CN114545285A - Multi-path high-voltage source array parallel calibration circuit and device - Google Patents
Multi-path high-voltage source array parallel calibration circuit and device Download PDFInfo
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Abstract
Aiming at the problems that the existing single-path metering calibration has low efficiency and long time and cannot meet the requirements of large-scale high-voltage source test facilities, the invention provides a multi-path high-voltage source array parallel calibration circuit by utilizing a matrix switch and a modular design. The device comprises a voltage regulator module, a first matrix switch, a second matrix switch, a third matrix switch, a straight-through module, a rated resistance module, a load module, a voltage divider module, a blocking capacitor module, a data acquisition module and a PC communication control module, wherein the straight-through module and the rated resistance module are connected between the first matrix switch and the second matrix switch in parallel, the load module, the voltage divider module and the blocking capacitor module are connected between the second matrix switch and the third matrix switch in parallel, the data acquisition module is connected with the third matrix switch, and the PC communication control module is connected with the modules. The PC communication control module controls the on-off of each module to realize multi-path parallel multi-parameter calibration, so that the efficiency is high, the calibration time is short, a new technical means is provided for field in-situ metering and parallel calibration of other large-scale device test systems, and the blank of the domestic high-voltage source array in-situ parallel calibration technology is filled. A calibration device is also provided based on the circuit.
Description
Technical Field
The invention belongs to the field of high-voltage source metering calibration, and particularly relates to a multi-path high-voltage source array parallel calibration circuit and a calibration device based on the calibration circuit.
Background
The high-voltage power supply is a direct-current high-voltage electronic instrument capable of providing certain energy output and is widely used in high-voltage tests and experiments. The common high-voltage power supply has two modes of digital display and pointer indication. The traditional power supply generally adopts a mode of combining a transformer, a rectifier and a voltage doubling circuit. The high-voltage source array is formed by the simultaneous output of multiple high-voltage sources (usually hundreds to thousands of high-voltage sources) generated by the parallel operation of multiple high-voltage sources
From the aspect of metering means, and from the view of published data and documents, no report on the aspect of directly adopting a special magnitude tracing technology aiming at a direct current high-voltage source array is seen at home and abroad. However, the metering guarantee mode develops along with the metering requirement, and the trend of the future metering guarantee development is clear. With the development of science and technology, a large number of special test equipment, ATE (automatic test equipment) and comprehensive test consoles come into use at home and abroad, and most of the equipment has the characteristics of complex performance, numerous parameters, high integration level, relatively large volume, difficulty in disassembly, incapability of separating from a working site and the like. The demands of the current metering guarantee on the aspects of field in-situ metering, comprehensive metering, automatic metering, maneuvering accompanying guarantee and the like are increasingly prominent besides the pursuit of high-precision technology, and the metering method of the equipment generally has strong pertinence, and different metering methods are needed for different measurement items and need to be researched one by one according to actual measurement demands. In the future, the measurement guarantee will pay more attention to the scientificity of the measurement means and results, and in the efficiency of the measurement guarantee, the timeliness and the reliability of the measurement guarantee are pursued, and in the measurement guarantee mode, the measurement guarantee mode is gradually moved from a laboratory to a field, and the measurement guarantee mode is moved from a controllable environment to a non-controllable environment.
According to the metering characteristics defined in the GJB 8879-2016 DC high voltage regulated power supply verification procedure, the items of the high voltage power supply array to be calibrated include DC voltage indication error, DC current indication error, load regulation rate, voltage regulation rate, ripple voltage and the like. For the reasons of instruments and equipment, the current metering method is single-path metering, and the main method is as follows: preparing various test instruments, loads, voltage dividing equipment and the like according to test requirements, measuring one equipment and one item each time, namely assembling a circuit according to a specific calibration item to finish measurement, then disassembling and assembling a test circuit of the next calibration item, and continuously circulating to finish circulating test of all parameters of the equipment on the next equipment until all calibration items of all equipment are finished.
However, the single-path metering mode has low working efficiency and long calibration time, and is difficult to meet the practical requirements of large-scale test facilities and systems on high efficiency, reliability and convenient metering. Generally, the number of high-voltage sources in the high-voltage source array is huge, if the high-voltage source array is subjected to the whole-project field verification according to the above one-way metering method, each high-voltage source is provided with about 40 verification points, taking 1080-way high-voltage sources as an example, the verification time of a single high-voltage source is 0.3 hour, 324 hours, namely 41 working days, are needed under the condition that standard equipment is completely out of rest, and the daily and large-scale test progress is influenced by metering to a certain extent.
Therefore, it is desirable to develop an in-situ, efficient and convenient calibration circuit or device to meet the measurement calibration requirements of the conventional array-type high-voltage power supply. Therefore, the research and the research of a multi-channel (up to 36 channels) high-voltage source field parallel calibration technology are carried out by taking a high-voltage source array as a research object.
Disclosure of Invention
In view of this, the present disclosure provides a parallel calibration circuit and a parallel calibration device for a multi-path high voltage source array:
a multi-path high-voltage source array parallel calibration circuit comprises a first matrix switch, a second matrix switch, a third matrix switch, a data acquisition module, a voltage regulator module, a direct connection module, a rated resistance module, a load module, a voltage divider module, a direct connection capacitor module and a PC control communication module; the input end of the through module is connected with the first matrix switch, and the output end of the through module is connected with the second matrix switch; the input end of the rated resistance module is connected with the first matrix switch, and the output end of the rated resistance module is connected with the second matrix switch; the direct connection module and the rated resistance module are connected to different switch ports; the input end of the load module is connected with the second matrix switch, and the output end of the load module is connected with the third matrix switch; the input end of the voltage division module is connected with the second matrix switch, and the output end of the voltage division module is connected with the third matrix switch; the input end of the blocking capacitor module is connected with the second matrix switch, and the output end of the blocking capacitor module is connected with the third matrix switch; the load module, the voltage division module and the blocking capacitor module are connected to different switch ports; the input end of the data acquisition module is connected with the third matrix switch, and the data acquisition module is used for acquiring signals of parameters of each project; the PC control communication module is connected with the first matrix switch, the second matrix switch, the third matrix switch, the data acquisition module, the voltage regulator module, the direct connection module, the rated resistance module, the load module, the voltage divider module and the direct current blocking capacitor module, and selectively controls the on-off of each module to realize the parameter calibration of each item of the high voltage source.
Preferably, when the direct-current voltage indicating error calibration is carried out, the PC control communication module selects the first matrix switch, the direct-current module, the second matrix switch, the voltage divider module, the third matrix switch and the data acquisition module to form a direct-current voltage indicating error calibration circuit, and the direct-current voltage indicating error calibration is completed; the voltage divider module has a voltage dividing ratio of Vin/Vout being n/1, n being 500-1000, and the structure between the input end and the output end of the voltage divider module is as follows: the input end is sequentially connected with a high-voltage arm resistor R in series1And a low-voltage arm resistor R2Low voltage arm resistance R2The other end of the first and second electrodes is grounded; high voltage arm resistor R1And a low-voltage arm resistor R2Are respectively connected with the capacitor C1And a capacitor C2In parallel, the high-voltage arm resistor R1And a low-voltage arm resistor R2Is R1/R2N/1, capacitance C1And a capacitor C2Is C1/C21/n, and a capacitance C1And a capacitor C2The characteristic of 5kV high voltage resistance needs to be met; the high-voltage arm resistor R1Low voltage arm resistor R2Capacitor C1Capacitor C2An operational amplifier with the gain of 1 is connected between the common end of the voltage divider module and the output end of the voltage divider module, the input resistance of the operational amplifier is more than or equal to 10G omega, and the bias current of the operational amplifier is in a picoampere level.
Preferably, when the direct current indicating value error calibration is performed, the PC controls the communication module to select the first matrix switch, the direct current module, the second matrix switch, the load module, the third matrix switch, and the data acquisition module to form a direct current indicating value error calibration circuit.
Preferably, when the load adjustment rate under the full-load working condition is calibrated, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch and the data acquisition module to form a calibration circuit of the load adjustment rate under the full-load working condition; when the calibration of the load regulation rate under the no-load working condition is carried out, the PC control communication module selects the first matrix switch, the direct-connection module, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch and the data acquisition module to form a calibration circuit of the load regulation rate under the full-load working condition.
Preferably, when the voltage regulation rate is calibrated, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch, the data acquisition module and the voltage regulator module to form a voltage regulation rate calibration circuit; the input end of the voltage regulator module is connected with a mains supply and used for increasing or decreasing the voltage, and the output end of the voltage regulator module is connected with a calibration object.
Preferably, when the ripple voltage is calibrated, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the blocking capacitor module, the third matrix switch and the data acquisition module to form a ripple voltage calibration circuit; the structure between the input end and the output end of the blocking capacitor module is as follows: a capacitor C is sequentially connected in series between the input end and the output end of the blocking capacitor module3And an operational amplifier, the capacitor C3A resistor R is connected between the common end of the operational amplifier and the ground3(ii) a The resistor R3A resistance in the megaohm range, the capacitor C3Is a nano-scale capacitor, the capacitor C3Can resist high voltage of more than 5 kV.
Preferably, the calibration circuit is a multi-path parallel calibration circuit.
A multi-path high-voltage source array parallel calibration device comprises one or more calibration circuits.
The working process of the invention is as follows: the high-voltage source array to be tested is connected with the multi-path high-voltage source array parallel calibration device, wherein the PC control communication module selects different functional modules to sequentially construct different calibration circuits, and the data acquisition module acquires data to realize final calibration of different calibration items.
The invention has the beneficial effects that: (1) the whole metering efficiency is obviously improved, and the metering cost is greatly reduced. Taking a 1080-path high-voltage source array of 5kV as an example, 41 working days are needed for completing the measurement of the 1080-path high-voltage source array in a traditional mode, and the working days are nearly two months; after the method is implemented, the metering guarantee time can be shortened to be within 1 week, and the quality and the efficiency are improved obviously. (2) The invention can greatly reduce the boosting of the high-voltage source array in coordination with the metering, reduce the possibility of technical state deviation, ensure the normal service life of the instrument and equipment and save unnecessary expenditure. (3) The invention can be applied to the field and the laboratory of a part of high-pressure source equipment, realizes in-situ, multipath parallel and rapid measurement, fills the blank of the field related to in-situ measurement of the domestic large-scale test system, and has better popularization value.
Drawings
FIG. 1 is a schematic diagram of an internal circuit of the high voltage source array calibration apparatus;
FIG. 2 is a schematic circuit diagram of a voltage divider module;
FIG. 3 is a schematic diagram of a one-way voltage divider circuit;
FIG. 4 is a schematic circuit diagram of a DC blocking capacitor module;
FIG. 5 is a schematic diagram of a single-path DC blocking capacitor circuit
In the figure: 1. the circuit comprises a first matrix switch, 2, a second matrix switch, 3, a third matrix switch, 4, a data acquisition module, 5, a voltage regulator module, 6.36 high-voltage sources, 7, a direct connection module, 8, a rated resistance module, 9, a load module, 10, a voltage divider module and 11, a direct-blocking capacitor moduleBlock, 12 PC control communication module, 13 ground, 101 high voltage arm resistance R1And 102 low-voltage arm resistor R 2103. capacitance C1And 104. capacitor C2105 operational amplifier 111 capacitor C3112 operational amplifier 113 resistor R3。
Detailed Description
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creating any labor. The present invention will be described in detail with reference to the accompanying drawings.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the following detailed description and accompanying drawings.
Example one
Take 1080 path 5kV high voltage source array calibration as an example.
A parallel calibration device for a multi-path high voltage source array is designed, the structure of which is shown in figure 1, and the device comprises: the device comprises a first matrix switch 1, a second matrix switch 2, a third matrix switch 3, a data acquisition module 4, a voltage regulator module 5, a direct connection module 7, a rated resistance module 8, a load module 9, a voltage divider module 10, a blocking capacitor module 11 and a PC control communication module 12. The ports 1 to 36 of the first matrix switch 1 are connected with the 36 paths of the 1080 paths of high-voltage source arrays to be tested, the ports 37 to 42 of the first matrix switch 1 are connected with the 6 input ends of the pass-through module 7, and the 6 output ends of the pass-through module 7 are connected with the ports 49 to 54 of the second matrix switch 2; 43-48 ports of the first matrix switch 1 are connected with 6 input ends of the rated resistance module 8, and 6 output ends of the rated resistance module 8 are connected with No. 55-60 ports of the second matrix switch 2; 6 input ends of the load module 9 are connected with ports 61-66 of the second matrix switch 2, and 6 output ends of the load module 9 are connected with ports 79-84 of the third matrix switch 3; 6 input ends of the voltage division module 10 are connected with ports 67-72 of the second matrix switch 2, and 6 output ends of the voltage division module 10 are connected with ports 85-90 of the third matrix switch 3; 6 input ends of the blocking capacitor module 11 are connected with ports 73-78 of the second matrix switch 2, and 6 output ends of the blocking capacitor module 11 are connected with ports 91-96 of the third matrix switch 3; the input end of the data acquisition module 4 is connected with a port 97-102 of the third matrix switch 3, and the data acquisition module is used for acquiring signals of various project parameters. The PC control communication module 12 is connected with the first matrix switch 1, the second matrix switch 2, the third matrix switch 3, the data acquisition module 4, the voltage regulator module 5, the through module 7, the rated resistance module 8, the load module 9, the voltage divider module 10 and the blocking capacitor module 11, and selectively controls the on-off of each module to construct a calibration circuit, so that parameter calibration of each item of the high-voltage source is realized.
The specific calibration items are as follows: the method comprises the steps of direct current voltage indication error calibration, direct current indication error calibration, load regulation rate calibration under a full-load or no-load working condition, voltage regulation rate calibration and ripple voltage calibration. When the equipment is connected, the voltage regulator module 5 is firstly connected with the commercial power, and then the output voltage of the voltage regulator module 5 is applied to the high voltage source 6 to be measured.
When the direct-current voltage indicating value error calibration is carried out, the PC control communication module 12 selects the first matrix switch 1, the through module 7, the second matrix switch 2, the voltage divider module 10, the third matrix switch 3 and the data acquisition module 4 to form a direct-current voltage indicating value error calibration circuit, so that the direct-current voltage indicating value error calibration is realized; the specific circuit structure of the voltage divider module 10 is shown in fig. 2 and fig. 3, wherein the voltage dividing ratio of the voltage divider module is Vin/Vout 1000/1. Taking one path as an example, the circuit structure between the input end and the output end of the voltage divider module 10 is as follows: the input end is sequentially connected with a high-voltage arm resistor R in series 1101 and low-voltage arm resistor R 2102, low arm resistance R 2102 to a voltage division ratio of 1000/1, wherein the high arm resistor R is connected to ground 1101 and low-voltage arm resistor R 2102 is R1/R21000/1. Because the high-voltage arm resistance is distributed in the parasitic capacitance of the high-voltage arm and the low-voltage armRipple voltage in high voltage is divided, and actually parasitic capacitors on the high-voltage arm and the low-voltage arm are equal in size, namely capacitive reactance on the high-voltage arm and the low-voltage arm are equal, so that the ripple voltage input into the direct current high voltage is evenly distributed on the high-voltage arm and the low-voltage arm, a large ripple voltage is superposed on the direct current voltage output by the low-voltage arm, the Vin/Vout cannot accurately reach 1000/1, and the measurement accuracy is to be improved. For this purpose, the resistance R is arranged in the high-voltage arm 1101 and low-voltage arm resistor R 2102 are respectively connected with a capacitor C 1103 and a capacitor C 2104 are connected in parallel and a capacitor C 1103 and a capacitor C 2104 is C1/C21/1000, and a capacitance C 1103 and a capacitor C 2104 need to satisfy the characteristic of resisting a high voltage of 5 kV. In order to test the data acquisition module 4 for better test signals, the resistance R is connected to the high-voltage arm 1101. Low voltage arm resistor R 2102. Capacitor C 1103. Capacitor C2An operational amplifier 105 with the gain of 1 is further connected between the common end of the voltage divider module 104 and the output end of the voltage divider module 10, the input resistance of the operational amplifier 105 is more than or equal to 10G omega, and the bias current of the operational amplifier 105 is in a pico-ampere level, namely a JFET type operational amplifier.
When the direct current indicating value error calibration is carried out, the PC control communication module 12 selects the first matrix switch 1, the through module 7, the second matrix switch 2, the load module 9, the third matrix switch 3 and the data acquisition module 4 to form a direct current indicating value error calibration circuit.
When the load regulation rate under the full-load working condition is calibrated, the PC control communication module 12 selects the first matrix switch 1, the rated resistance module 8, the second matrix switch 2, the voltage divider module 5, the third matrix switch 3 and the data acquisition module 4 to form a calibration circuit of the load regulation rate under the full-load working condition; when the load regulation rate under the no-load working condition is calibrated, the PC control communication module 12 selects the first matrix switch 1, the through module 7, the rated resistance module 8, the second matrix switch 2, the voltage divider module 5, the third matrix switch 3 and the data acquisition module 4 to form a calibration circuit of the load regulation rate under the full-load working condition.
When the voltage regulation rate is calibrated, the PC control communication module 12 selects the first matrix switch 1, the rated resistance module 8, the second matrix switch 2, the voltage divider module 5, the third matrix switch 3 and the data acquisition module 4, and forms a voltage regulation rate calibration circuit together with the voltage regulator module 5; the output voltage of the voltage regulator module 5 is regulated to 198V and 242V, and the voltage regulation rate calibration is completed.
When the ripple voltage calibration is carried out, the PC control communication module 12 selects the first matrix switch 1, the rated resistance module 8, the second matrix switch 2, the blocking capacitor module 11, the third matrix switch 3 and the data acquisition module 4 to form a ripple voltage calibration circuit; the circuit structure of the blocking capacitor module 11 is shown in fig. 4, taking a single circuit as an example, the structure between the input end and the output end is as follows: a capacitor C is sequentially connected in series between the input end and the output end 3111 and an operational amplifier 112, said capacitor C3A resistor R is connected between the common terminal of 111 and the operational amplifier 112 and the ground 3113. Because the ripple has a high-frequency characteristic, in order to accurately measure the ripple signal in the input direct current high voltage, the dc blocking circuit should have a high-pass filtering characteristic at first, and the resonant frequency of the high-pass filter needs to be as small as possible, so as to ensure that the ripple signal of each frequency band except for direct current can smoothly pass through the filter, thereby accurately measuring the ripple signal at the rear end. In order to minimize the resonance frequency, first of all the resistor R 3113 should be sufficiently large, where the resistance R is3113A resistance in the megaohm range should be chosen, but a capacitance C 3111 cannot be large, because the smaller the capacitance, the higher the operating frequency, and thus the higher the measured ripple signal frequency, the more accurate the ripple measurement, and the capacitor C 3111 is nano-grade capacitor and can resist high voltage above 5 kV. Here, the operational amplifier 112 is the same as the operational amplifier 105.
When the 36 high-voltage sources connected to the matrix switch 1 are calibrated, the 1-36 high-voltage sources are divided into one group according to every 6 paths, six groups of high-voltage sources are tested in sequence, and the high-voltage sources in each group are tested or calibrated in sequence for each item or parameter. After the 36 high-voltage sources are calibrated, the next 36 high-voltage sources are calibrated until the 1080 high-voltage sources are calibrated.
Wherein the selected range of Vin/Vout for performing the DC voltage indication error calibration can be (500- & ltSUB- & gt 1000- & lt/SUB- & gt)/1, and the grounding of the whole circuit or device can be designed as the grounding of the whole calibration circuit or device.
Claims (8)
1. A multi-path high-voltage source array parallel calibration circuit is characterized by comprising a first matrix switch, a second matrix switch, a third matrix switch, a data acquisition module, a voltage regulator module, a direct connection module, a rated resistance module, a load module, a voltage divider module, a direct connection capacitor module and a PC control communication module;
the input end of the through module is connected with the first matrix switch, and the output end of the through module is connected with the second matrix switch; the input end of the rated resistance module is connected with the first matrix switch, and the output end of the rated resistance module is connected with the second matrix switch; the direct connection module and the rated resistance module are connected to different switch ports;
the input end of the load module is connected with the second matrix switch, and the output end of the load module is connected with the third matrix switch; the input end of the voltage division module is connected with the second matrix switch, and the output end of the voltage division module is connected with the third matrix switch; the input end of the blocking capacitor module is connected with the second matrix switch, and the output end of the blocking capacitor module is connected with the third matrix switch; the load module, the voltage division module and the blocking capacitor module are connected to different switch ports;
the input end of the data acquisition module is connected with the third matrix switch, and the data acquisition module is used for acquiring signals of parameters of each project;
the PC control communication module is connected with the first matrix switch, the second matrix switch, the third matrix switch, the data acquisition module, the voltage regulator module, the direct connection module, the rated resistance module, the load module, the voltage divider module and the direct current blocking capacitor module, and selectively controls the on-off of each module to realize the parameter calibration of each item of the high voltage source.
2. The multiple high pressure source array parallelism of claim 1The calibration circuit is characterized in that when the direct-current voltage indicating value error calibration is carried out, the PC control communication module selects the first matrix switch, the direct-current module, the second matrix switch, the voltage divider module, the third matrix switch and the data acquisition module to form the direct-current voltage indicating value error calibration circuit, and the direct-current voltage indicating value error calibration is completed; the voltage divider module has a voltage dividing ratio of Vin/Vout being n/1, n being 500-1000, and the structure between the input end and the output end of the voltage divider module is as follows: the input end is sequentially connected with a high-voltage arm resistor R in series1And a low-voltage arm resistor R2Low voltage arm resistance R2The other end of the first and second electrodes is grounded; high voltage arm resistor R1And a low-voltage arm resistor R2Are respectively connected with the capacitor C1And a capacitor C2In parallel, the high-voltage arm resistor R1And a low-voltage arm resistor R2Is R1/R2N/1, capacitance C1And a capacitor C2Has a ratio of C1/C21/n, and a capacitance C1And a capacitor C2The characteristic of 5kV high voltage resistance needs to be met; the high-voltage arm resistor R1Low voltage arm resistor R2Capacitor C1Capacitor C2An operational amplifier with the gain of 1 is connected between the common end of the voltage divider module and the output end of the voltage divider module, the input resistance of the operational amplifier is more than or equal to 10G omega, and the bias current of the operational amplifier is in a picoampere level.
3. The multi-path high-voltage source array parallel calibration circuit according to claim 1, wherein when the direct current indicating error calibration is performed, the PC control communication module selects the first matrix switch, the direct-current module, the second matrix switch, the load module, the third matrix switch and the data acquisition module to form the direct current indicating error calibration circuit.
4. The multi-path high-voltage source array parallel calibration circuit according to claim 1, wherein when calibrating the load regulation rate under a full-load working condition, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch and the data acquisition module to form the calibration circuit of the load regulation rate under the full-load working condition; when the calibration of the load regulation rate under the no-load working condition is carried out, the PC control communication module selects the first matrix switch, the direct-connection module, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch and the data acquisition module to form a calibration circuit of the load regulation rate under the full-load working condition.
5. The multi-path high-voltage source array parallel calibration circuit according to claim 1, wherein when voltage regulation rate calibration is performed, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the voltage divider module, the third matrix switch, the data acquisition module and the voltage regulator module to form the voltage regulation rate calibration circuit; the input end of the voltage regulator module is connected with a mains supply and used for increasing or decreasing the voltage, and the output end of the voltage regulator module is connected with a calibration object.
6. The multi-path high-voltage source array parallel calibration circuit according to claim 1, wherein when ripple voltage calibration is performed, the PC control communication module selects the first matrix switch, the rated resistance module, the second matrix switch, the blocking capacitor module, the third matrix switch and the data acquisition module to form the ripple voltage calibration circuit; the structure between the input end and the output end of the blocking capacitor module is as follows: a capacitor C is sequentially connected in series between the input end and the output end of the blocking capacitor module3And an operational amplifier, the capacitor C3A resistor R is connected between the common end of the operational amplifier and the ground3(ii) a The resistor R3Is a megaohm-level resistor, the capacitor C3Is a nano-scale capacitor, the capacitor C3Can resist high voltage of more than 5 kV.
7. The multi-path high-voltage source array parallel calibration circuit according to any one of claims 1 to 6, wherein the calibration circuit is a multi-path parallel calibration circuit.
8. A multi-channel high voltage source array parallel calibration device, wherein the calibration device comprises the calibration circuit of any one or more of claims 1 to 6.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116299125A (en) * | 2023-03-31 | 2023-06-23 | 深圳市辰卓科技有限公司 | Parameter calibration method, device and system of ATE equipment |
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| CN116299125A (en) * | 2023-03-31 | 2023-06-23 | 深圳市辰卓科技有限公司 | Parameter calibration method, device and system of ATE equipment |
| CN116299125B (en) * | 2023-03-31 | 2024-04-05 | 深圳市辰卓科技有限公司 | Parameter calibration method, device and system of ATE equipment |
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