CN114608446A - Submicron precision 3D automatic optical detection system and detection method - Google Patents
Submicron precision 3D automatic optical detection system and detection method Download PDFInfo
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- CN114608446A CN114608446A CN202210403239.8A CN202210403239A CN114608446A CN 114608446 A CN114608446 A CN 114608446A CN 202210403239 A CN202210403239 A CN 202210403239A CN 114608446 A CN114608446 A CN 114608446A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
- G01P13/02—Indicating direction only, e.g. by weather vane
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The submicron precision 3D automatic optical detection system comprises a mercury lamp, a dodging lens group positioned below the mercury lamp, a total internal reflection prism positioned below the dodging lens group, and a DMD positioned below the side of the total internal reflection prism, wherein a first spectroscope is arranged on the side surface of the DMD, an intermediate lens group is arranged between the DMD and the first spectroscope, an objective lens is arranged below the first spectroscope, a sample is arranged below the objective lens, a tube lens is arranged above the objective lens, a second spectroscope is arranged above the tube lens, a post-focus camera is arranged above the second spectroscope, and a pre-focus camera is arranged on the side surface of the second spectroscope. The invention provides submicron precision on-line detection service by adopting a differential dot-matrix confocal 3D measurement method through a detection system.
Description
Technical Field
The invention relates to the field of optical detection, in particular to a submicron precision 3D automatic optical detection system and a detection method.
Background
With the rapid development of the automation industry, 3D automatic optical inspection equipment (AOI) is widely used, but the conventional optical inspection equipment in the market at present has low measurement precision, and is difficult to reach the precision of micron and above, and the traditional high-precision inspection methods, such as 3D laser confocal and 3D white light interferometer, cannot realize online measurement, so that the production efficiency of factories can be greatly reduced.
Disclosure of Invention
The invention aims to provide a submicron precision 3D automatic optical detection system and a detection method.
The invention realizes the purpose through the following technical scheme:
the utility model provides a submicron precision 3D automatic optical detection system, includes the mercury lamp, is located the even light lens group of mercury lamp below, is located the total internal reflection prism of even light lens group below, is located the DMD of total internal reflection prism side below, the side of DMD is equipped with spectroscope one, be equipped with intermediate lens group between DMD and the spectroscope one, the below of spectroscope one is equipped with objective, the objective below is equipped with the sample, the objective top is equipped with the tube mirror, the tube mirror top is equipped with spectroscope two, two tops of spectroscope are equipped with the camera after the focus, the side of spectroscope two is equipped with camera before the focus.
A submicron precision 3D automatic optical detection method comprises the following steps:
s1, providing a uniform light beam by a light homogenizing lens group by using a mercury lamp as a light source;
s2, irradiating the light beam to the DMD through the prism;
s3, controlling the reflected light beam to be transmitted to the spectroscope I through the intermediate lens group by the DMD, and focusing the reflected light beam on the focal plane of the sample by the objective lens;
s4, using a pre-focus camera and a post-focus camera as detectors in an image space, and forming a light focusing signal by performing difference and summation on two detection signals;
and S5, when the object is located in the focal plane, the difference value between the two detectors is zero, and when the object deviates from the focal plane, the generated differential signal can reflect the size and direction of the object displacement.
Compared with the prior art, the submicron precision 3D automatic optical detection system and the detection method have the beneficial effects that: a differential dot-matrix confocal 3D measurement method is adopted by a detection system, and online detection service with submicron precision is provided.
Drawings
Fig. 1 is a schematic structural diagram of a submicron precision 3D automated optical inspection system.
Detailed Description
Referring to fig. 1, a submicron precision 3D automatic optical detection system includes a mercury lamp 1, a dodging lens group 2 located below the mercury lamp 1, a total internal reflection prism 3 located below the dodging lens group 2, and a DMD (digital micromirror device) 4 located below the side of the total internal reflection prism 3, a first spectroscope 6 is disposed on a side surface of the DMD, an intermediate lens group 5 is disposed between the DMD and the first spectroscope, an objective lens 7 is disposed below the first spectroscope 6, a sample 8 is disposed below the objective lens 7, a tube mirror 9 is disposed above the objective lens 7, a second spectroscope 11 is disposed above the tube mirror 9, a post-focus camera 12 is disposed above the second spectroscope 11, and a pre-focus camera 10 is disposed on a side surface of the second spectroscope 11.
A submicron precision 3D automatic optical detection method comprises the following steps:
s1, providing a uniform light beam by a light homogenizing lens group by using a mercury lamp as a light source;
s2, irradiating the light beam to the DMD through the prism;
s3, controlling the reflected light beam to be transmitted to the spectroscope I through the intermediate lens group by the DMD, and focusing the reflected light beam on the focal plane of the sample by the objective lens;
s4, using a pre-focus camera and a post-focus camera as detectors in an image space, and forming a light focusing signal by performing difference and summation on two detection signals;
and S5, when the object is located in the focal plane, the difference value between the two detectors is zero, and when the object deviates from the focal plane, the generated differential signal can reflect the size and direction of the object displacement.
The invention adopts a differential dot-matrix confocal 3D measurement method, can realize accurate measurement of the size of a detection sample by processing and calculating differential signals, and can provide high-precision and high-efficiency online detection service for challenging surface, material and shape detection in the industries of new energy, photovoltaic, lithium battery equipment, automotive electronics, PCB, 3C, semiconductor packaging, plastics, medical industry and the like.
The advantages of the invention include:
1. the precision is high: submicron precision 3D imaging and measurement can be achieved. The axial positioning precision is 1-2 orders of magnitude higher than that of the traditional laser scanning confocal structure, and the transverse resolution is at most 1 time higher than that of the traditional laser scanning confocal structure.
2. The efficiency is high: and the efficiency is higher than that of the traditional laser scanning confocal system by about 2 orders of magnitude by adopting on-line detection.
3. The span is large: the precision of most orders of magnitude is adjustable (submicron-micron-millimeter-centimeter).
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (2)
1. Submicron precision 3D automatic optical detection system, its characterized in that: including the mercury lamp, be located mercury lamp below even light lens group, be located even light lens group's total internal reflection prism, be located the DMD of total internal reflection prism side below, the side of DMD is equipped with spectroscope one, be equipped with intermediate lens group between DMD and the spectroscope one, the below of spectroscope one is equipped with objective, the objective below is equipped with the sample, the objective top is equipped with the tube mirror, the tube mirror top is equipped with spectroscope two, two tops of spectroscope are equipped with the camera after the focus, the side of spectroscope two is equipped with the camera before the focus.
2. The submicron precision 3D automatic optical detection method is characterized by comprising the following steps:
s1, providing a uniform light beam by a light homogenizing lens group by using a mercury lamp as a light source;
s2, irradiating the light beam to the DMD through the prism;
s3, controlling the reflected light beam to be transmitted to the spectroscope I through the intermediate lens group by the DMD, and focusing the reflected light beam on the focal plane of the sample by the objective lens;
s4, using a pre-focus camera and a post-focus camera as detectors in an image space, and forming a light focusing signal by performing difference and summation on two detection signals;
and S5, when the object is located in the focal plane, the difference value between the two detectors is zero, and when the object deviates from the focal plane, the generated differential signal can reflect the size and direction of the object displacement.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210403239.8A CN114608446A (en) | 2022-04-18 | 2022-04-18 | Submicron precision 3D automatic optical detection system and detection method |
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| CN202210403239.8A CN114608446A (en) | 2022-04-18 | 2022-04-18 | Submicron precision 3D automatic optical detection system and detection method |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110849289A (en) * | 2019-12-11 | 2020-02-28 | 宁波五维检测科技有限公司 | Double-camera parallel confocal differential microscopic 3D morphology measurement device and method |
| CN210922541U (en) * | 2019-12-11 | 2020-07-03 | 宁波五维检测科技有限公司 | Double-camera parallel confocal differential microscopic 3D morphology measuring device |
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- 2022-04-18 CN CN202210403239.8A patent/CN114608446A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110849289A (en) * | 2019-12-11 | 2020-02-28 | 宁波五维检测科技有限公司 | Double-camera parallel confocal differential microscopic 3D morphology measurement device and method |
| CN210922541U (en) * | 2019-12-11 | 2020-07-03 | 宁波五维检测科技有限公司 | Double-camera parallel confocal differential microscopic 3D morphology measuring device |
Non-Patent Citations (2)
| Title |
|---|
| 刘志群;易定容;孔令华;张勇贞;刘婷;王梓;: "基于并行共聚焦显微系统的物方差动轴向测量", 光学精密工程, no. 06 * |
| 王永红, 余晓芬, 黄其圣, 俞建卫, 徐科军: "基于差动共焦的并行三维形貌检测系统的研究", 中国科学技术大学学报, no. 04 * |
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