CN220255013U

CN220255013U - Manufacturing apparatus for display device

Info

Publication number: CN220255013U
Application number: CN202321161469.4U
Authority: CN
Inventors: 朴东镐; 冈本哲哉; 李俊熙; 朴东民; 林鼎赫
Original assignee: Samsung Display Co Ltd
Current assignee: Samsung Display Co Ltd
Priority date: 2022-05-17
Filing date: 2023-05-15
Publication date: 2023-12-26
Anticipated expiration: 2033-05-15
Also published as: CN117082899A

Abstract

The utility model relates to a manufacturing device of display device, one embodiment of the utility model discloses a manufacturing device of display device, comprising: a pressurizing section; and a first unit disposed apart from the pressing portion in a first direction, the first unit including: a first support part movable in a first direction; a first chamber disposed in the first support portion and configured to load a first substrate; and a second chamber disposed above the first chamber and loading a second substrate, wherein the first support portion moves between a first position spaced apart from the pressing portion in the first direction and a second position overlapping the pressing portion in a plan view.

Description

Manufacturing apparatus for display device

Technical Field

The present utility model relates to a display device manufacturing apparatus, and more particularly, to a display device manufacturing apparatus capable of improving process efficiency.

Background

Recently, electronic devices are widely used. Electronic devices are being widely used, such as mobile type electronic devices and fixed type electronic devices, which include a display device capable of providing visual information such as images or videos to a user in order to support various functions.

Recently, with miniaturization of other accessories for driving a display device, the specific gravity of the display device in an electronic apparatus tends to be gradually increased, and a structure that is bent at a predetermined angle or folded about an axis in a flat state is also being developed.

A display device is manufactured by adhering a cover window and/or a film to a substrate on which a plurality of layers are laminated. In this case, it is required to simplify the process time and process sequence in the process of loading and adhering materials to improve the process efficiency.

The foregoing background art is technical information held by the inventor or learned during the process of leading out the present utility model, and is not necessarily known technology disclosed to the general public before applying for the present utility model.

Disclosure of Invention

An object of an embodiment of the present utility model is to provide a manufacturing apparatus of a display device and a manufacturing method of a display device capable of improving process efficiency.

However, such problems are illustrative, and the problem to be solved by the present utility model is not limited thereto.

An embodiment of the present utility model discloses a manufacturing apparatus of a display device, including: a pressurizing section; and a first unit disposed apart from the pressing portion in a first direction, the first unit including: a first support part movable in a first direction; a first chamber disposed in the first support portion and configured to load a first substrate; and a second chamber disposed above the first chamber and loading a second substrate, wherein the first support portion moves between a first position spaced apart from the pressing portion in the first direction and a second position overlapping the pressing portion in a plan view.

In an embodiment of the present utility model, when the first supporting portion is located at the first position, the first chamber and the second chamber may be loaded with the first substrate and the second substrate at the same time.

In an embodiment of the present utility model, the pressurizing portion may pressurize at least one of the first chamber and the second chamber when the first supporting portion is located at the second position.

In an embodiment of the present utility model, the manufacturing apparatus of a display device may further include: and a vacuum portion disposed apart from the first unit in the first direction, the vacuum portion interfacing with the first chamber when the first support portion is in the second position.

In an embodiment of the present utility model, the vacuum portion may be undocked from the first chamber when the first support portion is in the first position.

In an embodiment of the present utility model, at least one of the first chamber and the second chamber may be relatively moved from a first chamber position where the first chamber and the second chamber do not overlap in a plan view to a second chamber position where the first chamber and the second chamber overlap in a plan view.

In an embodiment of the present utility model, the first chamber and the second chamber may load or discharge the first substrate and the second substrate at the first chamber position, respectively.

In an embodiment of the present utility model, the first unit may further include: a chamber driving part configured at one side of the first chamber and the other side opposite to the one side; and a bridge portion extending between and connected to the chamber driving portions, wherein the second chamber is connected to the bridge portion, and moves up and down with reference to the bridge portion to form a seal with the first chamber.

In an embodiment of the present utility model, the manufacturing apparatus of a display device may further include: and a second unit disposed on a side opposite to the first unit with respect to the pressing portion, the first unit and the second unit alternately moving toward the pressing portion.

In an embodiment of the present utility model, the second unit may include: a second support section capable of sliding movement in the first direction; a third chamber disposed in the second support portion and configured to load a third substrate; and a fourth chamber disposed above the third chamber and loading a fourth substrate, wherein the second support portion and the pressing portion are located at a third position spaced apart from the second position when the first support portion is located at the second position.

In one embodiment of the present utility model, the first unit may be pressurized from the pressurizing unit at the second position, and the second unit may simultaneously load the third substrate and the fourth substrate at the third position.

In an embodiment of the present utility model, the manufacturing apparatus of a display device may further include: and a vacuum portion disposed apart from the first unit and the second unit, the first unit and the second unit being abutted against the vacuum portion when being located at a second position overlapping the pressurizing portion in a plan view, and being disengaged from the vacuum portion when being located at a first position and a third position apart from the pressurizing portion in the first direction, respectively.

Another embodiment of the present utility model discloses a method of manufacturing a display device, including: a step of loading a plurality of substrates for adhesion in a first unit at a first position spaced apart from the pressing portion; a step of moving the first unit to a second position overlapping the pressing portion in a plan view; a step of adhering the plurality of substrates by pressing the first unit by the pressing unit at the second position; a step of moving the first unit to the first position; and a step in which the first unit discharges the adhered substrates at the first position, and a plurality of substrates for adhesion are loaded again.

In an embodiment of the present utility model, the step of loading the plurality of substrates for adhesion at the first unit may include a step of simultaneously loading the plurality of substrates for adhesion to the first unit.

In an embodiment of the present utility model, the first unit may include a first chamber and a second chamber disposed above the first chamber, the first chamber and the second chamber may be located at first chamber positions that do not overlap in a plan view, and the plurality of substrates for adhesion may be simultaneously loaded at the first chamber positions.

In an embodiment of the present utility model, the first unit may include a first chamber and a second chamber disposed above the first chamber, the first chamber and the second chamber may be located at a second chamber position overlapping on a plan view, and the first chamber and the second chamber may be sealed at the second chamber position.

In an embodiment of the present utility model, the pressurizing portion may pressurize the second chamber at the second chamber position to adhere the plurality of substrates for adhesion loaded in each of the first chamber and the second chamber.

In an embodiment of the present utility model, the method for manufacturing a display device may further include: and in the second position, abutting the vacuum part on the first unit so that a vacuum is formed inside the first unit.

In an embodiment of the present utility model, the method for manufacturing a display device may further include: and a step of pressing a second unit by the pressing unit at the second position while the plurality of substrates for adhesion mounted in the second unit are mounted on the first unit at the first position.

In an embodiment of the present utility model, the method for manufacturing a display device may further include: and a step of moving the second unit to a third position spaced apart from the pressurizing portion during the movement of the first unit to the second position.

In an embodiment of the present utility model, the method for manufacturing a display device may further include: in the second position, the pressing portion discharges the adhered substrates while the plurality of substrates for adhesion loaded in the first unit are adhered, and the plurality of substrates for adhesion are loaded again.

Other aspects, features, and advantages, in addition to the foregoing, will be apparent from the following detailed description, claims, and drawings for practicing the utility model.

According to the embodiments of the present utility model, a process of loading and discharging substrates is simplified, and a manufacturing apparatus and a manufacturing method of a display device capable of rapidly adhering a plurality of substrates can be realized.

The effects of the present utility model are not limited to the above-mentioned effects, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims.

Drawings

Fig. 1 is a perspective view schematically showing a manufacturing apparatus of a display apparatus according to an embodiment of the present utility model.

Fig. 2 is a view schematically showing a manufacturing apparatus of a display device according to an embodiment of the present utility model centering on a second chamber, as viewed from the direction II in fig. 1.

Fig. 3 is a cross-sectional view of the first unit taken along line III-III' of fig. 2, according to an embodiment of the present utility model.

Fig. 4 is a cross-sectional view of the first unit taken along line IV-IV' of fig. 2, according to an embodiment of the present utility model.

Fig. 5 is a view schematically showing a vacuum part according to an embodiment of the present utility model, which is a view taken along the line V-V' of fig. 1.

Fig. 6 to 8 are diagrams schematically showing a method of manufacturing a display device according to an embodiment of the present utility model.

Fig. 9 is a perspective view schematically showing a manufacturing apparatus of a display apparatus according to another embodiment of the present utility model.

Fig. 10 and 11 are diagrams schematically showing a method of manufacturing a display device according to another embodiment of the present utility model.

Fig. 12 is a plan view schematically showing a display device according to an embodiment of the present utility model.

Fig. 13 is a sectional view schematically showing a display device manufactured by the manufacturing apparatus of a display device according to an embodiment of the present utility model.

(description of the reference numerals)

1: display device

2: manufacturing apparatus for display device

10: first unit

20: second unit

30: pressurizing part

40: support driving part

50: vacuum part

1100: first chamber

1200: a second chamber

1300: a first supporting part

2100: third chamber

2200: fourth chamber

2300: a second supporting part

Detailed Description

The utility model is capable of numerous modifications and embodiments, and specific embodiments are shown in the drawings and described in detail herein. The effects and features of the present utility model and a method for realizing them will become clear when the embodiments described below are referred to in detail together with the drawings. However, the present utility model is not limited to the embodiments disclosed below, and may be implemented in various forms.

Hereinafter, embodiments of the present utility model will be described in detail with reference to the accompanying drawings, and when the description is made with reference to the drawings, the same or corresponding constituent elements are denoted by the same reference numerals and repeated description thereof will be omitted.

In the following embodiments, the terms first, second, etc. are not used in a limiting sense, but are used for the purpose of distinguishing one constituent element from another.

In the following embodiments, the singular forms include the plural unless the context clearly indicates otherwise.

In the following embodiments, terms including or having the same are used to indicate that features or constituent elements described in the specification are present, and the possibility of adding one or more other features or constituent elements is not excluded in advance.

In the following embodiments, when a portion such as a film, a region, a constituent element is described as being on or above another portion, it is intended to include not only a case where the portion is directly on the other portion but also a case where another film, a region, a constituent element, or the like is interposed therebetween.

In the drawings, the size of constituent elements may be enlarged or reduced for convenience of explanation. For example, the dimensions and thickness of each structure shown in the drawings are arbitrarily shown for convenience of explanation, and thus the present utility model is not necessarily limited to that shown.

In the following embodiments, the X-axis, the Y-axis, and the Z-axis are not limited to the three axes on the rectangular coordinate system, and can be interpreted as a broad sense including the same. For example, the X-axis, the Y-axis, and the Z-axis are orthogonal to each other, but may refer to directions different from each other, which are not orthogonal to each other.

The particular process sequence may also be performed differently than illustrated when an embodiment is capable of being practiced differently. For example, two processes described as being performed in succession may be executed substantially concurrently or the processes may be executed in the reverse order of the description.

Fig. 1 is a perspective view schematically showing a manufacturing apparatus of a display apparatus according to an embodiment of the present utility model. Fig. 2 is a view schematically showing a manufacturing apparatus of a display device according to an embodiment of the present utility model centering on a second chamber, as viewed from the direction II in fig. 1. The manufacturing apparatus of the display device according to an embodiment of the present utility model may be used to adhere various substrates.

Referring to fig. 1, the manufacturing apparatus 2 of the display device may include a support driving part 40, a first unit 10, a pressurizing part 30, and a vacuum part 50.

The support driving part 40 may support the first unit 10. In an embodiment, the support driving part 40 may be extended long in a first direction (for example, x-direction of fig. 1), and the first unit 10 may be moved along the extension direction of the support driving part 40. The support driving part 40 may be formed in the form of a rail, for example, so that the first unit 10 fixed to the rail moves along with the movement of the rail. Alternatively, the support driving part 40 may be formed in the form of a shuttle robot to move the first unit 10, but the form of the support driving part 40 is not limited thereto, and various modes may be adopted within the concept of the present utility model.

The support driving portion 40 can move the first unit 10 between a first position and a second position to be described in detail later. In an embodiment, the first position as the substrate supply position may mean a position where the first unit 10 is spaced apart in the first direction from the pressing portion 30 to be described later. In an embodiment, the second position as the adhering position may mean a position where the first unit 10 moves to overlap with a pressing portion 30 to be described later in a plan view.

The first unit 10 may include a first support 1300, a first chamber 1100, and a second chamber 1200. The first support portion 1300 may be connected to the support driving portion 40 or disposed on the support driving portion 40 to move along the support driving portion 40. In this regard, the first supporting portion 1300 may be movable in the extending direction of the supporting driving portion 40, that is, in the first direction. In an embodiment, the first supporting part 1300 may slidingly move along the extending direction of the supporting driving part 40.

The first chamber 1100 may be disposed on the first support 1300. The first chamber 1100 may include a first housing 1110 and a first stage 1120. The first case 1110 may form an external appearance of the first chamber 1100 and have an accommodating space opened at one side inside. In the internal accommodation space, the first stage 1120 may be disposed toward an open side (for example, in the +z direction in fig. 1). In one embodiment, the first station 1120 may be configured as one, but in another embodiment, the first station 1120 may be configured as a plurality of divisions. Hereinafter, a case where the first station 1120 is arranged by dividing a plurality of stations will be described mainly.

The first stage 1120 may accommodate the first substrate S1. Specifically, the first substrate S1 may be supplied to be loaded on the first stage 1120. In an embodiment, the first stage 1120 may include an electrostatic chuck to electrostatically attract the first substrate S1 by an electrostatic force. Alternatively, the first stage 1120 may be connected to a suction pump to suck the first substrate S1 with the driving of the suction pump. The suction surface of the first stage 1120 may be directed upward (for example, in the +z direction in fig. 1), that is, toward the second chamber 1200 to be described later. When the first stage 1120 is provided in plurality, a plurality of first substrates S1 may be adsorbed and accommodated in each of the plurality of first stages 1120. At this time, in an embodiment, the first substrate S1 may be one of a display panel, a metal plate, and a film for a display device.

The second chamber 1200 may be disposed above the first chamber 1100 (e.g., in the +z direction of fig. 1). The second chamber 1200 may include a second housing 1210 and a second stage 1220. The second case 1210 may form an external appearance of the second chamber 1200 and have a receiving space with one side opened therein. In the internal accommodation space, the second stage 1220 may be disposed toward the open side (e.g., in the-z direction of fig. 1). In one embodiment, the second station 1220 may be configured as one, but in another embodiment, the second station 1220 may be configured as a plurality of divisions. At this time, the number of second stages 1220 may be the same as the number of first stages 1120, and thus, a plurality of substrates may be adhered to correspond to each other as will be described later. Hereinafter, the second stage 1220 is divided into a plurality of stages and is arranged in the same number as the first stage 1120.

The second stage 1220 may accommodate the second substrate S2. Specifically, the second substrate S2 may be supplied to be loaded on the second stage 1220. In an embodiment, the second stage 1220 may include an electrostatic chuck to electrostatically attract the second substrate S2 by an electrostatic force. Alternatively, the second stage 1220 may be connected to a suction pump to suck the second substrate S2 with the driving of the suction pump. The suction surface of the second stage 1220 may be oriented downward (e.g., in the-z direction of fig. 1), i.e., toward the first chamber 1100. When the second stage 1220 is provided in plurality, a plurality of second substrates S2 may be adsorbed and accommodated in each of the plurality of second stages 1220. At this time, in an embodiment, the second substrate S2 may be one of a cover window, a film, and a display panel for a display device.

On the other hand, the second chamber 1200 may be configured not to overlap with the first chamber 1100 in a plan view. For example, the second chamber 1200 may be spaced apart from the first chamber 1100 in a second direction (e.g., the y-direction of fig. 1) that intersects the first direction (e.g., the x-direction of fig. 1). As such, the second chamber 1200 is configured not to overlap with the first chamber 1100 in a plan view, so that the second substrate S2 and the first substrate S1 may be simultaneously loaded on each of the second stage 1220 and the first stage 1120, respectively.

In an embodiment, the second chamber 1200 is movable between a first chamber position and a second chamber position. Specifically, the first chamber position may be a position where the second chamber 1200 does not overlap with the first chamber 1100 in a plan view, i.e., a position where the second chamber 1200 is spaced apart from the first chamber 1100 in the second direction. The second chamber position may be a position where the second chamber 1200 overlaps the first chamber 1100 in a plan view, that is, a position where the second chamber 1200 is disposed above the first chamber 1100.

At this time, the first unit 10 may further include a chamber driving part 1400 and a bridge part 1500. Specifically, the second chamber 1200 may be connected to the bridge 1500, and the bridge 1500 may be moved between the first chamber position and the second chamber position on the chamber driving part 1400.

The chamber driving part 1400 may be a member for moving the bridge 1500 and the second chamber 1200 connected to the bridge 1500. In an embodiment, the chamber driving part 1400 may be a rail extending long in the moving direction of the second chamber 1200, i.e., the second direction. Alternatively, in another embodiment, the chamber driving part 1400 may move the bridge 1500 and the second chamber 1200 in the second direction as a shuttle robot extending long in the second direction. Hereinafter, description will be given centering on the case where the chamber driving part 1400 is a rail extending long in the second direction.

The chamber driving parts 1400 may be arranged to be spaced apart by 2 in a direction crossing the moving direction of the second chamber 1200, i.e., the second direction. For example, 2 chamber driving parts 1400 may be disposed at both sides of the first chamber 1100 and/or the second chamber 1200, for example, at both sides in the first direction. The bridge 1500 may be configured across between 2 chamber drives 1400. The bridge 1500 may be connected at both ends to the chamber driving part 1400 and moved in the second direction by the chamber driving part 1400. In addition, the second chamber 1200 connected to the bridge 1500 may move in the second direction as the bridge 1500 moves in the second direction. Thus, the second chamber 1200 can be moved from the first chamber position to the second chamber position. In addition, in the present embodiment, the description is focused on the case where the first chamber 1100 is fixed and the second chamber 1200 is moved between the first chamber position and the second chamber position, but the present utility model is not limited thereto, and it is understood that the second chamber 1200 is fixed and the first chamber 1100 is moved between the first chamber position and the second chamber position, for example. That is, the first chamber 1100 and the second chamber 1200 may relatively move in the second direction.

Fig. 3 is a cross-sectional view of the first unit taken along line III-III' of fig. 2, according to an embodiment of the present utility model. Fig. 3 shows the second chamber 1200 moved to the second chamber position, i.e., above the first chamber 1100 to overlap the first chamber 1100 in plan view.

Referring to fig. 2 and 3, in an embodiment, the second chamber 1200 may further include a housing driving part 1600. The housing driving part 1600 may drive the up-and-down movement of the housing, specifically, the second housing 1210. In an embodiment, the housing driver 1600 may include a frame 1610 and a first telescoping member 1620. The frame 1610 may be configured to surround at least a portion of the bridge 1500. For example, the frame 1610 may be in the form ofA letter shape is formed to surround the upper face of the bridge 1500. That is, the frame 1610 may be composed of 2 vertical beams 1611 and a horizontal beam 1612 connecting the 2 vertical beams 1611 in one embodiment, and the bridge 1500 may be disposed in a direction penetrating between the 2 vertical beams 1611. At this time, the frame 1610, particularly the 2 vertical beams 1611, may be connected and fixed to the second case 1210. Thus, when the frame 1610 moves, the second housing 1210 may move together. In addition, the frames 1610 may be provided as one, but may be provided to be spaced apart from each other in the first direction, preferably 2, as shown in fig. 1.

At the frame 1610, a first telescoping member 1620 may be attached, for example, to a horizontal beam 1612. The first telescoping member 1620 may be connected at one end to the horizontal beam 1612 and at the other end to the bridge 1500. First telescoping member 1620 may change length between horizontal beam 1612 and bridge 1500, thereby allowing frame 1610 to move up and down. In addition, as the frame 1610 moves up and down, the second housing 1210 coupled to the frame 1610 may also move up and down. In an embodiment, the first telescopic member 1620 may include a cylinder. The cylinders may be driven in such a manner that the length is increased or decreased by oil pressure or motor driving, for example. In this way, the second housing 1210 can be driven up and down by the housing driving unit 1600, and for example, the second housing 1210 can be moved downward toward the first housing 1110 to form a seal with the first housing 1110.

Fig. 4 is a cross-sectional view of the first unit taken along line IV-IV' of fig. 2, according to an embodiment of the present utility model. Fig. 4 shows the case where the second chamber 1200 is moved to the second chamber position, i.e., above the first chamber 1100 to overlap with the first chamber 1100 in a plan view.

Referring to fig. 2 and 4, the second chamber 1200 may further include a stage driving part 1700. The stage driving part 1700 may drive the up-and-down movement of the stage, specifically, the second stage 1220. In an embodiment, the table drive 1700 may include a pressure housing 1710, a shaft 1720, a second telescoping member 1730, and a drive bellows 1740. When the pressure portion 30 to be described later is pressurized, the pressure accommodating portion 1710 is brought into contact with the pressure portion 30 and pressurized from the pressure portion 30. The pressure containment portion 1710 may include a cushion layer such as a pad.

Shaft 1720 may connect pressure containment portion 1710 and second stage 1220. For example, shaft 1720 may be fixedly connected at one end to pressure receiving portion 1710 and fixedly connected at the other end to second stage 1220. The shaft 1720 may be disposed to penetrate the bridge 1500 and the second case 1210, and move downward through the bridge 1500 as the pressure receiving portion 1710 is pressed downward by the pressing portion 30. Thereby, the second stage 1220 connected and fixed to the shaft 1720 can also be moved downward. In one embodiment, the shaft 1720 may be disposed one at each of the second stations 1220, but in another embodiment, the shaft 1720 may be disposed more than 2 at each of the second stations 1220 as shown in fig. 4.

The second telescopic member 1730 may be connected to the pressure receiving portion 1710. Specifically, the second telescopic member 1730 may have one end connected to the pressure receiving portion 1710 and the other end connected to the bridge 1500. The second telescoping member 1730 may change length between the pressure housing 1710 and the bridge 1500. For example, in a state where the pressure receiving portion 1710 is not pressurized from the pressurizing portion 30, the second telescopic member 1730 may be fixed in length, and thus the upper and lower positions of the pressure receiving portion 1710, the shaft 1720, and the second stage 1220 connected to the shaft 1720 connected to the second telescopic member 1730 may be fixed. When the pressure housing 1710 is pushed downward by the pushing portion 30, the second telescopic member 1730 can be reduced in length, and the pressure housing 1710 connected to the second telescopic member 1730, the shaft 1720, and the second stage 1220 connected to the shaft 1720 can be moved downward. At this time, the second telescopic member 1730 may play a role of buffering against pressure while reducing the length by the pressure receiving part 1710. In addition, when the pressurization by the pressurizing part 30 is completed, the length of the second telescopic member 1730 may be increased again to the original length, whereby the pressure receiving part 1710, the shaft 1720, and the second stage 1220 may be returned to the original positions. In an embodiment, second telescoping member 1730 may comprise a cylinder. The cylinder may be driven in such a manner as to increase or decrease in length by oil pressure or motor driving, for example. In this way, the second stage 1220 can be driven up and down by the stage driving part 1700, and for example, the second stage 1220 can be moved downward toward the first stage 1120, so that the second substrate S2 mounted on the second stage 1220 and the first substrate S1 mounted on the first stage 1120 adhere to each other.

A driving bellows 1740 may connect between the pressure-containing portion 1710 and the bridge 1500 and between the bridge 1500 and the second housing 1210, and internally contain the shaft 1720. The driving bellows 1740 may contract or extend between the pressure housing 1710 and the bridge 1500 as the pressure housing 1710 moves, and seal between the pressure housing 1710 and the bridge 1500. In addition, the driving bellows 1740 may contract or extend between the bridge 1500 and the second housing 1210, and may seal between the bridge 1500 and the second housing 1210.

Further, although not shown, the first unit 10 may further include an image portion. The image portion may capture the positions of the first stage 1120 and the second stage 1220 before the first stage 1120 and the second stage 1220 are moved adjacent to each other in order to adhere the first substrate S1 and the second substrate S2. At this time, the first chamber 1100 may further include an alignment part 1130 connected to the first stage 1120, and the position of the first stage 1120 may be aligned to match the position of the second stage 1220 based on the image photographed by the image part. In an embodiment, the alignment portion 1130 may move the first stage 1120 in a first direction (e.g., the x-direction of fig. 4) or a second direction (e.g., the y-direction of fig. 4) or rotate the first stage 1120 in a plane (e.g., in the xy-plane of fig. 4).

Referring again to fig. 1, the pressurizing part 30 may be disposed spaced apart from the first unit 10 in a first direction (e.g., x-direction of fig. 1). When the first unit 10, specifically, the first supporting part 1300 moves while the first unit 10 moves below the pressurizing part 30, the pressurizing part 30 may move toward the second chamber 1200 to pressurize the second chamber 1200. At this time, as described above, the pressurizing part 30 may pressurize the pressure receiving part 1710 of the second chamber 1200, whereby the second stage 1220 may be moved toward the first stage 1120, so that the second substrate S2 and the first substrate S1 mounted on each of the second stage 1220 and the first stage 1120 are adhered. In one embodiment, the pressing part 30 may be moved up and down by a mechanical arm drive or by an oil pressure drive.

Fig. 5 is a view schematically showing a vacuum part according to an embodiment of the present utility model, which is a view taken along the line V-V' of fig. 1. In fig. 5, for convenience of explanation, a case where the first unit 10 is moved to the second position to be located between the pressurizing part 30 and the vacuum part 50 is shown.

Referring to fig. 5, the vacuum part 50 may be disposed to face up and down the pressurizing part 30. Specifically, the vacuum portion 50 may be disposed integrally inside the support driving portion 40 below the pressurizing portion 30 or disposed separately from the support driving portion 40. In an embodiment, the vacuum 50 may interface with the first chamber 1100. Specifically, when the first unit 10 moves to the second position, the first unit 10, specifically the first chamber 1100, may be located above the vacuum part 50. At this time, the first supporting portion 1300 may include a through hole, and the vacuum portion 50 may be abutted to the through hole. A first vacuum channel 1190 may be connected to the through hole, and the first vacuum channel 1190 may be connected to the first casing 1110. In addition, a vacuum bellows 1180 accommodating the alignment portion 1130 may be disposed below the first housing 1110. A vacuum bellows 1180 may internally house the alignment portion 1130 and seal between the first housing 1110 and the alignment portion 1130. Thus, when the vacuum part 50 sucks the gas in order to form the vacuum, the vacuum may be formed inside the first housing 1110 by sucking the gas inside the first housing 1110 through the through-holes and the first vacuum channel 1190. As such, to form a vacuum, the vacuum portion 50 may interface with the first chamber 1100 through the first vacuum channel 1190, and release the interface with the first chamber 1100 after the vacuum is formed.

On the other hand, in an embodiment, the vacuum part 50 may include a vacuum tube 51 and a bellows 52. The vacuum tube 51 may extend long in one direction and may be connected to a vacuum pump in one embodiment. Bellows 52 may be disposed between vacuum tubes 51. The bellows 52 may be of varying length, and thus may be an upward increase in length of the vacuum portion 50 to interface with the first chamber 1100, or a downward decrease in length of the vacuum portion 50 to un-interface from the first chamber 1100.

Fig. 6 to 8 are diagrams schematically showing a method of manufacturing a display device according to an embodiment of the present utility model. The method of manufacturing the display device according to an embodiment of the present utility model may be a method of using the aforementioned manufacturing device 2 of the display device, specifically, layering the device, but is not limited thereto, and may be implemented by other devices within the concept of the present utility model.

Referring to fig. 6, the first unit 10 may be disposed to be spaced apart from the pressurizing portion 30 in the first direction. In particular, the first unit 10 may be present in the first position. The first position as the substrate supply position may mean a position where the first unit 10 is spaced apart from the pressing portion 30 in the first direction. In the first position, the first unit 10 may receive a supply of material to be adhered. For example, the first substrate S1 may be loaded in the first chamber 1100, and the second substrate S2 may be loaded in the second chamber 1200. At this time, the first chamber 1100 and the second chamber 1200 may exist at the first chamber position. The first chamber position may be a position where the second chamber 1200 does not overlap with the first chamber 1100 in a plan view, i.e., a position where the second chamber 1200 is spaced apart from the first chamber 1100 in a second direction (e.g., y-direction of fig. 6). Thus, the first substrate S1 may be suction-mounted on the first stage 1120, and the second substrate S2 may be suction-mounted on the second stage 1220. The loading of the first substrate S1 and the second substrate S2 may be performed simultaneously. As described above, the first substrate S1 may be one of a display panel, a metal plate, and a film for a display device, and the second substrate S2 may be one of a cover window, a film, and a display panel for a display device. Hereinafter, for convenience of explanation, the case where the first substrate S1 is a display panel and the second substrate S2 is a cover window will be mainly described as an example.

After the first substrate S1 and the second substrate S2 are loaded into the first chamber 1100 and the second chamber 1200, respectively, the second chamber 1200 may be moved in the second direction to the second chamber position. The second chamber position may be a position where the second chamber 1200 overlaps the first chamber 1100 in a plan view, that is, a position where the second chamber 1200 is disposed above the first chamber 1100. Specifically, the second chamber 1200 may be connected to the bridge 1500, and the bridge 1500 may move in the second direction as the chamber driving part 1400 extending in the second direction is driven.

At this time, the image portion may capture the positions of the first stage 1120 on which the first substrate S1 is mounted and the second stage 1220 on which the second substrate S2 is mounted. Based on the captured image, the alignment portion 1130 of the first chamber 1100 may adjust the position of the first stage 1120 on a plane (e.g., the position on the xy plane of fig. 6) so as to be able to match the second stage 1220.

Referring to fig. 7, it may be that the second chamber position, i.e., the first chamber 1100 and the second chamber 1200 are configured to overlap in a plan view, the housing driving part 1600 is driven and the second housing 1210 moves toward the first housing 1110, and the second housing 1210 and the first housing 1110 are sealed. At this time, the second stage 1220 disposed inside the second case 1210 is not moved up and down, and only the second case 1210 may be moved downward to form a seal as described in fig. 3.

Thereafter, the first unit 10 may be moved towards the second position. The second position as the adhering position may mean a position where the first unit 10 moves to overlap with the pressing portion 30 in a plan view. This can be achieved by the first unit 10 driven by the support driving part 40 and arranged on the support driving part 40 being moved in the extending direction of the support driving part 40. In the present embodiment, the case where the second case 1210 and the first case 1110 are sealed by driving the case driving unit 1600 and then the first unit 10 is moved by driving the support driving unit 40 will be described mainly, but the present invention is not limited thereto, and it is understood that the case where the second case 1210 and the first case 1110 are sealed by driving the support driving unit 40 and then the first unit 10 is moved to the second position and then the case driving unit 1600 is driven.

Referring to fig. 8, the vacuum part 50 may be abutted to the first chamber 1100 after the first unit 10 is moved to the second position. Specifically, the vacuum part 50 may be butted against the first supporting part 1300 as the length of the aforementioned bellows 52 increases. The vacuum part 50 may communicate with the first housing 1110 of the first chamber 1100 through the through-hole of the first support part 1300 and the first vacuum channel 1190. Thereafter, a vacuum pump may be operated to form a vacuum inside the first housing 1110. At this time, the first and second cases 1110 and 1210 are brought into contact to form a hermetic seal to form an internal space, and thus the internal space where the first and second stages 1120 and 1220 are disposed may form a vacuum.

After that, the pressurizing part 30 may pressurize the second chamber 1200, specifically the pressure accommodating part 1710. As a result, as described above with reference to fig. 4, the shaft 1720 connected to the pressure housing 1710 and the second stage 1220 connected to the shaft 1720 can move downward. Thereby, the second substrate S2 mounted on the second stage 1220 and the first substrate S1 mounted on the first stage 1120 can be adhered to each other.

The adhered first and second substrates S1 and S2 are in a state of being adsorbed by the first stage 1120 or the second stage 1220, and the first unit 10 may be moved to the first position of fig. 6 by performing the steps of fig. 6 to 8 in reverse order. Specifically, the pressing portion 30 may be moved upward again, and the length of the reduced second telescopic member 1730 may be increased again and the second stage 1220 may be moved upward.

Thereafter, the vacuum part 50 may be undocked from the first support part 1300. At this time, the bellows 52 of the vacuum part 50 becomes smaller in re-length, so that the contact between the vacuum part 50 and the first supporting part 1300 can be released.

Thereafter, the first unit 10 may be moved to the first position again by driving the support driving unit 40, and the second casing 1210 may be moved upward while the length of the first telescopic member 1620 is increased again, thereby opening the sealing between the second casing 1210 and the first casing 1110. Thereafter, the second chamber 1200 may be moved from the second chamber position to the first chamber position by the driving of the chamber driving part 1400. Thus, the first chamber 1100 and the second chamber 1200 can be moved to positions that do not overlap each other in a plan view, and the first stage 1120 and the second stage 1220 are in an exposed state, respectively.

Thereafter, the adhesive material adhering to the first substrate S1 and the second substrate S2 on the first stage 1120 or the second stage 1220 may be discharged, and the first substrate S1 and the second substrate S2 may be supplied to the first stage 1120 and the second stage 1220, respectively, to repeat the processes of fig. 6 to 8.

According to the above-described method of manufacturing a display device and the apparatus of manufacturing a display device, the first chamber 1100 and the second chamber 1200 are moved relative to each other in the second direction, whereby the first stage 1120 and the second stage 1220 can be moved to positions that do not overlap each other in a plan view. Thus, the first substrate S1 and the second substrate S2 can be simultaneously loaded on each of the first stage 1120 and the second stage 1220, respectively.

In addition, the pressurizing portion 30 and the vacuum portion 50 are disposed to be spaced apart from the chamber, so that a space for maintaining the manufacturing apparatus of the display device can be ensured.

Fig. 9 is a perspective view schematically showing a manufacturing apparatus of a display apparatus according to another embodiment of the present utility model. The manufacturing apparatus of the display device according to the present embodiment is similar to the aforementioned manufacturing apparatus of the display device, and therefore, only the differences will be described below.

Referring to fig. 9, the manufacturing apparatus 2 of the display apparatus may further include a second unit 20. The second unit 20 may be substantially the same unit as the first unit 10. That is, in an embodiment, the second unit 20 may include the second support portion 2300, the third chamber 2100 disposed on the second support portion 2300, and the fourth chamber 2200 above the third chamber 2100. The third chamber 2100 may load a third substrate S3 at a third station 2120 of the third chamber 2100 and the fourth chamber 2200 may load a fourth substrate at a fourth station of the fourth chamber 2200. In an embodiment, the third substrate S3 may be the same substrate as the first substrate S1, and the fourth substrate may be the same substrate as the second substrate S2. However, not limited thereto, the second unit 20 may be a unit for adhering a different substrate from the first unit 10. Hereinafter, for convenience of explanation, the third substrate S3 and the fourth substrate are mainly the same as the first substrate S1 and the second substrate S2. The second unit 20 is substantially the same as the first unit 10, and thus detailed description of individual components is omitted.

The second unit 20 may be disposed on the opposite side of the pressing portion 30 from the first unit 10. In an embodiment, the second unit 20 may be configured to be symmetrical with the first unit 10 with respect to the pressing portion 30. The first unit 10 and the second unit 20 may alternately move toward the pressing portion 30, and press from the pressing portion 30 to adhere the substrates. The method for manufacturing the display device will be described in detail below.

Fig. 10 and 11 are diagrams schematically showing a method of manufacturing a display device according to another embodiment of the present utility model. The method of manufacturing a display device according to an embodiment of the present utility model may be the aforementioned manufacturing device of a display device, specifically a method of using a lamination device, but is not limited thereto, and may be implemented by other devices within the concept of the present utility model. In addition, the manufacturing method of the display device according to the present embodiment can be similar to the manufacturing method of the display device described above, and therefore, description will be given below centering on only the point of distinction.

Referring to fig. 10, the first unit 10 may be disposed spaced apart from the pressurizing part 30 in the first direction. In particular, the first unit 10 may be present in the first position. At this time, the second unit 20 may be moved from the third position to exist in the second position. The third position may be a position of the second unit 20 corresponding to the first position of the first unit 10, for example, a position symmetrical to the first position in the first direction with respect to the pressing portion 30. That is, the third position as the substrate supply position may mean a position where the second unit 20 is spaced apart from the pressing portion 30 in the first direction.

At this time, the first unit 10 may load the substrate as described above. For example, the first substrate S1 may be loaded in the first chamber 1100, and the second substrate S2 may be loaded in the second chamber 1200. The second unit 20 may abut against the vacuum portion 50 at the second position to form a vacuum in the internal space of the third and fourth chambers 2100 and 2200, and then the third and fourth chambers 2100 and 2200 may be pressurized from the pressurizing portion 30 to adhere the substrates loaded in the third and fourth chambers 2100 and 2200.

Referring to fig. 11, after the first unit 10 loads the substrate, the second chamber 1200 may be moved to the second chamber position to be aligned with and sealed from the first chamber 1100. Thereafter, the first unit 10 may be moved from the first position to the second position.

At this time, the second unit 20 may be moved from the second position to the third position by releasing the butt joint of the vacuum portion 50 after the pressure from the pressure portion 30 is applied to complete the adhesion of the substrate.

The first unit 10 may be pressurized from the pressurizing portion 30 at the second position as described above to perform adhesion of the substrate. Specifically, in the second position, the first unit 10 may be abutted against the vacuum portion 50 to form a vacuum in the internal space of the first chamber 1100 and the second chamber 1200, and then the first chamber 1100 and the second chamber 1200 may be pressurized from the pressurizing portion 30 to adhere the substrates loaded in the first chamber 1100 and the second chamber 1200. The pressing part 30 presses the pressure receiving part 1710, whereby the second stage 1220 moves toward the first stage 1120, so that the first substrate S1 and the second substrate S2 can be bonded.

At this time, the fourth chamber 2200 may be moved from the second chamber position to the first chamber position in the second unit 20 located at the third position. Similar to the foregoing, the first chamber position may be a position where the fourth chamber 2200 does not overlap the third chamber 2100 in a plan view, i.e., a position where the fourth chamber 2200 is arranged apart from the third chamber 2100 in the second direction. The second chamber position may be a position where the fourth chamber 2200 overlaps with the third chamber 2100 in a plan view, that is, a position where the fourth chamber 2200 is disposed above the third chamber 2100. Thereby, the third chamber 2100 and the fourth chamber 2200 can be moved to positions not overlapping each other in a plan view, and the third stage 2120 and the fourth stage are exposed, respectively.

After that, the adhesive substance adsorbed on the third substrate S3 and the fourth substrate of the third stage 2120 or the fourth stage may be discharged, and the third substrate S3 and the fourth substrate may be supplied to the third stage 2120 and the fourth stage, respectively.

The first unit 10 may be moved to the first position again after the adhesion of the substrate is completed. In addition, the second unit 20, which has completed loading the substrate, may be moved again to the second position. Thereafter, the processes illustrated in fig. 10 to 11 may be repeated.

The display device manufacturing apparatus and the display device manufacturing method according to an embodiment of the present utility model have one pressurizing part 30 and one vacuum part 50 for the first unit 10 and the second unit 20, so that the space efficiency of the display device manufacturing apparatus can be improved. In addition, a space for maintaining the manufacturing apparatus of the display apparatus can thereby be ensured. In addition, the second unit 20 may adhere to the substrate during the first unit 10 is discharged and the substrate is loaded, and the first unit 10 may adhere to the substrate during the second unit 20 is discharged and the substrate is loaded, so that the process time and the process efficiency may be improved.

Fig. 12 is a plan view schematically showing a display device according to an embodiment of the present utility model. In an embodiment, the display device may be a display device manufactured by the manufacturing apparatus of the display device and/or the manufacturing method of the display device according to an embodiment of the present utility model.

Referring to fig. 12, a display device 1 manufactured according to an embodiment of the present utility model may include a display area DA and a peripheral area PA located outside the display area DA. The display device 1 may provide an image through an array of a plurality of pixels PX two-dimensionally arranged in the display area DA.

The peripheral area PA may entirely or partially surround the display area DA as an area where no image is provided. A driver or the like for supplying an electric signal or power to a pixel circuit corresponding to each of the pixels PX may be disposed in the peripheral area PA. The peripheral area PA may be provided with pads which are areas capable of electrically connecting electronic components, printed circuit boards, or the like.

Hereinafter, a case where the display device 1 includes an organic light emitting diode (Organic Light Emitting Diode, OLED) as the light emitting element (Light emitting element) will be described, but the display device 1 of the present utility model is not limited thereto. As another embodiment, the display device 1 may be a light emitting display device including an inorganic light emitting diode, that is, an inorganic light emitting display device (Inorganic Light Emitting Display). The inorganic light emitting diode may include a PN junction diode including an inorganic semiconductor-based material. When a voltage is applied to the PN junction diode in the forward direction, holes and electrons are injected, and energy generated by recombination of the holes and electrons is converted into light energy, thereby emitting light of a predetermined color. The aforementioned inorganic light emitting diode may have a width of several to several hundred micrometers, and in some embodiments the inorganic light emitting diode may be referred to as a micro LED. As yet another embodiment, the display device 1 may be a quantum dot light emitting display device (Quantum dot Light Emitting Display).

On the other hand, the display device 1 is used not only as a portable electronic device such as a Mobile phone (Mobile phone), a smart phone (smart phone), a tablet PC (tablet personal computer), a Mobile communication terminal, an electronic manual, an electronic book, a portable multimedia player (PMP, portable multimedia player), a navigator, an Ultra Mobile PC (UMPC), or the like, but also as a display screen of various products such as a television, a notebook, a monitor, a billboard, and an internet of things (IOT) device. In addition, the display device 1 according to an embodiment may be used for wearable devices (e.g., smart watches), watch phones, glasses type displays, and head mounted displays (head mounted display, HMD). The display device 1 according to an embodiment may be used as a dashboard of a vehicle, a center dashboard (CID, center Information Display) or a Center Information Display (CID) disposed in the center dashboard of a vehicle, an indoor mirror display (room mirror display) for replacing a side view mirror of a vehicle, or a display screen disposed on the back of a front seat as an amusement device for a rear seat of a vehicle.

Fig. 13 is a sectional view schematically showing a display device manufactured by a manufacturing apparatus of a display device according to an embodiment of the present utility model, which may correspond to a section of the display device taken along line XIII-XIII' of fig. 12.

Referring to fig. 13, the display device 1 may include a stacked structure of a substrate 100, a pixel circuit layer PCL, a display element layer DEL, and an encapsulation layer 300.

The substrate 100 may have a multilayer structure including a base layer including a polymer resin and an inorganic layer. For example, the substrate 100 may include a barrier layer including a base layer of a high molecular resin and an inorganic insulating layer. For example, the substrate 100 may include a first base layer 101, a first barrier layer 102, a second base layer 103, and a second barrier layer 104, which are sequentially stacked. The first and second substrate layers 101 and 103 may include Polyimide (PI), polyethersulfone (PES), polyarylate (polyarylate), polyetherimide (PEI), polyethylene naphthalate (PEN, polyethyelenene napthalate), polyethylene terephthalate (PET), polyphenylene sulfide (polyphenylene sulfide: PPS), polycarbonate (PC), cellulose Triacetate (TAC), cellulose acetate propionate (cellulose acetate propionate: CAP), or the like. The first barrier layer 102 and the second barrier layer 104 may comprise an inorganic insulator such as silicon oxide, silicon oxynitride, and/or silicon nitride. The substrate 100 may have a flexible characteristic.

The pixel circuit layer PCL is disposed on the substrate 100. Fig. 13 shows that the pixel circuit layer PCL includes a thin film transistor TFT, and a buffer layer 111, a first gate insulating layer 112, a second gate insulating layer 113, an interlayer insulating layer 114, a first planarization insulating layer 115, and a second planarization insulating layer 116 arranged below and/or above constituent elements of the thin film transistor TFT.

The buffer layer 111 may reduce or cut off penetration of foreign substances, moisture, or external air from below the substrate 100, and may provide a flat surface on the substrate 100. The buffer layer 111 may include an inorganic insulator such as silicon oxide, silicon oxynitride, or silicon nitride, and may be formed of a single layer or a multilayer structure including the foregoing.

The thin film transistor TFT on the buffer layer 111 may include a semiconductor layer Act including polysilicon. Alternatively, the semiconductor layer Act may contain amorphous (amorphlus) silicon, or contain an oxide semiconductor, or contain an organic semiconductor, or the like. The semiconductor layer Act may include a channel region C, and a drain region D and a source region S disposed on both sides of the channel region C, respectively. The gate electrode GE may overlap the channel region C.

The gate electrode GE may include a low-resistance metal substance. The gate electrode GE may contain a conductive substance including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), or the like, and may be formed of a plurality of layers or a single layer including the above-described materials.

The first gate insulating layer 112 between the semiconductor layer Act and the gate electrode GE may include silicon oxide (SiO ₂ ) Silicon nitride (SiN) _X ) Silicon oxynitride (SiON), aluminum oxide (Al) ₂ O ₃ ) Titanium oxide (TiO) ₂ ) Tantalum oxide (Ta) ₂ O ₅ ) Hafnium oxide (HfO) ₂ ) Or zinc oxide (ZnO) _X ) And the like. Zinc oxide (ZnO) _X ) Can be zinc oxide (ZnO) and/or zinc peroxide (ZnO) ₂ )。

The second gate insulating layer 113 may be disposed to cover the gate electrode GE. The second gate insulating layer 113 may include silicon oxide (SiO) similar to the first gate insulating layer 112 ₂ ) Silicon nitride (SiN) _X ) Silicon oxynitride (SiON), aluminum oxide (Al) ₂ O ₃ ) Titanium oxide (TiO) ₂ ) Tantalum oxide (Ta) ₂ O ₅ ) Hafnium oxide (HfO) ₂ ) Or zinc oxide (ZnO) _X ) And the like. Zinc oxide (ZnO) _X ) Can be zinc oxide (ZnO) and/or zinc peroxide (ZnO) ₂ )。

The upper electrode Cst2 of the storage capacitor Cst may be disposed above the second gate insulating layer 113. The upper electrode Cst2 may overlap the gate electrode GE therebelow. At this time, the gate electrode GE and the upper electrode Cst2 overlapped with the second gate insulating layer 113 interposed therebetween may form a storage capacitor Cst. That is, the gate electrode GE may function as the lower electrode Cst1 of the storage capacitor Cst.

In this way, the storage capacitor Cst and the thin film transistor TFT may be formed to overlap. In some embodiments, the storage capacitor Cst may also be formed not to overlap the thin film transistor TFT.

The upper electrode Cst2 may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and/or copper (Cu), and may be a single layer or multiple layers of the foregoing.

The interlayer insulating layer 114 may cover the power-upPole Cst2. The interlayer insulating layer 114 may include silicon oxide (SiO ₂ ) Silicon nitride (SiN) _X ) Silicon oxynitride (SiON), aluminum oxide (Al) ₂ O ₃ ) Titanium oxide (TiO) ₂ ) Tantalum oxide (Ta) ₂ O ₅ ) Hafnium oxide (HfO) ₂ ) Or zinc oxide (ZnO) _X ) Etc. Zinc oxide (ZnO) _X ) Can be zinc oxide (ZnO) and/or zinc peroxide (ZnO) ₂ ). The interlayer insulating layer 114 may be a single layer or a plurality of layers including the aforementioned inorganic insulator.

The drain electrode DE and the source electrode SE may be respectively located on the interlayer insulating layer 114. The drain electrode DE and the source electrode SE may be connected to the drain region D and the source region S, respectively, through contact holes of an insulating layer formed thereunder. The drain electrode DE and the source electrode SE may include a material having good conductivity. The drain electrode DE and the source electrode SE may contain a conductive substance including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), or the like, and may be formed of a plurality of layers or a single layer containing the above-described materials. As an example, the drain electrode DE and the source electrode SE may have a Ti/Al/Ti multilayer structure.

The first planarization insulating layer 115 may cover the drain electrode DE and the source electrode SE. The first planarization insulating layer 115 may include an organic insulator such as a general polymer such as polymethyl methacrylate (PMMA) or Polystyrene (PS), a polymer derivative having a phenol group, an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluorine polymer, a para-xylene polymer, a polyvinyl alcohol polymer, or a mixture thereof.

The second planarization insulating layer 116 may be disposed on the first planarization insulating layer 115. The second planarization insulating layer 116 may contain the same material as the first planarization insulating layer 115, and may contain an organic insulator such as a general polymer including polymethyl methacrylate (PMMA) and Polystyrene (PS), a polymer derivative having a phenol group, an acrylic polymer, an imide polymer, a polyether polymer, an amide polymer, a fluorine polymer, a para-xylene polymer, and a polyvinyl alcohol polymer, or a mixture thereof.

The display element layer DEL may be disposed on the pixel circuit layer PCL having the aforementioned structure. The display element layer DEL includes an organic light emitting diode OLED as a display element (i.e., a light emitting element), and the organic light emitting diode OLED may include a stacked structure of a pixel electrode 210, an intermediate layer 220, and a common electrode 230. The organic light emitting diode OLED may emit, for example, red, green, or blue light, or emit red, green, blue, or white light. The organic light emitting diode OLED may emit light through a light emitting region defined as a pixel PX.

The pixel electrode 210 of the organic light emitting diode OLED may be electrically connected to the thin film transistor TFT through a contact hole formed in the second planarization insulating layer 116 and the first planarization insulating layer 115 and a contact metal CM disposed on the first planarization insulating layer 115.

The pixel electrode 210 may include Indium Tin Oxide (ITO), indium zinc oxide (IZO; indium zinc oxide), zinc oxide (ZnO), indium oxide (In) ₂ O ₃ : an indium oxide), an indium gallium oxide (IGO; indium gallium oxide) or aluminum zinc oxide (AZO; aluminum zinc oxide) and the like. As another embodiment, the pixel electrode 210 may include a reflective film including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), or a compound thereof. As another embodiment, the pixel electrode 210 may further include a reflective film formed of ITO, IZO, znO or In on/under the reflective film ₂ O ₃ And (3) forming a film.

A pixel defining film 117 having an opening 117OP exposing a central portion of the pixel electrode 210 is disposed on the pixel electrode 210. The pixel defining film 117 may include an organic insulator and/or an inorganic insulator. The opening 117OP may define a light emitting region of light emitted from the organic light emitting diode OLED. For example, the size/width of the opening 117OP may correspond to the size/width of the light emitting region. Accordingly, the size and/or width of the pixel PX may depend on the size and/or width of the opening 117OP of the corresponding pixel defining film 117.

The intermediate layer 220 may include a light emitting layer 222 formed to correspond to the pixel electrode 210. The light emitting layer 222 may include a high molecular or low molecular organic substance emitting light of a predetermined color. Alternatively, the light emitting layer 222 may contain an inorganic light emitting substance, or contain quantum dots.

As an embodiment, the intermediate layer 220 may include a first functional layer 221 and a second functional layer 223 disposed under and on the light emitting layer 222, respectively. The first functional layer 221 may include, for example, a hole transport layer (HTL: hole Transport Layer), or a hole transport layer and a hole injection layer (HIL: hole Injection Layer). The second functional layer 223 may include an electron transport layer (ETL: electron Transport Layer) and/or an electron injection layer (EIL: electron Injection Layer) as constituent elements disposed on the light emitting layer 222. The first functional layer 221 and/or the second functional layer 223 may be a common layer formed to cover the entire substrate 100 as in the common electrode 230 to be described later.

The common electrode 230 may be disposed on the pixel electrode 210 and overlap the pixel electrode 210. The common electrode 230 may be formed of a conductive substance having a low work function. For example, the common electrode 230 may include a (semi) transparent layer including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), or an alloy thereof, or the like. Alternatively, the common electrode 230 may further include a transparent (semi) layer containing the aforementioned substances formed of ITO, IZO, znO or In ₂ O ₃ A layer is formed. The common electrode 230 may be integrally formed to entirely cover the substrate 100.

The encapsulation layer 300 may be disposed on and cover the display element layer DEL. The encapsulation layer 300 includes at least one inorganic encapsulation layer and at least one organic encapsulation layer, and as an example, fig. 13 shows that the encapsulation layer 300 includes a first inorganic encapsulation layer 310, an organic encapsulation layer 320, and a second inorganic encapsulation layer 330, which are sequentially stacked.

The first inorganic encapsulation layer 310 and the second inorganic encapsulation layer 330 may include one or more inorganic substances selected from aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon nitride, and silicon oxynitride. The organic encapsulation layer 320 may include a polymer (polymer) series of substances. Examples of the raw materials of the polymer series include acrylic resins, epoxy resins, polyimides, and polyethylenes. As an example, the organic encapsulation layer 320 may include acrylate (acrylate). The organic encapsulation layer 320 may be formed by curing a monomer or coating a polymer. The organic encapsulation layer 320 may have transparency.

Although not shown, a touch sensor layer may be disposed on the encapsulation layer 300, and an optical functional layer may be disposed on the touch sensor layer. The touch sensor layer may acquire external inputs, such as coordinate information based on touch events. The optical functional layer may reduce reflectance of light (external light) incident from the outside toward the display device, and/or may improve color purity of light emitted from the display device. As an example, the optical functional layer may include a phase retarder (retarder) and/or a polarizer (polarizer). The phase retarder may be a film type or a liquid crystal coating type, and may include a lambda/2 phase retarder and/or a lambda/4 phase retarder. The polarizer may also be of the film type or of the liquid crystal coating type. The film type may include a stretched synthetic resin film, and the liquid crystal coating type may include liquid crystals arranged in a predetermined array. The phase retarder and the polarizer may further include a protective film.

An adhesive member may be disposed between the touch sensor layer and the optical function layer. The adhesive means may adopt, without limitation, a common adhesive means known in the art. The adhesive means may be a pressure sensitive adhesive (pressure sensitive adhesive, PSA).

The cover window CW may be disposed on the encapsulation layer 300 and may be disposed thereon when the touch sensor layer and/or the optical function layer are disposed. The cover window CW may include at least one of glass, sapphire, and plastic. The cover window CW may be, for example, ultra Thin tempered Glass (Ultra Thin Glass), transparent polyimide (Colorless Polyimide). In one embodiment, the cover window CW may have a structure in which a flexible polymer layer is disposed on one surface of the glass substrate, or may be constituted only by the polymer layer.

The cover window CW may be attached by an adhesive member (not shown). The adhesive means may be an optically clear adhesive resin (optically clear resin, OCR) or an optically clear adhesive film (optically clear adhesive, OCA) and/or a pressure sensitive adhesive (pressure sensitivie adhesive, PSA) in liquid phase.

Thus, the present utility model will be described with reference to the embodiments shown in the drawings, which are merely examples. Those of ordinary skill in the art will fully appreciate that various modifications and equivalent other embodiments can be made from the embodiments. Accordingly, the true technical scope of the present utility model should be determined based on the appended claims.

Claims

1. A manufacturing apparatus of a display device, comprising:

a pressurizing section; and

a first unit arranged to be spaced apart from the pressurizing portion in a first direction,

the first unit includes:

a first support part movable in a first direction;

a first chamber disposed in the first support portion and configured to load a first substrate; and

a second chamber disposed above the first chamber and configured to load a second substrate,

the first support portion moves between a first position spaced apart from the pressing portion in the first direction and a second position overlapping the pressing portion in a plan view.

2. The apparatus for manufacturing a display device according to claim 1, wherein,

when the first supporting portion is located at the first position, the first chamber and the second chamber are simultaneously loaded with a first substrate and a second substrate.

3. The apparatus for manufacturing a display device according to claim 1, wherein,

the pressurizing portion pressurizes at least one of the first chamber and the second chamber when the first supporting portion is located at the second position.

4. The apparatus for manufacturing a display device according to claim 2, wherein,

The manufacturing apparatus of a display device further includes:

a vacuum part which is arranged at a distance from the first unit in the first direction,

the vacuum portion interfaces with the first chamber when the first support portion is in the second position.

5. The apparatus for manufacturing a display device according to claim 4, wherein,

the vacuum portion is undocked from the first chamber when the first support portion is in the first position.

6. The apparatus for manufacturing a display device according to claim 1, wherein,

at least one of the first chamber and the second chamber is relatively moved from a first chamber position where the first chamber and the second chamber do not overlap in plan view to a second chamber position where the first chamber and the second chamber overlap in plan view.

7. The apparatus for manufacturing a display device according to claim 6, wherein,

the first chamber and the second chamber load or discharge the first substrate and the second substrate, respectively, at the first chamber position.

8. The apparatus for manufacturing a display device according to claim 6, wherein,

the first unit further includes:

A chamber driving part configured at one side of the first chamber and the other side opposite to the one side; and

a bridge portion extending between and connected to the chamber driving portions,

the second chamber is connected to the bridge portion, moves up and down with the bridge portion as a reference, and forms a seal with the first chamber.

9. The apparatus for manufacturing a display device according to claim 1, wherein,

the manufacturing apparatus of a display device further includes:

a second unit disposed on a side opposite to the first unit with respect to the pressing portion,

the first unit and the second unit alternately move toward the pressing portion.

10. The apparatus for manufacturing a display device according to claim 9, wherein,

the second unit includes:

a second support portion slidably movable in the first direction;

a third chamber disposed in the second support portion and configured to load a third substrate; and

a fourth chamber disposed above the third chamber and loading a fourth substrate,

the second support portion is located at a third position spaced from the second position when the first support portion is located at the second position.