CN114570705A - Chip cleaning and dust removing device - Google Patents
Chip cleaning and dust removing device Download PDFInfo
- Publication number
- CN114570705A CN114570705A CN202210142086.6A CN202210142086A CN114570705A CN 114570705 A CN114570705 A CN 114570705A CN 202210142086 A CN202210142086 A CN 202210142086A CN 114570705 A CN114570705 A CN 114570705A
- Authority
- CN
- China
- Prior art keywords
- chip
- dust removing
- connecting rod
- box
- chip cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 title claims abstract description 42
- 238000004140 cleaning Methods 0.000 title claims abstract description 28
- 239000007921 spray Substances 0.000 abstract description 6
- 230000009471 action Effects 0.000 abstract description 5
- 230000005484 gravity Effects 0.000 abstract description 5
- 230000007306 turnover Effects 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
- B08B5/023—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning In General (AREA)
Abstract
The invention relates to the technical field of chip processing, in particular to a chip cleaning and dust removing device, wherein two conveyor belts are respectively detachably connected with the inner side wall of a groove, a connecting rod is detachably connected with the output end of a motor and is positioned above the groove, two placing plates are respectively detachably connected with the connecting rod and are positioned at two sides of the connecting rod and between the two conveyor belts, the two placing plates are parallel to each other and are not at the same height, and a nozzle is detachably connected with the inner top wall of a box body. The chip is placed on the conveying belt, the nozzle sprays gas to remove dust on the top and the side face of the chip, the conveying belt rotates the chip to the position below the corresponding placing plate, the connecting rod rotates, the placing plate corresponding to the chip lifts the chip, the chip rotates 180 degrees, the chip falls on the conveying belt under the action of gravity, the turnover of the chip is completed, and the nozzle continuously sprays gas, so that the dust removal is also completed on the bottom face of the chip.
Description
Technical Field
The invention relates to the technical field of chip processing, in particular to a chip cleaning and dust removing device.
Background
Chips are a way in electronics to miniaturize circuits (including primarily semiconductor devices, including passive components, etc.) and are often fabricated on the surface of a semiconductor wafer. The chip needs to be dedusted in the processing process, so that the cleanness of the chip is ensured. The conventional apparatus can only remove dust from the top and side surfaces of the chip.
Disclosure of Invention
The invention aims to provide a chip cleaning and dust removing device, and aims to solve the problem that the traditional device can only remove dust on the top and the side of a chip.
In order to achieve the aim, the invention provides a chip cleaning and dust removing device which comprises a box body, a supporting platform, two conveying belts, a motor, a connecting rod, two placing plates and a nozzle, wherein the supporting platform is detachably connected with the box body, and is positioned inside the box body, the support table is provided with a groove, the two conveyor belts are respectively detachably connected with the inner side wall of the groove, the motor is detachably connected with the support table, and is positioned on the top of the supporting platform, the connecting rod is detachably connected with the output end of the motor, and is positioned above the groove, the two placing plates are respectively detachably connected with the connecting rod, and the two placing plates are parallel to each other and are not at the same height, and the nozzle is detachably connected with the inner top wall of the box body.
The chip is placed on the conveying belt, the nozzles spray gas to remove dust on the top and the side faces of the chip, the conveying belt conveys the chip to the position below the corresponding placing plate, the connecting rod rotates, the placing plate corresponding to the chip lifts the chip and rotates 180 degrees, the chip falls on the conveying belt under the action of gravity to complete the turnover of the chip, and the nozzles continuously spray gas to remove dust on the bottom face of the chip.
The chip cleaning and dust removing device further comprises a containing box, wherein the containing box is detachably connected with the bottom of the box body and is communicated with the inside of the box body.
The accommodating case is used for collecting dust.
The containing box comprises a frame body and a movable plate, the frame body is communicated with the box body and is located at the bottom of the box body, an opening is formed in the side face of the frame body, sliding grooves are formed in two side walls of the opening of the frame body, and the movable plate is matched with the two sliding grooves. The movable plate is detached, so that the inside of the containing box is convenient to clean by workers.
The chip cleaning and dust removing device further comprises an exhaust fan and a filter screen, the exhaust fan is detachably connected with the movable plate and communicated with the inside of the frame body, and the filter screen is arranged at the joint of the exhaust fan and the movable plate.
The exhaust fan is matched with the nozzle, so that air flow enters the containing box from the box body, and dust also enters the containing box under the driving of the air flow
The supporting plate is used for placing a chip, and the driving mechanism is used for lifting.
The chip cleaning and dust removing device further comprises an observation window, and the observation window is embedded into the side wall of the box body.
The observation window is used for observing the working condition of the device by workers.
The chip cleaning and dust removing device further comprises two telescopic rods, and each placing plate is detachably connected with the connecting rod through the corresponding telescopic rod.
The telescopic link is used for adjusting the position of placing the board, makes the device be applicable to the chip of more models.
The top of box is provided with the bearing, the connecting rod is kept away from the one end of motor with the bearing rotates and is connected.
The bearing plays a supporting role for the connecting rod.
The invention has the beneficial effects that: the chip is placed on the conveying belt, the nozzles spray gas to remove dust on the top and the side faces of the chip, the conveying belt conveys the chip to the position below the corresponding placing plate, the connecting rod rotates, the placing plate corresponding to the chip lifts the chip and rotates 180 degrees, the chip falls on the conveying belt under the action of gravity to complete the turnover of the chip, and the nozzles continuously spray gas to remove dust on the bottom face of the chip.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a chip cleaning and dust removing device provided by the invention.
Fig. 2 is a schematic structural view of the accommodating box provided by the invention.
1-box body, 2-supporting table, 3-conveying belt, 4-connecting rod, 5-placing plate, 6-nozzle, 7-groove, 8-containing box, 9-frame body, 10-movable plate, 11-opening, 12-sliding groove, 13-exhaust fan, 14-filter screen, 15-observation window, 16-telescopic rod, 17-bearing and 18-motor.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, and are used merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention. Further, in the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
Referring to fig. 1 and 2, the invention provides a chip cleaning and dust removing device, which comprises a box body 1, a supporting platform 2, two conveyor belts 3, a motor 18, a connecting rod 4, two placing plates 5 and a nozzle 6, wherein the supporting platform 2 is detachably connected with the box body 1 and is positioned inside the box body 1, the supporting platform 2 is provided with a groove 7, the two conveyor belts 3 are respectively detachably connected with the inner side wall of the groove 7, the motor 18 is detachably connected with the supporting platform 2 and is positioned at the top of the supporting platform 2, the connecting rod 4 is detachably connected with the output end of the motor 18 and is positioned above the groove 7, the two placing plates 5 are respectively detachably connected with the connecting rod 4 and are positioned at both sides of the connecting rod 4 and between the two conveyor belts 3, and the two placing plates 5 are parallel to each other, and the nozzles 6 are not at the same height, and are detachably connected with the inner top wall of the box body 1.
In this embodiment, the conveyor belt 3 is slightly higher than the support table 2, the nozzle 6 is located on the inner top wall of the box 1, and the gas ejected from the nozzle 6 can remove dust from the chips on the conveyor belt 3. The two placing plates 5 are parallel to each other and not at a height, when the placing plates 5 are parallel to the conveyor belt 3, the placing plate 5 at a low position is lower than the height of the chip, the conveyor belt 3 transports the chip to the upper side of the placing plate 5, the connecting rod 4 rotates 180 degrees, the chip rotates around the connecting rod 4 along with the placing plate 5, the placing plate 5 is higher than the conveyor belt 3 at the moment, the chip falls onto the conveyor belt 3 under the action of gravity, the conveyor belt 3 continues to work, and the next chip is transported to the placing plate 5 at a low position, so that the work is repeated. Therefore, the chips are placed on the conveyor belt 3, the nozzles 6 eject gas to remove dust on the top and the side surfaces of the chips, the conveyor belt 3 conveys the chips to the position below the corresponding placing plate 5, the connecting rod 4 rotates, the placing plate 5 corresponding to the chips lifts the chips and rotates 180 degrees, the chips fall on the conveyor belt 3 under the action of gravity to complete the turnover of the chips, and the nozzles 6 continuously eject gas to remove dust on the bottom surfaces of the chips.
Further, chip cleaning dust collector still including holding case 8, hold case 8 with the bottom of box 1 can be dismantled and be connected, and with the inside intercommunication of box 1.
In the present embodiment, the housing box 8 is used to collect dust.
Further, the containing box 8 includes a frame 9 and a movable plate 10, the frame 9 is communicated with the box 1 and is located at the bottom of the box 1, a side surface of the frame 9 has an opening 11, two side walls of the frame 9 at the opening 11 each have a sliding groove 12, and the movable plate 10 is engaged with the two sliding grooves 12.
In this embodiment, the movable plate 10 can be directly pulled out from the frame 9, which facilitates cleaning of the inside of the accommodating box 8 by a worker.
Further, the chip cleaning and dust removing device further comprises an exhaust fan 13 and a filter screen 14, wherein the exhaust fan 13 is detachably connected with the movable plate 10 and communicated with the inside of the frame body 9, and the filter screen 14 is arranged at the joint of the exhaust fan 13 and the movable plate 10.
In the present embodiment, the nozzle 6 serves as a wind source, and the exhaust fan 13 draws out wind, so that the internal airflow forms a circulation, and dust is more easily introduced into the accommodating box 8 along with the flow of the airflow.
Further, the chip cleaning and dust removing device further comprises an observation window 15, and the observation window 15 is embedded in the side wall of the box body 1.
In the present embodiment, the operator can observe the operation of the apparatus through the observation window 15, thereby ensuring stable operation of the apparatus.
Further, the chip cleaning and dust removing device further comprises two telescopic rods 16, and each placing plate 5 is detachably connected with the connecting rod 4 through the corresponding telescopic rod 16.
In this embodiment, the worker can adjust the position of the placing plate 5 by the telescopic rod 16, so that the device can adjust the position according to chips of different sizes.
Further, a bearing 17 is arranged at the top of the box body 1, and one end, far away from the motor 18, of the connecting rod 4 is rotatably connected with the bearing 17.
In the present embodiment, the bearing 17 supports the connecting rod 4, and ensures that the joint between the connecting rod 4 and the motor 18 is not deformed.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (7)
1. A chip cleaning and dust removing device is characterized in that,
including box, brace table, two conveyer belts, motor, connecting rod, two place board and nozzles, the brace table with the connection can be dismantled to the box, and be located the inside of box, the brace table has the recess, two the conveyer belt respectively with the connection can be dismantled to the inside wall of recess, the motor with the connection can be dismantled to the brace table, and be located the top of brace table, the connecting rod with the connection can be dismantled to the output of motor, and be located the top of recess, two place the board respectively with connecting rod releasable connection, and be located the both sides of connecting rod, and be located two between the conveyer belt, two place the board and be parallel to each other, and not at same height, the nozzle with the connection can be dismantled to the interior roof of box.
2. The chip cleaning and dust removing apparatus according to claim 1,
the chip cleaning and dust removing device further comprises an accommodating box, wherein the accommodating box is detachably connected with the bottom of the box body and is communicated with the inside of the box body.
3. The chip cleaning and dust removing apparatus according to claim 2,
the containing box comprises a frame body and a movable plate, the frame body is communicated with the box body and is located at the bottom of the box body, an opening is formed in the side face of the frame body, sliding grooves are formed in two side walls of the frame body at the opening, and the movable plate is matched with the two sliding grooves.
4. The chip cleaning and dust removing apparatus according to claim 3,
the chip cleaning and dust removing device further comprises an exhaust fan and a filter screen, the exhaust fan is detachably connected with the movable plate and communicated with the inside of the frame body, and the filter screen is arranged at the joint of the exhaust fan and the movable plate.
5. The device for cleaning and removing dust from chips as defined in claim 1,
the chip cleaning and dust removing device further comprises an observation window, and the observation window is embedded into the side wall of the box body.
6. The chip cleaning and dust removing apparatus according to claim 1,
the chip cleaning and dust removing device further comprises two telescopic rods, and each placing plate is detachably connected with the connecting rod through the corresponding telescopic rod.
7. The chip cleaning and dust removing apparatus according to claim 1,
the top of box is provided with the bearing, the connecting rod is kept away from the one end of motor with the bearing rotates and is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210142086.6A CN114570705A (en) | 2022-02-16 | 2022-02-16 | Chip cleaning and dust removing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210142086.6A CN114570705A (en) | 2022-02-16 | 2022-02-16 | Chip cleaning and dust removing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114570705A true CN114570705A (en) | 2022-06-03 |
Family
ID=81770663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210142086.6A Pending CN114570705A (en) | 2022-02-16 | 2022-02-16 | Chip cleaning and dust removing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114570705A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010061115A1 (en) * | 2009-12-15 | 2011-07-28 | Knoth, Hubert, Ing. | Device for cleaning and cooling workpieces |
| CN208613264U (en) * | 2018-04-27 | 2019-03-19 | 广西朗盛食品科技有限公司 | A kind of automation baking tray cleaning assembly line |
| CN110152912A (en) * | 2018-03-20 | 2019-08-23 | 王紫蓉 | A kind of timber floor sealing wax device based on Maltese cross machine core |
| CN212221827U (en) * | 2020-05-29 | 2020-12-25 | 湖北省宇兴环保科技有限公司 | Paper feeding device of paperboard coloring machine |
| CN214717595U (en) * | 2020-08-19 | 2021-11-16 | 江苏方意汽车配件制造股份有限公司 | Spraying equipment is used in processing of disk brake block |
| CN215543333U (en) * | 2021-06-29 | 2022-01-18 | 深圳市深丰迪自动化科技有限公司 | Lithium battery dust removal device |
-
2022
- 2022-02-16 CN CN202210142086.6A patent/CN114570705A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010061115A1 (en) * | 2009-12-15 | 2011-07-28 | Knoth, Hubert, Ing. | Device for cleaning and cooling workpieces |
| CN110152912A (en) * | 2018-03-20 | 2019-08-23 | 王紫蓉 | A kind of timber floor sealing wax device based on Maltese cross machine core |
| CN208613264U (en) * | 2018-04-27 | 2019-03-19 | 广西朗盛食品科技有限公司 | A kind of automation baking tray cleaning assembly line |
| CN212221827U (en) * | 2020-05-29 | 2020-12-25 | 湖北省宇兴环保科技有限公司 | Paper feeding device of paperboard coloring machine |
| CN214717595U (en) * | 2020-08-19 | 2021-11-16 | 江苏方意汽车配件制造股份有限公司 | Spraying equipment is used in processing of disk brake block |
| CN215543333U (en) * | 2021-06-29 | 2022-01-18 | 深圳市深丰迪自动化科技有限公司 | Lithium battery dust removal device |
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Application publication date: 20220603 |