CN114513712B - Multimode optical routing unit - Google Patents
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- CN114513712B CN114513712B CN202210258106.6A CN202210258106A CN114513712B CN 114513712 B CN114513712 B CN 114513712B CN 202210258106 A CN202210258106 A CN 202210258106A CN 114513712 B CN114513712 B CN 114513712B
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- H04Q11/0005—Switch and router aspects
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Abstract
The invention provides a multi-mode optical routing unit, comprising: two multimode coupling beam splitting devices, each multimode coupling beam splitting device having 4 ports; two multimode phase shifters; a multimode waveguide crossover structure having 4 ports; 3 ports of one multimode coupling beam splitting device are correspondingly connected with 3 ports of the other multimode coupling beam splitting device through 2 ports of two multimode phase shifters and a multimode waveguide crossing structure respectively; the unconnected ports of the two multimode coupling beam splitting devices are respectively used as an input port and an output port, and the unconnected 2 ports of the multimode waveguide cross structure are respectively used as an input port and an output port for realizing two routing states. The present invention proposes an architecture for a multimode optical routing unit capable of handling multimode optical signals. The architecture can achieve the effect of routing multiple modes together.
Description
Technical Field
The present invention relates to the field of optical communications, and in particular, to a multimode optical routing unit.
Background
Optical communication technology has important applications in modern communications. The optical communication technology is a communication method using light waves as carriers. At present, the optical communication technology has been developed to a stage of using optical fiber as a transmission medium, and has various advantages of large communication capacity, long relay distance, good confidentiality, strong anti-interference capability, and the like.
The mode division multiplexing technique is one of the possible solutions to further extend the optical communication channel capability. The mode division multiplexing technology is characterized in that limited orthogonal modes in a multimode optical fiber are used as independent channels to transmit information, and a new multiplexing degree of freedom is developed. The mode division multiplexing technology can enable the optical transmission rate to be multiplied along with the increase of the multiplexing mode number, and the optical transmission capacity can be obviously improved by matching with other optical multiplexing technologies.
In optical systems, optical signal routing is one of the core functions. In the field of integrated optical communications on chip, routing and signal processing of single-mode signals is mature and reliable. However, the conventional single-mode optical routing structure cannot be directly extended to the multi-mode situation, and thus, at present, no mature and reliable solution for routing multi-mode signals exists.
Disclosure of Invention
Technical problem to be solved
The present invention provides a multimode optical routing unit to solve or partially solve the above problems.
(II) technical scheme
One aspect of the present invention provides a multimode optical routing unit, including: two multimode coupling beam splitting devices, each multimode coupling beam splitting device having 4 ports; two multimode phase shifters; a multimode waveguide crossover structure having 4 ports; 3 ports of one multimode coupling beam splitting device are correspondingly connected with 3 ports of the other multimode coupling beam splitting device through 2 ports of two multimode phase shifters and a multimode waveguide crossing structure respectively; the unconnected ports of the two multimode coupling beam splitting devices are respectively used as an input port and an output port, and the unconnected 2 ports of the multimode waveguide cross structure are respectively used as an input port and an output port for realizing two routing states.
In one embodiment of the present invention, the multimode phase shifter comprises at least a light guiding structure and a refractive index regulating structure.
In an embodiment of the present invention, the refractive index adjusting structure adopts an asymmetric structure or an asymmetric doped structure, and is used for performing unequal optical modulation on the multimode optical signal.
In an embodiment of the present invention, the connecting 3 ports of one multimode coupling beam splitting device with 3 ports of another multimode coupling beam splitting device through 2 ports of two multimode phase shifters and a multimode waveguide cross structure respectively comprises: the 4 ports of the mode coupling beam splitting device comprise a first port, a second port, a third port and a fourth port; the two multimode coupling beam splitting devices comprise a first multimode coupling beam splitting device and a second multimode coupling beam splitting device; the two multimode phase shifters comprise a first multimode phase shifter and a second multimode phase shifter; the third port of the first multimode coupling beam splitting device is connected with the fourth port of the second multimode coupling beam splitting device through a first multimode phase shifter; the fourth port of the first multimode coupling beam splitting device is connected with the third port of the second multimode coupling beam splitting device through a second multimode phase shifter; the second port of the first multimode coupling beam splitting device is connected with the first port piece of the second multimode coupling beam splitting device through 2 ports of the multimode waveguide crossing structure.
In an embodiment of the present invention, the multimode optical routing unit further comprises: multimode waveguides and multimode bending devices for routing multimode optical routing elements.
In an embodiment of the present invention, the multimode waveguide is composed of a waveguide core region and a waveguide cladding layer, and a cross-sectional area of the waveguide core region of the multimode waveguide is larger than a predetermined cross-sectional area.
In an embodiment of the present invention, the multi-mode bending device is formed by sequentially connecting a straight waveguide, a bending waveguide, and a straight waveguide.
In an embodiment of the present invention, the multimode waveguide cross structure adopts a double-layer waveguide structure.
The invention also provides a multi-mode optical routing cascade structure formed by the multi-mode optical routing unit, which is used for expanding the number of ports of an optical router.
(III) advantageous effects
The multi-mode optical routing unit provided by the invention realizes two routing states of multi-mode optical signals: a direct state (I1 → O1 and I2 → O2) and a cross state (I1 → O2 and I2 → O1). The present invention provides a framework of a multimode optical routing unit capable of processing multimode optical signals, which addresses the shortcomings of the prior art. The framework can achieve the effect of routing a plurality of modes together, and is easy to achieve and high in process stability. The multi-mode optical routing unit based on the application can be combined by multiple means such as cascading and the like, and the expansion of the number of ports of the optical router is realized.
Drawings
Fig. 1 schematically illustrates a structural diagram of a multi-mode optical routing unit according to an embodiment of the present invention;
FIG. 2 is a schematic diagram illustrating the functional area structure of a multimode optical routing unit according to another embodiment of the present invention;
fig. 3 is a schematic diagram illustrating a structure of a multimode coupling splitter according to an embodiment of the invention;
FIG. 4 is a schematic diagram illustrating a structure of a multi-mode transposer according to an embodiment of the present invention;
FIG. 5 schematically illustrates a functional diagram of a multimode optical routing unit provided by an embodiment of the invention;
fig. 6 schematically shows a structural diagram of implementing multi-mode optical routing based on a multi-mode optical routing unit according to an embodiment of the present invention.
[ description of reference ]
11-a multimode waveguide; 12-a multimode coupling beam splitting device; 13-multimode waveguide bending devices;
14-a multi-mode item shifter; 15-multimode waveguide crossover structure;
21-a first port; 22-a second port; 23-a third port; 24-a fourth port;
25. 26-multiple mode transposer ports;
31-a first multimode coupling beam splitting device; 32-a second multimode coupling beam-splitting device;
33-a first multi-modal transposer; 34-a second multi-modal transposer;
41-hot pole; 42-a waveguide core region; 43-waveguide cladding; 44-a substrate; 45. 46-doped regions;
51-multimode multiplexer demultiplexer.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments and the accompanying drawings. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The terms "comprises," "comprising," and the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; may be mechanically, electrically or otherwise in communication with each other; either directly or indirectly through intervening media, either internally or in any other suitable relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Referring to fig. 1, fig. 1 schematically illustrates a structural diagram of a multi-mode optical routing unit according to an embodiment of the present invention.
An embodiment of the present invention provides a multimode optical routing unit, which includes 2 output ports and 2 input ports, and a functional area of the multimode optical routing unit with a specific topology functional structure, and includes: two multimode coupling beam splitters 12, each multimode coupling beam splitter 12 having 4 ports; two multimode phase shifters 14; a multimode waveguide crossover structure 15, the multimode waveguide crossover structure 15 having 4 ports; 3 ports of one multimode coupling beam splitting device 12 are correspondingly connected with 3 ports of the other multimode coupling beam splitting device 12 through two multimode phase shifters 14 and 2 ports of a multimode waveguide crossing structure 15; the unconnected ports of the two multimode coupling beam splitters 12 are respectively used as an input port and an output port, and the unconnected 2 ports of the multimode waveguide cross structure 15 are respectively used as an input port and an output port, so as to realize two routing states.
In an embodiment, the unconnected 1 ports of the two multimode coupling beam splitting devices 12 are respectively used as an output port and an input port, which can be selected from the output port 1 and the input port 1 shown in fig. 1; the unconnected 2 ports of the multimode waveguide crossover 15 may be selected as the input port 2 and the output port 2 shown in fig. 1, respectively.
The optical signal is classified into a single-mode optical signal and a multi-mode optical signal according to the propagation mode of the optical signal. The multimode optical signal propagates in the optical fiber in a total reflection manner, and the single-mode optical signal propagates in a linear propagation manner. Therefore, the conventional single-mode optical routing architecture cannot be directly extended to multiple modes. In view of the above problems, the present application provides a multimode optical routing unit, configured to process a multimode optical signal, and implement two routing states of a multimode optical routing, that is, a direct state and a cross state.
Referring to fig. 5, fig. 5 schematically illustrates a functional diagram of a multi-mode optical routing unit according to an embodiment of the present invention. FIG. 5 shows the diagram of the through state (I1 → O1 and I2 → O2) on the left, and the diagram of the cross state (I1 → O2 and I2 → O1) on the right.
Referring to fig. 2, fig. 2 schematically illustrates a functional area structure diagram of a multi-mode optical routing unit according to another embodiment of the present invention.
In a specific embodiment of the present invention, the connecting 3 ports of one multimode coupling beam splitting device 12 with 3 ports of another multimode coupling beam splitting device 12 through 2 ports of two multimode phase shifters 14 and a multimode waveguide cross structure 15 respectively comprises: the 4 ports of the mode coupling beam splitting device 12 include a first port 21, a second port 22, a third port 23, and a fourth port 24; the two multimode coupling beam splitting devices 12 comprise a first multimode coupling beam splitting device 31 and a second multimode coupling beam splitting device 32; the two multimode phase shifters 14 include a first multimode phase shifter 33 and a second multimode phase shifter 34.
The third port 23 of the first multimode coupling beam splitting device 31 is connected with the fourth port 24 of the second multimode coupling beam splitting device 32 through a first multimode phase shifter 33; the fourth port 24 of the first multimode coupling beam splitting device 31 is connected to the third port 23 of the second multimode coupling beam splitting device 32 by a second multimode phase shifter 34. The multimode phase shifter 14 comprises 2 multimode phase shifter ports 25, 26. The mode coupling beam splitting devices 12 are connected to each other by ports 25, 26. The second port 22 of the first multimode coupling splitting device 31 is connected to the first port 21 of the second multimode coupling splitting device 32 via 2 ports of the multimode waveguide crossover structure 15. The multimode devices are connected with each other to form a loop.
In one possible embodiment, the multimode coupling beam splitting device 12, the multimode phase shifter 14 and the multimode waveguide crossover structure 15 provided by the present invention constitute an optical resonator. In the optical resonator, a multimode optical signal enters the first multimode coupling beam splitting device 31 from the 1 st port 21 of the first multimode coupling beam splitting device 31, the split optical signal exits from the third port 23 and the fourth port 24 of the first multimode coupling beam splitting device 31, the phase of the split optical signal is regulated and controlled by the first multimode phase shifter 33 and the second multimode phase shifter 34 respectively, and the regulated and controlled optical signal enters the second multimode coupling beam splitting device 32 and then returns to the second port 22 of the first multimode coupling beam splitting device 31 from the first port 21 of the second multimode coupling beam splitting device 32 through a multimode waveguide crossing structure, so that a resonant loop is formed. By adjusting and controlling the phase of the multimode phase shifter 14, the routing state of the optical signal in the resonant loop can be controlled, so that the routing states of the through state and the cross state of the multimode signal optical routing are realized.
In an embodiment of the present invention, the multimode optical routing unit further comprises: a multimode waveguide 11 and a multimode bending device 13 for wiring of the multimode optical routing unit. Alternatively, the multi-mode waveguide 11 may be one of a waveguide made of a silicon material, a waveguide made of a lithium niobate material by ion implantation or etching, a waveguide made of a silicon nitride material, and a waveguide made of a silicon oxide material, or a combination thereof.
The multimode waveguide 11 is composed of a waveguide core region and a waveguide cladding, and the sectional area of the waveguide core region of the multimode waveguide 11 is larger than a preset sectional area. The multimode waveguide 11 is characterized in that the refractive index of the waveguide core is higher than that of the waveguide cladding, and the optical signal is confined in the waveguide through the refractive index difference so as to realize the guiding of the optical wave. In addition, the multimode waveguide 11 is also characterized in that the cross-sectional area of the core region is generally larger than that of a single-mode waveguide, thereby realizing the characteristic of coexistence of a plurality of guided modes.
For example, the multimode waveguide 11 is implemented on a silicon-on-insulator (SOI) based platform, typically by photolithography and etching processes from the top silicon of the SOI. The top layer silicon is etched to form a square waveguide, which may be a stripe waveguide or a ridge waveguide. The waveguide is characterized by a waveguide core (Si) with a higher refractive index than the waveguide cladding (which may be SiO2 or air). For a square wave, a particular electromagnetic wave (light wave) has its cutoff frequency, and thus there are single-mode waveguides and multi-mode waveguides. Multimode waveguides are characterized by a relatively large width that allows for the presence of multiple optical field modes within the waveguide core.
The multi-mode bending device 13 is formed by sequentially connecting a straight waveguide, a bent waveguide and a straight waveguide. The principle of the multimode bending device 13 is based on adiabatic transformation such that the modes in the waveguide slowly transition into a bending mode and then back slowly. That is, the multimode bending device 13 is realized based on mode conversion, and specifically, the multimode bending device 13 is realized by changing a straight waveguide mode into a bent waveguide mode, preferably into a straight waveguide mode again. Alternatively, there are two ways to achieve this: increasing the bend radius and selecting a particular curve. Including, for example, the use of large bend radii to achieve adiabatic transformation to achieve multimode effects; the adiabatic transformation is approximated by methods of specific curve forms such as Euler curves, bezier curves, etc.; there is also a method of actively performing mode conversion so that the modes in the straight waveguide and the eigenmodes in the curved waveguide match each other.
Fig. 3 schematically shows a structural diagram of a multimode coupling splitter according to an embodiment of the present invention. The material of the multimode coupling beam splitter device 12 may be selected to be the same dielectric material as the material of which the multimode waveguide 11 is composed as described above.
The multimode coupling beam splitter 12 can be made according to the coupling principle between evanescent waves, i.e. coupling is achieved by two multimode waveguides of the same or different structure that are close to each other. Referring to the implementation method 1 of fig. 4, modes of optical signals are coupled from one waveguide to another waveguide by mutual coupling between evanescent waves between two multimode waveguides, and a specific splitting ratio can be implemented by selecting the length of a coupling region. The coupling principle between evanescent waves is as follows: because the dielectric material restrains the optical field through the real part of the refractive index, evanescent waves with the intensity gradually attenuated along with the increase of the boundary distance of the waveguide appear at the outer side of the core area of the waveguide, and when the two waveguides are close enough (the distance is usually less than 1 optical wavelength), the evanescent waves are coupled, so that the light can be coupled between the two waveguides.
The multimode coupling beam splitter 12 can be made according to the principle of local multimode interference self-imaging, see implementation 2 of fig. 4, by introducing an optical field into a multimode region wider than the width of the waveguide, the variation in width being non-adiabatic, so that the optical field entering the multimode region will be decomposed into eigenmodes of the multimode region (since any mode that can be stably transported in the waveguide is a superposition of eigenmodes). Because different eigenmodes have different propagation constants, the optical field is not completely stably transmitted in a new multimode region, but is changed due to length, so that multiple self-images of the input optical field are formed, and the desired beam splitting effect can be obtained by selecting the propagation length. It should be noted that the method requires careful selection of various parameters to achieve co-imaging of multiple modes.
In yet another embodiment of the present invention, the multimode phase shifter 14 comprises at least a light guiding structure and a refractive index modulating structure. The refractive index regulating structure adopts an asymmetric structure or an asymmetric doping structure and is used for carrying out unequal optical modulation on multimode optical signals. The asymmetric structure or the asymmetric doping structure breaks the symmetry relation between the multimode waveguide and the modulation structure, and performs unequal optical modulation on multimode optical signals in the multimode waveguide, so that different mode optical signals have different modulation effects.
Fig. 4 schematically shows a structural diagram of a multi-mode transposer according to an embodiment of the present invention.
The multimode phase shifter 14 can be made as an asymmetric structure in which the refractive index adjusting structure is displaced from the light guiding structure, i.e. the refractive index modulation is performed from the side of the light guiding structure. Referring to implementation 1 in fig. 4, the multimode phase shifter 14 may be thermo-optically phased. The material of the hot electrode 41 can be selected from a resistive material such as titanium nitride TiN or metal tungsten. The waveguide core region 42 is used for the propagation of multimode optical signals. Waveguide cladding 43 may be selected to be a silicon dioxide layer, such as a buried oxide layer containing the SOI wafer itself and a PECVD deposited silicon oxide cap layer. Substrate 44 may optionally be silicon. The symmetry between the waveguide and the modulation structure is broken by staggering the hot electrode 41 and the waveguide core region 42 for a certain distance in the horizontal direction, so that the phase modulation has different effects on optical signals of different modes. Since the wave has periodicity, the same resonance can be achieved for different modes of the optical signal by selecting the phase value of the proper least common multiple.
The multimode phase shifter 14 may also be fabricated as an asymmetrically doped structure with asymmetrically doped plasma dispersion effects. Referring to implementation 2 in fig. 4, it is implemented by doping regions, and the doping regions 45 and 46 may be selected as N-type doping or P-type doping, and asymmetric doping is performed on the waveguide to achieve different phase shift effects for different modes.
The light guiding structure of the multimode phase shifter 14 may be chosen to be the same dielectric material as the multimode waveguide material. The principle of the refractive index adjusting structure of the multimode phase shifter 14 may be an electro-optic effect (the light guide medium material is a lithium niobate material), a thermo-optic effect (the light guide medium material is a silicon material, a silicon nitride material, or a silicon oxide material), or a plasma dispersion effect (the light guide medium material is a silicon material) according to the difference of the light guide medium materials.
In an embodiment of the present invention, the multimode waveguide cross structure 15 adopts a double-layer waveguide structure, so as to prevent the waveguide from directly passing through vertically. Alternatively, the multimode waveguide cross structure 15 may be an inverse-designed multimode waveguide cross structure. The multimode waveguide crossing structure 15 may also be a structure that respectively couples and downloads optical fields of multiple modes to a single mode, then respectively crosses the modes, and then uploads the optical fields to the multimode waveguide again.
The multi-mode optical routing unit provided by the invention realizes two routing states of multi-mode optical signals: a direct state (I1 → O1 and I2 → O2) and a cross state (I1 → O2 and I2 → O1). That is, the present invention provides an architecture of a multimode optical routing unit capable of processing multimode optical signals, aiming at the defects of the prior art. In a specific embodiment, the devices may be interconnected by a multimode waveguide 11 in an SOI-based platform according to the structure of fig. 1, which may achieve a multi-mode routing effect.
Fig. 6 schematically shows a structural diagram of implementing multi-mode optical routing based on a multi-mode optical routing unit according to an embodiment of the present invention.
Two routing states of the multimode optical routing unit: a pass state and a cross state. Since an optical router has more than two ports, it is necessary to be able to expand the number of ports of the optical router. Based on this, the invention provides a multi-mode optical routing cascade structure formed by the multi-mode optical routing unit in another aspect, which is used for expanding the number of ports of the optical router.
In a particular embodiment, the present invention provides a multi-mode multi-port router comprised of multi-mode optical routing units. The invention provides a topological arrangement mode of a reconfigurable non-blocking three-port route consisting of two-port multi-mode optical routing units, wherein the three-port route consists of 3 multi-mode optical routing units and multi-mode waveguides, and the reconfigurable non-blocking route of multi-mode signals can be realized, such as a cascade mode shown in figure 6. It consists of a multimode demultiplexer 51 and multimode optical routing units. The multi-mode multiplexer/demultiplexer 51 may be a mode splitting device based on an asymmetric directional coupler structure, or a mode splitting device based on a topology optimization design. The function of the multi-mode demultiplexer 51 is to direct different modes in the multi-mode waveguide separately to different ports.
The framework can achieve the effect of routing a plurality of modes together, and is easy to achieve and high in process stability. The multi-mode optical routing unit based on the application can be combined by multiple means such as cascading and the like, and the expansion of the number of ports of the optical router is realized.
In the description of the present invention, it is to be understood that the terms "longitudinal," "length," "circumferential," "front," "rear," "left," "right," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for the convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus are not to be construed as limiting the present invention.
Throughout the drawings, like elements are represented by like or similar reference numerals. Conventional structures or constructions will be omitted when they may obscure the understanding of the present disclosure. And the shapes, sizes and positional relationships of the components in the drawings do not reflect the actual sizes, proportions and actual positional relationships. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Similarly, in the above description of exemplary embodiments of the disclosure, various features of the disclosure are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various disclosed aspects. Reference to the description of the terms "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the disclosure. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A multi-mode optical routing unit comprising:
two multimode coupling beam splitting devices (12), each multimode coupling beam splitting device (12) having 4 ports;
two multimode phase shifters (14);
a multimode waveguide crossover (15), the multimode waveguide crossover (15) having 4 ports;
3 ports of one multimode coupling beam splitting device (12) are correspondingly connected with 3 ports of the other multimode coupling beam splitting device (12) through two multimode phase shifters (14) and 2 ports of a multimode waveguide crossing structure (15);
the unconnected ports of the two multimode coupling beam splitting devices (12) are respectively used as an input port and an output port, and the unconnected 2 ports of the multimode waveguide cross structure (15) are respectively used as an input port and an output port for realizing two routing states, wherein: the corresponding connection of 3 ports of the multimode coupling beam splitting device (12) and 2 ports of the multimode waveguide crossing structure (15) through two multimode phase shifters (14) and 3 ports of another multimode coupling beam splitting device (12) comprises the following steps:
the 4 ports of the mode coupling beam splitting device (12) comprise a first port (21), a second port (22), a third port (23) and a fourth port (24); the two multimode coupling beam splitting devices (12) comprise a first multimode coupling beam splitting device (31) and a second multimode coupling beam splitting device (32); the two multimode phase shifters (14) include a first multimode phase shifter (33) and a second multimode phase shifter (34);
the third port (23) of the first multimode coupling beam splitting device (31) is connected with the fourth port (24) of the second multimode coupling beam splitting device (32) through the first multimode phase shifter (33); the fourth port (24) of the first multimode coupling beam splitting device (31) is connected with the third port (23) of the second multimode coupling beam splitting device (32) through the second multimode phase shifter (34); the second port (22) of the first multimode coupling splitting device (31) is connected to the first port (21) of the second multimode coupling splitting device (32) via 2 ports of the multimode waveguide crossover structure (15).
2. The multi-mode optical routing unit of claim 1, said multi-mode phase shifter (14) comprising at least a light guiding structure and a refractive index modulating structure.
3. The multi-mode optical routing unit of claim 2, wherein said refractive index modulating structure is an asymmetric structure or an asymmetric doped structure for performing unequal optical modulation on the multi-mode optical signal.
4. The multi-mode optical routing unit of claim 1, further comprising: a multimode waveguide (11) and a multimode bending device (13) for wiring of the multimode optical routing unit.
5. The multi-mode optical routing unit according to claim 4, said multi-mode waveguide (11) being composed of a waveguide core region and a waveguide cladding, the cross-sectional area of the waveguide core region of said multi-mode waveguide (11) being larger than a predetermined cross-sectional area.
6. The multimode optical routing unit according to claim 4, said multimode curved device (13) being formed by a straight waveguide, a curved waveguide, a straight waveguide connected in sequence.
7. The multi-mode optical routing unit of claim 1, said multi-mode waveguide crossover structure (15) employing a double-layer waveguide structure.
8. A multimode optical routing cascade structure using the multimode optical routing unit according to any one of claims 1 to 7, for expanding the number of ports of an optical router.
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