CN114505892B - Operating device - Google Patents
Operating device Download PDFInfo
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- CN114505892B CN114505892B CN202210117537.0A CN202210117537A CN114505892B CN 114505892 B CN114505892 B CN 114505892B CN 202210117537 A CN202210117537 A CN 202210117537A CN 114505892 B CN114505892 B CN 114505892B
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- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims abstract description 163
- 238000000746 purification Methods 0.000 claims abstract description 83
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical class S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 claims abstract description 53
- 229910052815 sulfur oxide Inorganic materials 0.000 claims abstract description 39
- 230000001105 regulatory effect Effects 0.000 claims description 31
- 239000007789 gas Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 21
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 230000001276 controlling effect Effects 0.000 claims description 5
- 239000003814 drug Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims 1
- 238000007641 inkjet printing Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- AKEJUJNQAAGONA-UHFFFAOYSA-N sulfur trioxide Chemical compound O=S(=O)=O AKEJUJNQAAGONA-UHFFFAOYSA-N 0.000 description 2
- JOENPVVANNJTIC-UHFFFAOYSA-N 4,5,6-trifluorotriazine Chemical compound FC1=NN=NC(F)=C1F JOENPVVANNJTIC-UHFFFAOYSA-N 0.000 description 1
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 159000000007 calcium salts Chemical class 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J21/00—Chambers provided with manipulation devices
- B25J21/02—Glove-boxes, i.e. chambers in which manipulations are performed by the human hands in gloves built into the chamber walls; Gloves therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/48—Sulfur compounds
- B01D53/50—Sulfur oxides
- B01D53/507—Sulfur oxides by treating the gases with other liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/54—Nitrogen compounds
- B01D53/56—Nitrogen oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/75—Multi-step processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Treating Waste Gases (AREA)
Abstract
The application discloses an operating device, which comprises an operating chamber and a purifying chamber. Wherein the purification chamber is disposed at one side of the operation chamber. The purification chamber includes a first type of purification section. The first type of purifying part is communicated with the operation chamber. The first type of purification section is for removing at least one of sulfur oxides and nitrogen oxides within the operating chamber. The operating device provided by the application is used for solving the technical problem that the stability of the display panel is affected by sulfur oxides and nitrogen oxides in the existing operating device.
Description
Technical Field
The application relates to the technical field of production and manufacturing, in particular to an operating device.
Background
The ink jet printing technology has the advantages of high material utilization rate, simple operation, simple pixelation design, suitability for large-area production and the like, and is getting more and more attention in the field of semiconductor devices. In the display field, processing an Organic Light-Emitting Diode (OLED) panel using an inkjet printing technology is considered as one of the main technical directions of the future panel industry.
The solution film forming process of the ink jet printing technology has very severe requirements on the processing environment, so that the processing needs to be performed in a glove box system. The glove box system includes a sealed operator box and gloves secured to the outside of the operator box for performing operations within the box. At present, a glove box used in industrial production removes water and oxygen in the environment through a specific water-oxygen purification system, so that a process sensitive to water and oxygen in the production can be smoothly processed. In the production process of processing an OLED panel by an ink-jet printing technology, the processing technology is sensitive to water and oxygen, and has a harsher requirement on the concentration of sulfur oxide and nitrogen oxide in the environment. If the concentration of the sulfur oxide and the nitrogen oxide is higher, the stability of the OLED panel produced by the inkjet printing process can be reduced, and the production requirement of the inkjet printing technology for processing the OLED panel can not be met.
Therefore, a new solution is needed to solve the above-mentioned problems.
Disclosure of Invention
The embodiment of the application provides an operating device, which aims to solve the technical problem that the stability of a display panel is affected by sulfur oxides and nitrogen oxides in the existing operating device.
An embodiment of the present application provides an operating device including:
An operation chamber;
and the first type purifying part is communicated with the operation chamber and is used for removing at least one of sulfur oxides and nitrogen oxides in the operation chamber.
Optionally, in some embodiments of the application, the first type of purification section includes at least one mixed purification section for removing sulfur oxides and nitrogen oxides within the operating chamber.
Optionally, in some embodiments of the present application, the first type of purifying portion includes at least one first purifying sub-portion for removing sulfur oxides in the operating chamber and at least one second purifying sub-portion for removing nitrogen oxides in the operating chamber.
Optionally, in some embodiments of the present application, the first type of purifying portion further includes a connecting portion, a first end of the connecting portion is connected to the first purifying sub-portion, and a second end of the connecting portion is connected to the second purifying sub-portion.
Optionally, in some embodiments of the present application, the operation device further includes a second type purifying portion, where the second type purifying portion is disposed on one side of the first type purifying portion, and the second type purifying portion is used for removing water oxygen in the operation chamber.
Optionally, in some embodiments of the present application, the operating device further includes:
the purification chamber is arranged at one side of the operation chamber, and the first type purification part and the second type purification part are arranged in the purification chamber;
the external pipeline is communicated with the purification cavity and is used for introducing gas into the purification cavity;
the first circulating pipeline comprises a first end and a second end, the first end of the first circulating pipeline is communicated with the operation chamber, and the second end of the first circulating pipeline is connected with the purification chamber;
The second circulating pipeline comprises a first end and a second end, the first end of the second circulating pipeline is communicated with the operation chamber, and the second end of the second circulating pipeline is connected with the purification chamber; wherein the method comprises the steps of
The first and second circulation lines are for circulating gases within the process chamber and the purification chamber.
Optionally, in some embodiments of the present application, the operating device further includes:
the first regulating valve is arranged on the first circulating pipeline;
The second regulating valve is arranged on the second circulating pipeline;
the control part is arranged on the operation chamber and is electrically connected with the first regulating valve and the second regulating valve respectively, and the control part is used for controlling the opening or closing of the first regulating valve and the second regulating valve.
Optionally, in some embodiments of the present application, the operating device further includes:
The detector is arranged in the operation cavity and is electrically connected with the control part, and the detector is used for detecting the content of sulfur oxides and nitrogen oxides in the operation cavity; wherein the method comprises the steps of
When the content of the sulfur oxide and the nitrogen oxide in the operation cavity is larger than a first preset value, the control part controls the first regulating valve and the second regulating valve to conduct the operation cavity and the purification cavity so as to remove the sulfur oxide and the nitrogen oxide in the operation cavity.
Optionally, in some embodiments of the application, the first type of purification section includes a reactor and a liquid chemical disposed within the reactor, the liquid chemical for removing at least one of sulfur oxides and nitrogen oxides.
Optionally, in some embodiments of the present application, the operating device further includes:
And the operation component is arranged on the operation chamber and is used for controlling the operation chamber.
In an embodiment of the application, the operation device comprises an operation chamber and a purification chamber. Wherein the purification chamber is disposed at one side of the operation chamber. The purification chamber includes a first type of purification section. The first type of purifying part is communicated with the operation chamber. The first type of purification section is for removing at least one of sulfur oxides and nitrogen oxides within the operating chamber. The operating device provided by the embodiment of the application is used for solving the technical problem that the stability of the display panel is affected by sulfur oxides and nitrogen oxides in the existing operating device.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of an operating device according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a first structure of a first type of purifying part according to an embodiment of the present application;
FIG. 3 is a schematic diagram of a second structure of a first type of purification unit according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of a second type of purification unit according to an embodiment of the present application.
Detailed Description
For a better understanding of the present application, its objects, technical solutions and advantages, reference should be made to the following detailed description of the application with reference to the drawings wherein like reference numerals refer to like elements throughout the several views, and the following description is based on the illustrated embodiments of the application, which should not be construed as limiting other embodiments of the application not described herein. The word "embodiment" is used in this specification to mean an example, instance, or illustration.
In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
The embodiment of the application provides an operating device. The following will describe in detail. The following description of the embodiments is not intended to limit the preferred embodiments.
The operation device provided by the application is described in detail below by way of specific examples.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an operation device according to an embodiment of the application. The operation device 100 includes an operation chamber 10 and a purification chamber 20. Wherein the purification chamber 20 is provided at one side of the operation chamber 10. The purification chamber 20 includes a first type of purification portion 20a. The first type purifying portion 20a communicates with the operation chamber 10. The first type purifying portion 20a is for removing at least one of sulfur oxides and nitrogen oxides in the operation chamber 10.
In the production process of processing the display panel by using the ink-jet printing technology, the processing technology is sensitive to water and oxygen, and has a severe requirement on the concentration of sulfur oxide and nitrogen oxide in the environment. If the concentration of the sulfur oxide and the nitrogen oxide is higher, the service life of the display panel produced by the inkjet printing process can be reduced, so that the stability of the display panel is affected, and the production requirement of the inkjet printing technology for processing the display panel can not be met. Therefore, in the embodiment of the present application, by providing the first type purifying part 20a in the operation device 100 to remove sulfur oxides and nitrogen oxides in the operation chamber 10, it is ensured that the sulfur oxides and nitrogen oxides in the operation device 100 are evacuated during the inkjet printing process, preventing the sulfur oxides and nitrogen oxides from reacting with ink required for the inkjet printing process. The operation device 100 provided by the embodiment of the application solves the technical problem that the stability of the display panel is affected by sulfur oxides and nitrogen oxides in the existing operation device.
It should be noted that, in the embodiment of the present application, the operation device 100 may be a vacuum operation device, for example, the operation device 100 includes, but is not limited to, a glove box. The operation device 100 provided in the embodiment of the present application may be used in an inkjet printing process or other processes that need to be operated in an oxygen-free and water-free environment.
The operating device 100 comprises at least one operating member 80. The operation member 80 is provided on the operation chamber 10. The operation member 80 is used to control the operation chamber 10. In some embodiments, the operating member 80 includes, but is not limited to, a glove. In some embodiments, the number of the operation components 80 is plural, for example, any one of 2, 4, 6, 10 or 12 operation components 80, and when the number of the operation components 80 is plural, the operation objects can operate the operation chambers 10 at the same time, so as to speed up the production progress.
Optionally, in some embodiments, the first type of purification section 20a includes at least one mixed purification section for removal of sulfur oxides and nitrogen oxides within the process chamber 10. That is, in the embodiment of the present application, the first type purifying part 20a is a mixed purifying part that can simultaneously remove sulfur oxides and nitrogen oxides in the operation chamber 10. Since the first type purification section 20a is a mixed purification section, it can remove sulfur oxides or nitrogen oxides at the same time, and this arrangement shortens the time for removing sulfur oxides and nitrogen oxides.
It should be noted that the number of the mixed purifying parts may be one or more, and when the number of the mixed purifying parts is plural, any two adjacent mixed purifying parts are communicated, so that the impurity gas can enter the next mixed purifying part after the first purification, thereby ensuring that the impurity gas is completely removed.
Referring to fig. 2, fig. 2 is a schematic diagram of a first structure of a first type of purifying portion according to an embodiment of the present application. The first type of purification section 20a comprises at least one first purification sub-section 20a1 and at least one second purification sub-section 20a2. The first purification sub-section 20a1 is used to remove sulfur oxides in the process chamber 10. The second purification sub-section 20a2 is used to remove nitrogen oxides in the process chamber 10. In the embodiment of the present application, the components for removing sulfur oxides and nitrogen oxides in the first type purifying portion 20a are separately provided, and the purifying efficiency can be improved.
It should be noted that, in some embodiments, the first purifying sub-portion 20a1 may also be used to remove nitrogen oxides in the operation chamber 10. The second purification sub-section 20a2 is used to remove sulfur oxides in the process chamber 10.
It should be understood that in an embodiment of the present application, the number of the first purification sub-portions 20a1 may be one or more. The number of the second purification sub-sections 20a1 may be one or more. For example, the number of first purification sub-sections 20a1 may be any one of 1,2, 3, 4, or 5. The number of second purification sub-sections 20a2 may be any one of 1,2, 3, 4, or 5. When the number of the first purified sub-portions 20a1 or the second purified sub-portions 20a2 is set to plural, any adjacent two of the first purified sub-portions 20a1 and any adjacent two of the second purified sub-portions 20a2 communicate. The gas in the operation chamber 10 can be further purified, thereby further improving the technical problem that the stability of the display panel is affected by the presence of sulfur oxides and nitrogen oxides in the existing operation device.
With continued reference to fig. 2, the first type purifying portion 20a further includes a connecting portion 20a3. The first end of the connection portion 20a3 communicates with the first purification sub-portion 20a1. The second end of the connection portion 20a3 communicates with the second purification sub-portion 20a2. In the present embodiment, since the first purification sub-section 20a1 and the second purification sub-section 20a2 are communicated through the connection section 20a3, when sulfur oxides and nitrogen oxides in the operation chamber 10 enter the first type purification section 20a, one of the sulfur oxides or the nitrogen oxides is removed by the first purification sub-section 20a1. The remaining gas then enters the second purified sub-section 20a2, and is removed by the second purified sub-section 20a2. The arrangement mode prolongs the paths of the sulfur oxide and the nitrogen oxide and improves the purification degree in the cavity.
It should be noted that, in the embodiment of the present application, the sulfur oxide includes, but is not limited to, at least one of sulfur dioxide (SO 2) and sulfur trioxide (SO 3). Nitrogen oxides include, but are not limited to, at least one of nitrogen monoxide (NO) and nitrogen dioxide (NO 2).
Alternatively, in some embodiments of the present application, the first type of purifying portion 20a includes a reactor and a liquid medicine disposed within the reactor, the liquid medicine being for removing at least one of sulfur oxides and nitrogen oxides.
In some embodiments, the removal of sulfur oxides and nitrogen oxides may be by physical adsorption or chemical reaction. For example, the first type of purification section 20a includes an adsorbent that can be used to adsorb sulfur oxides and nitrogen oxides. Or in another embodiment, the first purified sub-portion 20a1 includes calcium oxide for reacting with sulfur oxides to form the corresponding calcium salt. The second purification sub-section 20a2 comprises water for reaction with nitrogen oxides.
Referring to fig. 3, fig. 3 is a schematic diagram of a second structure of a first type purification portion according to an embodiment of the application. The first type of purifying section 20a includes a first portion 201 and a second portion 202. Wherein the first portion 201 of the first type purifying portion 20a is disposed in communication with the second portion 202 of the first type purifying portion 20 a. The first portion 201 of the first type of purifying portion 20a extends along the first direction X. The second portion 202 of the first type of purifying portion 20a extends in a direction opposite to the first direction X. And the first portion 201 of the first type of purifying portion 20a corresponds at least in part to the second portion 202 of the first type of purifying portion 20 a. In the embodiment of the present application, the first type purifying part 20a is configured in a serpentine structure, so that the paths of sulfur oxides and nitrogen oxides are prolonged in the process of purifying the gas, and the purification rate of the gas in the chamber is improved.
In one embodiment, sponge balls adsorbed with sulfur oxide and nitrogen oxide removing liquid medicine may be provided in the first portion 201 and the second portion 202 of the first type purifying portion 20a to remove sulfur oxide and nitrogen oxide in the operation chamber 10.
Referring to fig. 1 and 4, the operation device 100 further includes a second type purifying portion 20b. The second type of purification section 20b is disposed within the purification chamber 20. And the second type purifying part 20b is provided at one side of the first type purifying part 20 a. The second type of purifying part 20b is used to remove water oxygen in the operation chamber 10. In an embodiment, the second type purifying part 20b may have the same or similar structure as the first type purifying part 20 a. For example, the second type of purification section 20b includes a first portion 203 and a second portion 204. Wherein the first portion 203 of the second type purification portion 20b is disposed in communication with the second portion 204 of the second type purification portion 20b. The first portion 203 of the second type of purifying portion 20b extends along a first direction X. The second portion 203 of the second type of purifying portion 20b extends in a direction opposite to the first direction X. And the first portion 203 of the second type of purifying portion 20b corresponds at least in part to the second portion 204 of the second type of purifying portion 20b. In the embodiment of the present application, the second type purifying part 20b is configured in a serpentine structure, so that the paths of sulfur oxides and nitrogen oxides are prolonged in the process of purifying the gas, and the purification rate of the gas in the chamber is improved.
In some embodiments, the second type of purification section includes a desiccant that is used to remove moisture from within the process chamber 10.
Optionally, in some embodiments, the operation device 100 further includes a first circulation line 30a, a second circulation line 30b, and an external line 70. Wherein the first circulation line 30a1 includes a first end and a second end, the first end of the first circulation line 30a communicates with the operation chamber 10. A second end of the first circulation line 30a is connected to the purification chamber 20. The second circulation line 30b includes a first end and a second end, the first end of the second circulation line 30b communicating with the operating chamber 10. A second end of the second circulation line 30b is connected to the purification chamber 20. Wherein the first circulation line 30a and the second circulation line 30b are used to circulate the gas in the operation chamber 10 and the purification chamber 20. An external conduit 70 communicates with the purification chamber 20 for introducing gas into the purification chamber 20. In this embodiment, the external pipeline 70 introduces the shielding gas into the purification chamber 20, and the shielding gas circulates in the operation chamber 10 and the purification chamber 20 through the first circulation pipeline 30a and the second circulation pipeline 30b, so as to protect the manufacturing process performed in the operation chamber 10. In the embodiment of the present application, the shielding gas may be an inert gas such as neon or argon.
Further, the operation device 100 further includes a first regulator valve 40a, a second regulator valve 40b, and a control section 50. Wherein the first regulating valve 40a is provided on the first circulation line 30 a. The second regulating valve 40b is provided on the second circulation line 30 b. The control section 50 is provided on the operation chamber 10. The control unit 50 is electrically connected to the first regulator valve 40a and the second regulator valve 40b, respectively. The control portion 50 is for controlling the opening or closing of the first regulating valve 40a and the second regulating valve 40b. Specifically, when the operation chamber 10 needs to perform the operation of removing the impurity gas, the control portion 50 opens the first and second regulating valves 40a and 40b so that the impurity gas enters the first and second type purifying portions 20a and 20b from the operation chamber 10 to remove the impurity gas.
In some embodiments, the first regulating valve 40a and the second regulating valve 40b are electromagnetic valves or pneumatic valves, and the materials of the first regulating valve 40a and the second regulating valve 40b are corrosion-resistant materials such as epoxy resins, polytetrafluoroethylene, fluororubbers or perfluorotriazine rubbers. The first regulating valve 40a and the second regulating valve 40b are connected to the control unit 50, respectively, and the opening degree of the first regulating valve 40a and the second regulating valve 40b is controlled by providing the control unit 50 with the first regulating valve. Wherein the control section 50 includes, but is not limited to, a computer.
Optionally, the operating device 100 further comprises a detector 60. The detector 60 is disposed in the operation chamber 10 and is electrically connected to the control section 50. The detector 60 is used to detect the content of sulfur oxides and nitrogen oxides within the operating chamber 10. Wherein, when the content of sulfur oxides and nitrogen oxides in the operation chamber 10 is greater than the first preset value, the control part 50 controls the first and second regulating valves 40a and 40b to conduct the operation chamber 10 and the purification chamber 20 to remove the sulfur oxides and nitrogen oxides in the operation chamber 10. In the present embodiment, by providing the detector 60 in the operation chamber 10, sulfur oxides and nitrogen oxides in the operation chamber 10 are detected by the detector 60, thereby realizing intelligent detection and intelligent purification of the gas in the operation chamber 10.
In summary, although the present application has been described in terms of the preferred embodiments, the preferred embodiments are not limited to the above embodiments, and various modifications and changes can be made by one skilled in the art without departing from the spirit and scope of the application, and the scope of the application is defined by the appended claims.
Claims (10)
1. An operating device, characterized by comprising:
An operation chamber;
the purification chamber is arranged at one side of the operation chamber and is communicated with the operation chamber;
The first type purifying part is arranged in the purifying cavity and communicated with the operating cavity, and is used for removing at least one of sulfur oxides and nitrogen oxides in the operating cavity;
The first type purifying part comprises a plurality of first parts and a plurality of second parts, the first parts extend along a first direction X, the second parts extend along a direction opposite to the first direction, the first parts at least partially correspond to the second parts, and the first parts and the second parts are alternately arranged and sequentially communicated to form the zigzag extending first type purifying part; the first part and the second part are provided with sponge balls, and the sponge balls are adsorbed with liquid medicine for removing sulfur oxides and nitrogen oxides;
the operation device further comprises an external pipeline which is communicated with the purification chamber and used for introducing protective gas into the purification chamber.
2. The operating device according to claim 1, characterized in that said first type of purification section comprises at least one mixed purification section for removing sulphur oxides and nitrogen oxides inside said operating chamber.
3. The operating device according to claim 1, characterized in that the first type of purification section comprises at least one first purification sub-section for removing sulphur oxides in the operating chamber and at least one second purification sub-section for removing nitrogen oxides in the operating chamber.
4. The operation device according to claim 3, wherein the first type purifying portion further comprises a connecting portion, a first end of the connecting portion communicates with the first purifying sub-portion, and a second end of the connecting portion communicates with the second purifying sub-portion.
5. The operation device according to claim 1, further comprising a second type purifying portion provided in the purifying chamber and provided on one side of the first type purifying portion, the second type purifying portion being for removing water oxygen in the operation chamber.
6. The operation device according to claim 5, characterized in that the operation device further comprises:
the first circulating pipeline comprises a first end and a second end, the first end of the first circulating pipeline is communicated with the operation chamber, and the second end of the first circulating pipeline is connected with the purification chamber;
The second circulating pipeline comprises a first end and a second end, the first end of the second circulating pipeline is communicated with the operation chamber, and the second end of the second circulating pipeline is connected with the purification chamber; wherein the method comprises the steps of
The first and second circulation lines are for circulating gases within the process chamber and the purification chamber.
7. The operation device according to claim 6, characterized in that the operation device further comprises:
the first regulating valve is arranged on the first circulating pipeline;
The second regulating valve is arranged on the second circulating pipeline;
the control part is arranged on the operation chamber and is electrically connected with the first regulating valve and the second regulating valve respectively, and the control part is used for controlling the opening or closing of the first regulating valve and the second regulating valve.
8. The operation device according to claim 7, characterized in that the operation device further comprises:
The detector is arranged in the operation cavity and is electrically connected with the control part, and the detector is used for detecting the content of sulfur oxides and nitrogen oxides in the operation cavity; wherein the method comprises the steps of
When the content of the sulfur oxide and the nitrogen oxide in the operation cavity is larger than a first preset value, the control part controls the first regulating valve and the second regulating valve to conduct the operation cavity and the purification cavity so as to remove the sulfur oxide and the nitrogen oxide in the operation cavity.
9. The operation device according to claim 1, wherein the first type purifying portion includes a reactor and a chemical liquid disposed in the reactor, the chemical liquid being for removing at least one of sulfur oxides and nitrogen oxides.
10. The operation device according to claim 1, characterized in that the operation device further comprises:
And the operation component is arranged on the operation chamber and is used for controlling the operation chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210117537.0A CN114505892B (en) | 2022-02-08 | 2022-02-08 | Operating device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210117537.0A CN114505892B (en) | 2022-02-08 | 2022-02-08 | Operating device |
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| CN114505892A CN114505892A (en) | 2022-05-17 |
| CN114505892B true CN114505892B (en) | 2024-06-14 |
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| CN202210117537.0A Active CN114505892B (en) | 2022-02-08 | 2022-02-08 | Operating device |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040090182A (en) * | 2003-04-16 | 2004-10-22 | 한국에너지기술연구원 | Baghouse for simultaneously removing fine particle and nitric oxides to preliminary reduction of dust loading |
| JP2016172203A (en) * | 2015-03-16 | 2016-09-29 | 清水建設株式会社 | Air purification system |
| CN111086029A (en) * | 2019-12-31 | 2020-05-01 | 深圳市华星光电半导体显示技术有限公司 | Glove box system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0278025A1 (en) * | 1987-02-09 | 1988-08-17 | General Electric Company | Method for dry flue gas desulfurization incorporating nitrogen oxides removal |
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2022
- 2022-02-08 CN CN202210117537.0A patent/CN114505892B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040090182A (en) * | 2003-04-16 | 2004-10-22 | 한국에너지기술연구원 | Baghouse for simultaneously removing fine particle and nitric oxides to preliminary reduction of dust loading |
| JP2016172203A (en) * | 2015-03-16 | 2016-09-29 | 清水建設株式会社 | Air purification system |
| CN111086029A (en) * | 2019-12-31 | 2020-05-01 | 深圳市华星光电半导体显示技术有限公司 | Glove box system |
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| CN114505892A (en) | 2022-05-17 |
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