CN114485240A - Directional soaking plate and chip - Google Patents
Directional soaking plate and chip Download PDFInfo
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- CN114485240A CN114485240A CN202210033500.XA CN202210033500A CN114485240A CN 114485240 A CN114485240 A CN 114485240A CN 202210033500 A CN202210033500 A CN 202210033500A CN 114485240 A CN114485240 A CN 114485240A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
- F28D15/046—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3672—Foil-like cooling fins or heat sinks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
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Abstract
The invention discloses a directional soaking plate and a chip. The directional soaking plate comprises a heat source plate and a cold source plate, the heat source plate is provided with a hot spot area, and the hot surface of the heat source plate is provided with a super-hydrophilic layer; the cold surface of the cold source plate and the hot surface of the hot source plate are oppositely arranged, and a phase-change heat exchange working medium is arranged between the cold source plate and the hot source plate; the cold surface of the cold source plate is provided with a non-uniform micro structure and is used for directionally regulating and controlling condensed liquid drops on the cold surface to bounce to the hot spot region in a concentrated mode towards the direction of the hot spot region when the directional soaking plate works, and a super-hydrophobic layer is formed on the non-uniform micro structure. The directional soaking plate has good cooling effect on the hot spot area of the heat source plate, and can improve the heat flux density of the soaking plate.
Description
Technical Field
The invention relates to the technical field of heat exchange or heat dissipation, in particular to a directional soaking plate and a chip.
Background
For the existing liquid absorption core vapor chamber, the liquid absorption rate of the liquid absorption core is mm/s, the liquid condensed on the cold surface cannot be rapidly conveyed to the hot surface due to the slow liquid absorption speed of the liquid absorption core, when the heat flow density is continuously increased, the phenomenon of evaporating the working medium on the hot surface occurs, so that the evaporation thermal resistance is rapidly increased, the junction temperature is rapidly increased, and the evaporation limit and the capillary limit exist.
At present, some soaking plates utilizing condensed liquid drops to bounce also appear, but when the cold surface super-hydrophobic surface is not provided with a micro structure, the bouncing direction of the liquid drops is basically vertical to the surface to bounce, the quantity of the liquid drops reaching a hot spot area is small, the size is small, the absorbed heat is small, and the cooling effect on the hot spot area is poor.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention aims to provide an oriented soaking plate which has a good cooling effect on a hot spot area of a heat source plate and can improve the heat flux density of the soaking plate.
A directionally soaking plate according to an embodiment of the first aspect of the present invention comprises:
the heat source plate is provided with a hot spot area, and a super-hydrophilic layer is arranged on the hot surface of the heat source plate;
the cold surface of the cold source plate and the hot surface of the hot source plate are oppositely arranged, and a phase-change heat exchange working medium is arranged between the cold source plate and the hot source plate; the cold surface of the cold source plate is provided with a non-uniform micro structure and is used for directionally regulating and controlling condensed liquid drops on the cold surface to bounce to the hot spot region in a concentrated mode towards the direction of the hot spot region when the directional soaking plate works, and a super-hydrophobic layer is formed on the non-uniform micro structure.
According to the directional vapor chamber of the embodiment of the first aspect of the invention, compared with the existing liquid-absorbing core vapor chamber, the liquid-absorbing core vapor chamber has the advantages that the liquid-absorbing rate of the liquid-absorbing core is mm/s, and the liquid-absorbing speed is slow; the bounce speed of condensed liquid drops in the directional vapor chamber of the embodiment can reach m/s, the transport rate of the condensed liquid can be improved by three orders of magnitude, and the evaporation limit and the capillary limit of the existing liquid absorption core vapor chamber are broken through. Secondly, compared with the existing soaking plate with the ordinary super-hydrophobic surface, because the existing ordinary super-hydrophobic surface has no microstructure, the bouncing direction of condensed liquid drops basically and completely bounce perpendicular to the surface, the condensed liquid drops reaching a hot spot area have small quantity, small volume, small absorbed heat and poor cooling effect on the hot spot area, and the directional soaking plate of the embodiment designs the non-uniform microstructure on a cold surface, when the directional soaking plate works, on one hand, the largest size of the condensed liquid drops growing on the non-uniform microstructure can be limited to be in a micron/submicron size range, so that the condensed liquid drops with the size can more easily realize the fusion bouncing, the probability of bouncing is greatly increased, thereby realizing the stable bouncing of the condensed liquid drops, on the other hand, the large-scale micron/submicron condensed liquid drops on the non-uniform microstructure can be regulated and controlled to intensively bounce to the hot spot area, thereby increase the liquid drop quantity and the liquid drop volume that reach the hot spot region, can absorb the heat in hot spot region more fast, evenly spread the evaporation into high temperature working medium steam with the condensation liquid drop of hot spot region promptly working medium liquid through super hydrophilic layer on the heat source board, take away the heat to promoted the cooling effect to the hot spot region by a wide margin, and then improved the heat flux density of soaking plate.
In some embodiments, the non-uniform microstructure includes a substantial area directly opposite to the hot spot area and a peripheral area distributed at a periphery of the substantial area and not directly opposite to the hot spot area.
In some embodiments, the single microstructure unit in the base point region is convex-column shaped, or concave-column shaped, or partially convex-column shaped and partially concave-column shaped, and the single microstructure unit in the peripheral region is convex-column shaped.
In some embodiments, when the single microstructure unit in the base point region is in a convex column shape, the base point region includes a plurality of first sub-ring regions from inside to outside, the single microstructure unit in the same first sub-ring region is an isosceles trapezoid prism, a triangular prism, a fan-shaped prism, a rectangular prism, a parallelogram prism, a V-shaped prism or a crescent prism, and the shapes of the single microstructures in different first sub-ring regions are the same or different.
In some embodiments, the microstructure unit density distribution in the same first sub-ring region is the same, and the microstructure unit density distribution in different first sub-ring regions is the same or different.
In some embodiments, when the single microstructure units in the base point region are in a pit shape, the base point region is an egg tray microstructure or a grid microstructure.
In some embodiments, when a single microstructure unit in the base point region is partially in a convex column shape and partially in a concave column shape, the base point region includes a concave column region and a convex column region, and the convex column region surrounds the periphery of the concave column region, or the concave column region surrounds the periphery of the convex column region, or the concave column region and the convex column region are alternately arranged from inside to outside.
In some embodiments, the peripheral region includes a plurality of second sub-ring regions distributed from outside to inside, the single microstructure units of the same second sub-ring region are isosceles trapezoid prisms, triangular prisms, fan prisms, rectangular prisms, parallelogram prisms, V-shaped prisms or crescent prisms, and the single microstructures of different second sub-ring regions are the same or different in shape.
In some embodiments, the microstructure unit density distribution in the same second sub-ring region is the same, and the microstructure unit density distribution in different second sub-ring regions is different.
In some embodiments, the microstructure unit density of the different second sub-ring regions from outside to inside is distributed in a gradient from sparse to dense.
In some embodiments, the single microstructure unit in the peripheral region is an isosceles trapezoid prism, wherein the width of an upper base of a top surface of the isosceles trapezoid prism is 1 μm, the width of a lower base of the top surface of the isosceles trapezoid prism is 5 to 10 μm, an included angle is 15 to 30 degrees, and the thickness of the isosceles trapezoid prism is 5 to 10 μm.
The second aspect of the present invention also provides a chip.
The chip according to the second aspect of the invention comprises the oriented soaking plate according to any one embodiment of the first aspect of the invention and a chip body, wherein the oriented soaking plate is used for dissipating heat of the chip body.
Because the directional soaking plate of the embodiment of the first aspect of the invention greatly improves the cooling effect on the hot spot region, and further improves the heat flux density of the soaking plate, the high-temperature part of the chip body is contacted with the hot spot region of the heat source plate, so that the high-temperature part of the chip can be effectively radiated, the miniaturization requirement of the chip is met, and the directional soaking plate has important practical significance for the development of the chip industry in China.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic cross-sectional view of an orientation soaking plate of the present invention.
Fig. 2 is a schematic cross-sectional view of another directional soaking plate of the present invention.
FIG. 3 is a schematic view of a single microstructure unit in a non-uniform microstructure of the invention as an isosceles trapezoidal prism.
Fig. 4 and 5 illustrate schematic diagrams of the nonuniform microstructure of the present invention utilizing the laplace pressure difference principle to adjust the bounce direction (the bounce direction is inclined upwards) of condensed liquid droplets, wherein fig. 4 illustrates that the condensed liquid droplets generate a driving force on the top surfaces of isosceles trapezoid prisms, and fig. 5 illustrates that the condensed liquid droplets are fused and bounced.
FIG. 6a is a schematic diagram of a non-uniform microstructure according to the present invention, which shows that the microstructure units are isosceles trapezoid prisms, and the density of the microstructure units is distributed from outside to inside in a gradient manner from sparse to dense.
Fig. 6b is a top view of fig. 6 a.
FIG. 7 is a schematic view of another non-uniform microstructure according to the present invention, which shows that the microstructure units are isosceles trapezoid prisms, and the density of the microstructure units is distributed from outside to inside in a gradient manner from sparse to dense, wherein the density distribution of the microstructure units in FIG. 7 is different from that in FIGS. 6a and 6 b.
FIG. 8 is a schematic representation of a single microstructure unit in a non-uniform microstructure of the invention as a triangular prism.
FIG. 9 is a schematic representation of a single microstructure unit in a non-uniform microstructure of the invention as a fan prism.
FIG. 10 is a schematic representation of a single microstructure unit in a non-uniform microstructure of the invention as a V-prism.
Fig. 11a is a schematic view of another non-uniform microstructure according to the present invention, which shows that the microstructure units are rectangular prisms, and the density of the microstructure units is distributed from outside to inside in a gradient manner from sparse to dense, and the non-uniform microstructure utilizes a sparse-dense principle to regulate the inclined upward bounce of condensed liquid droplets.
Fig. 11b is a top view of fig. 11 a.
FIG. 12a is a schematic diagram illustrating the growth of a condensed droplet in a pit microstructure of a substantial dot region according to the present invention.
FIG. 12b is a schematic view of the merging of condensed droplets in the dimple microstructure of the substantial dot area according to the present invention.
FIG. 12c is a schematic diagram of the enhanced bounce of condensed liquid droplets after being merged in the pit microstructures of the substantial point region according to the present invention.
FIG. 13 is a schematic view of a uniform microstructure not in accordance with the present invention.
FIG. 14 is a graph illustrating experimental results of a comparative experiment between the non-uniform microstructure of FIG. 7 and the uniform microstructure of FIG. 13.
Fig. 15 is a schematic view of another non-uniform microstructure according to the present invention, wherein the single microstructure unit in the peripheral region is an isosceles trapezoid prism, and the single microstructure unit in the base region is a dimpled egg-tray microstructure.
Fig. 16 is a schematic view of another non-uniform microstructure according to the present invention, wherein the single microstructure units in the peripheral region are isosceles trapezoidal prisms, and the single microstructure units in the base point region are pits in part and isosceles trapezoidal prisms in part.
FIG. 17 shows a lattice microstructure of a substantial dot area of the present invention, wherein the individual lattices are square.
FIG. 18 shows a lattice microstructure of a substantial dot region of the present invention, wherein the individual lattices are regular triangles.
Fig. 19 shows a lattice microstructure of a substantial point region according to the present invention, wherein the individual lattices are regular hexagons.
FIG. 20 is a schematic diagram of the effect of the non-uniform microstructure of isosceles trapezoid prisms with different sizes on controlling condensed liquid droplets according to the present invention.
Reference numerals:
Base point region B peripheral region C capillary driving force F upper base line width W1 of isosceles trapezoid prism top surface
Width W2 of bottom edge of isosceles trapezoid prism top surface and thickness H of isosceles trapezoid prism
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
An oriented vapor chamber 1000 according to an embodiment of the present invention is described below with reference to fig. 1 to 20.
As shown in fig. 1 and fig. 2, an oriented soaking plate 1000 according to an embodiment of the invention comprises a heat source plate 1 and a heat sink plate 2, wherein the heat source plate 1 has a hot spot region a, and a hot face 101 of the heat source plate 1 is provided with a superhydrophilic layer; the cold surface of the cold source plate 2 is opposite to the hot surface 101 of the heat source plate 1, and a phase-change heat exchange working medium is arranged between the cold source plate 2 and the heat source plate 1; the cold surface of the cold source plate 2 is provided with a non-uniform microstructure 201, a super-hydrophobic layer is formed on the non-uniform microstructure 201, and the non-uniform microstructure 201 is used for directionally regulating and controlling condensed liquid drops on the cold surface to be concentrated and bounce to a hot spot area A towards a hot spot area A when the directional soaking plate 1000 works.
Specifically, the outer side of the heat source plate 1 (i.e., the side opposite to the heat surface 101) is in contact with a heat source (not shown in the drawings), and the size of the contact surface between the heat source and the heat source plate 1 is smaller than the planar size of the heat source plate 1, so that the temperature of the heat source plate 1 in a local area directly in contact with the heat source is higher than the temperature of other parts of the heat source plate 1, that is, the high temperature of the heat source plate 1 is concentrated in a local area of the heat source plate 1 directly in contact with the heat source, which can be regarded as a hot spot area a of the heat source plate 1, that is, the heat source plate 1 has the hot spot area a. As shown in fig. 1 and 2, the hot spot region a is reasonably designed in the middle region of the heat source plate 1. The hot surface 101 of the heat source plate 1 is provided with a super-hydrophilic layer, so that working medium liquid can be uniformly spread and evaporated into high-temperature working medium steam, and heat is taken away.
The outer side of the cold source plate 2 (i.e. the side opposite to the cold surface) is in contact with a cold source (not shown in the figure), so that the cold source plate 2 is in a low-temperature state, and high-temperature working medium steam can be condensed into small droplets on the cold surface to release heat.
The cold surface of the cold source plate 2 is opposite to the hot surface 101 of the heat source plate 1, the cold surface is opposite to the hot surface 101 at intervals, a phase-change heat exchange working medium is arranged between the cold source plate and the heat source plate, the working medium conducts heat by performing phase change on the hot surface 101 of the heat source plate 1 and performing phase change on the cold surface of the cold source plate 2, and specifically, a super-hydrophilic layer of the hot surface 101 enables working medium liquid to be uniformly spread and evaporated into high-temperature working medium steam to take away heat; the high-temperature working medium steam is changed into large-scale condensate droplets on the cold surface of the cold source plate 2 to release heat; after being fused, the adjacent condensed liquid drops bounce at high speed and impact the hot surface 101 of the heat source plate 1, thereby forming an evaporation-condensation-bounce cycle process of the working medium.
The cold surface of the cold source plate 2 has a non-uniform microstructure 201, and is used for directionally regulating and controlling condensed liquid drops on the cold surface to intensively bounce to the hot spot region a towards the direction of the hot spot region a when the directional soaking plate 1000 works. It should be emphasized that, by designing the non-uniform microstructure 201 on the cold surface, when the directional soaking plate 1000 works, on one hand, the maximum size of the condensed liquid drops growing on the non-uniform microstructure 201 can be limited to be in the micron/submicron size range, the condensed liquid drops of such size can more easily realize fusion bounce, the probability of bounce is greatly increased, thereby realizing stable bounce of the condensed liquid drops, on the other hand, the large-scale micron/submicron condensed liquid drops on the non-uniform microstructure 201 can be regulated and bounced to the hot spot area a in a centralized manner, so that the number of the condensed liquid drops reaching the hot spot area a of the heat source plate 1 is greatly increased, the heat of the hot spot area a can be absorbed more quickly, the condensed liquid drops of the hot spot area a, namely the working medium liquid, can be uniformly spread and evaporated into high-temperature working medium vapor through the super-hydrophilic layer on the heat source plate 1, and the heat is taken away, thereby greatly improving the cooling effect on the hot spot area a. The non-uniform micro-structure 201 is provided with the super-hydrophobic layer, that is, the super-hydrophobic layer covers the whole cold surface, so that the condensed liquid drops are easier to separate from the non-uniform micro-structure 201 after being fused, and the high-stability bounce of the condensed liquid drops is favorably realized.
The working principle of the directional bouncing of the non-uniform microstructure 201 is illustrated below.
Fig. 4 and 5 are schematic diagrams illustrating a method for regulating and controlling the bounce direction (the bounce direction is inclined upwards) of condensed liquid drops by using the laplace differential pressure principle. When the individual microstructure units in the non-uniform microstructure 201 are selected from the group consisting of convex-cylindrical isosceles trapezoidal prisms (as shown in fig. 3), fig. 4 illustrates the top surfaces of the isosceles trapezoidal prisms of fig. 3 (which are isosceles trapezoids). When the high-temperature working medium steam is condensed on the top surface of the isosceles trapezoid prism to form condensed liquid drops, the x of the condensed liquid drops on the top surface is different due to the fact that different positions of the same condensed liquid drop are in contact with the top surface of the isosceles trapezoid prism in different widths1Has a contact width of delta1At the top surface x2Has a contact width of delta2，δ1<δ2Resulting in condensed droplets at x1Has a radius of curvature smaller than that at x2Radius of curvature of (d), i.e. r1<r2The position of the condensed drop in x is obtained according to the Laplace's equation1Is greater than at x2Differential pressure of (i.e. Δ P)1>ΔP2And further, a driving force in a direction from the pressure difference being large to the pressure difference being small is generated (the driving force direction is illustrated to the right in fig. 4, i.e., in a direction along which the width of the isosceles trapezoid increases). Therefore, as shown in fig. 5, on the surface having the isosceles trapezoidal prism, the two condensed liquid droplets are driven by a rightward driving force when they are coalesced and bounced, and the coalesced condensed liquid droplets will be bounced diagonally upward and rightward. Thus, directionally controlled non-uniform microstructures 201 (e.g., as shown in fig. 6 a-6 b, fig. 7) can be arranged at different positions on the cold side relative to the hot spot region a, so that the non-uniform microstructures 201 can directionally control large-scale micron/submicron condensed liquid drops on the cold side to be concentrated towards the cold side when the directional soaking plate 1000 is in operationBouncing to the hot spot area A in the direction of the hot spot area A.
In the same principle, the single microstructure unit in the nonuniform microstructure 201 may also be a convex pillar in the shape of a triangular prism (as shown in fig. 8), a fan-shaped prism (as shown in fig. 9), a parallelogram prism (not shown), a V-shaped prism (as shown in fig. 10), or a crescent prism (not shown), but is not limited thereto, as long as the top surface of the convex pillar can generate a driving force similar to that generated by the laplace pressure difference when the condensed liquid droplets are merged and bounce, so as to regulate the bouncing of the condensed liquid droplets in the inclined upward direction.
Fig. 11a and 11b illustrate another method for regulating the bounce direction of condensed liquid drops by using the density principle (the bounce direction is inclined upwards). For a superhydrophobic surface with non-uniform microstructures 201, the density of the non-uniform microstructures 201 can affect the contact angle of the surface. For example, when the individual microstructure units in the non-uniform microstructure 201 are rectangular prisms (as shown in fig. 11a and 11 b) in a convex column shape, the non-uniform microstructure 201 has a super-hydrophobic surface and the density of the microstructure units is distributed in a gradient from sparse to dense from outside to inside as a whole. Where the non-uniform microstructures 201 are more sparse, the poorer the surface wettability, the larger the contact angle; the denser the non-uniform microstructure 201 is, the better the surface wettability and the smaller the contact angle is. Therefore, the nonuniform microstructure 201 is from outside to inside, the microstructure unit density distribution is from sparse to dense, and for two liquid drops merged and bounced, the bouncing direction of the liquid drops is not vertical to the upper direction any more due to the difference of contact angles, but the liquid drops are deviated. The bounce direction is as follows: the coalesced condensate droplets bounce from sparse to dense regions in a roughly parabolic fashion. Therefore, in the soaking plate according to the embodiment of the first aspect of the present invention, by reasonably designing the microstructure unit density of the non-uniform microstructure 201, the condensed droplets may impact the hot spot region a during the bouncing process, so that the large-scale micron/submicron condensed droplets on the cold surface can be directionally regulated and controlled to bounce to the hot spot region a in a direction toward the hot spot region a.
As can be seen from the above description of the two principles, in the directional soaking plate 1000 according to the first embodiment of the present invention, the non-uniform microstructure 201 includes the substantial point region B directly facing the hot spot region a and the peripheral region C distributed at the periphery of the substantial point region B and not directly facing the hot spot region a. For the substantial point region B, the condensed liquid droplets may bounce obliquely upward but the falling points of the condensed liquid droplets on the heat source plate 11 are still located within the hot spot region a, and for the peripheral region C, the condensed liquid droplets may bounce obliquely upward and the falling points of the condensed liquid droplets on the heat source plate 11 are still located within the hot spot region a.
Of course, for the bouncing direction of the condensed liquid drops in the base point region B, besides designing the convex cylindrical microstructure to realize the inclined bouncing of the condensed liquid drops, the concave microstructure can also be designed to realize the vertical bouncing of the condensed liquid drops, that is, the condensed liquid drops in the base point region B can bounce vertically.
The following description is also made for the principle of vertical bounce of the pit microstructure: by designing a micrometer-scale thin-wall pit microstructure (refer to fig. 12a, 12b and 12c), the condensed liquid drop can only grow in each single pit of the thin-wall pit microstructure but not on the top surface of the side wall of each single pit, when the condensed liquid drop grows to a size equivalent to the size of the pit, the grown condensed liquid drop can be considered to be a grown condensed liquid drop (as shown in fig. 12 a), the grown condensed liquid drop in two adjacent pits is fused (as shown in fig. 12 b), due to the existence of the thin wall (namely the side wall of the single pit), the internal flow direction of the fused condensed liquid drop is induced to be in an out-of-plane direction, and the thin wall provides an out-of-plane capillary driving force F for the liquid drop, under the action of the capillary driving force F, the fused liquid drop can bounce off the cold plane at a high speed like an arrow (as shown in fig. 12c), so as to realize the vertical bounce of the condensed liquid drop, i.e. vertical bounce.
A set of experiments comparing the non-uniform microstructure 201 with the uniform microstructure for regulating the bounce of the condensed liquid drop in a desired direction are given below by way of example to prove the significant effect of the non-uniform microstructure 201 of the present embodiment.
In this comparative experiment, the single microstructure unit in the non-uniform microstructure 201 (refer to fig. 7) and the single microstructure unit in the uniform microstructure (refer to fig. 13) are isosceles trapezoid prisms, and the base side lengths of the isosceles trapezoids are 5 μm. It can be seen from the experimental results that, as shown in fig. 14, the expected directional bounce ratio of condensed droplets on the non-uniform microstructure 201 is significantly higher than that of the condensed droplets on the uniform microstructure.
According to the directional vapor chamber 1000 of the embodiment of the first aspect of the present invention, first, compared with the existing wick vapor chamber, in the existing wick vapor chamber, the rate of liquid suction by the wick is mm/s, and the suction speed is slow; the bounce speed of condensed liquid drops in the directional vapor chamber 1000 of the embodiment can reach m/s, the transport rate of the condensed liquid can be improved by three orders of magnitude, and the evaporation limit and the capillary limit of the existing liquid absorption core vapor chamber are broken through. Secondly, compared with the existing soaking plate with the ordinary super-hydrophobic surface, because the existing ordinary super-hydrophobic surface has no microstructure, the bouncing direction of condensed liquid drops is basically vertical to the surface to bounce, the condensed liquid drops reaching the hot spot area A are small in quantity, small in volume, small in absorbed heat and poor in cooling effect on the hot spot area A, and the directional soaking plate 1000 of the embodiment, by designing the non-uniform microstructure 201 on the cold surface, when the directional soaking plate 1000 works, on one hand, the largest size of the condensed liquid drops growing on the non-uniform microstructure 201 can be limited to be in a micron/submicron size range, the condensed liquid drops with the size can more easily realize fusion bouncing, the probability of bouncing is greatly increased, so that the condensed liquid drops can stably bounce, on the other hand, the large-scale micron/submicron condensed liquid drops on the non-uniform microstructure 201 can be regulated to intensively bounce to the hot spot area A, thereby increase and reach the liquid drop quantity and the liquid drop volume of hot spot area A, can absorb the heat of hot spot area A more sooner, evenly spread the evaporation into high temperature working medium steam with the condensation liquid drop of hot spot area A promptly working medium liquid through super hydrophilic layer on the heat source board 1 to take away the heat, thereby promoted the cooling effect to hot spot area A by a wide margin, and then improved the heat flux density of soaking plate.
In some embodiments, the non-uniform microstructure 201 includes a substantial area B directly facing the hot spot area a and a peripheral area C distributed at the periphery of the substantial area B and not directly facing the hot spot area a. It is understood that, for the microstructure at the base point region B, the condensed liquid drop can be vertically bounced or obliquely bounced to the hot spot region a, and the microstructure at the peripheral region C can make the condensed liquid drop obliquely bounced to the hot spot region a, so that the condensed liquid drop on the non-uniform microstructure 201 can be intensively bounced to the hot spot region a.
In some embodiments, the single microstructure unit in the base point region B is in a convex column shape (referring to fig. 1, 6a and 7, an isosceles trapezoid represents a convex column), or in a concave pit shape (referring to fig. 2 and 15, a circle represents a concave pit), or partially in a convex column shape and partially in a concave pit shape (referring to fig. 16, an isosceles trapezoid represents a convex column, and a circle represents a concave pit), and the single microstructure unit in the peripheral region C is in a convex column shape (referring to fig. 1 and 2). It can be understood that, since the substantial point area B is directly opposite to the hot spot area a, the condensed liquid droplets in the substantial point area B may bounce obliquely upwards when bouncing occurs but the falling point of the condensed liquid droplets on the heat source plate 11 is still located in the hot spot area a (refer to fig. 1), or bounce in a direction perpendicular to the cold surface (i.e. vertically upwards) (refer to fig. 2); therefore, the single microstructure unit in the base point region B may be convex-pillar shaped, concave-pit shaped, or partially convex-pillar shaped and partially concave-pit shaped. The condensed droplets in the peripheral region C can bounce only obliquely upward but not vertically upward, and therefore, the single microstructure unit in the peripheral region C should be in a convex column shape. Therefore, by reasonably designing the microstructure units of the base point region B and the peripheral region C, the high-stability directional bouncing of the non-uniform microstructures 201 on condensed liquid drops can be realized, so that large-scale micron/submicron condensed liquid drops on a cold surface are intensively bounced to the hot point region A towards the hot point region A, the cooling effect on the hot point region A is greatly improved, and the heat flux density of the soaking plate is further improved.
In some embodiments, when the single microstructure unit in the base point region B is in a convex column shape, the base point region B includes a plurality of first sub-ring regions from inside to outside, and the single microstructure unit in the same first sub-ring region is an isosceles trapezoid prism (refer to fig. 3), a triangular prism (refer to fig. 8), a fan-shaped prism (refer to fig. 9), a rectangular prism (refer to fig. 11a), a parallelogram prism (not shown), a V-shaped prism (refer to fig. 10), or a crescent prism (not shown), and the single microstructures in different first sub-ring regions are the same or different in shape. It can be understood that, since the hot spot region a has a certain area and the size of a single microstructure unit is in the micron range and is very small, a plurality of first sub-ring regions surrounding one ring from inside to outside can be designed at the range of the base point region B, and the single microstructure units of the same first sub-ring region can be, but not limited to, an isosceles trapezoid prism, a triangular prism, a fan-shaped prism, a rectangular prism, a parallelogram prism, a V-shaped prism or a crescent-shaped prism. The individual microstructure shapes of the different first sub-ring regions may be the same, for example, the microstructure units in the base point region B are isosceles trapezoidal prisms, or rectangular prisms. The shapes of the single micro-structures of different first sub-ring areas can be different, for example, the shape of the single micro-structure unit of one circle of the first sub-ring area is an isosceles trapezoid prism, the shape of the single micro-structure unit of the other circle of the first sub-ring area is a fan-shaped prism, and the anisotropy of the structure can be formed by arranging two or more micro-structure unit combinations in the base point area B, so that the transport capability advantage of the surfaces with different shapes on condensed liquid drops is exerted, and the regulation capability of the surfaces on the bouncing direction of the liquid drops is enhanced.
In some embodiments, the microstructure units in the same first sub-ring region have the same density distribution, so that condensed liquid drops on the same first sub-ring region can be uniformly distributed, and fusion and bounce of the condensed liquid drops are facilitated. The density distribution of the microstructure units of different first sub-ring areas can be the same, and the condensate drops in the base point area B can be regulated and controlled to bounce upwards to the hot point area A in an inclined mode. The microstructure unit density distribution of different first sub-ring areas can also be different, and the microstructure unit density at different positions on the base point area B is different, so that the microstructure array of the base point area B can be combined with the regulating and controlling effect of the different microstructure unit densities on the bouncing of the liquid drops, and the directional regulating and controlling effect on the condensed liquid drops can be further improved.
In some embodiments, when the single microstructure units in the base point region B are in a pit shape, the base point region B is an egg-tray microstructure (refer to fig. 15) or a grid microstructure (refer to fig. 17 to 19). It will be appreciated that, on the one hand, by designing the base point regions B as egg-tray microstructures or grid microstructures, the condensate droplets can be confined in the corresponding pits and can bounce vertically when bouncing occurs.
Preferably, the shape of the individual microstructure units of the lattice microstructure is preferably square (see fig. 17), triangular (see fig. 18) or regular hexagonal (see fig. 19), so that the lattice can be densely paved, and condensed liquid droplets in the base point regions can grow only in the individual pits.
In some embodiments, when the single microstructure unit in the base point region B is partially in a convex column shape and partially in a concave column shape, the base point region B includes a concave column region and a convex column region, and the convex column region surrounds the periphery of the concave column region (not shown in the figure), or the concave column region surrounds the periphery of the convex column region (refer to fig. 16), or the concave column region and the convex column region are alternately arranged from inside to outside (not shown in the figure). Thereby, the directional bouncing of the condensate droplets of the substantial point region B can be achieved, so that the condensate droplets of the substantial point region B are intensively bounced to the hot spot region a.
In some embodiments, the peripheral region C includes a plurality of second sub-ring regions distributed outwards and inwards, the single microstructure units of the same second sub-ring region are isosceles trapezoid prisms, triangular prisms, fan prisms, rectangular prisms, parallelogram prisms, V-shaped prisms or crescent prisms, and the single microstructures of different second sub-ring regions are the same or different in shape. It can be understood that, because the peripheral region C has a certain area and the size of a single microstructure unit is in the micron order, the size is very small, so that a plurality of outside-in second sub-ring regions can be designed at the range of the peripheral region C, and the single microstructure unit of the same second sub-ring region can be an isosceles trapezoid prism, a triangular prism, a fan-shaped prism, a rectangular prism, a parallelogram prism, a V-shaped prism or a crescent prism, but is not limited thereto. The individual microstructure shapes of the different second sub-ring regions may be the same, for example, the microstructure units in the peripheral region C are isosceles trapezoidal prisms, or rectangular prisms. The shapes of the single micro-structure units of different second sub-ring areas can also be different, for example, the shape of the single micro-structure unit of one circle of second sub-ring area is an isosceles trapezoid prism, the shape of the single micro-structure unit of the other circle of second sub-ring area is a fan-shaped prism, the anisotropy of the structure can be formed by arranging two or more micro-structure unit combinations in the peripheral area C, the advantage of the transport capacity of the surfaces with different shapes on condensed liquid drops is exerted, and the regulation and control capacity of the surfaces on the bouncing direction of the liquid drops is enhanced.
In some embodiments, the microstructure units in the same second sub-ring region have the same density distribution, so that condensed liquid drops on the same first sub-ring region can be uniformly distributed, and fusion and bounce of the condensed liquid drops are facilitated. The microstructure units of different second sub-ring regions are distributed in different densities, the microstructure array of the peripheral region C and the regulating and controlling effect of the microstructure unit density gradient on the bouncing of the liquid drops can be combined, and the directional regulating and controlling effect on the condensed liquid drops can be further improved.
In some embodiments, the microstructure unit density of the second, outside-in, different sub-ring regions is graded from sparse to dense. According to the principle of density and density, the bounce direction of the condensed liquid drop is regulated, so that for two liquid drops which are converged and bounced, the bounce direction of the liquid drop is not vertical to the upper direction any more but is deviated due to different contact angles. The bounce direction is as follows: the coalesced condensate droplets bounce from sparse to dense regions in a roughly parabolic fashion. Therefore, in the soaking plate according to the embodiment of the first aspect of the invention, through reasonable design of the density of the microstructure units in the peripheral region C, the condensed liquid drops can impact the hot spot region a in the bouncing process, so that the directional regulation and control effect on the condensed liquid drops is further improved.
In some embodiments, the single microstructure unit of the peripheral region C is an isosceles trapezoid prism, wherein the top side of the isosceles trapezoid prism has a width W1 of 1 μm at the upper base, a width W2 of 5 to 10 μm at the lower base, an included angle between two opposite oblique sides is 15 to 30 °, and a thickness H of the isosceles trapezoid prism is 5 to 10 μm. Experiments prove that when the isosceles trapezoid prism with the size range is adopted by a single microstructure unit in the peripheral area of the non-uniform microstructure, the bouncing ratio of condensed liquid drops in the expected direction is high. Next, the regulation and control effect of the isosceles trapezoid prism surfaces with different sizes on the bouncing direction of the liquid drop is explained through a set of experimental data, as shown in fig. 20, the widths of the bottom edges of the isosceles trapezoid prisms are selected from three sizes, which are 2.5 μm, 5 μm and 10 μm respectively. From the ratio of the condensed liquid drops bouncing towards the expected direction, the isosceles trapezoid prism non-uniform microstructure can effectively regulate and control the bouncing direction of the liquid drops, so that the liquid drops bounce towards the expected direction.
The second aspect of the present invention also provides a chip.
The chip according to the embodiment of the second aspect of the present invention includes the directional soaking plate 1000 according to any one embodiment of the first aspect of the present invention and a chip body, and the directional soaking plate 1000 is used for dissipating heat from the chip body. Because the directional soaking plate 1000 of the embodiment of the first aspect of the invention greatly improves the cooling effect on the hot spot region a, and further improves the heat flux density of the soaking plate, the high-temperature part of the chip body is contacted with the hot spot region a of the heat source plate 1, so that the high-temperature part of the chip can be effectively and efficiently cooled, the miniaturization requirement of the chip is met, and the directional soaking plate 1000 has important practical significance for the development of the chip industry in China.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like are intended to mean that a particular feature, structure, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (12)
1. A directional soaking plate, comprising:
the heat source plate is provided with a hot spot area, and a super-hydrophilic layer is arranged on the hot surface of the heat source plate;
the cold surface of the cold source plate and the hot surface of the hot source plate are oppositely arranged, and a phase-change heat exchange working medium is arranged between the cold source plate and the hot source plate; the cold surface of the cold source plate is provided with a non-uniform micro structure and is used for directionally regulating and controlling condensed liquid drops on the cold surface to bounce to the hot spot region in a concentrated mode towards the direction of the hot spot region when the directional soaking plate works, and a super-hydrophobic layer is formed on the non-uniform micro structure.
2. The directional soaking plate according to claim 1, wherein the non-uniform microstructure comprises a substantial area directly opposite to the hot spot area and a peripheral area distributed at the periphery of the substantial area and not directly opposite to the hot spot area.
3. The directional vapor chamber of claim 2, wherein the individual microstructure units in the base regions are convex or concave or partially convex and partially concave and the individual microstructure units in the peripheral regions are convex.
4. The directional soaking plate according to claim 3, wherein when the single microstructure units in the base point region are in a convex column shape, the base point region comprises a plurality of first sub-ring regions from inside to outside, the single microstructure units in the same first sub-ring region are isosceles trapezoid prisms, triangular prisms, fan-shaped prisms, rectangular prisms, parallelogram prisms, V-shaped prisms or crescent prisms, and the single microstructures in different first sub-ring regions are in the same or different shapes.
5. The directional soaking plate according to claim 4, wherein the microstructure unit density distribution in the same first sub-ring zone is the same, and the microstructure unit density distribution in different first sub-ring zones is the same or different.
6. The directional soaking plate according to claim 3, wherein when the individual microstructure units in the base point regions are in the form of pits, the base point regions are egg tray microstructures or grid microstructures.
7. The oriented heat soaking plate according to claim 3, wherein when the single microstructure units in the base point regions are partially convex and partially concave, the base point regions comprise concave sub-regions and convex sub-regions, the convex sub-regions surround the periphery of the concave sub-regions, or the concave sub-regions surround the periphery of the convex sub-regions, or the concave sub-regions and the convex sub-regions are alternately arranged from inside to outside.
8. The directional soaking plate according to any one of claims 2 to 7, wherein the peripheral area comprises a plurality of second sub-ring areas distributed from outside to inside, the single microstructure units of the same second sub-ring area are isosceles trapezoid prisms, triangular prisms, fan prisms, rectangular prisms, parallelogram prisms, V-shaped prisms or crescent prisms, and the single microstructure shapes of different second sub-ring areas are the same or different.
9. The directional soaking plate according to claim 8, wherein the microstructure unit density distribution in the same second sub-ring region is the same, and the microstructure unit density distribution in different second sub-ring regions is different.
10. The directional soaking plate according to claim 9, wherein the microstructure unit density of the different second sub-ring regions from outside to inside is distributed in a gradient from sparse to dense.
11. The directional vapor chamber according to claim 10, wherein the individual microstructure units of the peripheral region are isosceles trapezoidal prisms having top and bottom edges of a width of 1 μm, bottom edge width of 5 to 10 μm, an included angle of 15 to 30 °, and a thickness of 5 to 10 μm.
12. A chip comprising the directional soaking plate according to any one of claims 1 to 11 and a chip body, wherein the directional soaking plate is used for dissipating heat of the chip body.
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010124025A2 (en) * | 2009-04-21 | 2010-10-28 | Duke University | Thermal diode device and methods |
| US20120241133A1 (en) * | 2011-03-22 | 2012-09-27 | Foxconn Technology Co., Ltd. | Vapor chamber and method for manufacturing the same |
| CN103687455A (en) * | 2013-12-31 | 2014-03-26 | 上海交通大学 | Vapor chamber |
| CN110822959A (en) * | 2019-10-24 | 2020-02-21 | 西安交通大学 | Super-hydrophobic-hydrophilic surface vacuum cavity radiator |
| CN111486734A (en) * | 2020-04-01 | 2020-08-04 | 浙江理工大学 | Vapor chamber and manufacturing method thereof |
| CN111879158A (en) * | 2020-09-04 | 2020-11-03 | 杭州威纳激光科技有限公司 | Partition-optimized 0.1-0.4mm ultrathin VC and preparation method thereof |
| CN214173063U (en) * | 2020-09-04 | 2021-09-10 | 绍兴镭纳激光科技有限公司 | 0.1-0.4mm ultrathin VC with optimized partition structure and function |
| CN217005470U (en) * | 2022-01-12 | 2022-07-19 | 清华大学 | Directional soaking plate and chip |
-
2022
- 2022-01-12 CN CN202210033500.XA patent/CN114485240A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010124025A2 (en) * | 2009-04-21 | 2010-10-28 | Duke University | Thermal diode device and methods |
| US20120241133A1 (en) * | 2011-03-22 | 2012-09-27 | Foxconn Technology Co., Ltd. | Vapor chamber and method for manufacturing the same |
| CN103687455A (en) * | 2013-12-31 | 2014-03-26 | 上海交通大学 | Vapor chamber |
| CN110822959A (en) * | 2019-10-24 | 2020-02-21 | 西安交通大学 | Super-hydrophobic-hydrophilic surface vacuum cavity radiator |
| CN111486734A (en) * | 2020-04-01 | 2020-08-04 | 浙江理工大学 | Vapor chamber and manufacturing method thereof |
| CN111879158A (en) * | 2020-09-04 | 2020-11-03 | 杭州威纳激光科技有限公司 | Partition-optimized 0.1-0.4mm ultrathin VC and preparation method thereof |
| CN214173063U (en) * | 2020-09-04 | 2021-09-10 | 绍兴镭纳激光科技有限公司 | 0.1-0.4mm ultrathin VC with optimized partition structure and function |
| CN217005470U (en) * | 2022-01-12 | 2022-07-19 | 清华大学 | Directional soaking plate and chip |
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