CN113871318A - Manufacturing device of display device - Google Patents

Manufacturing device of display device Download PDF

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Publication number
CN113871318A
CN113871318A CN202011452314.7A CN202011452314A CN113871318A CN 113871318 A CN113871318 A CN 113871318A CN 202011452314 A CN202011452314 A CN 202011452314A CN 113871318 A CN113871318 A CN 113871318A
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CN
China
Prior art keywords
display device
droplet
manufacturing apparatus
profile
contour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011452314.7A
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Chinese (zh)
Inventor
韩政洹
许明洙
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Samsung Display Co Ltd
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Samsung Display Co Ltd
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Filing date
Publication date
Application filed by Samsung Display Co Ltd filed Critical Samsung Display Co Ltd
Publication of CN113871318A publication Critical patent/CN113871318A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/70—Testing, e.g. accelerated lifetime tests

Abstract

The present invention provides a manufacturing apparatus of a display device, which can not only measure liquid drops, but also measure abnormal vibration together, thereby simplifying the structure, saving the cost and realizing accurate liquid drop discharge, the manufacturing apparatus of the display device comprises: testing the substrate; a droplet discharge unit having a nozzle for discharging droplets; a measuring section movable in a first direction above the test substrate and for measuring an outer surface shape of the test substrate in a measurement region; and a control section for deriving vibration data from the outer surface shape and analyzing the vibration data.

Description

Manufacturing device of display device
Technical Field
The present invention relates to a manufacturing apparatus of a display device.
Background
Mobility-based electronic devices are widely used. As mobile electronic devices, tablet computers have recently been widely used in addition to small electronic devices such as mobile phones.
Such a mobile electronic device includes a display device in order to provide visual information such as images or videos, which are various functions, to a user. Recently, the proportion of display devices in electronic devices has been increasing, and structures that can be bent from a flat state to a predetermined angle have been developed.
In addition, the display device may include various layers formed through various processes. For example, the display device may include a layer made of an organic material, and the layer made of an organic material may be formed through a process of discharging organic liquid droplets onto the display substrate, for example, a printing process. In order to realize a precise image of a display device, it is necessary to eject a droplet of a precise volume to a precise position on a display substrate.
Disclosure of Invention
In order to realize a precise image of the display device, a process of measuring the discharge position and volume of the droplet by discharging the organic droplet onto the test substrate may be performed before the printing process. In addition, it may be required to grasp whether or not the manufacturing apparatus that performs the printing process vibrates abnormally (Abnormal vibration). Generally, a device for measuring the discharge position and volume of a droplet and a device for measuring abnormal vibration are provided separately.
However, an object of an embodiment of the present invention is to provide a manufacturing apparatus of a display device capable of not only checking a discharge position and a volume of a droplet but also analyzing whether or not the manufacturing apparatus is abnormally vibrated. However, such a problem is illustrative, and the scope of the present invention is not limited to this problem.
According to an aspect of the present invention, there is provided an apparatus for manufacturing a display device, comprising: testing the substrate; a droplet discharge unit having a nozzle for discharging droplets; a measuring section movable in a first direction above the test substrate and measuring an outer surface shape of the test substrate in a measurement region; and a control section for deriving vibration data from the outer surface shape and analyzing the vibration data.
According to the present embodiment, the measured outer surface shape may include a first profile extending in the first direction, and the vibration data may include height information of the first profile.
According to the present embodiment, the control part may determine the presence or absence of an abnormal state by comparing a maximum variation width of the height of the first contour with a predetermined set value in a first section of the first contour.
According to this embodiment, the control unit may calculate a first height average line from the height information of the first contour, and analyze a form of the first height average line to determine whether there is an abnormal state.
According to this embodiment, the measured shape of the outer surface may include: a droplet region where the droplets discharged by the droplet discharge section are located; and a surrounding area surrounding the droplet area, the first profile may overlap the surrounding area.
According to the present embodiment, at least a part of the first contour may overlap with a region where the droplet is ejected onto the test substrate by the droplet ejection section.
According to the present embodiment, the measured shape of the outer surface may further include a second profile extending in the first direction and spaced apart from the first profile in a second direction crossing the first direction, and the vibration data may further include height information of the second profile.
According to the present embodiment, the control portion may determine whether there is an abnormal state by comparing the maximum variation width of the height of the first profile with a predetermined set value in a first section of the first profile and comparing the maximum variation width of the height of the second profile with a predetermined set value in a second section of the second profile.
According to this embodiment, the control unit may determine whether there is an abnormal state by analyzing the form of a first height average line calculated from the height information of the first contour and a second height average line calculated from the height information of the second contour.
According to this embodiment, the measured shape of the outer surface may include: a droplet region where the droplets discharged by the droplet discharge section are located; and a surrounding area surrounding the droplet area, one of the first profile and the second profile may overlap the surrounding area.
According to the present embodiment, at least a part of one of the first contour and the second contour may overlap with a region where the droplet is ejected onto the test substrate by the droplet ejection section.
Other aspects, features and advantages than those described above will become apparent from the following detailed description, the claims and the accompanying drawings, used to practice the following invention.
Such general and specific aspects may be implemented using systems, methods, computer programs, or any combination of systems, methods, and computer programs.
According to the embodiment of the present invention configured as described above, it is possible to realize a manufacturing apparatus of a display device capable of measuring not only liquid droplets but also abnormal vibration at the same time, thereby enabling a simplified structure and cost saving while realizing accurate liquid droplet ejection. Of course, the scope of the present invention is not limited by this effect.
Drawings
Fig. 1 is a perspective view schematically illustrating a manufacturing apparatus of a display device according to an embodiment of the present invention.
Fig. 2 is a perspective view schematically illustrating a part of a manufacturing apparatus of a display device according to an embodiment of the present invention.
Fig. 3 is a simulation result illustrating the outer surface shapes of the test substrate and the discharged droplet.
Fig. 4a and 4b are graphs showing height information of the contour in the outer surface shape of fig. 3.
Fig. 5 is a plan view illustrating an outer surface shape measured by a manufacturing apparatus of a display device of an embodiment of the present invention.
Fig. 6 is a plan view of an outer surface shape measured by a manufacturing apparatus of a display device of another embodiment of the present invention.
Fig. 7 is a plan view of an outer surface shape measured by a manufacturing apparatus of a display device of a further embodiment of the present invention.
Fig. 8 is a plan view schematically illustrating a display device manufactured by the manufacturing apparatus of a display device of an embodiment of the present invention.
Fig. 9 is a cross-sectional view schematically showing a part of a display device manufactured by the manufacturing apparatus of a display device according to the embodiment of the present invention.
Detailed Description
While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. The effects and features of the present invention and the methods of achieving the effects and features will be apparent with reference to the drawings and the detailed description of the embodiments. However, the present invention is not limited to the embodiments disclosed below, and can be implemented in various forms.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and when the embodiments are described with reference to the accompanying drawings, the same or corresponding components will be denoted by the same reference numerals, and redundant description thereof will be omitted.
In the following embodiments, the terms first, second, and the like are not used in a limiting sense, but are used for the purpose of distinguishing one structural element from other structural elements.
In the following embodiments, with respect to a singular expression, if a different meaning is not explicitly indicated in the context, the singular expression includes a plural expression.
In the following embodiments, terms such as "including" or "having" indicate the presence of a feature or a structural element described in the specification, and are not intended to exclude the possibility of adding one or more other features or structural elements.
In the following embodiments, when a portion of a film, a region, a structural element, or the like is referred to as being "over" or "on" another portion, this includes not only a case where it is "directly" over another portion but also a case where another film, a region, a structural element, or the like is present in the middle thereof.
In the drawings, the size of structural elements may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each structure shown in the drawings are arbitrarily shown for convenience of explanation, and the present invention is not limited to the illustrated contents.
In the case where a certain embodiment can be separately realized, a specific process sequence may be realized in a different order from the order described. For example, two steps described in succession may be performed substantially simultaneously, or may be performed in the reverse order to the order described.
In the present specification, "a and/or B" means a or B, or a and B. Further, "at least one of a and B" represents a case of a or B, or a and B.
In the following embodiments, when a film, a region, a structural element, or the like is referred to as being connected, the film, the region, or the structural element may be directly connected, or/and another film, a region, or a structural element may be indirectly connected to the film, the region, or the structural element. For example, in the present specification, when a film, a region, a structural element, or the like is electrically connected, a case where the film, the region, the structural element, or the like is directly electrically connected, or/and a case where another film, the region, the structural element, or the like is indirectly electrically connected in between are indicated.
The x-axis, y-axis, and z-axis are not limited to three axes on a rectangular coordinate system, and can be interpreted in a broad sense including the three axes. For example, the x, y, and z axes may be orthogonal to each other, but may also refer to different directions that are not orthogonal to each other.
Fig. 1 is a perspective view schematically illustrating a manufacturing apparatus of a display device according to an embodiment of the present invention.
Referring to fig. 1, the manufacturing apparatus 100 of the display device may include a support part 110, a first gantry 120, a first moving part 130, a droplet discharge part 140, a measurement part 150, a second gantry 160, a second moving part 170, a control part 180, and a test substrate TS.
The support part 110 may include a table 111, a plurality of guide members 112, a substrate moving member 113, and a substrate rotating member 114.
The table 111 may include an alignment mark (not shown) for aligning the display substrate S.
Here, the display substrate S may be a display device under manufacture. The display substrate S may be glass or include a polymer resin, such as polyethersulfone (polyethersulfone), polyarylate (polyarylate), polyetherimide (polyetherimide), polyethylene naphthalate (polyethylenenaphthalate), polyethylene terephthalate (polyethyleneterephthalate), polyphenylene sulfide (polyphenylenesulfonate), polyimide (polyimide), Polycarbonate (PC), cellulose Triacetate (TAC), or cellulose acetate propionate (cellulose acetate propionate).
The plurality of guide members 112 may be provided on both sides of the substrate moving member 113 with a space therebetween. The length of the plurality of guide members 112 may be longer than the edge length of the display substrate S. At this time, the lengths of the plurality of guide members 112 and the edge length of the display substrate S may be measured in the y direction of fig. 1.
A first gantry 120 may be disposed on the plurality of guide members 112. In one embodiment, the plurality of guide members 112 may include a defined guide rail to enable the first gantry 120 to move linearly along the length of the plurality of guide members 112. For example, the plurality of guide members 112 may include Linear motion rails (Linear motion rails).
The substrate moving part 113 may be disposed on the table 111. The substrate moving member 113 may extend in a length direction of the plurality of guide members 112. For example, the substrate moving member 113 may extend in the y direction. Further, the substrate moving part 113 may include a guide rail to enable the substrate rotating part 114 to move linearly. For example, the substrate moving part 113 may include a Linear motion rail (Linear motion rail).
The substrate rotating member 114 may be provided to be rotatable on the substrate moving member 113. When the substrate rotating member 114 rotates, the display substrate S disposed on the substrate rotating member 114 may rotate. In one embodiment, the substrate rotating member 114 may rotate around a rotation axis perpendicular to a surface of the table 111 on which the display substrate S is mounted. When the substrate rotating member 114 rotates about a rotation axis perpendicular to the surface of the table 111 on which the display substrate S is mounted, the display substrate S provided on the substrate rotating member 114 may rotate about a rotation axis perpendicular to the surface of the table 111 on which the display substrate S is mounted. In this case, the substrate rotating part 114 may fix the display substrate S after the display substrate S is mounted. For example, the substrate rotating member 114 may include one of a vacuum chuck, an electrostatic chuck, and an adhesive chuck.
The first gantry 120 can be disposed on a plurality of guide members 112. That is, the first gantry 120 may be provided on a plurality of guide members 112 provided at both sides at intervals with the substrate moving member 113 therebetween.
The first gantry 120 is movable along the length of the plurality of guide members 112. In one embodiment, the first gantry 120 can be manually linearly moved or automatically linearly moved by a motor, an air cylinder, or the like. For example, the first gantry 120 may include a Linear motion block (Linear motion block) moving along a Linear motion guide to automatically perform a Linear motion.
The first moving part 130 may perform a linear motion on the first gantry 120. For example, the first gantry 120 may include a predetermined guide rail so that the first moving part 130 can perform a linear motion. In this case, the droplet discharge unit 140 is provided on the first moving unit 130, and is movable together with the first moving unit 130 when the first moving unit 130 moves.
The first moving part 130 and the droplet discharge part 140 may be provided in various ways. For example, one first moving unit 130 and one droplet discharge unit 140 may be provided. In this case, the droplet discharge part 140 may include one head and at least one nozzle provided in the head for discharging the droplet DR (see fig. 2).
As another example, a plurality of droplet discharge units 140 may be provided, and one first moving unit 130 may be provided. In this case, the plurality of droplet discharge units 140 may be provided on one first moving unit 130 so as to move simultaneously with the movement of the first moving unit 130. In this case, the droplet discharge part 140 may include at least one head provided with at least one nozzle.
As another example, the plurality of first moving portions 130 and the plurality of droplet discharge portions 140 may be provided separately. In this case, one droplet discharge unit 140 may be provided in one first movement unit 130, or one first movement unit 130 may be provided with a part of the plurality of droplet discharge units 140, and the other first movement unit 130 may be provided with the other part of the plurality of droplet discharge units 140.
For convenience of description, the following description will be made mainly in the case where one droplet discharge unit 140 is provided in one first movement unit 130.
The first moving part 130 may be provided in plurality. In this case, the number of the first moving parts 130 may be set to correspond to the number of the droplet discharge parts 140. For example, the first moving part 130 may include the 1 st-1 st moving part 131, the 1 st-2 nd moving part 132, and the 1 st-3 rd moving part 133.
The 1 st-1 st moving part 131 and the 1 st-2 nd moving part 132 may be spaced apart from each other at an interval equal to that between the 1 st-2 nd moving part 132 and the 1 st-3 rd moving part 133. In another embodiment, the interval between the 1 st-1 st moving part 131 and the 1 st-2 nd moving part 132 and the interval between the 1 st-2 nd moving part 132 and the 1 st-3 rd moving part 133 may be different from each other. In the case as described above, the 1 st-1 st to 3 rd moving parts 131 to 133 may move independently of each other.
The first moving part 130 may linearly move on the first gantry 120. Specifically, the first moving unit 130 may move in a longitudinal direction of the first gantry 120. For example, at least one of the 1 st-1 st moving part 131, the 1 st-2 nd moving part 132, and the 1 st-3 rd moving part 133 may move in the x direction or the-x direction.
In one embodiment, the first moving part 130 may be manually linearly moved. In another embodiment, the first moving part 130 may be provided with a motor, an air cylinder, or the like to automatically perform the linear motion. For example, the first moving part 130 may include a Linear motion block (Linear motion block) moving along a Linear motion guide.
The droplet discharge unit 140 may be provided on the first moving unit 130. For example, the first droplet discharge unit 141 may be provided on the 1 st-1 st moving unit 131, the second droplet discharge unit 142 may be provided on the 1 st-2 nd moving unit 132, and the third droplet discharge unit 143 may be provided on the 1 st-3 rd moving unit 133.
The droplet discharge unit 140 can discharge the droplet DR to the display substrate S. In this case, the Liquid droplet DR may be a Liquid Crystal (Liquid Crystal), an alignment Liquid, or a red, green, or blue ink in which pigment particles are mixed in a solvent. In another embodiment, the liquid droplet DR may be a high molecular or low molecular organic corresponding to a light emitting layer of an organic light emitting display device. As yet another example, the droplet DR may include a solution containing inorganic particles such as quantum dot substances.
The droplet discharge unit 140 may discharge the droplet DR onto the test substrate TS. The test substrate TS may be disposed on the table 111 and may be disposed between the plurality of guide members 112. In one embodiment, the test substrate TS may have the same shape as the display substrate S. In another embodiment, the test substrate TS may include a film supply portion, a film recovery portion, and a film. At this time, the film may be wound around the film supply unit and the film recovery unit. That is, the film can be wound around the film supply unit and the film collection unit. Next, the test substrate TS and the display substrate S are mainly shaped in the same manner, and the details will be described.
The first, second, and third droplet ejection portions 141, 142, and 143 of the droplet ejection portion 140 can independently adjust the amount of the droplets DR supplied. At this time, the first droplet discharge unit 141, the second droplet discharge unit 142, and the third droplet discharge unit 143 may be electrically connected to the control unit 180, respectively. Therefore, the amounts of the droplets DR discharged by the first droplet discharge unit 141, the second droplet discharge unit 142, and the third droplet discharge unit 143 can be adjusted by the control unit 180. In the case described above, at least one of the first to third droplet ejection parts 141 to 143 may include at least one nozzle for ejecting the droplet DR.
The measuring unit 150 can measure the droplet DR discharged onto the test substrate TS. For this reason, the measuring unit 150 can obtain the outer surface shape ES by scanning the measurement region of the test substrate TS (see fig. 3). The obtained outer surface shape ES may include a partial outer surface shape TS-S of the test substrate TS (see fig. 3) and an outer surface shape DR-S of the droplet DR on the test substrate TS (see fig. 3).
The measuring section 150 may have various forms. For example, the measuring part 150 may include a Confocal microscope (Confocal microscope), an interference microscope (Interferometric microscope), or a Chromatic Confocal line sensor (Chromatic Confocal line sensor). In this case, a Confocal microscope (Confocal microscope) is a microscope that can acquire a plurality of two-dimensional images of an object at different depths and reconstruct the three-dimensional structure of the object based on the two-dimensional images. The Confocal Microscope may be, for example, a color Confocal Microscope (chromatographic focal Microscope) or a color Line Confocal Microscope (chromatographic Line focal Microscope). An interference microscope (Interferometric microscope) is a microscope that quantitatively measures changes in the irregularities of a microstructure of an observation object, changes in phase, and the like. The interference Microscope may be, for example, a Laser interference Microscope (Laser interference Microscope) or a White light interference Microscope (White light interference Microscope), or the like. For convenience of description, the following description will be made mainly in a case where the measurement unit 150 includes a chromatic confocal line sensor.
The measuring part 150 may be disposed on the second moving part 170, and the second moving part 170 may be disposed on the second gantry 160.
The second gantry 160 may be disposed at one side of each guide member 112 disposed at both sides with a space therebetween through the test substrate TS. For example, one end portion of the second gantry 160 may be disposed at one side of one guide member 112 of the plurality of guide members 112, and the other end portion of the second gantry 160 may be disposed at one side of the remaining one guide member 112 of the plurality of guide members 112. Although fig. 1 illustrates a case where the second gantry 160 is provided on a plurality of guide members 112 on which the first gantry 120 is provided, as another embodiment, the second gantry 160 may be provided on other guide members instead of the guide members 112.
The second gantry 160 is movable along the length of the plurality of guide members 112. For example, the second gantry 160 can be moved in the y-direction or the-y-direction. In one embodiment, the second gantry 160 may be manually linearly moved or may be automatically linearly moved by a motor, an air cylinder, or the like. For example, the second gantry 160 may include a linear motion block that moves along a linear motion guide of the guide member 112.
The second moving part 170 may move in a longitudinal direction of the second gantry 160. For example, the second moving part 170 may move in the x-direction or the-x-direction. In one embodiment, the first moving part 130 may be manually linearly moved. In another embodiment, the first moving part 130 may be provided with a motor, an air cylinder, or the like to automatically perform the linear motion. For example, the second moving part 170 may include a linear motion block moving along a linear motion guide provided to the second gantry 160.
The control unit 180 can calculate at least one of the discharge position of the droplet DR and the volume of the droplet DR based on the outer surface shapes DR-S of the test substrate TS and the droplet DR measured by the measuring unit 150. The control unit 180 may control the ink discharge amount of the droplet discharge unit 140 or the position of the droplet discharge unit 140 based on the calculated result. For this, the control unit 180 may be electrically connected to the first gantry 120, the first moving unit 130, the droplet discharge unit 140, and the measurement unit 150.
Further, the control section 180 may derive data on the vibration of the manufacturing apparatus 100 of the display device from the outer surface shape ES measured by the measuring section 150 and analyze the data. This makes it possible to diagnose the state of the display device manufacturing apparatus 100 and to achieve effective equipment management.
The manufacturing apparatus 100 of the display device as described above can supply the droplets DR to the display substrate S to form, for example, an organic layer on the display substrate S. At this time, in order to manufacture a display device of good quality, the droplet DR needs to be accurately supplied to the display substrate S in the manufacturing apparatus 100 of the display device. In order to confirm this, the droplet discharge unit 140 may discharge the droplet DR to the test substrate TS before discharging the droplet DR to the display substrate S, and the measurement unit 150 may measure the droplet DR on the test substrate TS. The control unit 180 according to an embodiment of the present invention may comprehensively determine whether the discharge of the liquid drop DR is good and whether the state of the manufacturing apparatus 100 of the display device is good, etc., based on the result of the measurement by the measurement unit 150, and may determine whether the liquid drop DR is accurately supplied. The control unit 180 may control the manufacturing apparatus 100 of the display device or notify the user of the device abnormality information based on the determination result.
Fig. 2 is a perspective view schematically showing a part of an apparatus for manufacturing a display device according to an embodiment of the present invention, and mainly shows a test substrate and a measurement unit. Fig. 3 is a simulation result illustrating the outer surface shapes of the test substrate and the discharged droplet.
Referring to fig. 2 and 3, the measuring part 150 may move in the x direction and/or the-x direction on the test substrate TS, and may measure the outer surface shape ES by scanning a measurement region of the test substrate TS. Here, as shown in fig. 3, the outer surface shape ES of the three-dimensional shape may be acquired, and may include position information of the outer surface in the x direction, the y direction, and the z direction. The outer surface shape ES may include the local outer surface shape TS-S of the test substrate TS and the outer surface shape DR-S of the droplet DR on the test substrate TS. The measurement result of the measuring part 150 may be transmitted to the control part 180, and the control part 180 may calculate and analyze the discharge position and volume of the droplet DR based on the three-dimensional position information included in the outer surface shape DR-S of the droplet DR.
Further, according to an embodiment of the present invention, the control part 180 may derive vibration data of the manufacturing apparatus 100 of the display device from the test substrate TS and the outer surface shape ES of the droplet DR measured by the measuring part 150, and may know the vibration state of the manufacturing apparatus 100 of the display device by analyzing the vibration data. The measured outer surface shape ES may include a profile PF extending in the first direction, and height information of the profile PF may be acquired as vibration data. Here, the first direction may be the same as the moving direction of the measuring part 150, and may be, for example, an x direction or a-x direction. The height of the profile PF may be defined as the distance from a reference height, which may be, for example, a face of the table 111, to the position of the profile PF in the z-direction. The profile PF may comprise two-dimensional position information, which may for example comprise height information in the extension direction of the profile PF. For example, the profile PF of fig. 3 may include position information in the z-direction at a position in the x-direction.
Since the measuring section 150 scans the measuring region of the test substrate TS while moving in the x direction, for example, the height variation of the outer surface of the test substrate TS over time may be included in the profile PF in the x direction in the measured outer surface shape ES. Such a height change may be caused by vibration of the manufacturing apparatus 100 of the display device. Therefore, the vibration state of the manufacturing apparatus 100 of the display device can be known by analyzing the profile PF of the measured outer surface shape ES.
Next, a method for determining whether or not the state of the display device manufacturing apparatus 100 is good by the contour PF will be described in detail.
Fig. 4a and 4b are graphs showing height information of the contour in the outer surface shape of fig. 3.
Referring to fig. 4a and 4b, the horizontal axis of the graph may correspond to the position of the profile PF in the x direction of fig. 3, and the vertical axis may correspond to the position of the profile PF in the z direction, which is the height of the profile PF. The height information of the profile PF can be illustrated by a solid line graph, which can be understood as a set of coordinate values composed of a value on the abscissa axis representing the position of the profile PF in the x direction (hereinafter, referred to as an x value for convenience of description) and a value on the ordinate axis representing the height of the profile PF (hereinafter, referred to as a z value for convenience of description).
The height average line LA is illustrated by a dashed line. According to an embodiment of the present invention, the height average line LA can be calculated from the height information of the profile PF. For example, a predetermined range including consecutive x values may be set in the solid line graph, and the average value of z values corresponding to each x value in the range may be calculated. The height average line LA can be obtained by averaging the z values while continuously moving within the above-described predetermined range. The high average line LA has a prescribed inclination in fig. 4a, which may be caused by not achieving precise parallelism between the moving direction of the measuring portion 150 and one surface of the test substrate TS.
Referring to fig. 4a, the maximum variation dz of the height of the profile PF is calculated in a predetermined section dx on the horizontal axis, and the maximum variation dz is compared with a predetermined set value to determine whether the manufacturing apparatus 100 of the display device is in an abnormal state. The predetermined interval dx may be set by a user. When the maximum variation width dz of the height of the profile PF exceeds a predetermined set value, it can be determined that abnormal vibration has occurred in the manufacturing apparatus 100 of the display apparatus.
Referring to fig. 4b, the height average line LA' of fig. 4b is represented as an irregular curve, unlike the height average line LA of fig. 4 a. This may be caused by abnormal movement of the measuring part 150 or bending of the stage 111 supporting the test substrate TS or the test substrate TS itself. This phenomenon may prevent accurate measurement of the droplet DR, and may adversely affect the manufacturing quality of the display device. Therefore, such a phenomenon can be judged as an abnormal state. As an example, when the shape of the high average line LA' is meandering or has a waveform, it can be determined as an abnormal state.
As described above, according to the embodiment of the present invention, the control unit 180 can analyze not only the discharge position and volume of the droplet DR from the external surface shape ES measured by the measurement unit 150, but also whether or not the manufacturing apparatus 100 of the display device is in an abnormal state due to abnormal vibration or the like. Accordingly, it is not necessary to separately provide a device for measuring the discharge position and volume of the liquid droplet and a device for measuring abnormal vibration, and thus it is possible to realize a manufacturing device of a display device capable of accurately discharging the liquid droplet while simplifying the structure and saving the cost.
Fig. 5 is a plan view illustrating an outer surface shape measured by a manufacturing apparatus of a display device of an embodiment of the present invention.
Referring to fig. 5, the outer surface shape ES measured by the measurement unit 150 (fig. 2) may include a droplet region DRA where the droplet DR discharged by the droplet discharge unit 140 is located and a peripheral region SRA surrounding the droplet region DRA. In fig. 5, 18 droplets DR and a droplet region DRA are illustrated, but the present invention is not limited thereto.
As an example, the contour PF for deriving the vibration data that is the analysis target of the control unit 180 may overlap the surrounding area SRA. In this case, the contour PF may be located between adjacent drop regions DRA, and may be located adjacent to the edges of the outer surface shape ES. This makes it possible to acquire vibration data independent of the position, surface pattern, vibration, and the like of the droplet DR, and has an advantage that abnormal vibration can be more easily analyzed.
Fig. 6 is a plan view illustrating an outer surface shape measured by a manufacturing apparatus of a display device of another embodiment of the present invention.
Referring to fig. 6, as another embodiment, at least a part of the profile PF for deriving the vibration data to be analyzed by the control unit 180 may overlap a region where the droplet DR discharged onto the test substrate TS by the droplet discharge unit 140 is located. That is, at least a portion of the profile PF may overlap the drop region DRA. In this case, vibration data may be derived using only the portion of the profile PF that does not overlap the drop region DRA.
Accordingly, even when the droplets DR are densely discharged on the test substrate TS, the vibration data can be acquired, and more droplets DR can be discharged on the test substrate TS having the same area, so that the application rate of the test substrate TS can be improved.
Fig. 7 is a plan view illustrating an outer surface shape measured by a manufacturing apparatus of a display device of a further embodiment of the present invention.
Referring to fig. 7, as a further embodiment, the measured outer surface shape ES may include a plurality of profiles PF extending in the first direction, and height information of the plurality of profiles PF may be acquired as vibration data.
As an example, the plurality of profiles PF may include a first profile PF1 and a second profile PF 2. As another example, the plurality of profiles PF may include a first profile PF1, a second profile PF2, and a third profile PF 3. Hereinafter, for convenience of description, a case where the plurality of profiles PF includes first to third profiles PF1, PF2, PF3 will be described.
The first to third profiles PF1, PF2, PF3 may respectively extend in a first direction, for example, the x-direction, which may be the same as the moving direction of the measuring part 150. The first to third profiles PF1, PF2, PF3 may be disposed spaced apart from each other in a second direction crossing the first direction, which may be, for example, the y direction.
One of the first to third profiles PF1, PF2, PF3 may overlap the surrounding region SRA, and at least a part of the other profile may overlap the droplet region DRA. That is, at least a part of the other contour may overlap with a region where the droplet DR is ejected onto the test substrate TS by the droplet ejection section 140.
The first to third profiles PF1, PF2, PF3 may include two-dimensional position information, for example, may include height information in the extending direction of each of the first to third profiles PF1, PF2, PF 3. The control unit 180 may perform the analysis method as described above with reference to fig. 4a and 4b on the height information of each of the first to third profiles PF1, PF2, PF3, and analyze whether the state of the manufacturing apparatus 100 of the display apparatus is abnormal.
Specifically, the first maximum variation width of the height of the first profile PF1 and a predetermined set value are compared in the first section of the first profile PF1, the second maximum variation width of the height of the second profile PF2 and the set value are compared in the second section of the second profile PF2, the third maximum variation width of the height of the third profile PF3 and the set value are compared in the third section of the third profile PF3, and it is determined that the display device manufacturing apparatus 100 has abnormal vibration when at least one of the first to third maximum variation widths exceeds the set value.
Further, after a first height average line is calculated from the height information of the first contour PF1, a second height average line is calculated from the height information of the second contour PF2, and a third height average line is calculated from the height information of the third contour PF3, if at least one of the first to third height average lines has a meandering or wavy shape at an arbitrary position, it can be determined as an abnormal state.
In this manner, by analyzing the height information of each of the plurality of profiles PF, it is possible to more accurately determine whether or not the state of the manufacturing apparatus 100 for a display device is abnormal.
Fig. 8 is a plan view schematically illustrating a display device manufactured by the manufacturing apparatus of a display device of an embodiment of the present invention.
Referring to fig. 8, the display device 1 includes a display area DA where an image is realized and a non-display area NDA where an image is not realized. The display device 1 may provide an image using light emitted from a plurality of pixels PX disposed in the display area DA. Each pixel PX may emit red, green, blue, or white light, respectively.
The display device 1 is a device for displaying images, and may be a portable mobile device such as a game machine, a multimedia device, or a micro computer. The Display device 1 to be described later may include a Liquid Crystal Display device (Liquid Crystal Display), an Electrophoretic Display device (Electrophoretic Display), an Organic Light Emitting Display device (Organic Light Emitting Display), an Inorganic Light Emitting Display device (Inorganic Light Emitting Display), a Field Emission Display device (Field Emission Display), a Surface-conduction Electron-Emission Display device (Surface-conduction Electron-emitter Display), a Quantum dot Display device (Quantum dot Display), a Plasma Display device (Plasma Display), a Cathode Ray tube Display device (cathodo Display), or the like. In the following, an organic light emitting display device will be described as an example of the display device 1 manufactured by the manufacturing apparatus 100 for a display device according to an embodiment of the present invention, but the embodiment of the present invention can be used for manufacturing display devices according to various modes as described above.
Fig. 9 is a sectional view schematically showing a part of a display device manufactured by the manufacturing apparatus of a display device according to the embodiment of the present invention. Fig. 9 may correspond to a section taken along line IX-IX' of fig. 8.
Referring to fig. 9, the substrate 10 may be glass or include a polymer resin such as polyether sulfone (polyethersulfone), polyarylate (polyarylate), polyetherimide (polyetherimide), polyethylene naphthalate (polyethylenenaphthalate), polyethylene terephthalate (polyethyleneterephthalate), polyphenylene sulfide (polyphenylenesulfonate), polyimide (polyimide), polycarbonate (polycarbonate), cellulose triacetate (triacetate), or cellulose acetate propionate (cellulose acetate propionate).
A pixel circuit layer PCL is provided on the substrate 10. The pixel circuit layer PCL shown in fig. 9 includes a thin film transistor TFT, a buffer layer 11 provided below and/or above the structural elements of the thin film transistor TFT, a first gate insulating layer 13a, a second gate insulating layer 13b, an interlayer insulating layer 15, and a planarization insulating layer 17.
The buffer layer 11 may include an inorganic insulator such as silicon nitride, silicon oxynitride, or silicon oxide, and may be a single-layer or multi-layer structure including the aforementioned inorganic insulator.
The thin film transistor TFT includes a semiconductor layer 12, and the semiconductor layer 12 may include polycrystalline silicon. Alternatively, the semiconductor layer 12 may include amorphous (amorphous) silicon, or include an oxide semiconductor, or include an organic semiconductor or the like. The semiconductor layer 12 may include a channel region 12c, a drain region 12a and a source region 12b respectively disposed at two sides of the channel region 12 c. The gate electrode 14 may overlap the channel region 12 c.
The gate electrode 14 may include a low resistance metal substance. The gate electrode 14 may include a conductive substance including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), or the like, and the gate electrode 14 may be formed in a multi-layer or single-layer structure including the above materials.
The first gate insulating layer 13a between the semiconductor layer 12 and the gate electrode 14 may include, for example, silicon oxide (SiO)2) Silicon nitride (SiN)X) Silicon oxynitride (SiON), aluminum oxide (Al)2O3) Titanium oxide (TiO)2) Tantalum oxide (Ta)2O5) Hafnium oxide (HfO)2) Or zinc oxide (ZnO)2) And the like.
A second gate insulating layer 13b may be disposed to cover the gate electrode 14. The second gate insulating layer 13b may include, for example, silicon oxide (SiO), similar to the first gate insulating layer 13a2) Silicon nitride (SiN)X) Silicon oxynitride (SiON), aluminum oxide (Al)2O3) Titanium oxide (TiO)2) Tantalum oxide (Ta)2O5) Hafnium oxide (HfO)2) Or zinc oxide (ZnO)2) And the like.
An upper electrode Cst2 of the storage capacitor Cst may be disposed on an upper portion of the second gate insulating layer 13 b. The upper electrode Cst2 may overlap the gate electrode 14 therebelow. At this time, the gate electrode 14 and the upper electrode Cst2 overlapped with each other with the second gate insulating layer 13b interposed therebetween may form a storage capacitor Cst. That is, the gate electrode 14 may function as the lower electrode Cst1 of the storage capacitor Cst.
As such, the storage capacitor Cst and the thin film transistor TFT may be formed to overlap. In some embodiments, the storage capacitor Cst may also be formed not to overlap with the thin film transistor TFT.
The upper electrode Cst2 may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and/or copper (Cu), which may be a single layer or a multi-layer structure of the foregoing.
The interlayer insulating layer 15 may cover the upper electrode Cst 2. The interlayer insulating layer 15 may include silicon oxide (SiO)2) Silicon nitride (SiN)X) Silicon oxynitride (SiON), aluminum oxide (Al)2O3) Titanium oxide (TiO)2) Tantalum oxide (Ta)2O5) Hafnium oxide (HfO)2) Or zinc oxide (ZnO)2) And the like. The interlayer insulating layer 15 may be a single layer or a multilayer structure including the aforementioned inorganic insulator.
The drain electrode 16a and the source electrode 16b may be respectively located on the interlayer insulating layer 15. The drain electrode 16a and the source electrode 16b may be connected to the drain region 12a and the source region 12b, respectively, through contact holes in an insulating layer thereunder. The drain electrode 16a and the source electrode 16b may include a material having excellent conductivity. The drain electrode 16a and the source electrode 16b may include a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and the drain electrode 16a and the source electrode 16b may be formed in a multi-layer or single-layer structure including the above-described materials. In one embodiment, the drain electrode 16a and the source electrode 16b may have a multi-layer structure of Ti/Al/Ti.
The planarization insulating layer 17 may include an organic insulating layer. The planarization insulating layer 17 may include organic insulators of general-purpose polymers such as polymethyl methacrylate (PMMA) or Polystyrene (PS), polymer derivatives having a phenolic group, acrylic polymers, imide polymers, aryl ether polymers, amide polymers, fluorine polymers, p-xylene polymers, vinyl alcohol polymers, or a mixture thereof.
A display element layer DEL is provided on the pixel circuit layer PCL having the above-described structure. The display element layer DEL may include an organic light emitting diode OLED, and the pixel electrode 21 of the organic light emitting diode OLED may be electrically connected to the thin film transistor TFT through a contact hole in the planarization insulating layer 17.
The pixels PX may include organic light emitting diodes OLED and thin film transistors TFT. Each pixel PX may emit light of, for example, red, green, or blue, or red, green, blue, or white, through the organic light emitting diode OLED.
The pixel electrode 21 may include, for example, Indium Tin Oxide (ITO), Indium Zinc Oxide (IZO), zinc oxide (ZnO), indium oxide (In)2O3: indium oxide), indium gallium oxide (IGO: indium gallium oxide) or zinc aluminum oxide (AZO: an aluminum zinc oxide). As another example, the pixel electrode 21 may include a reflective film including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), or a compound thereof. As another embodiment, the pixel electrode 21 may further include ITO, IZO, ZnO, or In on/under the reflective film2O3The film formed.
A pixel defining film 19 is disposed on the pixel electrode 21, and the pixel defining film 19 has an opening 19OP exposing a central portion of the pixel electrode 21. The pixel defining film 19 may include an organic insulator and/or an inorganic insulator. The opening 19OP may define a light emitting area EA for light emitted by the organic light emitting diode OLED. For example, the width of the opening 19OP corresponds to the width of the light-emitting area EA.
A light emitting layer 22 may be disposed in the opening 19OP of the pixel defining film 19. The light-emitting layer 22 may include a high molecular or low molecular organic substance that emits light of a predetermined color. Such a light-emitting layer 22 can be formed by discharging droplets from the manufacturing apparatus 100 of the display device according to the embodiment of the present invention.
Although not shown, a first functional layer and a second functional layer may be provided below and above the light-emitting layer 22, respectively. The first functional Layer may include, for example, a Hole Transport Layer (HTL), or a Hole Transport Layer and a Hole Injection Layer (HIL). The second functional layer is a constituent element provided above the light-emitting layer 22, and is a selective (optional) constituent element. The second functional Layer may include an Electron Transport Layer (ETL) and/or an Electron Injection Layer (EIL). The first functional layer and/or the second functional layer may be a common layer formed to entirely cover the substrate 10, as in the case of the common electrode 23 described later.
The common electrode 23 may be made of a conductive substance having a low work function. For example, the common electrode may include a (semi-) transparent layer including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), or an alloy thereof, or the like. Alternatively, the common electrode 23 may further include, for example, ITO, IZO, ZnO, or In on a (semi-) transparent layer including the foregoing2O3Of (2) a layer of (a).
In one embodiment, the thin film encapsulation layer TFE includes at least one inorganic encapsulation layer and at least one organic encapsulation layer, and as an embodiment, fig. 9 illustrates that the thin film encapsulation layer TFE includes a first inorganic encapsulation layer 31, an organic encapsulation layer 32, and a second inorganic encapsulation layer 33, which are sequentially stacked.
The first inorganic encapsulation layer 31 and the second inorganic encapsulation layer 33 may include one or more inorganic substances selected from aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon nitride, and silicon oxynitride. The organic encapsulation layer 32 may include a polymer family of materials. As the raw material of the polymer series, acrylic resin, epoxy resin, polyimide, polyethylene, and the like can be included. As an example, the organic encapsulation layer 32 may include acrylate.
A touch electrode layer (not shown) including a touch electrode may be provided on the film encapsulation layer TFE, and an optical function layer (not shown) may be provided on the touch electrode layer. The touch electrode layer may acquire coordinate information related to an external pressure such as a touch event. The optically functional layer can reduce the reflectance of light (external light) entering from the outside toward the display device 1 and/or can improve the color purity of light emitted from the display device 1. As an example, the optically functional layer may include a phase retarder (retarder) and/or a polarizer (polarizer). The phase retarder may be a thin film type or a liquid crystal coated type, and may include a lambda/2 phase retarder and/or a lambda/4 phase retarder. The polarizer may also be a film type or a liquid crystal coating type. The film type polarizer may include a stretch type synthetic resin film, and the liquid crystal coating type polarizer may include liquid crystals arranged in a prescribed array. The phase retarder and the polarizer may further include a protective film.
As another example, the optically functional layer may include a black matrix and a color filter. The color filters may be arranged by taking into account the color of light emitted by each pixel of the display device 1. Each color filter may include a pigment or dye of red, green, or blue. Alternatively, each color filter may further include quantum dots in addition to the aforementioned pigments or dyes. Alternatively, some of the color filters may not include the aforementioned pigments or dyes, and may include scattering particles such as titanium oxide. The color filter described above can be formed by discharging droplets by a manufacturing apparatus of a display device as an embodiment of the present invention.
As another example, the optically functional layer may comprise a destructive interference structure. The destructive interference structure may include a first reflective layer and a second reflective layer disposed on different layers. The first and second reflected lights respectively reflected from the first and second reflective layers may destructively interfere, whereby the external light reflectance may be reduced.
An adhesive member may be disposed between the touch electrode layer and the optical function layer. The adhesive means may employ general adhesive means known in the art without limitation. The adhesive member may be a Pressure Sensitive Adhesive (PSA).
While the invention has been described with reference to the embodiments illustrated in the drawings, which are merely exemplary embodiments of the invention, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof. Therefore, the true technical scope of the present invention should be determined by the technical idea of the appended claims.
Description of the reference numerals
1: display device
10: substrate
100: manufacturing device of display device
110: supporting part
140: liquid droplet ejection unit
150: measuring part
180: control unit
DR: liquid droplet
ES: shape of outer surface
PF: contour profile
S: display substrate
TS: test substrate

Claims (11)

1. A manufacturing apparatus of a display device, comprising:
testing the substrate;
a droplet discharge unit having a nozzle for discharging droplets;
a measuring section movable in a first direction above the test substrate and measuring an outer surface shape of the test substrate in a measurement region; and
a control section for deriving vibration data from the outer surface shape and analyzing the vibration data.
2. The manufacturing apparatus of a display device according to claim 1,
the measured outer surface shape includes a first profile extending along the first direction,
the vibration data includes height information of the first profile.
3. The manufacturing apparatus of a display device according to claim 2,
the control section determines whether an abnormal state exists by comparing a maximum variation width of the height of the first contour with a predetermined set value in a first section of the first contour.
4. The manufacturing apparatus of a display device according to claim 2,
the control unit calculates a first height average line from the height information of the first contour, and analyzes the form of the first height average line to determine whether an abnormal state exists.
5. The manufacturing apparatus of a display device according to claim 2,
the measured outer surface shape includes:
a droplet region where the droplets discharged by the droplet discharge section are located; and
a surrounding area surrounding the droplet area,
the first contour overlaps the surrounding area.
6. The manufacturing apparatus of a display device according to claim 2,
at least a part of the first contour overlaps with a region where the droplet is ejected onto the test substrate by the droplet ejection section.
7. The manufacturing apparatus of a display device according to claim 2,
the measured outer surface shape further comprising a second profile extending along the first direction and spaced from the first profile along a second direction intersecting the first direction,
the vibration data further includes height information of the second profile.
8. The manufacturing apparatus of a display device according to claim 7,
the control part determines whether there is an abnormal state by comparing a maximum variation width of the height of the first profile with a predetermined set value in a first section of the first profile and comparing a maximum variation width of the height of the second profile with a predetermined set value in a second section of the second profile.
9. The manufacturing apparatus of a display device according to claim 7,
the control unit determines whether an abnormal state exists by analyzing the form of a first height average line calculated from the height information of the first contour and a second height average line calculated from the height information of the second contour.
10. The manufacturing apparatus of a display device according to claim 7,
the measured outer surface shape includes:
a droplet region where the droplets discharged by the droplet discharge section are located; and
a surrounding area surrounding the droplet area,
one of the first and second contours overlaps the surrounding area.
11. The manufacturing apparatus of a display device according to claim 7,
at least a part of one of the first contour and the second contour overlaps with a region where the droplet is ejected onto the test substrate by the droplet ejection section.
CN202011452314.7A 2020-06-30 2020-12-10 Manufacturing device of display device Pending CN113871318A (en)

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KR10-2020-0080503 2020-06-30

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