CN114485963A - Imaging device and method for light field sampling by using digital micro-mirror - Google Patents
Imaging device and method for light field sampling by using digital micro-mirror Download PDFInfo
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- CN114485963A CN114485963A CN202210211402.0A CN202210211402A CN114485963A CN 114485963 A CN114485963 A CN 114485963A CN 202210211402 A CN202210211402 A CN 202210211402A CN 114485963 A CN114485963 A CN 114485963A
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- mirror
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- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000005070 sampling Methods 0.000 title claims abstract description 15
- 238000003384 imaging method Methods 0.000 title claims abstract description 14
- 238000005259 measurement Methods 0.000 claims abstract description 26
- 230000001427 coherent effect Effects 0.000 claims abstract description 11
- 230000008569 process Effects 0.000 claims abstract description 7
- 239000000203 mixture Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 230000001276 controlling effect Effects 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J2009/002—Wavefront phase distribution
Abstract
The invention discloses imaging equipment and method for sampling a light field by using a digital micro-mirror. The scheme is as follows: comprises a collimated light source for generating collimated light; the digital micro-mirror is used for generating coherent light, namely, the coherent light is emitted to the surface of a measured object or the collimated light transmitted through the measured object is reflected to the camera; the measuring camera is provided with a lens and is used for collecting a coherent light image reflected by the digital micro-reflector; and the personal computer is used for controlling the digital micro-mirror and measuring data transmitted by the camera. The scheme controls the digital micro-mirror to control the ray path in the light field. In each measurement process, only two paths of light rays reach the measurement camera by controlling the digital micro-mirror, the phase difference of the two points in the light field can be determined by measuring the interference images of the two paths of light rays, the different two points are measured in sequence, and then the information of the whole light field can be obtained. The method has the advantages that the measurement is based on the digital micro-mirror to carry out light field sampling measurement, a micro-lens array or a grating is not needed, and the method can be used for wavefront measurement and object three-dimensional shape measurement.
Description
Technical Field
The invention relates to the technical field of three-dimensional microscope imaging, in particular to a lens-free coherent imaging device and method for sampling a light field by using a digital micro-mirror.
Background
The three-dimensional microscope based on the wavefront sensing can reconstruct the three-dimensional characteristics of a detected sample through the wavefront of light, has simple structure, is insensitive to vibration noise and has low requirement on the coherence of a light source, so the three-dimensional microscope can be widely applied to the fields of biological observation, medical instruments, optical surface type detection, industrial detection and the like. Typically, the main components of a wavefront sensor include a microlens array or a micro-grating array and a photodetector. Incident light is converged by a micro lens or diffracted by a micro grating to form a light spot lattice on the photoelectric sensor. The position of each spot reflects the wavefront angle of the locally incident light wave. When the wave front of the incident wave is different from that of the ideal wave, the position of the light spot lattice can be changed. Therefore, the slope of the incoming wave front and the outgoing wave front can be calculated by comparing the change of the position of the light spot with the reference wave front, and the three-dimensional information of the tested sample can be reconstructed.
Disclosure of Invention
Aiming at the defects in the prior art, the invention mainly aims to provide the imaging equipment which is used for performing light field sampling by using the digital micro-mirror and can be used for wavefront measurement and object three-dimensional shape measurement without a micro-lens array or a grating.
In order to achieve the purpose, the invention provides the following technical scheme: an imaging device for light field sampling using a digital micromirror comprises,
a collimated light source for generating collimated light which is emitted to the surface of the object to be measured or transmitted through the object to be measured;
a digital micro-mirror for generating coherent light, i.e. reflecting collimated light emitted to the surface of the object to be measured or transmitted through the object to be measured to the camera;
the measuring camera is used for collecting a coherent light image reflected by the digital micro-reflector;
a personal computer for controlling the digital micromirror and measuring data transmitted by the camera;
and the fixing device is used for fixing the collimated light source, the digital micro-mirror, the measuring camera and the personal computer.
An imaging method for light field sampling by using a digital micro-mirror comprises the following steps:
1. the collimated light source generates collimated light which is emitted to the surface of a measured object or transmitted through the measured object, and the collimated light is reflected by the digital micro-mirror and reaches the measuring camera;
2. in each measurement process, only two paths of light rays reach the measurement camera by controlling the digital micro-mirror, and the phase difference of the two points in the light field can be determined by measuring interference images of the two paths of light rays;
3. and sequentially calculating the phase difference between the two points, thereby recovering the wave front information of the whole light field.
Compared with the prior art, the invention has the advantages that the collimated light source emits collimated light to the surface of the measured object, or the collimated light transmits through the measured object and is reflected by the digital micro-mirror to reach the measuring camera. By controlling the digital micro-mirror, the ray path in the light field can be controlled. In each measurement process, only two paths of light rays reach the measurement camera by controlling the digital micro-mirror, the phase difference of the two points in the light field can be determined by measuring the interference images of the two paths of light rays, the different two points are measured in sequence, and then the information of the whole light field can be obtained. The method has the advantages that the measurement is based on the digital micro-mirror to carry out light field sampling measurement, a micro-lens array or a grating is not needed, and the method can be used for wavefront measurement and object three-dimensional shape measurement.
Drawings
Fig. 1 is a schematic structural diagram of a lens-free coherent imaging device for optical field sampling by using a digital micro-mirror according to the present invention.
In the figure: 1. an object to be measured; 2. a collimated light source; 3. a digital micro mirror; 4. a measurement camera; 5. a personal computer.
Detailed Description
The invention will be further explained with reference to the drawings.
As shown in fig. 1, an imaging apparatus for optical field sampling using a digital micromirror comprises,
a collimated light source 2 for generating collimated light, which is emitted to the surface of the object 1 to be measured or transmitted through the object 1 to be measured;
a digital micro-mirror 3 for generating coherent light, i.e. reflecting collimated light transmitted to the surface of the object 1 to be measured or transmitted through the object 1 to be measured to the camera;
a measuring camera 4, which is used for collecting the coherent light image reflected by the digital micro-reflector 3 and is provided with a lens;
a personal computer 5 for regulating the digital micromirror 3 and processing the data of the measuring camera 4;
and the fixing device is used for fixing the collimated light source 2, the digital micro-mirror 3, the measuring camera 4 and connecting the personal computer 5.
The position relation of a measured object 1, a collimated light source 2, a digital micro-mirror 3, a measuring camera 4 and a personal computer 5 is shown in the attached drawing, wherein the fixing device only needs to be capable of effectively fixing the collimated light source 2, the digital micro-mirror 3 and the measuring camera 4, the fixing device is not shown in the attached drawing, and the structural details are not limited during specific implementation.
An imaging method for light field sampling by using a digital micro-mirror 3 comprises the following steps:
1. the collimated light source 2 generates collimated light which is emitted to the surface of the object to be measured 1, or the collimated light transmits through the object to be measured 1, is reflected by the digital micro-mirror 3 and reaches the measuring camera 4;
2. in each measurement process, only two paths of light rays reach the measurement camera 4 by controlling the digital micro-mirror 3, and the phase difference of the two points in the light field can be determined by measuring interference images of the two paths of light rays;
3. and sequentially calculating the phase difference between the two points, thereby recovering the wave front information of the whole light field.
The invention relates to a digital micro-mirror 3, namely Digtial micro mirror Devices, which is a device composed of a high-speed digital light reflection switch array based on a semiconductor manufacturing technology, and an imaging pattern and characteristics thereof are determined by controlling the rotation of a micro lens around a fixed shaft (yoke) and time domain response (determining the reflection angle and the dead time of light rays). The reflective Micro-mirror array and the CMOS SRAM are integrated on the same chip by applying the MEMS (Micro electro mechanical System) process. Briefly, a digital micromirror device is a kind of optical switch, and the opening and closing of the optical switch are realized by using a rotating mirror.
The principle of the scheme of the invention is as follows: the collimated light source 2 emits collimated light to the surface of the object to be measured 1, or the collimated light transmits through the object to be measured 1, is reflected by the digital micro-mirror 3, reaches the measuring camera 4 and is transmitted to the personal computer 5 for processing; the ray path in the light field can be controlled by controlling the digital micro-mirror 3; in each measurement process, the digital micro-mirror 3 is controlled by the personal computer 5, only two paths of light rays reach the measuring camera 4, the phase difference of the two points in the light field can be determined by measuring interference images of the two paths of light rays, different two points are measured in sequence, and the whole light field information can be obtained by processing the two points through the personal computer 5.
The method has the advantages that the measurement is based on the digital micro-mirror to carry out light field sampling measurement, a micro-lens array or a grating is not needed, and the method can be used for wavefront measurement and object three-dimensional shape measurement.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.
Claims (2)
1. An imaging device for light field sampling using a digital micromirror, comprising: comprises the steps of (a) preparing a mixture of a plurality of raw materials,
a collimated light source for generating collimated light which is emitted to the surface of the object to be measured or transmitted through the object to be measured;
a digital micro-mirror for generating coherent light, i.e. reflecting collimated light emitted to the surface of the object to be measured or transmitted through the object to be measured to the camera;
the measuring camera is used for collecting a coherent light image reflected by the digital micro-reflector;
a personal computer for controlling the digital micromirror and measuring data transmitted by the camera;
and the fixing device is used for fixing the collimated light source, the digital micro-mirror, the measuring camera and the personal computer.
2. A method for imaging light field sampling by using a digital micro-mirror is characterized in that: the method comprises the following steps:
1. the collimated light source generates collimated light which is emitted to the surface of a measured object or transmitted through the measured object, and the collimated light is reflected by the digital micro-mirror and reaches the measuring camera;
2. in each measurement process, only two paths of light rays reach the measurement camera by controlling the digital micro-mirror, and the phase difference of the two points in the light field can be determined by measuring interference images of the two paths of light rays;
3. and sequentially calculating the phase difference between the two points, thereby recovering the wave front information of the whole light field.
Priority Applications (1)
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CN202210211402.0A CN114485963A (en) | 2022-03-04 | 2022-03-04 | Imaging device and method for light field sampling by using digital micro-mirror |
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CN202210211402.0A CN114485963A (en) | 2022-03-04 | 2022-03-04 | Imaging device and method for light field sampling by using digital micro-mirror |
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CN114485963A true CN114485963A (en) | 2022-05-13 |
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CN202210211402.0A Withdrawn CN114485963A (en) | 2022-03-04 | 2022-03-04 | Imaging device and method for light field sampling by using digital micro-mirror |
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2022
- 2022-03-04 CN CN202210211402.0A patent/CN114485963A/en not_active Withdrawn
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