CN207051150U - One kind pollution particle observation and test device - Google Patents
One kind pollution particle observation and test device Download PDFInfo
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- CN207051150U CN207051150U CN201721012834.XU CN201721012834U CN207051150U CN 207051150 U CN207051150 U CN 207051150U CN 201721012834 U CN201721012834 U CN 201721012834U CN 207051150 U CN207051150 U CN 207051150U
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Abstract
A kind of pollution particle observation and test device are the utility model is related to, including：Optical imaging apparatus, lighting apparatus, polarization device, location equipment, detection device, processing display device, fixed equipment, motive power outputting apparatus, polarization device include electronics adjusting device.Lighting apparatus, at least a portion to particle accumulation thing are illuminated; form illumination measured zone; filter is provided with illumination measured zone; polarization device includes optical polarization mating plate and optical analyzer; optical analyzer is located at the front end of the lens barrel of reflected light stereoscope; location equipment, moved according to grid in the illumination measured zone of particle accumulation thing.The utility model can reduce the secondary pollution probability of test process, and whole observation and test process are realized by automating, and reduce the testing time, improve the reproducibility of measurement result and reduce artificial contamination's probability.
Description
Technical field
The utility model is related to surface pollution degree technical field of measurement and test in kind, more particularly to a kind of pollution particle observation and
Test device.
Background technology
In automobile making, aviation, precision optical machinery, semiconductor manufacturing, food processing, health care or medicine and other fields,
For understand the part of the susceptible dust in surface, device, product, workpiece or contact surface technical cleannes demand day
Benefit increases, such as in car steering field, more and more needs clearly to understand fuel injection system, brake system, liquid system
Or the particle contamination degree of the individual components and the complex assemblies produced on this basis of micromation and performance reinforcement.Typically
Due to be tested sample surface it is too huge or due to it is complex-shaped, surface is rugged and rough and leads to not use direct method
To observe and test, now the method for generally use is that the dust on surface is removed by adhesive membrane or cleaning solution, in cleaning solution
Or filter residue or test analysis being carried out according to particle size, distribution and chemical attribute on adhesive membrane, the above method can reduce survey
The secondary pollution probability of examination process.In order to reduce the testing time, improving the reproducibility of measurement result and reduce artificial contamination
Probability, whole observation and test process are realized preferably by automation.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of pollution particle observation and test device, existing to solve
Deficiency in technology.
In order to achieve the above object, the purpose of this utility model is achieved through the following technical solutions：
A kind of pollution particle observation and test device are provided, including：
Optical imaging apparatus, the particle accumulation thing being distributed in planar structure is imaged, including reflected light is three-dimensional aobvious
Micro mirror and LED annular light sources, the reflected light stereoscope are configured with digital ccd video camera, the LED annular light sources difference
Positioned at the lens barrel both sides of the reflected light stereoscope；
Lighting apparatus, at least a portion of the particle accumulation thing is illuminated, forms illumination measured zone, the photograph
Filter is provided with bright measured zone；
Polarization device, including optical polarization mating plate and optical analyzer, the optical analyzer are located at the reflected light and stood
The front end of the microscopical lens barrel of body；
Location equipment, moved according to grid in the illumination measured zone of the particle accumulation thing；
Detection device, receive and assess the imaging by illuminating the optical imaging apparatus in measured zone each described
Data；
Handle display device, including PC and display, the PC connects the digital ccd video camera and described respectively
Location equipment；
Fixed equipment, including framework, the framework are the rectangle frame of a side opening, and the LED annular light sources are positioned at described
In rectangle frame, the illuminating bundle that the LED annular light sources are sent projects from the opening of the rectangle frame；
Motive power outputting apparatus, including servomotor, the display, the PC, the servomotor and the framework
It is sequentially connected；Wherein,
The polarization device includes electronics adjusting device, and the optical polarization mating plate and the optical analyzer pass through respectively
The electronics adjusting device realizes the relative position adjustment between one first polarization position and one second polarization position, the optics into
As equipment generates the image of the particle accumulation thing on the first polarization position and the second polarization position respectively.
Above-mentioned pollution particle observation and test device, wherein, the optical polarization mating plate is positioned at the LED annular light sources
The polarizing coating in illuminating bundle sent, the position of the polarizing coating are adjusted by the electronics adjusting device.
Above-mentioned pollution particle observation and test device, wherein, the location equipment is polyaxial controller.
Above-mentioned pollution particle observation and test device, wherein, the lighting apparatus includes autofocus system.
Compared with the prior art, the beneficial effects of the utility model are：
The secondary pollution probability of test process can be reduced, whole observation and test process are realized by automating, and are reduced and are surveyed
The time is tried, the reproducibility of measurement result is improved and reduces artificial contamination's probability.
Brief description of the drawings
Form a part of accompanying drawing of the present utility model to be used for providing further understanding to of the present utility model, this practicality is new
The schematic description and description of type is used to explain the utility model, does not form to improper restriction of the present utility model.
In accompanying drawing：
Fig. 1 shows the structural representation of the utility model pollution particle observation and test device.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the utility model can
To be mutually combined.
With reference to shown in figure 1, the utility model pollution particle observation and test device are set including optical imaging apparatus, illumination
Standby, polarization device, location equipment, detection device, processing display device, fixed equipment and motive power outputting apparatus, wherein optics into
As equipment is imaged to the particle accumulation thing being distributed in planar structure, including reflected light stereoscope 1 and LED ring lights
Source 3, the particle accumulation thing being distributed in planar structure is imaged, including reflected light stereoscope and LED annular light sources,
Reflected light stereoscope 1 is configured with digital ccd video camera 2, and LED annular light sources 3 are respectively positioned at reflected light stereoscope 1
Lens barrel both sides.Lighting apparatus is illuminated at least a portion of particle accumulation thing, forms illumination measured zone 4, illumination measurement
Filter 5 is provided with region 4.Polarization device includes optical polarization mating plate and optical analyzer 6, and optical analyzer 6 is positioned at reflection
The front end of the lens barrel of light stereoscope 1.Location equipment moves according to grid in the illumination measured zone of particle accumulation thing.Inspection
Measurement equipment is received and assessed by the imaging data of the optical imaging apparatus in each illumination measured zone 4.Handle display device
Including PC 7 and display 8, PC 7 connects digital ccd video camera 2 and location equipment respectively.Fixed equipment includes framework 9, frame
Frame 9 is the rectangle frame of a side opening, and LED annular light sources 3 are located in rectangle frame, the illuminating bundle 10 that LED annular light sources 3 are sent from
The opening of rectangle frame projects.Motive power outputting apparatus includes servomotor 11, display 8, PC 7, servomotor 11 and framework 9
It is sequentially connected.Polarization device includes electronics adjusting device, and optical polarization mating plate and optical analyzer are set by electronics adjustment respectively
The standby relative position adjustment realized between one first polarization position and one second polarization position, optical imaging apparatus generate first respectively
Polarize the image of position and the particle accumulation thing on the second polarization position.In the technical program, optical polarization mating plate is positioned at LED annulars
Polarizing coating 12 in the illuminating bundle that light source 3 is sent, the position of polarizing coating 12 are adjusted by electronics adjusting device, and location equipment is more
Axial controller 13, the arrow 14 in figure have marked the moving direction of polyaxial controller 13, and lighting apparatus includes automatic
Focusing system.With continued reference to diagram, filter 5 is placed on micro slide 15, and the field range of reflected light stereoscope 1 exists
1X1mm2To 5X5mm2Between, filter 5 is a diameter of 26mm or 50mm circle.
From above-described embodiment as can be seen that advantage of the present utility model is：
The secondary pollution probability of test process can be reduced, whole observation and test process are realized by automating, and are reduced and are surveyed
The time is tried, the reproducibility of measurement result is improved and reduces artificial contamination's probability.
Specific embodiment of the utility model is described in detail above, but the utility model is not restricted to the above
The specific embodiment of description, it is intended only as example.To those skilled in the art, any equivalent modifications and substitute also all
Among category of the present utility model.Therefore, the impartial conversion made in the case where not departing from spirit and scope of the present utility model
And modification, it should all cover in the scope of the utility model.
Claims (4)
1. one kind pollution particle observation and test device, it is characterised in that including：
Optical imaging apparatus, the particle accumulation thing being distributed in planar structure is imaged, including reflected light stereoscope
With LED annular light sources, the reflected light stereoscope is configured with digital ccd video camera, and the LED annular light sources are located at respectively
The lens barrel both sides of the reflected light stereoscope；
Lighting apparatus, at least a portion of the particle accumulation thing is illuminated, forms illumination measured zone, the illumination is surveyed
Amount is provided with filter in region；
Polarization device, including optical polarization mating plate and optical analyzer, it is three-dimensional aobvious that the optical analyzer is located at the reflected light
The front end of the lens barrel of micro mirror；
Location equipment, moved according to grid in the illumination measured zone of the particle accumulation thing；
Detection device, receive and assess the imaging number by illuminating the optical imaging apparatus in measured zone each described
According to；
Display device is handled, including PC and display, the PC connect the digital ccd video camera and the positioning respectively
Equipment；
Fixed equipment, including framework, the framework are the rectangle frame of a side opening, and the LED annular light sources are located at the rectangle
Inframe, the illuminating bundle that the LED annular light sources are sent project from the opening of the rectangle frame；
Motive power outputting apparatus, including servomotor, the display, the PC, the servomotor and the framework are successively
Connection；Wherein,
The polarization device includes electronics adjusting device, and the optical polarization mating plate and the optical analyzer are respectively by described
Electronics adjusting device realizes the relative position adjustment between one first polarization position and one second polarization position, and the optical imagery is set
Back-up does not generate the image of the first polarization position and the particle accumulation thing on the second polarization position.
2. particle observation and test device are polluted according to claim 1, it is characterised in that the optical polarization mating plate is position
Polarizing coating in the illuminating bundle that the LED annular light sources are sent, the position of the polarizing coating is by the electronics adjusting device
Adjustment.
3. particle observation and test device are polluted according to claim 2, it is characterised in that the location equipment is polyaxial
Controller.
4. particle observation and test device are polluted according to claim 1, it is characterised in that the lighting apparatus includes automatic
Focusing system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721012834.XU CN207051150U (en) | 2017-08-14 | 2017-08-14 | One kind pollution particle observation and test device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721012834.XU CN207051150U (en) | 2017-08-14 | 2017-08-14 | One kind pollution particle observation and test device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207051150U true CN207051150U (en) | 2018-02-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721012834.XU Active CN207051150U (en) | 2017-08-14 | 2017-08-14 | One kind pollution particle observation and test device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207051150U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109387460A (en) * | 2017-08-14 | 2019-02-26 | 阅美测量系统（上海）有限公司 | A kind of observation of pollution particle and test device and analysis method |
-
2017
- 2017-08-14 CN CN201721012834.XU patent/CN207051150U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109387460A (en) * | 2017-08-14 | 2019-02-26 | 阅美测量系统（上海）有限公司 | A kind of observation of pollution particle and test device and analysis method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221227 Address after: No. 9, Lianxin Road, Taicang City, Suzhou City, Jiangsu Province 215488 Patentee after: Yuemei Measurement System (China) Co.,Ltd. Address before: 201807 Room 1011, 1013, 1015, Building A, No. 1355, Chengbei Road, Industrial Zone, Jiading District, Shanghai Patentee before: JOMESA MEASUREMENT SYSTEM (SHANGHAI) CO.,LTD. |
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| TR01 | Transfer of patent right |