CN114572670A - Charging tray positioning jig, material carrying module and dicing saw - Google Patents
Charging tray positioning jig, material carrying module and dicing saw Download PDFInfo
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- CN114572670A CN114572670A CN202210488963.5A CN202210488963A CN114572670A CN 114572670 A CN114572670 A CN 114572670A CN 202210488963 A CN202210488963 A CN 202210488963A CN 114572670 A CN114572670 A CN 114572670A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The embodiment of the application provides a charging tray positioning jig, material delivery module and scribing machine relates to semiconductor processing technology field, and wherein charging tray positioning jig includes: a load floor; the fixed positioning block comprises a first fixed positioning block and a second fixed positioning block which are fixedly arranged on the bearing surface of the bearing bottom plate; the movable positioning mechanism comprises a movable positioning block positioned on the bearing surface and a first linear driving mechanism arranged on the back surface of the bearing bottom plate, wherein the movable positioning block is provided with a first positioning surface and a second positioning surface which are perpendicular to each other, a placing section for placing the material tray is defined by the first fixed positioning block, the second fixed positioning block and the movable positioning block, and the first linear driving mechanism is used for driving the movable positioning block to do linear reciprocating motion so as to push the material tray placed in the placing section to be in contact positioning with the first fixed positioning block and the second fixed positioning block. The problem of movement asynchronism in two orientation in the prior art has been avoided to this scheme, has improved the positioning accuracy to the charging tray.
Description
Technical Field
The application relates to the technical field of semiconductor processing, particularly, this application relates to a charging tray positioning jig, material delivery module and scribing machine.
Background
The processed materials in the dicing saw need to be loaded into the rectangular material tray of the material carrying module through the material loading module, then the materials are conveyed to the preset position through the material carrying module, and the materials are taken out from the material tray and loaded into the corresponding placing box of the processed materials through the other material loading module. Similarly, the material to be processed also needs to be loaded into the tray through the material carrying module and then transported to the processing position, and then the material is taken out from the tray through the material loading module and placed at the processing position for processing. Wherein, for the convenience of the material loading module accurately loads the material (the material to be processed or the processed material) to the tray and accurately takes out the processed material from the tray, the tray needs to be positioned by the tray positioning jig in the material carrying module after the tray is placed in the material carrying module.
The existing charging tray positioning jig comprises two fixed positioning blocks which are arranged in a mutually perpendicular mode and two movable positioning blocks which are arranged in a mutually perpendicular mode, when the charging tray is positioned, the movable positioning blocks are driven by two different cylinders respectively, the charging tray is pushed to be tightly abutted to the corresponding fixed positioning blocks, and therefore the charging tray is positioned. However, because the two movable positioning blocks are driven by different cylinders, two cylinders are required to be respectively arranged on the back surface of the bearing plate along the X direction and the Y direction for driving, the arrangement of the two cylinders is not only high in cost, but also large in occupied space on the back surface of the bearing plate, which is not beneficial to the layout of other components on the bearing plate, and when the material tray is placed in the material tray positioning jig, the material tray can be placed by being attached to two mutually vertical fixed positioning blocks, namely, the distance between the material tray and the two fixed positioning blocks is small, and because the two different cylinders cannot ensure complete synchronization, one movable positioning block in the two movable positioning blocks can abut one side of the material tray to the corresponding fixed positioning block before the other movable positioning block, and under the condition that one side is abutted, the other movable positioning block cannot abut the other side of the material tray to the corresponding fixed positioning block, the material loading module can not accurately load or take out materials from the material tray, the production rhythm of the dicing saw is disturbed, and even serious accidents such as material damage are caused.
Disclosure of Invention
The purpose of this application is to solve at least one of the above technical defects, and the technical solution provided by this application embodiment is as follows:
first aspect, this application embodiment provides a charging tray positioning jig, includes:
a load floor;
the fixed positioning block comprises a first fixed positioning block and a second fixed positioning block which are fixedly arranged on the bearing surface of the bearing bottom plate, and a first right angle is formed between the length extending direction of the first fixed positioning block and the length extending direction of the second fixed positioning block;
the movable positioning mechanism comprises a movable positioning block positioned on the bearing surface, a first linear driving mechanism arranged on the back surface of the bearing bottom plate, and a connecting mechanism for connecting the movable positioning block and the first linear driving mechanism;
the movable positioning block is provided with a first positioning surface and a second positioning surface which are perpendicular to each other, an included angle formed between the first positioning surface and the second positioning surface is a second right angle, the second right angle is arranged opposite to the first right angle, a placing section for placing the material tray is defined among the first fixed positioning block, the second fixed positioning block and the movable positioning block, the connecting position of the connecting mechanism and the movable positioning block is adjustable, and when the movable positioning block is at an initial position, the length difference between the length of the placing section and the length of the material tray is equal to the width difference between the width of the placing section and the width of the material tray by adjusting the connecting position of the connecting mechanism and the movable positioning block;
the first linear driving mechanism is used for driving the movable positioning block to do linear reciprocating motion along a path in the angular bisector direction of the second right angle so as to push the material tray placed in the placing section to be in contact positioning with the first fixed positioning block and the second fixed positioning block.
In an optional embodiment of the present application, the first linear driving mechanism is a first air cylinder or a first hydraulic cylinder or a first electric cylinder, the connecting mechanism is a T-shaped connecting piece, the movable positioning block is further provided with a connecting surface, the connecting surface forms a 45-degree included angle with the first positioning surface and the second positioning surface respectively, a transverse plate of the T-shaped connecting piece is connected with the connecting surface, and a vertical plate of the T-shaped connecting piece is connected with a piston rod of the first air cylinder or the first hydraulic cylinder or the first electric cylinder.
In an optional embodiment of the application, the connecting surface is connected with the T-shaped connecting sheet through two first waist holes, and the length direction of the first waist holes extends along the length direction of a transverse plate of the T-shaped connecting sheet;
and/or
The first air cylinder is connected with the back surface of the bearing bottom plate through at least two second waist holes, and the length direction of the second waist holes is perpendicular to the connecting surface.
In an optional embodiment of the application, the charging tray positioning jig further comprises at least one movable limiting block which is arranged on the bearing surface of the bearing bottom plate and is opposite to and parallel to the first fixed positioning block or the second fixed positioning block, a placing interval is defined among the first fixed positioning block, the second fixed positioning block, the movable limiting block and the movable positioning block, and the movable limiting block is used for adjusting the relative distance between the movable limiting block and the first fixed positioning block or the second fixed positioning block.
In an optional embodiment of the present application, the movable limiting block is connected to the bearing surface of the bearing bottom plate through a third waist hole, and a length extending direction of the third waist hole is perpendicular to the first fixed positioning block or the second fixed positioning block.
In an optional embodiment of the present application, the tray positioning fixture further includes a tray bidirectional clamping mechanism, the tray bidirectional clamping mechanism includes a pair of clamping jaws that linearly extend or retract toward two opposite sides of the load-bearing bottom plate, respectively, and a clamping jaw driving mechanism disposed on the back of the load-bearing bottom plate for driving the respective clamping jaws to linearly retract so as to fix the positioned tray on the load-bearing bottom plate.
In an alternative embodiment of the present application, two opposite side edges of the load-bearing bottom plate are respectively provided with a groove, and the clamping claws are located in the grooves;
and/or
The clamping claw driving mechanism comprises a plurality of second air cylinders or second hydraulic cylinders or second electric cylinders which are arranged on the back surface of the bearing bottom plate, the clamping claws are arranged on a connecting plate side by side, and piston rods of the second air cylinders or the second hydraulic cylinders or the second electric cylinders are connected with the connecting plate;
the first air cylinder or the first hydraulic cylinder or the first electric cylinder is provided with an in-place sensor, the in-place sensor is used for sending a clamping instruction to the clamping claw driving mechanism when detecting that a piston rod of the first air cylinder or the first hydraulic cylinder or the first electric cylinder extends out to a preset length, and the preset length is the length of the first air cylinder or the first hydraulic cylinder or the first electric cylinder pushing the movable positioning block to position the material tray in place.
In an optional embodiment of the present application, the second air cylinder, the second hydraulic cylinder, or the second electric cylinder is connected to the back surface of the load-bearing bottom plate through at least two fourth waist holes, and the length direction of the fourth waist holes is perpendicular to the two opposite side edges of the load-bearing bottom plate.
In an optional embodiment of the application, the tray positioning fixture further includes a tray detection sensor, which is used for sending a positioning signal to the controller after detecting that the tray is placed on the carrying surface of the carrying bottom plate, and the controller controls the first linear driving mechanism to drive the movable positioning block to push and position after receiving the positioning signal.
In a second aspect, an embodiment of the present application provides a material carrying module, including two tray positioning jigs provided in any one of the first aspects, two lifting mechanisms, and two carrying guide rails arranged in parallel;
the lifting mechanism comprises a base frame connected to the corresponding carrying guide rail, a lifting support capable of lifting up and down along the base frame, and a lifting driving structure for driving the lifting support to lift up and down; the lifting support comprises a vertical part and a transverse part, the vertical part and the base frame can be connected in a vertical and vertical mode, the transverse part is fixedly connected with the back face of the bearing bottom plate of the corresponding material tray positioning jig, the transverse parts of the two lifting mechanisms are located on the same conveying path, the conveying path sequentially comprises a waiting position, a processing position and a material taking position, and when the material tray positioning jig is conveyed to the material taking position from the waiting position through the processing position, the lifting mechanisms corresponding to the material tray positioning jig convey the material tray positioning jig according to a first height under the control of the controller; when the material tray positioning jig is conveyed to the waiting position from the material taking position through the processing position, the lifting mechanism corresponding to the material tray positioning jig conveys the material tray positioning jig according to the second height under the control of the controller.
In an alternative embodiment of the present application, the first height is greater than the second height.
In a third aspect, an embodiment of the present application provides a dicing saw, including the tray positioning jig provided in any one of the embodiments of the first aspect, or including the material carrying module provided in any one of the embodiments of the second aspect.
The beneficial effect that technical scheme that this application provided brought is:
adopt the first linear drive mechanism of an oblique push to have the right-angled movable positioning piece of second if the cylinder drive, promote the location of charging tray on the loading board from the one corner of charging tray, the charging tray positioning jig of structure only need set up a cylinder like this, the structure is simpler, the cost is lower, and a cylinder only sets up the back one angle department at the loading board, the occupation to loading board back space has been reduced, can let out the installation space at the back of loading board, can not take place to interfere with the installation of other parts, like the two-way clamping mechanism of charging tray, more do benefit to the installation of other parts and arrange.
More importantly, because the charging tray is when placing charging tray positioning jig, through the hookup location between adjustment coupling mechanism and the movable positioning piece, make the length of charging tray and the length difference of placing interval length, equal to the width of charging tray and the width difference of placing interval width, adopt first linear drive mechanism to remove at the route drive movable positioning block of the angular bisector direction of second right angle, make two locating surfaces on the movable positioning piece promote the charging tray in two locating directions are synchronous, and then make two adjacent sides that the charging tray is located first straight angle department support tightly with the fixed positioning piece that corresponds simultaneously, the problem of motion asynchronization in two locating directions among the prior art has been avoided, the positioning accuracy to the charging tray has been improved. Further, in the material delivery module, two charging tray positioning jig adopt different heights under the different direction of motion at the operation in-process, can realize two charging tray positioning jig's interactive transport, have improved the carrying efficiency of whole material delivery module. To sum up, through setting up above-mentioned charging tray positioning jig and material handling module, improved the efficiency and the accuracy of wafer cutter's processing.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings used in the description of the embodiments of the present application will be briefly described below.
Fig. 1a is a top view of a tray positioning fixture according to an embodiment of the present disclosure;
fig. 1b is a bottom view of a tray positioning fixture according to an embodiment of the present disclosure;
fig. 1c is a top view of a supporting base plate in a tray positioning fixture according to an embodiment of the disclosure;
fig. 2a is a schematic structural diagram of a view angle of a movable positioning mechanism in a tray positioning fixture according to an embodiment of the present disclosure;
fig. 2b is a schematic structural diagram of another view angle of the movable positioning mechanism in the tray positioning fixture according to the embodiment of the present application;
fig. 3 is a schematic structural view of a bidirectional clamping mechanism of a tray in a tray positioning fixture according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of a material carrying module according to an embodiment of the present disclosure;
fig. 5a is a schematic structural diagram of a lifting mechanism in a material carrying module according to an embodiment of the present disclosure in a jacking state;
fig. 5b is a schematic structural diagram of a lifting mechanism in a material carrying module according to an embodiment of the present disclosure in an un-lifted state;
FIG. 6 is a schematic view of a dicing saw according to an embodiment of the present application;
reference numerals are as follows: 1-a load floor; 2-fixing a positioning block; 3-a movable positioning mechanism; 4-material tray; 5-a movable limiting block; 6-a material tray bidirectional clamping mechanism; 7-tray detection sensor; 8-a material tray positioning jig; 9-a lifting mechanism; 10-a carrier rail; 11-a material carrying module; 21-a first fixed positioning block; 22-a second fixed positioning block; 31-a movable positioning block; 32-a first linear drive mechanism; 33-a connection mechanism; 51-third waist hole; 61-a clamping jaw; 62-a clamping jaw drive mechanism; 63-connecting plate; 91-base frame; 92-a liftable support; 93-a lifting drive structure; 311-a first positioning surface; 312-a second locating surface; 313-attachment face; 321-a second waist hole; 331-first waist hole; 621-fourth waist hole; 921-vertical section; 922-transverse portion.
Detailed Description
The technical solutions in the embodiments of the present invention will be described below with reference to the drawings in the embodiments of the present invention.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships that the present product is conventionally placed in use, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In order to solve the above problems, embodiments of the present invention provide a tray positioning jig, a material carrying module, and a dicing saw. The following describes the technical solution of the present invention and how to solve the above technical problems with specific examples. The following several specific embodiments may be combined with each other, and details of the same or similar concepts or processes may not be repeated in some embodiments. Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The embodiment of the application provides a charging tray positioning jig, as shown in fig. 1a, fig. 1b, fig. 1c, this charging tray positioning jig can include: the bearing device comprises a bearing bottom plate 1, a fixed positioning block 2 and a movable positioning mechanism 3. Wherein:
the fixed positioning block 2 comprises a first fixed positioning block 21 and a second fixed positioning block 22 which are fixedly arranged on the bearing surface of the bearing bottom plate 1, and a first right angle is formed between the length extending direction of the first fixed positioning block 21 and the length extending direction of the second fixed positioning block 22.
The first fixed positioning block 21 may comprise multiple segments, as shown in fig. 1a, which are divided into two segments, so as to arrange other mechanisms of the tray positioning jig in the gap therebetween. Similarly, the second fixed positioning block 22 may also comprise multiple segments, as shown in fig. 1a, wherein it is divided into two segments to arrange other mechanisms of the tray positioning jig in the gap therebetween. The first fixed positioning block 21 and the second fixed positioning block 22 are arranged at a right angle in the longitudinal extension direction, i.e. form a first right angle.
It should be noted that, as shown in fig. 1a, the tray 4 is rectangular, and it is only necessary to position the positions of two adjacent edges of the tray to position the tray, so that two adjacent right-angle edges of the tray 4 can be abutted against two fixed right-angle edges. In the embodiment of the present application, the right angle of fixation used for positioning the tray 4 is the first right angle formed between the longitudinal extension directions of the first and second fixed positioning blocks 21 and 22.
As shown in fig. 2a and fig. 2b, the movable positioning mechanism 3 includes a movable positioning block 31 on the carrying surface, a first linear driving mechanism 32 disposed on the back surface of the carrying base plate 1, and a connecting mechanism 33 connecting the movable positioning block 31 and the first linear driving mechanism 32.
The movable positioning block 31 is provided with a first positioning surface 311 and a second positioning surface 312 which are perpendicular to each other, an included angle formed between the first positioning surface 311 and the second positioning surface 312 is a second right angle, the second right angle and the first right angle are oppositely arranged, a placing section for placing the material tray 4 is defined by the first fixed positioning block 21, the second fixed positioning block 22 and the movable positioning block 31, the connecting position of the connecting mechanism 33 and the movable positioning block 31 is adjustable, and by adjusting the connecting position of the connecting mechanism 33 and the movable positioning block 31, when the movable positioning block 31 is at an initial position, the length difference between the length of the placing section and the length of the material tray 4 is equal to the width difference between the width of the placing section and the width of the material tray 4.
The first linear driving mechanism 32 is configured to drive the movable positioning block 31 to perform a linear reciprocating motion along a path in the angular bisector direction of the second right angle, so as to push the tray 4 placed in the placement section to be in contact with the first fixed positioning block 21 and the second fixed positioning block 22 for positioning.
The first positioning surface 311 is parallel to and spaced apart from the length extending direction of the first fixed positioning block 21, and the second positioning surface 312 is parallel to and spaced apart from the length extending direction of the second fixed positioning block 22. Then, the first positioning surface 311, the second positioning surface 312, the first fixed positioning block 21 and the second fixed positioning block 22 enclose a tray placement area.
The movable positioning block 31 can move parallel to the bearing surface under the driving of the first linear driving mechanism 32, and linearly reciprocate along a path in the angular bisector direction of the second right angle. Specifically, the linear reciprocating movement of the movable positioning block 31 includes moving from its initial position to its final position, and then moving from the final position to its initial position. The initial position is the position of the movable positioning block 31 when the positioning is started, and the final position is the position of the movable positioning block 31 when the positioning is completed. It will be understood that when the movable positioning block 31 is in the initial position, the length and width of the corresponding placement section are the largest and larger than the length and width of the corresponding tray 4, and when the movable positioning block 31 is in the end position, the length and width of the corresponding placement section are the smallest and equal to the length and width of the corresponding tray 4.
Specifically, in order to ensure that the rectangular tray 4 can be pushed to contact with the first fixed positioning block 21 and the second fixed positioning block 22 for positioning through the movable positioning block 31, it is necessary to ensure that the length direction and the width direction of the rectangular tray 4 simultaneously abut against the corresponding fixed positioning blocks, otherwise, if one of the length direction and the width direction of the tray 4 abuts against the corresponding fixed positioning block first, the movable positioning block 31 cannot continue to move forward in the first abutting direction, and the movable positioning block 31 cannot continue to move forward in the other direction, so that the other direction cannot abut against the corresponding fixed positioning block and the tray 4 cannot complete positioning. In order to avoid the situation that the positioning cannot be performed, in the embodiment of the present application, the movable positioning block 31 is driven by the first linear driving mechanism 32 to perform linear reciprocating motion along the bisector direction of the second right angle, that is, the included angle between the motion direction and the first positioning surface 311 and the second positioning surface 312 of the movable positioning block 31 is 45 degrees, so that the distance of the movement of the movable positioning block 31 in the length direction and the distance of the movement of the tray 4 in the width direction are equal in the linear motion process. Furthermore, as long as the length difference between the length of the tray 4 and the length of the placing section is equal to the width difference between the width of the tray 4 and the width of the placing section, it can be ensured that the tray 4 is synchronously pushed to the corresponding fixed positioning block by the movable positioning block 31 in the length direction and the width direction. Therefore, before the tray 4 is positioned, the connecting position between the connecting mechanism 33 in the movable positioning mechanism 3 and the movable positioning block 31 needs to be adjusted, so that when the movable positioning block 31 is at the initial position, the length of the placement section is longer than the length of the tray 4 by a preset size, and the width of the placement section is wider than the width of the tray 4 by a preset size. The preset size can be set according to actual requirements.
The utility model provides a scheme, because the charging tray is when placing charging tray positioning jig, through the hookup location between adjustment coupling mechanism and the movable positioning piece, make the length of charging tray and the length of placing interval length poor, the width that equals the width of charging tray and place interval width is poor, adopt first linear drive mechanism to remove at the route drive movable positioning block of the angular bisector direction of second right angle, two locating surfaces on the messenger movable positioning piece promote the charging tray in two locating directions are synchronous, and then make two adjacent edges that the charging tray is located first straight angle department support tightly with the fixed positioning piece that corresponds simultaneously, the problem of motion asynchronization in two locating directions among the prior art has been avoided, the positioning accuracy to the charging tray has been improved.
In an alternative embodiment of the present application, as shown in fig. 2a and 2b, the first linear driving mechanism 32 is a first air cylinder, a first hydraulic cylinder, or a first electric cylinder, the connecting mechanism 33 is a T-shaped connecting piece, the movable positioning block 31 is further provided with a connecting surface 313, the connecting surface 313 forms an included angle of 45 degrees with the first positioning surface 311 and the second positioning surface 312 respectively, a transverse plate of the T-shaped connecting piece is connected with the connecting surface 313, and a vertical plate of the T-shaped connecting piece is connected with a piston rod of the first air cylinder, the first hydraulic cylinder, or the first electric cylinder.
The first linear driving mechanism 32 may be a first cylinder or a first hydraulic cylinder or a first electric cylinder with a piston rod, and the extension and retraction of the piston rod drives the movable positioning block 31 to reciprocate, and the movable positioning block 31 reciprocates along the angular bisector direction of the second right angle.
Specifically, the main body of the first linear driving mechanism 32 is fixed on the back of the bearing bottom plate 1, and then the piston rod thereof is connected with the movable positioning block 31 through the T-shaped connecting piece, so as to drive the movable positioning block 31 to move when the piston rod extends and contracts. Particularly, the transverse plate of the T-shaped connecting piece is fixedly connected with the connecting surface 313 of the movable positioning block 31, the vertical plate of the T-shaped connecting piece is connected with the piston rod, and meanwhile, two positioning surfaces of the movable positioning block 31 form an angle of 45 degrees with the connecting surface 313 respectively, so that the movable positioning block 31 is driven to move along the angular bisector of the second right angle when the piston rod stretches out and draws back.
In an alternative embodiment of the present application, referring to fig. 2b again, the connection surface 313 is connected to the T-shaped connection plate through two first waist holes 331, and the length direction of the first waist holes 331 extends along the length direction of the transverse plate of the T-shaped connection plate;
referring again to fig. 1c, the first cylinder is connected to the back surface of the load-bearing base plate 1 through at least two second waist holes 321, and the length direction of the second waist holes 321 is perpendicular to the connecting surface 313.
The universal first waist hole 331 can finely adjust the position of the movable positioning block 31, that is, finely adjust the distance between the first positioning surface 311 and the first fixed positioning block 21 in the length extending direction and the distance between the second positioning surface 312 and the second fixed positioning block 22 in the length extending direction when the position of the first linear driving mechanism 32 in the movable positioning mechanism 3 is determined, so as to ensure the size of the placing section of the formed tray 4, and to adapt to trays 4 with different sizes.
The position of the first linear driving mechanism 32 in the movable positioning mechanism 3 can be adjusted through the second waist hole 321, and then the position of the movable positioning block 31 in the movable positioning mechanism 3 is adjusted, so as to ensure the size of the formed placing interval of the tray 4.
Specifically, when a new-specification tray needs to be loaded, the position of the movable positioning mechanism 3 needs to be manually adjusted through the first waist hole 331 and the second waist hole 321 to adapt to the new-specification tray.
In an optional embodiment of the present application, referring to fig. 1a again, the tray positioning fixture further includes at least one movable limiting block 5 disposed on the carrying surface of the carrying bottom plate 1 and disposed opposite and parallel to the first fixed positioning block 21 or the second fixed positioning block 22, a placement region is defined between the first fixed positioning block 21, the second fixed positioning block 22, the movable limiting block 5 and the movable positioning block 31, and the movable limiting block 5 is used to adjust a relative distance between the movable limiting block 5 and the first fixed positioning block 21 or the second fixed positioning block 22.
Specifically, in order to further ensure the size of the placing area of the formed tray 4, a movable limiting block 5 may be further provided, which is arranged opposite to the first fixed positioning block 21 or the second fixed positioning block 22, and the relative distance between the movable limiting block and the first fixed positioning block 21 or the second fixed positioning block 22 may be adjusted. It can be understood that the relative distance between the movable limiting block 5 and the first fixed positioning block 21 or the second fixed positioning block is equal to the distance between the first positioning surface 311 and the first fixed positioning block 21, or the distance between the second positioning surface 312 and the second fixed positioning block 22.
Further, the movable limiting block 5 is connected with the bearing surface of the bearing base plate 1 through a third waist hole 51, and the length extending direction of the third waist hole 51 is perpendicular to the first fixed positioning block 21 or the second fixed positioning block 22.
Specifically, when the movable limiting block 5 is disposed opposite to the first fixed positioning block 21, the length extending direction of the third waist hole 51 thereon is perpendicular to the first fixed positioning block 21, so as to adjust the relative distance between the movable limiting block 5 and the first fixed positioning block 21. When the movable limiting block 5 is disposed opposite to the second fixed positioning block 22, the length extending direction of the third waist hole 51 thereon is perpendicular to the second fixed positioning block 22, for adjusting the relative distance between the movable limiting block 5 and the second fixed positioning block 22.
It should be noted that, when a new specification tray needs to be loaded, the position of the movable positioning mechanism 3 needs to be manually adjusted through the first waist hole 331 and the second waist hole 321, and the position of the movable limiting block 5 needs to be manually adjusted through the third waist hole 51, so as to finally ensure the size of the placement section of the tray 4.
In an alternative embodiment of the present application, referring to fig. 1a, 1b and 3, the tray positioning fixture further includes a tray bidirectional clamping mechanism 6, where the tray bidirectional clamping mechanism 6 includes a pair of clamping jaws 61 that linearly extend or retract toward two opposite side edges of the load floor 1, respectively, and a clamping jaw driving mechanism 62 disposed on the back surface of the load floor 1 for driving the respective clamping jaws 61 to linearly retract so as to fix the positioned tray 4 on the load floor 1.
Specifically, after the tray 4 is positioned, in order to ensure the stability of the position of the tray 4, the tray needs to be clamped by the tray bidirectional clamping mechanism 6. The tray bidirectional clamping mechanism 6 is provided with clamping claws 61 in two opposite directions, and each clamping claw 61 is driven by a corresponding clamping claw driving mechanism 62, so that when the opposite clamping claws 61 move in opposite directions, the positioned tray 4 can be clamped. Therefore, in the moving process of the tray positioning jig, the tray 4 clamped on the tray positioning jig cannot be changed in position due to jolt, shaking and the like.
Furthermore, two opposite side edges of the bearing bottom plate 1 are respectively provided with a groove, and the clamping claws 61 are positioned in the grooves;
the clamping claw driving mechanism 62 comprises a plurality of second air cylinders or second hydraulic cylinders or second electric cylinders which are arranged on the back surface of the bearing bottom plate 1, the clamping claws 61 are arranged on a connecting plate 63 in parallel, and piston rods of the second air cylinders or the second hydraulic cylinders or the second electric cylinders are connected with the connecting plate 63;
the first air cylinder or the first hydraulic cylinder or the first electric cylinder is provided with an in-place sensor, the in-place sensor is used for sending a clamping instruction to the clamping jaw driving mechanism 62 when detecting that a piston rod of the first air cylinder or the first hydraulic cylinder or the first electric cylinder extends to a preset length, and the preset length is the length of the first air cylinder or the first hydraulic cylinder or the first electric cylinder pushing the movable positioning block 31 to position the material tray in place.
Wherein, the two opposite sides of the bearing bottom plate 1 are respectively provided with a groove, and the clamping claw 61 is positioned in the groove, and the arrangement avoids the clamping claw 61 from interfering with the side of the bearing bottom plate 1, and ensures that the clamping claw 61 clamps the side of the material tray 4.
The clamping claws 61 in the tray bidirectional clamping mechanism 6 can be provided with a plurality of pairs and driven by a second air cylinder or a second hydraulic cylinder or a second electric cylinder. Specifically, a plurality of clamping claws 61 corresponding to each side edge may be provided on a connecting plate 63, and the connecting plate 63 is connected to a piston rod of a second cylinder or a second hydraulic cylinder or a second electric cylinder, and when the piston rod is extended or contracted, the corresponding clamping claw 61 is released or clamped. The connecting plate 63 can be slidably connected with the back surface of the bearing bottom plate 1 through two sliding rails, and the stability of the connecting plate 63 moving along with the piston rod can be ensured by the arrangement, so that the stability of the clamping claw 61 in clamping is ensured.
Further, referring to fig. 1c again, the second air cylinder or the second hydraulic cylinder or the second electric cylinder is connected to the back surface of the load-bearing bottom plate 1 through at least two fourth waist holes 621, and the length direction of the fourth waist holes 621 is perpendicular to two opposite sides of the load-bearing bottom plate 1.
Specifically, when a new specification of material tray 4 needs to be loaded, the distance between the clamping claws 61 can be adjusted through the fourth waist hole 621, so that the new specification of material tray 4 can be smoothly placed in the placing area, and the material tray bidirectional clamping mechanism 6 can be matched with the new specification of material tray 4 to clamp the material tray 4.
In an optional embodiment of the present application, the tray positioning fixture further includes a tray detection sensor 7, which is used for sending a positioning signal to the controller after detecting that the tray 4 is placed on the carrying surface of the carrying bottom plate 1, and the controller controls the first linear driving mechanism 32 to drive the movable positioning block 31 to push and position after receiving the positioning signal.
Specifically, the charging tray detection sensor can be arranged on any one side of the bearing surface, and when the charging tray is placed in place in the placing area, the charging tray detection sensor senses and sends a control signal to the controller so as to indicate the charging tray positioning jig to start positioning operation, so that automatic production can be realized.
Fig. 4 is a schematic structural diagram of a material carrying module according to an embodiment of the present disclosure, and as shown in fig. 4, the material carrying module may include a tray positioning fixture 8, two lifting mechanisms 9, and two carrying rails 10 disposed in parallel.
As shown in fig. 5a and 5b, the lifting mechanism 9 includes a base frame 91 connected to the corresponding carrier rail 10, a lifting bracket 92 which can be lifted up and down along the base frame 91, and a lifting driving structure 93 for driving the lifting bracket 92 to be lifted up and down; liftable support 92 includes vertical portion 921 to and horizontal portion 922, vertical portion 921 can reciprocate with pedestal 91 and be connected, horizontal portion 922 and the back fixed connection of the load-bearing base plate 1 of the charging tray positioning jig 8 that corresponds, and the horizontal portion 922 of two elevating system 9 is located same transfer route, and transfer route includes in proper order that waits for the position, adds the station, gets the material level.
When the material tray positioning jig 8 is conveyed from the waiting position to the material taking position through the processing position, the lifting mechanism 9 corresponding to the material tray positioning jig 8 conveys the material tray positioning jig 8 according to a first height under the control of the controller; when the tray positioning jig 8 is conveyed to the waiting position by the material taking position through the processing position, the lifting mechanism 9 corresponding to the tray positioning jig 8 conveys the tray positioning jig 8 according to the second height under the control of the controller.
Specifically, suppose two charging tray positioning jig 8 and say into tool A and tool B respectively, both can be interactive carry the material after processing to get the material level from the processing position. Specifically, tool A is in waiting the position and is received charging tray 4 through charging tray positioning jig 8 to fix a position it, and tool A is in the second height in this process, and tool B is in the first height simultaneously and waits to receive charging tray 4 by it. After the positioning of the material tray 4 in the jig A is completed, the jig A is driven by the lifting mechanism to ascend to a first height and move towards the processing position, and meanwhile, the jig B keeps a second height and moves towards the waiting position. The jig A continues to keep the first height to move towards the material taking position after receiving the processed materials at the processing position, and carries the processed materials to the material taking position.
The utility model provides a scheme, because the charging tray is when placing charging tray positioning jig, through the hookup location between adjustment coupling mechanism and the movable positioning piece, make the length of charging tray and the length of placing interval length poor, the width that equals the width of charging tray and place interval width is poor, adopt first linear drive mechanism to remove at the route drive movable positioning block of the angular bisector direction of second right angle, two locating surfaces on the messenger movable positioning piece promote the charging tray in two locating directions are synchronous, and then make two adjacent edges that the charging tray is located first straight angle department support tightly with the fixed positioning piece that corresponds simultaneously, the problem of motion asynchronization in two locating directions among the prior art has been avoided, the positioning accuracy to the charging tray has been improved. Further, in the material delivery module, two charging tray positioning jig adopt different heights under the different direction of motion at the operation in-process, can realize two charging tray positioning jig's interactive transport, have improved the carrying efficiency of whole material delivery module.
Further, the first height is greater than the second height, so that the material tray positioning jig 8 for taking materials is transported away at a lower height, and the working of the processing device above the processing position and the material taking device above the material taking position cannot be influenced.
Fig. 6 is a schematic view of a dicing saw according to an embodiment of the present invention, as shown in fig. 6, the dicing saw includes a tray positioning fixture 8 or includes a material carrying module 11.
Specifically, contain charging tray positioning jig 8 or material carrying module 11 among this scribing machine, can realize the accurate positioning of charging tray through charging tray positioning jig 8, and then accurate receipt processing's material. The material carrying module 11 can efficiently complete the carrying of materials in the material tray.
The utility model provides a scheme, because the charging tray is when placing charging tray positioning jig, through the hookup location between adjustment coupling mechanism and the movable positioning piece, make the length of charging tray and the length of placing interval length poor, the width that equals the width of charging tray and place interval width is poor, adopt first linear drive mechanism to remove at the route drive movable positioning block of the angular bisector direction of second right angle, two locating surfaces on the messenger movable positioning piece promote the charging tray in two locating directions are synchronous, and then make two adjacent edges that the charging tray is located first straight angle department support tightly with the fixed positioning piece that corresponds simultaneously, the problem of motion asynchronization in two locating directions among the prior art has been avoided, the positioning accuracy to the charging tray has been improved. Further, in the material delivery module, two charging tray positioning jig adopt different heights under the different direction of motion at the operation in-process, can realize two charging tray positioning jig's interactive transport, have improved the carrying efficiency of whole material delivery module. To sum up, through setting up above-mentioned charging tray positioning jig and material handling module, improved the efficiency and the accuracy of wafer cutter's processing.
The foregoing is only a partial embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (12)
1. The utility model provides a charging tray positioning jig which characterized in that includes:
a load floor;
the fixed positioning block comprises a first fixed positioning block and a second fixed positioning block which are fixedly arranged on the bearing surface of the bearing bottom plate, and a first right angle is formed between the length extending direction of the first fixed positioning block and the length extending direction of the second fixed positioning block;
the movable positioning mechanism comprises a movable positioning block positioned on the bearing surface, a first linear driving mechanism arranged on the back surface of the bearing bottom plate, and a connecting mechanism for connecting the movable positioning block and the first linear driving mechanism;
the movable positioning block is provided with a first positioning surface and a second positioning surface which are perpendicular to each other, an included angle formed between the first positioning surface and the second positioning surface is a second right angle, the second right angle is arranged opposite to the first right angle, a placing section for placing the material tray is defined by the first fixed positioning block, the second fixed positioning block and the movable positioning block, the connecting position of the connecting mechanism and the movable positioning block is adjustable, and the connecting position of the connecting mechanism and the movable positioning block is adjusted, so that when the movable positioning block is in an initial position, the length difference between the length of the placing section and the length of the material tray is equal to the width difference between the width of the placing section and the width of the material tray;
the first linear driving mechanism is used for driving the movable positioning block to do linear reciprocating motion along a path in the angular bisector direction of the second right angle so as to push the material tray placed in the placing section to be in contact positioning with the first fixed positioning block and the second fixed positioning block.
2. The tray positioning jig according to claim 1, wherein the first linear driving mechanism is a first air cylinder, a first hydraulic cylinder, or a first electric cylinder, the connecting mechanism is a T-shaped connecting piece, the movable positioning block is further provided with a connecting surface, the connecting surface forms an included angle of 45 degrees with the first positioning surface and the second positioning surface respectively, a transverse plate of the T-shaped connecting piece is connected with the connecting surface, and a vertical plate of the T-shaped connecting piece is connected with a piston rod of the first air cylinder, the first hydraulic cylinder, or the first electric cylinder.
3. The tray positioning jig of claim 2, wherein the connecting surface is connected with the T-shaped connecting plate through two first waist holes, and the length direction of the first waist holes extends along the length direction of the transverse plate of the T-shaped connecting plate;
and/or
The first air cylinder is connected with the back face of the bearing bottom plate through at least two second waist holes, and the length direction of the second waist holes is perpendicular to the connecting face.
4. The tray positioning jig of claim 1, further comprising at least one movable limiting block disposed on the carrying surface of the carrying bottom plate and disposed opposite and parallel to the first fixed positioning block or the second fixed positioning block, wherein the first fixed positioning block, the second fixed positioning block, the movable limiting block and the movable positioning block define the placement area therebetween, and the movable limiting block is used for adjusting a relative distance from the movable limiting block to the first fixed positioning block or the second fixed positioning block.
5. The tray positioning jig of claim 4, wherein the movable limiting block is connected with the bearing surface of the bearing bottom plate through a third waist hole, and the length extension direction of the third waist hole is perpendicular to the first fixed positioning block or the second fixed positioning block.
6. The tray positioning jig of claim 2, further comprising a tray bi-directional clamping mechanism, wherein the tray bi-directional clamping mechanism comprises a pair of clamping jaws that linearly extend or retract towards two opposite sides of the supporting base plate, and a clamping jaw driving mechanism disposed on the back surface of the supporting base plate for driving the corresponding clamping jaws to linearly retract so as to fix the positioned tray on the supporting base plate.
7. The tray positioning jig of claim 6, wherein two opposite side edges of the carrying bottom plate are respectively provided with a groove, and the clamping claws are positioned in the grooves;
and/or
The clamping claw driving mechanism comprises a plurality of second air cylinders or second hydraulic cylinders or second electric cylinders which are arranged on the back surface of the bearing bottom plate, the clamping claws are arranged on a connecting plate side by side, and piston rods of the second air cylinders or the second hydraulic cylinders or the second electric cylinders are connected with the connecting plate;
the first air cylinder or the first hydraulic cylinder or the first electric cylinder is provided with an in-place sensor, the in-place sensor is used for sending a clamping instruction to the clamping jaw driving mechanism when a piston rod of the first air cylinder or the first hydraulic cylinder or the first electric cylinder stretches out to a preset length, and the preset length is the length of the first air cylinder or the first hydraulic cylinder or the first electric cylinder pushing the movable positioning block to position the material tray in place.
8. The tray positioning jig of claim 7, wherein the second cylinder or the second hydraulic cylinder or the second electric cylinder is connected to the back surface of the load-bearing bottom plate through at least two fourth waist holes, and the length direction of the fourth waist holes is perpendicular to two opposite side edges of the load-bearing bottom plate.
9. The tray positioning jig of claim 1, further comprising a tray detection sensor for sending a positioning signal to a controller after detecting that the tray is placed on the carrying surface of the carrying bottom plate, wherein the controller controls the first linear driving mechanism to drive the movable positioning block to push and position after receiving the positioning signal.
10. A material carrying module, comprising two tray positioning jigs according to any one of claims 1 to 9, two lifting mechanisms, and two carrying rails arranged in parallel;
the lifting mechanism comprises a base frame connected to the corresponding carrying guide rail, a lifting support capable of lifting up and down along the base frame, and a lifting driving structure for driving the lifting support to lift up and down; the lifting support comprises a vertical part and a transverse part, the vertical part and the base frame can be connected in a vertically moving mode, the transverse part is fixedly connected with the back face of a bearing bottom plate of the corresponding material tray positioning jig, the transverse parts of the two lifting mechanisms are located on the same conveying path, the conveying path sequentially comprises a waiting position, a processing position and a material taking position, and when the material tray positioning jig is conveyed to the material taking position from the waiting position through the processing position, the lifting mechanisms corresponding to the material tray positioning jig convey the material tray positioning jig according to a first height under the control of a controller; when the charging tray positioning jig is conveyed by the material taking position, the processing position and the waiting position, the lifting mechanism corresponding to the charging tray positioning jig conveys the charging tray positioning jig according to the second height under the control of the controller.
11. The material carrying module of claim 10, wherein the first elevation is greater than the second elevation.
12. A dicing saw including a tray positioning jig according to any one of claims 1 to 9, or a material carrying module according to claim 10 or 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210488963.5A CN114572670A (en) | 2022-05-07 | 2022-05-07 | Charging tray positioning jig, material carrying module and dicing saw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210488963.5A CN114572670A (en) | 2022-05-07 | 2022-05-07 | Charging tray positioning jig, material carrying module and dicing saw |
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| CN114572670A true CN114572670A (en) | 2022-06-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210488963.5A Pending CN114572670A (en) | 2022-05-07 | 2022-05-07 | Charging tray positioning jig, material carrying module and dicing saw |
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Address after: 110 000 No. 53 Buyunshan Road, Huanggu District, Shenyang City, Liaoning Province Applicant after: Shenyang Heyan Technology Co.,Ltd. Address before: 110 000 No. 53 Buyunshan Road, Huanggu District, Shenyang City, Liaoning Province Applicant before: SHENYANG HEYAN TECHNOLOGY CO.,LTD. |