CN111879158A - Partition-optimized 0.1-0.4mm ultrathin VC and preparation method thereof - Google Patents
Partition-optimized 0.1-0.4mm ultrathin VC and preparation method thereof Download PDFInfo
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- CN111879158A CN111879158A CN202010923913.6A CN202010923913A CN111879158A CN 111879158 A CN111879158 A CN 111879158A CN 202010923913 A CN202010923913 A CN 202010923913A CN 111879158 A CN111879158 A CN 111879158A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
- F28D15/046—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0233—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes the conduits having a particular shape, e.g. non-circular cross-section, annular
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Abstract
The invention discloses a partition optimized 0.1-0.4mm ultrathin VC and a preparation method thereof, wherein the partition optimized ultrathin VC comprises an upper cover plate and a lower cover plate, wherein the upper cover plate is connected with the lower cover plate in a welding manner; the upper cover plate and the lower cover plate respectively comprise an evaporation section, a heat insulation section and a condensation section; the surface of an evaporation section of the upper cover plate is provided with a super-hydrophilic cavity-shaped micro-nano structure, the surface of a heat insulation section is provided with a super-hydrophilic equal-width groove micro-nano structure, and the surface of a condensation section is provided with a super-hydrophobic conical micro-nano structure; the surface of an evaporation section area of the lower cover plate is provided with a super-hydrophilic conical micro-nano structure, the surface of a heat insulation section area is provided with a super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure, and the surface of a condensation section area is provided with a super-hydrophilic conical micro-nano structure; the application also discloses a preparation method of the ultrathin VC. The invention not only can optimize the vapor cavity structure and the liquid cavity structure in the heat pipe and the volume distribution, but also can ensure the good capillary water absorption performance and the low water resistance and thermal resistance.
Description
Technical Field
The invention relates to the technical field of vapor chambers, in particular to a 0.1-0.4mm ultra-thin VC with optimized partition and a preparation method thereof.
Background
With the rapid development of microelectronic technologies, particularly 5G technologies, various electronic devices and devices, particularly ultra-thin mobile devices represented by 5G smart phones and tablet computers, are continuously developing towards high performance, integration, miniaturization, and lightness, the density of elements is increased, the endurance of power supplies is improved, the power consumption of systems is increased, the thickness of the body is continuously reduced, the heat generated by unit volume is continuously increased, the heat dissipation problem caused by high heat flux density becomes a key limiting factor restricting the usability, reliability, and service life of the electronic devices, and about 55% of the failure problems of the electronic devices are caused by over-high temperature. Taking a 5G smart phone as an example, the power consumption of a chip of the smart phone is about 2.5 times that of a 4G smart phone, the integration level and the working speed are further improved, the heat dissipation requirement is stronger, the normal work of the smart phone cannot be met by the original heat dissipation scheme, and the smart phone needs to be upgraded urgently.
A vapor chamber (VC, a vacuum chamber vapor chamber heat dissipation technology) and a heat pipe (for convenience, the vapor chamber VC described below includes a heat pipe, and the vapor chamber VC of this patent also includes a heat pipe) are used as an efficient two-phase heat transfer device based on boiling phase change heat transfer, and the heat conductivity coefficient of the heat pipe exceeds that of any known metal at present, and the heat pipe is widely applied to electronic devices such as smart phones, notebook computers and the like due to excellent heat conductivity, good isothermal property and reliability. With the increasing lightness and thinness of electronic devices, ultra-thin vapor chambers are becoming effective means and preferred solutions for heat dissipation in narrow spaces. The ultrathin soaking plate generally comprises a cavity, a sealing head, a liquid absorption core and a working medium, and the main structure of the ultrathin soaking plate comprises an evaporation section, a heat insulation section, a condensation section and a sealing shell. The liquid water in the evaporation section absorbs heat generated by the chip during working and evaporates into steam, the steam is transmitted to the condensation section through the steam channel of the heat insulation section in a gas phase mode, the steam is reduced to the liquid water through the heat release of the condensation section, and due to the capillary force effect of the liquid absorption core in the vapor chamber, condensed water flows back to the evaporation section to continuously circulate back and forth, so that the heat of the chip is rapidly dissipated. The heat transfer performance, heat transfer efficiency and heat transfer limit of the thermal spreader plate are primarily dependent on the capillary pressure provided by the wick and the rate of percolation of the liquid within the wick. The traditional liquid absorption cores mainly comprise a wire mesh liquid absorption core, a powder/fiber sintered liquid absorption core, a groove liquid absorption core, a composite liquid absorption core and the like, the preparation method mainly comprises chemical deposition and sintering preparation, or etching methods such as reactive ion etching, electric spark machining, electrolytic machining, surface coating and the like are adopted, and the liquid absorption cores are also actively prepared by a laser processing method in recent years.
The development of the 5G technology requires that the heat dissipation capacity of the soaking plate is further improved, the thickness of the soaking plate is further reduced, and particularly when the thickness of the soaking plate is less than 0.4mm, the thickness of a liquid absorption core of the soaking plate is thinner, the capillary performance of the soaking plate is obviously reduced, the interfacial shearing force caused by internal gas-liquid high-speed convection is increased, the water resistance and the air resistance are obviously improved, and the heat transfer efficiency is rapidly reduced. Therefore, there is an urgent need to develop vapor chambers and wick structures thereof with superior performance.
The main development trend of the ultrathin vapor chamber is to directly prepare a liquid absorption core on a cover plate to reduce the thickness, optimize the liquid absorption core structure and improve the capillary force. For example, in patent CN106500533B, nanosecond laser is used to carve transversely and longitudinally staggered fine grooves on the wall of a heat pipe, and fish scale laser welding is performed on the periphery of the heat pipe to prepare an ultrathin heat pipe with good welding tightness, small volume, good heat transfer performance and small backflow resistance. Patent CN106541210A adds hydrophilic treatment to the surface of the groove to improve the efficiency of evaporation heat absorption and condensation reflux of the working medium. In patent CN110081749A, nanosecond laser is used to scan a continuous capillary structure with a hairy morphology in a groove plane of an aluminum substrate, and a structure in which super-hydrophobic and super-hydrophilic regions are alternately distributed is obtained by heat treatment, so as to improve heat dissipation efficiency. Patent CN105841535A and patent CN105865243A propose to use multi-functional laser to process pin fin and groove structure on the copper board, combine super hydrophobic surface preparation to obtain composite structure groove to promote capillary force and promote the boiling condensation and the flow equalizing of working medium. Patent CN106066130A proposes that a groove capillary structure is prepared on a slope copper cover plate by using laser, and the reflux speed of a working medium in a horizontally placed heat pipe is accelerated and the heat transfer performance is improved by constructing the combined action of the slope and the groove capillary structure. Patent CN107283067A proposes that a micro channel with unequal width is processed on the wall surface of the heat pipe by nanosecond laser to improve the capillary pressure and heat transfer performance of the working medium reflux. Patent CN107509357A proposes to process a convex groove on the surface of a copper substrate by using laser to increase the evaporation surface area of the working medium and provide an additional steam channel to promote the evaporation of the working medium and reduce the reflux resistance of the working medium. Patent CN206095014U proposes to use nanosecond laser to etch a high aspect ratio groove on a metal substrate, and form a secondary groove by using an adjacent slag stack to prepare a flat heat pipe with large capillary pressure and fast working medium backflow. Patent CN207300016U combines together the capillary groove that laser beam machining obtained and the netted imbibition core that 3D printed the shaping to reinforcing working medium evaporation condensation efficiency promotes heat transfer performance and stability.
In summary, the conventional mechanical manufacturing method using ultra-thin heat pipe wire mesh, powder spraying, and high-temperature soldering packaging is difficult to further reduce the thickness of the heat pipe, and the laser method has advantages in the aspects of preparing hydrophilic, super-hydrophilic, hydrophobic, and super-hydrophobic structures and structural layout, but the conventional patents using the laser method generally aim at heat pipes with a thickness of 0.5mm or more, and almost do not relate to heat pipes with a thickness of 0.1-0.4 mm. However, when the thickness of the heat pipe is further reduced to below 0.4mm, how to optimize the vapor cavity structure and the liquid cavity structure and the volume distribution inside the heat pipe and how to ensure good capillary water absorption performance and low water resistance and thermal resistance of the heat pipe are still a great challenge.
Therefore, how to provide the 0.1-0.4mm ultrathin VC and the preparation method thereof, which can optimize the vapor cavity structure and the liquid cavity structure in the heat pipe and the volume distribution, ensure the favorable capillary water absorption performance and the low water resistance and thermal resistance of the heat pipe, and optimize the partition, are one of the technical problems to be solved in the field.
Disclosure of Invention
In view of the above, the invention provides a 0.1-0.4mm ultrathin VC with optimized subareas and a preparation method thereof, which utilizes an ultrafast laser patterning micro-nano preparation method to optimize the structure and the function of the evaporation section, the heat insulation section and the condensation section of the upper cover plate and the lower cover plate of the soaking plate in subareas, and utilizes a laser welding method to weld and package the upper cover plate and the lower cover plate so as to realize the ultrathin and heat transfer performance optimization of the soaking plate with the thickness of 0.1-0.4 mm.
In order to solve the technical problems, the invention adopts the following technical scheme:
the partition-optimized 0.1-0.4mm ultrathin VC comprises an upper cover plate and a lower cover plate, wherein the upper cover plate and the lower cover plate are connected by laser welding;
the upper cover plate comprises a first evaporation section, a first heat insulation section and a first condensation section; the surface of the area of the first evaporation section is provided with a super-hydrophilic cavity-shaped micro-nano structure; the surface of the first insulation section area is provided with a super-hydrophilic equal-width groove micro-nano structure; the surface of the first condensation section area is provided with a super-hydrophobic conical micro-nano structure;
the lower cover plate comprises a second evaporation section, a second heat insulation section and a second condensation section; the surface of the area of the second evaporation section is provided with a super-hydrophilic conical micro-nano structure; the surface of the second heat insulation section area is provided with a super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure; the surface of the second condensation section area is set to be of a super-hydrophilic conical micro-nano structure.
The beneficial effects of the above technical scheme are: 1) the surface of the second evaporation section area of the lower cover plate is set to be the super-hydrophilic conical micro-nano structure, so that evaporation and capillary imbibition functions are optimized, and the heat dissipation efficiency is remarkably improved by utilizing a high-temperature bubble nucleation evaporation heat dissipation mechanism on the super-hydrophilic surface; the strong capillary force water absorption capacity of the super-hydrophilic surface is utilized, the liquid flow resistance is reduced, the water supply efficiency is improved, and the water absorption efficiency is obviously improved; the surface of the first evaporation section area of the upper cover plate is provided with the super-hydrophilic cavity-shaped micro-nano structure, so that the steam receiving and transporting effect is optimized, and the steam resistance is reduced; 2) the regional surface of the second heat-insulating section of the lower cover plate is arranged to be a super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure, a strong self-driving function is provided by utilizing the Laplace pressure difference at two ends of the wedge-shaped structure, the self-driving function is added besides super-hydrophilic capillary imbibition force, the backflow transportation capacity of condensed water is improved, and water resistance is minimized; the surface area of the first insulation section of the upper cover plate is set to be of a super-hydrophilic equal-width groove micro-nano structure, so that steam is rapidly transported, and steam resistance is reduced; 3) the area surface of the first condensation section of the upper cover plate is arranged to be a super-hydrophobic conical micro-nano structure, so that the condensation function is optimized, and the condensation efficiency is remarkably improved by utilizing a dropwise condensation heat dissipation mechanism of the super-hydrophobic surface; the surface of the area of the second condensation section of the lower cover plate is set to be of a super-hydrophilic conical micro-nano structure, so that the functions of collecting and transporting condensed water are optimized, and water resistance is reduced.
Further, the thickness of the soaking plate (VC) is 0.1-0.4mm, and the thickness of the lower cover plate is 50-80% of the thickness of the soaking plate (VC).
Further, the super-hydrophilic conical micro-nano structure is a square periodic distribution micro-conical array, and a high surface energy coating is arranged on the surface of the super-hydrophilic conical micro-nano structure; the super-hydrophobic tapered micro-nano structure is a square periodic distribution micro-cone array, and a low surface energy coating is arranged on the surface of the super-hydrophobic tapered micro-nano structure; and the distance between every two micrometer cones is 10-100 μm, the diameter is 1-80 μm, and the inclination is 10-35 deg.
Further, the super-hydrophilic cavity-shaped micro-nano structure is a rectangular cavity, and a high-surface coating is arranged on the surface of the super-hydrophilic cavity-shaped micro-nano structure; a certain number of support columns are arranged in the middle of the rectangular cavity.
Further, the super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure is a wedge-shaped groove array distributed in parallel along the length direction of the lower cover plate, and a high-surface-energy coating is arranged on the surface of the super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure; the angle of the wedge-shaped groove is 5-35 degrees, and the cross section of the wedge-shaped groove is crescent; the short side of the wedge-shaped groove is positioned in the evaporation section, and the long side of the wedge-shaped groove is positioned in the condensation section; the width of the wedge-shaped groove is 30-100 nm.
Further, the super-hydrophilic equal-width groove micro-nano structure is a rectangular groove array distributed in parallel along the length direction of the upper cover plate, and a high surface energy coating is arranged on the surface of the groove array; the cross section of the rectangular groove is crescent, and the width of the rectangular groove is 50-100 nm.
Further, the height of the micrometer cone, the depth of the rectangular cavity and the depth of the wedge-shaped groove and the equal-width groove are 10% -70% of the thickness of the plate, nanometer ripples or particles are distributed on the surface of the micrometer cone, the inner surface of the rectangular cavity and the inner surfaces of the wedge-shaped groove and the equal-width groove, and the size of the nanometer ripples or particles is 100-900 nm.
Further, the high surface energy coating is an oxide coating such as SiO2 or TiO 2.
Further, the low surface energy coating is a fluorinated coating.
Further, the upper cover plate and the lower cover plate are made of one of red copper, copper alloy, aluminum alloy and stainless steel.
Further, the upper cover plate and the lower cover plate are packaged by laser welding to form a soaking plate.
The invention also provides a preparation method of the partition-optimized 0.1-0.4mm ultrathin VC, which comprises the following steps:
1) carrying out pretreatment such as cutting, cleaning and the like on the upper cover plate and the lower cover plate;
2) compiling the scanning area of the ultrafast laser into various corresponding shapes according to the shape requirements of each partition structure of the upper cover plate and the lower cover plate, and performing preparation work in the shape areas;
3) focusing ultrafast laser on the surface of each partition structure area, optimizing the average power, single pulse energy, repetition frequency, focal spot size, scanning speed, action time, scanning frequency and process parameters of a scanning path of the ultrafast laser, enabling the energy flux density of a light beam in a laser action area to be higher than the ablation threshold value of a cover plate material of the soaking plate, generating vaporization evaporation removal of the material based on an ablation mechanism, forming corresponding micro-nano structures corresponding to each partition structure, and forming nano-corrugated/nano-granular shapes on the surface of each micro-nano structure based on the ablation and induction mechanism of the ultrafast laser;
4) correspondingly performing high surface energy treatment on the surface of each partition structure prepared in the step 3) to form a super-hydrophilic/super-hydrophobic micro-nano structure;
5) sequentially carrying out ultrasonic cleaning, purging and drying on the prepared super-hydrophilic/super-hydrophobic micro-nano structure, and then carrying out vacuum packaging to obtain the upper cover plate and the lower cover plate with partition structures and optimized functions;
6) and (3) packaging the upper cover plate and the lower cover plate with the partition structure and function optimization obtained in the step 5) by laser welding, so as to obtain the 0.1-0.4mm ultrathin VC with the partition structure and function optimization.
Compared with the prior art, the invention has the following technical effects:
1) the invention is specially used for ultrathin soaking plates (VC) and heat pipes with the thickness of 0.1-0.4mm, and as is known, when the thicknesses of the soaking plates and the heat pipes are reduced to be below 0.4mm, the capillary performance is remarkably reduced, the water resistance and the air resistance are remarkably improved, and the heat transfer efficiency is rapidly reduced. The invention simultaneously optimizes the partitioned structure and function of the evaporation section, the heat insulation section and the condensation section of the upper cover plate and the lower cover plate, namely, the second evaporation section area of the lower cover plate utilizes a high-temperature bubble nucleation evaporation heat dissipation mechanism with a super-hydrophilic surface to obviously improve the evaporation capacity. Research shows that when the temperature is higher than 100 ℃ for high-temperature evaporation, the super-hydrophilic surface can continuously generate a large amount of bubbles to quickly separate from the surface, so that the heat dissipation is improved, and other surfaces can form a water film to cover the high-temperature surface to block the heat flow dissipation. At the same temperature, the heat dissipation heat flux of the super-hydrophilic surface is improved by dozens of times compared with that of the hydrophobic surface or the super-hydrophobic surface. The super-hydrophilic structure of the lower cover plate simultaneously forms strong liquid absorption capacity, so that the liquid absorption capacity of the liquid absorption core of the micro-nano structure is optimized. The first evaporation section area of the upper cover plate adopts a super-hydrophilic cavity-shaped micro-nano structure, so that the vapor resistance of vapor generated by evaporation is greatly reduced, and the vapor is rapidly led out. The second heat insulation section area of the lower cover plate adopts a super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure, and is a wedge-shaped micro-nano channel structure, because the diameters of the two ends of a wedge are different, a surface tension and Laplace pressure difference can be formed, water is automatically driven from the part with the larger diameter to the part with the smaller diameter, and a driving force is superposed on the basis of the super-hydrophilic powerful capillary force, so that the transmission capacity and efficiency of liquid from a condensation section to an evaporation section can be greatly improved; the first insulation section area of upper cover plate adopts super hydrophilic aequilate slot micro-nano structure, has further promoted bubble nucleation heat-sinking capability, reduces the steam resistance simultaneously, improves steam and transports efficiency. The regional surface of first condensation section of upper cover plate adopts super hydrophobic toper micro-nano structure, utilizes super hydrophobic surface's drip form condensation heat dissipation mechanism to show and promotes condensation efficiency, and research shows, super hydrophobic surface is when the condensation, and the water droplet will become the drip form, can appear jumping the drop phenomenon simultaneously, and the water droplet can break away from the surface fast, and the water film can appear on conventional surface, hinders the condensation and goes on, and super hydrophobic surface's condensation efficiency ratio is usually than normal metallic membranous condensation efficiency promotion more than 10 times. The super-hydrophilic conical micro-nano structure on the surface of the second condensation section area of the lower cover plate can optimize the functions of condensed water collection and output and reduce water resistance. Due to the partition structure and function optimization effect of the upper cover plate and the lower cover plate, particularly the micro-nano structure on the surface of each section, the functions of the evaporation section, the heat insulation section and the condensation section are all in the optimal state, the heat dissipation capacity of the soaking plate is fully developed, and even if the thickness of the soaking plate is reduced to the limit thickness of 0.1-0.4mm, the good heat dissipation capacity can be still maintained, and even the performance of the conventional soaking plate with larger thickness is exceeded.
2) According to the invention, the evaporation section, the heat insulation section and the condensation section of the upper cover plate and the lower cover plate are prepared by high-power picosecond laser or femtosecond laser in a partition function optimization manner, laser beams can control scanning galvanometers through computer programming, different structures of different areas in the upper cover plate and the lower cover plate are prepared in one step, patterns with almost any shapes can be prepared, and the patterns of all channels can be designed and realized, so that the method is a flexible and efficient preparation method; by controlling the technological parameters such as energy flux density, scanning speed and the like of the laser beam, the depths of various micro-nano structures can be accurately controlled, and the depths of a water channel and a steam channel can be accurately controlled, so that the steam cavity structure and the liquid cavity structure and the volume distribution in the soaking plate can be regulated, controlled and optimized, and the good capillary water absorption performance, low water resistance and low thermal resistance of the soaking plate are ensured; the laser preparation process has stable process, high repeatability and high yield, and is a practical and reliable preparation method; by improving the laser power and adopting various measures to improve the processing speed, the micro-nano structure is prepared by the laser in one step, and the functions of the soaking plate are optimized in a partition mode, so that the preparation method is efficient and controllable in cost. The process for preparing the liquid absorption core by the laser method has the advantages of few steps, short flow, high efficiency, good structural consistency, high stability and good comprehensive performance, and can achieve the lowest heat pipe thickness and the optimal heat dissipation effect.
3) The upper cover plate and the lower cover plate of the Vapor Chamber (VC) are formed by laser welding and packaging, the laser welding quality is good, and a welding seam is well formed, smooth and neat, has no welding leakage and is free of defects; the laser welding speed is high, and compared with the conventional universal high-temperature brazing process, the welding efficiency is greatly improved; the laser welding process is simple, the requirements on the previous process and the next process are low, the brazing high-temperature heating requirement of 700-800 ℃ is not required, the manufacturing flow of the soaking plate can be greatly simplified, the manufacturing cost is reduced, the manufacturing efficiency is improved, and the welding quality stability is improved; the laser welding overcomes the influence of high-temperature heating on the capillary structure and the performance of the liquid absorption core, and can realize a stable and reliable vapor chamber; the thickness of the brazing filler metal is not increased by laser welding, the thickness of the soaking plate is completely determined by the thicknesses of the upper cover plate and the lower cover plate, and the thickness of the soaking plate can be reduced to the minimum. Therefore, laser welding has a significant technical advance over conventional high temperature brazing.
Drawings
FIG. 1 is a schematic structural diagram of a partition-optimized 0.1-0.4mm ultra-thin VC of the present invention;
FIG. 2 is a schematic structural diagram of a partition-optimized 0.1-0.4mm ultra-thin VC upper cover plate according to the present invention;
FIG. 3 is a schematic structural diagram of a sub-area optimized 0.1-0.4mm ultra-thin VC lower cover plate according to the present invention;
in the figure: 1. an upper cover plate; 11. a first evaporation section; 12. a first insulating section; 13. a first condensing section; 2. a lower cover plate; 21. a second evaporation section; 22. a second adiabatic section; 23. a second condensation section.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
An optimized 0.1-0.4mm ultra-thin VC in subareas comprises an upper cover plate 1 and a lower cover plate 2, wherein the upper cover plate 1 and the lower cover plate 2 are connected by laser welding; the upper cover plate 1 comprises a first evaporation section 11, a first heat insulation section 12 and a first condensation section 13; the surface of the area of the first evaporation section 11 is provided with a super-hydrophilic cavity-shaped micro-nano structure; the surface of the area of the first insulating section 12 is provided with a super-hydrophilic equal-width groove micro-nano structure; the surface of the area of the first condensation section 13 is provided with a super-hydrophobic conical micro-nano structure; the lower cover plate 2 comprises a second evaporation section 21, a second adiabatic section 22 and a second condensation section 23; the surface of the area of the second evaporation section 21 is provided with a super-hydrophilic conical micro-nano structure; the surface of the area of the second heat-insulating section 22 is provided with a super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure; the surface of the area of the second condensation section 23 is provided with a super-hydrophilic conical micro-nano structure; the thickness of the ultrathin VC is 0.1mm-0.4mm, and the thickness of the lower cover plate 2 is 50% -80% of that of the ultrathin VC.
The super-hydrophilic conical micro-nano structure is a square periodic distribution micro-conical array, and a high surface energy coating is arranged on the surface of the super-hydrophilic conical micro-nano structure; the super-hydrophobic tapered micro-nano structure is a square periodic distribution micro-cone array, and a low surface energy coating is arranged on the surface of the super-hydrophobic tapered micro-nano structure; and the pitch of each micrometer cone is 10-100 μm, the diameter is 1-80 μm, and the inclination is 10-35 deg.
The super-hydrophilic cavity-shaped micro-nano structure is a rectangular cavity, and the surface of the super-hydrophilic cavity-shaped micro-nano structure is provided with a high surface coating; a certain number of support columns are arranged in the middle of the rectangular cavity.
The super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure is a wedge-shaped groove array distributed in parallel along the length direction of the lower cover plate 2, and a high surface energy coating is arranged on the surface of the super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure; the angle of the wedge-shaped groove is 5-35 degrees, and the cross section of the wedge-shaped groove is crescent; the short side of the wedge-shaped groove is positioned in the evaporation section, and the long side of the wedge-shaped groove is positioned in the condensation section; the width of the wedge-shaped groove is 30-100 nm.
The super-hydrophilic equal-width groove micro-nano structure is a rectangular groove array distributed in parallel along the length direction of the upper cover plate 1, and a high surface energy coating is arranged on the surface of the groove array; the cross section of the rectangular groove is crescent, and the width of the rectangular groove is 50-100 nm.
The height of the micrometer cone, the depth of the rectangular cavity and the depth of the wedge-shaped groove and the equal-width groove are 10% -70% of the thickness of the plate, nanometer ripples or particles are distributed on the surface of the micrometer cone, the inner surface of the rectangular cavity and the inner surfaces of the wedge-shaped groove and the equal-width groove, and the size of the nanometer ripples or particles is 100-900 nm.
In this embodiment, the high surface energy coating is an oxide coating such as SiO2 or TiO 2.
In this embodiment, the low surface energy coating is a fluorinated coating.
In other embodiments, the material used for the upper cover plate 1 and the lower cover plate 2 is one of red copper, copper alloy, aluminum alloy, and stainless steel.
In other embodiments, the upper and lower cover plates 1 and 2 are packaged by laser welding to form a heat spreader.
In other embodiments, the present invention further provides a method for preparing a partition-optimized 0.1-0.4mm ultra-thin VC, comprising the steps of:
1) carrying out pretreatment such as cutting, cleaning and the like on the upper cover plate 1 and the lower cover plate 2;
2) compiling the scanning area of the ultrafast laser into various corresponding shapes according to the shape requirements of each partition structure of the upper cover plate 1 and the lower cover plate 2, and performing preparation work in the shape areas;
3) focusing ultrafast laser on the surface of each partition structure area, optimizing the average power, single pulse energy, repetition frequency, focal spot size, scanning speed, action time, scanning frequency and process parameters of a scanning path of the ultrafast laser, enabling the energy flux density of a light beam in a laser action area to be higher than the ablation threshold value of a cover plate material of the soaking plate, generating vaporization evaporation removal of the material based on an ablation mechanism, forming corresponding micro-nano structures corresponding to each partition structure, and forming nano-corrugated/nano-granular shapes on the surface of each micro-nano structure based on the ablation and induction mechanism of the ultrafast laser;
4) correspondingly performing high surface energy treatment on the surface of each partition structure prepared in the step 3) to form a super-hydrophilic/super-hydrophobic micro-nano structure;
5) sequentially carrying out ultrasonic cleaning, purging and drying on the prepared super-hydrophilic/super-hydrophobic micro-nano structure, and then carrying out vacuum packaging to obtain the upper cover plate 1 and the lower cover plate 2 with partition structures and optimized functions;
6) and (3) packaging the upper cover plate 1 and the lower cover plate 2 with the partition structure and function optimization obtained in the step 5) by laser welding, so as to obtain the 0.1-0.4mm ultrathin VC with the partition structure and function optimization.
Compared with the prior art, the invention has the following technical effects:
1) the invention is specially used for 0.1-0.4mm ultrathin VC and heat pipes, and as is known, when the thicknesses of a soaking plate and the heat pipe are reduced to be below 0.4mm, the capillary performance is remarkably reduced, the water resistance and the air resistance are remarkably improved, and the heat transfer efficiency is rapidly reduced. The invention simultaneously optimizes the partitioned structure and function of the evaporation section, the heat insulation section and the condensation section of the upper cover plate and the lower cover plate, namely, the second evaporation section area of the lower cover plate utilizes a high-temperature bubble nucleation evaporation heat dissipation mechanism with a super-hydrophilic surface to obviously improve the evaporation capacity. Research shows that when the temperature is higher than 100 ℃ for high-temperature evaporation, the super-hydrophilic surface can continuously generate a large amount of bubbles to quickly separate from the surface, so that the heat dissipation is improved, and other surfaces can form a water film to cover the high-temperature surface to block the heat flow dissipation. At the same temperature, the heat dissipation heat flux of the super-hydrophilic surface is improved by dozens of times compared with that of the hydrophobic surface or the super-hydrophobic surface. The super-hydrophilic structure of the lower cover plate simultaneously forms strong liquid absorption capacity, so that the liquid absorption capacity of the liquid absorption core of the micro-nano structure is optimized. The first evaporation section area of the upper cover plate adopts a super-hydrophilic cavity-shaped micro-nano structure, so that the vapor resistance of vapor generated by evaporation is greatly reduced, and the vapor is rapidly led out. The second heat insulation section area of the lower cover plate adopts a super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure, and is a wedge-shaped micro-nano channel structure, because the diameters of the two ends of a wedge are different, a surface tension and Laplace pressure difference can be formed, water is automatically driven from the part with the larger diameter to the part with the smaller diameter, and a driving force is superposed on the basis of the super-hydrophilic powerful capillary force, so that the transmission capacity and efficiency of liquid from a condensation section to an evaporation section can be greatly improved; the first insulation section area of upper cover plate adopts super hydrophilic aequilate slot micro-nano structure, has further promoted bubble nucleation heat-sinking capability, reduces the steam resistance simultaneously, improves steam and transports efficiency. The regional surface of first condensation section of upper cover plate adopts super hydrophobic toper micro-nano structure, utilizes super hydrophobic surface's drip form condensation heat dissipation mechanism to show and promotes condensation efficiency, and research shows, super hydrophobic surface is when the condensation, and the water droplet will become the drip form, can appear jumping the drop phenomenon simultaneously, and the water droplet can break away from the surface fast, and the water film can appear on conventional surface, hinders the condensation and goes on, and super hydrophobic surface's condensation efficiency ratio is usually than normal metallic membranous condensation efficiency promotion more than 10 times. The super-hydrophilic conical micro-nano structure on the surface of the second condensation section area of the lower cover plate can optimize the functions of condensed water collection and output and reduce water resistance. Due to the partition structure and function optimization effect of the upper cover plate and the lower cover plate, particularly the micro-nano structure on the surface of each section, the functions of the evaporation section, the heat insulation section and the condensation section are all in the optimal state, the heat dissipation capacity of the soaking plate is fully developed, and even if the thickness of the soaking plate is reduced to the limit thickness of 0.1-0.4mm, the good heat dissipation capacity can be still maintained, and even the performance of the conventional soaking plate with larger thickness is exceeded.
2) According to the invention, the evaporation section, the heat insulation section and the condensation section of the upper cover plate and the lower cover plate are prepared by high-power picosecond laser or femtosecond laser in a partition function optimization manner, laser beams can control scanning galvanometers through computer programming, different structures of different areas in the upper cover plate and the lower cover plate are prepared in one step, patterns with almost any shapes can be prepared, and the patterns of all channels can be designed and realized, so that the method is a flexible and efficient preparation method; by controlling the technological parameters such as energy flux density, scanning speed and the like of the laser beam, the depths of various micro-nano structures can be accurately controlled, and the depths of a water channel and a steam channel can be accurately controlled, so that the steam cavity structure and the liquid cavity structure and the volume distribution in the soaking plate can be regulated, controlled and optimized, and the good capillary water absorption performance, low water resistance and low thermal resistance of the soaking plate are ensured; the laser preparation process has stable process, high repeatability and high yield, and is a practical and reliable preparation method; by improving the laser power and adopting various measures to improve the processing speed, the micro-nano structure is prepared by the laser in one step, and the functions of the soaking plate are optimized in a partition mode, so that the preparation method is efficient and controllable in cost. The process for preparing the liquid absorption core by the laser method has the advantages of few steps, short flow, high efficiency, good structural consistency, high stability and good comprehensive performance, and can achieve the lowest heat pipe thickness and the optimal heat dissipation effect.
3) The upper cover plate and the lower cover plate of the ultrathin VC are formed by laser welding and packaging, the laser welding quality is good, the weld joint is formed well, and the weld joint is smooth and neat, has no missing weld and is free of defects; the laser welding speed is high, and compared with the conventional universal high-temperature brazing process, the welding efficiency is greatly improved; the laser welding process is simple, the requirements on the previous process and the next process are low, the brazing high-temperature heating requirement of 700-800 ℃ is not required, the manufacturing flow of the soaking plate can be greatly simplified, the manufacturing cost is reduced, the manufacturing efficiency is improved, and the welding quality stability is improved; the laser welding overcomes the influence of high-temperature heating on the capillary structure and the performance of the liquid absorption core, and can realize a stable and reliable vapor chamber; the thickness of the brazing filler metal is not increased by laser welding, the thickness of the soaking plate is completely determined by the thicknesses of the upper cover plate and the lower cover plate, and the thickness of the soaking plate can be reduced to the minimum. Therefore, laser welding has a significant technical advance over conventional high temperature brazing.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the technical scope of the present invention, so that any minor modifications, equivalent changes and modifications made to the above embodiment according to the technical spirit of the present invention are within the technical scope of the present invention.
Claims (9)
1. The partition-optimized 0.1-0.4mm ultrathin VC comprises an upper cover plate (1) and a lower cover plate (2), and is characterized in that the upper cover plate (1) and the lower cover plate (2) are connected by laser welding;
the upper cover plate (1) comprises a first evaporation section (11), a first heat insulation section (12) and a first condensation section (13); the surface of the area of the first evaporation section (11) is provided with a super-hydrophilic cavity-shaped micro-nano structure; the surface of the first insulation section (12) area is provided with a super-hydrophilic equal-width groove micro-nano structure; the surface of the area of the first condensation section (13) is set to be a super-hydrophobic conical micro-nano structure;
the lower cover plate (2) comprises a second evaporation section (21), a second heat insulation section (22) and a second condensation section (23); the surface of the area of the second evaporation section (21) is provided with a super-hydrophilic conical micro-nano structure; the surface of the second heat-insulating section (22) area is provided with a super-hydrophilic cactus-imitating wedge-shaped groove micro-nano structure; the surface of the second condensation section (23) area is set to be a super-hydrophilic conical micro-nano structure.
2. The regionally optimized 0.1-0.4mm ultra-thin VC according to claim 1, wherein the thickness of the ultra-thin VC is 0.1-0.4mm, and the thickness of the lower cover plate (2) is 50-80% of the thickness of the ultra-thin VC.
3. The regionally optimized 0.1-0.4mm ultrathin VC according to claim 1, wherein the super-hydrophilic conical micro-nano structure is a square periodic distribution microcone array, and the surface of the super-hydrophilic conical micro-nano structure is provided with a high-surface-energy coating; the super-hydrophobic tapered micro-nano structure is a square periodic distribution micro-cone array, and a low surface energy coating is arranged on the surface of the super-hydrophobic tapered micro-nano structure; and the distance between every two micrometer cones is 10-100 μm, the diameter is 1-80 μm, and the inclination is 10-35 deg.
4. The regionally optimized 0.1-0.4mm ultrathin VC according to claim 1, wherein the super-hydrophilic cavity-shaped micro-nano structure is a rectangular cavity, the surface of the super-hydrophilic cavity-shaped micro-nano structure is provided with a high-surface coating, and a certain number of supporting columns are arranged in the middle of the rectangular cavity.
5. The regionally optimized 0.1-0.4mm ultrathin VC according to claim 1, wherein the super-hydrophilic cactus-like wedge-shaped groove micro-nano structure is a wedge-shaped groove array distributed in parallel along the length direction of the lower cover plate (2), and the surface of the super-hydrophilic cactus-like wedge-shaped groove micro-nano structure is provided with a high surface energy coating; the angle of the wedge-shaped groove is 5-35 degrees, and the cross section of the wedge-shaped groove is crescent; the short side of the wedge-shaped groove is positioned in the evaporation section, the long side of the wedge-shaped groove is positioned in the condensation section, and the width of the wedge-shaped groove is 30-100 nm.
6. The VC with the optimized subareas of 0.1-0.4mm is characterized in that the super-hydrophilic equal-width groove micro-nano structure is a rectangular groove array distributed in parallel along the length direction of the upper cover plate (1), and the surface of the super-hydrophilic equal-width groove micro-nano structure is provided with a high surface energy coating; the cross section of the rectangular groove is crescent, and the width of the rectangular groove is 50-100 nm.
7. The regionally optimized 0.1-0.4mm ultrathin VC as claimed in any one of claims 3-7, wherein the height of the microcone, the depth of the rectangular cavity, and the depths of the wedge-shaped groove and the equal-width groove are all 10% -70% of the thickness of the plate, nano-corrugations or particles are distributed on the surface of the microcone, the inner surface of the rectangular cavity, and the inner surfaces of the wedge-shaped groove and the equal-width groove, and the size of the nano-corrugations or particles is 100nm and 900 nm.
8. The zone optimized 0.1-0.4mm ultra-thin VC according to any one of claims 3-7, wherein the high surface energy coating is an oxide coating such as SiO2 or TiO 2; the low surface energy coating is a fluorinated coating.
9. A preparation method of 0.1-0.4mm ultrathin VC with partition optimization is characterized by comprising the following steps:
1) carrying out pretreatment such as cutting and cleaning on the upper cover plate (1) and the lower cover plate (2);
2) compiling a scanning area of ultrafast laser into corresponding various shapes according to the shape requirements of each partition structure of the upper cover plate (1) and the lower cover plate (2), and performing preparation work in the shape areas;
3) focusing ultrafast laser on the surface of each partition structure area, optimizing the average power, single pulse energy, repetition frequency, focal spot size, scanning speed, action time, scanning frequency and process parameters of a scanning path of the ultrafast laser, enabling the energy flux density of a light beam in a laser action area to be higher than the ablation threshold value of a cover plate material of the soaking plate, generating vaporization evaporation removal of the material based on an ablation mechanism, forming corresponding micro-nano structures corresponding to each partition structure, and forming nano-corrugated/nano-granular shapes on the surface of each micro-nano structure based on the ablation and induction mechanism of the ultrafast laser;
4) correspondingly performing high surface energy treatment on the surface of each partition structure prepared in the step 3) to form a super-hydrophilic/super-hydrophobic micro-nano structure;
5) sequentially carrying out ultrasonic cleaning, blowing and drying on the prepared super-hydrophilic/super-hydrophobic micro-nano structure, and then carrying out vacuum packaging to obtain the upper cover plate (1) and the lower cover plate (2) with partition structures and optimized functions;
6) and (3) packaging the upper cover plate (1) and the lower cover plate (2) with the partition structure and function optimization obtained in the step 5) by laser welding, so as to obtain the 0.1-0.4mm ultrathin VC with the partition structure and function optimization.
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