for 5-20 minutes, removing the pressure, cooling, and cooling to below 200 ℃;
the twelfth step: ejecting a metal ingot in the die-casting mould, demoulding, taking out the precision forming mould 13, and taking out a near-formed blank plate of the metal-based ceramic heat-radiating substrate, wherein the metal-based ceramic composite material core part is firmly bonded with the arched metal foil 10 and the thin metal foil 2;
and a thirteenth step of: after the heat treatment and the shape characteristic machining are finished, clamping a near-forming blank plate of the metal-based ceramic heat dissipation substrate on a numerical control lathe, wherein during clamping, the surface of the arched metal foil 10 faces outwards and is a machined surface, and performing end face turning on the machined surface according to the design requirements of the product to obtain the metal-based ceramic heat dissipation substrate 20 which meets the design requirements of the product, is coated with a uniform metal layer on one side surface and has an arched curved surface meeting the design requirements;
a fourteenth step of: the heat dissipation substrate 20 is subjected to a related surface plating process and an insulating layer printing process.
The thickness of the thick metal foil 1 is 0.2-2mm.
The thickness of the thick metal foil 1 is 1mm.
The thin metal foil 2 has a thickness of 0.2-1mm.
The thin metal foil 2 has a thickness of 0.5mm.
In the ninth step, the temperature was designated as 500 ℃.
In the tenth step, the temperature is preheated to 150 ℃.
In the tenth step, the temperature is preheated to 200 ℃.
The dwell time was 15 minutes.
The temperature after cooling was 150 ℃.
The first embodiment is as follows:
the first step is as follows: according to the technical requirements of the metal matrix ceramic composite material heat dissipation substrate, determining the size of the metal foil covered on the side surface of the heat dissipation substrate, and cutting two metal foils, namely a thick metal foil 1 and a thin metal foil 2;
the second step is that: adsorbing the thick metal foil 1 on the upper surface of a vacuum chuck 3, pressing the thick metal foil with a pressing plate 5, and fixing the vacuum chuck 3 on the upper surface of a milling machine worktable 6;
the third step: a forming milling cutter disc 8 is arranged on the rotating main shaft 7, a plurality of forming blades 9 with staggered teeth are inlaid in the forming milling cutter disc 8, and cutting edges of the forming blades 9 are formed by sharpening according to the arch-shaped curved surface requirement of the metal matrix ceramic composite material radiating substrate;
the fourth step: the forming cutter head 8 rotates and feeds along the axial direction of the rotating main shaft 7, and the forming blade 9 scrapes a concave surface with the same camber as the convex surface of the radiating substrate on the thick metal foil 1 to obtain an arched metal foil 10 with a concave surface;
the fifth step: pasting one side of the plane of the arched metal foil 10 facing to the first partition board 11, and pasting the thin metal foil 2 on the opposite second partition board 12;
and a sixth step: assembling a plurality of first partition boards 11 and second partition boards 12 which are adhered with arched metal foils 10 and thin metal foils 2 into a set of die-casting precision forming die 13;
the seventh step: filling ceramic powder 14 into a precision forming die 13;
the eighth step: placing the precision forming die 13 filled with the ceramic powder 14 on a vibration table, and vibrating and compacting;
the ninth step: placing the precision forming die 13 into a preheating furnace to preheat to 450 ℃;
the tenth step: preheating a die holder 16 and a pressure head 17 of a die-casting die 15 to more than 120 ℃, and spraying a release agent on a contact surface of molten metal;
the eleventh step: placing the preheated precision forming die 13 into a die-casting die 15, pouring molten metal 18, under the extrusion of a press head 17, enabling the molten metal to permeate into gaps of the ceramic powder, keeping the pressure for 5 minutes, removing the pressure, cooling, and cooling to below 200 ℃;
a twelfth step: ejecting a metal ingot in the die-casting mould, demoulding, taking out the precision forming mould 13, and taking out a near-formed blank plate of the metal-based ceramic heat-radiating substrate, wherein the metal-based ceramic composite material core part is firmly bonded with the arched metal foil 10 and the thin metal foil 2;
the thirteenth step: after the heat treatment and the shape characteristic machining are finished, clamping a near-forming blank plate of the metal-based ceramic heat dissipation substrate on a numerical control lathe, wherein during clamping, the surface of the arched metal foil 10 faces outwards and is a machined surface, and performing end face turning on the machined surface according to the design requirements of the product to obtain the metal-based ceramic heat dissipation substrate 20 which meets the design requirements of the product, is coated with a uniform metal layer on one side surface and has an arched curved surface meeting the design requirements;
a fourteenth step of: the heat dissipating substrate 20 is subjected to a related surface plating process and a printing process of the insulating layer.
Example two:
the first step is as follows: according to the technical requirements of the metal matrix ceramic composite material heat dissipation substrate, determining the size of the metal foil covered on the side surface of the heat dissipation substrate, and cutting two metal foils, namely a thick metal foil 1 and a thin metal foil 2;
the second step is that: adsorbing the thick metal foil 1 on the upper surface of a vacuum chuck 3, pressing the thick metal foil with a pressing plate 5, and fixing the vacuum chuck 3 on the upper surface of a milling machine worktable 6;
the third step: a forming milling cutter disc 8 is arranged on the rotating main shaft 7, a plurality of forming blades 9 with staggered teeth are inlaid in the forming milling cutter disc 8, and cutting edges of the forming blades 9 are formed by sharpening according to the requirements of arched curved surfaces of the metal matrix ceramic composite material radiating base plates;
the fourth step: the forming cutter head 8 rotates and feeds along the axial direction of the rotating main shaft 7, and the forming blade 9 scrapes a concave surface with the same camber as the convex surface of the radiating substrate on the thick metal foil 1 to obtain an arched metal foil 10 with a concave surface;
the fifth step: pasting one side of the plane of the arched metal foil 10 facing to the first partition board 11, and pasting the thin metal foil 2 on the opposite second partition board 12;
and a sixth step: assembling a plurality of first partition boards 11 and second partition boards 12 which are adhered with arched metal foils 10 and thin metal foils 2 into a set of die-casting precision forming die 13;
the seventh step: filling ceramic powder 14 into a precision forming die 13;
eighth step: placing the precision forming die 13 filled with the ceramic powder 14 on a vibration table, and vibrating and compacting;
the ninth step: placing the precision forming die 13 into a preheating furnace to be preheated to 610 ℃;
the tenth step: preheating a die holder 16 and a pressure head 17 of a die-casting die 15 to more than 120 ℃, and spraying a release agent on a contact surface of molten metal;
the eleventh step: placing the preheated precision forming die 13 into a die-casting die 15, pouring molten metal 18, under the extrusion of a press head 17, enabling the molten metal to permeate into gaps of the ceramic powder, maintaining the pressure for 20 minutes, removing the pressure, cooling, and cooling to below 200 ℃;
the twelfth step: ejecting a metal ingot in the die-casting mould, demoulding, taking out the precision forming mould 13, and taking out a near-formed blank plate of the metal-based ceramic heat-radiating substrate, wherein the metal-based ceramic composite material core part is firmly bonded with the arched metal foil 10 and the thin metal foil 2;
the thirteenth step: after the heat treatment and the shape characteristic machining are finished, clamping a near-forming blank plate of the metal-based ceramic heat dissipation substrate on a numerical control lathe, wherein during clamping, the surface of the arched metal foil 10 faces outwards and is a machined surface, and performing end face turning on the machined surface according to the design requirements of the product to obtain the metal-based ceramic heat dissipation substrate 20 which meets the design requirements of the product, is coated with a uniform metal layer on one side surface and has an arched curved surface meeting the design requirements;
the fourteenth step is that: the heat dissipation substrate 20 is subjected to a related surface plating process and an insulating layer printing process.
Example three:
the first step is as follows: according to the technical requirements of the metal matrix ceramic composite material heat dissipation substrate, determining the size of the metal foil covered on the side surface of the heat dissipation substrate, and cutting two metal foils, namely a thick metal foil 1 and a thin metal foil 2;
the second step is that: adsorbing the thick metal foil 1 on the upper surface of a vacuum chuck 3, pressing the thick metal foil with a pressing plate 5, and fixing the vacuum chuck 3 on the upper surface of a milling machine worktable 6;
the third step: a forming milling cutter disc 8 is arranged on the rotating main shaft 7, a plurality of forming blades 9 with staggered teeth are inlaid in the forming milling cutter disc 8, and cutting edges of the forming blades 9 are formed by sharpening according to the requirements of arched curved surfaces of the metal matrix ceramic composite material radiating base plates;
the fourth step: the forming cutter head 8 rotates and feeds along the axial direction of the rotating main shaft 7, and the forming blade 9 scrapes a concave surface with the same camber as the convex surface of the heat dissipation substrate on the thick metal foil 1 to obtain an arched metal foil 10 with a concave surface;
the fifth step: pasting one side of the plane of the arched metal foil 10 facing to the first partition board 11, and pasting the thin metal foil 2 on the opposite second partition board 12;
and a sixth step: assembling a plurality of first partition boards 11 and second partition boards 12 which are adhered with arched metal foils 10 and thin metal foils 2 into a set of die-casting precision forming die 13;
the seventh step: filling ceramic powder 14 into a precision forming die 13;
eighth step: placing the precision forming die 13 filled with the ceramic powder 14 on a vibration table, and vibrating and compacting;
the ninth step: placing the precision forming die 13 into a preheating furnace to preheat to 500 ℃;
the tenth step: preheating a die holder 16 and a pressure head 17 of a die-casting die 15 to more than 120 ℃, and spraying a release agent on a contact surface of molten metal;
the eleventh step: placing the preheated precision forming die 13 into a die-casting die 15, pouring molten metal 18, under the extrusion of a press head 17, enabling the molten metal to permeate into gaps of the ceramic powder, keeping the pressure for 15 minutes, removing the pressure, cooling, and cooling to 150 ℃;
the twelfth step: ejecting a metal ingot in the die-casting mould, demoulding, taking out the precision forming mould 13, and taking out a near-forming blank plate of the metal-based ceramic heat-radiating substrate, wherein the metal-based ceramic composite material core part is firmly bonded with the arched metal foil 10 and the thin metal foil 2;
the thirteenth step: after the heat treatment and the shape characteristic machining are finished, clamping a near-forming blank plate of the metal-based ceramic heat dissipation substrate on a numerical control lathe, wherein during clamping, the surface of the arched metal foil 10 faces outwards and is a machined surface, and performing end face turning on the machined surface according to the design requirement of a product to obtain the metal-based ceramic heat dissipation substrate 20 which meets the design requirement of the product, is coated with a uniform metal layer on one side and has an arched curved surface meeting the design requirement;
the fourteenth step is that: the heat dissipation substrate 20 is subjected to a related surface plating process and an insulating layer printing process.
The above description is intended to be illustrative and not restrictive, and the scope of the invention is defined by the appended claims, which may be modified in any manner within the scope of the invention.
Claims (10)
1. A method for forming an arched surface of a metal matrix ceramic composite substrate is characterized in that: the method comprises the following operation steps:
the first step is as follows: according to the technical requirements of the metal-based ceramic composite material heat dissipation substrate, determining the size of the metal foil covered on the side surface of the heat dissipation substrate, and cutting two metal foils, namely a thick metal foil (1) and a thin metal foil (2);
the second step is that: adsorbing the thick metal foil (1) on the upper surface of a vacuum chuck (3) and pressing by a pressing plate (5), and fixing the vacuum chuck (3) on the upper surface of a milling machine working table (6);
the third step: a forming milling cutter disc (8) is arranged on the rotating main shaft (7), a plurality of staggered-tooth forming blades (9) are embedded in the forming milling cutter disc (8), and cutting edges of the forming blades (9) are formed by sharpening according to the requirements of arched curved surfaces of the metal-based ceramic composite material radiating base plates;
the fourth step: the forming cutter head (8) rotates and feeds along the axial direction of the rotating main shaft (7), and the forming blade (9) scrapes a concave surface with the same camber as the convex surface of the heat dissipation substrate on the thick metal foil (1) to obtain an arched metal foil (10) with a concave surface;
the fifth step: pasting one side of the plane of the arched metal foil (10) facing to the first partition board (11), and then pasting the thin metal foil (2) on the second partition board (12) opposite to the first partition board;
and a sixth step: assembling a plurality of first partition boards (11) (11) and second partition boards (12) which are adhered with arched metal foils (10) and thin metal foils (2) into a set of die-casting precision forming die (13);
the seventh step: filling ceramic powder (14) into a precision forming die (13);
the eighth step: placing a precision forming die (13) filled with ceramic powder (14) on a vibration table, and vibrating and compacting;
the ninth step: placing the precision forming die (13) into a preheating furnace to preheat to 450-610 ℃;
the tenth step: preheating a die holder (16) and a pressure head (17) of a die-casting die (15) to more than 120 ℃, and spraying a release agent on a contact surface of molten metal;
the eleventh step: placing the preheated precision forming die (13) into a die-casting die (15), pouring molten metal (18), infiltrating the molten metal into gaps of the ceramic powder under the extrusion of a press head (17), maintaining the pressure for 5-20 minutes, removing the pressure, cooling, and cooling to below 200 ℃;
a twelfth step: ejecting a metal ingot in the die-casting die, demolding, taking out the precision forming die (13), and taking out a near-forming blank plate of the metal-based ceramic heat-radiating substrate from the precision forming die, wherein the metal-based ceramic composite material core part is firmly bonded with the arched metal foil (10) and the thin metal foil (2);
the thirteenth step: after the heat treatment and the shape characteristic machining are finished, clamping a near-forming blank plate of the metal-based ceramic heat dissipation substrate on a numerical control lathe, wherein during clamping, the surface of the arched metal foil (10) faces outwards and is a machined surface, and performing end face turning on the machined surface according to the design requirement of a product to obtain the metal-based ceramic heat dissipation substrate (20) which meets the design requirement of the product, is coated with a uniform metal layer on one side surface and has an arched curved surface meeting the design requirement;
the fourteenth step is that: the heat dissipation substrate (20) is subjected to related surface coating treatment and insulating layer printing process.
2. The method of forming an arcuate surface of a cermet composite substrate as set forth in claim 1 wherein: the thickness of the thick metal foil (1) is 0.2-2mm.
3. The method of forming an arcuate surface of a cermet composite substrate as set forth in claim 2 wherein: the thickness of the thick metal foil (1) is 1mm.
4. The method of forming an arcuate surface of a cermet composite substrate as set forth in claim 1 wherein: the thin metal foil (2) has a thickness of 0.2-1mm.
5. The method of claim 4, wherein the step of forming the arcuate surface of the cermet composite substrate comprises: the thin metal foil (2) has a thickness of 0.5mm.
6. The method of claim 1, wherein the step of forming the arcuate surface of the cermet composite substrate comprises: in the ninth step, the temperature was designated as 500 ℃.
7. The method of forming an arcuate surface of a cermet composite substrate as set forth in claim 1 wherein: in the tenth step, the temperature is preheated to 150 ℃.
8. The method of forming an arcuate surface of a cermet composite substrate as set forth in claim 1 wherein: in the tenth step, the temperature is preheated to 200 ℃.
9. The method of forming an arcuate surface of a cermet composite substrate as set forth in claim 1 wherein: in the tenth step, the dwell time was 15 minutes.
10. The method of forming an arcuate surface of a cermet composite substrate as set forth in claim 1 wherein: the temperature after cooling was 150 ℃.
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