CN210603219U - Multispectral large-view-field microscopic three-dimensional morphology measuring device - Google Patents

Multispectral large-view-field microscopic three-dimensional morphology measuring device Download PDF

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CN210603219U
CN210603219U CN201922049432.2U CN201922049432U CN210603219U CN 210603219 U CN210603219 U CN 210603219U CN 201922049432 U CN201922049432 U CN 201922049432U CN 210603219 U CN210603219 U CN 210603219U
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objective table
multispectral
longitudinal dispersion
equal
optical imaging
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蒋威
易定容
叶一青
孔令华
朱星星
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Ningbo 5 D Inspection Technology Co ltd
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Abstract

The utility model particularly relates to a multispectral big visual field microcosmic three-dimensional topography measuring device, the device includes: the device comprises a polychromatic light illumination module, a longitudinal dispersion enhanced optical imaging module and an image analysis and objective table control module, wherein the image analysis and objective table control module comprises a multispectral image sensor, an image analysis and objective table control system and a high-precision three-axis objective table. The device can realize microscopic three-dimensional shape measurement with high transverse resolution, high longitudinal measurement precision, millimeter-level longitudinal measurement range and inch-level large-field transverse measurement range.

Description

Multispectral large-view-field microscopic three-dimensional morphology measuring device
Technical Field
The utility model belongs to the optical microscopy imaging field relates to a big visual field microcosmic three-dimensional appearance measuring device and method, especially relates to a big visual field microcosmic three-dimensional appearance measuring device and method based on it is multispectral.
Background
The existing microscopic three-dimensional topography measuring technology has a plurality of defects, such as small observation range of scanning type microscopic measurement and low environment anti-interference capability; the interferometric method requires a large number of axial scans, which limits the measurement efficiency of the method; the traditional confocal microscopic measurement single-point mechanical scanning is difficult to realize real-time and rapid three-dimensional measurement; although the parallel confocal measurement technology realizes simultaneous detection of sampling points on the same confocal section, longitudinal scanning or mechanical scanning of auxiliary equipment is still required, and the measurement efficiency and the measurement accuracy are limited to a certain extent by starting and stopping the scanning process for many times and vibration of the mechanical scanning. For example, the conventional application number cn201510922156.x solves the problem of layer-by-layer longitudinal scanning of the conventional parallel confocal measurement technology, but still needs to acquire sample gray level images before and after the focal plane of a local observation field, mechanical start-stop motion exists, the efficiency is low, and the expansion of the microscopic three-dimensional morphology restoration from the local observation field to a large field is limited to a certain extent. Therefore, there is a need for an optical measurement method to solve the above problems to achieve high precision, high efficiency, and large field range of micro three-dimensional topography measurement.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the not enough of prior art, provide a multispectral big visual field microcosmic three-dimensional appearance measuring device to and a multispectral big visual field microcosmic three-dimensional appearance measuring method. The device and the multispectral large-view-field microscopic three-dimensional topography measuring method implemented on the device can realize automatic focusing once and complete the measurement of the specimen large-view-field microscopic three-dimensional topography under the condition of no axial movement of a loading platform. The device and the method can realize microscopic three-dimensional measurement with high transverse resolution, high longitudinal measurement precision, millimeter-level longitudinal measurement range and inch-level large-view-field transverse measurement range.
The purpose of the utility model is realized like this:
the multispectral large-field microscopic three-dimensional topography measuring device comprises a polychromatic light illumination module, a longitudinal dispersion enhanced optical imaging module and an image analysis and objective table control module.
The compound color light illumination module is sequentially provided with the following components in the light path propagation direction: the device comprises a polychromatic light source, a condenser, a uniform collimating light lens group, a semi-reflecting and semi-transmitting spectroscope and an objective lens with longitudinal dispersion.
The longitudinal dispersion enhanced optical imaging module is sequentially provided with the following components in the light path propagation direction: the device comprises a high-precision three-axis objective table, an objective lens with longitudinal dispersion, a semi-reflecting semi-permeable spectroscope, a tube lens with longitudinal dispersion and a multispectral image sensor.
The image analysis and objective table control module is sequentially provided with the following components in a signal transmission direction: multispectral image sensor, image analysis and objective table control system, high accuracy triaxial objective table.
The polychromatic light illumination module and the longitudinal dispersion enhanced optical imaging module share a semi-reflecting semi-transparent spectroscope and an objective lens with longitudinal dispersion.
The longitudinal dispersion enhanced optical imaging module and the image analysis and objective table control module share the high-precision triaxial objective table and the multispectral image sensor.
The longitudinal dispersion enhanced optical imaging module comprises at least one objective lens with longitudinal dispersion, or comprises at least one tube lens with longitudinal dispersion, or other beneficial combinations.
The longitudinal dispersion enhanced optical imaging module has different focal lengths or image distances for optical signals of different wave bands, namely, under the same object distance, the object clear imaging axial positions of different wave bands are different, and the object surface height can be reversely deduced according to the clear imaging wave bands of the multispectral image sensor.
The longitudinal dispersion enhanced optical imaging module needs to eliminate transverse dispersion.
The high-precision three-axis objective table can realize high-precision longitudinal Z-axis motion and horizontal X-axis and Y-axis motion.
The multispectral image sensor can simultaneously acquire N (N is more than or equal to 2) sample gray level images of different central wavelength spectral bands with zero time differenceIn(X, Y), X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, wherein X is the total row number of the spectrum gray image, and Y is the total column number of the spectrum gray image.
The multispectral large-view-field microscopic three-dimensional topography measuring method implemented on the multispectral large-view-field microscopic three-dimensional topography measuring device comprises the following steps of:
step 1, placing a sample to be detected on a high-precision three-axis objective table;
step 2, adjusting the high-precision triaxial objective table to enable a certain imaging spectral band of the multispectral imaging sensor to clearly image the sample;
step 3, acquiring N (N is more than or equal to 2) sample spectrum gray level images I under different central wavelength spectrum wave bands through the multispectral image sensorn(X, Y), X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, wherein X is the total row number of the spectrum gray image, and Y is the total column number of the spectrum gray image;
step 4, calculating the definition value F of each spectrum gray level imagenThe sharpness value FnThe calculation can be carried out according to image definition evaluation functions such as a Laplacian function, a Brenner function, a Tenengrad function and the like;
step 5, the definition value F of the spectrum gray level image under two adjacent spectrum bands with the maximum definitionnPerforming difference processing to obtain a defocus differential signal FD＝Fn-1-Fn；
Step 6, through the out-of-focus differential signal F of the scale in advanceDObtaining a defocusing value and a defocusing direction signal according to a defocusing amount relation curve, and adjusting a high-precision three-axis objective table to a focusing surface of an optical imaging system to finish automatic focusing;
step 7, repeating the operation of the step 3;
step 8, carrying out difference processing on each point (x, y) of the gray level image under the adjacent spectral wave bands to obtain the gray level difference I of the multispectral imageD(x,y)＝In(x,y)-In-1(x,y)；
Step 9, through the pre-calibrated multispectral gray difference IDAnd a longitudinal height ZnRelation curve, calculating and reducing the surface appearance Z (x, y)；
And step 10, after the surface appearance of the sample in one observation field is restored, controlling the high-precision three-axis objective table to move along the X axis and the Y axis in the horizontal direction through the image analysis and objective table control system, switching to the next observation field, and repeating the operations from the step 7 to the step 9. If the sample surface appearance reduction of all observation fields is completed, the operation of the step 11 is carried out;
and 11, carrying out image splicing on the microscopic three-dimensional surface topography under all observation fields to finish the measurement of the multispectral large-field microscopic three-dimensional topography.
The method for measuring the multispectral large-field microscopic three-dimensional topography also comprises a method for judging the defocusing direction of a sample in an automatic focusing process in the use of the multispectral large-field microscopic three-dimensional topography measuring device, and specifically comprises the following steps:
(1) when a sample is focused, the spectral band with the maximum image definition value is taken as a central band;
(2) if one of the two adjacent spectral bands with the maximum definition is a central band which is a longer band, and the definition value of the spectral image of the central band is greater than that of the spectral image of the other band, the point is on a positive defocusing surface of the optical imaging system and the defocusing amount is smaller;
(3) if one of the two adjacent spectral bands with the maximum definition is a central band which is a longer band, and the definition value of the spectral image of the central band is smaller than that of the spectral image of the other band, the point is on a positive defocusing surface of the optical imaging system and the defocusing amount is larger;
(4) if one of the two adjacent spectral bands with the maximum definition is a central band which is a shorter band, and the spectral image definition value of the central band is greater than that of the other band, the point is on a negative defocusing surface of the optical imaging system and the defocusing amount is smaller;
(5) if one of the two adjacent spectral bands with the maximum definition is a central band which is a shorter band, and the spectral image definition value of the central band is smaller than that of the other band, the point is on a negative defocusing surface of the optical imaging system and the defocusing amount is larger;
(6) if the two adjacent spectral bands with the maximum definition do not comprise the central band and the two bands are smaller than the central band, the point is on a positive defocusing surface of the optical imaging system, and the defocusing amount is large;
(7) if the two adjacent spectral bands with the highest definition do not include the central band and the two bands are larger than the central band, the point is on the negative defocusing surface of the optical imaging system and the defocusing amount is large.
The multispectral large-visual-field microscopic three-dimensional morphology measuring method also comprises a multispectral gray difference ID(x, y) and a longitudinal height ZnThe relation curve calibration method comprises the following operation steps:
step 9.1, adjusting the high-precision triaxial objective table, and simultaneously obtaining axial characteristic curves I of axial light intensity and defocusing amount of different central wavelength spectrum bandsλn，1≤n≤N；
Step 9.2, axial characteristic curve I of axial light intensity and defocusing amount of different central wavelength spectrum wave bandsλnCarrying out normalization processing;
step 9.3, with wave band lambda1，λ2For example, the actual operation is not limited to λ1，λ2Performing difference processing I on gray level images of different center wavelength spectrum wave bands lambda 1 and lambda 2λ1-Iλ2Obtaining the wave band lambda1，λ2Differential curve ID；
Step 9.4, for differential curve IDPerforming linear function fitting in the linear region to obtain multispectral gray difference IDAnd a longitudinal height ZnCalibration curve of the relationship.
The multispectral large-field microscopic three-dimensional topography measuring method further comprises the step of correcting uneven illumination light of the optical imaging system, wherein the correction processing mode is mainly realized by dividing the obtained gray difference or differential curve by the sum of gray values of corresponding points of the two-waveband gray image.
The multispectral large-field microscopic three-dimensional morphology measuring method also comprises the step of correcting the uneven reflectivity of the samples, wherein the correcting method is mainly realized by multiplying the gray values of the gray images of the spectral bands with different central wavelengths obtained in the step by a relative reflection coefficient. The relative reflection coefficient is set to 1 based on the substance with the largest surface reflectivity, and the relative reflection coefficient of other substances is the substance highest reflectivity divided by the substance reflectivity. The gray value of the gray image of the substances with the same height and different reflectivity under the same wave band can be equal through the correction processing mode.
The multispectral large-field microscopic three-dimensional morphology measurement method also comprises the step of compensating the gray level of images of different spectral bands of the multispectral imaging system due to the fact that the transmittance of a filter changes with the band, the intensity of illumination light changes with the band, or the quantum effect of a multispectral camera changes with the band, wherein the compensation processing mode is mainly realized by multiplying the gray level values of the gray level images of the spectral bands of different central wavelengths obtained in the step by a band adjusting coefficient. The band adjustment coefficient obtaining mode is as follows: under the illumination of a uniform multi-color light source in a specific given space, a multi-spectral camera is adopted to obtain N spectral images from a surface-flattened sample with uniform reflectivity for different wave bands, the gray scale adjustment coefficient of the maximum gray scale image is 1, and the gray scale adjustment coefficients of other N-1 wave band images are the gray scale mean value of the maximum gray scale image divided by the gray scale mean value of the wave band image.
Compared with the existing microscopic three-dimensional shape measurement technology, the utility model adopts non-contact scanning, non-single-point scanning or successive layer scanning, can realize automatic focusing, and under the condition of no object carrying table axial motion, the microscopic three-dimensional shape measurement of the sample large view field is completed. The method can realize microscopic three-dimensional measurement with high transverse resolution, high longitudinal measurement precision, millimeter-level longitudinal measurement range and inch-level large-view-field transverse measurement range.
Drawings
FIG. 1 is a schematic structural diagram of a multispectral large-field microscopic three-dimensional topography measuring device.
In the figure: the system comprises a 1-polychromatic light source, a 2-condenser, a 3-uniform collimated light lens group, a 4-semi-reflecting and semi-transmitting spectroscope, a 5-objective lens with longitudinal dispersion, a 6-high-precision three-axis objective table, a 7-tube lens with longitudinal dispersion, an 8-multispectral image sensor and a 9-image analysis and objective table control system.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the invention, are given by way of illustration only.
The following describes the present invention in further detail with reference to fig. 1.
The first embodiment is as follows:
the present embodiment is an apparatus embodiment.
The multispectral large-field microscopic three-dimensional topography measuring device of the embodiment has a structural schematic diagram as shown in the attached figure 1 of the specification, and comprises a polychromatic light illumination module, a longitudinal dispersion enhanced optical imaging module and an image analysis and objective table control module.
The compound color light illumination module is sequentially provided with the following components in the light path propagation direction: the device comprises a polychromatic light source 1, a condenser 2, a uniform collimating light lens group 3, a semi-reflecting and semi-transmitting spectroscope 4 and an objective lens 5 with longitudinal dispersion.
The longitudinal dispersion enhanced optical imaging module is sequentially provided with the following components in the light path propagation direction: the device comprises a high-precision three-axis objective table 6, an objective lens 5 with longitudinal dispersion, a semi-reflecting semi-permeable spectroscope 4, a tube lens 7 with longitudinal dispersion and a multispectral image sensor 8.
The image analysis and objective table control module is sequentially provided with the following components in a signal transmission direction: multispectral image sensor 8, image analysis and objective table control system 9, high accuracy triaxial objective table 6.
The polychromatic light illumination module and the longitudinal dispersion enhanced optical imaging module share a semi-reflecting semi-permeable spectroscope 4 and an objective lens 5 with longitudinal dispersion.
The longitudinal dispersion enhanced optical imaging module and the image analysis and objective table control module share the high-precision triaxial objective table 6 and the multispectral image sensor 8;
the longitudinal dispersion enhanced optical imaging module comprises at least one objective lens 5 with longitudinal dispersion, or comprises at least one tube mirror 7 with longitudinal dispersion, or other beneficial combinations.
The longitudinal dispersion enhanced optical imaging module has different focal lengths or image distances for optical signals of different wave bands, namely, under the same object distance, the object clear imaging axial positions of different wave bands are different, and the object surface height can be reversely deduced according to the clear imaging wave bands of the multispectral image sensor.
The longitudinal dispersion enhanced optical imaging module needs to eliminate transverse dispersion.
The high-precision three-axis objective table 6 can realize high-precision longitudinal Z-axis motion and horizontal X-axis and Y-axis motion.
The multispectral image sensor 8 can simultaneously acquire N (N is more than or equal to 2) sample gray level images I of different central wavelength spectral bands with zero time differencen(X, Y), X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, wherein X is the total row number of the spectrum gray image, and Y is the total column number of the spectrum gray image.
The second embodiment is as follows:
this embodiment is an embodiment of a method implemented on the apparatus described in the first embodiment.
The multispectral large-field microscopic three-dimensional topography measuring method comprises the following steps:
step 1, placing a sample to be tested on a high-precision three-axis objective table 6;
step 2, adjusting the high-precision triaxial objective table 6 to enable a certain imaging spectral band of the multispectral imaging sensor 8 to clearly image the sample;
step 3, acquiring N (N is more than or equal to 2) sample spectrum gray level images I under different central wavelength spectrum wave bands through the multispectral image sensor 8n(X, Y), X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, wherein X is the total row number of the spectrum gray image, and Y is the total column number of the spectrum gray image;
step 4, calculating the definition value F of each spectrum gray level imagenThe sharpness value FnCan be based on Laplacian function, Brenner function, TenCalculating image definition evaluation functions such as an engrad function and the like;
step 5, the definition value F of the spectrum gray level image under two adjacent spectrum bands with the maximum definitionnPerforming difference processing to obtain a defocus differential signal FD＝Fn-1-Fn；
Step 6, through the out-of-focus differential signal F of the scale in advanceDObtaining a defocusing value and a defocusing direction signal according to a defocusing amount relation curve, and adjusting the high-precision three-axis objective table 6 to a focusing surface of the optical imaging system to finish automatic focusing;
step 7, repeating the operation of the step 3;
step 8, carrying out difference processing on each point (x, y) of the gray level image under the adjacent spectral wave bands to obtain the gray level difference I of the multispectral imageD(x,y)＝In(x,y)-In-1(x,y)；
Step 9, through the pre-calibrated multispectral gray difference IDAnd a longitudinal height ZnCalculating a relation curve, and reducing the surface topography Z (x, y) of the sample;
and 10, after the surface appearance of the sample in one observation field is restored, controlling the high-precision three-axis objective table 6 to move along the X axis and the Y axis in the horizontal direction through the image analysis and objective table control system 9, switching to the next observation field, and repeating the operations from the step 7 to the step 9. If the sample surface appearance reduction of all observation fields is completed, the operation of the step 11 is carried out;
and 11, carrying out image splicing on the microscopic three-dimensional surface topography under all observation fields to finish the measurement of the multispectral large-field microscopic three-dimensional topography.
The multispectral large-field microscopic three-dimensional topography measuring method further comprises a method embodiment for judging the defocusing direction of a sample in an automatic focusing process, and specifically comprises the following steps:
(1) when a sample is focused, the spectral band with the maximum image definition value is taken as a central band;
(2) if one of the two adjacent spectral bands with the maximum definition is a central band which is a longer band, and the definition value of the spectral image of the central band is greater than that of the spectral image of the other band, the point is on a positive defocusing surface of the optical imaging system and the defocusing amount is smaller;
(3) if one of the two adjacent spectral bands with the maximum definition is a central band which is a longer band, and the definition value of the spectral image of the central band is smaller than that of the spectral image of the other band, the point is on a positive defocusing surface of the optical imaging system and the defocusing amount is larger;
(4) if one of the two adjacent spectral bands with the maximum definition is a central band which is a shorter band, and the spectral image definition value of the central band is greater than that of the other band, the point is on a negative defocusing surface of the optical imaging system and the defocusing amount is smaller;
(5) if one of the two adjacent spectral bands with the maximum definition is a central band which is a shorter band, and the spectral image definition value of the central band is smaller than that of the other band, the point is on a negative defocusing surface of the optical imaging system and the defocusing amount is larger;
(6) if the two adjacent spectral bands with the maximum definition do not comprise the central band and the two bands are smaller than the central band, the point is on a positive defocusing surface of the optical imaging system, and the defocusing amount is large;
(7) if the two adjacent spectral bands with the highest definition do not include the central band and the two bands are larger than the central band, the point is on the negative defocusing surface of the optical imaging system and the defocusing amount is large.
The multispectral large-view-field microscopic three-dimensional topography measuring method further comprises multispectral gray-scale difference ID(x, y) and a longitudinal height ZnThe relation curve calibration method comprises the following steps:
step 9.1, adjusting the high-precision triaxial objective table 6, and simultaneously obtaining axial characteristic curves I of axial light intensity and defocusing amount of different central wavelength spectrum bandsλn，1≤n≤N；
Step 9.2, axial characteristic curve I of axial light intensity and defocusing amount of different central wavelength spectrum wave bandsλnCarrying out normalization processing;
step 9.3, with wave band lambda1，λ2For example, the actual operation is not limited to λ1，λ2Performing difference processing I on gray level images of different center wavelength spectrum wave bands lambda 1 and lambda 2λ1-Iλ2Obtaining the wave band lambda1，λ2Differential curve ID；
Step 9.4, for differential curve IDPerforming linear function fitting in the linear region to obtain multispectral gray difference IDAnd a longitudinal height ZnCalibration curve of the relationship.
The multispectral large-field microscopic three-dimensional topography measuring method further comprises the step of correcting uneven illumination light of the optical imaging system, wherein the correction processing mode is mainly realized by dividing the obtained gray difference or differential curve by the sum of gray values of corresponding points of the two-waveband gray image.
The multispectral large-field microscopic three-dimensional topography measuring method further comprises the step of correcting the uneven reflectivity of the samples, wherein the correcting method is mainly realized by multiplying the gray values of the gray images of the spectral bands with different central wavelengths obtained in the step by a relative reflection coefficient. The relative reflection coefficient is set to 1 based on the substance with the largest surface reflectivity, and the relative reflection coefficient of other substances is the substance highest reflectivity divided by the substance reflectivity. The gray value of the gray image of the substances with the same height and different reflectivity under the same wave band can be equal through the correction processing mode.
The multispectral large-field microscopic three-dimensional topography measuring method further comprises the step of compensating the gray level of images in different spectral bands of the multispectral imaging system due to the fact that the transmittance of a filter changes with the band, the intensity of illumination light changes with the band, or the quantum effect of a multispectral camera changes with the band, wherein the compensation processing mode is mainly realized by multiplying the gray level values of the gray level images in the spectral bands with different central wavelengths obtained in the step by a band adjusting coefficient. The band adjustment coefficient obtaining mode is as follows: under the illumination of a uniform multi-color light source in a specific given space, a multi-spectral camera is adopted to obtain N spectral images from a surface-flattened sample with uniform reflectivity for different wave bands, the gray scale adjustment coefficient of the maximum gray scale image is 1, and the gray scale adjustment coefficients of other N-1 wave band images are the gray scale mean value of the maximum gray scale image divided by the gray scale mean value of the wave band image.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims (4)

1. A multispectral large-visual-field microscopic three-dimensional shape measuring device is characterized in that: comprises a polychromatic light illumination module, a longitudinal dispersion enhanced optical imaging module and an image analysis and objective table control module,
the compound color light illumination module is sequentially provided with the following components in the light path propagation direction: the device comprises a polychromatic light source (1), a condenser (2), a uniform collimating light lens group (3), a semi-reflecting and semi-transmitting spectroscope (4) and an objective lens (5) with longitudinal dispersion;
the longitudinal dispersion enhanced optical imaging module is sequentially provided with the following components in the light path propagation direction: the device comprises a high-precision triaxial objective table (6), an objective lens (5) with longitudinal dispersion, a semi-reflecting and semi-transmitting spectroscope (4), a tube mirror (7) with longitudinal dispersion and a multispectral image sensor (8);
the image analysis and objective table control module is sequentially provided with the following components in a signal transmission direction: the system comprises a multispectral image sensor (8), an image analysis and objective table control system (9) and a high-precision triaxial objective table (6);
the polychromatic light illumination module and the longitudinal dispersion enhanced optical imaging module share the semi-reflecting semi-transparent spectroscope (4) and the objective lens (5) with longitudinal dispersion;
the longitudinal dispersion enhanced optical imaging module and the image analysis and objective table control module share the high-precision triaxial objective table (6) and the multispectral image sensor (8);
after the surface appearance of the sample in one observation field is restored, the measuring device controls the high-precision three-axis objective table (6) to move along the X axis and the Y axis in the horizontal direction through the image analysis and objective table control system (9), and switches to the next observation field until the surface appearance of the sample in all observation fields is restored.
2. The multi-spectral large-field microscopic three-dimensional topography measuring device according to claim 1, wherein: the longitudinal dispersion enhanced optical imaging module comprises at least one objective lens (5) with longitudinal dispersion or at least one tube lens (7) with longitudinal dispersion.
3. The multi-spectral large-field microscopic three-dimensional topography measuring device according to claim 1, wherein: the longitudinal dispersion enhanced optical imaging module needs to eliminate transverse dispersion.
4. The multi-spectral large-field microscopic three-dimensional topography measuring device according to claim 1, wherein: the multispectral image sensor (8) can simultaneously acquire N sample gray level images I with different central wavelength spectral bands at zero time differencen(X, Y), wherein N is more than or equal to 2, X is more than or equal to 0 and less than or equal to X, Y is more than or equal to 0 and less than or equal to Y, N is more than or equal to 1 and less than or equal to N, X is the total row number of the spectrum gray image, and Y is the total column number of the spectrum gray image.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110763153A (en) * 2019-11-22 2020-02-07 宁波五维检测科技有限公司 Multispectral large-view-field microscopic three-dimensional morphology measuring device and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110763153A (en) * 2019-11-22 2020-02-07 宁波五维检测科技有限公司 Multispectral large-view-field microscopic three-dimensional morphology measuring device and method

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