CN114574942B - Continuous feeding method and feeding device for crucible of single crystal furnace - Google Patents
Continuous feeding method and feeding device for crucible of single crystal furnace Download PDFInfo
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- CN114574942B CN114574942B CN202210146095.2A CN202210146095A CN114574942B CN 114574942 B CN114574942 B CN 114574942B CN 202210146095 A CN202210146095 A CN 202210146095A CN 114574942 B CN114574942 B CN 114574942B
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- single crystal
- crystal furnace
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/002—Continuous growth
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- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a continuous feeding method and a continuous feeding device for a crucible of a single crystal furnace, comprising a frame, wherein the frame comprises the following components: the feed bin is arranged at the upper part of the frame, a feed inlet is arranged above the feed bin, a feed inlet is arranged below the feed bin, and a conical valve is arranged at the feed inlet; the conveying mechanism is arranged at the lower part of the frame and comprises a feeding pipe, a receiving hopper, a vibrator and a sliding rail, wherein the sliding rail is connected with the frame, the vibrator is arranged on the sliding rail, one end of the feeding pipe is connected with the upper part of the vibrator, and the receiving hopper is arranged above one end of the feeding pipe connected with the vibrator. The beneficial effects of the invention are as follows: the continuous feeding device for the crucible of the single crystal furnace can realize feeding operation to the single crystal furnace in a state that the upper furnace cover is not opened, so that the feeding time in the production process is reduced to the greatest extent, and meanwhile, the production continuity of the single crystal furnace is ensured, thereby shortening the preparation period of the whole single crystal furnace and improving the production efficiency.
Description
Technical Field
The invention belongs to the technical field of monocrystalline silicon production equipment, and particularly relates to a continuous crucible feeding method and a continuous crucible feeding device for a monocrystalline furnace.
Background
The single crystal furnace is necessary equipment in the process of converting polycrystalline silicon into single crystal silicon, and the single crystal silicon is used as a key supporting material of modern information society, is one of the most important single crystal materials in the world at present, and is not only a main functional material for developing computers and integrated circuits, but also a main functional material for utilizing solar energy in photovoltaic power generation.
In the process of producing monocrystalline silicon by using a monocrystalline furnace, the Czochralski monocrystalline silicon has the defects of long production flow, complicated process, small crucible, incapability of continuous feeding and the like. Therefore, only one single crystal rod can be pulled per melting of the polysilicon charge of a crucible. Every time a single crystal rod is pulled, the temperature is lowered, the furnace is stopped once, the furnace is disassembled once, a thermal field is cleaned once, a filtering system is used, and the like. Not only wastes manpower and energy, but also seriously affects the production efficiency, has high production cost and is unfavorable for the development of the monocrystalline silicon straight-pulling furnace.
In summary, in order to solve the existing technical problems, the invention designs the continuous feeding method and the continuous feeding device for the crucible of the single crystal furnace, which have simple structures and can feed the crucible without cooling the single crystal furnace.
Disclosure of Invention
The invention aims to solve the prior art, and designs a continuous feeding method and a continuous feeding device for a crucible of a single crystal furnace, which have simple structures and can feed materials without cooling the single crystal furnace.
The aim of the invention can be achieved by the following technical scheme:
a continuous feeding method of a crucible of a single crystal furnace comprises the following steps:
s1, enabling a feed inlet of a feed bin to be in a closed state by a conical valve, opening a bin cover, and adding raw materials into the feed bin;
s2, after the raw materials are added, closing the bin cover;
s3, connecting the discharging connector with the main body of the single crystal furnace, and vacuumizing the single crystal furnace;
s4, the sliding rail enables the vibrator to move towards the discharging connector, the feeding pipe stretches into the single crystal furnace, and the receiving hopper corresponds to the feeding hole;
s5, opening a vibrator and a conical valve to enable raw materials to fall into a receiving hopper from a charging hole and enter a feeding pipe;
s6, detecting the weight of the bin by a weighing sensor, and feeding back the feeding progress;
s7, the raw materials vibrate and advance in the feeding pipe and fall into a crucible in the single crystal furnace from the port of the feeding pipe;
s8, after the feeding mechanism feeds materials and is bent, the conical valve is closed, and the vibrator keeps working;
and S9, when no raw material exists in the feeding pipe, the vibrator is closed, the sliding rail drives the vibrator to retract, and the feeding pipe extends out of the single crystal furnace, so that feeding is completed.
A continuous feeding device of a single crystal furnace crucible based on a continuous feeding method of the single crystal furnace crucible comprises a frame, and comprises:
the feed bin is arranged at the upper part of the frame, a feed inlet is arranged above the feed bin, a feed inlet is arranged below the feed bin, and a conical valve is arranged at the feed inlet;
the conveying mechanism is arranged at the lower part of the frame and comprises a feeding pipe, a receiving hopper, a vibrator and a sliding rail, wherein the sliding rail is connected with the frame, the vibrator is arranged on the sliding rail, one end of the feeding pipe is connected with the upper part of the vibrator, the receiving hopper is arranged above one end of the feeding pipe connected with the vibrator, and the receiving hopper is matched with the feeding port;
the discharging connector is arranged on the side face of the lower portion of the frame, and one end, far away from the receiving hopper, of the feeding pipe penetrates through the discharging connector to extend outwards.
Further, a bin cover is arranged on the feeding hole, a rotary rod is arranged between the bin cover and the bin, a rotary motor is arranged between one end of the rotary rod and the side edge of the bin, and a lifting motor is arranged between the other end of the rotary rod and the bin cover.
Further, the conical valve comprises a driving motor, a lifting screw rod, a connecting plate and a conical plate, wherein the driving motor is arranged on the side face of the storage bin, the driving motor is in transmission connection with the lifting screw rod, one end of the connecting plate is movably connected to the lifting screw rod, the lower portion of the conical plate is connected with the other end of the connecting plate, and the conical plate is matched with the charging hole.
Furthermore, a guide cover is sleeved below the charging port.
Further, a weighing sensor is arranged between the lower part of the storage bin and the frame.
Further, the feeding pipe is a quartz pipe.
Further, a molybdenum pipe is sleeved outside the feeding pipe.
Further, a water cooling flange is arranged between the end part of the molybdenum pipe and the feeding pipe.
Compared with the prior art, the invention has reasonable structural arrangement: 1. the continuous feeding device for the crucible of the single crystal furnace can realize feeding operation to the single crystal furnace in a state that the upper furnace cover is not opened, so that the feeding time in the production process is reduced to the greatest extent, and meanwhile, the production continuity of the single crystal furnace is ensured, thereby shortening the preparation period of the whole single crystal furnace and improving the production efficiency; 2. the feed inlet of feed bin passes through the conical valve control switching, for the continuous feeding device of traditional adoption two-stage vibration structure, simple structure can avoid the equipment trouble because of factors such as vibration failure cause, has reduced the cost simultaneously.
Drawings
FIG. 1 is a schematic flow chart of a continuous feeding method of a crucible of a single crystal furnace;
FIG. 2 is a schematic diagram of the whole structure of the crucible continuous feeding device of the single crystal furnace;
FIG. 3 is a schematic diagram of the continuous feeding device of the crucible of the single crystal furnace.
Detailed Description
The technical scheme of the invention is further described below by combining the embodiments. In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Embodiment one:
a continuous feeding method of a crucible of a single crystal furnace comprises the following steps:
s1, enabling a feed inlet of a feed bin to be in a closed state by a conical valve, opening a bin cover, and adding raw materials into the feed bin;
s2, after the raw materials are added, closing the bin cover;
s3, connecting the discharging connector with the main body of the single crystal furnace, and vacuumizing the single crystal furnace;
s4, the sliding rail enables the vibrator to move towards the discharging connector, the feeding pipe stretches into the single crystal furnace, and the receiving hopper corresponds to the feeding hole;
s5, opening a vibrator and a conical valve to enable raw materials to fall into a receiving hopper from a charging hole and enter a feeding pipe;
s6, detecting the weight of the bin by a weighing sensor, and feeding back the feeding progress;
s7, the raw materials vibrate and advance in the feeding pipe and fall into a crucible in the single crystal furnace from the port of the feeding pipe;
s8, after the feeding mechanism feeds materials and is bent, the conical valve is closed, and the vibrator keeps working;
and S9, when no raw material exists in the feeding pipe, the vibrator is closed, the sliding rail drives the vibrator to retract, and the feeding pipe extends out of the single crystal furnace, so that feeding is completed.
The continuous feeding device for the crucible of the single crystal furnace has the advantages that the continuous feeding device for the crucible of the single crystal furnace can realize feeding operation of the single crystal furnace in a state that an upper furnace cover is not opened, so that the feeding time in the production process is reduced to the greatest extent, meanwhile, the production continuity of the single crystal furnace is ensured, the preparation period of the whole single crystal furnace is shortened, and the production efficiency is improved; the feed inlet of feed bin passes through the conical valve control switching, for the continuous feeding device of traditional adoption two-stage vibration structure, simple structure can avoid the equipment trouble because of factors such as vibration failure cause, has reduced the cost simultaneously.
Embodiment two:
the utility model provides a continuous feeding device of single crystal furnace crucible, includes frame 1, includes:
the feed bin 2 is arranged at the upper part of the frame 1, a feed inlet 21 is arranged above the feed bin 2, a feed inlet 22 is arranged below the feed bin 2, and a conical valve 23 is arranged at the feed inlet 22;
the material conveying mechanism 3 is arranged at the lower part of the frame 1, the material conveying mechanism 3 comprises a material conveying pipe 31, a material receiving hopper 32, a vibrator 33 and a sliding rail 34, the sliding rail 34 is connected with the frame 1, the vibrator 33 is arranged on the sliding rail 34, one end of the material conveying pipe 31 is connected with the upper part of the vibrator 33, the material receiving hopper 32 is arranged above one end of the material conveying pipe 31 connected with the vibrator 33, and the material receiving hopper 32 is matched with the material inlet 22;
the discharging connecting port 4 is arranged on the side surface of the lower part of the frame 1, and one end of the feeding pipe 31, which is far away from the receiving hopper 32, penetrates through the discharging connecting port 4 to extend outwards.
Specifically, when the raw material is replenished into the storage bin 2, the conical valve 23 and the feed inlet 22 are closed, and the raw material is added into the storage bin 2 from the feed inlet 21; when the raw materials are supplemented into the storage bin 2 and the raw materials are not added, the vibrator 33 moves to one end of the sliding rail 34 far away from the discharge connection port 4, so that the feeding pipe 31 is retracted into the discharge connection port 4, and the feeding pipe is prevented from being damaged due to high temperature in the single crystal furnace for a long time; when feeding, the sliding rail 34 drives the vibrator 33 to move to one end close to the discharge connection port 4, the discharge connection port 4 is connected with the single crystal furnace through a corrugated pipe, the feeding pipe 31 extends into the single crystal furnace from the discharge connection port 4, the port of the feeding pipe 31 is positioned above the crucible, the conical valve 23 is opened with the feeding port 22, raw materials in the storage bin 2 leak downwards from the feeding port 22 to the receiving hopper 32, enter the feeding pipe 31 from the receiving hopper 32, the vibrator 33 works, the raw materials in the feeding pipe 31 vibrate and advance, and finally fall into the crucible from the port of the feeding pipe 31 to finish feeding; in the charging process, the single crystal furnace does not need to stop and disassemble the furnace, so that continuous charging of single crystal silicon production is realized, compared with the existing charging mode and equipment, the charging time is greatly shortened, the production efficiency is improved, meanwhile, the silicon material can be ensured to normally and quickly enter the single crystal furnace, the whole equipment does not need to move, and only the feeding mechanism needs to be moved, so that the single crystal silicon production device is safer in use and production process; the discharge connection port 4 is connected with the single crystal furnace by adopting a small-section corrugated pipe, so that the feeding pipe 31 can extend into the single crystal furnace, and the problem that equipment is unstable due to the fact that the corrugated pipe is contracted when the long-section corrugated pipe is vacuumized in actual use is avoided.
Embodiment III:
the third embodiment differs from the first embodiment in that the feeding port 21 is provided with a bin cover 211, a rotating rod 212 is arranged between the bin cover 211 and the bin 2, a rotating motor 213 is arranged between one end of the rotating rod 212 and the side edge of the bin 2, and a lifting motor 214 is arranged between the other end of the rotating rod 212 and the bin cover 211.
Specifically, when raw materials are added into the bin 2, the lifting motor 214 drives the bin cover 211 to lift upwards and separate from the feed inlet 21, and the rotating motor 213 drives the rotating rod 212, so that the bin cover 211 rotates away from the position above the feed inlet 21, and feeding is facilitated.
Embodiment four:
the fourth embodiment differs from the first embodiment in that the conical valve 23 includes a driving motor 231, a lifting screw 232, a connection plate 233, and a conical plate 234, where the driving motor 231 is disposed on the side of the bin 2, the driving motor 231 is in transmission connection with the lifting screw 232, one end of the connection plate 233 is movably connected to the lifting screw 232, the lower part of the conical plate 234 is connected to the other end of the connection plate 233, and the conical plate 234 is matched with the charging hole 22.
Specifically, when the material is not fed, the driving motor 231 drives the lifting screw rod 232 to drive the connecting plate 233 and the conical plate 234 to be in a high position, and the conical surface of the conical plate 234 blocks the feed inlet 22, so that the raw material is kept in the storage bin 2; when feeding, the driving motor 231 drives the lifting screw rod 232 to rotate, so that the connecting plate 233 drives the conical plate 234 to leave the feeding hole 22 downwards, and raw materials can leak downwards from the feeding hole 22; when the raw materials leak, the tip and the conical surface of the conical plate 234 cooperate with the lifting screw rod 232 to drive the lifting screw rod 232 to move up and down, so that the flow guiding function can be realized, the raw materials are prevented from being blocked at the discharge hole 22, and the problem of material clamping is effectively solved.
Fifth embodiment:
the fifth embodiment differs from the first embodiment in that a guide cover 24 is sleeved below the feed inlet 22.
Specifically, the air guide sleeve 24 can guide the raw materials leaked from the charging port 22 to the receiving hopper 32 in a concentrated manner, so that the raw materials are prevented from leaking and being wasted.
Example six:
the difference between the sixth embodiment and the first embodiment is that a weighing sensor 25 is disposed between the lower portion of the bin 2 and the frame 1.
Specifically, the load cell 25 can detect the weight of the raw material stored in the bin 2, and calculate the amount of the raw material to be fed by the change in weight during the feeding.
Embodiment seven:
embodiment seven differs from embodiment one in that the feed tube 31 is a quartz tube.
The molybdenum tube 35 is sleeved outside the feeding tube 31.
A water cooling flange 36 is arranged between the end of the molybdenum tube 35 and the feeding tube 31.
Specifically, the quartz tube is adopted as the feeding tube 31, so that the silicon material can be prevented from being polluted, the quartz material is high-temperature resistant, and the quartz material can enter the high-temperature furnace body for a period of time and cannot be softened and deformed; the molybdenum pipe 35 is sleeved outside the feed pipe 31, so that the feed pipe 31 can be completely taken out in case of softening deformation of the feed pipe 31; the water cooling flange 36 can inject cooling water between the feed pipe 31 and the molybdenum pipe 35 to cool the molybdenum pipe 35 mainly contacting high temperature.
The preferred embodiments of the present invention are described herein, but the scope of the present invention is not limited thereto. Modifications, additions, or substitutions of the described embodiments by those skilled in the art are intended to be within the scope of the present invention.
Claims (7)
1. The continuous feeding method for the crucible of the single crystal furnace is characterized by comprising the following steps of: s1, enabling a feed inlet of a feed bin to be in a closed state by a conical valve, opening a bin cover, and adding raw materials into the feed bin;
s2, after the raw materials are added, closing the bin cover;
s3, connecting the discharging connector with the main body of the single crystal furnace, and vacuumizing the single crystal furnace;
s4, the sliding rail enables the vibrator to move towards the discharging connector, the feeding pipe stretches into the single crystal furnace, and the receiving hopper corresponds to the feeding hole;
s5, opening a vibrator and a conical valve to enable raw materials to fall into a receiving hopper from a charging hole and enter a feeding pipe;
s6, detecting the weight of the bin by a weighing sensor, and feeding back the feeding progress;
s7, the raw materials vibrate and advance in the feeding pipe and fall into a crucible in the single crystal furnace from the port of the feeding pipe;
s8, after the feeding of the material conveying mechanism is completed, the conical valve is closed, and the vibrator keeps working;
s9, when no raw material exists in the feeding pipe, the vibrator is closed, the sliding rail drives the vibrator to retract, and the feeding pipe extends out of the single crystal furnace to finish feeding;
the continuous feeding device of the crucible of the single crystal furnace comprises a frame and a bin, wherein the bin is arranged on the upper part of the frame, a feeding hole is formed in the upper part of the bin, a feeding hole is formed in the lower part of the bin, and a conical valve is arranged at the feeding hole;
the conveying mechanism is arranged at the lower part of the frame and comprises a feeding pipe, a receiving hopper, a vibrator and a sliding rail, wherein the sliding rail is connected with the frame, the vibrator is arranged on the sliding rail, one end of the feeding pipe is connected with the upper part of the vibrator, the receiving hopper is arranged above one end of the feeding pipe connected with the vibrator, and the receiving hopper is matched with the feeding port;
the discharging connector is arranged on the side surface of the lower part of the frame, and one end of the feeding pipe, which is far away from the receiving hopper, penetrates through the discharging connector to extend outwards;
the conical valve comprises a driving motor, a lifting screw rod, a connecting plate and a conical plate, wherein the driving motor is arranged on the side face of the storage bin, the driving motor is in transmission connection with the lifting screw rod, one end of the connecting plate is movably connected to the lifting screw rod, the lower portion of the conical plate is connected with the other end of the connecting plate, and the conical plate is matched with the charging hole.
2. The continuous feeding method for the crucible of the single crystal furnace according to claim 1, wherein the feeding hole is provided with a bin cover, a rotary rod is arranged between the bin cover and the bin, a rotary motor is arranged between one end of the rotary rod and the side edge of the bin, and a lifting motor is arranged between the other end of the rotary rod and the bin cover.
3. The continuous feeding method for a crucible of a single crystal furnace according to claim 1, wherein a guide cover is sleeved below the feeding port.
4. The continuous feeding method for a crucible of a single crystal furnace according to claim 1, wherein a weighing sensor is arranged between the lower part of the bin and the frame.
5. The continuous feeding method for a crucible of a single crystal furnace according to claim 1, wherein the feeding pipe is a quartz pipe.
6. The continuous feeding method for a crucible of a single crystal furnace according to claim 1, wherein a molybdenum tube is sleeved outside the feeding tube.
7. The continuous feeding method for a crucible of a single crystal furnace according to claim 6, wherein a water cooling flange is arranged between the end of the molybdenum tube and the feeding tube.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210146095.2A CN114574942B (en) | 2022-02-17 | 2022-02-17 | Continuous feeding method and feeding device for crucible of single crystal furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210146095.2A CN114574942B (en) | 2022-02-17 | 2022-02-17 | Continuous feeding method and feeding device for crucible of single crystal furnace |
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| Publication Number | Publication Date |
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| CN114574942A CN114574942A (en) | 2022-06-03 |
| CN114574942B true CN114574942B (en) | 2023-09-12 |
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| CN202210146095.2A Active CN114574942B (en) | 2022-02-17 | 2022-02-17 | Continuous feeding method and feeding device for crucible of single crystal furnace |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN208201168U (en) * | 2017-12-29 | 2018-12-07 | 嘉兴耐进新材料有限公司 | Single crystal growing furnace continuous feeding |
| CN109306513A (en) * | 2017-07-27 | 2019-02-05 | 隆基绿能科技股份有限公司 | Material delivery system and crystal growth system |
| CN113337884A (en) * | 2020-03-03 | 2021-09-03 | 隆基绿能科技股份有限公司 | Single crystal furnace charging system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8652257B2 (en) * | 2010-02-22 | 2014-02-18 | Lev George Eidelman | Controlled gravity feeding czochralski apparatus with on the way melting raw material |
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2022
- 2022-02-17 CN CN202210146095.2A patent/CN114574942B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109306513A (en) * | 2017-07-27 | 2019-02-05 | 隆基绿能科技股份有限公司 | Material delivery system and crystal growth system |
| CN208201168U (en) * | 2017-12-29 | 2018-12-07 | 嘉兴耐进新材料有限公司 | Single crystal growing furnace continuous feeding |
| CN113337884A (en) * | 2020-03-03 | 2021-09-03 | 隆基绿能科技股份有限公司 | Single crystal furnace charging system |
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