CN110441234B - Zoom lens, defect detection device and defect detection method - Google Patents
Zoom lens, defect detection device and defect detection method Download PDFInfo
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- CN110441234B CN110441234B CN201910731560.7A CN201910731560A CN110441234B CN 110441234 B CN110441234 B CN 110441234B CN 201910731560 A CN201910731560 A CN 201910731560A CN 110441234 B CN110441234 B CN 110441234B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The embodiment of the invention discloses a zoom lens, a defect detection device and a defect detection method. The first zoom lens group and the second zoom lens group move along the optical axis in the zooming process by fixing the positions of the first fixed lens group and the second fixed lens group so as to adjust the focal length of the zoom cylindrical lens; meanwhile, the compensation lens group moves along the optical axis to realize focusing under different focal lengths, so that the zoom lens can realize continuous change of imaging magnification, and has better imaging quality to improve detection precision and detection efficiency.
Description
Technical Field
The embodiment of the invention relates to the technology of optical devices, in particular to a zoom cylindrical lens, a defect detection device and a defect detection method.
Background
Since the Automatic Optical Inspection (AOI) technology can perform fast, high-precision, non-destructive Inspection on wafers, chips, or other objects to be inspected, the AOI technology is widely applied to multiple fields such as PCBs, IC wafers, L EDs, TFTs, and solar panels.
The AOI device generally includes a workpiece stage and an optical imaging system, wherein the workpiece stage can carry an object to be measured, the optical imaging system scans and images the object to be measured, and compares the scanned image with an ideal reference image, or identifies surface defects of the object to be measured by means of feature extraction and the like. Meanwhile, in the detection process, the surface defect of the object to be detected can be visually observed by adjusting the imaging magnification. In the prior art, an optical imaging system of an AOI device manually switches imaging magnifications by using a mechanical turntable to obtain images of corresponding multiples.
However, in the prior art, the imaging magnification adjusted by the manually switched mechanical turntable is usually a fixed magnification, and the optimal magnification cannot be realized for application, so that the detection efficiency and the detection precision are affected.
Disclosure of Invention
The embodiment of the invention provides a zoom cylindrical lens, a defect detection device and a defect detection method, which can improve the detection efficiency and the detection precision.
In a first aspect, an embodiment of the present invention provides a zoom lens, including a diaphragm, a first fixed lens group with negative focal power, a first zoom lens group with positive focal power, a second zoom lens group with negative focal power, a compensating lens group with positive focal power, and a second fixed lens group with positive focal power, which are sequentially arranged from an object side to an image side along an optical axis;
the first zoom lens group and the second zoom lens group move along the optical axis in the zooming process; the compensating lens group moves along the optical axis in the focusing process; the first fixed mirror group and the second fixed mirror group are fixed in position.
Optionally, the variable focal length cylindrical lens further comprises a beam splitter group arranged along the optical axis and located in the second fixed lens group close to the image space.
Optionally, the beam splitter group includes a beam splitter prism or a half-transmitting and half-reflecting prism.
Optionally, the first fixed lens group includes a first lens with negative focal power;
the first zoom lens group comprises a second lens with negative focal power and a third lens with positive focal power which are sequentially arranged from the object side to the image side along the optical axis, and the second lens and the third lens form a cemented lens;
the second zoom lens group comprises a fourth lens with negative focal power, a fifth lens with negative focal power and a sixth lens with positive focal power which are sequentially arranged from the object side to the image side along the optical axis; the fifth lens and the sixth lens constitute a cemented lens;
the compensating lens group comprises a seventh lens with positive focal power, an eighth lens with positive focal power and a ninth lens with negative focal power which are sequentially arranged from the object side to the image side along the optical axis; the eighth lens and the ninth lens constitute a cemented lens;
the second fixed lens group comprises a tenth lens with negative focal power, an eleventh lens with positive focal power and a twelfth lens with positive focal power; the tenth lens and the eleventh lens constitute a cemented lens.
Optionally, the variation range of the focal length F of the zoom lens is 140mm or more and less than or equal to F and less than or equal to 360 mm.
In a second aspect, an embodiment of the present invention further provides a defect detection apparatus, which includes a light beam emitting unit, a half-mirror, an objective lens, a light beam receiving unit, and the zoom lens.
The light beam provided by the light beam emergent unit is reflected by the semi-transparent semi-reflective prism and then irradiates the surface to be measured through the objective lens, and the light beam reflected by the surface to be measured sequentially penetrates through the objective lens and the semi-transparent semi-reflective prism to be transmitted;
the zoom tube lens receives the light beam penetrating through the semi-transparent semi-reflective prism, and the light beam is received by the light beam receiving unit after zooming and focusing.
Optionally, when the zoom barrel mirror includes a beam splitter group, the light beam receiving unit includes a first detector and a second detector.
Optionally, the light beam emergent unit includes a light source, a converging lens group, a collimating lens group and a reflecting lens group, which are sequentially arranged along the light path;
the light beam provided by the light source is converged at the focal point of the converging lens group, is diverged at the focal point, enters the collimating lens and is converted into a parallel collimated light beam;
the parallel collimated light beams are reflected on the reflecting surface of the reflector group.
In a third aspect, an embodiment of the present invention further provides a defect detection method, including:
determining the measurement condition of the object to be measured according to the object to be measured;
adjusting the measurement focal length and the focusing position of a zoom lens of the defect detection device according to the measurement conditions;
carrying out defect detection on the surface to be detected of the object to be detected by adopting the defect detection device so as to obtain a defect detection image;
and comparing the defect detection image with the standard image to obtain the defect parameters of the to-be-detected surface of the to-be-detected object.
Optionally, the surface of the object to be detected includes a plurality of defect detection areas;
the adjusting the measurement focal length and the focusing position of the zoom lens of the defect detection device according to the measurement condition comprises the following steps:
respectively determining measurement focal lengths and focusing positions corresponding to a plurality of defect detection areas of the surface to be detected of the object to be detected according to the measurement conditions;
adjusting the measurement focal length and the focusing position of the zoom cylinder lens according to the measurement focal length and the focusing position corresponding to the defect detection area of the surface to be detected of the object to be detected; and the measuring focal length and the focusing position corresponding to different defect detection areas are different.
The embodiment of the invention provides a zoom lens, a defect detection device and a defect detection method, wherein the defect detection method adopts the defect detection device provided by the embodiment of the invention to detect the defect of an object to be detected, and the defect detection device comprises the zoom lens, and the zoom lens comprises a diaphragm, a first fixed lens group with negative focal power, a first zoom lens group with positive focal power, a second zoom lens group with negative focal power, a compensating lens group with positive focal power and a second fixed lens group with positive focal power which are sequentially arranged from the object side to the image side along the optical axis. The first zoom lens group and the second zoom lens group move along the optical axis in the zooming process by fixing the positions of the first fixed lens group and the second fixed lens group so as to adjust the focal length of the zoom cylindrical lens; meanwhile, the compensation lens group moves along the optical axis to realize focusing under different focal lengths, so that the zoom lens can realize continuous change of imaging magnification, and has better imaging quality to improve detection precision and detection efficiency.
Drawings
FIG. 1 is a schematic structural diagram of a zoom lens provided in an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a zoom lens provided in an embodiment of the present invention;
FIG. 3 is a vertical aberration diagram of a zoom lens according to an embodiment of the present invention;
FIG. 4 is a diagram of a transfer function of a zoom lens provided in accordance with an embodiment of the present invention;
FIG. 5 is a distortion diagram of a zoom lens provided by an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a defect detection apparatus according to an embodiment of the present invention;
FIG. 7 is a flowchart of a defect detection method according to an embodiment of the present invention;
fig. 8 is a schematic diagram of a defect distribution structure of a test surface of a test object according to an embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. It should be noted that the terms "upper", "lower", "left", "right", and the like used in the description of the embodiments of the present invention are used in the angle shown in the drawings, and should not be construed as limiting the embodiments of the present invention. In addition, in this context, it is also to be understood that when an element is referred to as being "on" or "under" another element, it can be directly formed on "or" under "the other element or be indirectly formed on" or "under" the other element through an intermediate element. The terms "first," "second," and the like, are used for descriptive purposes only and not for purposes of limitation, and do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Fig. 1 is a schematic structural diagram of a zoom cylindrical lens according to an embodiment of the present invention. Referring to fig. 1, the zoom lens 100 of the present embodiment includes a diaphragm U1, a first fixed lens group G1 with negative optical power, a first zoom lens group G2 with positive optical power, a second zoom lens group G3 with negative optical power, a compensating lens group G4 with positive optical power, and a second fixed lens group G5 with positive optical power, which are arranged in order from the object side to the image side along the optical axis; the first zoom lens group G2 and the second zoom lens group G3 move along the optical axis during zooming; the compensating lens group G4 moves along the optical axis during focusing; the positions of the first fixed mirror group G1 and the second fixed mirror group G5 are fixed.
Therein, it is understood that the optical power is equal to the difference between the image-side and object-side convergence, which characterizes the ability of the optical system to deflect light. The larger the absolute value of the focal power is, the stronger the bending ability to the light ray is, and the smaller the absolute value of the focal power is, the weaker the bending ability to the light ray is. When the focal power is positive, the refraction of the light is convergent; when the focal power is negative, the refraction of the light is divergent. The optical power can be suitable for representing a certain refractive surface of a lens (namely, a surface of the lens), can be suitable for representing a certain lens, and can also be suitable for representing a system (namely a lens group) formed by a plurality of lenses together.
In the present embodiment, the zoom cylinder lens 100 may be configured by fixing each lens group in one lens barrel (not shown in fig. 1). During zooming, the first zoom lens group G2 and the second zoom lens group G3 move along the optical axis, so that the distance between the first fixed lens group G1 and the first zoom lens group G2, the distance between the first zoom lens group G2 and the second zoom lens group G3, and the distance between the second zoom lens group G3 and the second fixed lens group G5 all change, so that the zoom lens 100 realizes continuous zooming; meanwhile, the compensating lens group G4 is moved along the optical axis direction to adjust the imaging definition, so as to achieve focusing at different focal lengths, and the zoom lens 100 can have high imaging quality. Wherein, optionally, the focal length F of the zoom lens 100 can be changed within the range of 140mm ≦ F ≦ 360 mm. For example, compared with the tube lens with a fixed focal length of 200mm in the prior art, the tube lens with a continuous zooming function of 0.7 to 1.8 times the original focal length can be realized by performing the structural improvement and adjustment described in this embodiment, and has higher imaging quality. In addition, when the zoom lens is set to a corresponding focal length, the objective lens can realize the change of continuous multiplying power of 1.4-3.6 times, 3.5-9 times, 7-18 times, 14-36 times, 35-90 times and the like by matching with 2X, 5X, 10X, 20X and 50X, namely the change of any multiplying power between 1.4 times and 90 times.
Further, when the zoom lens 100 is applied to a defect detection apparatus, and the defect detection apparatus may further include an objective lens located on the side of the zoom lens 100 closer to the light source in the optical path direction, the position of the diaphragm U1 coincides with the position of the exit pupil of the objective lens, i.e., the diaphragm U1 is the entrance pupil of the zoom lens 100.
In the present embodiment, the first fixed lens group and the second fixed lens group are fixed in position in the zoom cylindrical lens, and the first zoom lens group, the second zoom lens group and the compensation lens group capable of moving along the optical axis are arranged in the optical path between the first fixed lens group and the second fixed lens group, so that the zoom cylindrical lens can realize the continuous change of the imaging magnification and has higher imaging quality.
On the basis of the above technical solution, optionally, with reference to fig. 1, the first fixed lens group G1 includes a first lens element 10 with negative power; the first zoom lens group G2 comprises a second lens 21 with negative focal power and a third lens 22 with positive focal power which are arranged in order from the object side to the image side along the optical axis, and the second lens 21 and the third lens 22 form a cemented lens; the second zoom lens group G3 includes, in order from the object side to the image side along the optical axis, a fourth lens 31 of negative power, a fifth lens 32 of negative power, and a sixth lens 33 of positive power, and the fifth lens 32 and the sixth lens 33 constitute a cemented lens; the compensating lens group G4 includes a seventh lens 41 with positive refractive power, an eighth lens 42 with positive refractive power, and a ninth lens 43 with negative refractive power, which are arranged in order from the object side to the image side along the optical axis, and the eighth lens 42 and the ninth lens 43 constitute a cemented lens; the second fixed mirror group G5 includes a tenth lens 51 of negative power, an eleventh lens 52 of positive power, and a twelfth lens 53 of positive power, and the tenth lens 51 and the eleventh lens 52 constitute a cemented lens.
Thus, by arranging the cemented lenses in the first zoom lens group G2, the second zoom lens group G3, the compensating lens group G4 and the second fixed lens group G5, chromatic aberration and spherical aberration can be reduced by the cemented lenses, so that the zoom cylindrical lens can have high imaging definition when applied to a fluorescence microscope, image relay, detection or spectroscopy, and the like.
On the basis of the above technical solution, optionally, fig. 2 is a schematic structural diagram of another zoom cylindrical lens provided in an embodiment of the present invention. As shown in fig. 2, the zoom cylindrical lens 100 further includes a beam splitter group 60 capable of splitting the light beam passing through the second fixed lens group G5 into two or more beams in different directions, so that the corresponding receiving instruments can respectively receive the beams in different directions, and respectively form images and then combine them, thereby improving the resolution of the images. The beam splitter group can comprise a beam splitter prism or a semi-transparent semi-reflective prism.
Exemplarily, table 1 shows optical physical parameters of a zoom lens provided in an embodiment of the present invention. The focal length of the zoom lens in table 1 was adjusted to f 200 mm. In table 1, data of the lens sequentially arranged from the object side to the image side are shown, and include a curvature radius R (unit: mm), a thickness T (unit: mm), a refractive index Nd of the material d light (d light wavelength: 587.6nm), and an abbe number Vd of the material d light. Referring to fig. 2 and table 1, reference numeral S1 is a stop surface, reference numerals S2 and S3# are front and rear surfaces of the first lens 10, reference numeral S4 is a front surface of the second lens 21, reference numeral S5 is a cemented surface of the second lens 21 and the third lens 22, reference numeral S6# is a rear surface of the third lens 22, reference numerals S7 and S8 are front and rear surfaces of the fourth lens 31, reference numeral S9 is a rear surface of the fifth lens 32, reference numeral S10 is a cemented surface of the fifth lens 32 and the sixth lens 33, reference numeral S11# is a rear surface of the sixth lens 33, reference numerals S12 and S13 are front and rear surfaces of the seventh lens 41, reference numeral S14 is a front surface of the eighth lens 42, reference numeral S15 is a cemented surface of the eighth lens 42 and the ninth lens 43, reference numeral S16 is a rear surface of the ninth lens 43, reference numeral S17 is a front surface of the tenth lens 92, reference numeral S19 is a front surface of the eleventh lens 51 and a tenth lens 19, reference numerals S20 and S21 denote front and rear surfaces of the twelfth lens element, reference numerals S22 and S23 denote front and rear surfaces of the half-mirror prism, and reference numeral S24 denotes an image plane. Since the zoom cylinder lens 100 achieves zooming by moving the first zoom lens group G2 and the second zoom lens group G3 along the optical axis, the thickness of the rear surface S3# of the first lens 10, the thickness of the rear surface S6# of the third lens 22, and the thickness of the rear surface S11# of the sixth lens 43 of the zoom cylinder lens 100 are variable.
TABLE 1 optical physical parameters of zoom cylindrical lens
| Surface of | Radius of curvature R | Thickness of | Refractive index Nd | Abbe number Vd |
| S1 | All- |
80 | ||
| S2 | 131.466 | 4 | 1.65 | 39.15 |
| S3# | 81.288 | 25.45 | ||
| S4 | 71.289 | 6.27 | 1.72 | 29.62 |
| S5 | 42.473 | 15 | 1.62 | 47 |
| S6# | 547.781 | 22.28 | ||
| S7 | 364.024 | 8 | 1.62 | 56.9 |
| S8 | 61.015 | 6.35 | ||
| S9 | -172.421 | 3 | 1.55 | 63.46 |
| S10 | 51.563 | 7.09 | 1.76 | 27.38 |
| S11# | 199.388 | 41.5 | ||
| S12 | 308.851 | 10.01 | 1.57 | 71.21 |
| S13 | -125.328 | 1.61 | ||
| S14 | 152.006 | 15.01 | 1.57 | 71.21 |
| S15 | -79.51 | 4.42 | 1.72 | 34.7 |
| S16 | All-round | 67.14 | ||
| S17 | All-round | 6.5 | ||
| S18 | -1086.569 | 14.25 | 1.65 | 39.7 |
| S19 | 45 | 14.71 | 1.59 | 35.51 |
| S20 | 67.387 | 9.76 | ||
| S21 | 75.332 | 14.24 | 1.61 | 59.46 |
| S22 | -154.019 | 40 | ||
| S23 | All-round | 3 | 1.52 | 64.21 |
| S24 | All-round | 71 |
Illustratively, table 2 shows the thicknesses of the rear surface S3# of the first lens 10, the rear surface S6# of the third lens 22, and the rear surface S11# of the sixth lens 43 of the zoom lens at different focal lengths F.
TABLE 2 aspherical lens surface type parameters
| Surface of | Structure 1(F ═ 200mm) | Structure 2(F ═150mm) | Structure 3 (F360 mm) |
| S3# | 25.45 | 47.03 | 0.988 |
| S6# | 22.28 | 4.44 | 71.03 |
| S11# | 41.5 | 56.533 | 4 |
Fig. 3 is a vertical aberration diagram of a zoom lens according to an embodiment of the present invention, where Px and Py are pupil normalization coordinate points, ex is a sagittal aberration curve, and ey is a meridional aberration curve. The maximum scale value of the ordinate in FIG. 3 is. + -. 50 μm, and the wavelength range of light is 486nm to 656 nm. With reference to fig. 2 and 3, when the focal length of the zoom lens 100 is adjusted to be F ═ 200mm, the shapes of the respective optical curves of the 0 field of view, the 0.5 field of view (object field radius of view 5mm), the 0.7 field of view (object field radius of view 7mm), and the full field of view (object field radius of view 10mm) are similar, and the maximum vertical phase difference is controlled within 30 micrometers. When the focal length is adjusted to be F150 mm or F360 mm, the maximum vertical difference can be controlled within 15 micrometers.
Fig. 4 is a transfer function diagram of a zoom cylindrical lens according to an embodiment of the present invention, where S is a sagittal MTF curve, and T is a meridional MTF curve. The wavelength of light in FIG. 4 is 486nm to 656 nm. With reference to fig. 2 and 4, when the focal length of the zoom lens 100 is adjusted to F ═ 200mm, the values of the transfer functions at 100 line pairs/mm are greater than 0.2 or greater for the optical transfer functions at 0 field of view, 0.5 field of view (object field radius of view 5mm), 0.7 field of view (object field radius of view 7mm), and full field of view (object field radius of view 10 mm). When the focal length is adjusted to be F-150 mm, and the optical transfer functions of the transfer functions in a 0 view field, a 0.5 view field (the radius of an object space view field is 5mm), a 0.7 view field (the radius of the object space view field is 7mm) and a full view field (the radius of the object space view field is 10mm) are on 100 line pairs/mm, the values of the transfer functions are all larger than 0.3; when the focal length is adjusted to be F-360 mm, and the optical transfer functions of the transfer functions in the 0 field, the 0.5 field (the object field radius of 5mm), the 0.7 field (the object field radius of 7mm) and the full field (the object field radius of 10mm) are all larger than 0.2 at 60 line pairs/mm.
Fig. 5 is a distortion diagram of a zoom lens provided in an embodiment of the present invention. The wavelength range of light in FIG. 5 is 486nm to 656 nm. With reference to fig. 2 and 5, when the focal length of the zoom lens 100 is adjusted to F ═ 200mm, the maximum optical distortion of the zoom lens 100 is less than 0.3%. When the focal length of the zoom lens 100 is adjusted to be F ═ 150mm, the maximum optical distortion of the zoom lens 100 is less than 0.6%; when the focal length of the zoom lens 100 is adjusted to F ═ 360mm, the maximum optical distortion of the zoom lens 100 is less than 0.1%.
The embodiment of the invention also provides a defect detection device which comprises a light beam emergent unit, a semi-transparent semi-reflective prism, an objective lens, a light beam receiving unit and the zoom cylindrical lens provided by the embodiment of the invention. The light beam provided by the light beam emergent unit is projected to a surface to be measured through the objective lens after being reflected by the semi-transparent semi-reflective prism, and the light beam reflected by the surface to be measured sequentially penetrates through the objective lens and the semi-transparent semi-reflective prism to be transmitted; the zoom tube lens receives the light beam penetrating through the semi-transparent semi-reflective prism, and the light beam receiving unit receives the light beam after zooming and focusing.
When the defect detection device of the embodiment detects the defect of the object to be detected, the light beam provided by the light beam emergent unit is reflected into the objective lens through the semi-transparent semi-reflective prism and is projected to the surface to be detected of the object to be detected through the optical lens in the objective lens; and after the surface to be measured is reflected and diffused, the surface to be measured passes through the objective lens and then reaches the zoom lens through the semi-transparent semi-reflective prism, the zoom lens zooms, and the imaging magnification is adjusted and then is received by the light beam receiving unit for imaging. Because the zoom tube lens can carry out continuous zooming, the imaging multiplying power of the defect detection device can be continuously changed within a preset range, and therefore the defect detection precision and the defect detection efficiency can be improved.
On the basis of the foregoing embodiment, optionally, fig. 6 is a schematic structural diagram of a defect detection apparatus provided in an embodiment of the present invention. As shown in fig. 6, when the zoom barrel mirror 100 includes a spectroscope group, the light beam receiving unit 240 includes a first detector 241 and a second detector 242.
The light beam provided by the light beam emitting unit 210 enters the objective lens 230 after being reflected by the half-mirror 220, and is transmitted to the surface to be measured of the object 250 through the optical lens of the objective lens 230, and the light reflected and diffusely reflected on the surface to be measured of the object 250 reaches the zoom lens 100 through the objective lens 230 and the half-mirror 220. By adjusting the focal length of the zoom lens 100, images of different magnifications are obtained. The zoom cylindrical lens 100 is provided therein with a beam splitter group, which can split a beam into multiple beams, and the beam receiving unit may include multiple detectors for receiving the beams. For example, when the beam splitter group splits a beam of light into two beams of light, the beam receiving unit 240 includes a first detector 241 and a second detector 242 for receiving the two beams of light split by the beam splitter group, and the first detector 241 and the second detector 242 are both located on the focal plane of the beam splitter group.
In this way, the first detector 241 and the second detector 242 receive different light beams split by the beam splitter group respectively, and combine the light beams into images with corresponding magnifications after imaging respectively, so that the imaging resolution of the defect detection device can be improved, the detection precision can be improved, and the detection efficiency can be improved.
On the basis of the above embodiment, optionally, with reference to fig. 6, the light beam exiting unit 210 includes a light source 211, a converging lens 212, a collimating lens 213, and a reflecting mirror 214, which are sequentially disposed along the light path. The light beam provided by the light source 211 is converged at the focal point of the converging lens 212, and is diverged at the focal point to enter the collimating lens 213, where it is converted into a collimated light beam, which is reflected at the reflecting surface of the reflecting mirror 214. So set up and to reduce defect detecting device's width in the X direction, be favorable to reducing defect detecting device's size, be convenient for defect detecting device's transportation, carry etc.
The embodiment of the invention also provides a defect detection method, and the defect detection method adopts the defect detection device provided by the embodiment of the invention to detect defects. Fig. 7 is a flowchart of a defect detection method according to an embodiment of the present invention. As shown in fig. 7, the defect detection method provided by the embodiment of the present invention includes:
s710, determining the measurement condition of the object to be measured according to the object to be measured.
Specifically, the object to be measured may be, for example, a wafer, and due to limitations of a preparation environment, a preparation process, and the like, defects exist on the wafer in different degrees, so that the object to be measured in different shapes and different parameters, or different areas of the same object to be measured, the adopted measurement conditions may be different, and the measurement conditions may include, for example, a wavelength, a polarization direction, an intensity, and the like of a light beam provided by a light source, and an imaging magnification of the object to be measured.
For example, fig. 8 is a schematic diagram of a defect distribution structure of a test surface of a test object according to an embodiment of the present invention. The object 250 to be tested is a wafer, the region of the wafer 250 having the same filling pattern as the reference numeral 84 may be a critical region of the wafer 250, the region of the wafer 250 having the same filling pattern as the reference numeral 83 may be a sub-critical region of the wafer 250, the region of the wafer 250 having the same filling pattern as the reference numeral 82 may be a first peripheral region of the wafer 250, and the region of the wafer 250 having the same filling pattern as the reference numeral 81 may be a second peripheral region of the wafer 250. Therefore, according to the size of the wafer, key areas used for preparing devices and the like in the wafer and the like, the light source used when the wafer is subjected to defect detection, the detection multiplying power used when different areas of the wafer are detected and the like can be determined.
S720, adjusting the measurement focal length and the focusing position of the zoom lens of the defect detection device provided by the embodiment of the invention according to the measurement conditions.
Specifically, after the detection multiplying powers adopted by different areas in the surface to be detected of the object to be detected are obtained, imaging with corresponding multiplying powers can be realized by adjusting the measurement focal length and the alignment position of the zoom cylindrical lens in the defect detection device. When the surface to be detected of the object to be detected comprises a plurality of defect detection areas, the measurement focal length and the focusing position corresponding to the plurality of defect detection areas of the surface to be detected can be respectively determined according to the measurement conditions, the measurement focal length and the focusing position of the zoom cylinder lens of the defect detection device can be adjusted according to the measurement focal length and the focusing position corresponding to the defect detection areas of the surface to be detected, and the measurement focal length and the focusing position corresponding to different defect detection areas can be different.
In the above example, the object is a wafer, and the surface of the wafer includes a plurality of defect detection areas, i.e., a first defect detection area 81, a second defect detection area 82, a third defect detection area 83, and a fourth defect detection area 84. Different areas of the surface to be measured of the wafer are scanned in sequence, so that the different areas have different imaging magnifications. The first defect detection area 81 and the second defect detection area 82 are peripheral areas, and can be detected by using a relatively low magnification; the third defect detection area 83 and the fourth defect detection area 84 are critical areas and can be detected with a relatively high magnification. Illustratively, the first defect detection area 81 may be inspected with a 2x field of view of the objective lens, the second defect detection area 82 may be inspected with a 3 x field of view of the objective lens, the third defect detection area 83 may be inspected with a 6 x field of view of the objective lens, and the fourth defect detection area 84 may be inspected with a 12 x field of view of the objective lens.
And S730, carrying out defect detection on the to-be-detected surface of the to-be-detected object by adopting the defect detection device so as to obtain a defect detection image.
And S740, comparing the defect detection image with the standard image to obtain the defect parameters of the to-be-detected surface of the to-be-detected object.
Specifically, the defect detection device is used for acquiring an amplified image of the surface to be detected of the object to be detected, and comparing and analyzing the amplified image with a standard image, so that the size, type, distribution condition and the like of the defect on the surface to be detected can be obtained, and the defect detection of the surface to be detected of the object to be detected is realized.
According to the embodiment of the invention, the defect detection device provided by the embodiment of the invention is adopted to carry out defect detection on the surface to be detected of the object to be detected, so that an image with any multiplying power can be obtained within a preset imaging multiplying power range according to different imaging requirements, the imaging quality is higher, and the defect detection precision and the defect detection efficiency can be improved.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. A zoom tube lens is characterized by comprising a diaphragm, a first fixed lens group with negative focal power, a first zoom lens group with positive focal power, a second zoom lens group with negative focal power, a compensating lens group with positive focal power and a second fixed lens group with positive focal power which are sequentially arranged from an object side to an image side along an optical axis;
the first zoom lens group and the second zoom lens group move along the optical axis in the zooming process, so that the distance between the first fixed lens group and the first zoom lens group, the distance between the first zoom lens group and the second zoom lens group and the distance between the second zoom lens group and the second fixed lens group are changed; the compensating lens group moves along the optical axis in the focusing process so as to adjust the imaging definition; the first fixed mirror group and the second fixed mirror group are fixed in position.
2. The variable focal length cylinder lens as claimed in claim 1, further comprising a beam splitting lens group disposed along the optical axis and located on the image side of the second fixed lens group.
3. The zoom barrel lens according to claim 2, wherein the beam splitter group comprises a beam splitter prism or a half-mirror prism.
4. The zoom barrel lens according to claim 1, wherein the first fixed lens group comprises a first lens of negative power;
the first zoom lens group comprises a second lens with negative focal power and a third lens with positive focal power which are sequentially arranged from the object side to the image side along the optical axis, and the second lens and the third lens form a cemented lens;
the second zoom lens group comprises a fourth lens with negative focal power, a fifth lens with negative focal power and a sixth lens with positive focal power which are sequentially arranged from the object side to the image side along the optical axis; the fifth lens and the sixth lens constitute a cemented lens;
the compensating lens group comprises a seventh lens with positive focal power, an eighth lens with positive focal power and a ninth lens with negative focal power which are sequentially arranged from the object side to the image side along the optical axis; the eighth lens and the ninth lens constitute a cemented lens;
the second fixed lens group comprises a tenth lens with negative focal power, an eleventh lens with positive focal power and a twelfth lens with positive focal power; the tenth lens and the eleventh lens constitute a cemented lens.
5. The variable focal length cylinder lens according to any one of claims 1 to 4, wherein the focal length F of the variable focal length cylinder lens is 140mm ≦ F ≦ 360 mm.
6. A defect detection device, comprising a light beam emitting unit, a half-transmitting and half-reflecting prism, an objective lens, a light beam receiving unit and the zoom lens of any one of claims 1 to 5;
the light beam provided by the light beam emergent unit is reflected by the semi-transparent semi-reflective prism and then irradiates the surface to be measured through the objective lens, and the light beam reflected by the surface to be measured sequentially penetrates through the objective lens and the semi-transparent semi-reflective prism to be transmitted;
the zoom tube lens receives the light beam penetrating through the semi-transparent semi-reflective prism, and the light beam is received by the light beam receiving unit after zooming and focusing.
7. The defect detection apparatus of claim 6, wherein when the zoom barrel mirror comprises a beam splitter group, the beam receiving unit comprises a first detector and a second detector.
8. The defect detection device of claim 6, wherein the light beam exit unit comprises a light source, a converging lens group, a collimating lens group and a reflecting lens group which are arranged in sequence along the light path;
the light beam provided by the light source is converged at the focal point of the converging lens group, is diverged at the focal point, enters the collimating lens group and is converted into a collimated light beam;
the collimated light beams are reflected on the reflecting surfaces of the reflector group.
9. A method of defect detection, comprising:
determining the measurement condition of the object to be measured according to the object to be measured;
adjusting the measurement focal length and the focusing position of a zoom lens of the defect detection device according to the measurement condition;
carrying out defect detection on the surface to be detected of the object to be detected by adopting the defect detection device so as to obtain a defect detection image;
and comparing the defect detection image with the standard image to obtain the defect parameters of the to-be-detected surface of the to-be-detected object.
10. The defect detection method of claim 9, wherein the test face of the test object includes a plurality of defect detection areas;
the adjusting the measurement focal length and the focusing position of the zoom lens of the defect detection device according to the measurement condition comprises the following steps:
respectively determining measurement focal lengths and focusing positions corresponding to a plurality of defect detection areas of the surface to be detected of the object to be detected according to the measurement conditions;
adjusting the measurement focal length and the focusing position of the zoom cylinder lens according to the measurement focal length and the focusing position corresponding to the defect detection area of the surface to be detected of the object to be detected; and the measuring focal length and the focusing position corresponding to different defect detection areas are different.
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| CN110764232A (en) * | 2019-11-29 | 2020-02-07 | Oppo广东移动通信有限公司 | Optical lens and electronic device |
| CN111399347B (en) * | 2020-05-15 | 2021-03-23 | 安徽国芯智能装备有限公司 | Illumination area continuously adjustable uniform illumination system |
| CN114415325B (en) * | 2022-02-22 | 2023-11-03 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Focusing optical imaging system |
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