CN114593723A - Quartz tuning fork gyroscope circuit and gyroscope - Google Patents
Quartz tuning fork gyroscope circuit and gyroscope Download PDFInfo
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- CN114593723A CN114593723A CN202011416935.XA CN202011416935A CN114593723A CN 114593723 A CN114593723 A CN 114593723A CN 202011416935 A CN202011416935 A CN 202011416935A CN 114593723 A CN114593723 A CN 114593723A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5614—Signal processing
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- Gyroscopes (AREA)
Abstract
The invention provides a quartz tuning fork gyroscope circuit and a gyroscope, wherein the quartz tuning fork gyroscope circuit comprises: a driving sub-circuit, a detection sub-circuit and a switch sub-circuit; the switch sub-circuit is respectively connected with the driving sub-circuit and the detection sub-circuit; the switch sub-circuit is used for generating a control signal for controlling the drive sub-circuit and the detection sub-circuit to work in a time-sharing mode; the drive sub-circuit and the detection sub-circuit operate in a time-sharing manner. According to the quartz tuning fork gyroscope circuit and the gyroscope, the driving signal and the detection signal are isolated in time space through the switch sub-circuit, so that the electrostatic coupling of the driving voltage signal to the pickup electrode is eliminated. The pickup of the detection signal is not carried out in the loading period of the driving signal, the driving signal is not loaded in the detection period, the electrostatic coupling between the driving and the detection is thoroughly staggered from the time, and the electrostatic coupling error can be thoroughly eliminated.
Description
Technical Field
The invention relates to the technical field of gyroscopes, in particular to a quartz tuning fork gyroscope circuit and a gyroscope.
Background
The gyroscope is an inertia sensitive device and is a sensitive device for measuring the rotation angular speed of an object relative to an inertia space. The micro mechanical sensor has the characteristics of small volume, light weight, low power consumption, easy integration, strong overload resistance, batch production and the like. Quartz tuning fork gyros are one type of micromechanical gyros.
The existing gyro circuit mainly includes: a vibration unit (i.e., an angular velocity sensor), a detection circuit, a timing signal output circuit (a demodulation signal generation circuit), and a drive circuit. The vibration monitor signal is from the vibration section, and the signal passes through the low-pass filter, the comparator and the first phase shifter to generate a timing signal for synchronous detection. I.e. the part of the circuit generates the demodulation signal. The driving circuit includes a second phase shifter and an amplitude adjuster, and outputs a driving signal. The detection circuit is used for amplifying and detecting weak detection signals and mainly comprises a synchronous detector and a filter. The synchronous detector needs a demodulation signal generated from the synchronous signal output circuit for synchronous detection. The demodulation signal is a square wave with the same period and phase as the driving signal or the detection signal.
In the scheme in the prior art, a timing signal with the same frequency and phase as the detection signal is used when the signal of the sensitive electrode is demodulated in the detection circuit, and the signal and the driving signal are also with the same frequency and phase. During demodulation, a driving signal works on the driving electrode, and an electrostatic coupling error caused by a parasitic capacitance between the driving signal and a detection signal front-end input end can change along with the change of the driving signal and the parasitic capacitance, so that the noise and zero-offset stability of the gyroscope are influenced.
Disclosure of Invention
The invention provides a quartz tuning fork gyroscope circuit and a gyroscope, which are used for solving the technical problem of high noise of the gyroscope in the prior art.
The invention provides a quartz tuning fork gyroscope circuit, comprising:
a driving sub-circuit, a detection sub-circuit and a switch sub-circuit;
the switch sub-circuit is respectively connected with the driving sub-circuit and the detection sub-circuit;
the switch sub-circuit is used for generating a control signal for controlling the drive sub-circuit and the detection sub-circuit to work in a time-sharing mode;
the driving sub-circuit and the detection sub-circuit work in a time-sharing mode.
According to the quartz tuning fork gyroscope circuit provided by the invention, the switch sub-circuit is a frequency division sub-circuit.
According to the quartz tuning fork gyroscope circuit provided by the invention, the input signal of the frequency dividing sub-circuit is a driving square wave generated by the driving sub-circuit.
According to the quartz tuning fork gyroscope circuit provided by the invention, the control signal is a switching signal obtained by performing frequency halving on the driving square wave by the frequency dividing sub-circuit.
According to the quartz tuning fork gyroscope circuit provided by the invention, the frequency dividing sub-circuit is a D trigger.
According to the quartz tuning fork gyroscope circuit provided by the invention, the driving sub-circuit comprises a first multiplexer;
and the output end of the switch sub-circuit is connected with the data selection end of the first multiplexer.
According to the quartz tuning fork gyroscope circuit provided by the invention, the detection sub-circuit comprises a second multiplexer;
and the output end of the switch sub-circuit is connected with the data selection end of the second multiplexer.
According to the quartz tuning fork gyroscope circuit provided by the invention, the quartz tuning fork gyroscope circuit further comprises: a peak detection sub-circuit;
the peak detection sub-circuit is connected with the driving sub-circuit;
and the peak value detection sub-circuit is used for controlling the quartz tuning fork to start oscillation.
According to the quartz tuning fork gyroscope circuit provided by the invention, the peak value detection sub-circuit is composed of a peak value detector and a comparator.
The invention also provides a gyroscope which comprises the quartz tuning fork gyroscope circuit.
According to the quartz tuning fork gyroscope circuit and the gyroscope, the driving signal and the detection signal are isolated in time space through the switch sub-circuit, so that the electrostatic coupling of the driving voltage signal to the pickup electrode is eliminated. The pickup of the detection signal is not carried out in the loading period of the driving signal, the driving signal is not loaded in the detection period, the electrostatic coupling between the driving and the detection is thoroughly staggered from the time, and the electrostatic coupling error can be thoroughly eliminated.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a quartz tuning fork gyroscope circuit provided by the present invention;
FIG. 2 is a signal timing diagram of the quartz tuning fork gyroscope circuit provided by the present invention;
FIG. 3 is a schematic diagram of a switch sub-circuit provided by the present invention;
FIG. 4 is a schematic diagram of a time-sharing control circuit of the detection sub-circuit provided in the present invention;
fig. 5 is a schematic structural diagram of a peak detection sub-circuit provided in the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1 is a schematic structural diagram of a quartz tuning fork gyroscope circuit provided by the present invention, and as shown in fig. 1, the quartz tuning fork gyroscope circuit includes three parts, namely a driving sub-circuit, a detecting sub-circuit and a switching sub-circuit. D is a quartz tuning fork driving interdigital and S is a quartz tuning fork sensitive interdigital.
The driving sub circuit is used for generating a driving signal which enables the driving end interdigital to stably vibrate, the driving signal has the characteristic of constant frequency and constant amplitude, and the resonant frequency is consistent with the resonant frequency of the quartz tuning fork driving end interdigital.
An electric signal output by the interdigital electrode at the tuning fork driving end passes through an amplifying circuit and then passes through a comparator and an Automatic Gain Control (AGC) circuit to generate a square wave, the frequency of the square wave is consistent with the resonant frequency of the tuning fork driving interdigital, and the amplitude value of the square wave is controlled by the AGC circuit.
The AGC circuit has the function of automatically adjusting gain, and when an input signal changes in a large range, the amplitude of the output signal is kept stable by controlling the gain of the amplifier.
The square wave is used in the present invention as the driving signal applied to and vibrating the tuning fork driving end finger. The drive signal may also be generated using an external circuit.
The detection sub-circuit is used for collecting and amplifying weak electric signals which are generated at the detection end of the quartz tuning fork and are related to the angular velocity, demodulating the synchronous detection signals, and generating direct-current voltage signals corresponding to the angular velocity through the low-pass filter circuit.
The switch sub-circuit is used for generating control signals for controlling the drive sub-circuit to work in a time-sharing mode and the detection sub-circuit to work in a time-sharing mode, and the drive sub-circuit and the detection sub-circuit work in a time-sharing mode. The control signal is a switching signal obtained by frequency-dividing the driving square wave generated by the driving sub-circuit by a frequency dividing circuit, and the frequency dividing circuit can be realized by a D trigger.
When the circuit works, in order to realize the isolation of applying electric excitation to the driving interdigital and detecting and demodulating the electric signal of the detection interdigital in time, the high level and the low level of the switching signal are respectively adopted to control the driving sub-circuit to apply excitation and the detecting sub-circuit to acquire and demodulate.
When the switching signal is at high level (or low level), the driving square wave signal in the driving sub-circuit is connected with the driving interdigital, the driving interdigital is driven to work normally, and at the moment, the ground in the detection sub-circuit is connected into the demodulation circuit, namely the speed signal is not demodulated.
When the switching signal is at low level (or high level), the ground in the driving sub-circuit is connected to the driving finger, although there is no driving signal, the driving finger still can keep original vibration due to inertia, at this time, the signal of the detection electrode is connected to the subsequent amplifying circuit and demodulating circuit, and the angular velocity voltage signal is obtained after demodulation and low-pass filtering. Since no drive signal is applied by the drive electrodes when the angular velocity signal is demodulated, electrostatic coupling introduced by the drive electrodes is avoided.
The switch sub-circuit is used for generating a control signal for controlling the drive sub-circuit and the detection sub-circuit to work in a time-sharing mode, and the drive sub-circuit and the detection sub-circuit work in a time-sharing mode. The input signal is a driving square wave and generates a halved frequency signal through a frequency divider. And respectively taking the signals after the frequency division by two as switching signals for controlling the driving sub-circuit to work and the detection sub-circuit to work.
FIG. 2 is a signal timing diagram of the quartz tuning fork gyroscope circuit provided by the present invention, wherein when the gyroscope circuit operates, the timing sequence of each signal is as shown in FIG. 2, and the signals in the timing diagram correspond to the signals in the circuit block diagram.
Square wave QD0 is generated by a drive sub-circuit at a frequency consistent with the resonant frequency of the core drive fingers and at an amplitude regulated and stabilized by the AGC circuit. The switching signal switch is obtained by dividing square wave QD0 by two through a frequency divider. The switch signals switch are connected to the multiplexers of the drive sub-circuit and the detection sub-circuit, respectively, as control signals.
In the gyro drive sub-circuit, the switch is connected to the control signal of the multiplexer of the drive sub-circuit, and the input signals are respectively a drive square wave QD0 and a ground signal. In the gyro detection sub-circuit, the switch is connected to a control signal of a multiplexer of the detection sub-circuit, and input signals are a detection signal JC and a ground signal respectively.
When the gyro circuit works, in order to separate the driving and the detection in a time space, the design circuit is in the following working mode:
when the switch is at a high level (or a low level), the multiplexer in the driving sub-circuit outputs a driving square wave QD0, and at this time, the multiplexer in the detection sub-circuit outputs a ground signal, so that the detection signal cannot enter a subsequent demodulation circuit, and thus an error signal carried by the detection signal and obtained by electrostatic coupling of the driving electrode cannot enter the demodulation circuit.
When the switch is at a low level (or a high level), the multiplexer in the driving sub-circuit outputs a ground signal, although no driving square wave is used for powering up and driving the tuning fork driving end at the moment, the driving tuning fork still keeps original vibration due to inertia, the multiplexer at the detection end outputs a detection signal JC, and the detection signal JC enters a subsequent demodulation circuit for demodulation and then is subjected to a low-pass filter circuit to obtain a direct-current voltage signal corresponding to the angular velocity signal.
In order to realize tuning fork oscillation starting, a driving peak value detection sub-circuit is added, when the tuning fork is electrified, the driving sub-circuit is driven in a time-sharing mode, when the driving amplitude is detected to exceed a set value, a control signal is generated, and the driving sub-circuit is driven in a time-sharing mode, so that oscillation starting is guaranteed.
The electrostatic coupling is mainly caused by parasitic capacitance between a driving signal (including an electrode, a lead wire and PCB wiring) and a detection signal preamplifier, and can change along with the change of the driving signal and the parasitic capacitance, so that the noise and zero-bias stability of the gyroscope are influenced. The gyro circuit is used for isolating the electrostatic coupling error in time, so that the electrostatic coupling error is completely eliminated.
Based on the above embodiments, the switch sub-circuit is a frequency division sub-circuit. A frequency divider is added in the circuit, and the signal generated by the frequency divider is used as a control signal for controlling the drive sub-circuit to work in a time-sharing way and controlling the detection sub-circuit to work in a time-sharing way, and the drive sub-circuit and the detection sub-circuit work in a time-sharing way.
The input of the frequency divider is a driving square wave generated by a driving sub-circuit. The output signal is a driving square wave divided by two. The signal after the frequency division by two is used as a driving square wave to apply a driving force and a detection signal to acquire and demodulate a control signal. The effective switch level of the driving square wave for applying the driving force is the high level of the halved frequency signal, and the effective switch level acquired and demodulated by the detection sub-circuit is the low level of the halved frequency signal.
In the driving sub-circuit, the control signal is connected to the electrode of the driving tuning fork through a switch. And the high level of the control signal, the switch gating driving square wave and the tuning fork driving end electrode are connected, and the tuning fork is under the force application action of the driving signal. And at the low level of the signals, the switch gating ground signal is connected with the tuning fork driving end electrode, and the tuning fork is not applied by the force of the driving signal. But under the action of inertia force, the tuning fork at the driving end still keeps the original vibration. The actual driving signal applied to the driving end tuning fork is shown as QD1 in figure 2.
In the detection sub-circuit, the same control signal connects the detection signal JC and the ground signal via a switch. To isolate the drive signal and the sense signal in time, the active level of the sense sub-circuit switch selects the low level of the divide-by-two signal. When the control signal is at high level, the switch is connected to ground signal, and at this time, the detection signal can not enter the subsequent demodulation circuit, and at this time, although the square wave signal in the driving sub-circuit is selected to be applied to the driving tuning fork and acts on the detection signal through electrostatic coupling, because the detection signal can not enter the subsequent demodulation circuit, the angular velocity signal output by the detection sub-circuit does not contain electrostatic coupling error. When the control signal is at a low level, the switch turns on the detection signal JC, and the JC enters the subsequent amplifying circuit and the subsequent demodulating circuit after passing through the switch to obtain a demodulated signal SS as shown in fig. 2, and finally a direct-current voltage signal proportional to the input angular velocity signal is obtained through the low-pass filter circuit.
The switch sub-circuit generates a control signal that can be isolated in time from the drive sub-circuit and the sense sub-circuit. The invention utilizes the drive square wave generated by the drive sub-circuit to generate the drive square wave through the frequency division of a frequency division circuit. The high level and the low level of the halved frequency signal are respectively used as control signals for controlling the driving tuning fork driving and the detection signal demodulation.
In order to further realize the electrostatic coupling introduced by the driving end to the detection signal in time isolation, a control switch is added in each of the driving sub-circuit and the detection sub-circuit on the basis of the generation of the two-frequency division signal, so that time-sharing driving and time-sharing detection are realized.
And a driving peak value detection sub-circuit is added, when the power is just powered on, the driving sub-circuit is not subjected to time division, and when the driving amplitude is detected to exceed a set value, a control signal is generated to drive the sub-circuit to perform time division, so that the oscillation starting is ensured.
Fig. 3 is a schematic structural diagram of the switch sub-circuit provided in the present invention, and as shown in fig. 3, the frequency dividing sub-circuit is a D flip-flop.
The QD0 signal passes through the D flip-flop to obtain a halved frequency signal as a switching signal for time-sharing operation of the driving sub-circuit and the detecting sub-circuit.
In the present invention, the switching signal generated by the switching sub-circuit shown in fig. 3 is used as a time-sharing control signal, and the switch signal is divided by two by QD 0.
Fig. 4 is a schematic structural diagram of the detection sub-circuit time-sharing control circuit provided by the present invention, and as shown in fig. 4, the driving sub-circuit time-sharing control circuit and the detection sub-circuit time-sharing control circuit can be implemented by the two-channel analog switch shown in fig. 4. The operation timing is shown in table 1.
TABLE 1 drive and sense sub-circuit timing of operation
| switch | X channel | Y channel | Driving sub-circuit operating states | Detecting the operating state of a sub-circuit |
| 0 | Ground | JC | Invalidation | Is effective |
| 1 | QD0 | Ground | Is effective | Invalidation |
Fig. 5 is a schematic structural diagram of the peak detection sub-circuit provided in the present invention, and as shown in fig. 5, the position of the peak detection sub-circuit is shown in fig. 2. The peak detection sub-circuit consists of a peak detector and a comparator. When the amplitude of the driving square wave is detected to be not in accordance with the starting amplitude value, the driving square wave is not applied to the driving end tuning fork through the switch time sharing but directly applied to the driving end tuning fork, and when the amplitude is detected to be in accordance with the starting amplitude value, the driving square wave is applied to the driving end tuning fork through the switch time sharing. By processing in this way, the tuning fork can start to vibrate.
The main errors of the quartz tuning fork gyroscope are derived from mechanical coupling errors and electrostatic coupling errors. The unavoidable presence of parasitic capacitances Cp, Cp of around 0.1pF between the drive and sensitive detection electrodes, by which the drive signal is coupled to the detection electrode, a part of the coupling known as electrostatic coupling. The mechanical coupling can be reduced by using a mass trimming technology, the output of the preamplifier is mainly subjected to electrostatic coupling, and the equivalent angular velocity is in the magnitude of 1 degree/s. Ideally, the angular velocity should be 0/s when the gyroscope is at rest.
The driving signal generates temperature drift: in the driving sub-circuit, to maintain the driving vibration displacement (or speed is not changed), the amplitude of the driving signal needs to be adjusted, so the amplitude of the driving signal always changes, the most direct reason for the change of the driving signal is the change of the quality factor of the driving mode, the quality factor can reach 20% or more in the temperature range of-40 ℃ to +80 ℃, and correspondingly the change of the driving signal can reach 20%, so the temperature coefficient of the driving signal is 0.167%/° c, and the temperature coefficient of the electrostatic coupling is 0.167%/° c, which is equivalent to 6 °/h/° c.
If the electrostatic coupling generated by the driving signal is eliminated, the zero drift caused by the introduction of the electrostatic coupling and the zero noise caused by the influence of the temperature are eliminated.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A quartz tuning fork gyroscope circuit, comprising:
a driving sub-circuit, a detection sub-circuit and a switch sub-circuit;
the switch sub-circuit is respectively connected with the driving sub-circuit and the detection sub-circuit;
the switch sub-circuit is used for generating a control signal for controlling the drive sub-circuit and the detection sub-circuit to work in a time-sharing mode;
the driving sub-circuit and the detection sub-circuit work in a time-sharing mode.
2. The quartz tuning fork gyroscope circuit of claim 1, wherein the switching sub-circuit is a frequency-dividing sub-circuit.
3. The quartz tuning fork gyroscope circuit of claim 2, wherein the input signal of the frequency dividing sub-circuit is a driving square wave generated by the driving sub-circuit.
4. The quartz tuning fork gyroscope circuit of claim 3, wherein the control signal is a switching signal obtained by dividing the driving square wave by two by the frequency dividing sub-circuit.
5. The quartz tuning fork gyroscope circuit of claim 2, wherein the frequency divider sub-circuit is a D flip-flop.
6. The quartz tuning fork gyroscope circuit of claim 2, wherein the driver subcircuit comprises a first multiplexer;
and the output end of the switch sub-circuit is connected with the data selection end of the first multiplexer.
7. The quartz tuning fork gyroscope circuit of claim 2, wherein the detection subcircuit comprises a second multiplexer;
and the output end of the switch sub-circuit is connected with the data selection end of the second multiplexer.
8. The quartz tuning fork gyroscope circuit of any of claims 1-7, further comprising: a peak detection sub-circuit;
the peak detection sub-circuit is connected with the driving sub-circuit;
and the peak value detection sub-circuit is used for controlling the quartz tuning fork to start oscillation.
9. The quartz tuning fork gyroscope circuit of claim 8, wherein the peak detection subcircuit is comprised of a peak detector and a comparator.
10. A gyroscope comprising a quartz tuning fork gyroscope circuit as claimed in any one of claims 1 to 9.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008122122A (en) * | 2006-11-09 | 2008-05-29 | Seiko Epson Corp | Detection device, gyro sensor and electronic apparatus |
| CN102650522A (en) * | 2011-02-25 | 2012-08-29 | 精工爱普生株式会社 | Signal processing circuit, physical quantity detecting device, and angular speed detecting device |
| CN103697874A (en) * | 2013-12-27 | 2014-04-02 | 北京遥测技术研究所 | Digital drive loop control circuit for quartz tuning fork gyroscope |
| US20140305206A1 (en) * | 2013-03-22 | 2014-10-16 | Seiko Epson Corporation | Detection device, sensor, electronic apparatus, and moving object |
| CN111964655A (en) * | 2020-07-15 | 2020-11-20 | 北京自动化控制设备研究所 | Digital driving circuit of quartz tuning fork gyroscope |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008122122A (en) * | 2006-11-09 | 2008-05-29 | Seiko Epson Corp | Detection device, gyro sensor and electronic apparatus |
| CN102650522A (en) * | 2011-02-25 | 2012-08-29 | 精工爱普生株式会社 | Signal processing circuit, physical quantity detecting device, and angular speed detecting device |
| US20140305206A1 (en) * | 2013-03-22 | 2014-10-16 | Seiko Epson Corporation | Detection device, sensor, electronic apparatus, and moving object |
| CN103697874A (en) * | 2013-12-27 | 2014-04-02 | 北京遥测技术研究所 | Digital drive loop control circuit for quartz tuning fork gyroscope |
| CN111964655A (en) * | 2020-07-15 | 2020-11-20 | 北京自动化控制设备研究所 | Digital driving circuit of quartz tuning fork gyroscope |
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