CN210639338U - Multispectral microscopic automatic focusing device - Google Patents
Multispectral microscopic automatic focusing device Download PDFInfo
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- CN210639338U CN210639338U CN201922039416.5U CN201922039416U CN210639338U CN 210639338 U CN210639338 U CN 210639338U CN 201922039416 U CN201922039416 U CN 201922039416U CN 210639338 U CN210639338 U CN 210639338U
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Abstract
The utility model particularly relates to a micro-automatic focusing device of multispectral, the device includes: the device comprises a polychromatic light illumination module, a longitudinal dispersion enhanced optical imaging module, a multispectral image sensor, a high-precision objective table and an image analysis and objective table control system, wherein the image analysis and objective table control system is used for adjusting the high-precision objective table to a focusing surface of the optical imaging system according to the obtained defocusing value and defocusing direction signal to finish automatic focusing. The device can realize that once formation of image can acquire sample defocusing volume and defocusing direction fast, realizes the micro automatic focusing of the big longitudinal measurement scope of millimeter magnitude, compares traditional micro automatic focusing method, on the one hand, need not complicated focal plane search algorithm and expensive external auxiliary equipment, on the other hand, has improved focusing efficiency and precision of focusing.
Description
Technical Field
The utility model belongs to the optical microscopic imaging field relates to a micro automatic focusing device and method, especially relates to a based on many spectral micro automatic focusing device and method.
Background
The existing microscopic automatic focusing technology has a plurality of defects. The passive microscopic automatic focusing technology directly performs focusing according to an imaging result, and a complex focal plane search algorithm and an image definition evaluation algorithm are required. The active microscopic automatic focusing technology needs to be combined with external auxiliary equipment to detect the defocusing amount and the defocusing direction, and the device is often complex in structure, expensive in price and needs a high-precision calibration process.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defects of the prior art and provide a multispectral micro-automatic focusing device and a micro-automatic focusing method. Compared with the traditional microscopic automatic focusing method, on one hand, the device does not need a complex focal plane search algorithm and expensive external auxiliary equipment, and on the other hand, the focusing efficiency and the focusing precision are improved.
The purpose of the utility model is realized like this:
the multispectral microscopic automatic focusing device comprises a polychromatic light illumination module, a longitudinal dispersion enhanced optical imaging module and an image analysis and objective table control module.
The above-mentioned compound color light illumination module has set gradually according to light path propagation direction: the device comprises a polychromatic light source, a condenser, a uniform collimating light lens group, a semi-reflecting and semi-transmitting spectroscope and an objective lens with longitudinal dispersion.
The longitudinal dispersion enhanced optical imaging module is sequentially provided with the following components in the light path propagation direction: the device comprises a high-precision objective table, an objective lens with longitudinal dispersion, a semi-reflecting semi-transmitting spectroscope, a tube lens with longitudinal dispersion and a multispectral image sensor.
The polychromatic light illumination module and the longitudinal dispersion enhanced optical imaging module share a semi-reflecting semi-permeable spectroscope and an objective lens with longitudinal dispersion.
The image analysis and objective table control module sequentially comprises the following components in the transmission direction of the control signal: multispectral image sensor, image analysis and objective table control system, high accuracy objective table.
The longitudinal dispersion enhanced optical imaging module and the image analysis and object stage control module share a multispectral image sensor and a high-precision object stage.
And the image analysis and objective table control system adjusts the high-precision objective table to the focal plane of the optical imaging system according to the obtained defocus value and defocus direction signal to finish automatic focusing.
The longitudinal dispersion enhanced optical imaging module comprises at least one objective lens with longitudinal dispersion, or comprises at least one tube lens with longitudinal dispersion, or other beneficial combinations.
The longitudinal dispersion enhanced optical imaging module has different focal lengths or image distances for optical signals of different wave bands, namely, under the same object distance, the object clear imaging axial positions of different wave bands are different, and the object surface height can be reversely deduced according to the clear imaging wave bands of the multispectral image sensor.
The longitudinal dispersion enhanced optical imaging module needs to eliminate transverse dispersion.
The multispectral image sensor can simultaneously acquire N (N is more than or equal to 2) sample gray level images I with different central wavelength spectral bands at zero time differencen，1≤n≤N。
The multispectral microscopic automatic focusing method realized on the multispectral microscopic automatic focusing device comprises the following operation steps:
and 7, adjusting the high-precision objective table to the focal plane of the optical imaging system by the image analysis and objective table control system according to the obtained defocus value and defocus direction signal to finish automatic focusing.
The multispectral microscopic automatic focusing method further comprises a method for judging the defocusing direction of the sample, and specifically comprises the following steps:
1) when a sample is focused, the spectral band with the maximum image definition value is taken as a central band;
2) if one of the two adjacent spectral bands with the maximum definition is a central band which is a longer band, and the definition value of the spectral image of the central band is greater than that of the spectral image of the other band, the point is on a positive defocusing surface of the optical imaging system and the defocusing amount is smaller;
3) if one of the two adjacent spectral bands with the maximum definition is a central band which is a longer band, and the definition value of the spectral image of the central band is smaller than that of the spectral image of the other band, the point is on a positive defocusing surface of the optical imaging system and the defocusing amount is larger;
4) if one of the two adjacent spectral bands with the maximum definition is a central band which is a shorter band, and the spectral image definition value of the central band is greater than that of the other band, the point is on a negative defocusing surface of the optical imaging system and the defocusing amount is smaller;
5) if one of the two adjacent spectral bands with the maximum definition is a central band which is a shorter band, and the spectral image definition value of the central band is smaller than that of the other band, the point is on a negative defocusing surface of the optical imaging system and the defocusing amount is larger;
6) if the two adjacent spectral bands with the maximum definition do not comprise the central band and the two bands are smaller than the central band, the point is on a positive defocusing surface of the optical imaging system, and the defocusing amount is large;
7) if the two adjacent spectral bands with the highest definition do not include the central band and the two bands are larger than the central band, the point is on the negative defocusing surface of the optical imaging system and the defocusing amount is large.
The utility model discloses compare with current microscopic auto-focusing technique, based on multispectral dispersion principle, can realize once forming images and can acquire sample defocusing volume and defocusing direction fast, this method can realize the micro auto-focusing of the big vertical measuring range of millimeter magnitude, compares traditional microscopic auto-focusing method, on the one hand, need not complicated focal plane search algorithm and expensive outside auxiliary assembly, and on the other hand has improved the efficiency of focusing and has focused the precision.
Drawings
Fig. 1 is a schematic diagram of the structure of the multispectral microscopic auto-focusing device.
In the figure: the system comprises a 1-polychromatic light source, a 2-condenser, a 3-uniform collimated light lens group, a 4-semi-reflecting and semi-transmitting spectroscope, a 5-objective lens with longitudinal dispersion, a 6-high-precision objective table, a 7-tube lens with longitudinal dispersion, an 8-multispectral image sensor and a 9-image analysis and objective table control system.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the invention, are given by way of illustration only.
Detailed description of the invention
The present embodiment is an apparatus embodiment.
The multispectral microscopic auto-focusing device of the present embodiment is schematically shown in fig. 1, and the device includes: the device comprises a polychromatic light illumination module, a longitudinal dispersion enhanced optical imaging module and an image analysis and objective table control module.
The compound color light illumination module is sequentially provided with the following components in the light path propagation direction: the device comprises a polychromatic light source 1, a condenser 2, a uniform collimating light lens group 3, a semi-reflecting and semi-transmitting spectroscope 4 and an objective lens 5 with longitudinal dispersion.
The longitudinal dispersion enhanced optical imaging module is sequentially provided with the following components in the light path propagation direction: the device comprises a high-precision objective table 6, an objective lens 5 with longitudinal dispersion, a semi-reflecting semi-transparent spectroscope 4, a tube mirror 7 with longitudinal dispersion and a multispectral image sensor 8.
The polychromatic light illumination module and the longitudinal dispersion enhanced optical imaging module share a semi-reflecting semi-permeable spectroscope 4 and an objective lens 5 with longitudinal dispersion.
The image analysis and objective table control module is sequentially as follows according to the transmission direction of the control signal: multispectral image sensor 8, image analysis and objective table control system 9, high-precision objective table 6.
The longitudinal dispersion enhanced optical imaging module and the image analysis and stage control module share the multispectral image sensor 8 and the high-precision stage 6.
The image analysis and stage control system 9 adjusts the high-precision stage 6 to the focal plane of the optical imaging system according to the obtained defocus value and defocus direction signal, and completes the automatic focusing.
The longitudinal dispersion enhanced optical imaging module comprises at least one objective lens 5 with longitudinal dispersion, or comprises at least one tube mirror 7 with longitudinal dispersion, or other beneficial combinations.
The longitudinal dispersion enhanced optical imaging module has different focal lengths or image distances for optical signals of different wave bands, namely, under the same object distance, the object clear imaging axial positions of different wave bands are different, and the object surface height can be reversely deduced according to the clear imaging wave bands of the multispectral image sensor.
The longitudinal dispersion enhanced optical imaging module needs to eliminate transverse dispersion.
The multispectral image sensor 8 can simultaneously acquire N (N is more than or equal to 2) sample gray level images I of different central wavelength spectral bands with zero time differencen，1≤n≤N。
Detailed description of the invention
This embodiment is an embodiment of a method implemented on the apparatus described in the first embodiment.
The multispectral microscopic auto-focusing method of the embodiment comprises the following steps:
and 7, adjusting the high-precision objective table 6 to the focal plane of the optical imaging system by the image analysis and objective table control system 9 according to the obtained defocus value and defocus direction signal to finish automatic focusing.
The multispectral microscopic auto-focusing method of the embodiment further comprises a method for judging the defocusing direction of the sample, and specifically comprises the following steps:
1) when a sample is focused, the spectral band with the maximum image definition value is taken as a central band;
2) if one of the two adjacent spectral bands with the maximum definition is a central band which is a longer band, and the definition value of the spectral image of the central band is greater than that of the spectral image of the other band, the point is on a positive defocusing surface of the optical imaging system and the defocusing amount is smaller;
3) if one of the two adjacent spectral bands with the maximum definition is a central band which is a longer band, and the definition value of the spectral image of the central band is smaller than that of the spectral image of the other band, the point is on a positive defocusing surface of the optical imaging system and the defocusing amount is larger;
4) if one of the two adjacent spectral bands with the maximum definition is a central band which is a shorter band, and the spectral image definition value of the central band is greater than that of the other band, the point is on a negative defocusing surface of the optical imaging system and the defocusing amount is smaller;
5) if one of the two adjacent spectral bands with the maximum definition is a central band which is a shorter band, and the spectral image definition value of the central band is smaller than that of the other band, the point is on a negative defocusing surface of the optical imaging system and the defocusing amount is larger;
6) if the two adjacent spectral bands with the maximum definition do not comprise the central band and the two bands are smaller than the central band, the point is on a positive defocusing surface of the optical imaging system, and the defocusing amount is large;
7) if the two adjacent spectral bands with the highest definition do not include the central band and the two bands are larger than the central band, the point is on the negative defocusing surface of the optical imaging system and the defocusing amount is large.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (4)
1. A multispectral microscopic automatic focusing device is characterized by comprising a polychromatic light illumination module, a longitudinal dispersion enhanced optical imaging module and an image analysis and objective table control module,
the compound color light illumination module is sequentially provided with the following components in the light path propagation direction: a polychromatic light source (1), a condenser (2), a uniform collimating light lens group (3), a semi-reflecting and semi-transmitting spectroscope (4) and an objective lens (5) with longitudinal dispersion,
the longitudinal dispersion enhanced optical imaging module is sequentially provided with the following components in the light path propagation direction: the device comprises a high-precision objective table (6), an objective lens (5) with longitudinal dispersion, a semi-reflecting and semi-transmitting spectroscope (4), a tube mirror (7) with longitudinal dispersion and a multispectral image sensor (8);
the image analysis and objective table control module is sequentially provided with a multispectral image sensor (8), an image analysis and objective table control system (9) and a high-precision objective table (6) according to the transmission direction of a control signal;
the polychromatic light illumination module and the longitudinal dispersion enhanced optical imaging module share the semi-reflecting semi-transparent spectroscope (4) and the objective lens (5) with longitudinal dispersion;
the longitudinal dispersion enhanced optical imaging module and the image analysis and stage control module share the multispectral image sensor (8) and the high-precision stage (6);
the image analysis and stage control system (9) can be based on the sharpness F of each spectral gray level imagenAnd obtaining a defocusing value and a defocusing direction signal, and further adjusting the high-precision objective table (6) to a focusing surface of the optical imaging system to finish automatic focusing.
2. The multispectral microscopic auto-focusing device according to claim 1, wherein: the longitudinal dispersion enhanced optical imaging module needs to eliminate transverse dispersion.
3. The multispectral microscopic auto-focusing device according to claim 1, wherein: the multispectral image sensor (8) can simultaneously acquire N sample gray level images I with different central wavelength spectral bands at zero time differencenWherein N is more than or equal to 2, and N is more than or equal to 1 and less than or equal to N.
4. The multispectral microscopic auto-focusing device according to claim 1, wherein: the longitudinal dispersion enhanced optical imaging module has different focal lengths or image distances for different wave band optical signals and comprises at least one objective lens (5) with longitudinal dispersion or at least one tube lens (7) with longitudinal dispersion.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110727093A (en) * | 2019-11-21 | 2020-01-24 | 宁波五维检测科技有限公司 | Multispectral microscopic automatic focusing device and method |
| CN114002806A (en) * | 2021-11-10 | 2022-02-01 | 苏州天准科技股份有限公司 | Measuring device and measuring method based on spectrum confocal rapid focusing |
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2019
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110727093A (en) * | 2019-11-21 | 2020-01-24 | 宁波五维检测科技有限公司 | Multispectral microscopic automatic focusing device and method |
| CN114002806A (en) * | 2021-11-10 | 2022-02-01 | 苏州天准科技股份有限公司 | Measuring device and measuring method based on spectrum confocal rapid focusing |
| CN114002806B (en) * | 2021-11-10 | 2022-07-15 | 苏州天准科技股份有限公司 | Measuring device and measuring method based on spectrum confocal rapid focusing |
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