CN114505149A - Single crystal or polycrystalline silicon material accumulation bar integral transfer water explosion device and use method thereof - Google Patents
Single crystal or polycrystalline silicon material accumulation bar integral transfer water explosion device and use method thereof Download PDFInfo
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- CN114505149A CN114505149A CN202210112590.1A CN202210112590A CN114505149A CN 114505149 A CN114505149 A CN 114505149A CN 202210112590 A CN202210112590 A CN 202210112590A CN 114505149 A CN114505149 A CN 114505149A
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 124
- 238000004880 explosion Methods 0.000 title claims abstract description 121
- 239000002210 silicon-based material Substances 0.000 title claims abstract description 81
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 21
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000009825 accumulation Methods 0.000 title description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 50
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 50
- 239000010703 silicon Substances 0.000 claims abstract description 50
- 239000000463 material Substances 0.000 claims abstract description 38
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 210000001503 joint Anatomy 0.000 claims abstract description 6
- 230000020169 heat generation Effects 0.000 claims description 12
- 238000005096 rolling process Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000005457 optimization Methods 0.000 description 8
- 230000000087 stabilizing effect Effects 0.000 description 6
- 210000003437 trachea Anatomy 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010924 continuous production Methods 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C19/00—Other disintegrating devices or methods
- B02C19/18—Use of auxiliary physical effects, e.g. ultrasonics, irradiation, for disintegrating
- B02C19/186—Use of cold or heat for disintegrating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C21/00—Disintegrating plant with or without drying of the material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C23/00—Auxiliary methods or auxiliary devices or accessories specially adapted for crushing or disintegrating not provided for in preceding groups or not specially adapted to apparatus covered by a single preceding group
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a single crystal or polycrystalline silicon material stacked bar integral transfer water explosion device and a using method thereof, wherein the device comprises the following steps: the water explosion groove is used for accommodating the silicon bar materials and is of a rectangular structure, and the periphery of the bottom surface of the water explosion groove extending upwards from the bottom surface is of a sealed structure; a first device part for heating and transferring the silicon bar stock; the second device part is used for heating and transferring the silicon bar material, is positioned on the other side of the water explosion groove, is arranged in an extending manner along the length direction of the other side of the water explosion groove, is provided with a second input end and a second output end, the second input end of the second device part faces the water explosion groove and is in butt joint with the opening of the water explosion groove, and the second output end of the second device part is far away from the water explosion groove; the first device portion, the water explosion groove and the second device portion are sequentially arranged on the same horizontal line, and the silicon material rod enters from the first input end of the first device portion and passes through the water explosion groove to be discharged from the second output end of the second device portion.
Description
Technical Field
The invention relates to the technical field of silicon material processing, in particular to a single crystal or polycrystalline silicon material stacked bar integral transfer water explosion device and a using method thereof.
Background
Silicon is the most abundant element semiconductor on the earth's crust, has superior properties and mature process technology, and has become the main raw material of solid-state electronic devices. Silicon material is an important semiconductor material, a chemical element symbol Si, silicon used in the electronic industry should have high purity and excellent electrical and mechanical properties, silicon is the semiconductor material with the largest yield and the widest application, the yield and the dosage of the silicon mark the electronic industry level of a country, and in order to meet the requirements of a very large scale integrated circuit, the preparation technology of silicon single crystal with high integrity and high uniformity is rapidly developed.
In the prior art, the processing direction of a silicon material is a crushing technology, namely the silicon material is crushed by a crusher, and the silicon material is naturally cracked or easily cracked by heat treatment, and is generally heated by a heat source, but the existing processing device has low maturity and integration level, does not meet the automatic and continuous process requirements, is easy to cause the conditions of material blocking, material dropping and the like in the process, and causes poor yield, so that the device for integrally transferring the single crystal or polycrystalline silicon material stacked bar to the water explosion and the using method thereof are provided.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a device for integrally transferring water explosion of a single crystal or polycrystalline silicon material stacked bar, which comprises: the water explosion groove is used for accommodating the silicon bar materials and is of a rectangular structure, the opening of the water explosion groove faces upwards, and the periphery of the bottom surface of the water explosion groove extending upwards from the bottom surface is of a sealed structure; the water explosion tank can contain liquid, including but not limited to water and cooling liquid;
the first device part is used for heating and transferring the silicon bar material, the first device part is positioned in one lateral direction of the water explosion groove, the first device part is arranged in an extending mode along the length direction of the one lateral direction of the water explosion groove, the first device part is provided with a first input end and a first output end, the first output end of the first device part faces the water explosion groove and is in butt joint with an opening of the water explosion groove, and the first input end of the first device part is far away from the water explosion groove;
the second device part is used for heating and transferring the silicon bar material, is positioned on the other side of the water explosion groove, is arranged in an extending manner along the length direction of the other side of the water explosion groove, is provided with a second input end and a second output end, the second input end of the second device part faces the water explosion groove and is in butt joint with the opening of the water explosion groove, and the second output end of the second device part is far away from the water explosion groove;
the first device portion, the water explosion groove and the second device portion are sequentially arranged on the same horizontal line, and the silicon material rod enters from the first input end of the first device portion and passes through the water explosion groove to be discharged from the second output end of the second device portion.
As a further optimization of the above aspect, the first device portion includes: the device comprises a first rack, a second rack and a third rack, wherein the first rack is vertically erected on the ground, the upper end of the first rack is provided with a conveyor belt mechanism, and the surface of the conveyor belt mechanism is provided with a plurality of row seats for clamping silicon bar materials; the row seat comprises four vertical plates which are longitudinally arranged, the upper ends of the vertical plates are respectively provided with an arc-shaped opening matched with a silicon bar, and when the silicon bar is placed on the row seat, the lower end of the silicon bar is attached to the arc-shaped openings of the vertical plates.
The head end of the conveyor belt mechanism is a first input end of the first device part, and the tail end of the conveyor belt mechanism is a first output end of the first device part.
As a further optimization of the above scheme, a first hood is arranged above the first rack, the first hood has a top surface and side surfaces, the first hood surrounds the upper part of the first rack, a first heat generating box is arranged below the first rack, and the direction of heat output by the first heat generating box is vertically upward; the periphery of the first hood is provided with a first air pipe and a second air pipe, the first air pipe is communicated with the side surface of the first hood through a plurality of branch pipes, and the second air pipe is communicated with the top surface of the first hood through a plurality of branch pipes.
As a further optimization of the above scheme, the length of the first hood is greater than that of the first rack, and one end of the first hood extends to the upper part of the water explosion tank.
As a further optimization of the above aspect, the second device portion includes: the base and the second frame of setting on the base, the upper end of second frame and the up end level in water explosion groove, and the upper end fixedly connected with straight board of second frame, the straight board extends along the length direction of second device portion, and the length direction of straight board is also equipped with a plurality of row seats that are used for block silicon material bar in the upper end of straight board. The arrangement of the row seats enables the silicon bar materials to be more stable in the transfer process;
as a further optimization of the above solution, a second hood is arranged above the second rack, the second hood has a top surface and side surfaces, the second hood surrounds the upper part of the second rack, a second heat generating box is arranged below the second rack, and the direction of heat output by the second heat generating box is vertically upward; the top surface of the second hood is provided with an exhaust hole; one end of the second hood also extends above the water explosion tank.
As a further optimization of the above, the second device part further includes: the extension part is arranged at one end, far away from the water explosion tank, of the second device part and is provided with a heightening seat, a third rack arranged on the heightening seat and a third hood surrounding the periphery and the top of the third rack; one end of the extension part, which is far away from the second device part, is provided with an opening, and the opening is a second output end of the second device part;
the third chassis includes: the support body extends along the length direction of the heightening seat, the height of the support bodies decreases progressively along the length direction of the heightening seat, and the upper ends of the support bodies are fixedly connected with the row seats. The plurality of support bodies are arranged in a descending manner, so that silicon bar materials on the row seats can fall and transfer conveniently;
as a further optimization of the scheme, the lower end of the second rack is in rolling connection with the upper end of the base; the lower end of the third rack is in rolling connection with the upper end of the heightening seat; one ends of the second rack and the third rack, which are close to each other, are movably connected through a hinge; in other words, the second frame and the third frame are movably arranged, so that the span of the whole structure is conveniently adjusted, and better use adaptability is realized when the second frame and the third frame are close to or far away from the water explosion tank;
the upper ends of the base and the heightening seat are respectively provided with a plurality of groups of rollers, the lower ends of the second rack and the third rack are respectively provided with a plurality of groups of sliding seats, each sliding seat is provided with an inclined plane, and the sliding seats are attached to the rollers through the inclined planes.
Furthermore, in order to facilitate the transfer of the silicon material bar from the second device part to the extension part, an inclined plane sliding seat is arranged, that is, the second rack and the third rack move towards the water explosion groove, so that the second rack and the third rack are lifted along the inclined plane direction, and the silicon material bar falls and is discharged from a second output end of the second device part conveniently;
as a further optimization of the above scheme, two sides of the water explosion tank are respectively provided with a transfer device, wherein one transfer device is positioned between the water explosion tank and the first device part, and the other transfer device is positioned between the water explosion tank and the second device part;
the transfer device includes: the device comprises a stable chassis and an upright column which is slidably arranged above the stable chassis, wherein a platform capable of lifting up and down is arranged on the side surface of the upright column; the platform of one of the transferors extends to the tail end of the conveyor belt mechanism; the platform of the other transfer device is L-shaped, and the platform of the other transfer device extends into the water explosion tank. It should be noted that the stabilizing chassis is provided with a sliding table motor to drive the upright post to freely slide within the length range of the stabilizing chassis, in addition, the side surface of the upright post is provided with a lifting motor to drive the platform to freely lift within the height range of the upright post, and the side surface of the upright post is also provided with a rotating motor to drive the platform to turn left and right;
the invention further discloses a use method of the integral water explosion transferring device for the single crystal or polycrystalline silicon material stacked bar, which comprises the following steps:
s1 feeding: placing silicon bar materials on a row seat at the head end of a conveyor belt mechanism, and enabling the silicon bar materials to enter a first device part through the conveyor belt mechanism until the row seat in the first device part is fully loaded with the silicon bar materials;
s2 primary heating: the first heat generation box heats the first device part so as to heat the silicon bar stock until the temperature reaches T;
s3 material conveying: starting the conveyor belt mechanism, enabling the silicon material bars at the tail end of the conveyor belt mechanism to fall onto a platform of one of the transferors, enabling the platform to carry the silicon material bars to move to the upper part of the water explosion groove, inclining the platform through a rotating motor, enabling the silicon material bars to fall into the water explosion groove, and cooling the silicon material bars to enable the silicon material bars to generate cracks due to cold and heat changes;
s4, fishing: starting another transfer device, lifting the silicon material bars cooled in the water explosion tank by the other transfer device through the platform, inclining the platform through a rotating motor so that the silicon material bars on the platform enter the row seats of the second device part, and repeating the operation so that the row seats in the second device part are fully loaded with the silicon material bars;
s5 secondary heating: the second heat-generating box heats the second device part so as to heat the silicon bar stock, and the silicon bar stock is stopped and naturally cooled until the temperature reaches T;
s6 discharge: and moving the second rack and the third rack towards the water explosion tank to enable the second rack and the third rack to incline so as to enable the silicon material bars on the second rack and the third rack to naturally fall off.
The invention relates to a single crystal or polycrystalline silicon material stacked bar integral transfer water explosion device and a using method thereof, which have the following beneficial effects:
1. the device can automatically transfer silicon material bars to finish primary heating, cooling and secondary heating and realize automatic discharging, wherein the primary heating is used for heating the silicon material, the silicon material is quenched after being cooled to generate microcracks, and the secondary heating is used for heating and drying the silicon material, so that the requirement of easy crushing is met, automatic continuous production can be realized, and the integral integration level is high; and, whole leakproofness is high, avoids impurity contamination, realizes high efficiency in the whole journey.
2. A single crystal or polycrystalline silicon material stacked bar integral transfer water explosion device and a use method thereof are provided, wherein arranged row seats are arranged along the length direction, the row seats can effectively support and support silicon material bars, and the silicon material bars can be conveniently transferred on the row seats, so that the silicon material bars are more stable in the transfer process; in addition, second frame, third frame set up the mode for mobilizable, conveniently adjust overall structure's span, realize being close to or keep away from the water explosion groove and possess better use suitability to second frame, third frame can be raised along the inclined plane direction, thereby make things convenient for silicon material bar whereabouts and discharge from the second output of second device portion, realize automatic serialization production.
Drawings
FIG. 1 is a side schematic view of the overall structure of the present invention;
FIG. 2 is a first axial view of the overall structure of the present invention;
FIG. 3 is a second axial view of the overall structure of the present invention;
fig. 4 is a schematic diagram of the row seat structure of the present invention.
Description of reference numerals: the water explosion tank comprises a water explosion tank 1, a first device part 2, a first input end 3, a first output end 4, a second device part 5, a second input end 6, a second output end 7, a first rack 8, a first hood 9, a conveyor belt mechanism 10, a row seat 11, a vertical plate 12, a first heat generation box 13, a first air pipe 14, a second air pipe 15, a base 16, a second rack 17, a second hood 18, a second heat generation box 19, an extension part 21, a heightening seat 22, a third rack 23, a third hood 24, a bracket body 25, a sliding seat 26, a shifter 27, a stable chassis 28, an upright column 29 and a platform 30.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and examples. It should be understood, however, that the description herein of specific embodiments is only intended to illustrate the invention and not to limit the scope of the invention.
It should be noted that when an element is referred to as being "disposed on," or provided with "another element, it can be directly on the other element or intervening elements may also be present, when an element is referred to as being" connected, "or coupled to another element, it can be directly on the other element or intervening elements may be present, and" fixedly coupled "means that the element is fixedly coupled in many ways, which are not intended to be within the scope of the present disclosure, the terms" vertical, "" horizontal, "" left, "" right, "and the like are used herein for illustrative purposes only and are not intended to be a single embodiment.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, and the terms used herein in the specification are for the purpose of describing particular embodiments only and are not intended to limit the present invention, and the term "and/or" as used herein includes any and all combinations of one or more of the associated listed items;
referring to the attached drawings 1-4 in the specification, the invention provides a technical scheme of an integral water explosion transfer device for a single crystal or polycrystalline silicon material stacked bar, which comprises: the water explosion tank 1 is used for containing silicon bar materials, the water explosion tank 1 is of a rectangular structure, an opening of the water explosion tank 1 faces upwards, and the periphery of the bottom surface of the water explosion tank 1, which extends upwards from the bottom surface, is of a sealed structure; the water explosion tank 1 can contain liquid, including but not limited to water and cooling liquid;
the first device part 2 is used for heating and transferring silicon bar materials, the first device part 2 is located in one lateral direction of the water explosion groove 1, the first device part 2 extends along the length direction of one lateral direction of the water explosion groove 1, the first device part 2 is provided with a first input end 3 and a first output end 4, the first output end 4 of the first device part 2 faces the water explosion groove 1 and is in butt joint with an opening of the water explosion groove 1, and the first input end 3 of the first device part 2 is far away from the water explosion groove 1;
a second device part 5 for heating and transferring the silicon bar material, wherein the second device part 5 is positioned at the other side direction of the water explosion groove 1, the second device part 5 is arranged in a manner of extending along the length direction of the other side direction of the water explosion groove 1, the second device part 5 is provided with a second input end 6 and a second output end 7, the second input end 6 of the second device part 5 faces the water explosion groove 1 and is butted with the opening of the water explosion groove 1, and the second output end 7 of the second device part 5 is far away from the water explosion groove 1;
the first device part 2, the water explosion groove 1 and the second device part 5 are sequentially arranged on the same horizontal line, and a silicon material bar enters from the first input end 3 of the first device part 2 and passes through the water explosion groove 1 to be discharged from the second output end 7 of the second device part 5. The first device portion 2 includes: the silicon material bar clamping device comprises a first machine frame 8, wherein the first machine frame 8 is vertically erected on the ground, a conveyor belt mechanism 10 is arranged at the upper end of the first machine frame 8, and a plurality of row seats 11 used for clamping silicon material bars are arranged on the surface of the conveyor belt mechanism 10; the row seat 11 comprises four vertical plates 12 which are longitudinally arranged, the upper ends of the vertical plates 12 are respectively provided with an arc-shaped opening matched with a silicon bar, and when the silicon bar is placed on the row seat 11, the lower end of the silicon bar is attached to the arc-shaped opening of the vertical plates 12. The head end of the conveyor belt mechanism 10 is the first input end 3 of the first device part 2, and the tail end of the conveyor belt mechanism 10 is the first output end 4 of the first device part 2.
A first hood 9 is arranged above the first rack 8, the first hood 9 is provided with a top surface and side surfaces, the first hood 9 surrounds the upper part of the first rack 8, a first heat generating box 13 is arranged below the first rack 8, and the direction of heat output by the first heat generating box 13 is vertical upwards; the periphery of first aircraft bonnet 9 has first trachea 14, second trachea 15, and first trachea 14 passes through the side of a plurality of branch pipes intercommunication first aircraft bonnet 9, and second trachea 15 passes through the top surface of a plurality of branch pipes intercommunication first aircraft bonnet 9, and the length of first aircraft bonnet 9 is greater than the length of first frame 8, and the one end of first aircraft bonnet 9 extends to the top in water explosion groove 1, and second device portion 5 includes: base 16 and the second frame 17 of setting on base 16, the upper end of second frame 17 is horizontal with the up end of water explosion groove 1, and the upper end fixedly connected with straight board of second frame 17, and the straight board extends along the length direction of second device portion 5, and the upper end of straight board also is equipped with a plurality of row seats 11 that are used for block silicon material bar along the length direction of straight board. The arrangement of the row seats 11 enables the silicon bar materials to be more stable in the transfer process, and in addition, as shown in fig. 4, three silicon bar materials (stacked) can be carried between every two row seats 11, so that the yield is further improved;
a second hood 18 is arranged above the second rack 17, the second hood 18 is provided with a top surface and side surfaces, the second hood 18 surrounds the upper part of the second rack 17, a second heat generating box 19 is arranged below the second rack 17, and the direction of heat output by the second heat generating box 19 is vertical and upward; the top surface of the second hood 18 is provided with exhaust holes; one end of the second hood 18 also extends above the tank 1. The second device portion 5 further includes: an extension part 21, wherein the extension part 21 is arranged at one end of the second device part 5 far away from the water explosion tank 1, and the extension part 21 is provided with a heightening seat 22, a third frame 23 arranged on the heightening seat 22 and a third hood 24 surrounding the periphery and the top of the third frame 23; the end of the extension part 21 far away from the second device part 5 is provided with an opening which is a second output end 7 of the second device part 5; the third chassis 23 includes: a plurality of stake bodies 25, a plurality of stake bodies 25 extend along the length direction of increaseing seat 22, the height of a plurality of stake bodies 25 decreases progressively along the length direction of increaseing seat 22, and the equal fixedly connected with row seat 11 in upper end of a plurality of stake bodies 25. The plurality of support bodies 25 are arranged in a descending manner, so that silicon bars on the row seats 11 can conveniently fall and transfer, and the row seats 11 are made of hard metal materials and have good wear resistance compared with the silicon bars;
the lower end of the second frame 17 is in rolling connection with the upper end of the base 16; the lower end of the third frame 23 is also in rolling connection with the upper end of the heightening seat 22; one ends of the second frame 17 and the third frame 23, which are close to each other, are movably connected through a hinge; in other words, the second frame 17 and the third frame 23 are movably arranged, so that the span of the whole structure is conveniently adjusted, and better use adaptability is realized when the water explosion tank 1 is close to or far away from the water explosion tank; the upper ends of the base 16 and the heightening seat 22 are respectively provided with a plurality of groups of rollers 25, the lower ends of the second frame 17 and the third frame 23 are respectively provided with a plurality of groups of sliding seats 26, each sliding seat 26 is provided with an inclined surface, and each sliding seat 26 is attached to the roller 25 through the inclined surface. Further, in order to facilitate the transfer of the silicon material bar from the second device part 5 to the extension part 21, a slide carriage 26 with an inclined plane is provided, that is, the second frame 17 and the third frame 23 move towards the water explosion tank 1, so that the second frame 17 and the third frame 23 are raised along the inclined plane, thereby facilitating the silicon material bar to fall and be discharged from the second output end 7 of the second device part 5;
it should be noted that the inclined planes of the sliding seats 26 at the lower ends of the second frame 17 and the third frame 23 have different inclination degrees, specifically, the inclination degree of the inclined plane gradually increases from the second frame 17 to the third frame 23, that is, when the second frame 17 and the third frame 23 are raised along the inclined plane direction, the raising height of the third frame 23 is greater than the raising height of the second frame 17;
two sides of the water explosion tank 1 are respectively provided with a transfer device 27, wherein one transfer device 27 is positioned between the water explosion tank 1 and the first device part 2, and the other transfer device 27 is positioned between the water explosion tank 1 and the second device part 5; the transfer device 27 includes: the device comprises a stabilizing chassis 28 and an upright 29 which is slidably arranged above the stabilizing chassis 28, wherein a platform 30 which can be lifted up and down is arranged on the side surface of the upright 29; the platform 30 of one of the diverters 27 extends to the end of the conveyor mechanism 10; the platform 30 of the other diverter 27 is L-shaped and the platform 30 of the other diverter 27 extends into the water explosion tank 1. It should be noted that the stabilizing chassis 28 is provided with a sliding table motor to drive the upright 29 to slide freely within the length range of the stabilizing chassis 28, in addition, the side surface of the upright 29 is provided with a lifting motor to drive the platform 30 to lift freely within the height range of the upright 29, and the side surface of the upright 29 is also provided with a rotating motor to drive the platform 30 to turn left and right;
the embodiment also discloses a use method of the integral transfer water explosion device for the single crystal or polycrystalline silicon material stacked bar, which comprises the following steps:
s1 feeding: placing the silicon bar materials on a row seat 11 at the head end of a conveyor belt mechanism 10, and enabling the silicon bar materials to enter a first device part 2 through the conveyor belt mechanism 10 until the row seat 11 in the first device part 2 is fully loaded with the silicon bar materials;
s2 primary heating: the first heat generation box 13 heats the inside of the first device part 2 so as to heat the silicon bar stock until the temperature reaches T1;
s3 feeding: starting the conveyor belt mechanism 10, enabling the silicon material bar at the tail end of the conveyor belt mechanism 10 to fall onto a platform 30 of one of the transferors 27, enabling the platform 30 to carry the silicon material bar to move to the upper side of the water explosion tank 1, inclining the platform 30 through a rotating motor, enabling the silicon material bar to fall into the water explosion tank 1, and cooling to enable the silicon material bar to generate cracks due to cold and heat changes;
s4, fishing: starting another shifter 27, lifting the silicon material bars cooled in the water explosion tank 1 by the another shifter 27 through the platform 30, inclining the platform 30 through the rotating motor so that the silicon material bars on the platform enter the row seats 11 of the second device part 5, and repeating the above operations so that the row seats 11 in the second device part 5 are fully loaded with the silicon material bars;
s5 secondary heating: the second heat generation box 19 heats the inside of the second device part 5, so that the silicon bar stock is heated, and the silicon bar stock is stopped and naturally cooled until the temperature reaches T2; it should be noted that the heat generation mode of the first heat generation box 13 may be electric heat supply, the heat generation mode of the second heat generation box 19 may be microwave, the first heat generation box 13 is arranged to directly heat the silicon material bar to a predetermined temperature T1, T1 is greater than T2, and the second heat generation box 19 is arranged to uniformly heat the silicon material bar to increase microcracks of the silicon material bar and to dry the silicon material bar to improve brittleness of the silicon material bar; in addition, the second housing 18 has a certain thickness and microwave shielding properties;
s6 discharge: and moving the second rack 17 and the third rack 23 to the direction of the water explosion tank 1, and inclining the second rack 17 and the third rack 23 so as to enable the silicon material bars on the second rack 17 and the third rack 23 to naturally fall.
It should be understood that the present invention is not limited to the particular embodiments described herein, but is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. The utility model provides a single crystal or polycrystalline silicon material pile up bar and wholly shift water and explode device which characterized in that includes:
the water explosion groove (1) is used for accommodating silicon bar materials, the water explosion groove (1) is of a rectangular structure, an opening of the water explosion groove (1) faces upwards, and the periphery of the bottom surface of the water explosion groove (1) extending upwards from the bottom surface is of a sealing structure;
the device comprises a first device part (2) used for heating and transferring silicon bar materials, wherein the first device part (2) is located in one lateral direction of a water explosion groove (1), the first device part (2) extends along the length direction of one lateral direction of the water explosion groove (1), the first device part (2) is provided with a first input end (3) and a first output end (4), the first output end (4) of the first device part (2) faces the water explosion groove (1) and is in butt joint with an opening of the water explosion groove (1), and the first input end (3) of the first device part (2) is far away from the water explosion groove (1);
a second device part (5) used for heating and transferring silicon bar materials, wherein the second device part (5) is located on the other side direction of the water explosion groove (1), the second device part (5) extends along the length direction of the other side direction of the water explosion groove (1), the second device part (5) is provided with a second input end (6) and a second output end (7), the second input end (6) of the second device part (5) faces the water explosion groove (1) and is in butt joint with the opening of the water explosion groove (1), and the second output end (7) of the second device part (5) is far away from the water explosion groove (1);
the first device part (2), the water explosion groove (1) and the second device part (5) are sequentially arranged on the same horizontal line, and a silicon material bar enters from a first input end (3) of the first device part (2) and passes through the water explosion groove (1) to be discharged from a second output end (7) of the second device part (5).
2. The device for integrally transferring the water explosion of the monocrystalline or polycrystalline silicon material stacked rod material as claimed in claim 1, wherein: the first device part (2) comprises: the silicon material bar clamping device comprises a first rack (8), wherein the first rack (8) is vertically erected on the ground, a conveyor belt mechanism (10) is arranged at the upper end of the first rack (8), and a plurality of row seats (11) used for clamping silicon material bars are arranged on the surface of the conveyor belt mechanism (10); the row seat (11) comprises four vertical plates (12) which are longitudinally arranged, the upper ends of the vertical plates (12) are respectively provided with an arc-shaped opening matched with a silicon bar, and when the silicon bar is placed on the row seat (11), the lower end of the silicon bar is attached to the arc-shaped opening of the vertical plates (12);
the head end of the conveyor belt mechanism (10) is a first input end (3) of the first device part (2), and the tail end of the conveyor belt mechanism (10) is a first output end (4) of the first device part (2).
3. The device for integrally transferring the water explosion of the monocrystalline or polycrystalline silicon material stacked rod material as claimed in claim 2, wherein: a first hood (9) is arranged above the first rack (8), the first hood (9) is provided with a top surface and side surfaces, the first hood (9) surrounds the upper part of the first rack (8), a first heat generating box (13) is arranged below the first rack (8), and the direction of heat output by the first heat generating box (13) is vertical and upward; the periphery of the first hood (9) is provided with a first air pipe (14) and a second air pipe (15), the first air pipe (14) is communicated with the side surface of the first hood (9) through a plurality of branch pipes, and the second air pipe (15) is communicated with the top surface of the first hood (9) through a plurality of branch pipes.
4. The device for integrally transferring the water explosion of the monocrystalline or polycrystalline silicon material stacked rod material as claimed in claim 3, wherein: the length of the first hood (9) is larger than that of the first rack (8), and one end of the first hood (9) extends to the upper side of the water explosion tank (1).
5. The device for integrally transferring the water explosion of the monocrystalline or polycrystalline silicon material stacked rod material as claimed in claim 1, wherein: the second device section (5) includes: base (16) and second frame (17) of setting on base (16), the upper end of second frame (17) and the up end level in water explosion groove (1), and the upper end fixedly connected with straight board of second frame (17), the length direction of second device portion of putting (5) is followed to the straight board and extended, and the length direction of straight board is followed to the upper end of straight board also is equipped with a plurality of row's seats (11) that are used for block silicon material bar.
6. The device for integrally transferring the water explosion of the monocrystalline or polycrystalline silicon material stacked rod material as claimed in claim 5, wherein: a second hood (18) is arranged above the second rack (17), the second hood (18) is provided with a top surface and side surfaces, the second hood (18) surrounds the upper part of the second rack (17), a second heat generating box (19) is arranged below the second rack (17), and the direction of heat output by the second heat generating box (19) is vertical and upward; the top surface of the second hood (18) is provided with an exhaust hole; one end of the second hood (18) also extends above the water explosion tank (1).
7. The device for integrally transferring the water explosion of the monocrystalline or polycrystalline silicon material stacked rod material as claimed in claim 5, wherein: the second device part (5) further comprises: the extension part (21), the extension part (21) is arranged at one end of the second device part (5) far away from the water explosion tank (1), and the extension part (21) is provided with a heightening seat (22), a third frame (23) arranged on the heightening seat (22) and a third hood (24) surrounding the periphery and the top of the third frame (23); one end of the extension part (21) far away from the second device part (5) is provided with an opening which is a second output end (7) of the second device part (5);
the third frame (23) comprises: the support comprises a plurality of support bodies (25), wherein the support bodies (25) extend along the length direction of the heightening seat (22), the heights of the support bodies (25) are gradually decreased along the length direction of the heightening seat (22), and the upper ends of the support bodies (25) are fixedly connected with the row seats (11).
8. The device for integrally transferring the water explosion of the monocrystalline or polycrystalline silicon material stacked rod material as claimed in claim 5, wherein: the lower end of the second rack (17) is in rolling connection with the upper end of the base (16); the lower end of the third frame (23) is in rolling connection with the upper end of the heightening seat (22); one ends of the second rack (17) and the third rack (23), which are close to each other, are movably connected through a hinge;
the upper ends of the base (16) and the heightening seat (22) are provided with a plurality of groups of rollers (25), the lower ends of the second rack (17) and the third rack (23) are provided with a plurality of groups of sliding seats (26), each sliding seat (26) is provided with an inclined plane, and each sliding seat (26) is attached to each roller through the inclined plane.
9. The device for integrally transferring the water explosion of the monocrystalline or polycrystalline silicon material stacked rod material as claimed in claim 6, wherein: two sides of the water explosion tank (1) are respectively provided with a transfer device (27), wherein one transfer device (27) is positioned between the water explosion tank (1) and the first device part (2), and the other transfer device (27) is positioned between the water explosion tank (1) and the second device part (5);
the diverter (27) comprises: the device comprises a stable chassis (28) and an upright post (29) which is slidably arranged above the stable chassis (28), wherein a platform (30) capable of lifting up and down is arranged on the side surface of the upright post (29); the platform (30) of one of the diverters (27) extends to the end of the conveyor mechanism (10); the platform (30) of the other diverter (27) is L-shaped, and the platform (30) of the other diverter (27) extends into the water explosion tank (1).
10. Use method of an integral transfer water explosion device for accumulating single crystal or polycrystalline silicon material bars based on any one of claims 1 to 9, comprising the following steps:
s1 feeding: silicon bar materials are placed on a row seat (11) at the head end of a conveyor belt mechanism (10), and the silicon bar materials enter a first device part (2) through the conveyor belt mechanism (10) until the row seat (11) in the first device part (2) is fully loaded with the silicon bar materials;
s2 primary heating: the first heat generation box (13) heats the interior of the first device part (2) so as to heat the silicon material bar stock until the temperature reaches T (1);
s3 feeding: starting the conveyor belt mechanism (10), enabling the silicon material bars at the tail end of the conveyor belt mechanism (10) to fall onto a platform (30) of one of the transferors (27), enabling the platform (30) to carry the silicon material bars to move to the position above the water explosion groove (1), inclining the platform (30) through a rotating motor, enabling the silicon material bars to fall into the water explosion groove (1), and cooling the silicon material bars to enable the silicon material bars to generate cracks due to cold and hot changes;
s4 fishing: starting another shifter (27), lifting the silicon material bars cooled in the water explosion tank (1) by the another shifter (27) through a platform (30), inclining the platform (30) through a rotating motor so that the silicon material bars on the platform enter the row seats (11) of the second device part (5), and repeating the operation so that the row seats (11) in the second device part (5) are fully loaded with the silicon material bars;
s5 secondary heating: the second heat-generating box (19) heats the interior of the second device part (5) so as to heat the silicon bar stock, and the silicon bar stock is stopped and naturally cooled until the temperature reaches T (2);
s6 discharge: and (3) moving the second rack (17) and the third rack (23) towards the water explosion tank (1) to enable the second rack (17) and the third rack (23) to incline so as to enable the silicon material bars on the second rack (17) and the third rack (23) to naturally fall.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210112590.1A CN114505149A (en) | 2022-01-29 | 2022-01-29 | Single crystal or polycrystalline silicon material accumulation bar integral transfer water explosion device and use method thereof |
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| CN202210112590.1A CN114505149A (en) | 2022-01-29 | 2022-01-29 | Single crystal or polycrystalline silicon material accumulation bar integral transfer water explosion device and use method thereof |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100876584B1 (en) * | 2008-08-07 | 2009-01-07 | (주)한동알앤씨 | Peeling off system of recycled aggregate |
| CN206218745U (en) * | 2016-11-15 | 2017-06-06 | 嘉兴小出钢管有限公司 | A kind of chamfering work piece automatic feed conveyer |
| CN110182810A (en) * | 2019-07-03 | 2019-08-30 | 山东澳联新材料有限公司 | The continuous production processes and device of broken silicon material are heated based on industrial microwave |
| CN110605176A (en) * | 2019-10-23 | 2019-12-24 | 西安华晶电子技术股份有限公司 | Method for breaking polycrystalline silicon material through water explosion |
| CN210312061U (en) * | 2019-07-24 | 2020-04-14 | 泰州浙华机械精锻有限公司 | Cluster material rack for processing forged pieces |
| CN111921591A (en) * | 2020-07-17 | 2020-11-13 | 自贡佳源炉业有限公司 | Material crushing system and method |
| CN112547275A (en) * | 2020-12-15 | 2021-03-26 | 无锡宝德金装备科技有限公司 | Monocrystalline silicon crushing, cleaning and drying integrated machine |
| CN213032702U (en) * | 2020-07-10 | 2021-04-23 | 大连威凯特科技有限公司 | Material-carrying quartz tray for silicon material heating and water explosion process |
| CN214515118U (en) * | 2020-12-15 | 2021-10-29 | 无锡宝德金装备科技有限公司 | Monocrystalline silicon crushing, cleaning and drying integrated machine |
| CN214690965U (en) * | 2021-05-17 | 2021-11-12 | 宁波三青科技有限公司 | Silicon rod transfer device |
-
2022
- 2022-01-29 CN CN202210112590.1A patent/CN114505149A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100876584B1 (en) * | 2008-08-07 | 2009-01-07 | (주)한동알앤씨 | Peeling off system of recycled aggregate |
| CN206218745U (en) * | 2016-11-15 | 2017-06-06 | 嘉兴小出钢管有限公司 | A kind of chamfering work piece automatic feed conveyer |
| CN110182810A (en) * | 2019-07-03 | 2019-08-30 | 山东澳联新材料有限公司 | The continuous production processes and device of broken silicon material are heated based on industrial microwave |
| CN210312061U (en) * | 2019-07-24 | 2020-04-14 | 泰州浙华机械精锻有限公司 | Cluster material rack for processing forged pieces |
| CN110605176A (en) * | 2019-10-23 | 2019-12-24 | 西安华晶电子技术股份有限公司 | Method for breaking polycrystalline silicon material through water explosion |
| CN213032702U (en) * | 2020-07-10 | 2021-04-23 | 大连威凯特科技有限公司 | Material-carrying quartz tray for silicon material heating and water explosion process |
| CN111921591A (en) * | 2020-07-17 | 2020-11-13 | 自贡佳源炉业有限公司 | Material crushing system and method |
| CN112547275A (en) * | 2020-12-15 | 2021-03-26 | 无锡宝德金装备科技有限公司 | Monocrystalline silicon crushing, cleaning and drying integrated machine |
| CN214515118U (en) * | 2020-12-15 | 2021-10-29 | 无锡宝德金装备科技有限公司 | Monocrystalline silicon crushing, cleaning and drying integrated machine |
| CN214690965U (en) * | 2021-05-17 | 2021-11-12 | 宁波三青科技有限公司 | Silicon rod transfer device |
Non-Patent Citations (1)
| Title |
|---|
| 王耀斌: "物流装卸机械", 人民交通出版社, pages: 183 - 184 * |
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Application publication date: 20220517 |