CN114523419A - Grinding fluid storage and pumping assembly and using method of circulating grinding machine - Google Patents
Grinding fluid storage and pumping assembly and using method of circulating grinding machine Download PDFInfo
- Publication number
- CN114523419A CN114523419A CN202210141957.2A CN202210141957A CN114523419A CN 114523419 A CN114523419 A CN 114523419A CN 202210141957 A CN202210141957 A CN 202210141957A CN 114523419 A CN114523419 A CN 114523419A
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- grinding
- fluid
- liquid
- storage cavity
- circulating
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000012530 fluid Substances 0.000 title claims abstract description 138
- 238000000227 grinding Methods 0.000 title claims abstract description 132
- 238000003860 storage Methods 0.000 title claims abstract description 78
- 238000000034 method Methods 0.000 title claims abstract description 45
- 238000005086 pumping Methods 0.000 title claims abstract description 21
- 239000007788 liquid Substances 0.000 claims abstract description 116
- 238000004140 cleaning Methods 0.000 claims abstract description 28
- 230000008569 process Effects 0.000 claims abstract description 18
- 238000007599 discharging Methods 0.000 claims abstract description 12
- 239000002699 waste material Substances 0.000 claims abstract description 11
- 238000003756 stirring Methods 0.000 claims description 24
- 239000002002 slurry Substances 0.000 claims description 23
- 229910052594 sapphire Inorganic materials 0.000 claims description 11
- 239000010980 sapphire Substances 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000007246 mechanism Effects 0.000 claims description 7
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 238000005498 polishing Methods 0.000 description 14
- 239000000758 substrate Substances 0.000 description 6
- 239000011550 stock solution Substances 0.000 description 5
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 3
- 235000017491 Bambusa tulda Nutrition 0.000 description 3
- 241001330002 Bambuseae Species 0.000 description 3
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 3
- 239000011425 bamboo Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 229910052580 B4C Inorganic materials 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The invention relates to the field of circulating grinding machines, and discloses a grinding fluid storage and pumping assembly and a using method of the circulating grinding machine, wherein the circulating grinding machine comprises a machine table and a grinding fluid storage and pumping assembly, the grinding fluid storage and pumping assembly comprises a grinding fluid cylinder (1), the grinding fluid cylinder (1) is provided with a fluid storage cavity for storing grinding fluid and a fluid discharge port (4) communicated with the fluid storage cavity, and the fluid discharge port (4) is arranged at a position, close to the bottom, of the grinding fluid cylinder (1); the using method comprises a process of cleaning the grinding fluid cylinder (1), and the process comprises the following steps: s11, opening the liquid discharge port (4) and discharging grinding liquid in the liquid storage cavity; and S12, filling a cleaning solution into the liquid storage cavity, and discharging the cleaned waste liquid through the liquid discharge port (4). The invention can discharge the grinding fluid and the cleaning waste liquid in the grinding fluid cylinder through the liquid outlet, does not need to manually carry devices such as a circulating pump motor on the grinding fluid cylinder, and can easily finish the cleaning work.
Description
Technical Field
The invention relates to a circulating grinder, in particular to a grinding fluid storage pumping assembly of the circulating grinder. In addition, the invention also relates to a using method of the circulating grinder.
Background
With the rapid increase of the demand of high-brightness LEDs in the field of lighting engineering, the development and application of the sapphire substrate material manufacturing industry are driven. The sapphire crystal has excellent mechanical property and good thermal property, and is a semiconductor GaN/Al2O3Light emitting diode, large scale integrated circuit SOI and SOS, superconductive nanometer structure film and other ideal substrate material. The single crystal sapphire is used as the substrate material which is most widely applied to the GaN-based light emitting diode, the surface quality of the wafer directly determines the epitaxial quality, and further the luminous performance and the service life of the final LED product are influenced, so that the sapphire substrate is required to be processed to show high integrity, and the sapphire substrate is required to be processed to show roughness, no scratch, no dislocation, low amorphous phase change and subsurface damage, so that the grinding process is indispensable for obtaining the high-quality sapphire wafer. Sapphire has many difficulties in processing due to its high hardness and brittleness.
The sapphire substrate polishing mainly includes cyclic polishing and inline polishing. Wherein, the circulation grinding process comprises the following steps: starting up and checking point → adding grinding liquid → measuring the grinding disc and the planetary wheel → grinding the wafer. However, after the grinding is completed, the grinding fluid cylinder and the grinding machine table need to be cleaned, and a cleaning person is generally required to remove the circulating pump motor and the stirring motor on the grinding fluid cylinder, so that the cleaning process is time-consuming and labor-consuming, and collision and injury risks can be caused.
Disclosure of Invention
The invention aims to overcome the problem of inconvenient cleaning of a grinding fluid cylinder of a circulating grinding machine in the prior art, and provides a grinding fluid storage and pumping assembly for the circulating grinding machine and a using method of the circulating grinding machine.
In order to achieve the above object, the present invention provides a slurry storage and pumping assembly for a circulation grinding machine, including a slurry barrel having a slurry storage chamber for storing slurry, and a liquid outlet pipe, a circulation liquid inlet pipe and a liquid outlet port respectively communicating with the slurry storage chamber, wherein the liquid outlet port is disposed near the bottom of the slurry barrel so as to be able to discharge liquid in the slurry storage chamber.
Preferably, the grinding fluid cylinder is provided with a circulating pump motor and a circulating pump which is in transmission connection with the circulating pump motor and located in the fluid storage cavity, the circulating pump can pump the fluid in the fluid storage cavity to a machine table of the circulating grinding machine through the fluid outlet pipe, and the fluid on the machine table is allowed to flow back to the fluid storage cavity through the circulating fluid inlet pipe.
Preferably, a first valve is arranged on a pipe section of the circulating liquid inlet pipe communicated to the liquid storage cavity, and a liquid discharge pipe provided with a second valve is connected to the upstream side of the first valve, so that the liquid on the machine table can be selectively controlled to flow back into the liquid storage cavity through the circulating liquid inlet pipe or be discharged through the liquid discharge pipe through the first valve and the second valve.
Preferably, the grinding fluid cylinder is provided with a stirring motor and a stirring mechanism which is in transmission connection with the stirring motor and is positioned in the liquid storage cavity.
Preferably, the liquid outlet is provided with a liquid outlet valve.
The invention provides a using method of a circulating grinder, the circulating grinder comprises a machine table and a grinding fluid storage and pumping assembly, the grinding fluid storage and pumping assembly comprises a grinding fluid cylinder, the grinding fluid cylinder is provided with a fluid storage cavity for storing grinding fluid, and a fluid outlet pipe, a circulating fluid inlet pipe and a fluid outlet which are respectively communicated with the fluid storage cavity, and the fluid outlet is arranged at a position close to the bottom of the grinding fluid cylinder, wherein the using method comprises a step of cleaning the grinding fluid cylinder, and the step comprises the following steps: s11, opening the liquid discharge port, and discharging the grinding liquid in the liquid storage cavity; and S12, filling cleaning fluid into the liquid storage cavity, and discharging cleaned waste liquid through the liquid discharge port.
Preferably, a first valve is arranged on a pipe section of the circulating liquid inlet pipe communicated to the liquid storage cavity, a liquid discharge pipe provided with a second valve is connected to the upstream side of the first valve, the using method further comprises a procedure of cleaning the machine table, and the procedure comprises the following steps: s21, closing the first valve and opening the second valve; and S22, cleaning the machine table, and discharging cleaned waste liquid through the liquid discharge pipe.
Preferably, the grinding fluid cylinder is provided with a circulating pump motor and a circulating pump which is in transmission connection with the circulating pump motor and is positioned in the liquid storage cavity, the using method comprises a grinding process on the machine table, and the grinding process comprises the following steps: and starting the circulating pump motor to enable the circulating pump to pump the grinding fluid in the fluid storage cavity to the machine table through the fluid outlet pipe, and allowing the grinding fluid on the machine table to flow back to the fluid storage cavity through the circulating fluid inlet pipe.
Preferably, the grinding fluid cylinder is provided with a stirring motor and a stirring mechanism which is connected to the stirring motor in a transmission manner and is located in the liquid storage cavity, and the grinding process on the machine table further comprises: and starting the stirring motor to stir the grinding fluid in the liquid storage cavity through the stirring mechanism.
Preferably, the step of grinding on the machine table is used for grinding sapphire.
Through the technical scheme, the grinding fluid storage and pumping assembly can be used for discharging and recycling the grinding fluid in the grinding fluid cylinder through the fluid outlet after grinding is finished, then cleaning fluid is injected into the fluid storage cavity of the grinding fluid storage assembly for cleaning, the cleaned waste fluid can be directly discharged through the fluid outlet, devices such as a circulating pump motor on the grinding fluid cylinder do not need to be manually carried, cleaning work can be easily finished, and use convenience is effectively improved.
Drawings
FIG. 1 is a schematic structural view of a slurry storage pumping assembly for a circulation mill according to a preferred embodiment of the present invention;
fig. 2 is a flow chart of a method of using the recycling grinder according to a preferred embodiment of the present invention.
Description of the reference numerals
1-grinding fluid cylinder; 2-a liquid outlet pipe; 3-circulating a liquid inlet pipe; 4-a liquid discharge port; 5-circulating pump motor; 6-a first valve; 7-a second valve; 8-a liquid discharge pipe; 9-stirring motor.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
In the present invention, the use of directional terms such as "upper, lower, left, right" generally means upper, lower, left, right as viewed with reference to the accompanying drawings, unless otherwise specified; "inner and outer" refer to the inner and outer relative to the profile of the components themselves.
Referring to fig. 1, a slurry storage pump assembly for a circulation grinder according to a preferred embodiment of the present invention includes a slurry cartridge 1, and the slurry cartridge 1 has a reservoir chamber to store a slurry (slurry) for grinding, such as a boron carbide solution. The grinding fluid cylinder 1 is provided with a liquid outlet pipe 2, a circulating liquid inlet pipe 3 and a liquid outlet 4, wherein the liquid outlet pipe 2 is used for supplying grinding fluid in a liquid storage cavity to a machine table of the circulating grinding machine in the grinding process, and the grinding fluid on the machine table can flow back to the liquid storage cavity through the circulating liquid inlet pipe 3. The liquid discharge port 4 is provided at a position near the bottom of the polishing liquid cartridge 1 to discharge the liquid in the liquid storage chamber. For example, the liquid discharge port 4 may be provided on the side wall of the polishing liquid cartridge 1 and adjacent to the bottom wall thereof, or may be provided directly on the bottom wall.
Therefore, after the polishing is completed or in other situations where the polishing fluid cartridge 1 needs to be cleaned, the polishing fluid in the polishing fluid cartridge 1 can be directly discharged from the liquid discharge port 4, for example, discharged into a recovery bucket for recovery. After the liquid storage cavity is emptied, cleaning liquid (such as clear water) is injected into the liquid injection cavity and the liquid storage cavity is cleaned, and the cleaned waste liquid can be directly discharged through the liquid outlet 4. In this process, need not the device that the manpower was carried on the lapping liquid section of thick bamboo 1 for example for circulating pump motor 5, can easily accomplish cleaning work, effectively improved the convenience in utilization. Wherein the liquid discharge port 4 can be closed by a closing member, and the closing member is removed at a proper time to allow the liquid in the polishing liquid cartridge 1 to be discharged through the liquid discharge port 4. In a preferred embodiment, the drain port 4 may be provided with a drain valve.
The slurry storage and pumping assembly of the present invention may have associated components that meet the basic requirements of normal polishing. In the illustrated preferred embodiment, the polishing slurry cartridge 1 includes a cartridge body and a cartridge cover provided on the cartridge body, and the cartridge cover can be at least partially opened to allow the polishing slurry or the cleaning solution to be injected in an opened state.
Install circulating pump motor 5 on the cover of a grinding fluid section of thick bamboo 1, this circulating pump motor 5 transmission is connected with the circulating pump that stretches into to the stock solution intracavity, and this circulating pump can connect in drain pipe 2, from this, start circulating pump motor 5, can pass through the board of drain pipe 2 pump sending to circulation grinding machine with the grinding fluid of stock solution intracavity by its driven circulating pump to the liquid on the permission board flows back to the stock solution intracavity through circulation feed liquor pipe 3, forms the circulation circuit of grinding fluid.
Generally, to increase the grinding efficiency, the grinding fluid may be provided as a suspension with particulate matter. In order to make the grinding fluid components pumped to the machine station uniform, the stirring motor 9 can be further installed on the grinding fluid cylinder 1 (cylinder cover), and the stirring motor 9 can drive the stirring mechanism to stir the grinding fluid in the liquid storage cavity, so that the solid components in the grinding fluid are pumped to the grinding position, and the grinding efficiency is ensured.
In a preferred embodiment, as shown in fig. 1, a first valve 6 may be provided on the section of the circulation inlet pipe 3 connected to the reservoir of the slurry cartridge 1, and a drain pipe 8 provided with a second valve 7 may be connected to the upstream side of the first valve 6. The first valve 6 and the second valve 7 may here alternatively be ball valves or other openable and closable valves. Therefore, by controlling the open and close states of the first valve 6 and the second valve 7, the liquid on the machine table can selectively flow back into the liquid storage cavity through the circulating liquid inlet pipe 3 or be discharged through the liquid discharge pipe 8. In the grinding process, the first valve 6 is opened, the second valve 7 is closed, grinding fluid can circularly flow between the grinding fluid cylinder 1 and the machine table through the liquid outlet pipe 2 and the circulating liquid inlet pipe 3, and the grinding fluid returned by the machine table enters the liquid storage cavity of the grinding fluid cylinder 1; when the cleaning machine is used, the first valve 6 is closed, the second valve 7 is opened, and waste liquid generated by the cleaning machine is discharged through the liquid discharge pipe 8 without affecting the liquid storage cavity of the grinding liquid cylinder 1. This is favorable to storing separately when lapping liquid in this stock solution chamber and washs the board, has improved the convenience of use that the machine was ground in the circulation.
Another aspect of the present invention is to provide a method of using a circulation mill as shown in fig. 2, and the advantages of the slurry storage pumping assembly described above will be better understood from the following description of the method of use. It should be noted that while the preferred embodiment shown describes the use of the recycle mill in a relatively complete use step, the use of the present invention does not include all of the process steps to the fullest extent.
Firstly, when starting up and grinding are needed, grinding fluid is added into a liquid storage cavity through a top flip cover of a grinding fluid cylinder; then through circulation grinding machine program control, start circulating pump motor and agitator motor work, from this, the lapping liquid in the stock solution intracavity is ground by the pump sending to the board through the drain pipe, and the lapping liquid on the board flows back to in the lapping liquid section of thick bamboo through circulation feed liquor pipe.
After the grinding is completed, the grinding fluid cylinder needs to be cleaned. Therefore, the following procedure of cleaning the grinding fluid cylinder is executed, and the method specifically comprises the following steps: s11, opening a liquid discharge port of the grinding liquid cylinder, and discharging the grinding liquid in the liquid storage cavity, such as into a recovery barrel; and S12, after the grinding fluid is emptied, filling cleaning fluid into the fluid storage cavity, cleaning the grinding fluid cylinder, and discharging the cleaned waste fluid through the fluid outlet 4.
After the polishing slurry cylinder is cleaned, or in other cases, the machine table may be cleaned, and for this purpose, a process of cleaning the machine table may be performed, the process including the following steps: s21, closing the first valve 6 and opening the second valve 7; and S22, cleaning the machine table, and discharging the cleaned waste liquid through a liquid discharge pipe 8.
The method for using the circulating grinding machine can grind a workpiece such as sapphire on a machine table.
The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited thereto. Within the scope of the technical idea of the invention, numerous simple modifications can be made to the technical solution of the invention, including combinations of the individual specific technical features in any suitable way. The invention is not described in detail in order to avoid unnecessary repetition. Such simple modifications and combinations should be considered within the scope of the present disclosure as well.
Claims (10)
1. The grinding fluid storage and pumping assembly for the circulating grinding machine is characterized by comprising a grinding fluid cylinder (1), wherein the grinding fluid cylinder (1) is provided with a fluid storage cavity for storing grinding fluid, a fluid outlet pipe (2), a circulating fluid inlet pipe (3) and a fluid outlet (4), the fluid outlet is respectively communicated with the fluid storage cavity, and the fluid outlet (4) is arranged at the position, close to the bottom, of the grinding fluid cylinder (1) so as to discharge fluid in the fluid storage cavity.
2. The grinding fluid storage and pumping assembly for the circulation grinding machine according to claim 1, wherein the grinding fluid cylinder (1) is provided with a circulation pump motor (5) and a circulation pump which is in transmission connection with the circulation pump motor (5) and is positioned in the fluid storage cavity, the circulation pump can pump the fluid in the fluid storage cavity to a machine table of the circulation grinding machine through the fluid outlet pipe (2) and allow the fluid on the machine table to flow back to the fluid storage cavity through the fluid circulation inlet pipe (3).
3. The slurry storage and pumping assembly for a circulation grinding machine according to claim 2, wherein a first valve (6) is provided on a pipe section of the circulation liquid inlet pipe (3) communicated to the liquid storage chamber, and a liquid outlet pipe (8) provided with a second valve (7) is connected to the upstream side of the first valve (6) so as to be controllable by the first valve (6) and the second valve (7) to selectively return the liquid on the machine table to the liquid storage chamber through the circulation liquid inlet pipe (3) or discharge the liquid through the liquid outlet pipe (8).
4. The slurry storage and pumping assembly for a circulation grinding mill according to claim 1, characterized in that the slurry cartridge (1) is equipped with a stirring motor (9) and a stirring mechanism drivingly connected to the stirring motor (9) and located in the liquid storage chamber.
5. The slurry storage and pumping assembly for a circulation grinding mill according to claim 1, characterized in that the drain port (4) is provided with a drain valve.
6. The use method of the circulating grinding machine is characterized in that the circulating grinding machine comprises a machine table and a grinding fluid storage and pumping assembly, the grinding fluid storage and pumping assembly comprises a grinding fluid cylinder (1), the grinding fluid cylinder (1) is provided with a fluid storage cavity for storing grinding fluid, a fluid outlet pipe (2), a circulating fluid inlet pipe (3) and a fluid outlet (4), the fluid outlet (4) is respectively communicated with the fluid storage cavity, and the fluid outlet (4) is arranged at a position, close to the bottom, of the grinding fluid cylinder (1), wherein the use method comprises a process of cleaning the grinding fluid cylinder (1), and the process comprises the following steps:
s11, opening the liquid discharge port (4) and discharging grinding liquid in the liquid storage cavity;
and S12, filling cleaning fluid into the liquid storage cavity, and discharging cleaned waste liquid through the liquid discharge port (4).
7. The method of claim 6, wherein the section of the circulating liquid inlet pipe (3) communicated with the liquid storage cavity is provided with a first valve (6), and a liquid outlet pipe (8) provided with a second valve (7) is connected to the upstream side of the first valve (6), and the method further comprises the step of cleaning the machine table, and the step comprises the following steps:
s21, closing the first valve (6) and opening the second valve (7);
and S22, cleaning the machine table, and discharging the cleaned waste liquid through the liquid discharge pipe (8).
8. The use method of the circulation grinder according to claim 6, characterized in that the grinding fluid cylinder (1) is provided with a circulation pump motor (5) and a circulation pump which is in transmission connection with the circulation pump motor (5) and is positioned in the fluid storage cavity, the use method comprises a grinding process on the machine table, and the grinding process comprises the following steps: and starting the circulating pump motor (5) to enable the circulating pump to pump the grinding fluid in the liquid storage cavity to the machine table through the liquid outlet pipe (2), and allowing the grinding fluid on the machine table to flow back to the liquid storage cavity through the circulating liquid inlet pipe (3).
9. The use method of the circulation grinding machine according to claim 8, characterized in that the grinding fluid cylinder (1) is provided with a stirring motor (9) and a stirring mechanism which is in transmission connection with the stirring motor (9) and is positioned in the fluid storage cavity, and the grinding process on the machine table further comprises the following steps: and starting the stirring motor (9) to stir the grinding fluid in the liquid storage cavity through the stirring mechanism.
10. The method of claim 8, wherein the step of grinding on the table is used to grind sapphire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210141957.2A CN114523419A (en) | 2022-02-16 | 2022-02-16 | Grinding fluid storage and pumping assembly and using method of circulating grinding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210141957.2A CN114523419A (en) | 2022-02-16 | 2022-02-16 | Grinding fluid storage and pumping assembly and using method of circulating grinding machine |
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| Publication Number | Publication Date |
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| CN114523419A true CN114523419A (en) | 2022-05-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210141957.2A Pending CN114523419A (en) | 2022-02-16 | 2022-02-16 | Grinding fluid storage and pumping assembly and using method of circulating grinding machine |
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| CN (1) | CN114523419A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT8620309A0 (en) * | 1986-05-05 | 1986-05-05 | Roberto Polenghi | SUSPENSION, IN PROCESSING MACHINES AND EQUIPMENT FOR SANDING AND CLEANING PARTS AND RECYCLING A SIMILAR SOLUTION. DETERGENT WITH ABRASIVE SUBSTANCES IN |
| JP2001105316A (en) * | 1999-10-05 | 2001-04-17 | Sumitomo Shoji Chemicals Co Ltd | Polishing solution recycling system for chemical- mechanical flattening device |
| CN204584948U (en) * | 2015-04-23 | 2015-08-26 | 麦斯克电子材料有限公司 | A kind of slurry supply apparatus for silicon wafer surface grinding |
| CN207155573U (en) * | 2017-07-04 | 2018-03-30 | 青岛嘉星晶电科技股份有限公司 | Grind alloy melt stirring device |
| CN113334245A (en) * | 2020-02-18 | 2021-09-03 | 长鑫存储技术有限公司 | Grinding fluid supply system |
-
2022
- 2022-02-16 CN CN202210141957.2A patent/CN114523419A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT8620309A0 (en) * | 1986-05-05 | 1986-05-05 | Roberto Polenghi | SUSPENSION, IN PROCESSING MACHINES AND EQUIPMENT FOR SANDING AND CLEANING PARTS AND RECYCLING A SIMILAR SOLUTION. DETERGENT WITH ABRASIVE SUBSTANCES IN |
| JP2001105316A (en) * | 1999-10-05 | 2001-04-17 | Sumitomo Shoji Chemicals Co Ltd | Polishing solution recycling system for chemical- mechanical flattening device |
| CN204584948U (en) * | 2015-04-23 | 2015-08-26 | 麦斯克电子材料有限公司 | A kind of slurry supply apparatus for silicon wafer surface grinding |
| CN207155573U (en) * | 2017-07-04 | 2018-03-30 | 青岛嘉星晶电科技股份有限公司 | Grind alloy melt stirring device |
| CN113334245A (en) * | 2020-02-18 | 2021-09-03 | 长鑫存储技术有限公司 | Grinding fluid supply system |
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Application publication date: 20220524 |