CN114593722A - Gyro analog circuit and gyroscope - Google Patents
Gyro analog circuit and gyroscope Download PDFInfo
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- CN114593722A CN114593722A CN202011416210.0A CN202011416210A CN114593722A CN 114593722 A CN114593722 A CN 114593722A CN 202011416210 A CN202011416210 A CN 202011416210A CN 114593722 A CN114593722 A CN 114593722A
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- circuit
- gyro
- driving
- gyroscope
- demodulation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5614—Signal processing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
Abstract
The invention provides a gyro analog circuit and a gyroscope, wherein the gyro analog circuit comprises: a demodulation sub-circuit; the demodulation sub-circuit comprises a differential demodulation circuit and a differential low-pass filter circuit. According to the gyro analog circuit and the gyro provided by the invention, in the demodulation sub-circuit, a differential demodulation differential low-pass filtering method is used for offsetting direct current output generated by the analog switch, so that the precision of the gyro is improved.
Description
Technical Field
The invention relates to the technical field of gyroscopes, in particular to a gyroscope analog circuit and a gyroscope.
Background
A quartz Micro-Electro-Mechanical System (MEMS) gyroscope is widely used due to its outstanding features of light weight, small volume, strong impact resistance, long life, low power consumption, fast response, strong environmental adaptability, and suitability for mass production.
The key sensitive elements of the quartz MEMS inertial gyroscope, namely the driving electrodes (positioned on the driving interdigital) and the detecting electrodes (positioned on the detecting interdigital) on the double-end quartz MEMS tuning fork are used for realizing the excitation of a driving mode and the sensitivity of a detection mode signal. The quartz MEMS gyro circuit generally comprises a driving circuit, a reading/detecting circuit, a demodulating circuit, a filtering amplifying and outputting circuit, an error compensating circuit and the like. The driving circuit applies a constant amplitude alternating voltage signal with the frequency matched with the frequency of the driving mode to the driving electrode of the driving end to excite the gyroscope to generate vibration under the driving mode. The detection circuit detects the weak charge signal generated by the detection end, and performs amplification and phase shift processing, namely detects and generates a corresponding signal; the demodulation circuit converts the angular velocity signal generated by the detection circuit into a direct current signal by using a synchronous demodulation principle.
However, when the analog switch in the conventional gyro analog circuit is used for demodulation, direct current output is generated due to injected charges, which becomes a source of zero error, and thus the precision of the gyro is low.
Disclosure of Invention
The invention provides a gyroscope analog circuit and a gyroscope, which are used for solving the technical problem of low precision of the gyroscope in the prior art.
The invention provides a gyro analog circuit, comprising: a demodulation sub-circuit;
the demodulation sub-circuit comprises a differential demodulation circuit and a differential low-pass filter circuit.
According to the gyro analog circuit provided by the invention, the gyro analog circuit further comprises:
a drive sub-circuit;
the reference voltage of the comparator in the driving sub-circuit is obtained by dividing voltage through a resistor or is directly coupled through a resistor in a direct current mode.
According to the invention, the gyro analog circuit further comprises:
a detection sub-circuit;
the detection sub-circuit comprises an RC filter circuit and a pre-amplifier.
According to the gyro analog circuit provided by the invention, the gyro analog circuit further comprises:
a power supply electronic circuit;
the power supply electronic circuit comprises an RC filter circuit and a voltage stabilizing circuit.
According to the gyro analog circuit provided by the invention, the reference voltage of the comparator in the driving sub-circuit is obtained by dividing the voltage by the two resistors.
According to the gyro analog circuit provided by the invention, the RC filter circuit is additionally arranged between the preamplifier and the power supply of the preamplifier.
According to the gyro analog circuit provided by the invention, the cutoff frequency of the RC filter circuit is 2 KHz.
According to the gyro analog circuit provided by the invention, the driving frequency of the gyro analog circuit is 11 KHz.
The invention also provides a gyroscope which comprises the gyroscope analog circuit.
According to the gyro analog circuit and the gyro provided by the invention, in the demodulation sub-circuit, a differential demodulation differential low-pass filtering method is used for offsetting direct current output generated by the analog switch, so that the precision of the gyro is improved.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of a prior art quartz MEMS gyroscope circuit;
FIG. 2 is a schematic illustration of a power supply circuit provided by the present invention;
FIG. 3 is a schematic diagram of a filter circuit of the operational amplifier power supply of the detection circuit provided by the present invention;
FIG. 4 is a schematic illustration of a comparator reference voltage generation circuit provided by the present invention;
fig. 5 is a schematic illustration of the principle of the demodulation circuit provided by the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The quartz MEMS gyroscope is characterized by comprising the following components: light weight, small volume, strong shock resistance, long service life, low power consumption, fast response, strong environmental adaptability and suitability for mass production. The gyroscope performance influencing comprises component type selection, the excellence of a gyroscope processing circuit, the perfection of an error compensation technology, the precision of a technological processing process and the like, wherein the gyroscope processing circuit with high performance and high precision is the guarantee of improving environmental adaptability, reliability and technical level, and further provides an analog circuit of a quartz MEMS gyroscope.
Fig. 1 is a schematic diagram of a prior art quartz MEMS gyroscope circuit, and as shown in fig. 1, driving electrodes (located in driving fingers) and detecting electrodes (located in detecting fingers) on a double-ended quartz MEMS tuning fork, which are key sensitive elements of a quartz MEMS inertial gyroscope, are used for realizing the excitation of a driving mode and the sensitivity of a detection mode signal. And applying a constant amplitude alternating voltage signal with the frequency matched with the frequency of the driving mode to the driving electrode to excite the gyroscope to generate vibration under the driving mode. Under the action of the Coriolis effect, Coriolis force which is generated when an angular velocity omega is input and is perpendicular to the input angular velocity direction and the vibration direction enables the tuning fork to vibrate in a detection mode, and under the action of the piezoelectric effect, an output signal is generated on a detection electrode. The voltage signal output by the signal after filtering amplification, synchronous demodulation, low-pass filtering amplification and the like is the angular velocity signal. The quartz MEMS gyro circuit generally comprises a driving circuit, a reading/detecting circuit, a demodulating circuit, a filtering amplifying and outputting circuit, an error compensating circuit and the like. The driving circuit applies a constant amplitude alternating voltage signal with the frequency matched with the frequency of the driving mode to the driving electrode of the driving end to excite the gyroscope to generate vibration under the driving mode. The detection circuit detects the weak charge signal generated by the detection end, and performs amplification and phase shift processing, namely detects and generates a corresponding signal; the demodulation circuit converts the angular velocity signal generated by the detection circuit into a direct current signal by using a synchronous demodulation principle. The error compensation is generally realized by a digital signal processing technology, that is, the analog circuit realizes gyro signal output, and then the digital signal processing technology performs error compensation on the output gyro signal.
The zero error of the gyroscope realized by the quartz MEMS gyroscope analog circuit is large, and the zero compensation is carried out on the gyroscope through a digital signal processing technology so as to improve the zero precision. However, the ability of the zero compensation technique is related to the zero of the gyro itself, and can only be increased by a few orders of magnitude on the basis of the zero of the gyro itself. If the zero error before the gyro compensation is large, the zero precision after the compensation is not high.
Factors influencing the inherent zero position accuracy of the gyroscope are many, and the inherent zero position accuracy of the gyroscope before compensation is influenced by the type selection of components such as capacitors, resistors and operational amplifiers, the precision degree of a processing technology, the design of a driving circuit, a reading circuit and the like. And the high-precision and high-performance circuit design is the key influencing the reliability and the technical level of the gyroscope. Because the inherent non-uniformity, the unstable type and the sensitivity to the surrounding environment of the material device can cause noise signals in a driving circuit, a reading circuit and a demodulation circuit, the generated difference frequency and low frequency components can directly influence the accuracy of the inherent zero position of the gyroscope, and further influence the overall level of the output signal of the gyroscope.
The invention aims to improve the zero position precision of a gyroscope by improving the following problems in an analog circuit of a quartz MEMS gyroscope.
1. When one power supply supplies power to a plurality of gyros, the power supply has the frequency components of the driving signals of all the gyros, all the gyros can interfere with each other, and particularly when the driving frequencies are close to each other, the interference can generate low-frequency difference frequency signals.
2. In the detection circuit part, because a gyro circuit power supply has impedance, a driving signal component is arranged on the power supply and is coupled to a preamplifier output through a detection preamplifier to generate a coupling error, so that the coupling error becomes a zero error source.
3. The driving circuit part is powered by a single power supply, a reference voltage is not an ideal voltage source, and a driving signal is coupled to the reference voltage through an RC blocking circuit in front of a comparator in the driving circuit, so that the reference voltage has a driving signal component and is further coupled to the detection circuit to generate coupling output, and the coupling output becomes a zero error source.
4. During demodulation of the analog switch, a direct current output is generated due to injected charges, which becomes a source of zero error.
The gyro analog circuit provided by the invention comprises a quartz tuning fork, a power supply filter circuit, a voltage stabilizing circuit, a driving circuit, a detection circuit, a demodulation circuit, a comparator reference voltage generation circuit, an operational amplifier reference voltage generation circuit and a filtering amplification and output circuit. Tests and tests show that low-frequency and difference-frequency signal sources exist in a power supply circuit, a driving circuit, a detection circuit and a demodulation circuit, the inherent zero-position precision of the gyroscope is influenced, and the gyroscope analog circuit is further perfected from the following aspects, so that the precision of the whole gyroscope is improved.
Firstly, the function of the driving circuit is to provide an electric signal for driving the quartz tuning fork to vibrate, which is a prerequisite for the quartz tuning fork gyroscope to correctly detect the angular velocity. The driving signal enables the quartz tuning fork to do simple harmonic motion on the resonant frequency, and meanwhile, a reference signal is provided for the detection circuit. When testing, in order to improve production efficiency and production capacity, product testing is often performed by performing a power supply test on a plurality of gyros, and it is found that when a unified power supply supplies power to a plurality of gyros (when a plurality of gyros are tested simultaneously or when a plurality of gyros are applied to a system), the power supply has frequency components of driving signals of the respective gyros, which causes mutual interference among the respective gyros, and particularly when the driving frequencies are very close, the mutual interference generates low-frequency difference frequency signals. When the driving tuning fork receives the action of the driving signal, the driving tuning fork can generate simple harmonic motion under the action of the inside due to the inverse piezoelectric effect of the quartz crystal, the amplitude is in direct proportion to the amplitude of the driving signal, the vibration frequency is the same as the frequency of the driving signal, and the vibration component generated by the Coriolis force is ideally only coupled to the detection interdigital along the tuning fork structure by the Coriolis force vibration in the direction perpendicular to the detection interdigital, so that the detection tuning fork also generates the vibration with the vibration frequency and the vibration amplitude which are the same as those of the vibration tuning fork. The respective gyros interfere with each other through the circuit, thereby causing resonance through the above-described process. And the driving signals of all the gyros are arranged on the power supply, so that the power supply is influenced to a certain extent, and the power supply of the device is further influenced.
Fig. 2 is a schematic diagram of the power supply circuit provided by the present invention, and as shown in fig. 2, an RC filter circuit is added in front of the regulated power supply chip. Through the RC filter circuit, the filter effect on frequency signals is realized, and the mutual interference between a power supply and a gyro circuit is prevented.
And secondly, the detection circuit reads out the vibration signal of the tuning fork, and the vibration signal enters the phase-sensitive demodulator after being subjected to phase shift amplification by the preamplifier. However, since the gyro circuit power supply has impedance, a driving signal component is generated on the power supply, and the component is coupled to the output of the preamplifier through the detection preamplifier, so that coupling error is generated, and fluctuation drift of the gyro output is caused. Therefore, RC filtering is added to the power supply of the preamplifier of the detection circuit.
Fig. 3 is a schematic diagram of a filter circuit of an operational amplifier power supply of a detection circuit according to the present invention, and as shown in fig. 3, the filter circuit filters out a driving signal component in a preamplifier thereof by RC filtering to eliminate an error influence caused by a driving signal on the power supply thereof.
And the weak signal method enters a phase-sensitive demodulation circuit, the phase-sensitive demodulation circuit demodulates and amplifies the signal output by the detection circuit by taking the square wave voltage output by the driving circuit as a reference to obtain a direct current voltage related to the input angular rate, wherein the square wave voltage output by the driving circuit generates an amplitude error signal through sampling, detecting and comparing the driving signal, and the process is influenced by the reference voltage. When the single power supply supplies power, the used reference voltage is not an ideal voltage source, and the driving signal is coupled to the reference voltage through an RC blocking circuit in front of a comparison amplifier in the driving circuit, so that the reference voltage has a driving signal component and is coupled to the detection circuit to generate coupling output.
Fig. 4 is a schematic diagram of a comparator reference voltage generation circuit provided by the present invention, and as shown in fig. 4, in order to avoid this problem, a voltage source is not directly used in the driving circuit, but is obtained by dividing voltage by a resistor or directly coupled by a resistor through direct current, so as to eliminate the interference of the driving signal to the reference voltage.
Finally, in quartz tuning fork gyroscope circuits, analog switches are used to build switched demodulation circuits. A demodulation circuit formed by the analog switch responds to a square wave reference signal to control the analog switch, so that the passing and blocking of a signal are controlled, and when the analog switch is demodulated, direct current output is generated due to the injection of charges, and the gyro precision is reduced.
Fig. 5 is a schematic diagram of a demodulation circuit provided by the present invention, and as shown in fig. 5, a differential demodulation and differential low-pass filtering method is adopted in the demodulation circuit to cancel out the dc output generated by the analog switch, thereby improving the accuracy.
According to the invention, the gyro analog circuit is improved through the four aspects, so that the inherent zero position precision of the gyro is improved, and a better inherent precision is provided for the subsequent compensation circuit processing. The integral level of the gyroscope is greatly improved.
The zero-bias stability and zero-bias repeatability of the gyroscope realized by the analog gyroscope circuit can reach within 10 degrees/h.
The circuit comprises a quartz tuning fork, an RC filter circuit, a voltage stabilizing circuit, a driving circuit, a detection circuit, a demodulation circuit, a comparator reference voltage generation circuit, an operational amplifier reference voltage generation circuit and a filtering amplification and output circuit. The key points of the invention are the filter circuit processing before the voltage stabilizing circuit for generating power supply for the gyro circuit, the filter circuit processing of the operational amplifier power supply of the detection circuit, the circuit method for generating the reference voltage of the comparator and the scheme of the demodulation circuit.
Quartz tuning forks are angular velocity sensitive elements in gyro circuits.
The power supply circuit of the gyro circuit comprises an RC filter circuit and a voltage stabilizing circuit, and a stable power supply voltage is generated by the voltage stabilizing circuit after a power supply signal passes through the RC filter circuit. The driving frequency of the gyroscope is about 11KHz, the cut-off frequency of the RC filter circuit is designed to be 2KHz, and the design is mainly used for solving the mutual interference of all the axis gyroscopes in the design of the multi-axis gyroscope. When the power supply of the multi-axis gyroscope comes from the same power supply, tuning fork signals of about 11KHz are generated by each gyroscope, and the tuning fork signals can interfere with each other through a circuit to cause resonance. The power supply of the gyro circuit has impedance which mainly comes from device output impedance and PCB upper line impedance, and the cut-off frequency of the RC filter circuit is designed to be 2KHz, and the design is mainly used for filtering driving signal components in the front power supply. In the driving circuit, the reference voltage of the comparator is obtained by selecting two resistors to be connected in series for voltage division, and the interference of the driving signal to the reference voltage is eliminated. In the demodulation circuit, the direct current output generated by the analog switch is cancelled by using a method of difference decomposition and differential low-pass filtering.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (9)
1. A gyro analog circuit, comprising: a demodulation sub-circuit;
the demodulation sub-circuit comprises a differential demodulation circuit and a differential low-pass filter circuit.
2. The gyro analog circuit of claim 1, further comprising:
a drive sub-circuit;
the reference voltage of the comparator in the driving sub-circuit is obtained by dividing voltage through a resistor or is directly coupled through a resistor in a direct current mode.
3. The gyro analog circuit of claim 1, further comprising:
a detection sub-circuit;
the detection sub-circuit comprises an RC filter circuit and a pre-amplifier.
4. The gyro analog circuit of claim 1, further comprising:
a power supply circuit;
the power supply electronic circuit comprises an RC filter circuit and a voltage stabilizing circuit.
5. The gyro analog circuit according to claim 2, wherein the reference voltage of the comparator in the driving sub-circuit is divided by two resistors.
6. The gyro analog circuit according to claim 3, wherein the RC filter circuit is added between the preamplifier and its power supply.
7. The gyro analog circuit of claim 4, wherein the cutoff frequency of the RC filter circuit is 2 KHz.
8. The gyro analog circuit according to any one of claims 1 to 7, wherein the driving frequency of the gyro analog circuit is 11 KHz.
9. A gyroscope comprising a gyro analog circuit as claimed in any one of claims 1 to 8.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011416210.0A CN114593722A (en) | 2020-12-03 | 2020-12-03 | Gyro analog circuit and gyroscope |
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| CN202011416210.0A CN114593722A (en) | 2020-12-03 | 2020-12-03 | Gyro analog circuit and gyroscope |
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| CN114593722A true CN114593722A (en) | 2022-06-07 |
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| US6311555B1 (en) * | 1999-11-17 | 2001-11-06 | American Gnc Corporation | Angular rate producer with microelectromechanical system technology |
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| JP2008122122A (en) * | 2006-11-09 | 2008-05-29 | Seiko Epson Corp | Detection device, gyro sensor and electronic apparatus |
| US20090064781A1 (en) * | 2007-07-13 | 2009-03-12 | Farrokh Ayazi | Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope |
| US20110115501A1 (en) * | 2008-07-07 | 2011-05-19 | Albert-Ludwigs-Universität Freiburg | Measuring Device with a Micro-Electromechanical Capacitive Sensor |
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| WO2016105287A1 (en) * | 2014-12-26 | 2016-06-30 | Kivanc Azgin | Method for suppresion of g-sensitivity of mems gyroscope |
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2020
- 2020-12-03 CN CN202011416210.0A patent/CN114593722A/en active Pending
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| US6311555B1 (en) * | 1999-11-17 | 2001-11-06 | American Gnc Corporation | Angular rate producer with microelectromechanical system technology |
| CN1936502A (en) * | 2006-09-30 | 2007-03-28 | 北京航空航天大学 | Optical fiber gyro front-set amplification and modification output circuit with signal differential amplification |
| JP2008122122A (en) * | 2006-11-09 | 2008-05-29 | Seiko Epson Corp | Detection device, gyro sensor and electronic apparatus |
| US20090064781A1 (en) * | 2007-07-13 | 2009-03-12 | Farrokh Ayazi | Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope |
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