CN114497428A

CN114497428A - Manufacturing device of display device

Info

Publication number: CN114497428A
Application number: CN202110185217.4A
Authority: CN
Inventors: 韩政洹; 许明洙
Original assignee: Samsung Display Co Ltd
Current assignee: Samsung Display Co Ltd
Priority date: 2020-10-23
Filing date: 2021-02-10
Publication date: 2022-05-13
Also published as: KR20220054502A

Abstract

The invention provides a manufacturing device of a display device, which is used for improving the manufacturing quality and the yield of the display device. The manufacturing apparatus of the display device includes: an ink discharge unit including a nozzle unit for discharging ink; and a measuring section disposed at a distance from the first surface of the ink discharge section, the nozzle section being disposed on the first surface of the ink discharge section, the measuring section obtaining a surface shape of the ink in the nozzle section by scanning the first surface of the ink discharge section in a first direction.

Description

Manufacturing device of display device

Technical Field

Embodiments of the present invention relate to a manufacturing apparatus of a display device, and more particularly, to a manufacturing apparatus of a display device that improves manufacturing quality of the display device.

Background

Mobility-based electronic devices are widely used. As mobile electronic devices, tablet personal computers have recently been widely used in addition to small electronic devices such as mobile phones.

Such a mobile type electronic apparatus includes a display device in order to provide a user with various functions, i.e., visual information such as images or videos. Recently, the proportion of display devices in electronic devices has been increasing, and structures that can be bent from a flat state to a predetermined angle have been developed.

In addition, the display device may include various layers formed through various processes. For example, the display device may include an organic layer, which may be formed through a process of discharging an organic ink onto a substrate, such as an Inkjet Printing (Inkjet Printing) process. To achieve precise images on a display device, precise volumes of ink need to be ejected to precise locations on a substrate.

An apparatus for manufacturing a display device by an inkjet printing process may include a nozzle portion for discharging ink, and a Meniscus (Meniscus) of the ink may be formed in the nozzle portion. If the meniscus of the ink is poor or the ink formed in each of the plurality of nozzle portions has a large variation in meniscus, it is difficult to discharge a precise volume of ink to a precise position.

Disclosure of Invention

The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a manufacturing apparatus for a display device, which accurately measures the shape of ink in a nozzle portion and reflects the measurement result in a manufacturing process of the display device, thereby improving the manufacturing quality and yield of the display device. However, such subject matter is exemplary and not intended to limit the scope of the invention thereby.

According to an aspect of the present invention, there is provided a manufacturing apparatus of a display device, including: an ink discharge unit including a nozzle unit for discharging ink; and a measuring section disposed at a distance from a first surface of the ink discharge section, the nozzle section being disposed on the first surface of the ink discharge section, the measuring section obtaining a surface shape of the ink in the nozzle section by scanning the first surface of the ink discharge section in a first direction.

According to the manufacturing apparatus of the display device of the present embodiment, the ink discharge portion may include a plurality of nozzle portions arranged in the first direction on the first surface of the ink discharge portion.

According to the present embodiment, a first moving portion for moving the measuring portion in the first direction may be further included.

According to the present embodiment, a second moving portion for moving the measuring portion in a second direction intersecting the first direction may be further included.

According to this embodiment, the measurement portion may irradiate a Spot Beam (Spot Beam) toward the first surface of the ink discharge portion in a third direction intersecting the first direction.

According to the present embodiment, the measuring section may obtain the two-dimensional profile of the ink by the spot beam, and obtain the two-dimensional surface shape of the ink from the two-dimensional profile.

According to this embodiment, the measuring portion may irradiate a Line Beam (Line Beam) toward the first surface of the ink discharge portion in a third direction intersecting the first direction, and the Line Beam may extend in a second direction intersecting the first direction and the third direction.

According to the present embodiment, the measurement section may obtain a plurality of two-dimensional profiles of the ink by the line beam, and obtain a three-dimensional surface shape of the ink from the plurality of two-dimensional profiles.

According to the present embodiment, the scanning region of the measuring section may include a region in which the nozzle section is provided and a peripheral region of the nozzle section.

According to the present embodiment, a control portion that is electrically connected to the measurement portion and determines whether there is an abnormality in the shape of the ink based on the surface shape of the ink measured by the measurement portion may be further included.

Other aspects, features and advantages in addition to those described above will become apparent from the following detailed description, the claims and the accompanying drawings, which illustrate exemplary embodiments of the invention.

Such general and specific aspects may be implemented by a system, method, computer program, or any combination of systems, methods, and computer programs.

According to one embodiment of the present invention configured as described above, the shape of the ink in the nozzle portion can be precisely measured, and the measurement result can be reflected in the inkjet printing process, thereby improving the accuracy and stability of ink discharge and improving the process quality. Thus, the manufacturing apparatus of the display device and the manufacturing method of the display device can be realized, which can improve the manufacturing quality and yield of the display device. Of course, the scope of the present invention is not limited by this effect.

Drawings

Fig. 1 is a perspective view schematically illustrating a manufacturing apparatus of a display device according to an embodiment of the present invention.

Fig. 2 is a partial bottom perspective view schematically illustrating a manufacturing apparatus of a display device according to an embodiment of the present invention.

Fig. 3 is a bottom view schematically illustrating a part of a manufacturing apparatus of a display device according to an embodiment of the present invention.

Fig. 4 is a partial sectional view schematically illustrating a manufacturing apparatus of a display device according to an embodiment of the present invention.

Fig. 5 is a partial bottom perspective view schematically illustrating a manufacturing apparatus of a display apparatus according to another embodiment of the present invention.

Fig. 6 is a bottom view schematically illustrating a part of a manufacturing apparatus of a display device according to another embodiment of the present invention.

Fig. 7 is a perspective view schematically illustrating the shape of the ink surface measured by a manufacturing apparatus of a display device according to another embodiment of the present invention.

Fig. 8 is a bottom view schematically illustrating a part of a manufacturing apparatus of a display device according to still another embodiment of the present invention.

Fig. 9a and 9b are sectional views each schematically showing a part of an apparatus for manufacturing a display device according to an embodiment of the present invention.

Fig. 10 is a top view schematically illustrating a display device manufactured according to an embodiment of the present invention.

Fig. 11 is a cross-sectional view schematically illustrating a display device manufactured according to an embodiment of the present invention.

Description of the reference numerals

1 apparatus for manufacturing display device

10 support part

20 first moving part

30 second moving part

40 third moving part

50 ink discharge part

60 fourth moving part

70 fifth moving part

80 measuring part

90 control part

NP nozzle

Ink

SB spot beam

LB line beam

Detailed Description

While the invention is susceptible to various modifications and alternative embodiments, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. The effects and features of the present invention and methods of achieving the effects and features will be apparent with reference to the drawings and detailed embodiments described later. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and when the embodiments are described with reference to the accompanying drawings, the same reference numerals are used for the same or corresponding components, and the repetitive description of the components will be omitted.

In the following embodiments, the terms first, second, and the like are not used in a limiting sense, but are used for the purpose of distinguishing one structural element from other structural elements.

In the following embodiments, reference is made to a singular form, unless the context clearly indicates otherwise,

the singular forms of expressions include plural forms of expressions.

In the following embodiments, terms such as "including" or "having" indicate the presence of a feature or a structural element described in the specification, and are not intended to exclude the possibility of adding one or more other features or structural elements.

In the following embodiments, when it is referred to that a film, a region, a structural element, or the like is partially located "above" or "on" another portion, this includes not only a case where it is "directly" located above another portion but also a case where another film, a region, a structural element, or the like is present in the middle thereof.

In the drawings, the size of structural elements may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each structure shown in the drawings are arbitrarily shown for convenience of explanation, and thus the present invention is not necessarily limited to the drawings.

Where an embodiment may be implemented in different forms, the particular process sequences may also be performed in a different order than that described. For example, two steps described in succession may be executed substantially simultaneously, or may be executed in the reverse order to the described order.

In the present specification, "a and/or B" means a or B, or a and B. Further, "at least one of a and B" represents a case of a or B, or a and B.

In the following embodiments, when films, regions, structural elements, and the like are referred to as being connected, the film, region, structural element and the like may be directly connected or/and may be indirectly connected with another film, region, structural element provided in the middle of the film, region, structural element. For example, in the present specification, when electrical connection of a film, a region, a structural element, or the like is mentioned, the film, the region, the structural element, or the like is directly electrically connected, and/or another film, region, structural element, or the like is provided therebetween to be indirectly electrically connected.

The x-axis, y-axis, and z-axis are not limited to three axes on a rectangular coordinate system, and can be interpreted in a broad sense including the three axes. For example, the x, y, and z axes may be orthogonal to each other, but may also refer to different directions that are not orthogonal to each other.

Referring to fig. 1, the manufacturing apparatus 1 of the display device may include a support portion 10, a first moving portion 20, a second moving portion 30, a third moving portion 40, an ink discharge portion 50, a fourth moving portion 60, a fifth moving portion 70, a measuring portion 80, and a control portion 90.

The first moving portion 20, the second moving portion 30, the third moving portion 40, the ink discharge portion 50, the fourth moving portion 60, the fifth moving portion 70, the measuring portion 80, and the control portion 90 may be disposed on the supporting portion 10. The support part 10 may have a plane defined by a first direction DR1 and a second direction DR2 crossing the first direction DR 1. The support 10 may include a table 11, a first guide 12, and a second guide 13.

The table 11 is disposed on the support portion 10 and may have a plane defined by a first direction DR1 and a second direction DR 2. The display substrate DS may be placed on the stage 11, and the stage 11 may include an alignment mark (not shown) for aligning the display substrate DS. Here, the display substrate DS may be a part of the display device under manufacture, and may be a target (target) for the ink discharge unit 50 to discharge ink.

The first guide portions 12 may be disposed on the support portion 10 and disposed on both sides with a space therebetween through the table 11. For example, two first guide portions 12 may be provided, and the two first guide portions 12 may be disposed at intervals along the first direction DR 1. The first guide parts 12 may extend in the second direction DR2, respectively, and an extension length of each of the first guide parts 12 in the second direction DR2 may be at least longer than a side length of the display substrate DS. At this time, the side length of the display substrate DS is a length measured in the second direction DR 2.

The first guide portion 12 may guide the first moving portion 20 to be linearly movable in an extending direction of the first guide portion 12. The first guide 12 may include a Linear motion rail (Linear motion rail), for example.

The second guide portions 13 may be disposed on the support portion 10 and between the first guide portions 12. For example, two second guide portions 13 may be provided, and the two second guide portions 13 may be spaced apart along the first direction DR 1. At this time, in order to arrange the second guide portions 13 between the first guide portions 12, the spaced distance between the second guide portions 13 may be smaller than the spaced distance between the first guide portions 12. The second guide portions 13 may extend in the second direction DR2, and the extension length of each second guide portion 13 in the second direction DR2 may be at least longer than the side length of the ink discharge portion 50. At this time, the side length of the ink discharge portion 50 is a length measured in the second direction DR 2.

The second guide portion 13 may guide the fourth moving portion 60 to be linearly movable in the extending direction of the second guide portion 13. The second guide portion 13 may include a Linear motion rail (Linear motion rail), for example.

The first moving part 20 may linearly reciprocate in the second direction DR 2. The first moving part 20 may include a pillar member 20a and a horizontal member 20 b. Although the pillar member 20a and the horizontal member 20b are shown to have rectangular parallelepiped rod shapes in fig. 1, the shapes of the pillar member 20a and the horizontal member 20b are not limited to this.

The pillar part 20a of the first moving part 20 may extend in a third direction DR3 crossing the first direction DR1 and the second direction DR2, respectively. For example, two support members 20a may be provided, and the two support members 20a may be disposed on both sides with the table 11 interposed therebetween. The leg members 20a are movable in the second direction DR2, which is the extending direction of the first guide portion 12, respectively. In one embodiment, the strut member 20a may be manually linearly moved or may be automatically linearly moved by a motor, an air cylinder, or the like. For example, the pillar member 20a may include a Linear motion block (Linear motion block) moving along a Linear motion rail to perform an automatic Linear motion.

The horizontal part 20b of the first moving part 20 may extend in the first direction DR1 between the pillar parts 20 a. Both side ends of the horizontal member 20b may be connected to the upper portion of each pillar member 20 a. The horizontal part 20b may include a first groove part 21 extending in the extending direction of the horizontal part 20b, i.e., the first direction DR 1. The first groove portion 21 may be disposed on one side surface of the horizontal member 20 b. For example, the first groove portion 21 may be disposed on one side surface facing the second direction DR2 among the side surfaces of the first moving portion 20. The first groove portion 21 may guide the second moving portion 30 to be linearly reciprocated along the extending direction of the first groove portion 21.

The second moving part 30 may linearly move in the first direction DR 1. The second moving portion 30 may be connected to one side surface of the horizontal member 20b of the first moving portion 20, and may be disposed on the side surface of the first moving portion 20 on which the first groove portion 21 is disposed, for example. The second moving portion 30 is connected to the first groove portion 21 and can linearly reciprocate in the first direction DR1 along the first groove portion 21. As an example, the second moving part 30 may include a linear motor or the like.

The third moving portion 40 may be disposed at one side of the second moving portion 30 and may linearly reciprocate along the third direction DR 3. For example, the third moving portion 40 may be disposed on the lower surface of the second moving portion 30. Here, the lower surface of the second moving part 30 may be a surface of the second moving part 30 facing the table 11. As an example, the third moving portion 40 may include a pneumatic cylinder, etc.

The ink discharge portion 50 may be disposed on the lower surface of the third moving portion 40. The ink discharge portion 50 is movable together with the movement of the first, second, and third moving

portions

20, 30, and 40. That is, the ink discharge portion 50 can move in the first to third directions DR1, DR2, and DR 3.

The Ink ejection portion 50 can eject droplets of the Ink in the third direction DR3 toward the display substrate DS. In this case, the Ink may be a high molecular or low molecular organic material corresponding to a light emitting layer of the organic light emitting display device. As another example, the Ink may be a Liquid Crystal (Liquid Crystal), an alignment Liquid, or a red, green, or blue Liquid in which pigment particles are mixed in a solvent. As yet another example, the Ink may include a solution containing inorganic particles such as quantum dot substances or the like. The Ink ejection section 50 may include a nozzle section (not shown), and may eject droplets of the Ink through the nozzle section. The nozzle portion may be disposed on one surface of the ink discharge portion 50, for example, on the lower surface of the ink discharge portion 50.

The fourth moving part 60 may linearly reciprocate in the second direction DR 2. In one embodiment, the fourth moving unit 60 may perform a manual linear motion, or may perform an automatic linear motion by including a motor, an air cylinder, or the like. For example, the fourth moving unit 60 may include a Linear motion block (Linear motion block) moving along a Linear motion track to perform an automatic Linear motion.

The fourth moving part 60 may include a second groove part 61 extending in the first direction DR 1. The second groove 61 may be disposed on the upper surface of the fourth moving part 60. The second groove portion 61 may guide the fifth moving portion 70 to be linearly reciprocated along the extending direction of the second groove portion 61.

The fifth moving part 70 may linearly reciprocate in the first direction DR 1. The fifth moving part 70 may be connected to an upper surface of the fourth moving part 60. The fifth moving part 70 may be connected to the second groove part 61 of the fourth moving part 60 and may linearly move in the first direction DR1 along the second groove part 61. As an embodiment, the fifth moving part 70 may include a linear motor or the like.

The measuring portion 80 may be disposed on the fifth moving portion 70. The measuring section 80 can measure the surface shape of one surface (for example, the lower surface) of the ink discharge section 50 provided with the nozzle section by scanning the surface. Here, the surface shape may be a two-dimensional surface shape or a three-dimensional surface shape.

As an example, the measuring part 80 may be a non-contact type displacement sensor using a Beam (Beam). The beam may be a Laser beam. The measurement section 80 may obtain position information of the target surface by emitting a beam toward the target and receiving the beam reflected from the target surface. For example, the position information of the target surface may include information on the distance between the measuring part 80 and the target surface. Here, the target surface may be a lower surface of the ink discharge portion 50. The measuring unit 80 can obtain the profile of the lower surface of the ink discharge unit 50 using the position information. Further, the measuring section 80 can obtain the surface shape of the lower surface of the ink discharge section 50 from the contour. The contents related to this will be described later with reference to fig. 2 to 7.

As an alternative embodiment, an image pickup unit CMR may be provided on the fifth moving unit 70. The imaging unit CMR can be transferred in the first direction DR1 and the second direction DR2 by the fourth transfer unit 60 and the fifth transfer unit 70 together with the measurement unit 80. The image pickup portion CMR can obtain a video image by picking up an image of the lower surface of the ink discharge portion 50. The video image may be used in controlling the position of the measuring part 80 so that the beam emitted from the measuring part 80 may be irradiated to a desired position on the target to scan a desired region.

The control unit 90 is electrically connected to the first moving unit 20, the second moving unit 30, and the third moving unit 40, and can control the positions and movements of the first to third moving

units

20, 30, and 40. The control unit 90 is electrically connected to the fourth moving unit 60 and the fifth moving unit 70, and can control the positions and movements of the fourth and fifth moving

units

60 and 70. The control section 90 is electrically connected to the ink discharge section 50 and can control the ink discharge time, the ink discharge amount, and the like of the ink discharge section 50.

The control unit 90 is electrically connected to the measurement unit 80, and can acquire and analyze information on the surface shape of the lower surface of the ink discharge unit 50 measured by the measurement unit 80. The control section 90 can determine whether or not the shape of the Ink located in the nozzle section of the Ink discharge section 50 is abnormal based on the information on the surface shape. Here, the shape of the Ink may include a form, a position, a volume, a size, and the like. If it is determined that the shape of the Ink is abnormal, the user may be notified to stop the Ink discharge from the Ink discharge unit 50 or to adjust the amount of the Ink in the nozzle unit. Thus, the process quality in the ink discharge process can be improved, and the manufacturing quality and yield of the display device can be improved.

The control unit 90 is electrically connected to the imaging unit CMR, and can acquire and analyze a video image of the lower surface of the ink discharge unit 50 captured by the imaging unit CMR. The control unit 90 controls the movement of the fourth and fifth moving

units

60 and 70 based on the video image, and controls the position of the measuring unit 80 so that the measuring unit 80 scans a desired region of the lower surface of the ink discharge unit 50.

Fig. 2 is a bottom perspective view schematically illustrating a part of a manufacturing apparatus of a display device according to an embodiment of the present invention, and fig. 3 is a bottom view schematically illustrating a part of the manufacturing apparatus of a display device according to an embodiment of the present invention.

In fig. 2, the components around the Ink discharge portion 50 and the measurement portion 80 are illustrated together, and in fig. 3, the first surface S1 of the Ink discharge portion 50 and the Ink in the nozzle portion NP are illustrated. The same reference numerals are given to the same or corresponding components as those described above with reference to fig. 1, and redundant description thereof will be omitted.

Referring to fig. 2 and 3, the Ink ejection portion 50 may include at least one nozzle portion NP for ejecting the Ink. The Ink to be discharged to the display substrate DS (see fig. 1) may be present in each nozzle portion NP.

The nozzle portion NP may be disposed on the first surface S1 of the ink discharge portion 50. The first surface S1 of the ink discharge portion 50 may be the surface of the ink discharge portion 50 facing the measurement portion 80, and for example, the first surface S1 may be the lower surface of the ink discharge portion 50. It is understood that the first surface S1 of the Ink discharge portion 50 includes the surface of the Ink in the nozzle portion NP.

As an example, the ink discharge portion 50 may include a plurality of nozzle portions NP arranged in the first direction DR1 on the first surface S1. In fig. 3, the ink discharge unit 50 is shown to include the first to fifth nozzle portions NP1, NP2, NP3, NP4, and NP5, but the present invention is not limited to a specific number of nozzle portions NP.

The measuring portion 80 may be disposed at a distance from the first surface S1 of the ink discharge portion 50. For example, the measurement portion 80 may be spaced apart from the first surface S1 of the ink discharge portion 50 in the third direction DR 3. The measurement portion 80 may irradiate a Beam (Beam) to the first surface S1 of the ink discharge portion 50 in the third direction DR 3.

The measuring portion 80 may scan the first surface S1 of the ink discharge portion 50 in the first direction DR 1. That is, the first direction DR1 may be defined as a scanning direction. The ink discharge portion 50 or the measurement portion 80 may be moved in the first direction DR1 for scanning in the first direction DR 1. As described above, the ink discharge unit 50 can be moved in the first direction DR1 by the second moving unit 30 (see fig. 1), and the measurement unit 80 can be moved in the first direction DR1 by the fifth moving unit 70. For convenience of description, the case where the measuring unit 80 is transferred in the first direction DR1 by the fifth transfer unit 70 will be described.

As an example, in order to scan the first surface S1 of the ink discharge portion 50, the measurement portion 80 may irradiate a Spot Beam (Spot Beam) SB in the third direction DR3 toward the first surface S1 of the ink discharge portion 50. The spot beam SB may be a spot-like beam. The spot beam SB may be reflected on the first surface S1 of the ink ejection portion 50 and may further advance toward the measurement portion 80. The measurement unit 80 can receive the reflected spot beam SB to obtain the positional information of the first surface S1 of the ink discharge unit 50. As an example, the measuring portion 80 may include a point displacement sensor, for example, a Laser displacement sensor (Laser displacement sensor) or a Confocal displacement sensor (Confocal displacement sensor).

As an example, the measuring section 80 may measure the surface shape of the Ink in the nozzle section NP by scanning the first surface S1 of the Ink discharge section 50 in the first direction DR 1. Specifically, the measurement section 80 moves in the first direction DR1, and obtains the position information of the first plane S1 by the spot beam SB, whereby the two-dimensional profile of the first plane S1 can be obtained. Here, the two-dimensional contour may refer to position information along the third direction DR3 in the first direction DR 1. The two-dimensional profile of the first surface S1 may include the two-dimensional profile of the Ink, and therefore the measurement section 80 may obtain the two-dimensional surface shape of the Ink from the above-described two-dimensional profile of the Ink.

Specifically, the spot beam SB is movable in the scanning direction, i.e., the first direction DR1, on the first plane S1 to form a scanning path of the spot beam SB. The scanning path may traverse the nozzle portion NP and may overlap the Ink in the nozzle portion NP. Therefore, the position information of the first surface S1 obtained by the measurement section 80 scanning the first surface S1 of the Ink discharge section 50 may further include the surface position information of the Ink in the nozzle section NP. As a result, the measurement section 80 can obtain the two-dimensional profile of the first surface S1 including the two-dimensional profile of the Ink, and can obtain the two-dimensional surface shape of the Ink from the two-dimensional profile of the Ink.

As an alternative embodiment, an image pickup portion CMR disposed on the fifth moving portion 70 and on one side of the measurement portion 80 may be provided. For example, the imaging section CMR and the measurement section 80 may be arranged along the first direction DR 1. The image pickup portion CMR can obtain a video image by picking up an image of the first surface S1 of the ink discharge portion 50. The video image may include not only the position of the nozzle portion NP on the first surface S1 but also information on the position irradiated with the spot beam SB. Therefore, the above-described video image can be used when the measuring unit 80 and the ink discharge unit 50 are aligned so that the scanning path of the spot beam SB traverses the nozzle unit NP. For example, the video image is transmitted to the control unit 90 (see fig. 1), and the control unit 90 may control the position of the measurement unit 80 so that the scanning path of the spot beam SB overlaps the Ink in the nozzle portion NP.

Fig. 4 is a sectional view schematically illustrating a part of a manufacturing apparatus of a display device according to an embodiment of the present invention. Fig. 4 shows a cross section of the Ink discharge unit 50 including the nozzle NP and the Ink in the nozzle NP.

Referring to fig. 4, the two-dimensional surface shape SS of the first surface S1 of the Ink discharge portion 50 measured by the measurement portion 80 may include the two-dimensional surface shape IS of the Ink. As described previously with reference to fig. 2 and 3, the two-dimensional surface shape SS of the first plane S1 may be obtained from the two-dimensional profile of the first plane S1 obtained by scanning the spot beam SB in the first direction DR1 over the first plane S1. The two-dimensional surface shape SS of the first surface S1 is indicated by a thick line in fig. 4.

The inside of the nozzle portion NP may be filled with Ink, and the Ink inside the nozzle portion NP may form a Meniscus (Meniscus). When a liquid is injected into the capillary, the surface of the liquid in the capillary is higher or lower than the free surface by capillarity, and a convex or concave curved surface is formed, and this state is referred to as a meniscus. The surface of the Ink in the nozzle portion NP is formed into a convex or concave curved surface by the cohesive force and specific gravity of the Ink, the affinity between the Ink and the nozzle portion NP, and the pressure difference between the Ink in the nozzle portion NP and the outside of the nozzle portion NP. If the meniscus of the Ink is defective or the meniscus of each nozzle portion NP varies greatly, the ejection accuracy of the Ink ejection portion 50 may be degraded. Therefore, it may be required to determine whether or not the shape of the Ink in the nozzle portion NP is abnormal.

According to an embodiment of the present invention, the control section 90 (see fig. 1) can determine whether or not there IS an abnormality in the shape of the Ink in the nozzle section NP based on the two-dimensional surface shape IS of the Ink obtained by the measurement section 80. Based on the determination result, the control unit 90 can notify the user to stop the ink discharge from the ink discharge unit 50 or to adjust the amount of ink in the nozzle NP. Thus, the process quality in the ink discharge process can be improved, and the manufacturing quality and yield of the display device can be improved.

Fig. 5 is a bottom perspective view schematically illustrating a part of a manufacturing apparatus of a display apparatus according to another embodiment of the present invention, and fig. 6 is a bottom view schematically illustrating a part of a manufacturing apparatus of a display apparatus according to another embodiment of the present invention.

In fig. 5, the components around the Ink discharge portion 50 and the measurement portion 80 are illustrated together, and in fig. 6, the first surface S1 of the Ink discharge portion 50 and the Ink in the nozzle portion NP are illustrated. The description will be mainly given of differences from the description given above with reference to fig. 2 and 3, while omitting the overlapping contents.

Referring to fig. 5 and 6, the measurement unit 80 may irradiate a Beam (Line Beam) LB to the first surface S1 of the ink discharge unit 50 in the third direction DR3 in order to scan the first surface S1 of the ink discharge unit 50. The Line beam LB may be a Line (Line) -shaped beam extending in the second direction DR 2. The beam LB may extend at least over a length greater than the diameter of the nozzle portion NP.

The line beam LB may be formed by focusing a plurality of spot beams SB. For example, one line beam LB may be formed by several hundred to several thousand spot beams SB being focused. Although eight spot beams SB are shown in fig. 6 arranged in a column to form one line beam LB, the present invention is not limited to the number and column of such spot beams SB.

The beam LB emitted from the measuring unit 80 may be reflected on the first surface S1 of the ink ejection unit 50 and may further travel toward the measuring unit 80. The measurement unit 80 can receive the reflected beam LB to obtain the positional information of the first surface S1 of the ink ejection unit 50.

The measurement portion 80 may scan the first surface S1 of the ink ejection portion 50 in the first direction DR1 by the beam LB. Here, a region scanned in the first direction by the line beam LB extending in the second direction DR2 may be defined as a scanning region SA. The scanning area SA of the measuring portion 80 may include a partial area of the first surface S1 of the ink discharge portion 50. For example, the scanning area SA may include an area provided with the nozzle portion NP and a peripheral area of the nozzle portion NP. Thereby, the surface shape of the Ink in the nozzle portion NP and the surface shape of the first surface S1 in the peripheral region of the nozzle portion NP can be measured. A specific method related thereto will be described later with reference to fig. 7.

In one embodiment, when the measuring unit 80 scans the first surface S1 of the ink discharge unit 50, the moving speed of the measuring unit 80 may be different depending on the scanning position. For example, the measuring unit 80 may move at a first speed when scanning a region where the nozzle portion NP is disposed, and the measuring unit 80 may move at a second speed when scanning a region where the nozzle portion NP is not disposed. Here, the region where the nozzle portion NP is not provided may be, for example, a region between the plurality of nozzle portions NP. The first speed and the second speed may be different from each other. For example, the first speed may be less than the second speed. That is, when scanning the region where the nozzle portion NP is disposed, the measuring portion 80 can move at a slower speed, thereby measuring the surface shape of the Ink in the nozzle portion NP more precisely. In contrast, when scanning the region where the nozzle portion NP is not provided, the measuring portion 80 can be moved at a faster speed, thereby shortening the overall scanning time.

As an example, the measuring portion 80 may include a linear displacement sensor, for example, a confocal linear sensor (confocal linear sensor), a Laser confocal displacement sensor (Laser displacement sensor), or a two-dimensional Laser displacement sensor (2D Laser displacement sensor).

As another example, the measurement portion 80 may include a Confocal microscope (Confocal microscope) or an interference microscope (Interferometric microscope). A confocal microscope is a microscope that can obtain a plurality of two-dimensional images of an object and reconstruct the three-dimensional structure of the object on the basis thereof. The Confocal Microscope may be, for example, a color Confocal Microscope (Chromatic Confocal Microscope), a color Line Confocal Microscope (Chromatic Line Confocal Microscope), an Inverted Confocal Microscope (Inverted Confocal Microscope), or the like. An interference microscope (Interferometric microscope) is a microscope that quantitatively measures a change in the roughness of a microstructure of an observation object, a change in phase, or the like. The interference Microscope may be, for example, a Laser interference Microscope (Laser interference Microscope), a White light interference Microscope (White light interference Microscope), or the like.

Fig. 7 is a perspective view schematically illustrating the ink surface shape measured by the manufacturing apparatus of a display device according to another embodiment of the present invention. In fig. 7, the ink discharge unit, the nozzle unit, and the ink are indicated by broken lines, and the three-dimensional surface shape SS' of the first surface measured by the measuring unit is indicated by solid lines.

Referring to fig. 7, the measurement section 80 (see fig. 5) may measure the three-dimensional surface shape SS 'of the first surface S1 while scanning the first surface S1 (see fig. 5) of the Ink ejection section 50 (see fig. 5) in the first direction DR1 by the beam LB, and thereby may obtain the three-dimensional surface shape IS' of the Ink (see fig. 5).

Specifically, when the line beam LB emitted from the measurement unit 80 is located at the first position P1, the position information of the first surface S1 corresponding to the line beam LB at the first position P1 can be obtained. As described previously, since the line beam LB extends in the second direction DR2, the position information of the above-described first plane S1 may be position information in the second direction DR2, and thus the first profile of the first plane S1 may be obtained. Here, the contour is a two-dimensional contour, and may refer to position information in the third direction DR3 on the second direction DR 2.

Next, as the measuring part 80 scans the first plane S1 in the first direction DR1, the line beam LB may be located at the second position P2. The measurement section 80 may obtain the position information of the first plane S1 corresponding to the line beam LB at the second position P2, and may thereby obtain the second profile of the first plane S1. Since the line beam LB at the second position P2 overlaps the Ink, the second profile of the first face S1 may include the first profile of the Ink.

Likewise, as the measuring section 80 scans the first plane S1 in the first direction DR1, the line beam LB may be located at the third position P3. The measurement section 80 may obtain position information of the first plane S1 corresponding to the line beam LB at the third position P3, and may thereby obtain a third profile of the first plane S1. Since the line beam LB at the third position P3 also overlaps with the Ink, the third profile of the first plane S1 may include the second profile of the Ink.

In this manner, the measurement section 80 can obtain a plurality of two-dimensional profiles of the first plane S1 by the line beam LB, and can obtain the three-dimensional surface shape SS' of the first plane S1 by synthesizing and combining these two-dimensional profiles. The three-dimensional surface shape SS 'of the first side S1 may include the three-dimensional surface shape IS' of the Ink. As a result, the measuring section 80 can obtain the three-dimensional surface shape IS' of the Ink.

According to an embodiment of the present invention, the control section 90 (see fig. 1) can determine whether or not there IS an abnormality in the shape of the Ink in the nozzle section NP based on the three-dimensional surface shape IS' of the Ink obtained by the measurement section 80. The control section 90 may notify the user of stopping the Ink discharge by the Ink discharge section 50 or may adjust the amount of Ink in the nozzle section NP based on the determination result. Thus, the process quality in the ink discharge process can be improved, and the manufacturing quality and yield of the display device can be improved.

In addition, the three-dimensional surface shape SS' of the first surface S1 may further include the surface shape of the surrounding area of the nozzle portion NP. Therefore, it is possible to further judge whether or not the peripheral region of the nozzle portion NP is contaminated by adhesion of the Ink, impurities, or the like.

Fig. 8 is a bottom view schematically illustrating a part of a manufacturing apparatus of a display device according to still another embodiment of the present invention. The same reference numerals are given to the same or corresponding components as those described above with reference to fig. 6, and redundant description thereof will be omitted.

Referring to fig. 8, an angle θ formed by the scanning direction of the measuring section 80 and the extending direction of the line beam LB may be greater than 0 ° and less than 90 °. In this case, the vertical distance V between the spot beams SB constituting the line beam LB may be reduced. Here, the vertical distance V refers to a distance between the spot beams SB in a direction (e.g., the second direction DR2 of fig. 8) perpendicular to the scanning direction (e.g., the first direction DR1 of fig. 8).

As the vertical distance V decreases, a more precise three-dimensional surface shape can be obtained. The three-dimensional surface shape of the first plane S1 obtained by the line beam LB being scanned in the first direction DR1 may be understood as the sum of the two-dimensional surface shapes of the first plane S1 obtained by the respective spot beams SB constituting the line beam LB being scanned in the first direction DR 1. At this time, if the vertical distance V is decreased, an effect of decreasing the interval between the two-dimensional surface shapes of the first surface S1 obtained by the respective spot beams SB can be produced. That is, a more compact two-dimensional surface shape can be obtained, and thus a precise three-dimensional surface shape can be obtained.

Fig. 9a and 9b are sectional views each schematically showing a part of an apparatus for manufacturing a display device according to an embodiment of the present invention. Fig. 9a and 9b show the case where the shape of the Ink in the second nozzle portion NP2 is poor, and the case where the shape of the Ink in the first nozzle portion NP1 and the third to fifth nozzle portions NP3, NP4, NP5 is good.

Referring to fig. 9a and 9b, it IS possible to determine whether or not the shape of the Ink IS abnormal based on the two-dimensional surface shape IS of the Ink. Of course, the determination may be made based on the three-dimensional surface shape IS' (see fig. 7) of the Ink, and the following description will be made centering on the case of the two-dimensional surface shape IS of the Ink for convenience of description.

The control section 90 (see fig. 1) may receive the two-dimensional surface shape SS of the first surface S1 transferred by the measurement section 80 (see fig. 1) and may analyze the two-dimensional surface shape IS of the Ink in the two-dimensional surface shape SS of the first surface S1. First, the control unit 90 may compare the surface shape IS of the Ink in the first to fifth nozzle portions NP1, NP2, NP3, NP4, NP5 with a predetermined reference surface shape R of the Ink. Then, if the positional difference in the third direction DR3 between the surface shape IS of the Ink and the reference surface shape R IS larger than a set value, it can be determined as an abnormal state.

For example, the first surface shape IS1 of the Ink in the first nozzle portion NP1 may substantially match the reference surface shape R, and in this case, the first surface shape IS1 may be determined to be good. In contrast, the second surface shape IS2 of the Ink in the second nozzle portion NP2 may be different from the reference surface shape R. Specifically, there may be a positional difference e between the second surface shape IS2 and the reference surface shape R in the third direction DR 3. At this time, if the position difference e IS larger than a predetermined set value, the control unit 90 may determine that the second surface shape IS2 IS in an abnormal state.

In this way, whether or not the shape of the Ink IS abnormal can be determined from the two-dimensional surface shape IS of the Ink. Based on the determination result, the control unit 92 can notify the user to stop the ink discharge from the ink discharge unit 50 or adjust the amount of ink in the nozzle NP. Thus, the process quality in the ink discharge process can be improved, and the manufacturing quality and yield of the display device can be improved.

Referring to fig. 10, a display device DP manufactured according to an embodiment of the present invention may include a display area DA and a peripheral area PA located outside the display area DA. The display device DP may provide an image by an array of a plurality of pixels PX two-dimensionally arranged on the display area DA.

The peripheral area PA is an area where no image is provided, and may entirely or partially surround the display area DA. A driver or the like for supplying an electric signal or power to the pixel circuit corresponding to each pixel PX may be disposed in the peripheral area PA. A pad, which is a region electrically connectable to an electronic component, a printed circuit board, or the like, may be disposed in the peripheral region PA.

In the following, a case where the display device DP includes an Organic Light Emitting Diode (OLED) as a Light Emitting element (Light Emitting element) will be described, but the display device DP of the present invention is not limited thereto. As another example, the Display device DP may be a Light Emitting Display device including Inorganic Light Emitting diodes (Inorganic Light Emitting Display). The inorganic light emitting diode may comprise a PN diode comprising a material based on an inorganic semiconductor. If a forward voltage is applied to the PN junction diode, the PN junction diode can be injected with holes and electrons, and emit light of a prescribed color by converting energy generated by recombination of the holes and electrons into light energy. The aforementioned inorganic light emitting diode may have a width of several micrometers to several hundred micrometers, and in some embodiments, the inorganic light emitting diode may be referred to as a Micro light emitting diode (Micro LED). In another embodiment, the Display device DP may be a Quantum dot Light Emitting Display (Quantum dot Light Emitting Display).

The display device DP is not only used as a display screen of a portable electronic device such as a Mobile phone (Mobile phone), a smart phone (smart phone), a tablet personal computer (tablet personal computer), a Mobile communication terminal, an electronic notebook, an electronic book, a Portable Multimedia Player (PMP), a navigator, an Ultra Mobile Personal Computer (UMPC), and the like, but also used as a display screen of various products such as a television, a notebook PC, a monitor, an advertisement board, and an internet of things (IOT). In addition, the display device DP of an embodiment may be used in a wearable device (wearable device) such as a smart watch (smart watch), a watch phone (watch phone), a glasses type display, and a Head Mounted Display (HMD). In addition, the Display device DP of an embodiment can be used as an instrument panel of an automobile, a Center Information Display (CID) provided on a Center console (Center console) or a dash panel of the automobile, an indoor mirror Display (room mirror Display) instead of a side mirror of the automobile, and a Display screen provided behind a front seat as an entertainment device for a rear seat of the automobile.

Fig. 11 is a sectional view schematically illustrating a display device manufactured according to an embodiment of the present invention, which may correspond to a section of the display device taken along line XI-XI' of fig. 10.

Referring to fig. 11, the display device DP may include a laminate structure of a substrate 100, a pixel circuit layer PCL, a display element layer DEL, and an encapsulation layer 300.

The substrate 100 may be a multilayer structure including a base layer containing a polymer resin and an inorganic layer. For example, the substrate 100 may include a barrier layer including a base layer of a polymer resin and an inorganic insulating layer. For example, the substrate 100 may include a first base layer 101, a first barrier layer 102, a second base layer 103, and a second barrier layer 104, which are sequentially laminated. The first and second substrate layers 101 and 103 may include Polyimide (PI), Polyethersulfone (PES), polyarylate (polyarylate), Polyetherimide (PEI), polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polyphenylene sulfide (PPS), Polycarbonate (PC), cellulose Triacetate (TAC), and/or Cellulose Acetate Propionate (CAP), and the like. The first barrier layer 102 and the second barrier layer 104 may comprise an inorganic insulator such as silicon oxide, silicon oxynitride, and/or silicon nitride, and the substrate 100 may have a flexible characteristic.

A pixel circuit layer PCL is disposed on the substrate 100. In fig. 11, the pixel circuit layer PCL includes a thin film transistor TFT, a buffer layer 111 disposed below and/or above the components of the thin film transistor TFT, a first gate insulating layer 112, a second gate insulating layer 113, an interlayer insulating layer 114, a first planarizing insulating layer 115, and a second planarizing insulating layer 116.

The buffer layer 111 may reduce or block permeation of impurities, moisture, or external air from a lower portion of the substrate 100, and may provide a flat surface on the substrate 100. The buffer layer 111 may include an inorganic insulator such as silicon oxide, silicon oxynitride, or silicon nitride, and may be formed of a single layer or a multilayer structure including the above-described materials.

The thin film transistor TFT on the buffer layer 111 includes a semiconductor layer Act, and the semiconductor layer Act may include polycrystalline silicon. Alternatively, the semiconductor layer Act may include amorphous (amorphous) silicon, or may include an oxide semiconductor, or may include an organic semiconductor or the like. The semiconductor layer Act may include a channel region C and a drain region D and a source region S respectively disposed on both sides of the channel region C. The gate electrode GE may overlap the channel region C.

The gate electrode GE may include a low resistance metal substance. The gate electrode GE may include a conductive substance containing molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), or the like, and may be formed in a multi-layer or single-layer structure including the above materials.

The first gate insulating layer 112 between the semiconductor layer Act and the gate electrode GE may include, for example, silicon oxide (SiO)₂) Silicon nitride (SiN)_X) Silicon oxynitride (SiON), aluminum oxide (Al)₂O₃) Titanium oxide (TiO)₂) Tantalum oxide (Ta)₂O₅) Hafnium oxide (HfO)₂) Or zinc oxide (ZnO)₂) And the like.

The second gate insulating layer 113 may be disposed to cover the gate electrode GE. The second gate insulating layer 113 may include, for example, silicon oxide (SiO), similar to the first gate insulating layer 112 described above₂) Silicon nitride (SiN)_X) Silicon oxynitride (SiON), aluminum oxide (Al)₂O₃) Titanium oxide (TiO)₂) Tantalum oxide (Ta)₂O₅) Hafnium oxide (HfO)₂) Or zinc oxide (ZnO)₂) And the like.

An upper electrode Cst2 of the storage capacitor Cst may be disposed on an upper portion of the second gate insulating layer 113. The upper electrode Cst2 may overlap the gate electrode GE therebelow. At this time, the gate electrode GE and the upper electrode Cst2 overlapped with each other with the second gate insulating layer 113 interposed therebetween may form a storage capacitor Cst. That is, the gate electrode GE may function as the lower electrode Cst1 of the storage capacitor Cst.

As such, the storage capacitor Cst may be formed to overlap the thin film transistor TFT. In some embodiments, the storage capacitor Cst may also be formed not to overlap with the thin film transistor TFT.

The upper electrode Cst2 may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and/or copper (Cu), and may be a single layer or a multi-layer structure of the foregoing.

The interlayer insulating layer 114 may cover the upper electrode Cst 2. The interlayer insulating layer 114 may include silicon oxide (SiO)₂) Silicon nitride (SiN)_X) Silicon oxynitride (SiON), aluminum oxide (Al)₂O₃) Titanium oxide (TiO)₂) Tantalum oxide (Ta)₂O₅) Hafnium oxide (HfO)₂) Or zinc oxide (ZnO)₂) And the like. The interlayer insulating layer 114 may be a single layer or a multilayer structure including the aforementioned inorganic insulator.

The drain electrode DE and the source electrode SE may be respectively located on the interlayer insulating layer 114. The drain electrode DE and the source electrode SE may be connected to the drain region D and the source region S, respectively, through contact holes formed in an insulating layer thereunder. The drain electrode DE and the source electrode SE may include a material having good conductivity. The drain electrode DE and the source electrode SE may include a conductive substance containing molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), or the like, and may be formed in a multi-layer or single-layer structure including the above materials. As an example, the drain electrode DE and the source electrode SE may have a multilayer structure of Ti/Al/Ti.

The first planarization insulating layer 115 may cover the drain electrode DE and the source electrode SE. The first planarization insulating layer 115 may include an organic insulator such as a general-purpose polymer such as polymethyl methacrylate (PMMA) or Polystyrene (PS), a polymer derivative having a phenolic group, an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluorine polymer, a p-xylene polymer, a vinyl alcohol polymer, and a mixture thereof.

The second planarizing insulating layer 116 may be disposed on the first planarizing insulating layer 115. The second planarizing insulating layer 116 may include the same substance as the first planarizing insulating layer 115, and may include an organic insulator such as a general-purpose polymer such as polymethyl methacrylate (PMMA) or Polystyrene (PS), a polymer derivative having a phenolic group, an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluorine polymer, a p-xylene polymer, a vinyl alcohol polymer, and a mixture thereof.

A display element layer DEL may be disposed on the pixel circuit layer PCL of the aforementioned structure, the display element layer DEL may include an organic light emitting diode OLED as a display element (i.e., a light emitting element), and the organic light emitting diode OLED may include a laminate structure of the pixel electrode 210, the intermediate layer 220, and the common electrode 230. The organic light-emitting diode OLED may emit, for example, red, green or blue light, or may emit red, green, blue or white light. The organic light emitting diode OLED may emit light through a light emitting region, which may be defined as a pixel PX.

The pixel electrode 210 of the organic light emitting diode OLED may be electrically connected to the thin film transistor TFT through contact holes formed on the second planarization insulating layer 116 and the first planarization insulating layer 115 and a contact metal CM disposed on the first planarization insulating layer 115.

The pixel electrode 210 may include, for example, Indium Tin Oxide (ITO), Indium Zinc Oxide (IZO), zinc oxide (ZnO), indium oxide (In)₂O₃(ii) a indium oxide), indium gallium oxide (IGO; indium gallium oxide) or aluminum zinc oxide (AZO; an aluminum zinc oxide). As another example, the pixel electrode 210 may include a reflective film including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), or a compound thereof. As another embodiment, the pixel electrode 210 may further include ITO, IZO, ZnO or In ₂O₃A film formed above/below the aforementioned reflection film.

A pixel defining film 117 is disposed on the pixel electrode 210, and the pixel defining film 117 has an opening 117OP through which a central portion of the pixel electrode 210 is exposed. The pixel defining film 117 may include an organic insulator and/or an inorganic insulator. The opening 117OP may define a light emitting region for light emitted from the organic light emitting diode OLED. For example, the size/width of the opening 117OP may correspond to the size/width of the light emitting region. Accordingly, the size and/or width of the pixels PX may depend on the size and/or width of the openings 117OP of the corresponding pixel defining films 117.

The intermediate layer 220 may include a light emitting layer 222 formed to correspond to the pixel electrode 210. The light-emitting layer 222 may include a high molecular or low molecular organic substance that emits light of a predetermined color. Alternatively, the light-emitting layer 222 may include an inorganic light-emitting substance, or may include quantum dots.

As an embodiment, the intermediate layer 220 may include a first functional layer 221 and a second functional layer 223 disposed below and above the light emitting layer 222, respectively. The first functional Layer 221 may include, for example, a Hole Transport Layer (HTL), or may include a Hole Transport Layer and a Hole Injection Layer (HIL). The second functional Layer 223 is a component disposed above the light-emitting Layer 222, and may include an Electron Transport Layer (ETL) and/or an Electron Injection Layer (EIL). The first functional layer 221 and/or the second functional layer 223 may be a common layer formed to entirely cover the substrate 110, as in the case of the common electrode 230 described later.

The common electrode 230 may be disposed on the pixel electrode 210 and overlap the pixel electrode 210. The common electrode 230 may be formed of a conductive substance having a low work function. For example, the common electrode 230 may include a (semi-) transparent layer including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), or an alloy thereof, or the like. Alternatively, the common electrode 230 may further include, for example, ITO, IZO, ZnO or In on the (semi-) transparent layer including the foregoing₂O₃Such a layer. The common electrode 230 may be integrally formed in such a manner as to entirely cover the substrate 100.

The encapsulation layer 300 may be disposed on and cover the display element layer DEL. The encapsulation layer 300 includes at least one inorganic encapsulation layer and at least one organic encapsulation layer, and as an embodiment, the encapsulation layer 300 illustrated in fig. 11 includes a first inorganic encapsulation layer 310, an organic encapsulation layer 320, and a second inorganic encapsulation layer 330, which are sequentially laminated.

The first inorganic encapsulation layer 310 and the second inorganic encapsulation layer 330 may include more than one inorganic substance of aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon nitride, and silicon oxynitride. The organic encapsulation layer 320 may include a substance of a polymer (polymer) series. The polymer series of materials may include acrylics, epoxies, polyimides, polyethylenes, and the like. As an example, the organic encapsulation layer 320 may include acrylate. The organic encapsulation layer 320 may be formed by curing a monomer or coating a polymer. The organic encapsulation layer 320 may have transparency.

While the invention has been described with reference to the embodiments illustrated in the drawings, which are merely exemplary of the invention, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof. Therefore, the true technical scope of the present invention should be determined by the technical idea of the appended claims.

Claims

1. An apparatus for manufacturing a display device, comprising:

an ink discharge unit including a nozzle unit for discharging ink; and

a measuring portion disposed apart from the first surface of the ink discharge portion,

the nozzle unit is disposed on the first surface of the ink discharge unit,

the measuring section obtains a surface shape of the ink in the nozzle section by scanning the first surface of the ink discharge section in a first direction.

2. The manufacturing apparatus of a display device according to claim 1,

the ink discharge portion includes a plurality of nozzle portions arranged in the first direction on the first surface of the ink discharge portion.

3. The manufacturing apparatus of the display device according to claim 1,

further comprising a first moving portion for moving the measuring portion in the first direction.

4. The manufacturing apparatus of the display device according to claim 3,

further comprising a second moving section for moving the measuring section in a second direction intersecting the first direction.

5. The manufacturing apparatus of a display device according to claim 1,

the measurement unit irradiates a spot beam toward the first surface of the ink discharge unit in a third direction intersecting the first direction.

6. The manufacturing apparatus of a display device according to claim 5,

the measuring section obtains a two-dimensional profile of the ink by the spot beam, and obtains a two-dimensional surface shape of the ink from the two-dimensional profile.

7. The manufacturing apparatus of a display device according to claim 1,

the measuring section irradiates a beam toward the first surface of the ink discharge section in a third direction intersecting the first direction,

the line beam extends in a second direction that intersects the first direction and the third direction.

8. The manufacturing apparatus of a display device according to claim 7,

the measurement section obtains a plurality of two-dimensional profiles of the ink by the line beam, and obtains a three-dimensional surface shape of the ink from the plurality of two-dimensional profiles.

9. The manufacturing apparatus of a display device according to claim 7,

the scanning region of the measuring section includes a region in which the nozzle section is disposed and a peripheral region of the nozzle section.

10. The manufacturing apparatus of the display device according to claim 1,

further comprising a control portion electrically connected to the measuring portion and determining whether or not there is an abnormality in the shape of the ink based on the surface shape of the ink measured by the measuring portion.