CN114562989A - Hemispherical resonance gyroscope based on optical cement connection mode - Google Patents
Hemispherical resonance gyroscope based on optical cement connection mode Download PDFInfo
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- CN114562989A CN114562989A CN202111498595.4A CN202111498595A CN114562989A CN 114562989 A CN114562989 A CN 114562989A CN 202111498595 A CN202111498595 A CN 202111498595A CN 114562989 A CN114562989 A CN 114562989A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
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Abstract
The invention relates to a hemispherical resonant gyroscope based on an optical cement connection mode, which comprises an outer cover, an optical cement fixing component, a harmonic oscillator, a getter and a vacuum communicating vessel, wherein the optical cement fixing component is arranged on the outer cover; one end of the outer cover is opened and a cavity is arranged in the outer cover; the optical cement fixing assembly comprises an optical cement substrate, a support ring and an electrode holder, the optical cement substrate is arranged at the bottom of the cavity, the electrode holder is arranged at one end of the cavity close to the opening of the outer cover, the support ring is arranged between the optical cement substrate and the electrode holder, and two ends of the support ring are respectively connected with the optical cement substrate and the electrode holder in an optical cement mode; the harmonic oscillator comprises a hemispherical part and a supporting rod, one end of the supporting rod, which is close to the opening of the hemispherical part, is arranged on the electrode seat, and the other end of the supporting rod is connected with the optical cement of the optical cement substrate; the getter is arranged at one end of the support rod deviating from the opening of the hemispherical part; the vacuum communicating vessel is arranged on one side of the electrode seat far away from the optical cement substrate; the connection is carried out by adopting a light glue mode, so that the dimensional tolerance is controlled strictly, and the process requirement is met after the installation and the adjustment.
Description
Technical Field
The invention relates to the technical field of hemispherical resonator gyroscopes, in particular to a hemispherical resonator gyroscope based on an optical cement connection mode.
Background
A Hemispherical Resonator Gyroscope (HRG) is a vibrating gyroscope without a high-speed rotor and a movable support, and has the characteristics of high precision, small mass, small volume, short starting time, high overload and high reliability. Is known as the most potential Ge-type vibration gyro. The working principle of the HRG is based on the Coriolis effect generated when a hemispherical shell harmonic oscillator rotates around a central shaft, so that the vibration mode of the HRG precesses relative to the shell in the circumferential direction.
The hemispherical resonator gyroscope developed at present generally adopts a 'two-piece' structural form, and main parts comprise a harmonic oscillator and an electrode seat. Wherein, the electrode seat adopts a plane or spherical surface structure, and the two parts are both formed by precisely machining fused quartz; and then annealing, chemically cleaning, leveling, electrode area metallization and performance testing, then welding the two components together by adopting a lower melting point solder (such as high-purity indium) in a vacuum environment after the two components are precisely adjusted to form a resonance sub-component, sealing the resonance sub-component in a high-vacuum container, and packaging the resonance sub-component and a front discharge circuit board into a metal shell to form the gauge outfit of the hemispherical resonance gyroscope.
At present, the related literature documents related to the structure and the assembly method of the hemispherical resonator gyroscope have the following defects: firstly, a high-precision displacement mechanism is adopted to relatively adjust the relative position of the harmonic oscillator and the electrode holder so as to ensure the strict position relation of the harmonic oscillator and the electrode holder, so that the adjustment mechanism is more complex, and part of the adjustment precision can be lost in subsequent brazing or other fixed connection modes; secondly, the harmonic oscillator and the electrode holder are fixed by brazing or bonding, and the two modes are carried out at higher temperature, so that the thermal deformation of the harmonic oscillator, the electrode holder and the clamp is caused, and the final assembly and adjustment precision is influenced.
Disclosure of Invention
Based on the above description, the invention provides a hemispherical resonator gyroscope based on an optical cement connection mode, so as to solve the technical problems in the prior art.
The technical scheme for solving the technical problems is as follows:
a hemispherical resonator gyroscope based on an optical cement connection mode is characterized by comprising an outer cover, an optical cement fixing component, a harmonic oscillator, a getter and a vacuum communicating vessel;
one end of the outer cover is opened and a cavity is formed inside the outer cover;
the optical cement fixing assembly comprises an optical cement substrate, a support ring and an electrode holder, the optical cement substrate is arranged at the bottom of the cavity, the electrode holder is arranged at one end, close to the opening of the outer cover, of the cavity, the support ring is arranged between the optical cement substrate and the electrode holder, and two ends of the support ring are respectively in optical cement connection with the optical cement substrate and the electrode holder;
the harmonic oscillator comprises a hemispherical part with an opening on an equatorial plane and a supporting rod which penetrates through the central axis of the hemispherical part, one end of the supporting rod, which is close to the opening of the hemispherical part, is arranged on the electrode seat, and the other end of the supporting rod is connected with the optical cement substrate by optical cement;
the getter is arranged at one end of the support rod, which is far away from the opening of the hemispherical part;
the vacuum communicating vessel is arranged on one side, far away from the optical cement substrate, of the electrode seat and is used for electrically communicating the inside of the cavity with the outside.
Compared with the prior art, the technical scheme of the application has the following beneficial technical effects:
the application provides a hemisphere resonance top, the both ends of its support ring respectively with the optical cement base plate with the electrode holder optical cement is connected, and the terminal surface of the opening one side of the hemisphere portion of harmonic oscillator with the electrode holder optical cement, the dress accent benchmark is the optical cement face, adopts the optical cement mode to connect the strict control dimensional tolerance of being convenient for, guarantees to adorn and transfer the back and satisfies the technological requirement.
On the basis of the technical scheme, the invention can be improved as follows.
Furthermore, the bracing piece is including being located body of rod on the axis of hemisphere portion and being located the body of rod is kept away from the platform of breathing in of electrode holder one end, the middle part of platform of breathing in is formed with and is used for the holding the columniform storage tank of getter.
Furthermore, a cross groove is formed in the end face of the air suction platform, the accommodating groove is located in the center of the cross groove, and the end portion of the cross groove extends to the side wall of the air suction platform.
Furthermore, the optical cement substrate and the support ring are of quartz processing and forming structures, the getter is an induction heating activated getter, and an annular window is formed in the position, corresponding to the air suction platform, of the outer cover and used for activating the getter.
Furthermore, the area surface shape connected among the optical cement substrate, the support ring and the electrode holder requires that a PV value is less than 1/10 lambda, lambda is the wavelength of interference light of the working environment of the hemispherical resonator gyroscope, and the parallelism of the two end surfaces of the support ring is less than 0.001 mm.
Further, the vacuum communicating vessel includes the base of disc and follows a plurality of contact pin subassemblies of base axis circumference equipartition, the contact pin subassembly including install in insulating glass cover, coaxial arrangement on the base insulating glass cover inside housing and coaxial inserting locate the inside contact pin of housing, the electrode holder corresponds the terminal surface metallization of opening one side of hemisphere portion is formed with the excitation detecting electrode of a plurality of equipartitions, the one end of contact pin stretches into the electrode holder and with excitation detecting electrode electrical connection, the other end extends to the outside of base, connect the front board on the contact pin for the excitation and the signal detection of harmonic oscillator.
Further, electrode holes are formed in the electrode holders at positions corresponding to the contact pins, crown springs are arranged in the electrode holes and are connected to the corresponding end portions of the contact pins in a one-to-one correspondence mode, and the crown springs are used for elastic connection of the contact pins and the electrode holders.
Further, still include clamp plate, air extraction mouth and fastener, the clamp plate pass through the fastener install in the opening part of dustcoat, the clamp plate will the base is fixed in on the electrode holder, air extraction mouth install in on the base and follow the clamp plate opposite side is stretched out.
Furthermore, the electrode holder further comprises an elastic spacing ring, the elastic spacing ring is arranged on one side, close to the electrode holder, of the pressing plate, a plurality of elastic grooves distributed at equal intervals are formed in the side wall of the ring body of the elastic spacing ring along the circumferential direction of the side wall, and the two ends of the elastic spacing ring are elastically connected with the pressing plate and the electrode holder.
Furthermore, an annular step is formed on the outer side wall, close to the pressing plate, of the electrode holder, the elastic spacing ring is sleeved on the outer side of the electrode holder, and two ends of the elastic spacing ring are respectively abutted to the end face of the annular step and the inner side face of the pressing plate.
Drawings
Fig. 1 is a longitudinal schematic view of a hemispherical resonator gyroscope based on an optical cement connection manner according to an embodiment of the present invention;
FIG. 2 is a disassembled perspective view of FIG. 1;
FIG. 3 is a schematic view of the mounting structure of the harmonic oscillator and the electrode holder after adjustment;
FIG. 4 is a schematic structural diagram of the electrode holder from two viewing angles;
fig. 5 is a schematic sectional structure view of the positive air communicating vessel.
FIG. 6 is a schematic diagram of the optical cement surface position of the harmonic oscillator;
FIG. 7 is a schematic view of the position of the optical surface of the support ring.
Detailed Description
To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Embodiments of the present application are set forth in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
It will be understood that spatial relationship terms, such as "under", "below", "beneath", "below", "over", "above", and the like, may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements or features described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "under" can encompass both an orientation of above and below. In addition, the device may also include additional orientations (e.g., rotated 90 degrees or other orientations) and the spatial descriptors used herein interpreted accordingly.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or be connected to the other element through intervening elements. The "connection" in the following embodiments is understood as "electrical connection", "communication connection", or the like if the connected circuits, modules, units, or the like have electrical signals or data transmission therebetween.
As used herein, the singular forms "a", "an" and "the" may include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises/comprising," "includes" or "including," etc., specify the presence of stated features, integers, steps, operations, components, parts, or combinations thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.
As shown in fig. 1 to 6, the present application provides a hemispherical resonator gyroscope based on an optical cement connection manner, which includes an outer cover 1, an optical cement fixing component 2, a harmonic oscillator 3, a getter 4 and a vacuum connector 5.
Wherein, dustcoat 1 is located the outermost of hemisphere resonance top, and as the shell main part of whole hemisphere resonance top, its upper surface design has the mechanical interface to the external installation, and in this embodiment, dustcoat 1 adopts stainless steel machine-shaping, and the one end opening of dustcoat 1 and inside have the cavity, and in this embodiment, for the convenience of expression, according to the direction in the figure, dustcoat 1 lower extreme opening for the installation and the fixed of other parts.
The optical cement fixing component 2 comprises an optical cement substrate 21, a support ring 22 and an electrode seat 23, wherein the optical cement substrate 21 is arranged at the bottom of the cavity, namely arranged close to the upper end inside the outer cover 1; the electrode holder 23 is arranged at one end of the cavity close to the opening of the outer cover 1, the support ring 22 is arranged between the optical cement substrate 21 and the electrode holder 23, and two ends of the support ring 22 are respectively in optical cement connection with the optical cement substrate 21 and the electrode holder 23.
The optical cement phenomenon refers to that when optical mirror surfaces with particularly smooth surfaces and matched contact surfaces are contacted with each other, the optical mirror surfaces are tightly attached together just like that the middle contact surface is coated with super glue, and are difficult to separate, and the optical mirror surfaces are formed into a lens, so that the optical cement phenomenon is named as the optical cement phenomenon.
Specifically, the optical cement substrate 21 is a cylindrical flat plate structure, is formed by processing quartz, and has a lower end face of an optical cement surface with a surface shape PV value smaller than 1/10 λ, the support ring 22 is a circular cylindrical structure, is formed by processing quartz, and has upper and lower end faces of an optical cement surface with a surface shape PV value smaller than 1/10 λ, and has an upper end face optically cemented with the optical cement substrate 21 and a lower end face optically cemented with the upper end face of the optical cement substrate 21.
Wherein λ is the wavelength of the interference light in the working environment of the hemispherical resonator gyroscope, and if the interference light is 628.3nm laser light wave in the embodiment, the requirement of the surface shape of each optical cement surface that the PV value is less than 63.28nm is satisfied.
The harmonic oscillator 3 is formed by precision machining of fused silica, and includes a hemispherical portion 31 (i.e., an opening at the lower end of the hemispherical portion 31 in the figure) with an opening on the equatorial plane and a support rod 32 penetrating along the central axis of the hemispherical portion 31, the lower end portion of the support rod 32 is mounted on the electrode holder 23, and the upper end portion is connected with the optical cement substrate 21 by optical cement.
Wherein, the getter 4 is installed at one end of the support bar 32 departing from the opening of the hemispherical portion 31.
Preferably, the support bar 32 includes a bar body 321 located on a central axis of the hemispherical portion and a suction platform 322 located at an upper end of the bar body 321, and a cylindrical receiving groove 32a for receiving the getter 4 is formed in a middle portion of the suction platform 322.
In this embodiment, the getter 4 is an induction heating activated getter, which is activated by high-frequency induction heating to maintain a high vacuum degree of the internal cavity of the hemispherical resonator gyroscope, an annular window is formed at a position of the housing 1 corresponding to the getter platform 322, and a central position of the optical cement substrate 21 serves as an activation channel of the getter 4, so as to activate the getter 4.
In order to facilitate air suction, a cross groove 32b is formed in the end face of the air suction platform 322, the accommodating groove 32a is located in the center of the cross groove 32b, the end portion of the cross groove 32b extends to the side wall of the air suction platform 322, and when the getter 4 is activated, air in the inner cavity of the hemispherical resonator gyroscope is sucked from the end portion of the cross groove 32b, so that smooth air suction is guaranteed.
In the present embodiment, the parallelism of the two end surfaces of the support ring is less than 0.001mm, and by controlling the height of the support ring 22, precise assembly between the resonator 3 and the electrode holder 23 is achieved.
The vacuum connector 5 is mounted on the lower side of the electrode holder 23 for electrically connecting the inside of the cavity to the outside.
Specifically, the vacuum communicating vessel 5 includes a disc-shaped base 51 and eight pin assemblies 52 uniformly distributed along the central axis of the base 51 in the circumferential direction, and it can be understood that the number of the pin assemblies 52 can be reduced according to the actual working requirement, and is not necessarily limited to eight.
In the present embodiment, the pin assembly 52 includes an insulating glass cover 523 mounted on the base 51, a shielding cover 522 coaxially mounted inside the insulating glass cover 523, and a pin 521 coaxially inserted inside the shielding cover 522, i.e. a structure similar to a coaxial cable is formed among the pin 521, the shielding cover 522, and the insulating glass cover 523; the electrode base 23 is metallized by magnetron sputtering to form eight uniformly distributed excitation detection electrodes 231 corresponding to the lower end surface of the hemispherical portion 31, the upper end of the pin 521 extends into the electrode base 23 and is electrically connected with the excitation detection electrodes 231, the other end of the pin extends to the outside of the base 51, and the pin 521 is connected with a front board 53 for excitation and signal detection of the harmonic oscillator 3.
The electrical connection between the contact pin 521 and the excitation detecting electrode 231 is specifically as follows: electrode holes 23a are formed in the electrode holder 23 at positions corresponding to the pins 521, respectively, crown springs 232 are arranged in the electrode holes 23a, and the crown springs 232 are connected to the ends of the corresponding pins 521 in a one-to-one correspondence manner and used for elastic connection between the pins 521 and the electrode holder 23.
Wherein, in order to guarantee the sealing of the inner cavity, the lower end of the electrode holder 23 and the outer circular surface of the base 51 of the vacuum communicating vessel 5 are bonded and fixedly connected by vacuum glue with low air-release amount to form a sealed cavity, and in addition, a shielding spring 10 is connected between the electrode holder 23 and the base 51.
Preferably, the hemispherical resonator gyroscope further comprises a pressure plate 6, a fastener 7, an elastic space ring 8 and an air suction nozzle 9, wherein the pressure plate 6 is arranged at the opening of the outer cover 1 through the fastener 7, the pressure plate 6 fixes the base 51 on the electrode seat 23, and preferably, the fastener 7 is a bolt.
The middle of the air suction nozzle 9 is of a hollow structure, one end of the air suction nozzle is fixedly connected with the base 51 in a laser welding mode, and the other end of the air suction nozzle is used for being connected with an air suction pump so as to extract air in the cavity inside the hemispherical resonator gyroscope.
The elastic spacing ring 8 is arranged on one side of the pressing plate 6 close to the electrode seat 23, a plurality of elastic grooves distributed at equal intervals are formed on the side wall of the ring body of the elastic spacing ring 8 along the circumferential direction of the elastic spacing ring, and two ends of the elastic spacing ring are elastically connected with the pressing plate 6 and the electrode seat 23.
Specifically, an annular step 233 is formed on the outer side wall of the electrode holder 23 close to the pressing plate 6, the elastic spacer ring 8 is sleeved on the outer side of the electrode holder 23, and two ends of the elastic spacer ring 8 are respectively abutted against the end surface of the annular step 233 and the inner side surface of the pressing plate 6.
The elastic space ring 8 is made of 65Mn high-elasticity materials and is used for fixing a quartz component part of the hemispherical resonator gyroscope, and meanwhile, the product can be ensured to be capable of adapting to the change of the environmental temperature.
For a clearer understanding of the present invention, the following description will be made of the installation process of the hemispherical resonator gyro of the present application:
ensuring that the PV value of the optical cement surface shape of the optical cement substrate 21 is less than 1/10 lambda through processing; the PV value of the optical cement surface shape of the harmonic oscillator 3 is less than 1/10 lambda, wherein the upper end surface 302 of the supporting rod 32 is an optical cement surface, and the parallelism between the lower end surface 301 of the hemispherical portion 31 and the upper end surface 302 of the supporting rod 32 is less than 0.001 mm; the upper and lower end surfaces (221, 222) of the support ring 22 are optical cement surfaces, the surface PV value is less than 1/10 lambda, and the parallelism is less than 0.001 mm; the PV value of the profile is less than 1/10 lambda; in addition, in the processing process, the distance H1 between the lower end surface 301 of the hemispherical part 31 and the upper end surface 302 of the supporting rod 32 and the distance H2 between the upper end surface and the lower end surface of the supporting ring 22 are accurately controlled, the range of a gap H between the lower end surface 301 of the hemispherical part 31 and the upper end surface of the electrode holder 23 after assembly is controlled to be 0.01 mm-0.03 mm, and meanwhile, the uniformity of the gap H between the lower end surface and the upper end surface is ensured to be less than 5%, then the photoresist surface of the photoresist substrate 21 and the upper end surface 302 of the supporting rod 32 are polished, and the photoresist surface of the photoresist substrate 21 and the upper end surface 221 of the supporting ring 22 are polished; and (3) polishing the lower end surface 222 of the support ring 5 and the polishing surface of the electrode holder, and finally, after the vacuum communicating vessel 5 is installed, fastening the pressing plate 6.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A hemisphere resonance gyro based on optical cement connection mode is characterized by comprising an outer cover, an optical cement fixing component, a harmonic oscillator, a getter and a vacuum communicating vessel;
one end of the outer cover is opened, and a cavity is formed in the outer cover;
the optical cement fixing assembly comprises an optical cement substrate, a support ring and an electrode holder, the optical cement substrate is arranged at the bottom of the cavity, the electrode holder is arranged at one end, close to the opening of the outer cover, of the cavity, the support ring is arranged between the optical cement substrate and the electrode holder, and two ends of the support ring are respectively connected with the optical cement substrate and the electrode holder in an optical cement mode;
the harmonic oscillator comprises a hemispherical part with an opening on an equatorial plane and a supporting rod which penetrates through the central axis of the hemispherical part, one end of the supporting rod, which is close to the opening of the hemispherical part, is arranged on the electrode seat, and the other end of the supporting rod is connected with the optical cement substrate by optical cement;
the getter is arranged at one end of the support rod, which is far away from the opening of the hemispherical part;
the vacuum communicating vessel is arranged on one side, far away from the optical cement substrate, of the electrode seat and is used for electrically communicating the inside of the cavity with the outside.
2. The hemispherical resonator gyroscope according to claim 1, wherein the supporting rod comprises a rod body located on a central axis of the hemispherical portion and an air suction platform located at one end of the rod body far away from the electrode holder, and a cylindrical accommodating groove for accommodating the getter is formed in the middle of the air suction platform.
3. The hemispherical resonator gyroscope based on the optical cement connection mode as claimed in claim 2, wherein a cross groove is formed on the end face of the air suction platform, the accommodating groove is located at the center of the cross groove, and the end of the cross groove extends to the side wall of the air suction platform.
4. The hemispherical resonator gyroscope based on optical cement connection mode according to claim 2, wherein the optical cement substrate and the support ring are quartz processing and molding structures, the getter is an induction heating activated getter, and an annular window is formed in the position of the housing corresponding to the air suction platform for activating the getter.
5. The hemispherical resonator gyroscope of claim 1, wherein the area shape of the connection among the optical cement substrate, the support ring and the electrode holder requires a PV value less than 1/10 λ, λ is the wavelength of interference light of the operating environment of the hemispherical resonator gyroscope, and the parallelism of the two end surfaces of the support ring is less than 0.001 mm.
6. The hemispherical resonator gyroscope based on the optical cement connection mode as claimed in claim 1, wherein the vacuum communicating vessel comprises a disc-shaped base and a plurality of contact pin assemblies which are circumferentially and uniformly distributed along the central axis of the base, each contact pin assembly comprises an insulating glass sleeve installed on the base, a shielding sleeve coaxially installed inside the insulating glass sleeve and a contact pin coaxially inserted and located inside the shielding sleeve, an electrode holder corresponds to an excitation detection electrode with a plurality of uniform distributions formed by end face metallization on one side of an opening of the hemispherical part, one end of the contact pin extends into the electrode holder and is electrically connected with the excitation detection electrode, the other end extends to the outside of the base, and a front placing plate is connected to the contact pin and used for excitation and signal detection of the harmonic oscillator.
7. The hemispherical resonator gyroscope based on the optical cement connection mode as claimed in claim 6, wherein electrode holes are formed at positions of the electrode holders corresponding to the contact pins, crown springs are arranged in the electrode holes, and the crown springs are connected to the end portions of the corresponding contact pins in a one-to-one correspondence manner and used for elastic connection between the contact pins and the electrode holders.
8. The hemispherical resonator gyroscope of claim 6, further comprising a pressure plate, an air suction nozzle and a fastener, wherein the pressure plate is mounted at the opening of the housing through the fastener, the pressure plate fixes the base to the electrode holder, and the air suction nozzle is mounted on the base and extends out from the other side of the pressure plate.
9. The hemispherical resonator gyroscope based on the optical cement connection mode according to claim 8, further comprising an elastic spacing ring, wherein the elastic spacing ring is installed on one side of the pressing plate close to the electrode holder, a plurality of elastic grooves distributed at equal intervals are formed on the side wall of the ring body of the elastic spacing ring along the circumferential direction of the side wall, and two ends of the elastic spacing ring are elastically connected with the pressing plate and the electrode holder.
10. The hemispherical resonator gyroscope based on the optical cement connection mode according to claim 9, wherein an annular step is formed on the outer side wall of the electrode holder close to the pressure plate, the elastic spacing ring is sleeved on the outer side of the electrode holder, and two ends of the elastic spacing ring are respectively abutted against the end surface of the annular step and the inner side surface of the pressure plate.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114754755A (en) * | 2022-06-15 | 2022-07-15 | 中国船舶重工集团公司第七0七研究所 | Vacuum exhaust packaging device and method for quartz hemispherical resonator gyroscope |
| CN115727828A (en) * | 2022-11-21 | 2023-03-03 | 中国船舶集团有限公司第七〇七研究所 | Device for detecting internal vacuum degree of resonant gyroscope and vacuum exhaust and packaging method |
| CN117190996A (en) * | 2023-09-08 | 2023-12-08 | 中国科学院长春光学精密机械与物理研究所 | Hemispherical resonant gyroscope based on stress-free bonding and assembly method thereof |
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| CN114754755A (en) * | 2022-06-15 | 2022-07-15 | 中国船舶重工集团公司第七0七研究所 | Vacuum exhaust packaging device and method for quartz hemispherical resonator gyroscope |
| CN115727828A (en) * | 2022-11-21 | 2023-03-03 | 中国船舶集团有限公司第七〇七研究所 | Device for detecting internal vacuum degree of resonant gyroscope and vacuum exhaust and packaging method |
| CN117190996A (en) * | 2023-09-08 | 2023-12-08 | 中国科学院长春光学精密机械与物理研究所 | Hemispherical resonant gyroscope based on stress-free bonding and assembly method thereof |
| CN117190996B (en) * | 2023-09-08 | 2024-04-16 | 中国科学院长春光学精密机械与物理研究所 | Hemispherical resonant gyroscope based on stress-free bonding and assembly method thereof |
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