KR20220054502A - Apparatus and method for manufacturing a display device - Google Patents

Abstract

The present invention provides an apparatus and method for manufacturing a display device. For an apparatus and method for manufacturing a display device that can improve display device manufacturing quality and yield, the apparatus includes: an ink ejection part having a nozzle ejecting ink; and a measurement part disposed spaced apart from the first surface of the ink ejection part. The nozzle part is disposed on the first surface of the ink ejection part. The measurement part scans the first surface of the ink ejection part in a first direction to obtain the surface shape of the ink in the nozzle part.

Description

Apparatus and method for manufacturing a display device

Embodiments of the present invention relate to an apparatus for manufacturing a display device and a method of manufacturing the display device, and more particularly, to an apparatus for manufacturing a display device and a method of manufacturing the display device for improving the manufacturing quality of the display device.

Electronic devices based on mobility are widely used. In addition to small electronic devices such as mobile phones, tablet PCs have recently been widely used as mobile electronic devices.

Such a mobile electronic device includes a display device in order to provide a user with various functions, ie, visual information such as an image or an image. Recently, the proportion of display devices in electronic devices is increasing, and a structure that can be bent to have a predetermined angle in a flat state is being developed.

Meanwhile, the display device may include various layers formed through various processes. For example, the display device may include a layer made of an organic material, and the layer made of the organic material may be formed through a process of discharging an organic ink onto a substrate, for example, an inkjet printing process. In order to implement a precise image of a display device, it is necessary to discharge an ink of an accurate volume to an accurate position on a substrate.

In an apparatus for manufacturing a display device using an inkjet printing process, a nozzle unit for discharging ink may be provided, and a meniscus of ink is formed in the nozzle unit. If the meniscus of the ink is poor or there is a large deviation between the meniscus of the ink formed in each of the plurality of nozzle units, there is a problem in that it is difficult to eject the ink of the correct volume at the correct position.

The present invention is to solve various problems including the above problems, and by accurately measuring the improvement of ink in the nozzle unit and reflecting the measurement result in the manufacturing process of the display device, the manufacturing quality and yield of the display device can be improved. An object of the present invention is to provide an improved display device manufacturing apparatus and a display device manufacturing method. However, these problems are exemplary, and the scope of the present invention is not limited thereto.

According to one aspect of the present invention, an ink discharging unit having a nozzle unit discharging ink; and a measuring unit spaced apart from the first surface of the ink discharging unit, wherein the nozzle unit is disposed on the first surface of the ink discharging unit, and the measuring unit is disposed on the first surface of the ink discharging unit in a first direction. An apparatus for manufacturing a display device is provided, which scans a surface to obtain a surface shape of the ink in the nozzle unit.

According to the present exemplary embodiment, the ink discharging unit includes a plurality of nozzle units arranged along the first direction on the first surface of the ink discharging unit.

According to the present embodiment, it may further include a first moving unit for transferring the measuring unit in the first direction.

According to the present embodiment, it may further include; a second moving unit for transferring the measuring unit in a second direction intersecting the first direction.

According to the present embodiment, the measuring unit may irradiate a spot beam toward the first surface of the ink discharging unit in a third direction intersecting the first direction.

According to this embodiment, the measuring unit may obtain a two-dimensional profile of the ink through the spot beam, and obtain a two-dimensional surface shape of the ink based on the two-dimensional profile.

According to the present embodiment, the measuring unit irradiates a line beam toward the first surface of the ink discharge unit in a third direction intersecting the first direction, wherein the line beam is directed in the first direction. and a second direction intersecting the third direction.

According to the present embodiment, the measuring unit may acquire a plurality of 2D profiles of the ink through the line beam, and acquire a 3D surface shape of the ink based on the plurality of 2D profiles.

According to the present embodiment, the scan area of the measuring unit may include an area in which the nozzle unit is disposed and a peripheral area of the nozzle unit.

According to the present embodiment, a control unit electrically connected to the measuring unit and configured to determine whether the shape of the ink is abnormal based on the surface shape of the ink measured by the measuring unit; may further include .

According to the present embodiment, an angle between the extension direction of the line beam and the scan direction of the measurement unit may be greater than 0° and less than 90°.

According to another aspect of the present invention, the method comprising: disposing the measuring unit to be spaced apart from the first surface of the ink discharging unit; irradiating, by the measuring unit, a beam toward the first surface of the ink discharging unit in a third direction; scanning the first surface of the ink discharging unit in a first direction intersecting the third direction by the measuring unit; and acquiring, by the measuring unit, a surface shape of the ink in at least one nozzle unit.

According to this embodiment, acquiring the surface shape of the ink may include: acquiring a two-dimensional profile of the ink through the beam; and obtaining a two-dimensional surface shape of the ink based on the two-dimensional profile.

According to the present embodiment, the beam may be a line-shaped beam extending along a second direction intersecting the first direction and the third direction.

According to this embodiment, the acquiring of the surface shape of the ink includes: acquiring, by the measuring unit, a first profile of the ink through the line beam at a first position; acquiring, by the measuring unit, a second profile of the ink through the line beam at a second position different from the first position; and obtaining a three-dimensional surface shape of the ink based on the first and second profiles.

According to the present embodiment, the scan area of the measuring unit may include an area in which the at least one nozzle unit is disposed and a peripheral area of the at least one nozzle unit.

According to the present embodiment, the method may further include: acquiring, by the measuring unit, a surface shape of the peripheral area of the at least one nozzle unit.

According to the present embodiment, the scanning of the first surface of the ink discharging unit may include, when scanning an area in which the at least one nozzle unit is disposed, the ink discharging unit or the measuring unit first along the first direction. moving at speed; and moving the ink discharging unit or the measuring unit at a second speed different from the first speed in the first direction when the area in which the at least one nozzle unit is not disposed is scanned.

According to the present embodiment, the method may further include a step of determining, by the control unit, whether the shape of the ink is abnormal based on the surface shape of the ink measured by the measuring unit.

According to this embodiment, the step of determining whether the shape of the ink is abnormal,

comparing the surface shape of the ink measured by the measuring unit with a predetermined reference surface shape of the ink; and determining an abnormal state when the difference in position in the third direction between the surface shape and the reference surface shape exceeds a set value.

Other first aspects, features and advantages other than those described above will become apparent from the following detailed description, claims and drawings for carrying out the following invention.

This first general and specific aspect may be embodied using a system, method, computer program, or combination of any system, method, or computer program.

According to an embodiment of the present invention made as described above, by accurately measuring the shape of the ink in the nozzle and reflecting the measurement result in the inkjet printing process, the accuracy and stability of ink ejection can be improved, and the process quality can be improved. can Through this, it is possible to implement an apparatus for manufacturing a display device and a method for manufacturing the display device in which the manufacturing quality and yield of the display device are improved. Of course, the scope of the present invention is not limited by these effects.

1 is a perspective view schematically illustrating an apparatus for manufacturing a display device according to an exemplary embodiment.
2 is a bottom perspective view schematically illustrating a part of an apparatus for manufacturing a display device according to an exemplary embodiment.
3 is a bottom view schematically illustrating a part of an apparatus for manufacturing a display device according to an exemplary embodiment.
4 is a cross-sectional view schematically illustrating a part of an apparatus for manufacturing a display device according to an exemplary embodiment.
5 is a bottom perspective view schematically illustrating a part of an apparatus for manufacturing a display device according to another exemplary embodiment.
6 is a bottom view schematically illustrating a part of an apparatus for manufacturing a display device according to another exemplary embodiment of the present invention.
7 is a perspective view schematically illustrating a surface shape of ink measured by an apparatus for manufacturing a display device according to another exemplary embodiment of the present invention.
8 is a bottom view schematically illustrating a part of an apparatus for manufacturing a display device according to still another exemplary embodiment of the present invention.
9A and 9B are cross-sectional views schematically illustrating a part of an apparatus for manufacturing a display device according to example embodiments.
10 is a plan view schematically illustrating a display device manufactured according to an exemplary embodiment.
11 is a cross-sectional view schematically illustrating a display device manufactured according to an exemplary embodiment.

Since the present invention can apply various transformations and can have various embodiments, specific embodiments are illustrated in the drawings and described in detail in the detailed description. Effects and features of the present invention, and a method for achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and when described with reference to the drawings, the same or corresponding components are given the same reference numerals, and the overlapping description thereof will be omitted. .

In the following embodiments, terms such as first, second, etc. are used for the purpose of distinguishing one component from another, not in a limiting sense.

In the following examples, the singular expression includes the plural expression unless the context clearly dictates otherwise.

In the following embodiments, terms such as include or have means that the features or components described in the specification are present, and the possibility that one or more other features or components will be added is not excluded in advance.

In the following embodiments, when it is said that a part such as a film, region, or component is on or on another part, not only when it is directly on the other part, but also another film, region, component, etc. is interposed therebetween. Including cases where there is

In the drawings, the size of the components may be exaggerated or reduced for convenience of description. For example, since the size and thickness of each component shown in the drawings are arbitrarily indicated for convenience of description, the present invention is not necessarily limited to the illustrated bar.

In cases where certain embodiments may be implemented otherwise, a specific process sequence may be performed different from the described sequence. For example, two processes described in succession may be performed substantially simultaneously, or may be performed in an order opposite to the order described.

In the present specification, “A and/or B” refers to A, B, or A and B. And, “at least one of A and B” represents the case of A, B, or A and B.

In the following embodiments, when a film, region, or component is connected, when the film, region, or component is directly connected, or/and in the middle of another film, region, or component It includes cases where they are interposed and indirectly connected. For example, in the present specification, when it is said that a film, region, component, etc. are electrically connected, when the film, region, component, etc. are directly electrically connected, and/or another film, region, component, etc. is interposed therebetween. This indicates an indirect electrical connection.

The x-axis, y-axis, and z-axis are not limited to three axes on a Cartesian coordinate system, and may be interpreted in a broad sense including them. For example, the x-axis, y-axis, and z-axis may be orthogonal to each other, but may refer to different directions that are not orthogonal to each other.

1 is a perspective view schematically illustrating an apparatus for manufacturing a display device according to an exemplary embodiment.

Referring to FIG. 1 , an apparatus 1 for manufacturing a display device includes a support unit 10 , a first moving unit 20 , a second moving unit 30 , a third moving unit 40 , and an ink discharging unit 50 . , a fourth moving unit 60 , a fifth moving unit 70 , a measuring unit 80 , and a control unit 90 may be included.

The first moving part 20, the second moving part 30, the third moving part 40, the ink ejecting part 50, the fourth moving part 60, the fifth moving part 70, the measuring part ( 80 , and the control unit 90 may be disposed on the support unit 10 . The support part 10 may have a plane defined by the first direction DR1 and the second direction DR2 intersecting the first direction DR1 . The support part 10 may include a stage 11 , first guide parts 12 , and second guide parts 13 .

The stage 11 is disposed on the support part 10 and may have a plane defined by the first direction DR1 and the second direction DR2 . A display substrate DS may be placed on the stage 11 , and the stage 11 may include an unline mark (not shown) for aligning the display substrate DS. Here, the display substrate DS is a part of the display device being manufactured, and may be a target to which the ink discharging unit 50 discharges ink.

The first guide parts 12 are disposed on the support part 10 , and may be disposed to be spaced apart from each other with the stage 11 interposed therebetween. For example, two first guide parts 12 may be provided, and may be disposed to be spaced apart from each other in the first direction DR1 . Each of the first guide parts 12 may extend in a second direction DR2 , and an extension length of each of the first guide parts 12 in the second direction DR2 is at least that of the display substrate DS. It can be longer than the edge length. In this case, the edge length of the display substrate DS is a length measured in the second direction DR2 .

The first guide parts 12 may guide the first moving part 20 so that linear movement is possible along the extending direction of the first guide parts 12 . The first guide parts 12 may include, for example, a linear motion rail.

The second guide parts 13 are disposed on the support part 10 , and may be disposed between the first guide parts 12 . For example, two second guide parts 13 may be provided and may be spaced apart from each other in the first direction DR1 . At this time, the separation distance between the second guide parts 13 should be smaller than the spacing distance between the first guide parts 12 so that the second guide parts 13 are disposed between the first guide parts 12 . can The second guide parts 13 may extend in the second direction DR2 , and the extension length of each of the second guide parts 13 in the second direction DR2 is at least that of the ink discharge part 50 . It can be longer than the edge length. In this case, the edge length of the ink discharging unit 50 is a length measured in the second direction DR2 .

The second guide parts 13 may guide the fourth moving part 60 so that linear movement is possible along the extending direction of the second guide parts 13 . The second guide parts 13 may include, for example, a linear motion rail.

The first moving part 20 may linearly reciprocate along the second direction DR2 . The first moving part 20 may include pillar members 20a and a horizontal member 20b. 1 shows that the pillar members 20a and the horizontal member 20b have a rectangular bar shape, but the shapes of the pillar members 20a and the horizontal member 20b are not limited thereto.

The pillar members 20a of the first moving part 20 may extend in a third direction DR3 crossing the first direction DR1 and the second direction DR2, respectively. The pillar members 20a may be provided, for example, in two, and may be disposed on both sides with the stage 11 interposed therebetween. Each of the pillar members 20a may move in the extending direction of the first guide parts 12 , that is, in the second direction DR2 . In one embodiment, the column members 20a may be manually moved linearly, or may be automatically linearly moved by using a motor cylinder or the like. For example, the pillar members 20a may automatically move linearly, including a linear motion block moving along the linear motion rail.

The horizontal member 20b of the first moving part 20 may extend in the first direction DR1 between the pillar members 20a. Both ends of the horizontal member 20b may be connected to the upper portions of each of the pillar members 20a. The horizontal member 20b may include the first groove portion 21 extending in the extending direction of the horizontal member 20b, that is, in the first direction DR1. The first groove 21 may be disposed on one side of the horizontal member 20b. For example, the first groove part 21 may be disposed on one side of the first moving part 20 toward the second direction DR2 . The first groove part 21 may guide the second moving part 30 so that a linear reciprocating motion is possible along the extending direction of the first groove part 21 .

The second moving part 30 may move linearly in the first direction DR1 . The second moving part 30 may be connected to one side of the horizontal member 20b of the first moving part 20 , for example, on the side where the first groove 21 of the first moving part 20 is disposed. can be placed. The second moving part 30 is connected to the first groove part 21 , and may linearly reciprocate in the first direction DR1 along the first groove part 21 . As an embodiment, the second moving unit 30 may include a linear motor or the like.

The third moving part 40 is disposed on one side of the second moving part 30 and may linearly reciprocate along the third direction DR3. For example, the third moving part 40 may be disposed on the lower surface of the second moving part 30 . Here, the lower surface of the second moving part 30 may be a surface on which the second moving part 30 faces the stage 11 . In one embodiment, the third moving part 40 may include a pneumatic cylinder or the like.

The ink discharging unit 50 may be disposed on a lower surface of the third moving unit 40 . The ink discharging unit 50 may move together as the first moving unit 20 , the second moving unit 30 , and the third moving unit 40 move. That is, the ink discharging unit 50 may move along the first to third directions DR1 , DR2 , and DR3 .

The ink ejection unit 50 may eject droplets of the ink Ink along the third direction DR3 toward the display substrate DS. In this case, the ink may be a polymer or a low molecular weight organic material corresponding to the light emitting layer of the organic light emitting diode display. In another embodiment, the ink may be a liquid crystal, an aligning agent, or a red, green, or blue liquid in which pigment particles are mixed in a solvent. In another embodiment, the ink may include a solution including inorganic particles such as quantum dot materials. The ink discharge unit 50 includes a nozzle unit (not shown), and may discharge ink droplets through the nozzle unit. The nozzle unit may be disposed on one surface of the ink discharging unit 50 , for example, a lower surface of the ink discharging unit 50 .

The fourth moving part 60 may reciprocate linearly in the second direction DR2 . In an embodiment, the fourth moving unit 60 may be manually moved linearly or may be automatically linearly moved by using a motor cylinder or the like. For example, the fourth moving unit 60 may automatically move linearly including a linear motion block moving along the linear motion rail.

The fourth moving part 60 may include a second groove part 61 extending in the first direction DR1 . The second groove part 61 may be disposed on the upper surface of the fourth moving part 60 . The second groove portion 61 may guide the fifth moving portion 70 to linearly reciprocate along the extending direction of the second groove portion 61 .

The fifth moving part 70 may linearly reciprocate along the first direction DR1 . The fifth moving part 70 may be connected to the upper surface of the fourth moving part 60 . The fifth moving part 70 is connected to the second groove part 61 of the fourth moving part 60 , and may linearly move in the first direction DR1 along the second groove part 61 . As an embodiment, the fifth moving unit 70 may include a linear motor or the like.

The measuring unit 80 may be disposed on the fifth moving unit 70 . The measuring unit 80 may measure a surface shape by scanning one surface (eg, a lower surface) of the ink discharging unit 50 on which the nozzle unit of the ink discharging unit 50 is disposed. Here, the surface shape may be a two-dimensional surface shape or a three-dimensional surface shape.

As an embodiment, the measuring unit 80 may be a non-contact displacement sensor using a beam. The beam may be a laser beam. The measurement unit 80 may acquire position information of the surface of the target by emitting a beam toward the target and receiving the beam reflected from the surface of the target. For example, the location information of the surface of the target may include information about the distance from the measurement unit 80 to the surface of the target. Here, the surface of the target may be the lower surface of the ink ejection unit 50 . The measuring unit 80 may obtain a profile of the lower surface of the ink discharging unit 50 by using the position information. Furthermore, the measuring unit 80 may acquire the surface shape of the lower surface of the ink discharging unit 50 based on the profile. In this regard, it will be described later with reference to FIGS. 2 to 7 .

In an optional embodiment, the camera unit CMR may be disposed on the fifth moving unit 70 . The camera unit CMR may be transferred together with the measurement unit 80 in the first direction DR1 and the second direction DR2 by the fourth moving unit 60 and the fifth moving unit 70 . The camera unit CMR may acquire a video image by photographing the lower surface of the ink discharging unit 50 . The video image may be used to control the position of the measurement unit 80 so that a beam emitted from the measurement unit 80 is irradiated to a desired position of the target to scan a desired area.

The control unit 90 is electrically connected to the first moving unit 20 , the second moving unit 30 and the third moving unit 40 , and the positions of the first to third moving units 20 , 30 , 40 are and movement control. In addition, the control unit 90 is electrically connected to the fourth and fifth moving units 60 and 70 , and may control the positions and movements of the fourth and fifth moving units 60 and 70 . The control unit 90 is electrically connected to the ink discharging unit 50 , and may control an ink discharging time and an ink discharging amount of the ink discharging unit 50 .

In addition, the control unit 90 is electrically connected to the measurement unit 80 , and may obtain and analyze information about the surface shape of the lower surface of the ink discharge unit 50 measured by the measurement unit 80 . The control unit 90 may determine whether the shape of the ink located in the nozzle unit of the ink discharging unit 50 is abnormal based on the information on the surface shape. Here, the shape of the ink may include a shape, a location, a volume, a size, and the like. If it is determined that the shape of the ink is abnormal, the user may be notified to stop discharging the ink by the ink discharging unit 50 or the amount of ink in the nozzle unit may be adjusted. Through this, process quality in the ink discharging process may be improved, and further, manufacturing quality and yield of the display device may be improved.

Also, the controller 90 is electrically connected to the camera unit CMR, and may acquire and analyze an image image of the lower surface of the ink ejection unit 50 photographed by the camera unit CMR. The control unit 90 controls the movement of the fourth and fifth moving units 60 and 70 based on the video image, so that the measuring unit 80 scans a desired area among the lower surfaces of the ink discharging unit 50 . The position of the unit 80 can be controlled.

2 is a bottom perspective view schematically illustrating a part of an apparatus for manufacturing a display device according to an exemplary embodiment, and FIG. 3 is a schematic bottom perspective view of a portion of an apparatus for manufacturing a display device according to an exemplary embodiment of the present invention. It is a bottom view.

FIG. 2 shows the ink discharging unit 50 and the measuring unit 80 along with the surrounding components, and FIG. 3 is the first surface S1 and the nozzle unit NP of the ink discharging unit 50 . ) in the ink (Ink) is shown. The same reference numerals are assigned to the components identical to or corresponding to the components described with reference to FIG. 1 above, and a redundant description thereof will be omitted.

2 and 3 , the ink discharging unit 50 may include at least one nozzle unit NP discharging ink Ink. Ink to be discharged to the display substrate DS (refer to FIG. 1 ) may exist in each nozzle unit NP.

The nozzle unit NP may be disposed on the first surface S1 of the ink discharge unit 50 . The first surface S1 of the ink discharge unit 50 may be a surface on which the ink discharge unit 50 faces the measurement unit 80 , for example, the first surface S1 is the lower surface of the ink discharge unit 50 . can It may be understood that the first surface S1 of the ink discharging unit 50 includes the surface of the ink Ink in the nozzle unit NP.

In an embodiment, the ink ejection unit 50 may include a plurality of nozzle units NP arranged along the first direction DR1 on the first surface S1 . In FIG. 3 , the ink discharge unit 50 includes first to fifth nozzle units NP1, NP2, NP3, NP4, and NP5, but the present invention is not limited to a specific number of nozzle units NP. does not

The measuring unit 80 may be disposed to be spaced apart from the first surface S1 of the ink discharging unit 50 . For example, the measuring unit 80 may be spaced apart from the first surface S1 of the ink discharging unit 50 in the third direction DR3 . The measuring unit 80 may irradiate the beam toward the first surface S1 of the ink discharging unit 50 in the third direction DR3 .

The measuring unit 80 may scan the first surface S1 of the ink discharging unit 50 in the first direction DR1 . That is, the first direction DR1 may be defined as a scan direction. For scanning in the first direction DR1 , the ink discharging unit 50 or the measuring unit 80 may move along the first direction DR1 . As described above, the ink discharging unit 50 may be transferred in the first direction DR1 by the second moving unit 30 (refer to FIG. 1 ), and the measuring unit 80 may be moved to the fifth moving unit 70 . may be transferred in the first direction DR1. Hereinafter, for convenience of description, a case in which the measuring unit 80 is transferred in the first direction DR1 by the fifth moving unit 70 will be described.

In an embodiment, the measurement unit 80 scans the first surface S1 of the ink discharge unit 50 in a third direction DR3 toward the first surface S1 of the ink discharge unit 50 . A spot beam (SB) may be irradiated along the The spot beam SB may be a point-shaped beam. The spot beam SB is reflected from the first surface S1 of the ink discharging unit 50 , and may travel toward the measuring unit 80 again. The measuring unit 80 may receive the reflected spot beam SB to obtain position information of the first surface S1 of the ink discharging unit 50 . In an embodiment, the measuring unit 80 may include a point displacement sensor, for example, a laser displacement sensor or a confocal displacement sensor.

In one embodiment, the measurement unit 80 scans the first surface S1 of the ink discharge unit 50 along the first direction DR1 to measure the surface shape of the ink Ink in the nozzle unit NP. can be measured Specifically, the measurement unit 80 moves along the first direction DR1 to obtain position information of the first surface S1 through the spot beam SB, and through this, the two-dimensionality of the first surface S1 is obtained. profile can be obtained. Here, the two-dimensional profile may mean location information in the third direction DR3 along the first direction DR1 . The two-dimensional profile of the first surface S1 may include the two-dimensional profile of the ink Ink, and thus, the measuring unit 80 determines the level of the ink Ink based on the two-dimensional profile of the ink Ink. A two-dimensional surface shape can be obtained.

Specifically, a scan path of the spot beam SB may be formed while the spot beam SB moves along the scan direction, that is, the first direction DR1 on the first surface S1 . The scan path may cross the nozzle unit NP and may overlap the ink Ink in the nozzle unit NP. Accordingly, the position information of the first surface S1 obtained while the measurement unit 80 scans the first surface S1 of the ink discharging unit 50 includes the position of the surface of the ink Ink in the nozzle unit NP. Information may also be included. As a result, the measurement unit 80 may acquire the two-dimensional profile of the first surface S1 including the two-dimensional profile of the ink Ink, and based on the two-dimensional profile of the ink Ink ) can be obtained as a two-dimensional surface shape.

As an optional embodiment, a camera unit CMR disposed on the fifth moving unit 70 and disposed on one side of the measuring unit 80 may be provided. For example, the camera unit CMR may be arranged along the measurement unit 80 and the first direction DR1 . The camera unit CMR may acquire a video image by photographing the first surface S1 of the ink discharging unit 50 . The video image may include information on the position of the nozzle unit NP on the first surface S1 as well as the position at which the spot beam SB is irradiated. Accordingly, the video image may be used to align the measuring unit 80 and the ink discharging unit 50 so that the scan path of the spot beam SB crosses the nozzle unit NP. For example, the video image is transmitted to the control unit 90 (refer to FIG. 1), and the control unit 90 controls the measurement unit ( 80) can be controlled.

4 is a cross-sectional view schematically illustrating a part of an apparatus for manufacturing a display device according to an exemplary embodiment. 4 illustrates a cross-section of the ink ejection unit 50 having the nozzle units NP and the ink Ink in the nozzle unit NP.

Referring to FIG. 4 , the two-dimensional surface shape SS of the first surface S1 of the ink discharging unit 50 measured by the measuring unit 80 includes the two-dimensional surface shape IS of the ink Ink. can do. The two-dimensional surface shape SS of the first surface S1 is the first surface S1 along the first direction DR1 through the spot beam SB as described above with reference to FIGS. 2 and 3 . It may be obtained based on the two-dimensional profile of the first surface S1 obtained while scanning. In FIG. 4 , the two-dimensional surface shape SS of the first surface S1 is indicated by a thick line.

Ink Ink may be filled in the nozzle part NP, and the ink Ink in the nozzle part NP may form a meniscus. When a liquid is put into the capillary, the surface of the liquid in the capillary becomes higher or lower than the free surface due to capillary action to form a convex or concave curved surface, which is called a meniscus. The surface of the ink Ink in the nozzle part NP has the cohesive force and specific gravity of the ink Ink, the affinity between the ink Ink and the nozzle part NP, and the ink Ink and the nozzle in the nozzle part NP. A convex or concave curved surface is formed due to a pressure difference between the parts NP and the outside. If the meniscus of the ink Ink is not good or the deviation of the meniscus for each of the nozzle units NP is large, the ejection precision of the ink ejection unit 50 may be deteriorated. Accordingly, it may be required to determine whether the shape of the ink Ink in the nozzle unit NP is abnormal.

According to an embodiment of the present invention, through the two-dimensional surface shape IS of the ink Ink obtained by the measurement unit 80, the control unit 90 (refer to FIG. 1) controls the ink in the nozzle unit NP ( It is possible to determine whether there is an abnormality in the shape of the Ink). Based on the determination result, the control unit 90 may notify the user to stop discharging ink from the ink discharging unit 50 or may adjust the amount of ink in the nozzle unit NP. Through this, process quality in the ink discharging process may be improved, and further, manufacturing quality and yield of the display device may be improved.

5 is a bottom perspective view schematically illustrating a part of an apparatus for manufacturing a display device according to another embodiment of the present invention, and FIG. 6 is a schematic bottom perspective view of a part of an apparatus for manufacturing a display device according to another embodiment of the present invention It is a bottom view.

5 shows the ink discharging unit 50 and the measuring unit 80 along with the surrounding components, and FIG. 6 is the first surface S1 and the nozzle NP of the ink discharging unit 50 . ) in the ink (Ink) is shown. Contents overlapping with those previously described with reference to FIGS. 2 and 3 will be omitted, and differences will be mainly described below.

5 and 6 , the measurement unit 80 scans the first surface S1 of the ink discharge unit 50 toward the first surface S1 of the ink discharge unit 50 . The line beam LB may be irradiated along the direction DR3 . The line beam LB may be a line-shaped beam extending along the second direction DR2 . The extension length of the line beam LB may be at least greater than the diameter of the nozzle part NP.

The line beam LB may be formed by collecting a plurality of spot beams SB. For example, hundreds to thousands of spot beams SB may be gathered to form one line beam LB. Although FIG. 6 shows that eight spot beams SB are arranged in one column to form one line beam LB, the present invention is not limited to the number of such spot beams SB and the number of columns. .

The line beam LB emitted from the measuring unit 80 may be reflected from the first surface S1 of the ink discharging unit 50 , and may travel toward the measuring unit 80 again. The measuring unit 80 may receive the reflected line beam LB to obtain position information of the first surface S1 of the ink discharging unit 50 .

The measurement unit 80 may scan the first surface S1 of the ink discharge unit 50 along the first direction DR1 through the line beam LB. Here, an area scanned by the line beam LB extending in the second direction DR2 along the first direction DR1 may be defined as the scan area SA. The scan area SA of the measurement unit 80 may include a partial area of the first surface S1 of the ink discharge unit 50 . For example, the scan area SA may include an area in which the nozzle unit NP is disposed and a peripheral area of the nozzle unit NP. Through this, the surface shape of the ink Ink in the nozzle part NP and the surface shape of the first surface S1 in the area around the nozzle part NP may be measured. A specific method for this will be described later with reference to FIG. 7 .

As an embodiment, when the measuring unit 80 scans the first surface S1 of the ink discharging unit 50 , the moving speed of the measuring unit 80 may be different depending on the scan position. For example, the measuring unit 80 may move at a first speed when scanning an area in which the nozzle unit NP is disposed, and may move at a second speed when scanning an area in which the nozzle unit NP is not disposed. . Here, the area in which the nozzle units NP are not disposed may be, for example, an area between the plurality of nozzle units NP. The first speed and the second speed may be different from each other. For example, the first speed may be less than the second speed. That is, when the area in which the nozzle unit NP is disposed is scanned, the measuring unit 80 moves at a slower speed, so that the surface shape of the ink Ink in the nozzle unit NP can be more precisely measured. On the other hand, when the area in which the nozzle unit NP is not disposed is scanned, the measuring unit 80 moves at a higher speed, thereby reducing the overall scan time.

In an embodiment, the measuring unit 80 may include a line displacement sensor, for example, a chromatic confocal line sensor, a laser confocal displacement sensor, or a two-dimensional laser displacement sensor. (2D laser displacement sensor) may be included.

As another embodiment, the measurement unit 80 may include a confocal microscope or an interferometric microscope. A confocal microscope is a microscope that can obtain several two-dimensional images of a target, and reconstructs a three-dimensional structure of the target based on this. The confocal microscope may be, for example, a chromatic confocal microscope, a chromatic line confocal microscope, or an inverted confocal microscope. An interferometric microscope is a microscope that quantitatively measures by observing a change in a microstructure irregularity, a change in a phase, etc. of an object. The interference microscope may be, for example, a laser interferometric microscope, a white light interferometric microscope, or the like.

7 is a perspective view schematically illustrating a surface shape of ink measured by an apparatus for manufacturing a display device according to another exemplary embodiment of the present invention. 7 shows the ink ejection unit, the nozzle unit, and the ink by dotted lines, and the three-dimensional surface shape SS′ of the first surface measured by the measuring unit is indicated by a solid line.

Referring to FIG. 7 , the measuring unit 80 (refer to FIG. 5 ) includes a first surface S1 (see FIG. 5 ) of the ink discharging unit 50 (refer to FIG. 5 ) along the first direction DR1 through the line beam LB. reference), the three-dimensional surface shape (SS') of the first surface (S1) can be measured, and through this, the three-dimensional surface shape (IS') of the ink (Ink, see FIG. 5) can be obtained. can

Specifically, when the line beam LB emitted by the measurement unit 80 is at the first position P1, the first surface S1 corresponding to the line beam LB at the first position P1 is Location information can be obtained. Since the line beam LB extends along the second direction DR2 as described above, the location information of the first surface S1 may be location information along the second direction DR2, and through this A first profile of the first surface S1 may be obtained. Here, the profile is a two-dimensional profile, and may mean location information of the third direction DR3 along the second direction DR2.

Subsequently, as the measurement unit 80 scans the first surface S1 in the first direction DR1 , the line beam LB may be at the second position P2 . The measurement unit 80 may acquire position information of the first surface S1 corresponding to the line beam LB at the second position P2, and through this, obtain the second profile of the first surface S1. can be obtained Since the line beam LB at the second position P2 overlaps the ink Ink, the second profile of the first surface S1 may include the first profile of the ink Ink.

Similarly, as the measurement unit 80 scans the first surface S1 in the first direction DR1 , the line beam LB may be at the third position P3 . The measuring unit 80 may acquire position information of the first surface S1 corresponding to the line beam LB at the third position P3, and through this, the third profile of the first surface S1 is obtained. can be obtained Since the line beam LB at the third position P3 also overlaps the ink Ink, the third profile of the first surface S1 may include the second profile of the ink Ink.

As such, the measurement unit 80 may acquire a plurality of two-dimensional profiles of the first surface S1 through the line beam LB, and synthesize or combine them to form a three-dimensional surface shape ( SS') can be obtained. The three-dimensional surface shape SS′ of the first surface S1 may include the three-dimensional surface shape IS′ of the ink Ink. As a result, the measurement unit 80 may acquire the three-dimensional surface shape IS′ of the ink Ink.

According to an embodiment of the present invention, through the three-dimensional surface shape IS' of the ink Ink obtained by the measurement unit 80, the control unit 90 (refer to FIG. 1) controls the ink in the nozzle unit NP. It can be determined whether there is an abnormality in the shape of (Ink). Based on the determination result, the control unit 90 may notify the user to stop discharging ink by the ink discharging unit 50 or may adjust the amount of ink Ink in the nozzle unit NP. Through this, process quality in the ink discharging process may be improved, and further, manufacturing quality and yield of the display device may be improved.

In addition, the three-dimensional surface shape SS′ of the first surface S1 may include a surface shape of a peripheral region of the nozzle unit NP. Accordingly, it may also be determined whether ink or foreign substances are attached to and thus contaminated in the area around the nozzle unit NP.

8 is a bottom view schematically illustrating a part of an apparatus for manufacturing a display device according to still another exemplary embodiment of the present invention. The same reference numerals are given to components identical to or corresponding to the components described with reference to FIG. 6 above, and a redundant description thereof will be omitted.

Referring to FIG. 8 , an angle between the scan direction of the measurement unit 80 and the extension direction of the line beam LB may be greater than 0° and less than 90°. In this case, the vertical distance V between the spot beams SB constituting the line beam LB may be reduced. Here, the vertical distance V is the distance between the spot beams SB in a direction (eg, the second direction DR2 of FIG. 8 ) perpendicular to the scan direction (eg, the first direction DR1 in FIG. 8 ). means distance.

As the vertical distance V decreases, a more precise three-dimensional surface shape may be obtained. The three-dimensional surface shape of the first surface S1 obtained while the line beam LB scans along the first direction DR1 shows that each of the spot beams SB constituting the line beam LB is in the first direction. It can be understood as the sum of the two-dimensional surface shapes of the first surface S1 acquired while scanning along DR1. In this case, when the vertical distance V is decreased, the effect of reducing the spacing between the two-dimensional surface shapes of the first surface S1 obtained through each of the spot beams SB may occur. That is, finer two-dimensional surface shapes can be obtained, which can lead to the acquisition of precise three-dimensional surface shapes.

9A and 9B are cross-sectional views schematically illustrating a part of an apparatus for manufacturing a display device according to example embodiments. 9A and 9B show a case in which the shape of the ink Ink in the second nozzle part NP2 is bad, and the first nozzle part NP1 and the third to fifth nozzle parts NP3, NP4, and NP5 are shown in FIGS. The case where the inner ink Ink has a good shape is shown.

9A and 9B , it is possible to determine whether the shape of the ink Ink is abnormal based on the two-dimensional surface shape IS of the ink Ink. Of course, it is also possible to determine based on the three-dimensional surface shape IS' of the ink (refer to FIG. 7), and for convenience of description, the case of the two-dimensional surface shape SS will be mainly described below.

The control unit 90 (see FIG. 1 ) may receive the two-dimensional surface shape SS of the first surface S1 from the measurement unit 80 (see FIG. 1 ), and the two-dimensional surface shape of the first surface S1 ) In (SS), the two-dimensional surface shape (IS) of the ink (Ink) can be analyzed. First, the control unit 90 controls the first to fifth nozzle units NP1, NP2, NP3, NP4, and NP5 of the surface shape IS of the ink Ink and the predetermined reference surface shape R of the ink Ink. can be compared to each other. Then, when the position difference in the third direction DR3 between the surface shape IS of the ink Ink and the reference surface shape R exceeds a set value, it may be determined as an abnormal state.

For example, the first surface shape IS1 of the ink Ink in the first nozzle part NP1 may substantially match the reference surface shape R, and in this case, the first surface shape IS1 is judged to be good can do. On the other hand, the second surface shape IS2 of the ink Ink in the second nozzle part NP2 may be different from the reference surface shape R. Specifically, there may be a position difference e between the second surface shape IS2 and the reference surface shape R along the third direction DR3 . At this time, if the position difference e exceeds a predetermined set value, the control unit 90 may determine that the second surface shape IS2 is in an abnormal state.

In this way, it is possible to determine whether the shape of the ink Ink is abnormal based on the two-dimensional surface shape IS of the ink Ink. Based on the determination result, the control unit 90 may notify the user to stop discharging ink from the ink discharging unit 50 or may adjust the amount of ink in the nozzle unit NP. Through this, process quality in the ink discharging process may be improved, and further, manufacturing quality and yield of the display device may be improved.

10 is a plan view schematically illustrating a display device manufactured according to an exemplary embodiment.

Referring to FIG. 10 , the display device DP manufactured according to an embodiment of the present invention may include a display area DA and a peripheral area PA positioned outside the display area DA. The display device DP may provide an image through an array of a plurality of pixels PX that are two-dimensionally arranged in the display area DA.

The peripheral area PA is an area that does not provide an image, and may entirely or partially surround the display area DA. A driver for providing an electrical signal or power to a pixel circuit corresponding to each of the pixels PX may be disposed in the peripheral area PA. In the peripheral area PA, a pad that is an area to which an electronic device, a printed circuit board, or the like can be electrically connected may be disposed.

Hereinafter, it will be described that the display device DP includes an organic light emitting diode (OLED) as a light emitting element, but the display device DP of the present invention is not limited thereto. As another embodiment, the display device DP may be a light emitting display device including an inorganic light emitting diode, that is, an inorganic light emitting display device. The inorganic light emitting diode may include a PN diode including inorganic semiconductor-based materials. When a voltage is applied to the PN junction diode in the forward direction, holes and electrons are injected, and energy generated by recombination of the holes and electrons is converted into light energy to emit light of a predetermined color. The aforementioned inorganic light emitting diode may have a width of several to several hundred micrometers, and in some embodiments, the inorganic light emitting diode may be referred to as a micro LED. As another embodiment, the display device DP may be a quantum dot light emitting display.

Meanwhile, the display device DP includes a mobile phone, a smart phone, a tablet personal computer, a mobile communication terminal, an electronic notebook, an electronic book, a portable multimedia player (PMP), a navigation system, and a UMPC. (Ultra Mobile PC), etc., as well as portable electronic devices, such as a television, a laptop computer, a monitor, a billboard, may be used as a display screen of various products such as Internet of Things (IOT). In addition, the display device DP according to an embodiment is a wearable device such as a smart watch, a watch phone, a glasses display, and a head mounted display (HMD). can be used In addition, the display device DP according to an exemplary embodiment includes a dashboard of a vehicle, a center information display (CID) disposed on a center fascia or dashboard of the vehicle, and a rearview mirror display instead of a side mirror of the vehicle ( room mirror display), as entertainment for the rear seat of a car, it can be used as a display screen placed on the back of the front seat.

11 is a cross-sectional view schematically illustrating a display device manufactured according to an exemplary embodiment, and may correspond to a cross-section of the display device taken along line XI-XI′ of FIG. 10 .

Referring to FIG. 11 , the display device DP may include a stacked structure of a substrate 100 , a pixel circuit layer PCL, a display element layer DEL, and an encapsulation layer 300 .

The substrate 100 may have a multilayer structure including a base layer including a polymer resin and an inorganic layer. For example, the substrate 100 may include a base layer including a polymer resin and a barrier layer of an inorganic insulating layer. For example, the substrate 100 may include a first base layer 101 , a first barrier layer 102 , a second base layer 103 , and a second barrier layer 104 sequentially stacked. The first base layer 101 and the second base layer 103 include polyimide (PI), polyethersulfone (PES), polyarylate, polyetherimide (PEI), Polyethyelenene napthalate (PEN), polyethyeleneterepthalate (PET), polyphenylene sulfide (PPS), polycarbonate (PC), cellulose triacetate (TAC), or/and cellulose acetate propio nate (cellulose acetate propionate: CAP), and the like. The first barrier layer 102 and the second barrier layer 104 may include an inorganic insulating material such as silicon oxide, silicon oxynitride, and/or silicon nitride. The substrate 100 may have a flexible characteristic.

A pixel circuit layer PCL is disposed on the substrate 100 . 11 is a diagram showing a pixel circuit layer (PCL) a thin film transistor (TFT), and a buffer layer 111, a first gate insulating layer 112, and a second gate disposed below or/and above components of the thin film transistor (TFT). An insulating layer 113 , an interlayer insulating layer 114 , a first planarization insulating layer 115 , and a second planarization insulating layer 116 are shown.

The buffer layer 111 may reduce or block penetration of foreign matter, moisture, or external air from the lower portion of the substrate 100 , and may provide a flat surface on the substrate 100 . The buffer layer 111 may include an inorganic insulating material such as silicon oxide, silicon oxynitride, or silicon nitride, and may have a single-layer or multi-layer structure including the above-described material.

The thin film transistor TFT on the buffer layer 111 may include a semiconductor layer Act, and the semiconductor layer Act may include polysilicon. Alternatively, the semiconductor layer Act may include amorphous silicon, an oxide semiconductor, or an organic semiconductor. The semiconductor layer Act may include a channel region C and a drain region D and a source region S disposed on both sides of the channel region C, respectively. The gate electrode GE may overlap the channel region C.

The gate electrode GE may include a low-resistance metal material. The gate electrode GE may include a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), and the like, and may be formed as a multilayer or single layer including the above material. there is.

The first gate insulating layer 112 between the semiconductor layer Act and the gate electrode GE is formed of silicon oxide (SiO ₂ ), silicon nitride (SiN _X ), silicon oxynitride (SiON), and aluminum oxide (Al ₂ O ₃ ). ), titanium oxide (TiO ₂ ), tantalum oxide (Ta ₂ O ₅ ), hafnium oxide (HfO ₂ ), or zinc oxide (ZnO ₂ ) may include an inorganic insulating material.

The second gate insulating layer 113 may be provided to cover the gate electrode GE. The second gate insulating layer 113 is similar to the first gate insulating layer 112 , silicon oxide (SiO ₂ ), silicon nitride (SiN _X ), silicon oxynitride (SiON), aluminum oxide (Al ₂ O ₃ ) , titanium oxide (TiO ₂ ), tantalum oxide (Ta ₂ O ₅ ), hafnium oxide (HfO ₂ ), or zinc oxide (ZnO ₂ ) may include an inorganic insulating material.

An upper electrode Cst2 of the storage capacitor Cst may be disposed on the second gate insulating layer 113 . The upper electrode Cst2 may overlap the gate electrode GE below it. In this case, the gate electrode GE and the upper electrode Cst2 overlapping with the second gate insulating layer 113 interposed therebetween may form the storage capacitor Cst. That is, the gate electrode GE may function as the lower electrode Cst1 of the storage capacitor Cst.

As described above, the storage capacitor Cst and the thin film transistor TFT may be overlapped. In some embodiments, the storage capacitor Cst may be formed not to overlap the thin film transistor TFT.

The upper electrode Cst2 includes aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), and iridium (Ir). , chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and/or copper (Cu), and may be a single layer or multiple layers of the aforementioned materials. .

The interlayer insulating layer 114 may cover the upper electrode Cst2. The interlayer insulating layer 114 is silicon oxide (SiO ₂ ), silicon nitride (SiN _X ), silicon oxynitride (SiON), aluminum oxide (Al ₂ O ₃ ), titanium oxide (TiO ₂ ), tantalum oxide (Ta ₂ O) ₅ ), hafnium oxide (HfO ₂ ), or zinc oxide (ZnO ₂ ), and the like. The interlayer insulating layer 114 may be a single layer or a multilayer including the aforementioned inorganic insulating material.

The drain electrode DE and the source electrode SE may be respectively positioned on the interlayer insulating layer 114 . The drain electrode DE and the source electrode SE may be respectively connected to the drain region D and the source region S through contact holes formed in insulating layers below the drain electrode DE and the source electrode SE. The drain electrode DE and the source electrode SE may include a material having good conductivity. The drain electrode DE and the source electrode SE may include a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), or the like, and a multilayer including the above material. Alternatively, it may be formed as a single layer. In an embodiment, the drain electrode DE and the source electrode SE may have a multilayer structure of Ti/Al/Ti.

The first planarization insulating layer 115 may cover the drain electrode DE and the source electrode SE. The first planarization insulating layer 115 is a general-purpose polymer such as Polymethylmethacrylate (PMMA) or Polystyrene (PS), a polymer derivative having a phenolic group, an acrylic polymer, an imide-based polymer, an arylether-based polymer, an amide-based polymer, and a fluorine-based polymer. , p-xylene-based polymers, vinyl alcohol-based polymers, and organic insulating materials such as blends thereof.

The second planarization insulating layer 116 may be disposed on the first planarization insulating layer 115 . The second planarization insulating layer 116 may include the same material as the first planarization insulating layer 115, and a general general-purpose polymer such as polymethylmethacrylate (PMMA) or polystyrene (PS), a polymer derivative having a phenol-based group, or an acrylic-based material. It may include an organic insulating material such as a polymer, an imide-based polymer, an aryl ether-based polymer, an amide-based polymer, a fluorine-based polymer, a p-xylene-based polymer, a vinyl alcohol-based polymer, and blends thereof.

A display element layer DEL may be disposed on the pixel circuit layer PCL having the above-described structure. The display element layer DEL includes an organic light emitting diode (OLED) as a display element (ie, a light emitting device), and the organic light emitting diode (OLED) includes a pixel electrode 210 , an intermediate layer 220 , and a common electrode 230 . may include a stacked structure of The organic light emitting diode (OLED) may emit, for example, red, green, or blue light, or may emit red, green, blue, or white light. The organic light emitting diode OLED emits light through a light emitting area, and the light emitting area may be defined as a pixel PX.

The pixel electrode 210 of the organic light emitting diode (OLED) includes contact holes formed in the second planarization insulating layer 116 and the first planarization insulating layer 115 , and a contact metal disposed on the first planarization insulating layer 115 . (CM) may be electrically connected to the thin film transistor (TFT).

The pixel electrode 210 includes indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In ₂ O ₃ : indium oxide), and indium. It may include a conductive oxide such as indium gallium oxide (IGO) or aluminum zinc oxide (AZO). In another embodiment, the pixel electrode 210 may include silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), or neodymium (Nd). , iridium (Ir), chromium (Cr), or a reflective layer including a compound thereof may be included. In another embodiment, the pixel electrode 210 may further include a layer formed of ITO, IZO, ZnO, or In ₂ O ₃ above/under the aforementioned reflective layer.

A pixel defining layer 117 having an opening 117OP exposing a central portion of the pixel electrode 210 is disposed on the pixel electrode 210 . The pixel defining layer 117 may include an organic insulating material and/or an inorganic insulating material. The opening 117OP may define a light emitting area of light emitted from the organic light emitting diode (OLED). For example, the size/width of the opening 117OP may correspond to the size/width of the light emitting area. Accordingly, the size and/or width of the pixel PX may depend on the size and/or width of the opening 117OP of the corresponding pixel defining layer 117 .

The intermediate layer 220 may include a light emitting layer 222 formed to correspond to the pixel electrode 210 . The light emitting layer 222 may include a polymer or a low molecular weight organic material that emits light of a predetermined color. Alternatively, the light emitting layer 222 may include an inorganic light emitting material or quantum dots.

In an embodiment, the intermediate layer 220 may include a first functional layer 221 and a second functional layer 223 respectively disposed below and above the emission layer 222 . The first functional layer 221 may include, for example, a hole transport layer (HTL) or a hole transport layer and a hole injection layer (HIL). The second functional layer 223 is a component disposed on the emission layer 222 , and may include an electron transport layer (ETL) and/or an electron injection layer (EIL). The first functional layer 221 and/or the second functional layer 223 may be a common layer formed to completely cover the substrate 100 like the common electrode 230 to be described later.

The common electrode 230 is disposed on the pixel electrode 210 and may overlap the pixel electrode 210 . The common electrode 230 may be made of a conductive material having a low work function. For example, the common electrode 230 includes silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium ( Ir), chromium (Cr), lithium (Li), calcium (Ca), or an alloy thereof may include a (semi) transparent layer. Alternatively, the common electrode 230 may further include a layer such as ITO, IZO, ZnO, or In2O3 on the (semi)transparent layer including the above-described material. The common electrode 230 may be integrally formed to cover the entire substrate 100 .

The encapsulation layer 300 may be disposed on the display element layer DEL and cover the display element layer DEL. The encapsulation layer 300 includes at least one inorganic encapsulation layer and at least one organic encapsulation layer. As an example, FIG. 11 shows a first inorganic encapsulation layer 310 in which the encapsulation layers 300 are sequentially stacked, and an organic encapsulation layer. It shows that the encapsulation layer 320 and the second inorganic encapsulation layer 330 are included.

The first inorganic encapsulation layer 310 and the second inorganic encapsulation layer 330 may include at least one inorganic material selected from aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride. there is. The organic encapsulation layer 320 may include a polymer-based material. The polymer-based material may include an acrylic resin, an epoxy-based resin, polyimide, polyethylene, and the like. In an embodiment, the organic encapsulation layer 320 may include an acrylate. The organic encapsulation layer 320 may be formed by curing a monomer or applying a polymer. The organic encapsulation layer 320 may have transparency.

Although the present invention has been described with reference to the embodiments shown in the drawings, which are merely exemplary, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

1: Manufacturing device of display device
10: support
20: first moving part
30: second moving part
40: 3rd moving part
50: ink discharge unit
60: 4th moving part
70: 5th moving part
80: measurement unit
90: control unit
NP: nozzle part
Ink: Ink
SB: spot beam
LB: line beam

Claims (20)

an ink discharging unit having a nozzle unit discharging ink; and
Including; and a measuring unit disposed to be spaced apart from the first surface of the ink discharging unit;
The nozzle unit is disposed on the first surface of the ink discharge unit,
and the measuring unit scans the first surface of the ink discharging unit in a first direction to obtain a surface shape of the ink in the nozzle unit. According to claim 1,
The ink discharging unit may include a plurality of nozzle units arranged along the first direction on the first surface of the ink discharging unit. According to claim 1,
The apparatus of claim 1, further comprising: a first moving part configured to transport the measuring part in the first direction. 4. The method of claim 3,
The apparatus of claim 1, further comprising: a second moving part configured to transport the measuring part in a second direction intersecting the first direction. According to claim 1,
The measurement unit may be configured to irradiate a spot beam toward the first surface of the ink ejection unit in a third direction intersecting the first direction. 6. The method of claim 5,
wherein the measuring unit acquires a two-dimensional profile of the ink through the spot beam, and acquires a two-dimensional surface shape of the ink based on the two-dimensional profile. According to claim 1,
The measuring unit irradiates a line beam toward the first surface of the ink discharging unit along a third direction intersecting the first direction,
The line beam extends along a second direction crossing the first direction and the third direction. 8. The method of claim 7,
and the measuring unit acquires a plurality of two-dimensional profiles of the ink through the line beam, and acquires a three-dimensional surface shape of the ink based on the plurality of two-dimensional profiles. 8. The method of claim 7,
The scan area of the measuring unit includes an area in which the nozzle unit is disposed and a peripheral area of the nozzle unit. According to claim 1,
and a control unit electrically connected to the measuring unit and configured to determine whether the shape of the ink is abnormal based on the surface shape of the ink measured by the measuring unit. 8. The method of claim 7,
An angle between the extension direction of the line beam and the scan direction of the measuring unit is greater than 0° and less than 90°. disposing the measuring unit to be spaced apart from the first surface of the ink discharging unit;
irradiating, by the measuring unit, a beam toward the first surface of the ink discharging unit in a third direction;
scanning the first surface of the ink discharging unit in a first direction intersecting the third direction by the measuring unit; and
and acquiring, by the measuring unit, a surface shape of the ink in at least one nozzle unit. 13. The method of claim 12,
The step of obtaining the surface shape of the ink comprises:
obtaining a two-dimensional profile of the ink through the beam; and
and obtaining a two-dimensional surface shape of the ink based on the two-dimensional profile. 13. The method of claim 12,
The method of claim 1 , wherein the beam is a line-shaped beam extending along a second direction intersecting the first direction and the third direction. 15. The method of claim 14,
The step of obtaining the surface shape of the ink comprises:
acquiring, by the measuring unit, a first profile of the ink through the line beam at a first position;
acquiring, by the measuring unit, a second profile of the ink through the line beam at a second position different from the first position; and
and acquiring a three-dimensional surface shape of the ink based on the first and second profiles. 15. The method of claim 14,
The method of claim 1, wherein the scan area of the measuring unit includes an area in which the at least one nozzle unit is disposed and a peripheral area of the at least one nozzle unit. 17. The method of claim 16,
and acquiring, by the measuring unit, a surface shape of the peripheral area of the at least one nozzle unit. 15. The method of claim 14,
The step of scanning the first surface of the ink discharge unit,
moving the ink discharging unit or the measuring unit at a first speed in the first direction when scanning the area in which the at least one nozzle unit is disposed; and
moving the ink discharging unit or the measuring unit at a second speed different from the first speed in the first direction when the area in which the at least one nozzle unit is not disposed is scanned; manufacturing method. 13. The method of claim 12,
and determining, by a controller, whether the shape of the ink is abnormal, based on the surface shape of the ink measured by the measuring unit. 20. The method of claim 19,
The step of determining whether the shape of the ink is abnormal,
comparing the surface shape of the ink measured by the measuring unit with a predetermined reference surface shape of the ink; and
and determining as an abnormal state when the difference in position in the third direction between the surface shape and the reference surface shape exceeds a set value.

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